CN114392985B - Method for cleaning near-local electrode of three-dimensional atomic probe by using Tesla coil - Google Patents
Method for cleaning near-local electrode of three-dimensional atomic probe by using Tesla coil Download PDFInfo
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- CN114392985B CN114392985B CN202210060261.7A CN202210060261A CN114392985B CN 114392985 B CN114392985 B CN 114392985B CN 202210060261 A CN202210060261 A CN 202210060261A CN 114392985 B CN114392985 B CN 114392985B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0064—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes
- B08B7/0071—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes by heating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
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- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Cleaning In General (AREA)
- Drying Of Semiconductors (AREA)
Abstract
The invention belongs to the field of materials, in particular to a method for cleaning a near-local electrode of a three-dimensional atomic probe by using a Tesla coil, which comprises the following steps: s1: firstly, removing a three-dimensional atomic probe near-local electrode from three-dimensional atomic probe equipment, and then fixing the three-dimensional atomic probe near-local electrode on a cleaning workbench by using a clamping instrument; s2: secondly, aligning the tip of the Tesla coil to the micropore of the near local electrode, and keeping a distance of 1-3 mm; s3: after checking that the Tesla coil and the three-dimensional atomic probe near the local electrode are normal, switching on a power supply for the Tesla coil; through the design of the method steps, the function of melting the surface dirt of the near-local electrode of the three-dimensional atomic probe by utilizing high-voltage electric sparks generated by the Tesla coil tip, realizing high-efficiency cleaning of the surface, solving the problems of high cleaning cost and long service life of the focused ion beam and improving the cleaning efficiency of the near-local electrode of the three-dimensional atomic probe.
Description
Technical Field
The invention relates to the field of materials, in particular to a method for cleaning a near-local electrode of a three-dimensional atomic probe by using a Tesla coil.
Background
A three-dimensional atom probe is an analytical instrument in the field of material science, which has atomic-level spatial resolution and can be used for analyzing three-dimensional microscopic features in materials. The three-dimensional atomic probe technology is based on the principle of 'field evaporation', voltage or laser pulse is applied to a needle tip sample, atoms on the surface of the needle tip are evaporated into ions, the ions pass through a near-local electrode and are collected, and in the process, the electrode surface is required to be high in cleanliness, so that high-quality data can be obtained. However, during receipt collection, the three-dimensional atomic probe tip sample tends to break, adhere to the electrode surface, cause near-localized electrode surface contamination, and affect data quality.
The Tesla coil is a series resonant transformer, can obtain high-frequency voltage of millions of volts, and can be used for carrying out surface dirt melting treatment by manually manufacturing electric sparks. The existing method for cleaning the near-local electrode of the three-dimensional atomic probe by utilizing the focused ion beam has better effect on cleaning the shape defect of the inner ring of the electrode, but greatly reduces the service life of the near-local electrode and has larger cleaning cost; therefore, a method for cleaning the near-local electrode of the three-dimensional atom probe by using a Tesla coil is provided for solving the problems.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a method for cleaning a three-dimensional atomic probe near-local electrode by using a Tesla coil, which solves the problems that the service life of the electrode is shortened and the cleaning cost is high in the existing method for cleaning the three-dimensional atomic probe near-local electrode by using a focused ion beam.
The technical scheme adopted for solving the technical problems is as follows: the invention discloses a method for cleaning a near-local electrode of a three-dimensional atomic probe by using a Tesla coil, which comprises the following steps:
s1: firstly, removing a three-dimensional atomic probe near-local electrode from three-dimensional atomic probe equipment, and then fixing the three-dimensional atomic probe near-local electrode on a cleaning workbench by using a clamping instrument;
s2: secondly, aligning the tip of the Tesla coil to the micropore of the near local electrode, and keeping a distance of 1-3 mm;
s3: after checking that the Tesla coil and the three-dimensional atomic probe near the local electrode are normal, switching on a power supply for the Tesla coil;
s4: rotating the Tesla coil to discharge electric sparks, cleaning the surface of the near-local electrode for 10-20 seconds, and then powering off the Tesla coil;
s5: placing the cleaned three-dimensional atomic probe near-local electrode under a scanning electron microscope for observation, and observing whether the surface of the three-dimensional atomic probe is cleaned, and whether the surface of the three-dimensional atomic probe has dirt such as a protruding needle point or not;
s6: placing the cleaned three-dimensional atomic probe near-local electrode into a three-dimensional atomic probe pre-vacuum chamber, heating for 10-20 minutes, and then performing plasma cleaning for 7-9 hours, wherein the three-dimensional atomic probe near-local electrode can be normally used after cleaning.
