CN114370937B - Infrared optical detection system and method based on quartz tuning fork surface plasmon enhanced absorption - Google Patents
Infrared optical detection system and method based on quartz tuning fork surface plasmon enhanced absorption Download PDFInfo
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 65
- 239000010453 quartz Substances 0.000 title claims abstract description 51
- 238000001514 detection method Methods 0.000 title claims abstract description 37
- 230000003287 optical effect Effects 0.000 title claims abstract description 29
- 238000010521 absorption reaction Methods 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title abstract description 8
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 55
- 239000004793 Polystyrene Substances 0.000 claims abstract description 22
- 239000010931 gold Substances 0.000 claims abstract description 22
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229910052737 gold Inorganic materials 0.000 claims abstract description 21
- 239000004005 microsphere Substances 0.000 claims abstract description 21
- 229920002223 polystyrene Polymers 0.000 claims abstract description 21
- 230000000694 effects Effects 0.000 claims abstract description 18
- 239000002131 composite material Substances 0.000 claims abstract description 13
- 239000004205 dimethyl polysiloxane Substances 0.000 claims abstract description 12
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims abstract description 12
- 239000002086 nanomaterial Substances 0.000 claims abstract description 11
- 230000031700 light absorption Effects 0.000 claims abstract description 9
- 239000002184 metal Substances 0.000 claims abstract description 9
- 229910052751 metal Inorganic materials 0.000 claims abstract description 9
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 7
- -1 polydimethylsiloxane Polymers 0.000 claims abstract description 6
- 239000002245 particle Substances 0.000 claims description 14
- 230000001105 regulatory effect Effects 0.000 claims description 7
- 230000005284 excitation Effects 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- 238000004364 calculation method Methods 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 25
- 239000011248 coating agent Substances 0.000 description 10
- 238000000576 coating method Methods 0.000 description 10
- 239000000499 gel Substances 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000002105 nanoparticle Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000003623 enhancer Substances 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000001338 self-assembly Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J2001/4295—Photometry, e.g. photographic exposure meter using electric radiation detectors using a physical effect not covered by other subgroups of G01J1/42
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- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention provides an infrared optical detection system and method based on quartz tuning fork surface plasmon enhanced absorption, wherein the detection system comprises a detected light source, a quartz tuning fork system and a signal processing system, and a plasmon nano structure is arranged on the surface of a tuning fork arm and sequentially comprises a metal layer, a polydimethylsiloxane layer, a silicon dioxide layer, polystyrene microspheres and a nano gold gel composite layer from bottom to top. The invention realizes perfect light absorption by utilizing the surface plasmon effect based on the thermoelastic effect of the quartz tuning fork, and the micro thermoelastic deformation of the quartz tuning fork cantilever generated by light absorption is converted into an electric signal by the piezoelectric effect and is demodulated by the lock-in amplifier, thereby realizing low-cost and high-sensitivity infrared detection at room temperature.
Description
Technical Field
The invention relates to the technical field of infrared light detection of sensors, in particular to an infrared optical detection system and method based on quartz tuning fork surface plasmon enhanced absorption.
Background
Photodetectors play a very important role in applications such as spectroscopic analysis, gas detection, and optical communications. Photodiodes (PDs) have a fast response speed and a high sensitivity, however, depending on the band gap of the materials used to construct the photodiodes, they generally produce signals only in a narrow wavelength range. For example, the InGaAs photoelectric detector has better responsivity in the range of 800-1700 and nm, and the detection wavelength of the HgCdTe detector can reach 5500 nm. Thermopile sensors utilize the photo-thermal effect to convert incident light into thermal energy, however their thermal noise is typically large. High sensitivity broadband infrared light detection remains a significant challenge at this stage.
Quartz tuning forks have recently made some progress in applications in the field of optical detection due to their extremely high quality factor and stability. The photoelastic effect and the piezoelectric effect of the quartz tuning fork can be used for detecting visible light, infrared light and terahertz wave bands. Typically, the quartz tuning fork is coated with a metal film, which can cause a large reflection of incident light, affecting the light detection sensitivity. Previously, researchers have improved the light absorptivity by coating the surface with a light absorbing layer, thereby improving the detection sensitivity to some extent. However, this method still has a limitation that, on one hand, the coating is required to be as thick as possible or the light absorption coefficient of the material is required to be as large as possible in order to increase the light absorption, and increasing the thickness increases the quality of the tuning fork arm, and affects the resonance characteristics and the quality factor thereof. It is a challenge how to achieve perfect absorption of incident light at the tuning fork surface with an extremely thin absorption layer thickness.
Disclosure of Invention
The invention aims to provide an infrared optical detection system and method based on quartz tuning fork surface plasmon enhanced absorption, which are used for solving the problems of poor light absorption and low sensitivity of the existing detection system.
