CN110349886B - Large-area perovskite solar cell preparation device and preparation method - Google Patents
Large-area perovskite solar cell preparation device and preparation method Download PDFInfo
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Abstract
The invention provides a preparation device and a preparation method of a large-area perovskite solar cell, wherein the device sequentially comprises the following components: FTO marking off P1 module, electron transport layer coating module, infrared radiation module, electron transport layer cooling module, perovskite precursor solution slit coating module, perovskite wet film vacuum distillation module, compound light wave annealing module, perovskite layer cooling module, hole transport layer coating module, hole layer weathers module, machinery marking off P2 module, electrode evaporation module and machinery marking off P3 module, wherein, perovskite wet film vacuum distillation module includes: the solar cell comprises a cavity, a first transfer door, a second transfer door, a pneumatic piston and a plurality of groups of booster pump devices connected in parallel, wherein the first transfer door and the second transfer door are respectively arranged on two sides of the cavity and used for an FTO glass carrier to pass through, the pneumatic piston is hermetically connected with the cavity, and the plurality of groups of booster pump devices connected in parallel are communicated with the cavity.
Description
Technical Field
The invention relates to the technical field of solar cell preparation, in particular to a preparation device and a preparation method of a large-area perovskite solar cell.
Background
The photoelectric conversion efficiency of the perovskite solar cell is increased from 3.8% to 24.2% in 10 years, and the perovskite solar cell has industrial value, but most of the preparation methods of the perovskite solar cell in the current experiment, particularly the preparation methods of the perovskite solar cell with the photoelectric conversion efficiency exceeding 20%, mostly adopt a one-step anti-solvent method, a two-step spin coating method and the like, but the spin coating method cannot realize large-area production. Although methods for producing large-area perovskite, such as CVD method, slit coating method, doctor blading method, solution extrusion method, etc., have been developed, these methods can produce large-area perovskite thin films, but the quality of the thin films is still lower than that of spin coating method, such as CVD method, which has high requirements for precise controllability of film growth.
The prior art provides blade coating equipment applied to preparation of perovskite batteries and a method for preparing a thin film, and the blade coating equipment can be used for preparing a large-area thin film or a laminated structure; the prior art also provides a preparation method of the flexible large-area perovskite solar cell based on a roller coating process, which realizes the preparation of the flexible large-area perovskite solar cell by adjusting the roller coating process; however, the above two preparation methods do not mention the critical issue of how to handle the wet film after coating. The prior art also provides a device for preparing a perovskite layer, which uses a vacuum buffer tank to realize rapid vacuum, and although rapid pressure reduction and film quality improvement can be realized, according to an ideal gas equation, if the atmospheric pressure is reduced to 10Pa, the volume of the buffer tank is at least 1 ten thousand times larger than that of a vacuum cavity, and the large buffer tank needs long time to be vacuumized to the order of 10Pa, thus obviously not being suitable for industrial production.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a large-area perovskite solar cell preparation device and a preparation method, which can treat a wet film and can realize large-scale production of perovskite solar cells.
The present invention achieves the above-described object by the following technical means.
A large-area perovskite solar cell preparation facilities includes in proper order:
the device comprises an FTO scribing P1 module, an electronic transmission layer coating module, an infrared radiation module, an electronic transmission layer cooling module, a perovskite precursor solution slit coating module, a perovskite wet film reduced pressure distillation module, a composite light wave annealing module, a perovskite layer cooling module, a hole transmission layer coating module, a hole layer blow-drying module, a mechanical scribing P2 module, an electrode evaporation module and a mechanical scribing P3 module, wherein an FTO glass carrier sequentially passes through the modules;
the first transfer gate and the second transfer gate are respectively arranged at two sides of the cavity and used for allowing the FTO glass carrier to pass through; the pneumatic piston is connected with the cavity in a sealing mode and can move up and down along the inner wall of the cavity, and the multiple groups of booster pump devices connected in parallel are communicated with the cavity.
Preferably, a porous baffle is arranged in the perovskite wet film reduced pressure distillation module and is positioned between the inner wall of the bottom of the cavity and the pneumatic piston.
Preferably, the infrared radiation module comprises an infrared lamp array device, and the infrared lamp array device comprises a plurality of infrared lamps.
Preferably, the composite light wave annealing module comprises a composite light wave plate, and the composite light wave plate can emit infrared light with at least two wavelengths.
