CN114392985A - Method for cleaning three-dimensional atom probe near-local electrode by using Tesla coil - Google Patents
Method for cleaning three-dimensional atom probe near-local electrode by using Tesla coil Download PDFInfo
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- CN114392985A CN114392985A CN202210060261.7A CN202210060261A CN114392985A CN 114392985 A CN114392985 A CN 114392985A CN 202210060261 A CN202210060261 A CN 202210060261A CN 114392985 A CN114392985 A CN 114392985A
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- dimensional atom
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0064—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes
- B08B7/0071—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by temperature changes by heating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
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- Life Sciences & Earth Sciences (AREA)
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- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
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- Pathology (AREA)
- Cleaning In General (AREA)
- Drying Of Semiconductors (AREA)
Abstract
The invention belongs to the field of materials, and particularly relates to a method for cleaning a three-dimensional atom probe near-local area electrode by using a Tesla coil, which comprises the following steps: s1: firstly, taking the three-dimensional atom probe near local electrode off the three-dimensional atom probe device, and then fixing the three-dimensional atom probe near local electrode on a cleaning workbench by using a clamping instrument; s2: secondly, aligning the tip of the Tesla coil to a near local electrode micropore, and keeping a distance of 1-3 mm; s3: after the Tesla coil and the three-dimensional atom probe near-local electrode are checked to be normal, a power supply is connected to the Tesla coil; through the design of the method steps, the surface smudginess of the three-dimensional atom probe near-local area electrode is subjected to melting treatment by using high-voltage electric sparks generated by the tip of the Tesla coil, the function of high-efficiency surface cleaning is realized, the problems of high cleaning cost and long service life of a focused ion beam are solved, and the efficiency of cleaning the three-dimensional atom probe near-local area electrode is improved.
Description
Technical Field
The invention relates to the field of materials, in particular to a method for cleaning a three-dimensional atom probe near-local-area electrode by using a Tesla coil.
Background
The three-dimensional atom probe is an analytical instrument in the field of material science, has atomic-level spatial resolution, and can be used for analyzing three-dimensional microscopic features in materials. The three-dimensional atom probe technology is based on the principle of field evaporation, voltage or laser pulse is applied to a needle point sample, atoms on the surface of a needle point are evaporated into ions, the ions pass through a near-local electrode and are collected, and high-quality data can be obtained only when the cleanness of the surface of the electrode is required to be high in the process. However, during the receipt collection process, the three-dimensional atom probe tip sample is often broken and adhered to the surface of the electrode, so that the surface of the electrode in a near-local area is polluted, and the data quality is affected.
The Tesla coil is a series resonance transformer, can obtain high-frequency voltage of millions of volts, and can be used for surface smudging melting treatment by artificially manufacturing electric sparks by the Tesla coil. The existing method for cleaning the three-dimensional atom probe near local electrode by using the focused ion beam has better effect of cleaning the shape defects of the inner ring of the electrode, but can greatly reduce the service life of the near local electrode and has higher cleaning cost; therefore, a method for cleaning a three-dimensional atom probe near-local electrode by using a tesla coil is provided for solving the problems.
Disclosure of Invention
In order to make up for the defects of the prior art and solve the problems that the conventional method for cleaning the three-dimensional atom probe near-local area electrode by using a focused ion beam has the defects of shortened service life of the electrode and higher cleaning cost, the invention provides a method for cleaning the three-dimensional atom probe near-local area electrode by using a Tesla coil.
The technical scheme adopted by the invention for solving the technical problems is as follows: the invention relates to a method for cleaning a near local electrode of a three-dimensional atom probe by using a Tesla coil, which comprises the following steps:
s1: firstly, taking the three-dimensional atom probe near local electrode off the three-dimensional atom probe device, and then fixing the three-dimensional atom probe near local electrode on a cleaning workbench by using a clamping instrument;
s2: secondly, aligning the tip of the Tesla coil to a near local electrode micropore, and keeping a distance of 1-3 mm;
s3: after the Tesla coil and the three-dimensional atom probe near-local electrode are checked to be normal, a power supply is connected to the Tesla coil;
s4: rotating the Tesla coil to generate electric spark, cleaning the surface of the near local electrode for 10-20 seconds, and then powering off the Tesla coil;
s5: placing the cleaned three-dimensional atom probe near-local area electrode under a scanning electron microscope for observation, observing whether the surface of the three-dimensional atom probe near-local area electrode is cleaned up or not, and whether a protruding needle point and other dirt exist or not, and placing the three-dimensional atom probe near-local area electrode into three-dimensional atom probe equipment after cleaning up;
s6: and (3) placing the cleaned three-dimensional atom probe near-local area electrode into a three-dimensional atom probe pre-vacuum chamber, heating for 10-20 minutes, carrying out plasma cleaning for 7-9 hours, and enabling the three-dimensional atom probe near-local area electrode to be normally used after cleaning.