The invention aims at realizing the following technical scheme: an infrared optical detection system based on quartz tuning fork surface plasmon enhanced absorption, comprising:
the light source to be tested emits light waves of an infrared band; the light waves are changed into pulse light waves after passing through an optical chopper, and then the light waves are focused to a quartz tuning fork system through a focusing lens;
the quartz tuning fork system comprises a quartz tuning fork and a surface plasmon nano structure, wherein the surface plasmon nano structure is a multilayer composite structure arranged on the surface of a quartz tuning fork arm and comprises a metal layer, a polydimethylsiloxane layer, a silicon dioxide layer, polystyrene microspheres and a nano gold gel composite layer from bottom to top in sequence; after the light wave irradiates the tuning fork arm, the tuning fork arm generates deformation through plasmon resonance absorption and a thermoelastic effect, and the deformation is converted into a current signal through a piezoelectric effect;
the signal processing system is used for collecting and processing the current signal input by the quartz tuning fork system, the current signal is firstly converted into voltage by the transimpedance amplifier, and the voltage is demodulated by the lock-in amplifier and then collected and recorded by the oscilloscope or the data collecting card.
The measured light source adopts an infrared laser, the output power of the infrared laser is controlled by a laser driver, and the modulation signal of the infrared laser is provided by a function generator.
The infrared laser emits light waves having a wavelength in the range of 1500nm-20 μm.
The metal layer is an original silver layer of the tuning fork arm, the thickness is 90-110nm, the thickness of the polydimethylsiloxane layer is 50-300 nm, and the thickness of the silicon dioxide layer is 10-200 nm.
The polystyrene microsphere and the nano gold gel composite layer are composite layers formed by filling nano gold gel in gaps of the polystyrene microsphere, the diameter of the polystyrene microsphere is 1.0-1.9 mu m, the coating thickness of the nano gold gel is 10-200 nm, and the particle size of the nano gold particles in the nano gold gel is 20-60 nm.
The resonance absorption peak is regulated and controlled by regulating the particle size of the polystyrene microsphere and the size of the nano gold particle, so that broadband light absorption is realized.
The phase-locked amplifier demodulates the signal to obtain the amplitude of the signal, obtains the signal which is in direct proportion to the optical signal emitted by the tested light source, and finally collects the signal by the oscilloscope or the data collection card.
An infrared optical detection method based on quartz tuning fork surface plasmon enhanced absorption comprises the following steps:
a. setting the detection system; the infrared laser is used as a measured light source, the detection system is started, the output power of the infrared laser is controlled by a laser driver, a modulation signal of the infrared laser is provided by a function generator, the modulation frequency is equal to the tuning fork inherent resonance vibration frequency of a quartz tuning fork system, and a focusing lens is used for focusing an output laser beam on a tuning fork arm of the quartz tuning fork system;
b. after the light wave irradiates the tuning fork arm, the surface plasmon nano structure enables the quartz tuning fork arm to efficiently absorb incident light, the incident light is converted into deformation of the tuning fork arm through a thermoelastic effect, and then the deformation is converted into a current signal which is output along with the change of optical excitation power through the piezoelectric effect of the tuning fork arm;
c. the electric signal is sent to a signal processing system for processing; the signal is amplified by a transimpedance amplifier, then the generated voltage signal is transmitted to a phase-locked amplifier for demodulation, and the tuning fork amplitude is obtained through inversion calculation, so that the optical detection is realized.
Compared with the prior art, the invention has the following beneficial effects:
(1) The infrared detection device is based on the photo-thermal elastic effect of the quartz tuning fork, and the detector has higher noise immunity function due to the high quality factor of the quartz tuning fork. The quartz tuning fork has great advantages in terms of manufacturing and using cost and using convenience.
(2) Different from the existing quartz tuning fork surface coating, the invention utilizes the inherent metal layer of the tuning fork, and realizes the enhancement of tuning fork surface plasmon resonance absorption by coating the dielectric layer and the surface micro-nano structure layer, and perfect light absorption is realized on an extremely thin composite layer, so that the quality factor of the detector is not affected, and the detection sensitivity is greatly improved.
Drawings
FIG. 1 is a flow chart of the detection method of the present invention.
Fig. 2 is a schematic diagram of an infrared optical detection system based on a surface plasmon enhanced absorption quartz tuning fork. In fig. 2: 1. a quartz tuning fork; 2. a surface plasmon nanostructure; 3. an optical chopper; 4. an infrared laser; 5. a function generator; 6. a phase-locked amplifier; 7. an oscilloscope; 8. and a data acquisition card.
Fig. 3 is a schematic diagram of a surface plasmon nanostructure of a tuning fork arm.
