CN114400256A - MOSFET device integrated with junction barrier Schottky - Google Patents

MOSFET device integrated with junction barrier Schottky Download PDF

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Publication number
CN114400256A
CN114400256A CN202210047638.5A CN202210047638A CN114400256A CN 114400256 A CN114400256 A CN 114400256A CN 202210047638 A CN202210047638 A CN 202210047638A CN 114400256 A CN114400256 A CN 114400256A
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mosfet
region
jbs
mosfet device
junction barrier
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于霄恬
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Haike Jiaxing Electric Power Technology Co ltd
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Haike Jiaxing Electric Power Technology Co ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
    • H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
    • H01L29/7803—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device
    • H01L29/7804—Vertical DMOS transistors, i.e. VDMOS transistors structurally associated with at least one other device the other device being a pn-junction diode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
    • H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
    • H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
    • H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]

Abstract

The invention discloses an MOSFET device integrated with junction barrier Schottky, belongs to the field of semiconductor manufacturing, and is used for solving the technical problem that the proportion of the Schottky in the MOSFET device cannot be flexibly controlled by an embedded MOSFET cell integrated with the junction barrier Schottky. The MOSFET device includes: the junction barrier Schottky JBS unit cell comprises an epitaxial layer, a plurality of MOSFET unit cells and a plurality of junction barrier JBS unit cells, wherein the MOSFET unit cells and the junction barrier JBS unit cells are distributed on the surface of the epitaxial layer; the MOSFET cells and the JBS cells are arranged according to a preset proportion; each MOSFET unit cell at least comprises a well region, a source electrode region and a high-doped P-type region; each JBS unit cell comprises a plurality of layers of annular high-doped P-type regions and Schottky regions formed between the annular high-doped P-type regions; the ion doping concentration of the JFET area is larger than or equal to that of the epitaxial layer, the width of the JFET area and the distance between the annular high-doping P-type areas of each layer take values in a preset interval, and therefore the MOSFET device has small conduction voltage drop and strong electric field shielding capacity.

