CN114486792A - Photo-thermal interference spectrum gas sensing device based on near-infrared dual-wavelength photonic crystal slow light waveguide and detection method - Google Patents
Photo-thermal interference spectrum gas sensing device based on near-infrared dual-wavelength photonic crystal slow light waveguide and detection method Download PDFInfo
- Publication number
- CN114486792A CN114486792A CN202210051808.7A CN202210051808A CN114486792A CN 114486792 A CN114486792 A CN 114486792A CN 202210051808 A CN202210051808 A CN 202210051808A CN 114486792 A CN114486792 A CN 114486792A
- Authority
- CN
- China
- Prior art keywords
- infrared
- output
- optical fiber
- photonic crystal
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004038 photonic crystal Substances 0.000 title claims abstract description 84
- 238000001514 detection method Methods 0.000 title claims abstract description 70
- 238000001228 spectrum Methods 0.000 title claims abstract description 15
- 239000013307 optical fiber Substances 0.000 claims abstract description 98
- 230000008878 coupling Effects 0.000 claims abstract description 61
- 238000010168 coupling process Methods 0.000 claims abstract description 61
- 238000005859 coupling reaction Methods 0.000 claims abstract description 61
- 238000000605 extraction Methods 0.000 claims abstract description 13
- 230000003287 optical effect Effects 0.000 claims description 57
- 239000000919 ceramic Substances 0.000 claims description 29
- 239000000835 fiber Substances 0.000 claims description 19
- 239000012491 analyte Substances 0.000 claims description 11
- 238000005086 pumping Methods 0.000 claims description 11
- 239000000523 sample Substances 0.000 claims description 10
- 238000010521 absorption reaction Methods 0.000 claims description 9
- 238000004611 spectroscopical analysis Methods 0.000 claims description 6
- 230000003321 amplification Effects 0.000 claims description 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 239000012071 phase Substances 0.000 description 37
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 238000005253 cladding Methods 0.000 description 9
- 239000010410 layer Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 7
- 230000001795 light effect Effects 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 238000002835 absorbance Methods 0.000 description 4
- 239000012792 core layer Substances 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000004205 dimethyl polysiloxane Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- -1 Polydimethylsiloxane Polymers 0.000 description 1
- 238000004847 absorption spectroscopy Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A90/00—Technologies having an indirect contribution to adaptation to climate change
- Y02A90/10—Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation
Abstract
The invention provides a photothermal interference spectrum gas sensing device based on a near-infrared dual-wavelength photonic crystal slow light waveguide, which comprises a near-infrared detection laser module, a near-infrared pump laser module, a near-infrared dual-wavelength photonic crystal slow light waveguide sensing module, an input optical fiber coupler, an optical fiber phase delayer, an optical fiber circulator, an output optical fiber coupler, a phase adjusting module and a second harmonic signal extraction module, wherein the near-infrared detection laser module is connected with the input optical fiber coupler; the dual-wavelength photonic crystal slow light waveguide sensing module is composed of a dual-wavelength photonic crystal slow light waveguide and a coupling waveguide and is used as one arm of a Mach-Zehnder interferometer, the optical fiber phase delayer is used as the other arm of the Mach-Zehnder interferometer, pump light is absorbed by gas to generate a photo-thermal effect, detection light output by the near-infrared detection light source module generates a photo-thermal interference signal through the Mach-Zehnder interferometer, and the photo-thermal interference signal is processed by the second harmonic signal extraction module to determine the gas concentration.
Description
Technical Field
The invention belongs to the technical field of infrared analyte detection, and particularly relates to a near-infrared dual-wavelength photonic crystal slow optical waveguide-based photo-thermal interference spectrum gas sensing device and a detection method.
Background
Conventional optical waveguide sensors rely on evanescent field absorption sensing. Most energy of the optical field is distributed in a core layer of the waveguide, the evanescent field is small in occupied ratio, and the absorbance of gas detected by a direct absorption spectroscopy technology is weak, so that the sensitivity of the sensor is low. The dual-wavelength photonic crystal slow light waveguide can realize a slow light effect at room temperature, reduce the group velocity of light, increase the effective optical path and enhance the interaction between the light and an analyte, is applied to the detection of various analytes, and is one of the most application-promising on-chip sensing devices. However, the transmission loss of the slow optical waveguide of the dual-wavelength photonic crystal is large, and the loss is large when the group refractive index of the waveguide is high, which makes it difficult to manufacture a sensing device with high group refractive index and long optical path.
The photothermal interference spectroscopy technique can detect weak absorbance in gas-phase and liquid-phase materials with very high sensitivity by measuring the change in optical phase accumulated by infrared light over a propagation distance. The slow light effect of the slow light waveguide of the dual-wavelength photonic crystal is utilized to simultaneously reduce the group velocity of the detection light and the pumping light, enhance the absorption of the analyte to the pumping light and increase the phase accumulation of the detection light. On the other hand, the phase change of the detection light is measured by the interferometry, the high transmission loss of the slow optical waveguide of the dual-wavelength photonic crystal can be ignored, the pumping light is used as a source for exciting the optical thermal effect of the analyte and does not need to be detected, and the slow optical waveguide of the dual-wavelength photonic crystal can be designed into a device which has high group refractive index for the pumping light and the detection light. Thereby significantly improving the sensitivity of the sensor.