Preferably, the tesla coil in S2 operates using 230V ac power.
Preferably, the tesla coil in S2 operates using a current of 0.18A.
Preferably, the three-dimensional atom probe near-local electrode in S2 is fixed perpendicular to the tesla coil.
Preferably, a horizontal partition plate is installed above the cleaning table in S1.
The invention has the advantages that:
1. according to the invention, through the design of the method steps, the fusion treatment of the surface dirt of the three-dimensional atom probe near-local area electrode by using high-voltage electric spark generated by the Tesla coil is realized, the function of efficiently cleaning the surface of the electrode is realized, the problems of high cleaning cost of the focused ion beam and reduction of the service life of the electrode are solved, and the cleaning efficiency of the three-dimensional atom probe near-local area electrode is improved;
2. according to the invention, through the design of the method steps, the function of removing the particles on the surface of the three-dimensional atom probe near-local electrode cleaned by the high-frequency electric spark by utilizing plasma cleaning in the three-dimensional atom probe pre-vacuum chamber is realized, the problem of incomplete cleaning by the ultrahigh-frequency voltage is solved, and the cleaning effect and the cleaning efficiency of the three-dimensional atom probe near-local electrode are improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
FIG. 1 is a schematic diagram of the steps of a method for cleaning a three-dimensional atom probe near-local-area electrode according to the present invention;
FIG. 2 is a schematic diagram of a three-dimensional atom probe before and after cleaning of a near-local area electrode according to the present invention;
FIG. 3 is a scanning electron microscope image of the three-dimensional atom probe before and after the near-local-area electrode of the invention is cleaned.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example one
Referring to fig. 1-3, a method for cleaning a three-dimensional atom probe near-local electrode using a tesla coil includes the following steps:
s1: firstly, taking the three-dimensional atom probe near local electrode off the three-dimensional atom probe device, and then fixing the three-dimensional atom probe near local electrode on a cleaning workbench by using a clamping instrument;
s2: secondly, aligning the tip of the Tesla coil to a near local electrode micropore, and keeping a distance of 1 mm;
s3: after the Tesla coil and the three-dimensional atom probe near-local electrode are checked to be normal, a power supply is connected to the Tesla coil;
s4: rotating the Tesla coil to generate electric spark, cleaning the surface of the near local electrode for 10 seconds, and then powering off the Tesla coil;
s5: placing the cleaned three-dimensional atom probe near-local area electrode under a scanning electron microscope for observation, observing whether the surface of the three-dimensional atom probe near-local area electrode is cleaned up or not, and whether a protruding needle point and other dirt exist or not, and placing the three-dimensional atom probe near-local area electrode into three-dimensional atom probe equipment after cleaning up;
s6: and (3) placing the cleaned three-dimensional atom probe near-local area electrode into a three-dimensional atom probe pre-vacuum chamber, heating for 10 minutes, carrying out plasma cleaning for 7 hours, and enabling the three-dimensional atom probe near-local area electrode to be normally used after cleaning.
Example two
Referring to fig. 1-3, a method for cleaning a three-dimensional atom probe near-local electrode using a tesla coil includes the following steps:
s1: firstly, taking the three-dimensional atom probe near local electrode off the three-dimensional atom probe device, and then fixing the three-dimensional atom probe near local electrode on a cleaning workbench by using a clamping instrument;
s2: secondly, aligning the tip of the Tesla coil to a near local electrode micropore, and keeping a distance of 2 mm;
s3: after the Tesla coil and the three-dimensional atom probe near-local electrode are checked to be normal, a power supply is connected to the Tesla coil;
s4: rotating the Tesla coil to generate electric spark, cleaning the surface of the near local electrode for 15 seconds, and then powering off the Tesla coil;
s5: placing the cleaned three-dimensional atom probe near-local area electrode under a scanning electron microscope for observation, observing whether the surface of the three-dimensional atom probe near-local area electrode is cleaned up or not, and whether a protruding needle point and other dirt exist or not, and placing the three-dimensional atom probe near-local area electrode into three-dimensional atom probe equipment after cleaning up;
s6: and (3) placing the cleaned three-dimensional atom probe near-local area electrode into a three-dimensional atom probe pre-vacuum chamber, heating for 15 minutes, carrying out plasma cleaning for 8 hours, and enabling the three-dimensional atom probe near-local area electrode to be normally used after cleaning.