FIG. 4 is a signal obtained from a bare quartz tuning fork, PDMS coated tuning fork and surface plasmon absorption enhanced tuning fork detector at the same excitation power.
Detailed Description
As shown in fig. 1 to 3, the quartz tuning fork infrared optical detection system based on quartz tuning fork surface plasmon enhanced absorption provided by the invention comprises the following specific structures:
the infrared laser is used as the tested light source, and the output power of the tested light source is controlled by the driving current. The laser modulation signal is provided by a function generator, the continuous light outputted from the light source is changed into pulse light with a certain pulse repetition frequency and a certain pulse width after passing through an optical chopper, and then the laser beam is focused to the root area of the tuning fork arm by a focusing lens.
And the quartz tuning fork system is used for carrying out optical detection by utilizing the thermoelastic effect of the quartz tuning fork. Pulse light irradiates the tuning fork arm, the tuning fork arm is heated to deform, and the deformation is converted into an electric signal through the piezoelectric effect of the tuning fork arm.
A surface plasmon nanostructure is disposed on the tuning fork arm. The surface plasmon nanometer structure is a 3-4-layer composite structure composed of a metal-medium layer and micro-nano particles. The quartz tuning fork arm is made of a silicon nitride (SiN) substrate material, and the original silver (Ag) layer on the surface layer is 100 nm thick. The surfaces of the tuning prongs are sequentially coated with Polydimethylsiloxane (PDMS) and silicon dioxide (SiO 2 ) Polystyrene (PS) microspheres and nanogold gels. Wherein the PDMS coating thickness was 300 a nm a and the silica coating thickness was 100 a nm a. The PS microsphere is water-soluble microsphere with diameter of 1 μm and 1.5 μm, the PS microsphere solution with two particle diameters is mixed according to the volume ratio of 1:1, then the surface of tuning fork is coated by a spin coater, the rotating speed is 1000 revolutions per second, the time is 1 minute, and the PS microsphere film with thickness of 100 nm is formed by drying 50 minutes in an oven at 80 ℃. Subsequently, a gold nanoparticle solution having a particle diameter of 30 nm was selected, and spin-coating of gold nanoparticle gel was performed at a rotational speed of 1500 rpm for 1 minute, and the coating thickness was made 50 nm. The PDMS has a thermal expansion coefficient far greater than that of the metal layer on the tuning fork surface, and a larger thermal expansion coefficient gradient generated between the two layers can generate a larger thermal deformation rate. SiO (SiO) 2 As a medium layer, PS spheres and nano gold gel on the surface layer form an absorption layer, and plasmon resonance absorption at different peak positions can be realized by adjusting the particle sizes of the PS spheres and the volume ratio of the solutions of the two particle sizes.
And the signal processing system outputs a current signal through a piezoelectric effect after the quartz tuning fork is excited by light, the current signal is firstly converted into voltage by a transimpedance amplifier, and the voltage is demodulated by a lock-in amplifier and then is acquired and recorded by an oscilloscope or a data acquisition card.
The detection process of the invention is as follows: firstly, an infrared laser is used as a measured light source, a quartz tuning fork detector is irradiated, and the output power of the quartz tuning fork detector is controlled through driving current. The modulation signal provided by the function generator is used for controlling the waveform of the laser pulse, and the modulation frequency of the modulation signal is the same as the resonance frequency of the quartz tuning fork with the coating layer. The modulated light source is periodically focused by an optical chopper and focusing lens onto a localized area of the root on the coated quartz tuning fork. The generated current is demodulated by using a lock-in amplifier, the generated signal is transmitted to an oscilloscope, and finally, the signal obtained in the process is recorded and processed by a data acquisition card, so that the information such as the responsivity of the tuning fork detector is obtained.
Fig. 3 shows a schematic structural diagram of a quartz tuning fork surface plasmon coating, laser is focused on the root of the tuning fork, the coating materials are sequentially shown in the figure, and a PDMS layer can improve the thermoelastic conversion efficiency. Ag. SiO (SiO) 2 The dielectric layer, the PS microsphere and the Au jointly form a surface plasmon absorption enhancer, so that the absorption rate of incident light is enhanced. The light absorption peak position can be regulated by regulating the particle size of the PS microspheres, and in addition, the perfect absorption structure of broadband light can be formed by self-assembly by regulating the mixing proportion of the PS microspheres with various particle sizes.
A Distributed Feedback (DFB) laser is used as an excitation light source, the output wavelength of the laser is 1512, nm, the maximum output power of the laser is 10 mW, and the light output by the laser is focused and irradiated to the root of a quartz tuning fork arm. The DFB laser is driven with a sinusoidal signal having a frequency equal to the tuning fork resonant frequency (32.7 KHz) to place the tuning fork in resonance under optical excitation. The quasi-continuous light output by the DFB laser is subjected to 1 Hz pulse modulation by using a mechanical chopper, a tuning fork output signal is demodulated by a phase-locked amplifier after transimpedance amplification and voltage amplification, and data acquisition and storage are performed by using an oscilloscope.