Preferably, the tesla coil in S2 operates using 230V of alternating current.
Preferably, the tesla coil in S2 operates with a current of 0.18A.
Preferably, the three-dimensional atom probe near-local electrode in the S2 is fixed perpendicular to the tesla coil.
Preferably, a horizontal partition plate is installed above the cleaning table in the step S1.
The invention has the advantages that:
1. according to the invention, through the design of the method steps, the function of melting the dirt on the surface of the near-local electrode of the three-dimensional atomic probe by utilizing high-voltage electric sparks generated by the Tesla coil, so that the high-efficiency cleaning function of the surface of the electrode is realized, the problems of high cleaning cost of a focused ion beam and reduction of the service life of the electrode are solved, and the cleaning efficiency of the near-local electrode of the three-dimensional atomic probe is improved;
2. according to the method, through the design of the steps, the function of removing particles on the surface of the near-local electrode of the three-dimensional atomic probe through plasma cleaning in the three-dimensional atomic probe pre-vacuum chamber is realized, the problem that the ultra-high frequency voltage is not thoroughly cleaned is solved, and the cleaning effect and the cleaning efficiency of the near-local electrode of the three-dimensional atomic probe are improved.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the invention, and that other drawings can be obtained from these drawings without inventive faculty for a person skilled in the art.
FIG. 1 is a schematic diagram of the steps of the method for cleaning a near-local electrode of a three-dimensional atom probe according to the present invention;
FIG. 2 is a schematic diagram of the three-dimensional atom probe before and after cleaning the near-local electrode;
fig. 3 is a scanning electron microscope image of the three-dimensional atomic probe before and after cleaning the near-local electrode.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
Referring to fig. 1-3, a method for cleaning a near-local electrode of a three-dimensional atom probe by using a tesla coil, the method comprises the following steps:
s1: firstly, removing a three-dimensional atomic probe near-local electrode from three-dimensional atomic probe equipment, and then fixing the three-dimensional atomic probe near-local electrode on a cleaning workbench by using a clamping instrument;
s2: secondly, aligning the tip of the Tesla coil to the micropore of the near local electrode, and keeping a distance of 1 mm;
s3: after checking that the Tesla coil and the three-dimensional atomic probe near the local electrode are normal, switching on a power supply for the Tesla coil;
s4: rotating the Tesla coil to discharge electric sparks, cleaning the surface of the near-local electrode for 10 seconds, and then powering off the Tesla coil;
s5: placing the cleaned three-dimensional atomic probe near-local electrode under a scanning electron microscope for observation, and observing whether the surface of the three-dimensional atomic probe is cleaned, and whether the surface of the three-dimensional atomic probe has dirt such as a protruding needle point or not;
s6: placing the cleaned three-dimensional atomic probe near-local electrode into a three-dimensional atomic probe pre-vacuum chamber, heating for 10 minutes, and then performing plasma cleaning for 7 hours, wherein the three-dimensional atomic probe near-local electrode can be normally used after cleaning.
Example two
Referring to fig. 1-3, a method for cleaning a near-local electrode of a three-dimensional atom probe by using a tesla coil, the method comprises the following steps:
s1: firstly, removing a three-dimensional atomic probe near-local electrode from three-dimensional atomic probe equipment, and then fixing the three-dimensional atomic probe near-local electrode on a cleaning workbench by using a clamping instrument;
s2: secondly, aligning the tip of the Tesla coil to the micropore of the near local electrode, and keeping a distance of 2 mm;
s3: after checking that the Tesla coil and the three-dimensional atomic probe near the local electrode are normal, switching on a power supply for the Tesla coil;
s4: rotating the Tesla coil to discharge electric sparks, cleaning the surface of the near-local electrode for 15 seconds, and then powering off the Tesla coil;
s5: placing the cleaned three-dimensional atomic probe near-local electrode under a scanning electron microscope for observation, and observing whether the surface of the three-dimensional atomic probe is cleaned, and whether the surface of the three-dimensional atomic probe has dirt such as a protruding needle point or not;
s6: placing the cleaned three-dimensional atomic probe near-local electrode into a three-dimensional atomic probe pre-vacuum chamber, heating for 15 minutes, and then performing plasma cleaning for 8 hours, wherein the three-dimensional atomic probe near-local electrode can be normally used after cleaning.