Preferably, the FTO scribe P1 module includes a laser for scribing the FTO glass carrier.
Preferably, the electron transport layer coating module and the hole transport layer coating module each include a slit coating apparatus.
Preferably, the electron transport layer cooling module, the perovskite layer cooling module and the hole layer blow-drying module comprise cooling devices.
Preferably, the cooling device is cooled by high-speed nitrogen.
Preferably, the electrode evaporation module adopts a linear evaporation source.
A method for preparing a perovskite solar cell by using the preparation device comprises the following steps:
s1, placing the FTO glass carrier on a transfer roller, and scribing the P1 isolation wire of the FTO glass carrier by using the FTO scribing P1 module;
s2, moving the FTO glass carrier with the scribed P1 isolation line to a slit coating device, coating an electronic transmission layer on the surface of the FTO glass carrier, annealing by an infrared radiation module, and cooling the electronic transmission layer by an electronic transmission layer cooling module to obtain a sample I;
s3, moving a sample I to the perovskite precursor solution slit coating module, performing coating operation on the perovskite precursor solution, obtaining a perovskite wet film on the surface of an electronic transmission layer, then enabling an FTO glass carrier to enter the cavity through a first transfer gate, starting a plurality of groups of booster pump devices connected in parallel to perform rapid vacuum pumping, enabling the pneumatic piston to rapidly move upwards after a period of time, and changing the perovskite wet film into an intermediate state perovskite film after a period of time to obtain a sample II;
s4, moving the sample II to a composite light wave annealing module, annealing by infrared light emitted by the composite light wave annealing module, forming a perovskite film on the surface of the sample II, and cooling the perovskite film by using a perovskite layer cooling module to obtain a sample III;
s5, moving the sample III to a hole transport layer coating module, coating a hole transport layer on the surface of the perovskite thin film, and then drying the hole transport layer by using a hole layer drying module to obtain a sample IV;
s6, moving the sample IV to a mechanical scribing P2 module, and scribing a P2 isolation line to obtain a sample V;
s7, moving the sample V to an electrode evaporation module, and evaporating the electrode by the electrode evaporation module through a linear evaporation source to obtain a sample VI;
s8, moving the sample VI to a mechanical scribing P3 module, and scribing a P3 isolation line.
The invention has the beneficial effects that:
1) according to the invention, the perovskite wet film reduced pressure distillation module is adopted, and the module can realize rapid vacuum pumping, so that the perovskite wet film can be better treated, and meanwhile, the large-scale production of the perovskite solar cell is realized, the operation is simple, the process operation time is saved, and the production efficiency is high.
2) According to the invention, the porous baffle is arranged in the perovskite wet film reduced pressure distillation module, so that uniform and rapid vacuum pumping can be realized, and the damage to the perovskite wet film is reduced or avoided.
3) The infrared radiation module of the invention adopts the infrared lamp array device, the thermal efficiency generated by a plurality of infrared lamps is higher, and the infrared radiation module is more beneficial to the rapid drying of the electron transmission layer.
4) The composite light wave annealing module can emit infrared light with at least two wavelengths, is beneficial to faster annealing of a perovskite wet film, and is convenient for controlling the thickness and uniformity of the film by a slit coating device.
Drawings
Fig. 1 is a schematic structural diagram of a large-area perovskite solar cell manufacturing apparatus according to a preferred embodiment of the present invention.
FTO scribe line P1 module; 2. an electron transport layer coating module; 3. an infrared radiation module; 4. an electron transport layer cooling module; 5. a perovskite precursor solution slit coating module; 6. a perovskite wet film reduced pressure distillation module; 7. a composite light wave annealing module; 8. a perovskite layer cooling module; 9. a hole transport layer coating module; 10. a cavity layer blow-drying module; 11. a mechanical scribe P2 module; 12. an electrode evaporation module; 13. a mechanical scribe P3 module; 101. a transfer roller; an FTO glass carrier; 103. a laser; 201. a slit coating device; 301. an infrared lamp array device; 401. a cooling device; 601. a cavity; 602. a first transfer gate; 603. a plurality of groups of parallel booster pump sets; 604. a corrugated hose; 605. a pneumatic piston; 606. a porous baffle; 607. a second pass gate; 701. a composite optical wave plate.
Detailed Description
The invention will be further described with reference to the following figures and specific examples, but the scope of the invention is not limited thereto.