Compared with a mid-infrared system, the near-infrared sensing system has lower cost and is more beneficial to on-chip integration, so that the pump light and the probe light use near-infrared bands. The dual-wavelength photonic crystal slow light waveguide adopts a non-suspended film structure, has stronger mechanical stability, can be produced in batches, and is beneficial to preparing a commercially feasible portable sensor.
Disclosure of Invention
Aiming at the characteristics of short optical path, low response speed and low sensitivity of the conventional optical waveguide sensing system, the invention discloses a dual-wavelength photonic crystal slow optical waveguide sensor based on a photothermal interference spectrum technology, which generates a slow light effect in the wave bands of near-infrared detection light and pumping light, increases the effective optical path of a device, enhances the absorption of an analyte to the pumping light and the phase accumulation of the near-infrared detection light, and improves the sensitivity and the response speed of the sensor.
The technical scheme adopted by the invention is as follows:
a photothermal interference spectrum gas sensing device based on a near-infrared dual-wavelength photonic crystal slow light waveguide comprises a near-infrared detection laser module, a near-infrared pumping laser module, a near-infrared dual-wavelength photonic crystal slow light waveguide sensing module, an input optical fiber coupler, an optical fiber phase delayer, an optical fiber circulator, an output optical fiber coupler, a phase adjusting module and a second harmonic signal extraction module;
the output end of the near-infrared detection laser module is connected with the input end of an input optical fiber coupler, and the two output ends of the input optical fiber coupler are respectively connected with the first port of the near-infrared dual-wavelength photonic crystal slow optical waveguide sensing module and the input end of an optical fiber phase delayer;
the three ports of the optical fiber circulator are respectively connected with the output end of the near-infrared pump laser module, the second port of the near-infrared dual-wavelength photonic crystal slow optical waveguide sensing module and the first input end of the output optical fiber coupler, the second input end of the output optical fiber coupler is connected with the output end of the optical fiber phase delayer, the two output ends of the output optical fiber coupler are respectively connected with the input end of the phase adjusting module and the input end of the second harmonic signal extraction module, and the output end of the phase adjusting module is connected to the ground.
Preferably, the near-infrared detection laser module comprises a near-infrared detection laser, a first temperature controller and a first current controller, wherein the output end of the first temperature controller is connected with the temperature control input end of the near-infrared detection laser, the output end of the first current driver is connected with the current input end of the near-infrared detection laser, and the near-infrared detection laser is used for outputting near-infrared detection light.
Preferably, the near-infrared pump laser module includes a near-infrared pump laser, a second temperature controller and a second current controller, an output end of the second temperature controller is connected with a temperature control input end of the pump laser, an output end of the second current driver is connected with a current input end of the pump laser, and the pump laser is used for outputting near-infrared pump light.
Preferably, the near-infrared dual-wavelength photonic crystal slow optical waveguide sensing module comprises a dual-wavelength photonic crystal slow optical waveguide, a first coupling waveguide, a second coupling waveguide and an air chamber, the air chamber comprises an air inlet and an air outlet, the dual-wavelength photonic crystal slow optical waveguide is completely covered in the air chamber as a sensing area, and a part of the first coupling waveguide and a part of the second coupling waveguide are both exposed in the air so as to realize the end face coupling of a single-mode optical fiber and a dual-wavelength photonic crystal slow optical wave.
Preferably, the output end of the first coupling waveguide is connected with the input end of the slow optical waveguide of the dual-wavelength photonic crystal, and is used for coupling the near-infrared detection light into the slow optical waveguide of the dual-wavelength photonic crystal from the single-mode optical fiber;
the input end of the second coupling waveguide is connected with the output end of the dual-wavelength photonic crystal slow optical waveguide and is used for coupling the near-infrared pump light into the dual-wavelength photonic crystal slow optical waveguide and coupling the output detection light of the dual-wavelength photonic crystal slow optical waveguide into the single-mode optical fiber, so that the near-infrared detection light and the near-infrared pump light can be transmitted simultaneously.
Preferably, the fiber circulator couples the near-infrared pump light into the second coupling waveguide through the first port and the second port thereof, and couples the near-infrared probe light output from the second coupling waveguide into the output fiber coupler through the second port and the third port thereof, and disables the near-infrared pump light from being coupled into the output fiber coupler.
Preferably, the phase adjustment module includes a first photodetector, a high-speed servo controller, a piezoelectric ceramic driver and piezoelectric ceramic, one output end of the output optical fiber coupler is connected with an input end of the first photodetector, an output end of the first photodetector is connected with a voltage input end of the high-speed servo controller, a voltage output end of the high-speed servo controller is connected with a voltage input end of the piezoelectric ceramic driver, a voltage output end of the piezoelectric ceramic driver is connected with an anode of the piezoelectric ceramic, and a three-dimensional cathode of the piezoelectric ceramic is grounded.
Preferably, the phase retarder is a single-mode fiber wound on the piezoelectric ceramic and serves as a reference arm of the mach-zehnder interferometer, and the phase adjusting module controls the phase difference between the two arms of the mach-zehnder interferometer by:
an optical signal output by one output end of the output optical fiber coupler is converted into an electric signal through the first photoelectric detector, the output electric signal generates an error signal after passing through the high-speed servo controller, the error signal is fed back to the piezoelectric ceramic driver, and the optical fiber wound on the piezoelectric ceramic is controlled to stretch and contract after voltage amplification, so that the phase difference of two arms of the Mach-Zehnder interferometer is stabilized at 90 degrees.