Description

MOSFET device integrated with junction barrier Schottky
Technical Field
The application relates to the field of power diodes, in particular to a MOSFET device integrated with junction barrier Schottky.
Background
Basal plane dislocation exists in the silicon carbide crystal, and can be converted into stacking fault under certain conditions. When a body diode in a silicon carbide power MOSFET device is turned on, under bipolar operation, stacking faults can continue to expand due to electron-hole recombination, and bipolar degradation occurs. This phenomenon increases the on-state voltage resistance of the silicon carbide power MOSFET device, increases the leakage current in the blocking mode, and increases the on-state voltage drop of the body diode in the silicon carbide power MOSFET device, thereby reducing the reliability of the silicon carbide power MOSFET device.
In practical circuit applications, external anti-parallel schottky diodes are typically used to suppress the body diode in power MOSFET devices in order to avoid bipolar degradation. However, this approach increases the chip size and the unit price of the schottky diode is high, and thus the production of such a structure increases the cost of the power MOSFET device. A junction barrier schottky diode can be embedded into each cell unit in a power MOSFET device, thus reducing the overall chip size and cost. However, this embedded structure cannot flexibly control the schottky ratio in the MOSFET device, and the design flexibility is low.
Disclosure of Invention
The embodiment of the application provides an MOSFET device integrated with a junction barrier Schottky, which is used for solving the following technical problems: the embedded MOSFET unit cell of the integrated junction barrier Schottky can not flexibly control the proportion of the Schottky in the MOSFET device, and the design flexibility is low.
The embodiment of the application adopts the following technical scheme:
the embodiment of the application provides a MOSFET device of integrated junction barrier schottky, and the MOSFET device includes: the junction barrier Schottky JBS unit cell comprises an epitaxial layer and a plurality of MOSFET unit cells and junction barrier JBS unit cells which are arranged on the surface of the epitaxial layer; the epitaxial layer is an N-type semiconductor; the MOSFET cells and the JBS cells are arranged according to a preset proportion; each MOSFET unit cell comprises a well region, a source electrode region and a high-doped P-type region, wherein the well region is a P-type semiconductor, and the source electrode region is an N-type semiconductor; the source electrode region is positioned inside the well region and surrounds the high-doped P-type region; the ion implantation depth of the source electrode region is smaller than that of the well region, and the high-doped P-type region is in contact with the well region; the well region and the epitaxial layer form a first PN junction, and the well region and the source region form a second PN junction; each JBS unit cell comprises a plurality of layers of annular high-doped P-type regions and Schottky regions formed between the annular high-doped P-type regions; the annular highly doped P-type region and the epitaxial layer form a third PN junction; a first Junction Field Effect Transistor (JFET) area is formed between the well area of the MOSFET unit cell and the outer annular highly-doped P-type area of the adjacent JBS unit cell; a second JFET area is formed between the well region of the MOSFET unit cell and the well region of the adjacent MOSFET unit cell; the ion doping concentration of the first JFET area and the second JFET area is larger than or equal to that of the epitaxial layer, and the width of the first JFET area and the width of the second JFET area and the distance between the annular high-doping P-type areas are equal to values in the same preset interval.
According to the embodiment of the application, the Schottky (JBS) cells are embedded into the MOSFET cells, the JBS cells and the MOSFET cells are arranged according to a certain proportion to form a composite structure, the Schottky diode and the MOSFET device share one structure, the MOSFET device does not need to be externally connected with the Schottky diode in parallel, and the size of an integrated chip is reduced. And the composite structure can flexibly control the arrangement proportion of the two cells, thereby flexibly controlling the Schottky ratio in the MOSFET device and improving the design flexibility.
In one possible embodiment, the MOSFET cells and the JBS cells have the same shape, which is a regular polygon or a circle; a plurality of MOSFET unit cells are arranged around one JBS unit cell; a MOSFET cells are arranged between two adjacent JBS cells; wherein a is more than or equal to 1 and less than or equal to 100.
In one possible embodiment, the MOSFET device further includes a first contact metal; the first contact metal covers the surface of the high-doped P-type region in the well region and forms ohmic contact with the high-doped P-type region in the well region; a portion of the first contact metal contacts the source region to suppress parasitic bipolar transistor effects within the MOSFET device.
In one possible embodiment, the MOSFET device further comprises a second contact metal; the second contact metal covers the surface of the JBS unit cell and forms Schottky contact with a plurality of Schottky regions in the JBS unit cell; the first contact metal and the second contact metal are kept at a preset distance, so that the first contact metal and the second contact metal are respectively designed into ohmic contact and Schottky contact through different processes.