The invention relates to a large-area perovskite solar cell preparation device, which sequentially comprises the following components: the device comprises an FTO scribing P1 module 1, an electron transport layer coating module 2, an infrared radiation module 3, an electron transport layer cooling module 4, a perovskite precursor solution slit coating module 5, a perovskite wet film reduced pressure distillation module 6, a composite light wave annealing module 7, a perovskite layer cooling module 8, a hole transport layer coating module 9, a hole layer drying module 10, a mechanical scribing P2 module 11, an electrode evaporation module 12 and a mechanical scribing P3 module 13, wherein the FTO glass carrier 102 sequentially passes through all process modules by using a transfer roller 101.
FTO scribe P1 module 1 scribes the FTO glass support 102 using a laser 103, and both the electron transport layer coating module 2 and the hole transport layer coating module 9 include a slot coating apparatus 201, the slot coating apparatus 201 facilitating the control of film thickness and uniformity.
The infrared radiation module 3 comprises an infrared lamp array device 301, the infrared lamp array device 301 is formed by assembling a plurality of groups of infrared lamps, the thermal efficiency is higher, the annealing of an electronic transmission layer can be completed more quickly, the annealing efficiency is higher, and an infrared radiation source can be a halogen lamp, a nickel-chromium-aluminum heating wire, a carbon crystal heating wire and the like.
The electron transport layer cooling module 4, the perovskite layer cooling module 8 and the hole layer blow-drying module 10 comprise a cooling device 401. Preferably, the cooling device 401 is cooled by high-speed nitrogen, and is cooled and blown dry by the high-speed nitrogen, so that the electron transport layer, the perovskite layer and the hole layer are cooled quickly and dried quickly.
The perovskite wet film reduced pressure distillation module 6 comprises: the system comprises a cavity 601, a first transfer door 602, a second transfer door 607, a pneumatic piston 605 and a plurality of sets of booster pump devices 603 connected in parallel, wherein the first transfer door 602 and the second transfer door 607 are respectively arranged at two sides of the cavity 601, can slide up and down along the cavity 601 and are used for allowing the FTO glass carriers 102 to pass through, when the FTO glass carriers 102 need to enter the cavity 601, the first transfer door 602 slides upwards to allow the FTO glass carriers 102 to pass through, then the first transfer door 602 slides downwards to allow the cavity 601 to slide and be sealed, and similarly, when the FTO glass carriers 102 need to be output from the cavity 601, the second transfer door 607 slides upwards to allow the FTO glass carriers 102 to pass through, and then the second transfer door 607 slides downwards to allow the cavity 601 to slide and be sealed; the pneumatic piston 605 is connected with the cavity 601 in a sealing manner and can move up and down along the inner wall of the cavity 601, and the multiple groups of parallel booster pump devices 603 penetrate through the pneumatic piston 605 through a corrugated hose 604 and are communicated with the cavity 601.
A porous baffle 606 is arranged in the perovskite wet film reduced pressure distillation module 6, the porous baffle 606 is located between the inner wall of the bottom of the cavity 601 and the pneumatic piston 605, and the aperture of the porous baffle 606 is 2-10 mm, so that the perovskite wet film reduced pressure distillation module has the function of better dividing air flow.
The electrode evaporation module 12 adopts a linear evaporation source.
The composite optical wave annealing module 7 includes a composite optical wave plate 701, the composite optical wave plate 701 can emit infrared light with at least two wavelengths, in this embodiment, the composite optical wave plate 701 has two different heating elements therein, and composite optical waves are realized through a specific filter, and the annealing process is intermittent. The composite optical wave plate 701 contains light sources with two wavelengths near 3um and 5.7um, so that rapid annealing can be realized, and the generation of a black phase perovskite film is promoted.
A preparation method of a large-area perovskite solar cell comprises the following steps:
s1, a piece of FTO glass carrier 102 with the thickness of 30 x 60 cm is subjected to laser scribing by a laser 103 to form P1 isolation lines, the line width is 100um, and the line spacing is 1 cm.
S2, the transfer roller 101 sends the cut FTO glass carrier 102 into an electronic transmission layer coating module 2, electronic transmission layer precursor solution is coated through a slit, the precursor solution is 3 wt% of tin oxide nanocrystal aqueous solution, the size of the nanocrystal is 10-15nm, after coating is completed, the substrate enters an infrared radiation module 3 for infrared annealing, an infrared lamp is used for radiating for 10s to remove the solvent of the electronic transmission layer of the battery, and then a cooling device 401 with high-speed nitrogen is used for cooling the electronic transmission layer.