Preferably, the second harmonic signal extraction module includes a second photodetector, a lock-in amplifier, a data collector and a computer, an output end of the output fiber coupler is connected with an input end of the second photodetector, an output end of the second photodetector is connected with an input end of the lock-in amplifier, an output end of the lock-in amplifier is connected with an input end of the data collector, and an output end of the data collector is connected with the computer.
A detection method of a photo-thermal interference spectrum gas sensing device based on a near-infrared dual-wavelength photonic crystal slow light waveguide comprises the following steps:
step 1: coupling near-infrared detection light output by the near-infrared detection laser module into an input end of the Mach-Zehnder interferometer through the input optical fiber coupler, coupling near-infrared detection light output by the second coupling waveguide into the output optical fiber coupler through a second port and a third port of the optical fiber circulator, and coupling the near-infrared detection light into the first photoelectric detector through the output optical fiber coupler;
step 2: according to the signal output by the first photoelectric detector, a high-speed servo controller in the phase adjustment module is adjusted to control the deformation of the piezoelectric ceramic, so that the phase difference of two arms of the Mach-Zehnder interferometer is stabilized at 90 degrees;
and step 3: near-infrared pump light output by the near-infrared pump laser module is coupled into a second coupling waveguide through a first port and a second port of the optical fiber circulator, so that the pump light cannot enter the output optical fiber coupler;
and 4, step 4: adjusting the second current controller to enable the wavelength of the near-infrared pump light to scan the absorption waveband of the object to be detected;
and 5: acquiring an output signal of the phase-locked amplifier by using a data acquisition unit, recording the output signal of the second photoelectric detector in real time when the wavelength of the near-infrared pump light is adjusted, and extracting second harmonic to obtain a photo-thermal interference signal;
step 6: and analyzing the performance of the sensor according to the photothermal interference signals measured by different analyte concentrations.
The invention has the beneficial effects that:
1. the dual-wavelength photonic crystal slow optical waveguide sensor based on the photothermal interference spectrum technology is easy to integrate on a chip, and simultaneously generates a slow light effect on a near infrared detection light wave band and a pumping light wave band, so that the absorption of an analyte to pumping light is enhanced, and the phase accumulation of the detection light is increased.
2. The slow light effect is generated simultaneously in the near infrared communication wave band and the sensing wave band by utilizing the dual-wavelength photonic crystal slow light waveguide, the phase change of the detection light and the absorption of gas to the pump light are enhanced, so that the amplitude of a photo-thermal interference signal is increased, and the sensitivity of the sensor is greatly improved.
3. The transmission loss of the pump light in the photonic crystal slow light waveguide can be not considered by adopting an interferometric technique, so that the group refractive index of the pump light can be designed to be as large as possible, and the sensitivity of the sensor is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a system diagram of a photothermal interference spectroscopy gas sensing device based on a near-infrared dual-wavelength photonic crystal slow light waveguide of the present invention;
FIG. 2 is a top view of the structure of a dual wavelength photonic crystal slow wave guide;
FIG. 3 is a dispersion diagram of a dual wavelength photonic crystal slow optical waveguide, where k is the wave vector, a is the lattice constant of the photonic crystal slow optical waveguide, and n 1.44 is the refractive index of the lower cladding of the photonic crystal slow optical waveguide;
FIG. 4 is a graph showing the variation of refractive index with wavelength of a near-infrared detection optical band group of the dual-wavelength photonic crystal slow optical waveguide sensor according to the present invention;
FIG. 5 is a graph showing the variation of refractive index with wavelength and methane gas absorbance of a pumped optical band group of the sensor of the invention;
FIG. 6 is a flow chart of the present invention for measuring an analyte.
The reference numbers are as follows:
001. a near-infrared detection light source module; 002. a near-infrared pump light source module; 003. the sensor comprises a dual-wavelength photonic crystal slow optical waveguide sensing module; 004. an input fiber coupler; 005. a fiber phase retarder; 006 fiber optic circulator; 007. an output fiber coupler; a 008 phase adjustment module; 009. a second harmonic extraction module;
110. a dual-wavelength photonic crystal slow light waveguide; 111. a first coupling waveguide; 112. a second coupling waveguide.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention.
The embodiment provides a photothermal interference spectrum gas sensing device based on a near-infrared dual-wavelength photonic crystal slow light waveguide, as shown in fig. 1, comprising a near-infrared detection light source module 001, a near-infrared pump light source module 002, a dual-wavelength photonic crystal slow light waveguide sensing module 003, an input optical fiber coupler 004, an optical fiber phase retarder 005, an optical fiber circulator 006, an output optical fiber coupler 007, a phase adjustment module 008, and a second harmonic extraction module 009.
Specifically, the output of the near-infrared detection laser module is connected with the input end of the input optical fiber coupler; the input optical fiber coupler is provided with two output ends which are respectively connected with a first port of the near-infrared dual-wavelength photonic crystal slow optical waveguide sensing module and an input end of the optical fiber phase delayer;
the optical fiber circulator is provided with three ports, a first port of the optical fiber circulator is connected with the output end of the near-infrared pump laser module, a second port of the optical fiber circulator is connected with a second port of the near-infrared dual-wavelength photonic crystal slow light waveguide sensing module, and a third port of the optical fiber circulator is connected with a first output end of the optical fiber output optical fiber coupler;
and the second input end of the output optical fiber coupler is connected with the output end of the optical fiber phase delayer, and the two output ends of the output optical fiber coupler are respectively connected with the input end of the phase adjusting module and the input end of the second harmonic signal extraction module.
