CN114370937A - Infrared optical detection system and method based on quartz tuning fork surface plasmon enhanced absorption - Google Patents
Infrared optical detection system and method based on quartz tuning fork surface plasmon enhanced absorption Download PDFInfo
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 68
- 239000010453 quartz Substances 0.000 title claims abstract description 50
- 238000001514 detection method Methods 0.000 title claims abstract description 38
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- 238000000034 method Methods 0.000 title abstract description 8
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- 235000012239 silicon dioxide Nutrition 0.000 claims description 54
- 239000004793 Polystyrene Substances 0.000 claims description 20
- 239000004005 microsphere Substances 0.000 claims description 19
- 229920002223 polystyrene Polymers 0.000 claims description 19
- 239000002245 particle Substances 0.000 claims description 14
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 11
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 11
- 239000002131 composite material Substances 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000000377 silicon dioxide Substances 0.000 claims description 9
- 230000005284 excitation Effects 0.000 claims description 6
- 239000010931 gold Substances 0.000 claims description 5
- 239000002086 nanomaterial Substances 0.000 claims description 5
- -1 polydimethylsiloxane Polymers 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
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- 238000004364 calculation method Methods 0.000 claims description 2
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- 230000005489 elastic deformation Effects 0.000 abstract 1
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- 238000003199 nucleic acid amplification method Methods 0.000 description 2
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 1
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- 230000009286 beneficial effect Effects 0.000 description 1
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- 238000010183 spectrum analysis Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J2001/4295—Photometry, e.g. photographic exposure meter using electric radiation detectors using a physical effect not covered by other subgroups of G01J1/42
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Abstract
The invention provides an infrared optical detection system and method based on quartz tuning fork surface plasmon enhanced absorption. The invention is based on the thermal elastic effect of the quartz tuning fork, realizes perfect light absorption by utilizing the surface plasmon effect, converts the tiny thermal elastic deformation of the quartz tuning fork cantilever generated by light absorption into an electric signal by the piezoelectric effect and demodulates the signal by the phase-locked amplifier, thereby realizing low-cost and high-sensitivity infrared detection at room temperature.
Description
Technical Field
The invention relates to the technical field of infrared light detection of sensors, in particular to an infrared optical detection system and method based on quartz tuning fork surface plasmon enhanced absorption.
Background
Photodetectors play a very important role in applications such as spectral analysis, gas detection, and optical communication. Photodiodes (PDs) have fast response speeds and high sensitivity, however, depending on the band gap of the materials used to construct the photodiodes, they typically produce signals only in a narrow wavelength range. For example, the InGaAs photodetector has better responsivity in the range of 800-1700 nm, and the detection wavelength of the HgCdTe detector can reach 5500 nm. Thermopile sensors utilize the photothermal effect to convert incident light into thermal energy, however, their thermal noise is typically large. High-sensitivity broadband infrared detection remains a huge challenge at the present stage.
The quartz tuning fork has extremely high quality factor and stability, so that the application of the quartz tuning fork in the field of optical detection is advanced to a certain extent recently. The optical detection of visible light, infrared and terahertz wave bands can be carried out through the thermoelastic effect and the piezoelectric effect of the quartz tuning fork. Usually, the surface of the quartz tuning fork is coated with a metal film, which can generate a large reflection to the incident light, and influence the light detection sensitivity. Heretofore, researchers have improved the light absorption rate by surface-coating a light absorption layer, and have improved the detection sensitivity to some extent. However, this method still has a limitation that, on one hand, the coating needs to be as thick as possible or the material light absorption coefficient needs to be as large as possible in order to increase the light absorption, and the increase of the thickness will increase the mass of the tuning fork arm, affecting the resonance characteristic and quality factor thereof. It is a challenge how to achieve perfect absorption of the incident light on the tuning fork surface with an extremely thin absorption layer thickness.
Disclosure of Invention
The invention aims to provide an infrared optical detection system and method based on quartz tuning fork surface plasmon enhanced absorption, and aims to solve the problems of poor light absorption and low sensitivity of the existing detection system.