S3, an FTO glass carrier 102 coated with an electron transport layer is transferred to a perovskite precursor solution slit coating module 5 through a transfer roller 101, the perovskite precursor solution is coated through a slit coating method, the perovskite precursor solution is composed of DMF (dimethyl formamide), DMSO (dimethyl sulfoxide), solute MAI (1.2M) and PbI2(1.2M), the perovskite precursor solution is sent into a cavity 601 after coating, a plurality of groups of booster pump devices 603 connected in parallel are started for rapid vacuum pumping, after 10S, a pneumatic piston 605 moves upwards rapidly to accelerate the pressure reduction speed in the cavity, after 15S, the pressure of the cavity 601 is reduced to about 5Pa, at the moment, the coated wet film becomes an intermediate-state perovskite film, then the pressure reduction distillation cavity is immediately deflated to reach the atmospheric pressure, and the substrate is transferred to a composite light wave annealing module 7 for a composite light wave annealing process.
And S4, turning on the composite light wave lamp in the composite light wave plate 701 for 5S, turning off the composite light wave lamp for 10S, circulating the processes for 4 times to form the perovskite thin film, and then quickly cooling the perovskite thin film through a cooling device 401 with high-speed nitrogen.
S5, coating the hole transport layer by using a slit coating device 201, coating a hole material precursor solution, such as Sprio, with the concentration of 1M on the perovskite thin film through a slit, and then drying the hole transport layer by using a cooling device 401 with high-speed nitrogen.
S6, transferring the module 11 such as a mechanical scribing P2 by using a transfer roller 101, transferring the module to a mechanical scribing mechanism, scribing a second P2 isolated line at an interval of 100um with the P1 isolated line, scribing an electron transport layer, a perovskite layer and a hole transport layer by the P2 isolated line, and reserving an FTO layer
S7, finally, entering an electrode evaporation module 12, evaporating the metal electrode by using a linear evaporation source,
s8, scribing an isolation line P3 at an interval of 100um with P2, scribing a battery transmission layer, a perovskite layer, a hole transmission layer and electrodes by P3, reserving FTO, and packaging to form the perovskite component.
The present invention is not limited to the above-described embodiments, and any obvious improvements, substitutions or modifications can be made by those skilled in the art without departing from the spirit of the present invention.
Claims (9)
1. A large area perovskite solar cell preparation facilities which characterized in that includes in proper order:
the device comprises an FTO scribing P1 module (1), an electron transport layer coating module (2), an infrared radiation module (3), an electron transport layer cooling module (4), a perovskite precursor solution slit coating module (5), a perovskite wet film reduced pressure distillation module (6), a composite light wave annealing module (7), a perovskite layer cooling module (8), a hole transport layer coating module (9), a hole layer drying module (10), a mechanical scribing P2 module (11), an electrode evaporation module (12) and a mechanical scribing P3 module (13), wherein an FTO glass carrier (102) sequentially passes through the modules;
the infrared radiation module (3) comprises an infrared lamp array device (301), and the infrared lamp array device (301) comprises a plurality of infrared lamps;
the perovskite wet film reduced pressure distillation module (6) comprises:
the device comprises a cavity (601), a first transfer door (602), a second transfer door (607), a pneumatic piston (605) and a plurality of groups of booster pump devices (603) connected in parallel, wherein the first transfer door (602) and the second transfer door (607) are respectively arranged at two sides of the cavity (601) and used for allowing an FTO glass carrier (102) to pass through; the pneumatic piston (605) is connected with the cavity (601) in a sealing mode and can move up and down along the inner wall of the cavity (601), and the multiple groups of booster pump devices (603) connected in parallel are communicated with the cavity (601).
2. The large-area perovskite solar cell preparation device according to claim 1, wherein a porous baffle (606) is arranged in the perovskite wet film reduced pressure distillation module (6), and the porous baffle (606) is located between the inner wall of the bottom of the cavity (601) and the pneumatic piston (605).
3. The large area perovskite solar cell fabrication apparatus as claimed in claim 1, wherein the composite light wave annealing module (7) comprises a composite light wave plate (701), the composite light wave plate (701) being capable of emitting infrared light of at least two wavelengths.