In this embodiment, the near-infrared detection laser module includes near-infrared detection laser, first temperature controller and first current controller, first temperature controller's output links to each other with the temperature control input of near-infrared detection laser, the output of first current driver links to each other with the current input of near-infrared detection laser. The near-infrared pump laser module comprises a near-infrared pump laser, a second temperature controller and a second current controller, the output end of the second temperature controller is connected with the temperature control input end of the pump laser, and the output end of the second current driver is connected with the current input end of the pump laser.
The near-infrared detection laser module is used for generating detection light with the wavelength of 1550nm, and the near-infrared pump laser module is used for generating pump light capable of being absorbed by gas.
The first temperature controller is used for controlling the temperature of the near-infrared detection laser to be constant, and the second temperature controller is used for controlling the temperature of the near-infrared pump laser to be constant;
the first current controller is used for controlling the current of the near-infrared detection laser to be constant, and the second current controller is used for controlling the current of the near-infrared pump laser to enable the wavelength of output light of the near-infrared pump laser module to sweep through a gas absorption peak.
As shown in FIG. 2, the near-infrared dual-wavelength photonic crystal slow optical waveguide sensing module 003 comprises a dual-wavelength photonic crystal slow optical waveguide 110, a first coupling waveguide 111, a second coupling waveguide 112 and an air chamber. The output end of the first coupling waveguide 111 is connected with the input end of the dual-wavelength photonic crystal slow light waveguide 110, and the input end of the second coupling waveguide 112 is connected with the output end of the dual-wavelength photonic crystal slow light waveguide 110.
The near-infrared dual-wavelength photonic crystal slow optical waveguide sensing module 003 is provided with an input end and an output end and is used for simultaneously transmitting detection light output by the near-infrared detection laser module 001 and pump light output by the near-infrared pump laser module 002, and the dual-wavelength photonic crystal slow optical waveguide 110 generates slow light effects at the two wavelengths of the detection light and the pump light; the photonic crystal slow light waveguide 110 is an etched hole array structure in a silicon plate, the substrate is silicon, the core layer is silicon, the lower cladding layer is silicon dioxide, and the upper cladding layer is air.
The air chamber is made of Polydimethylsiloxane (PDMS) materials and is provided with an air inlet and an air outlet, the dual-wavelength photonic crystal slow light waveguide is used as a sensing area and is completely covered in the air chamber, and parts of the first coupling waveguide and the second coupling waveguide are exposed in the air so as to realize end face coupling of the single-mode optical fiber and the dual-wavelength photonic crystal slow light waveguide.
The first coupling waveguide 111 is a rectangular waveguide, the substrate is silicon, the core layer is silicon, the lower cladding layer is silicon dioxide, and the upper cladding layer is air, and is used for coupling the detection light generated by the near-infrared detection laser module into the dual-wavelength photonic crystal slow light waveguide 110 from a single-mode optical fiber.
The second coupling waveguide 112 is used for coupling the near-infrared pump light into the dual-wavelength photonic crystal slow optical waveguide 110, coupling the output probe light of the dual-wavelength photonic crystal slow optical waveguide 110 into a single-mode optical fiber, and transmitting the near-infrared probe light and the pump light at the same time; the substrate is silicon, the core layer is silicon, the lower cladding layer is silicon dioxide, and the upper cladding layer is air.
The embodiment also provides a preparation process of the near-infrared dual-wavelength photonic crystal slow optical waveguide sensing module 003, which mainly comprises the following steps:
step 1: an SOI substrate with the diameter of six inches, the thickness of a surface silicon layer is 220nm, the thickness of a silicon dioxide layer is 3 microns, the thickness of a substrate silicon is 700 microns, the SOI substrate is cut into a silicon wafer with the thickness of 1cm multiplied by 2cm, photoresist of ZEP520A is dripped on the silicon wafer, the photoresist throwing speed is about 2500 revolutions per minute, the thickness of the photoresist is ensured to be larger than 400nm, and a photoresist mask is formed through electron beam exposure;
step 2: developing, and etching a pattern on the silicon layer by dry etching;
and step 3: removing the photoresist mask through the photoresist solution to finally form a dual-wavelength photonic crystal slow light waveguide 110, a first coupling waveguide 111 and a second coupling waveguide 112;
and 4, step 4: and adhering the PDMS air chamber on a silicon chip.
The input optical fiber coupler 004 is a 1 × 2 beam splitter, has two output ends, is respectively connected with the port 1 of the near-infrared dual-wavelength photonic crystal slow optical waveguide sensing module 003 and the input end of the optical fiber phase delayer 005, and is used for splitting the near-infrared probe light so that two probe lights respectively enter a sensing arm and a reference arm of the mach-zehnder interferometer.
The optical fiber phase retarder 005 is a single mode optical fiber wound on PZT, and serves as a reference arm of the mach-zehnder interferometer, having an input end and an output end, respectively connected to an output end of the input optical fiber coupler 004 and an input end of the output optical fiber coupler 007.