Example III
Referring to fig. 1-3, a method for cleaning a near-local electrode of a three-dimensional atom probe by using a tesla coil, the method comprises the following steps:
s1: firstly, removing a three-dimensional atomic probe near-local electrode from three-dimensional atomic probe equipment, and then fixing the three-dimensional atomic probe near-local electrode on a cleaning workbench by using a clamping instrument;
s2: secondly, aligning the tip of the Tesla coil to the micropore of the near local electrode, and keeping a distance of 3 mm;
s3: after checking that the Tesla coil and the three-dimensional atomic probe near the local electrode are normal, switching on a power supply for the Tesla coil;
s4: rotating the Tesla coil to discharge electric sparks, cleaning the surface of the near-local electrode for 20 seconds, and then powering off the Tesla coil;
s5: placing the cleaned three-dimensional atomic probe near-local electrode under a scanning electron microscope for observation, and observing whether the surface of the three-dimensional atomic probe is cleaned, and whether the surface of the three-dimensional atomic probe has dirt such as a protruding needle point or not;
s6: placing the cleaned three-dimensional atomic probe near-local electrode into a three-dimensional atomic probe pre-vacuum chamber, heating for 20 minutes, and then performing plasma cleaning for 9 hours, wherein the three-dimensional atomic probe near-local electrode can be normally used after cleaning.
The method provided by the embodiment is utilized to perform three times of cleaning tests on the near-local electrodes of three-dimensional atomic probes with the same working voltage and similar working time, and the scanning electron microscope and the three-dimensional atomic probe equipment are utilized to respectively observe, measure and record the number of pollution particles on the surfaces of the near-local electrodes of the three-dimensional atomic probes and the working voltage of the near-local electrodes after cleaning.
The test data obtained are shown in Table 1.
TABLE 1
It can be seen from examples 1-3 that the longer the tesla coil is operated, the higher the operating voltage of the three-dimensional atomic probe after the cleaning of the near-local electrode is, and the better the cleaning effect of the near-local electrode is.
The tesla coil in the step S2 works by using 230V alternating current; during operation, through invariable voltage for Tesla coil normally and stably works, guarantees clean efficiency effect.
The tesla coil in S2 operates with a current of 0.18A magnitude; during operation, through invariable electric current for Tesla coil normally and stably works, guarantees clean efficiency effect.
The three-dimensional atom probe near-local electrode in the S2 is fixed perpendicular to the Tesla coil; when the three-dimensional atomic probe is in operation, the near-local electrode is perpendicular to the Tesla coil, so that the surface of the electrode can be directly contacted with an electric spark, and the surface of the electrode can be efficiently cleaned.
A horizontal partition plate is arranged above the cleaning workbench in the step S1; when the electric spark device works, the position of the electric spark can be isolated through the horizontal partition plate, and the transmission of the electric spark is ensured to be limited.
In the description of the present specification, the descriptions of the terms "one embodiment," "example," "specific example," and the like, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined in the appended claims.