The embodiment of the application can more conveniently carry out different process treatments on two kinds of contact metals respectively by designing the two kinds of contact metals into separate structures without generating interference between the two kinds of contact metals, thereby reducing the manufacturing difficulty of MOSFET devices, improving the success rate of device processing and reducing the number of devices which fail to process.
In one possible embodiment, the MOSFET device further comprises an insulated gate oxide layer; the insulated gate oxide layer covers the source electrode area, the well area and the JFET area; the width of the insulating grid oxide layer covering the JFET area is larger than or equal to 0.1 micrometer and smaller than the width of the JFET area.
In one possible embodiment, the gate insulating oxide layer is covered with a gate conductive polysilicon.
In one possible embodiment, the insulating gate oxide layer and the gate conductive polysilicon are coated with an insulating dielectric layer.
In one possible embodiment, the insulating dielectric layer, the first contact metal and the second contact metal are covered with a source electrode; the source electrode is in contact with the first contact metal and the second contact metal; the insulating dielectric layer separates the insulating gate oxide layer and the gate conductive polysilicon from the source electrode.
In one possible embodiment, the MOSFET device further includes: a silicon carbide substrate located on a surface of the epitaxial layer on a side facing away from the cells; the silicon carbide substrate is an N-type semiconductor; the ion doping concentration in the silicon carbide substrate is higher than that in the epitaxial layer; and one surface of the silicon carbide substrate, which is far away from the epitaxial layer, is covered with a drain electrode of the MOSFET device.
In a possible embodiment, the predetermined interval is [0.8 μm to 5 μm ].
The MOSFET device integrated with the junction barrier Schottky has the polygonal or circular composite cellular design, better design flexibility can be realized, the total area of a higher JFET area can be realized, and the MOSFET device has lower specific on-resistance.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without creative efforts. In the drawings:
fig. 1 is a cross-sectional view of an active region of an integrated junction barrier schottky MOSFET device according to an embodiment of the present application;
fig. 2 is a schematic diagram of a composite structure of a regular hexagonal cell according to an embodiment of the present disclosure;
FIG. 3 is a schematic diagram of a circular cell composite structure according to an embodiment of the present disclosure;
fig. 4 is a schematic diagram of a square cell composite structure according to an embodiment of the present disclosure;
fig. 5 is a cross-sectional view of an active region of another MOSFET device incorporating a junction barrier schottky according to an embodiment of the present application;
FIG. 6 is a schematic diagram of another regular hexagonal cell composite structure provided in the embodiments of the present application;
description of reference numerals:
10. an MOSFET device active region; 101. a silicon carbide substrate; 102. an epitaxial layer; 103. a well region; 104. a source region; 105. a highly doped P-type region; 106. an insulating gate oxide layer; 107. conducting polycrystalline silicon on the grid; 108. an insulating dielectric layer; 109. a first contact metal; 110. a second contact metal; 111. a source electrode; 112. a drain electrode; 113. a JFET area; 114. a junction barrier Schottky region; 115. a first PN junction; 116: a second PN junction; 117. a ring-shaped highly doped P-type region; 118. and a third PN junction.
Detailed Description
In order to make those skilled in the art better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making any inventive step based on the embodiments of the present disclosure, shall fall within the scope of protection of the present application.
The embodiment of the application provides a MOSFET device of integrated junction barrier schottky, adopts the alternate composite construction who arranges of junction barrier schottky cell and MOSFET cell when the cell design, and is integrated in a MOSFET device to need not to connect a schottky diode in parallel in ordinary MOSFET diode's outside, can reduce integrated chip's size, reduce cost.
Fig. 1 is a cross-sectional view of an active region of a MOSFET device integrated with a junction barrier schottky according to an embodiment of the present application, and as shown in fig. 1, a MOSFET device 10 specifically includes: the epitaxial layer 102, and a plurality of MOSFET cells and Junction Barrier Schottky (JBS) cells arranged on a surface of the epitaxial layer 102. The epitaxial layer 102 is an N-type semiconductor.
Through a large number of experiments, compared with strip-shaped cells, the MOSFET device with the circular and polygonal cell design can realize higher channel width and total area of Junction Field-Effect Transistor (JFET) regions, and further has lower specific on-resistance. Therefore, the cell shape in the present application may be designed as a regular polygon or a circle.
Taking a regular hexagon as an example, fig. 2 is a schematic diagram of a regular hexagon cell composite structure provided in the embodiment of the present application, as shown in fig. 2, a structure shown as a cell 1 is a JBS cell, and a structure shown as a cell 2 is a MOSFET cell. The MOSFET cells and the JBS cells are arranged according to a certain proportion. The MOSFET unit cells and the JBS unit cells are the same in shape and are both regular polygons or circles.