The optical fiber circulator 006 has three ports, a first port of the optical fiber circulator 006 is connected with an output end of a near-infrared pump laser module 002, a second port of the optical fiber circulator 006 is connected with an output end of a near-infrared dual-wavelength photonic crystal slow optical waveguide sensing module 003, a third port of the optical fiber circulator 006 is connected with an output end of an optical fiber output optical fiber coupler 007, and the optical fiber circulator is used for coupling near-infrared pump light into a second coupling waveguide through the first port and the second port, coupling probe light output by the near-infrared second coupling waveguide into the output optical fiber coupler 007 through the second port and the third port, and simultaneously enabling the near-infrared pump light not to be coupled into the output optical fiber coupler 007.
The output fiber coupler 007 has two input ends and two output ends, the two input ends of the output fiber coupler 007 are respectively connected with the third port of the fiber circulator 006 and the output end of the fiber phase retarder 005, the two output ends are respectively connected with the input end of the phase adjusting module 008 and the input end of the second harmonic signal extraction module 009, and the two output ends are used for respectively coupling the detected light after interference into the first and second photodetectors.
The phase adjustment module 008 comprises a first photoelectric detector, a high-speed servo controller, a piezoelectric ceramic driver and piezoelectric ceramics, one output end of the output optical fiber coupler 007 is connected with an input end of the first photoelectric detector, an output end of the first photoelectric detector is connected with a voltage input end of the high-speed servo controller, a voltage output end of the high-speed servo controller is connected with a voltage input end of the piezoelectric ceramic driver, a voltage output end of the piezoelectric ceramic driver is connected with an anode of the piezoelectric ceramics, and a three-dimensional cathode of the piezoelectric ceramics is grounded.
The phase adjusting module 008 controls the phase difference of the two arms of the Mach-Zehnder interferometer in the following way:
an optical signal output by one output end of the output optical fiber coupler is converted into an electric signal through the first photoelectric detector, the output electric signal generates an error signal after passing through the high-speed servo controller, the error signal is fed back to the piezoelectric ceramic driver, and the optical fiber wound on the piezoelectric ceramic is controlled to stretch and contract after voltage amplification, so that the phase difference of two arms of the Mach-Zehnder interferometer is stabilized at 90 degrees.
The second harmonic signal extraction module 009 comprises a second photodetector, a lock-in amplifier, a data collector and a computer, the output end of the output optical fiber coupler 007 is connected with the input end of the second photodetector, the output end of the second photodetector is connected with the input end of the lock-in amplifier, the output end of the lock-in amplifier is connected with the input end of the data collector, and the output end of the data collector is connected with the computer.
Extracting a second harmonic signal by adopting the following modes: the second photodetector converts one path of optical signal output by the output optical fiber coupler 007 into an electrical signal, and then inputs the electrical signal to the lock-in amplifier, and the lock-in amplifier is used for extracting the amplitude of the second harmonic of the photothermal interference signal, and the amplitude is input to the computer after being collected by the data collector.
Referring to fig. 3, it is a dispersion diagram of the dual-wavelength photonic crystal slow optical waveguide of the present invention, where a is the lattice constant of the dual-wavelength photonic crystal slow optical waveguide, λ is the wavelength, n is the refractive index of the lower cladding, k is the wave vector, and n ═ 1.44 is the refractive index of the lower cladding of the photonic crystal slow optical waveguide, two guided modes appear in the band gap, the lower frequency guided mode is used to guide the pump light, and the higher frequency guided mode is used to guide the probe light.
Referring to FIG. 4, the refractive index of the optical band group detected by the sensor of the present invention varies with the wavelength, where n is the refractive index of the group at 1550nmg＝13；
Referring to FIG. 5, there is shown a graph of refractive index of a pumping optical band group of the sensor of the present invention as a function of wavelength and methane gas absorbance, with the group refractive index n at 1654nmg＝35；
Referring to fig. 6, a flow chart of measuring an analyte according to the present invention is shown. The specific description is as follows:
step 1: coupling the near-infrared detection light output by the near-infrared detection laser module 001 into the input end of the mach-zehnder interferometer through the input optical fiber coupler 004, coupling the near-infrared detection light output by the second coupling waveguide 112 into the output optical fiber coupler 007 through the second port and the third port of the optical fiber circulator 006, and coupling the near-infrared detection light into the first photodetector through the output optical fiber coupler 007;
step 2: according to the signal output by the first photoelectric detector, a high-speed servo controller in the phase adjustment module 008 is adjusted to control the deformation of the piezoelectric ceramic, so that the phase difference of two arms of the Mach-Zehnder interferometer is stabilized at 90 degrees;
and 3, step 3: the near-infrared pump light output by the near-infrared pump laser module 002 is coupled into the second coupling waveguide 112 through the first port and the second port of the optical fiber circulator 006, so that the pump light cannot enter the output optical fiber coupler 007;
and 4, step 4: adjusting the second current controller to enable the wavelength of the near-infrared pump light to scan the absorption waveband of the object to be detected;
and 5: acquiring an output signal of the phase-locked amplifier by using a data acquisition unit, recording the output signal of the second photoelectric detector in real time when the wavelength of the near-infrared pump light is adjusted, and extracting second harmonic to obtain a photo-thermal interference signal;
step 6: and analyzing the performance of the sensor according to the photothermal interference signals measured by different analyte concentrations.