The purpose of the invention is realized by the following technical scheme: an infrared optical detection system based on quartz tuning fork surface plasmon enhanced absorption, comprising:
a light source to be measured that emits a light wave in an infrared band; the light wave is changed into a pulse light wave after passing through an optical chopper, and then the light wave is focused to a quartz tuning fork system through a focusing lens;
the quartz tuning fork system comprises a quartz tuning fork and a surface plasmon nanometer structure, wherein the surface plasmon nanometer structure is a multilayer composite structure arranged on the surface of a quartz tuning fork arm and sequentially comprises a metal layer, a polydimethylsiloxane layer, a silicon dioxide layer, polystyrene microspheres and a nanogold gel composite layer from bottom to top; after the light waves irradiate the tuning fork arms, the tuning fork arms generate deformation through plasmon resonance absorption and thermo-elastic effect, and the deformation is converted into current signals through piezoelectric effect;
and the signal processing system is used for acquiring and processing a current signal input by the quartz tuning fork system, the current signal is firstly converted into voltage by the transimpedance amplifier, and the voltage is acquired and recorded by the oscilloscope or the data acquisition card after the voltage signal is demodulated by the lock-in amplifier.
The measured light source adopts an infrared laser, the output power of the infrared laser is controlled by a laser driver, and a modulation signal of the infrared laser is provided by a function generator.
The infrared laser emits light waves with the wavelength within the range of 1500 nm-20 mu m.
The metal layer is an original silver layer of the tuning fork arm, the thickness of the metal layer is 90-110nm, the thickness of the polydimethylsiloxane layer is 50-300 nm, and the thickness of the silicon dioxide layer is 10-200 nm.
The polystyrene microsphere and nanogold gel composite layer is a composite layer formed by filling nanogold gel in gaps of polystyrene microspheres, the diameter of the polystyrene microsphere is 1.0-1.9 mu m, the coating thickness of the nanogold gel is 10-200 nm, and the particle size of nanogold particles in the nanogold gel is 20-60 nm.
The resonance absorption peak is regulated and controlled by adjusting the particle size of the polystyrene microsphere and the size of the nano-gold particles, so that broadband light absorption is realized.
The phase-locked amplifier demodulates the signal to obtain the amplitude of the signal, and the signal is obtained in direct proportion to the light signal from the light source to be detected and is finally collected by the oscilloscope or the data collecting card.
An infrared optical detection method based on quartz tuning fork surface plasmon enhanced absorption comprises the following steps:
a. setting the detection system; starting the detection system by taking an infrared laser as a detected light source, controlling the output power of the infrared laser by a laser driver, providing a modulation signal of the infrared laser by a function generator, wherein the modulation frequency is equal to the natural resonant vibration frequency of a tuning fork of the quartz tuning fork system, and focusing an output laser beam on a tuning fork arm of the quartz tuning fork system by adopting a focusing lens;
b. after light waves irradiate the tuning fork arms, the surface plasmon nanometer structures enable the quartz tuning fork arms to efficiently absorb incident light, the incident light is converted into deformation of the tuning fork arms through a thermoelastic effect, and then the deformation is converted into current signals which are output and change along with light excitation power through a piezoelectric effect of the tuning fork arms;
c. the electric signal is sent to a signal processing system for processing; the signal is firstly amplified by the trans-impedance amplifier, then the generated voltage signal is transmitted to the phase-locked amplifier for demodulation, and the tuning fork amplitude is obtained through inversion calculation, so that optical detection is realized.
Compared with the prior art, the invention has the following beneficial effects:
(1) the infrared detection device is based on the photo-thermal elastic effect of the quartz tuning fork, and the detector has a high noise immunity function due to the high quality factor of the quartz tuning fork. The quartz tuning fork has great advantages in manufacturing and using cost and using convenience.
(2) Different from the existing quartz tuning fork surface coating, the tuning fork surface plasmon resonance absorption enhancement is realized by utilizing the inherent metal layer of the tuning fork and coating the dielectric layer and the surface micro-nano structure layer, perfect light absorption is realized on an extremely thin composite layer, the quality factor of a detector is not influenced, and the detection sensitivity is greatly improved.
Drawings
FIG. 1 is a flow chart of the detection method of the present invention.
FIG. 2 is a schematic structural diagram of an infrared optical detection system based on a quartz tuning fork with surface plasmon enhanced absorption. In fig. 2: 1. a quartz tuning fork; 2. a surface plasmon nanostructure; 3. an optical chopper; 4. an infrared laser; 5. a function generator; 6. a phase-locked amplifier; 7. an oscilloscope; 8. a data acquisition card.
FIG. 3 is a schematic diagram of a surface plasmon nanostructure of a tuning fork arm.
Fig. 4 shows signals obtained by the bare quartz tuning fork, the PDMS coated tuning fork, and the surface plasmon absorption enhanced tuning fork detector under the same excitation power.