In one embodiment, the arrangement ratio of the MOSFET cells to the JBS cells is: a (a is more than or equal to 1 and less than or equal to 100) MOSFET cells are arranged between every two adjacent JBS cells. In the case that the arrangement of the cells shown in fig. 2 is a ═ 1, as shown in fig. 2, one MOSFET cell is spaced between every two adjacent JBS cells, and thus, a ring of MOSFET cells is surrounded by one JBS cell.
As shown in fig. 2, each MOSFET cell includes a well 103, a source region 104 and a highly doped P-type region 105, wherein the well 103 is a P-type semiconductor and the source region 104 is an N-type semiconductor. The well 103, the source 104 and the highly doped P-type region 105 are all regular hexagons in shape and have coincident center points.
Further, a source region 104 is located inside the well 103, and the source region 104 surrounds the highly doped P-type region 105. Fig. 1 is a cross-sectional view corresponding to a broken line AA 'in fig. 2, and fig. 5 is a cross-sectional view corresponding to a broken line BB' in fig. 2. As can be seen from fig. 1, the ion implantation depth of the source region 104 in the MOSFET cell is smaller than that of the well region 103, and the lower half of the highly doped P-type region 105 is in contact with the well region 103.
Further, a first PN junction 115 is formed at the boundary between the well region 103 and the epitaxial layer 102, and a second PN junction 116 is formed at the boundary between the well region 103 and the source region 104.
Further, each JBS cell is a junction barrier schottky region 114. Each junction barrier schottky region 114 includes a plurality of annular highly doped P-type regions 117 and a schottky region formed between each annular highly doped P-type region 117, the annular highly doped P-type regions 117 forming a third PN junction 118 with the epitaxial layer 102.
A first JFET region is formed between the well region 103 of the MOSFET cell and the outer annular highly doped P-type region 117 of the adjacent JBS cell. A second JFET region is formed between the well region 103 of the MOSFET cell and the well region 103 of the adjacent MOSFET cell, and the first JFET region and the second JFET region have the same ion doping concentration and can be regarded as the same structure, which is shown by the JFET region 113 hereinafter.
In one embodiment, as shown in fig. 2, the JBS cell includes two annular highly doped P-type regions 117, and two schottky regions are formed between the two annular highly doped P-type regions. The ion doping concentration range of the well region 103 is: 5E15cm-3～5E18cm-3. The ion doping concentration range of the source region 104 is: 1E18cm-3～1E22cm-3. The ion doping concentration ranges of the highly doped P-type region 105 and the ring-shaped highly doped P-type region 117 are as follows: 1E18cm-3～1E22 cm-3。
Further, the width n and the ion implantation concentration of the JFET region 113 need to ensure that the MOSFET has a smaller conduction voltage drop, and in the blocking mode, an effective electric field shielding effect can be achieved between adjacent well regions, thereby ensuring the reliability of the device. Similarly, the ion implantation concentration of the schottky region between each layer of the annular highly doped P-type regions 117 in the junction barrier schottky region 114 and the distance s between each layer of the annular highly doped P-type regions 117 need to ensure that the junction barrier schottky diode has sufficient current conduction capability, and in the blocking mode, an effective electric field shielding effect can be achieved between adjacent well regions, thereby ensuring the reliability of the MOSFET device. Therefore, in the design of the present application, the ion doping concentration of the schottky region formed between the ring-shaped highly doped P-type regions 117 in the junction barrier schottky region 114 and the JFET region 113 is greater than or equal to that of the epitaxial layer 102. The width n of the JFET area 113 and the distance s between the annular high-doped P-type areas 117 of each layer are both taken as values in a preset interval, and experiments show that the MOSFET device has smaller conduction voltage drop due to the design, and an effective electric field shielding effect can be achieved between the adjacent well areas in a blocking mode.
In one embodiment, the predetermined interval is specifically [0.8 μm to 5 μm ]]. The ion doping concentration range of the schottky region formed between the JFET region 113 and the ring-shaped highly doped P-type region 117 in the junction barrier schottky region 114 is: 1E15cm-3～5E17cm-3。
Further, the MOSFET device 10 further includes a first contact metal 109 and a second contact metal 110. As shown in fig. 1, the first contact metal covers the surface of the highly doped P-type region 105 to form an ohmic contact with the highly doped P-type region 105. In order to suppress the parasitic bipolar transistor effect inside the MOSFET device 10, a portion of the first contact metal 109 is brought into contact with the source region 104. The second contact metal covers the surface of the junction barrier schottky region 114 and forms a schottky contact with several schottky regions in the junction barrier schottky region 114.