The above description is only for the purpose of illustrating the technical solutions of the present invention and not for the purpose of limiting the same, and other modifications or equivalent substitutions made by those skilled in the art to the technical solutions of the present invention should be covered within the scope of the claims of the present invention without departing from the spirit and scope of the technical solutions of the present invention.
Claims (10)
1. A photothermal interference spectrum gas sensing device based on a near-infrared dual-wavelength photonic crystal slow light waveguide is characterized by comprising a near-infrared detection laser module, a near-infrared pumping laser module, a near-infrared dual-wavelength photonic crystal slow light waveguide sensing module, an input optical fiber coupler, an optical fiber phase delayer, an optical fiber circulator, an output optical fiber coupler, a phase adjusting module and a second harmonic signal extraction module;
the output end of the near-infrared detection laser module is connected with the input end of an input optical fiber coupler, and the two output ends of the input optical fiber coupler are respectively connected with the first port of the near-infrared dual-wavelength photonic crystal slow optical waveguide sensing module and the input end of an optical fiber phase delayer;
the three ports of the optical fiber circulator are respectively connected with the output end of the near-infrared pump laser module, the second port of the near-infrared dual-wavelength photonic crystal slow optical waveguide sensing module and the first input end of the output optical fiber coupler, the second input end of the output optical fiber coupler is connected with the output end of the optical fiber phase delayer, the two output ends of the output optical fiber coupler are respectively connected with the input end of the phase adjusting module and the input end of the second harmonic signal extraction module, and the output end of the phase adjusting module is connected to the ground.
2. The photothermal interference spectroscopy gas sensing device based on the near-infrared dual-wavelength photonic crystal slow light waveguide as claimed in claim 1, wherein the near-infrared detection laser module comprises a near-infrared detection laser, a first temperature controller and a first current controller, an output end of the first temperature controller is connected with a temperature control input end of the near-infrared detection laser, an output end of the first current driver is connected with a current input end of the near-infrared detection laser, and the near-infrared detection laser is used for outputting the near-infrared detection light.
3. The photothermal interference spectroscopy gas sensing device based on the near-infrared dual-wavelength photonic crystal slow light waveguide as claimed in claim 1, wherein the near-infrared pump laser module comprises a near-infrared pump laser, a second temperature controller and a second current controller, an output end of the second temperature controller is connected with a temperature control input end of the pump laser, an output end of the second current driver is connected with a current input end of the pump laser, and the pump laser is used for outputting the near-infrared pump light.
4. The photothermal interference spectrum gas sensing device based on the near-infrared dual-wavelength photonic crystal slow light waveguide of claim 1, wherein the near-infrared dual-wavelength photonic crystal slow light waveguide sensing module comprises a dual-wavelength photonic crystal slow light waveguide, a first coupling waveguide, a second coupling waveguide and a gas chamber, the gas chamber comprises a gas inlet and a gas outlet, the dual-wavelength photonic crystal slow light waveguide is completely covered inside the gas chamber as a sensing area, and a part of the first coupling waveguide and a part of the second coupling waveguide are both exposed in the air, so as to realize the end face coupling of the single-mode fiber and the dual-wavelength photonic crystal slow light waveguide.
5. The photothermal interference spectroscopy gas sensing device based on the near-infrared dual-wavelength photonic crystal slow light waveguide of claim 4, wherein the output end of the first coupling waveguide is connected with the input end of the dual-wavelength photonic crystal slow light waveguide for coupling the near-infrared probe light into the dual-wavelength photonic crystal slow light waveguide from the single mode fiber;
the input end of the second coupling waveguide is connected with the output end of the dual-wavelength photonic crystal slow optical waveguide and is used for coupling the near-infrared pump light into the dual-wavelength photonic crystal slow optical waveguide and coupling the output detection light of the dual-wavelength photonic crystal slow optical waveguide into the single-mode optical fiber, so that the near-infrared detection light and the near-infrared pump light can be transmitted simultaneously.
6. The photothermal interference spectroscopy gas sensing device based on the near-infrared dual-wavelength photonic crystal slow light waveguide as claimed in claim 5, wherein the fiber circulator couples the near-infrared pump light into the second coupling waveguide through the first port and the second port thereof, and couples the near-infrared probe light outputted from the second coupling waveguide into the output fiber coupler through the second port and the third port thereof, and disables the near-infrared pump light from being coupled into the output fiber coupler.
7. The photothermal interference spectrum gas sensing device based on the near-infrared dual-wavelength photonic crystal slow light waveguide as claimed in claim 1, wherein said phase adjustment module comprises a first photodetector, a high-speed servo controller, a piezoelectric ceramic driver and a piezoelectric ceramic, one output end of said output optical fiber coupler is connected to the input end of the first photodetector, the output end of the first photodetector is connected to the voltage input end of the high-speed servo controller, the voltage output end of the high-speed servo controller is connected to the voltage input end of the piezoelectric ceramic driver, the voltage output end of the piezoelectric ceramic driver is connected to the positive electrode of the piezoelectric ceramic, and the three-dimensional negative electrode of the piezoelectric ceramic is grounded.