Detailed Description
As shown in fig. 1 to fig. 3, the quartz tuning fork infrared optical detection system based on quartz tuning fork surface plasmon enhanced absorption provided by the present invention specifically includes:
the tested light source adopts an infrared laser as the tested light source, and the output power of the tested light source is controlled by the driving current. The laser modulation signal is provided by a function generator, continuous light output by the light source is changed into pulse light with certain pulse repetition frequency and certain pulse width after passing through the optical chopper, and then the laser beam is focused to the root area of the tuning fork arm by the focusing lens.
And the quartz tuning fork system performs optical detection by utilizing the thermoelastic effect of the quartz tuning fork. The pulsed light irradiates the tuning fork arms, the tuning fork arms are heated to deform, and the deformation is converted into an electric signal through the piezoelectric effect of the tuning fork arms.
Surface plasmon nanostructures are disposed on the tuning fork arms. The surface plasmon nanometer structure is a 3-4-layer composite structure consisting of metal, a dielectric layer and micro-nano particles. The quartz tuning fork arm is made of a silicon nitride (SiN) substrate material, and the surface layer is provided with a layer of silver (Ag) and is 100 nm thick. Sequentially coating Polydimethylsiloxane (PDMS) and silicon dioxide (SiO) on the surfaces of the tuning fork arms2) Polystyrene (PS) microspheres, and nanogold gels. Wherein, the coating thickness of PDMS is 300 nm, and the coating thickness of silicon dioxide is 100 nm. The PS microspheres are water-soluble microspheres with the diameters of 1 micron and 1.5 microns, PS microsphere solutions with the two particle sizes are mixed according to the volume ratio of 1:1, then the tuning fork surface is coated by a spin coater at the rotating speed of 1000 rpm for 1 minute, and the PS microspheres are dried for 50 minutes at the temperature of 80 ℃ by an oven to form a PS microsphere film with the thickness of 100 nm. Followed byAnd then, selecting a nano gold particle solution with the particle size of 30 nm, carrying out spin coating on the nano gold gel at the rotating speed of 1500 rpm for 1 minute, and enabling the coating thickness to be 50 nm. The PDMS has a thermal expansion coefficient which is far larger than that of the metal layer on the surface of the tuning fork, so that a larger thermal deformation rate can be generated due to a larger thermal expansion coefficient gradient generated between the two layers. SiO 22As a dielectric layer, the PS spheres and the nanogold gel on the surface layer form an absorption layer, and the volume ratio of the solution with the particle size of the PS spheres and the solution with the particle size of the two types of particles can be adjusted to realize plasmon resonance absorption at different peak positions.
In the signal processing system, a quartz tuning fork is excited by light and outputs a current signal through a piezoelectric effect, the current signal is firstly converted into voltage by a trans-impedance amplifier, and the voltage is acquired and recorded by an oscilloscope or a data acquisition card after the voltage signal is demodulated by a phase-locked amplifier.
The detection process of the invention is as follows: firstly, an infrared laser is used as a detected light source to irradiate a quartz tuning fork detector, and the output power of the quartz tuning fork detector is controlled by driving current. The modulation signal provided by the function generator is used for controlling the waveform of the laser pulse, and the modulation frequency of the modulation signal is the same as the resonance frequency of the quartz tuning fork with the coating layer. The modulated light source is periodically focused to a local area of the root on the quartz tuning fork with the coating layer through an optical chopper and a focusing lens. And demodulating the generated current by using a phase-locked amplifier, transmitting the generated signal to an oscilloscope, and finally recording and processing the signal obtained in the process by using a data acquisition card so as to obtain information such as responsivity of the tuning fork detector.
FIG. 3 shows a structural diagram of a quartz tuning fork surface plasmon polariton coating, laser is focused to the root of the tuning fork, and the coating material sequence is shown in the figure, so that the PDMS layer can improve the thermal-elastic conversion efficiency. Ag. SiO 22The dielectric layer, the PS microspheres and the Au form a surface plasmon absorption enhancer together, so that the incident light absorption rate is enhanced. The light absorption peak position can be regulated and controlled by regulating and controlling the diameter of the PS microspheres, and in addition, the perfect absorption structure of broadband light can be formed by self-assembling by regulating and controlling the mixing proportion of the PS microspheres with various particle diameters.
A Distributed Feedback (DFB) laser is used as an excitation light source, the output wavelength of the DFB laser is 1512 nm, the maximum output power of the DFB laser is 10 mW, and light output by the DFB laser is irradiated to the root of an arm of a quartz tuning fork after being focused. The DFB laser is driven with a sinusoidal signal having a frequency equal to the tuning fork resonant frequency (32.7 KHz) to bring the tuning fork into resonance under optical excitation. The quasi-continuous light output by the DFB laser is subjected to 1 Hz pulse modulation by using a mechanical chopper, a tuning fork output signal is demodulated by using a phase-locked amplifier after trans-impedance amplification and voltage amplification, and data acquisition and storage are performed by using an oscilloscope.