4. The large area perovskite solar cell fabrication apparatus as claimed in claim 1, wherein the FTO scribe P1 module (1) comprises a laser (103) for scribing the FTO glass carrier (102).
5. The large area perovskite solar cell fabrication apparatus as claimed in claim 1, wherein the electron transport layer coating module (2) and the hole transport layer coating module (9) each comprise a slot coating apparatus (201).
6. The large area perovskite solar cell fabrication apparatus as claimed in claim 1, wherein the electron transport layer cooling module (4), the perovskite layer cooling module (8) and the hole layer blow drying module (10) each comprise a cooling apparatus (401).
7. The large area perovskite solar cell fabrication apparatus as claimed in claim 6, wherein the cooling means (401) is cooled with high speed nitrogen.
8. The large area perovskite solar cell fabrication apparatus as claimed in claim 1, wherein the electrode evaporation module (12) employs a linear evaporation source.
9. A method for producing a perovskite solar cell using the production apparatus according to claim 1, comprising the steps of:
s1, placing the FTO glass carrier (102) on a transfer roller (101), and scribing the P1 isolated line of the FTO glass carrier (102) by using the FTO scribing P1 module (1);
s2, moving the FTO glass carrier (102) with the scribed P1 isolation line to a slit coating device (201), coating an electron transmission layer on the surface of the FTO glass carrier (102), annealing by an infrared radiation module (3), and cooling the electron transmission layer by an electron transmission layer cooling module (4) to obtain a sample I;
s3, moving a sample I to the perovskite precursor solution slit coating module (5), obtaining a perovskite wet film on the surface of an electronic transmission layer after coating operation of the perovskite precursor solution is carried out, then enabling an FTO glass carrier (102) to enter a cavity (601) through a first transfer door (602), starting a plurality of groups of parallel booster pump devices (603) to carry out rapid vacuum pumping, enabling a pneumatic piston (605) to rapidly move upwards after a period of time, and changing the perovskite wet film into an intermediate state perovskite film after a period of time to obtain a sample II;
s4, moving the sample II to a composite light wave annealing module (7), annealing by infrared light emitted by the composite light wave annealing module (7), forming a perovskite film on the surface of the sample II, and cooling the perovskite film by a perovskite layer cooling module (8) to obtain a sample III;
s5, moving the sample III to a hole transport layer coating module (9), coating a hole transport layer on the surface of the perovskite thin film, and then drying the hole transport layer by using a hole layer drying module (10) to obtain a sample IV;
s6, moving the sample IV to a mechanical scribing P2 module (11), and scribing a P2 isolation line to obtain a sample V;
s7, moving the sample V to an electrode evaporation module (12), and evaporating the electrode by the electrode evaporation module (12) through a linear evaporation source to obtain a sample VI;
s8, moving the sample VI to a mechanical scribing P3 module (13) and scribing a P3 isolation line.
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| CN113130786A (en) * | 2019-12-31 | 2021-07-16 | Tcl集团股份有限公司 | Light emitting diode and preparation method thereof |
| CN112467042B (en) * | 2020-11-25 | 2022-12-20 | 西南石油大学 | Intelligent automatic production system for perovskite solar cell module |
| CN113571648B (en) * | 2021-07-02 | 2023-08-22 | 常州大学 | Device and method for preparing flexible perovskite and full perovskite laminated solar cell from reel to reel |
| CN113644209B (en) * | 2021-08-11 | 2024-02-02 | 无锡极电光能科技有限公司 | Perovskite film layer preparation method and device and perovskite solar cell |
| CN114388701B (en) * | 2022-01-17 | 2023-04-07 | 华能新能源股份有限公司 | Manufacturing method of perovskite battery |
| CN115915875B (en) * | 2022-05-05 | 2023-08-29 | 四川大学 | Preparation method of full-slit coated large-area perovskite solar cell |
| JP2024014771A (en) * | 2022-07-21 | 2024-02-01 | 東レエンジニアリング株式会社 | Perovskite film forming method and perovskite film forming apparatus |
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| A vacuum flash–assisted solution process for high-efficiency large-area perovskite solar cells;Xiong Li et al;《SCIENCE》;20160701;正文以及Supplementary Materials的"Materials and Methods"部分、附图1-4，S1-S8、Table 1-6 * |
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| CN110349886A (en) | 2019-10-18 |
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