If connect two contact metal together, through suitable contact metal design and high temperature annealing temperature, can make two metals form ohmic contact and schottky contact simultaneously, can simplify process flow like this, but the drawback is in the actual device production, and it is difficult to form good ohmic contact and schottky contact simultaneously, therefore probably leads to the failure rate increase, brings the sacrifice of device yield. Therefore, as shown in fig. 1, a certain distance is kept between the first contact metal 109 and the second contact metal 110 in the present application, so that two pieces of contact metal are respectively designed to be an ohmic contact and a schottky contact through different processes, and the manufacturing difficulty and the failure rate of the MOSFET device are reduced.
Further, as shown in fig. 1, the source region 104, the well region 103, and the JFET region 113 of the MOSFET cell are covered by the insulated gate oxide layer 106, and the insulated gate oxide layer 106 starts from the source region 104 and ends at the JFET region 113. And the width of the insulated gate oxide layer 106 covering the JFET region 113 is greater than or equal to 0.1 micron and less than the width of the JFET region 113.
For example, if the width of the JFET region 113 is 3 microns, the width of the insulated gate oxide layer 106 covering the JFET region 113 ranges from: [0.1 to 3 μm ].
Further, the gate insulating oxide layer 106 is covered with a gate conductive polysilicon 107. The insulating gate oxide layer 106 and the gate conductive polysilicon 107 are surrounded by an insulating dielectric layer 108, and the insulating dielectric layer 108 separates the insulating gate oxide layer 106 and the gate conductive polysilicon 107 from the adjacent first contact metal 109 and second contact metal 110.
Further, a source electrode 111 is covered on the insulating dielectric layer 108, the first contact metal 109 and the second contact metal 110, the source electrode 111 is in contact with the first contact metal 109 and the second contact metal 110 of each cell, and the insulating dielectric layer 108 completely separates the insulating gate oxide layer 106 and the gate conductive polysilicon 107 from the source electrode 111.
Further, a silicon carbide substrate 101 covers a surface of the epitaxial layer 102 facing away from the cell side, the silicon carbide substrate 101 is an N-type semiconductor, and the ion doping concentration is higher than that of the epitaxial layer 102. The side of silicon carbide substrate 101 facing away from epitaxial layer 102 is covered with drain electrode 112 of MOSFET device 10.
In one embodiment, the silicon carbide substrate 101 has an ion doping concentration range of: 1E18cm-3～1E20 cm-3The ion doping concentration range of the epitaxial layer 102 is: 1E14cm-3～5E16 cm-3。
As a possible embodiment, the unit cell in the present application may be designed as a circle, a square, a regular octagon, etc. in addition to a regular hexagon. Fig. 3 is a schematic view of a circular cell composite structure according to an embodiment of the present disclosure, and as shown in fig. 3, the source region 104 and the highly doped P-type region 105 are both circular and have coincident centers. A cross-sectional view corresponding to the broken line AA 'is shown in FIG. 1, and a cross-sectional view corresponding to the broken line BB' is shown in FIG. 5. Fig. 4 is a schematic diagram of a regular quadrilateral cell composite structure provided in an embodiment of the present application, as shown in fig. 4, each row of quadrilateral cells are aligned, a cross-sectional view corresponding to a dotted line AA 'is shown in fig. 1, and a cross-sectional view corresponding to a dotted line BB' is shown in fig. 5.
As a possible implementation manner, fig. 6 is a schematic diagram of another regular hexagonal cell composite structure provided in the examples of the present application, and fig. 6 shows an arrangement of cells in the case where a is 2. Fig. 1 shows a cross-sectional view corresponding to a broken line AA ', and fig. 5 shows a cross-sectional view corresponding to a broken line BB'.
The embodiment of the application provides a MOSFET device of integrated junction barrier schottky, have polygon or circular MOSFET cell and JBS cell composite design, this kind of composite construction's advantage does, the design flexibility is good, can carry out the MOSFET device performance adjustment of integrated junction barrier schottky diode through the proportion of arranging of two kinds of cells, can control the schottky proportion better, also can make the MOSFET device need not the outside schottky diode that connects in parallel again simultaneously, with the size that reduces integrated chip.
The embodiments in the present application are described in a progressive manner, and the same and similar parts among the embodiments can be referred to each other, and each embodiment focuses on the differences from the other embodiments.
The foregoing description of specific embodiments of the present application has been presented. Other embodiments are within the scope of the following claims. In some cases, the actions or steps recited in the claims may be performed in a different order than in the embodiments and still achieve desirable results. In addition, the processes depicted in the accompanying figures do not necessarily require the particular order shown, or sequential order, to achieve desirable results. In some embodiments, multitasking and parallel processing may also be possible or may be advantageous.
The above description is only an example of the present application and is not intended to limit the present application. Various modifications and changes may occur to those skilled in the art to which the embodiments of the present application pertain. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the embodiments of the present application should be included in the scope of the claims of the present application.