Fig. 4 shows response signal waveforms obtained by the bare tuning fork, the PDMS coated tuning fork and the surface plasmon absorption enhanced tuning fork under the action of 1512 nm laser with the same excitation power, and it can be seen that the surface plasmon enhanced absorption structure can significantly improve the amplitude of the output signal of the quartz tuning fork detector, and thus has higher optical detection sensitivity.
Claims (8)
1. An infrared optical detection system based on quartz tuning fork surface plasmon enhanced absorption, comprising:
a light source to be measured that emits a light wave in an infrared band; the light wave is changed into a pulse light wave after passing through an optical chopper, and then the light wave is focused to a quartz tuning fork system through a focusing lens;
the quartz tuning fork system comprises a quartz tuning fork and a surface plasmon nanometer structure, wherein the surface plasmon nanometer structure is a multilayer composite structure arranged on the surface of a quartz tuning fork arm and sequentially comprises a metal layer, a polydimethylsiloxane layer, a silicon dioxide layer, polystyrene microspheres and a nanogold gel composite layer from bottom to top; after the light waves irradiate the tuning fork arms, the tuning fork arms generate deformation through plasmon resonance absorption and thermo-elastic effect, and the deformation is converted into current signals through piezoelectric effect;
and the signal processing system is used for acquiring and processing a current signal input by the quartz tuning fork system, the current signal is firstly converted into voltage by the transimpedance amplifier, and the voltage is acquired and recorded by the oscilloscope or the data acquisition card after the voltage signal is demodulated by the lock-in amplifier.
2. The infrared optical detection system as claimed in claim 1, wherein the detected light source employs an infrared laser, an output power of the infrared laser is controlled by a laser driver, and a modulation signal of the infrared laser is provided by a function generator.
3. The infrared optical detection system of claim 2, characterized in that the infrared laser emits light waves with a wavelength in the range of 1500 nm-20 μ ι η.
4. The infrared optical detection system of claim 1, wherein the metal layer is an original silver layer of the tuning fork arm, and has a thickness of 90-110nm, the polydimethylsiloxane layer has a thickness of 50-300 nm, and the silica layer has a thickness of 10-200 nm.
5. The infrared optical detection system of claim 1, wherein the polystyrene microsphere and nanogold gel composite layer is a composite layer formed by filling nanogold gel in gaps of polystyrene microspheres, the diameter of the polystyrene microspheres is 1.0-1.9 μm, the filling thickness of the nanogold gel is 10-200 nm, and the particle size of nanogold particles in the nanogold gel is 20-60 nm.
6. The infrared optical detection system of claim 5, wherein broadband light absorption is achieved by adjusting the particle size of the polystyrene microspheres and the size of the gold nanoparticles to control the resonance absorption peak.
7. The infrared optical detection system of claim 1, wherein the lock-in amplifier demodulates the signal to obtain an amplitude of the signal, and obtains a signal proportional to the optical signal from the light source to be detected, and finally the signal is collected by an oscilloscope or a data acquisition card.
8. An infrared optical detection method based on quartz tuning fork surface plasmon enhanced absorption is characterized by comprising the following steps:
a. providing a detection system according to any one of claims 1 to 7; starting the detection system by taking an infrared laser as a detected light source, controlling the output power of the infrared laser by a laser driver, providing a modulation signal of the infrared laser by a function generator, wherein the modulation frequency is equal to the natural resonant vibration frequency of a tuning fork of the quartz tuning fork system, and focusing an output laser beam on a tuning fork arm of the quartz tuning fork system by adopting a focusing lens;
b. after the light waves irradiate the tuning fork arms, the surface plasmon nano structures enable the tuning fork arms to efficiently absorb incident light, the incident light is converted into deformation of the tuning fork arms through a thermoelastic effect, then the deformation is converted into current signals through a piezoelectric effect of the tuning fork arms, and electric signals changing along with light excitation power are output;
c. the electric signal is sent to a signal processing system for processing; the signal is firstly amplified by the trans-impedance amplifier, then the generated voltage signal is transmitted to the phase-locked amplifier for demodulation, and the tuning fork amplitude is obtained through inversion calculation, so that the optical detection is realized.
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| WO2024159499A1 (en) * | 2023-02-03 | 2024-08-08 | 香港中文大学 | Optical detector apparatus |
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