EXAMPLE III
Referring to fig. 1-3, a method for cleaning a three-dimensional atom probe near-local electrode using a tesla coil includes the following steps:
s1: firstly, taking the three-dimensional atom probe near local electrode off the three-dimensional atom probe device, and then fixing the three-dimensional atom probe near local electrode on a cleaning workbench by using a clamping instrument;
s2: secondly, aligning the tip of the Tesla coil to a near local electrode micropore, and keeping a distance of 3 mm;
s3: after the Tesla coil and the three-dimensional atom probe near-local electrode are checked to be normal, a power supply is connected to the Tesla coil;
s4: rotating the Tesla coil to generate electric spark, cleaning the surface of the near local electrode for 20 seconds, and then powering off the Tesla coil;
s5: placing the cleaned three-dimensional atom probe near-local area electrode under a scanning electron microscope for observation, observing whether the surface of the three-dimensional atom probe near-local area electrode is cleaned up or not, and whether a protruding needle point and other dirt exist or not, and placing the three-dimensional atom probe near-local area electrode into three-dimensional atom probe equipment after cleaning up;
s6: and (3) placing the cleaned three-dimensional atom probe near-local area electrode into a three-dimensional atom probe pre-vacuum chamber, heating for 20 minutes, carrying out plasma cleaning for 9 hours, and enabling the three-dimensional atom probe near-local area electrode to be normally used after cleaning.
The method provided by the embodiment is used for carrying out three times of cleaning tests on three-dimensional atom probe near-local area electrodes with the same working voltage and the similar service time, and the scanning electron microscope and the three-dimensional atom probe equipment are used for respectively observing, measuring and recording the number of the pollution particles on the surface of the three-dimensional atom probe near-local area electrode and the working voltage of the cleaned near-local area electrode.
The resulting test data are shown in Table 1.
TABLE 1
It can be seen from the embodiments 1 to 3 that the longer the tesla coil working time is, the higher the working voltage after the three-dimensional atom probe near-local area electrode is cleaned is, and the better the cleaning effect of the three-dimensional atom probe near-local area electrode is.
The tesla coil in S2 operates with alternating current of 230V; during operation, the Tesla coil normally and stably works through constant voltage, and the cleaning efficiency effect is guaranteed.
The tesla coil in S2 operates with a current of 0.18A magnitude; during operation, constant current is used for enabling the Tesla coil to normally and stably work, and the cleaning efficiency effect is guaranteed.
The three-dimensional atom probe near-local electrode in the S2 is fixed perpendicular to the Tesla coil; when the three-dimensional atomic probe near-local electrode cleaning device works, the three-dimensional atomic probe near-local electrode is perpendicular to the Tesla coil, so that the surface of the electrode can be directly contacted with electric sparks, and the surface of the electrode is efficiently cleaned.
A horizontal partition plate is arranged above the cleaning workbench in the S1; when the electric spark machine works, the position of an electric spark can be isolated through the horizontal partition plate, and the transmission of the electric spark is guaranteed to be limited.
In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed.