Fig. 4 shows response signal waveforms obtained by the bare tuning fork, the PDMS coated tuning fork and the surface plasmon absorption enhancement tuning fork under the action of 1512 and nm laser with the same excitation power, and it can be seen that the surface plasmon absorption enhancement structure can significantly improve the output signal amplitude of the quartz tuning fork detector, so that the quartz tuning fork detector has higher light detection sensitivity.
Claims (6)
1. An infrared optical detection system based on quartz tuning fork surface plasmon enhanced absorption, comprising:
the light source to be tested emits light waves of an infrared band; the light waves are changed into pulse light waves after passing through an optical chopper, and then the light waves are focused to a quartz tuning fork system through a focusing lens; the wavelength of the light wave is 1500nm-20 mu m;
the quartz tuning fork system comprises a quartz tuning fork and a surface plasmon nano structure, wherein the surface plasmon nano structure is a multilayer composite structure arranged on the surface of a quartz tuning fork arm and comprises a metal layer, a polydimethylsiloxane layer, a silicon dioxide layer, polystyrene microspheres and a nano gold gel composite layer from bottom to top in sequence; after the light wave irradiates the tuning fork arm, the tuning fork arm generates deformation through plasmon resonance absorption and a thermoelastic effect, and the deformation is converted into a current signal through a piezoelectric effect;
the metal layer is an original silver layer of the tuning fork arm, and the polystyrene microsphere and nano gold gel composite layer is a composite layer formed by filling nano gold gel in gaps of the polystyrene microsphere; the resonance absorption peak is regulated and controlled by regulating the particle size of the polystyrene microsphere and the size of the nano gold particles in the nano gold gel, so that broadband light absorption is realized;
the signal processing system is used for collecting and processing the current signal input by the quartz tuning fork system, the current signal is firstly converted into voltage by the transimpedance amplifier, and the voltage is demodulated by the lock-in amplifier and then collected and recorded by the oscilloscope or the data collecting card.
2. The infrared optical detection system of claim 1, wherein the light source to be measured employs an infrared laser, the output power of the infrared laser is controlled by a laser driver, and the modulation signal of the infrared laser is provided by a function generator.
3. The infrared optical detection system of claim 1, wherein the metal layer is a silver layer of a tuning fork, the thickness is 90-110 a nm a, the thickness of the polydimethylsiloxane layer is 50-300 a nm a, and the thickness of the silica layer is 10-200 a nm a.
4. The infrared optical detection system according to claim 1, wherein the polystyrene microsphere and the nano gold gel composite layer are composite layers formed by filling nano gold gel in gaps of the polystyrene microsphere, the diameter of the polystyrene microsphere is 1.0-1.9 μm, the filling thickness of the nano gold gel is 10-200 nm, and the particle size of the nano gold particles in the nano gold gel is 20-60 nm.
5. The infrared optical detection system according to claim 1, wherein the phase-locked amplifier demodulates the signal to obtain the amplitude of the signal, obtains a signal proportional to the optical signal emitted by the measured light source, and finally collects the signal by the oscilloscope or the data acquisition card.
6. An infrared optical detection method based on quartz tuning fork surface plasmon enhanced absorption is characterized by comprising the following steps:
a. setting any one of the detection systems of claims 1-5; the infrared laser is used as a measured light source, the detection system is started, the output power of the infrared laser is controlled by a laser driver, a modulation signal of the infrared laser is provided by a function generator, the modulation frequency is equal to the tuning fork inherent resonance vibration frequency of a quartz tuning fork system, and a focusing lens is used for focusing an output laser beam on a tuning fork arm of the quartz tuning fork system;
b. after the light wave irradiates the tuning fork arm, the surface plasmon nano structure enables the tuning fork arm to efficiently absorb incident light, the incident light is converted into deformation of the tuning fork arm through a thermoelastic effect, and then the deformation is converted into a current signal through a piezoelectric effect of the tuning fork arm, and an electric signal changing along with light excitation power is output;
c. the electric signal is sent to a signal processing system for processing; the signal is amplified by a transimpedance amplifier, then the generated voltage signal is transmitted to a phase-locked amplifier for demodulation, and the tuning fork amplitude is obtained through inversion calculation, so that the optical detection is realized.
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| CN107064012B (en) * | 2017-04-11 | 2019-06-25 | 山西大学 | Quartz enhanced photoacoustic spectroscopy gas-detecting device and method based on beat effect |
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| JP2009036578A (en) * | 2007-07-31 | 2009-02-19 | Nippon Telegr & Teleph Corp <Ntt> | Light absorption measuring instrument |
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