Claims (5)
1. A method for cleaning a near-local electrode of a three-dimensional atom probe by using a Tesla coil is characterized by comprising the following steps of: the method comprises the following steps:
s1: firstly, removing a three-dimensional atomic probe near-local electrode from three-dimensional atomic probe equipment, and then fixing the three-dimensional atomic probe near-local electrode on a cleaning workbench by using a clamping instrument;
s2: secondly, aligning the tip of the Tesla coil to the micropore of the near local electrode, and keeping a distance of 1-3 mm;
s3: after checking that the Tesla coil and the three-dimensional atomic probe near the local electrode are normal, switching on a power supply for the Tesla coil;
s4: rotating the Tesla coil to discharge electric sparks, cleaning the surface of the near-local electrode for 10-20 seconds, and then powering off the Tesla coil;
s5: placing the cleaned three-dimensional atomic probe near-local electrode under a scanning electron microscope for observation, and observing whether the surface of the three-dimensional atomic probe is cleaned, and whether the surface of the three-dimensional atomic probe has dirt such as a protruding needle point or not;
s6: placing the cleaned three-dimensional atomic probe near-local electrode into a three-dimensional atomic probe pre-vacuum chamber, heating for 10-20 minutes, and then performing plasma cleaning for 7-9 hours, wherein the three-dimensional atomic probe near-local electrode can be normally used after cleaning.
2. A method of cleaning a three-dimensional atom probe near-localized electrode using a tesla coil as claimed in claim 1, wherein: the tesla coil in S2 operates using 230V ac.
3. A method of cleaning a three-dimensional atom probe near-localized electrode using a tesla coil as claimed in claim 2, wherein: the tesla coil in S2 operates with a current of 0.18A.
4. A method of cleaning a three-dimensional atom probe near-localized electrode using a tesla coil as claimed in claim 3, wherein: the three-dimensional atom probe near-local electrode in the S2 is fixed perpendicular to the Tesla coil.
5. The method for cleaning the near-local electrode of the three-dimensional atomic probe by using the Tesla coil according to claim 4, wherein the method comprises the following steps: and a horizontal partition plate is arranged above the cleaning workbench in the step S1.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210060261.7A CN114392985B (en) | 2022-01-19 | 2022-01-19 | Method for cleaning near-local electrode of three-dimensional atomic probe by using Tesla coil |
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| CN202210060261.7A CN114392985B (en) | 2022-01-19 | 2022-01-19 | Method for cleaning near-local electrode of three-dimensional atomic probe by using Tesla coil |
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| CN114392985B true CN114392985B (en) | 2023-10-10 |
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Citations (5)
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|---|---|---|---|---|
| JPH0518706A (en) * | 1991-07-15 | 1993-01-26 | Jeol Ltd | Probe cleaning device for tunneling microscope |
| JPH07297219A (en) * | 1994-04-25 | 1995-11-10 | Matsushita Electric Ind Co Ltd | Cleaning device of electrode of workpiece and cleaning method |
| JP2001118767A (en) * | 1999-10-15 | 2001-04-27 | Toshiba Mach Co Ltd | Device for cleaning inside of lens barrel of electron beam plotting device |
| CN103878150A (en) * | 2014-03-05 | 2014-06-25 | 上海华虹宏力半导体制造有限公司 | Probe cleaning method and probe cleaning device |
| CN109261646A (en) * | 2018-08-13 | 2019-01-25 | 南京理工大学 | A method of utilizing the nearly local electrode of focused ion beam cleaning three-dimensional atom probe |
-
2022
- 2022-01-19 CN CN202210060261.7A patent/CN114392985B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0518706A (en) * | 1991-07-15 | 1993-01-26 | Jeol Ltd | Probe cleaning device for tunneling microscope |
| JPH07297219A (en) * | 1994-04-25 | 1995-11-10 | Matsushita Electric Ind Co Ltd | Cleaning device of electrode of workpiece and cleaning method |
| JP2001118767A (en) * | 1999-10-15 | 2001-04-27 | Toshiba Mach Co Ltd | Device for cleaning inside of lens barrel of electron beam plotting device |
| CN103878150A (en) * | 2014-03-05 | 2014-06-25 | 上海华虹宏力半导体制造有限公司 | Probe cleaning method and probe cleaning device |
| CN109261646A (en) * | 2018-08-13 | 2019-01-25 | 南京理工大学 | A method of utilizing the nearly local electrode of focused ion beam cleaning three-dimensional atom probe |
Non-Patent Citations (1)
| Title |
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| 付琴琴 ; 张朋诚 ; 单智伟 ; .一种基于聚焦离子束技术的环境透射电镜光阑清理方法.电子显微学报.2016,(第06期),第538-543页. * |
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