Claims (10)

1. An MOSFET device integrated with a junction barrier schottky, the MOSFET device comprising: the junction barrier Schottky JBS unit cell comprises an epitaxial layer and a plurality of MOSFET unit cells and junction barrier JBS unit cells which are arranged on the surface of the epitaxial layer; the epitaxial layer is an N-type semiconductor; the MOSFET cells and the JBS cells are arranged according to a preset proportion;
each MOSFET unit cell comprises a well region, a source electrode region and a high-doped P-type region, wherein the well region is a P-type semiconductor, and the source electrode region is an N-type semiconductor;
the source electrode region is positioned inside the well region and surrounds the high-doped P-type region; the ion implantation depth of the source electrode region is smaller than that of the well region, and the high-doped P-type region is in contact with the well region;
the well region and the epitaxial layer form a first PN junction, and the well region and the source region form a second PN junction;
each JBS unit cell comprises a plurality of layers of annular high-doped P-type regions and Schottky regions formed between the annular high-doped P-type regions; the annular highly doped P-type region and the epitaxial layer form a third PN junction;
a first JFET area is formed between the well area of the MOSFET unit cell and the outer annular highly-doped P-type area of the adjacent JBS unit cell; a second JFET area is formed between the well region of the MOSFET unit cell and the well region of the adjacent MOSFET unit cell;
the ion doping concentration of the first JFET area and the second JFET area is larger than or equal to that of the epitaxial layer, and the width of the first JFET area and the width of the second JFET area and the distance between the annular high-doping P-type areas are equal to values in the same preset interval.
2. The integrated junction barrier schottky MOSFET device as claimed in claim 1, wherein said MOSFET cells and said JBS cells have the same shape, said shape being a regular polygon or a circle;
a plurality of MOSFET unit cells are arranged around one JBS unit cell;
a MOSFET cells are arranged between two adjacent JBS cells; wherein a is more than or equal to 1 and less than or equal to 100.
3. The integrated junction barrier schottky MOSFET device of claim 1 further comprising a first contact metal;
the first contact metal covers the surface of the high-doped P-type region in the well region and forms ohmic contact with the high-doped P-type region in the well region;
a portion of the first contact metal contacts the source region to suppress parasitic bipolar transistor effects within the MOSFET device.
4. The integrated junction barrier schottky MOSFET device of claim 3 further comprising a second contact metal;
the second contact metal covers the surface of the JBS unit cell and forms Schottky contact with a plurality of Schottky regions in the JBS unit cell;
the first contact metal and the second contact metal are kept at a preset distance, so that the first contact metal and the second contact metal are respectively designed into ohmic contact and Schottky contact through different processes.
5. The integrated junction barrier schottky MOSFET device of claim 1 further comprising an insulated gate oxide layer;
the insulated gate oxide layer covers the source electrode area, the well area and the JFET area;
the width of the insulating grid oxide layer covering the JFET area is larger than or equal to 0.1 micrometer and smaller than the width of the JFET area.
6. The integrated junction barrier schottky MOSFET device as in claim 5 wherein said gate insulating oxide is capped with a gate conductive polysilicon.
7. The integrated junction barrier schottky MOSFET device as claimed in claim 6 wherein the insulating gate oxide layer and the gate conductive polysilicon are surrounded by a layer of insulating dielectric.
8. The integrated junction barrier schottky MOSFET device as claimed in claim 7 wherein said insulating dielectric layer, said first contact metal and said second contact metal are capped with a source electrode;
the source electrode is in contact with the first contact metal and the second contact metal;
the insulating dielectric layer separates the insulating gate oxide layer and the gate conductive polysilicon from the source electrode.
9. The MOSFET device of an integrated junction barrier schottky of claim 1, further comprising: a silicon carbide substrate located on a surface of the epitaxial layer on a side facing away from the cells; the silicon carbide substrate is an N-type semiconductor;
the ion doping concentration in the silicon carbide substrate is higher than that in the epitaxial layer;
and one surface of the silicon carbide substrate, which is far away from the epitaxial layer, is covered with a drain electrode of the MOSFET device.
10. The integrated junction barrier schottky MOSFET device as claimed in claim 1, wherein the predetermined interval is [0.8 μm to 5 μm ].
CN202210047638.5A 2022-01-17 2022-01-17 MOSFET device integrated with junction barrier Schottky Pending CN114400256A (en)

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CN202210047638.5A Pending CN114400256A (en) 2022-01-17 2022-01-17 MOSFET device integrated with junction barrier Schottky

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116598359A (en) * 2023-05-06 2023-08-15 海科(嘉兴)电力科技有限公司 Trench MOSFET device integrated with junction barrier Schottky diode and manufacturing method
CN116598359B (en) * 2023-05-06 2024-04-19 海科(嘉兴)电力科技有限公司 Trench MOSFET device integrated with junction barrier Schottky diode and manufacturing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116598359A (en) * 2023-05-06 2023-08-15 海科(嘉兴)电力科技有限公司 Trench MOSFET device integrated with junction barrier Schottky diode and manufacturing method
CN116598359B (en) * 2023-05-06 2024-04-19 海科(嘉兴)电力科技有限公司 Trench MOSFET device integrated with junction barrier Schottky diode and manufacturing method

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