Claims (5)
1. A method for cleaning a three-dimensional atom probe near-local electrode by using a Tesla coil is characterized by comprising the following steps: the method comprises the following steps:
s1: firstly, taking the three-dimensional atom probe near local electrode off the three-dimensional atom probe device, and then fixing the three-dimensional atom probe near local electrode on a cleaning workbench by using a clamping instrument;
s2: secondly, aligning the tip of the Tesla coil to a near local electrode micropore, and keeping a distance of 1-3 mm;
s3: after the Tesla coil and the three-dimensional atom probe near-local electrode are checked to be normal, a power supply is connected to the Tesla coil;
s4: rotating the Tesla coil to generate electric spark, cleaning the surface of the near local electrode for 10-20 seconds, and then powering off the Tesla coil;
s5: placing the cleaned three-dimensional atom probe near-local area electrode under a scanning electron microscope for observation, observing whether the surface of the three-dimensional atom probe near-local area electrode is cleaned up or not, and whether a protruding needle point and other dirt exist or not, and placing the three-dimensional atom probe near-local area electrode into three-dimensional atom probe equipment after cleaning up;
s6: and (3) placing the cleaned three-dimensional atom probe near-local area electrode into a three-dimensional atom probe pre-vacuum chamber, heating for 10-20 minutes, carrying out plasma cleaning for 7-9 hours, and enabling the three-dimensional atom probe near-local area electrode to be normally used after cleaning.
2. The method of claim 1, wherein the method further comprises the step of cleaning the three-dimensional atom probe near-local electrode with a tesla coil: the tesla coil in S2 operates using alternating current of 230V.
3. The method of claim 2, wherein the method further comprises the step of cleaning the three-dimensional atom probe near-local electrode with a tesla coil: the tesla coil in S2 operates with a current of 0.18A.
4. The method of claim 3, wherein the method further comprises the step of cleaning the three-dimensional atom probe near-local electrode with a Tesla coil: the three-dimensional atom probe near-local-area electrode in the S2 is fixed perpendicular to the Tesla coil.
5. The method of claim 4, wherein the method further comprises the step of cleaning the three-dimensional atom probe near-local electrode with a Tesla coil: and a horizontal partition plate is arranged above the cleaning workbench in the S1.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210060261.7A CN114392985B (en) | 2022-01-19 | 2022-01-19 | Method for cleaning near-local electrode of three-dimensional atomic probe by using Tesla coil |
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| CN202210060261.7A CN114392985B (en) | 2022-01-19 | 2022-01-19 | Method for cleaning near-local electrode of three-dimensional atomic probe by using Tesla coil |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115208227A (en) * | 2022-07-26 | 2022-10-18 | 山东大学 | High voltage generating circuit, cleaning system and method suitable for ionosphere satellite load |
Citations (5)
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| JPH07297219A (en) * | 1994-04-25 | 1995-11-10 | Matsushita Electric Ind Co Ltd | Cleaning device of electrode of workpiece and cleaning method |
| JP2001118767A (en) * | 1999-10-15 | 2001-04-27 | Toshiba Mach Co Ltd | Device for cleaning inside of lens barrel of electron beam plotting device |
| CN103878150A (en) * | 2014-03-05 | 2014-06-25 | 上海华虹宏力半导体制造有限公司 | Probe cleaning method and probe cleaning device |
| CN109261646A (en) * | 2018-08-13 | 2019-01-25 | 南京理工大学 | A method of utilizing the nearly local electrode of focused ion beam cleaning three-dimensional atom probe |
-
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- 2022-01-19 CN CN202210060261.7A patent/CN114392985B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0518706A (en) * | 1991-07-15 | 1993-01-26 | Jeol Ltd | Probe cleaning device for tunneling microscope |
| JPH07297219A (en) * | 1994-04-25 | 1995-11-10 | Matsushita Electric Ind Co Ltd | Cleaning device of electrode of workpiece and cleaning method |
| JP2001118767A (en) * | 1999-10-15 | 2001-04-27 | Toshiba Mach Co Ltd | Device for cleaning inside of lens barrel of electron beam plotting device |
| CN103878150A (en) * | 2014-03-05 | 2014-06-25 | 上海华虹宏力半导体制造有限公司 | Probe cleaning method and probe cleaning device |
| CN109261646A (en) * | 2018-08-13 | 2019-01-25 | 南京理工大学 | A method of utilizing the nearly local electrode of focused ion beam cleaning three-dimensional atom probe |
Non-Patent Citations (1)
| Title |
|---|
| 付琴琴;张朋诚;单智伟;: "一种基于聚焦离子束技术的环境透射电镜光阑清理方法", 电子显微学报, no. 06, pages 538 - 543 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115208227A (en) * | 2022-07-26 | 2022-10-18 | 山东大学 | High voltage generating circuit, cleaning system and method suitable for ionosphere satellite load |
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