8. The photothermal interference spectrum gas sensing device based on the near-infrared dual-wavelength photonic crystal slow light waveguide of claim 7, wherein the phase retarder is a single-mode fiber wound on a piezoelectric ceramic and used as a reference arm of the mach-zehnder interferometer, and the phase adjusting module controls the phase difference between the two arms of the mach-zehnder interferometer by the following steps:
an optical signal output by one output end of the output optical fiber coupler is converted into an electric signal through the first photoelectric detector, the output electric signal generates an error signal after passing through the high-speed servo controller, the error signal is fed back to the piezoelectric ceramic driver, and the optical fiber wound on the piezoelectric ceramic is controlled to stretch and contract after voltage amplification, so that the phase difference of two arms of the Mach-Zehnder interferometer is stabilized at 90 degrees.
9. The photothermal interference spectrum gas sensing device based on the near-infrared dual-wavelength photonic crystal slow light waveguide as claimed in claim 1, wherein the second harmonic signal extraction module comprises a second photodetector, a lock-in amplifier, a data collector and a computer, the output end of the output optical fiber coupler is connected with the input end of the second photodetector, the output end of the second photodetector is connected with the input end of the lock-in amplifier, the output end of the lock-in amplifier is connected with the input end of the data collector, and the output end of the data collector is connected with the computer.
10. A detection method of a photo-thermal interference spectrum gas sensing device based on a near-infrared dual-wavelength photonic crystal slow light waveguide is characterized by comprising the following steps:
step 1: coupling near-infrared detection light output by the near-infrared detection laser module into an input end of the Mach-Zehnder interferometer through the input optical fiber coupler, coupling near-infrared detection light output by the second coupling waveguide into the output optical fiber coupler through a second port and a third port of the optical fiber circulator, and coupling the near-infrared detection light into the first photoelectric detector through the output optical fiber coupler;
step 2: according to the signal output by the first photoelectric detector, a high-speed servo controller in the phase adjustment module is adjusted to control the deformation of the piezoelectric ceramic, so that the phase difference of two arms of the Mach-Zehnder interferometer is stabilized at 90 degrees;
and step 3: near-infrared pump light output by the near-infrared pump laser module is coupled into a second coupling waveguide through a first port and a second port of the optical fiber circulator, so that the pump light cannot enter the output optical fiber coupler;
and 4, step 4: adjusting the second current controller to enable the wavelength of the near-infrared pump light to scan the absorption waveband of the object to be detected;
and 5: acquiring an output signal of the phase-locked amplifier by using a data acquisition unit, recording the output signal of the second photoelectric detector in real time when the wavelength of the near-infrared pump light is adjusted, and extracting second harmonic to obtain a photo-thermal interference signal;
step 6: and analyzing the performance of the sensor according to the photothermal interference signals measured by different analyte concentrations.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210051808.7A CN114486792B (en) | 2022-01-17 | 2022-01-17 | Photo-thermal interference spectrum gas sensing device and detection method based on near infrared dual-wavelength photonic crystal slow optical waveguide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210051808.7A CN114486792B (en) | 2022-01-17 | 2022-01-17 | Photo-thermal interference spectrum gas sensing device and detection method based on near infrared dual-wavelength photonic crystal slow optical waveguide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114486792A true CN114486792A (en) | 2022-05-13 |
| CN114486792B CN114486792B (en) | 2023-08-08 |
Family
ID=81511054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210051808.7A Active CN114486792B (en) | 2022-01-17 | 2022-01-17 | Photo-thermal interference spectrum gas sensing device and detection method based on near infrared dual-wavelength photonic crystal slow optical waveguide |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114486792B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114813601A (en) * | 2022-05-19 | 2022-07-29 | 华北电力大学 | Optical fiber detection system for in-situ detection of inflammable gas in lithium ion battery |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090237666A1 (en) * | 2006-09-15 | 2009-09-24 | Frank Vollmer | Methods and devices for measurements using pump-probe spectroscopy in high-q microcavities |
| US20110028346A1 (en) * | 2009-08-03 | 2011-02-03 | Omega Optics, Inc. | Photonic crystal microarray device for label-free multiple analyte sensing, biosensing and diagnostic assay chips |
| US20120086934A1 (en) * | 2010-09-08 | 2012-04-12 | The Board Of Trustees Of The Leland Stanford Junior University | Slow-light fiber bragg grating sensor |
| CN103335967A (en) * | 2013-06-24 | 2013-10-02 | 南昌航空大学 | Fiber loop cavity ringdown spectroscopy device based on Brillouin slow light effect |
| CN104062267A (en) * | 2014-06-27 | 2014-09-24 | 东北大学 | Refractive index measuring method based on slow light and photonic crystal micro-cavity |
| CN104596996A (en) * | 2015-01-06 | 2015-05-06 | 香港理工大学深圳研究院 | Gas detection method and gas detection system based on hollow-core optical fiber photothermal effect |
| US20170299508A1 (en) * | 2016-04-13 | 2017-10-19 | The Hong Kong Polytechnic University Shenzhen Research Institute | Photothermal spectroscopy with hollow-core optical fiber |
| CN111504945A (en) * | 2020-06-08 | 2020-08-07 | 朗思科技有限公司 | Optical fiber photo-thermal gas sensing device and method |
| US20210021099A1 (en) * | 2018-02-02 | 2021-01-21 | Brolis Sensor Technology, Uab | Wavelength determination for widely tunable lasers and laser systems thereof |
| CN113607673A (en) * | 2020-05-04 | 2021-11-05 | 新加坡国立大学 | Mid-infrared waveguide integrated photodetector using two-dimensional materials |
-
2022
- 2022-01-17 CN CN202210051808.7A patent/CN114486792B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090237666A1 (en) * | 2006-09-15 | 2009-09-24 | Frank Vollmer | Methods and devices for measurements using pump-probe spectroscopy in high-q microcavities |
| US20110028346A1 (en) * | 2009-08-03 | 2011-02-03 | Omega Optics, Inc. | Photonic crystal microarray device for label-free multiple analyte sensing, biosensing and diagnostic assay chips |
| US20120086934A1 (en) * | 2010-09-08 | 2012-04-12 | The Board Of Trustees Of The Leland Stanford Junior University | Slow-light fiber bragg grating sensor |
| CN103335967A (en) * | 2013-06-24 | 2013-10-02 | 南昌航空大学 | Fiber loop cavity ringdown spectroscopy device based on Brillouin slow light effect |
| CN104062267A (en) * | 2014-06-27 | 2014-09-24 | 东北大学 | Refractive index measuring method based on slow light and photonic crystal micro-cavity |
| CN104596996A (en) * | 2015-01-06 | 2015-05-06 | 香港理工大学深圳研究院 | Gas detection method and gas detection system based on hollow-core optical fiber photothermal effect |
| US20170299508A1 (en) * | 2016-04-13 | 2017-10-19 | The Hong Kong Polytechnic University Shenzhen Research Institute | Photothermal spectroscopy with hollow-core optical fiber |
| US20210021099A1 (en) * | 2018-02-02 | 2021-01-21 | Brolis Sensor Technology, Uab | Wavelength determination for widely tunable lasers and laser systems thereof |
| CN113607673A (en) * | 2020-05-04 | 2021-11-05 | 新加坡国立大学 | Mid-infrared waveguide integrated photodetector using two-dimensional materials |
| CN111504945A (en) * | 2020-06-08 | 2020-08-07 | 朗思科技有限公司 | Optical fiber photo-thermal gas sensing device and method |
Non-Patent Citations (2)
| Title |
|---|
| JIN LI: "《Structure design and application of hollow core microstructured optical fiber gas sensor: A review》", 《OPTICS AND LASER TECHNOLOGY》, pages 106658 * |
| 韩博: "《基于慢光干涉仪的光波长检测技术研究》", 《中国优秀硕士学位论文全文数据库工程科技Ⅱ辑》, pages 8 - 9 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114813601A (en) * | 2022-05-19 | 2022-07-29 | 华北电力大学 | Optical fiber detection system for in-situ detection of inflammable gas in lithium ion battery |
| CN114813601B (en) * | 2022-05-19 | 2022-09-20 | 华北电力大学 | Optical fiber detection system for in-situ detection of inflammable gas in lithium ion battery |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114486792B (en) | 2023-08-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4320475A (en) | Monomodal optical fibre hydrophone operating by the elastooptical effect | |
| CN107941735B (en) | Mid-infrared double-slit waveguide microcavity spectrum gas sensor and use method thereof | |
| US20050018949A1 (en) | Multiple array surface plasmon resonance biosensor | |
| CN109990975B (en) | Detection system, debugging system and sensor based on optical microcavity mechanical mode | |
| CN107727365B (en) | A kind of system using reflectance spectrum fineness measurement optical waveguide loss | |
| EP3485254A1 (en) | Photothermal interferometry apparatus and method | |
| Arce et al. | Silicon-on-insulator microring resonator sensor integrated on an optical fiber facet | |
| WO2011091735A1 (en) | Optical sensor based on broadband light source and cascaded optical waveguide filter | |
| US20230003635A1 (en) | Pump-probe photothermal spectroscopy having passive phase detection and an optical waveguide | |
| CN109100310A (en) | A kind of super spectrographic detection micro-system | |
| CN114486792B (en) | Photo-thermal interference spectrum gas sensing device and detection method based on near infrared dual-wavelength photonic crystal slow optical waveguide | |
| CN201034929Y (en) | Optical fiber gas sensors | |
| CN109323661B (en) | High-sensitivity angular displacement sensor based on beam space Gus-Hansen displacement | |
| Yang et al. | Highly sensitive integrated photonic sensor and interrogator using cascaded silicon microring resonators | |
| CN112067569B (en) | Slit optical waveguide sensor based on surface-enhanced infrared absorption spectrum and preparation and detection methods thereof | |
| US6340448B1 (en) | Surface plasmon sensor | |
| CN106940298A (en) | A kind of integrated-type biology sensor and preparation method thereof | |
| US20020120203A1 (en) | Blood flowmeter and sensor part of the blood flowmeter | |
| CN111751330B (en) | Plasmon gas sensor based on D-shaped optical fiber graphene heterojunction | |
| CN113777073A (en) | Gas detection method and system based on optical phase amplification | |
| CN114486791B (en) | Light-heat interference spectrum gas sensing device and detection method based on second-order photonic band gap slow optical waveguide | |
| CN113740298A (en) | Harmful gas detection device and detection method based on whispering gallery mode optical microcavity | |
| CN117805051A (en) | Photo-thermal interference spectrum gas sensing device and detection method based on photonic crystal slow optical waveguide and mode phase difference | |
| CN117825311A (en) | On-chip multi-component gas sensing system and detection method | |
| Zarei et al. | Design and fabrication of a fiber-optic deep-etched silicon Fabry-Perot temperature sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |