CN109100310A - A kind of super spectrographic detection micro-system - Google Patents
A kind of super spectrographic detection micro-system Download PDFInfo
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Abstract
A kind of super spectrographic detection micro-system, it include: that light collects coupling module, waveguide light-splitting chip and spectroscopic data processing module, wherein waveguide light-splitting chip includes that cascade MZI waveguide filter, wave-guide optical switch array, hot light phase modulation MZI array and on piece integrate linear array detector.The present invention is integrated with integrated silicon-based cascade MZI Waveguide array technology, hot light phasing technique, silicon substrate spectrum technology, on piece detector integrated technology, signal processing and spectrum recovering algorithm and Si-CMOS technique and micro-system High Density Integration manufacturing process, realization have many advantages, such as wide spectrum investigative range, EO-1 hyperion detection accuracy, ultra-small volume weight power consumption, Ultra Low Cost, fast reserve.
Description
Technical field
The present invention relates to micro spectral field of analytic instrument, are based on silicon-based cascade MZI array wave in particular to one kind
The super spectrographic detection micro-system of the chip-scale of waveguide technology.
Background technique
Super-resolution spectral analysis technique can be widely applied to food safety as a kind of important optical detection perception means
The fields such as detection, gas-monitoring, trademark anti-counterfeit.Often need to be added food in food hygiene laboratory agent detection,
Degree of spoilage detection, Detecting Pesticide, chemical residues detection etc. work, conventional method need to extract sample tissue with it is specific
The reagent of type carries out chemical reaction detection, and detection time is slow, complex procedures and expendable detection reagent cost compared with
It is high.And the detection mode of utilization spectral analysis technique is easy to operate, detection time is quick, is not necessarily to expendable detection reagent, and has
There is the advantages of non-contact, without destroying.Meanwhile it can effectively be mentioned by improving spectral resolution and pointedly expanding spectral region
High target detection accuracy.In addition, can be tried in gas-monitoring field using the detection means of spectral analysis technique to avoid detection
The replacement of agent improves life of product.
The micro spectrometer of technology maturation, which is divided principle according to it, at present can be divided mainly into color dispersion-type and two kinds of interference-type.Color
The micro spectrometer for dissipating type is generally based on the light splitting principle of grating dispersion, in conjunction with classical optical texture such as Ebert-
The fine measurement of the realization spectrum such as Fastie structure, Czerny-Turner structure, Littrow structure.Optical grating construction can be used flat
Two kinds of structures of concave grating and concave grating, wherein being conducive to the module of system element using the optical texture based on plane grating
Change.And concave grating eliminates collimating mirror and imaging mirror element compared to plane grating system, same depth of focus can have smaller
System bulk, while concave grating passes through holographic optimization design can correct the most aberration of system.
However, color dispersion-type micro spectrometer is mainly based upon the micromation of mechanical-optical setup and system element, integration degree
Not high, the stability of system is poor.In addition, the micro spectrometer luminous flux based on dispersion light splitting is smaller, capacity usage ratio is low, right
The more demanding of light intensity is detected, its operating distance and application range are limited.
Interference-type micro spectrometer is based on principle of interference, carries out Fourier by the signal obtained to detection and changes to obtain
Spectral signal.The microtechnology Research Institute of Neuchatel university of Switzerland has gone out a kind of integrated Fourier transformation light of lamellar grating
Spectrometer a, electrostatic comb drive made on insulator silicon chip of deep reaction etching method built in the instrument, comes
Control the movement of reflecting mirror.The height of reflecting mirror is 75 μm, and screen periods number is 32mm-1, and screen periods length is 100 μm, device
The overall size of part is 7mm × 4mm, and the working range of the spectrometer is 380nm~1700nm.Egyptian Si-Ware company
NeoSpectra type spectrometer realizes Michelson's interferometer using MEMS technology in silicon substrate, and passes through MEMS actuator
It realizes that spectrum is adjusted, using InGaAs detector detectable signal, Fourier is carried out to it and converts to obtain spectral information.
And the spectrometer for the spectrometer either based on Michelson's interferometer still based on adjustable F-P cavity, according to
Rely in MEMS electrostatic regulation technology, it is higher to MEMS device degree of regulation and stability requirement.In addition, interference-type micro spectrometer
Structure is complicated, more demanding to MEMS processing technology, and higher cost limits its scope of application.
Therefore, the integration degree for how improving system, reduces the complexity of structure, spread spectrum investigative range,
The technical issues of as prior art urgent need to resolve.
Summary of the invention
It is an object of the invention to propose a kind of super spectrographic detection micro-system, volume can be reduced, system work number is reduced, mentions
High-resolution, spread spectrum investigative range.
To achieve this purpose, the present invention adopts the following technical scheme:
A kind of super spectrographic detection micro-system, comprising:
Light collects coupling module, for collecting the radiation optical information of target, and is coupled to waveguide light-splitting chip；
Waveguide light-splitting chip, for carrying out spectrum using MZI array and through light for after the radiant light being collected into filtering
Electric signal is exported after electricity conversion；
Spectroscopic data processing module, the spectral information for being restored to target for electric signal will to be exported.
Optionally, the light collects specifically including for coupling module:
Optical lens group is coated with anti-reflection anti-reflective and filtering film layer, for receiving the radiant light of target spectral coverage, and is had
The radiant light of input spectrum bandwidth；
Transmission fiber, for improving the coupling efficiency that radiant light enters optical waveguide as intergrade；
Lateral tapered pattern matcher, for radiant light to be coupled into the waveguide light-splitting core from the transmission fiber
Piece.
Optionally, it is collected in coupling module in the light, radiant light and the coupling efficiency of transmission fiber indicate in space are as follows:
Wherein a is that the diameter of optical lens group propagates backward to the diameter ratio of the field before optical lens with optical fiber mode fields；
AR、ACRespectively the coupling mirror area of optical lens group and speckle area；
x1、x2It is incident on the spot size on optical lens for light field, the hot spot of respectively main shaft and its vertical direction is big
It is small.
Optionally, the waveguide light-splitting chip specifically includes:
It cascades MZI waveguide filter, wave-guide optical switch array, hot light phase modulation MZI array, on piece and integrates linear array detector.
Wherein, MZI guide filter is cascaded, for the input spectrum bandwidth to be divided into n optical channel, each optical channel tool
There is certain optical channel bandwidth；
Wave-guide optical switch array is gated for n optical channel to be carried out n × 1；
Hot light phase modulation MZI array for the optical channel gated to be carried out spatial Fourier light splitting, and passes through hot light phase modulation
Realize spectrum fine tuning；
On piece integrates linear array detector, for the optical signal of the hot light phase modulation MZI Waveguide array output to be carried out photoelectricity
Conversion output electric signal.
Optionally, the input spectrum bandwidth of 500nm is divided into the light of 4 125nm bandwidth by the cascade MZI waveguide filter
Channel.
Optionally, the wave-guide optical switch array is based on silicon integreted phontonics technology, injects MMI using carrier
(Multimode Interference) injects carrier concentration by changing, changes the absorption coefficient of material, thus successively real
The switching of existing multiple and different central wavelength spectral bands.
Optionally, the spectrographic detection resolution ratio expression formula of the hot light phase modulation MZI array are as follows:
Spectrographic detection spectrum width:
Wherein λ0For the central wavelength of distinguishable spectral region；neffFor waveguide effective index；N is MZI number of arrays；Δ
LminIt is poor for MZI two-arm minimum length.
Optionally, it is Δ L that the hot light phase modulation MZI array, which introduces the minimum optical path difference before hot light phase modulation,min, each output
The output power of port is Pout(li), it introduces the minimum optical path difference after heat is adjusted between MZI interferometer and changes into Δ Lmin+ΔL0,
Output power after heat is adjusted is Pout(li+iΔL0), to change wave number σ0, and then change the middle cardiac wave of distinguishable spectral region
Long λ0, realize finer spectrographic detection.
Optionally, the on piece integrates linear array detector, realizes that on piece is integrated using heterogeneous or Manufacturing resource method.
Optionally, the spectroscopic data processing module, specifically includes:
Noise remove module, for filtering out the background noise signal in spectrographic detection micro-system；
Flat field correction mould obtains the response coefficient of optical detector difference pixel for calibrating optical detector, compensates by it
Signal errors caused by inhomogeneities；
ADC apodization module restores real spectrum signal for carrying out apodization operation, improves signal-to-noise ratio；
Spectroscopic data inverting module obtains preliminary spectral information for carrying out spectroscopic data inverting.
Spectral radiometric calibration module carries out school to the spectral information being finally inversed by for carrying out radiation calibration to spectrum
Just, output spectrum information.
The invention has the advantages that
(1) present invention proposes the chip-scale super-resolution spectrographic detection micro-system framework based on silicon light integrated technology, by waveguide
It is integrated on the same base to cascade broadband spectral filter, slab guide MZI array spectral module and detector, it is super compared to tradition
Spectrum investigating system is substantially reduced volume, weight and power consumption, be not necessarily to scan module, can lifting system stability, realize chip
The super spectrographic detection of grade.
(2) the cascade architectural framework that the present invention is divided in advance using broadband spectral and waveguide MZI array spectral is finely divided, can
It realizes big spectrographic detection range and more high spectral resolution spectrographic detection, and there is preferable spectral coverage expansion.
(3) present invention is proposed using hot light phasing technique on the basis of waveguide array MZI spectrum to each
MZI optical path difference is adjusted, and then realizes the ultraspectral resolution detector within the scope of target optical spectrum, is not increasing MZI array
Under the premise of quantity, the Output optical power under different optical path differences can get.
Detailed description of the invention
Fig. 1 is the super spectrographic detection micro-system frame diagram of specific embodiment according to the present invention；
Fig. 2 is the super spectrographic detection microsystem organization figure of specific embodiment according to the present invention；
Fig. 3 is that the light of specific embodiment according to the present invention collects coupling module structural schematic diagram；
Fig. 4 is the pre- spectral module effect picture of ideal wide spectrum；
Fig. 5 is the 1200nm-1325nm optical switch module effect picture of specific embodiment according to the present invention；
Fig. 6 is the hot light phase modulation Waveguide array unit amplification frame diagram of silicon substrate of specific embodiment according to the present invention；
Fig. 7 is the spectroscopic data processing module figure of specific embodiment according to the present invention.
The technical characteristic in appended drawing reference the respectively referred to generation in figure are as follows:
1, light collects coupling module；2；Chip of light waveguide, 3；Spectroscopic data processing module,；11, optical lens group；12, it passes
Lose fibre；13, lateral taper pattern matcher；21, MZI waveguide filter is cascaded；22, wave-guide optical switch array；23, hot light tune
Phase MZI Waveguide array；24, on piece integrates linear array detector；31, noise remove module；32, flat field correction module；33, ADC is cut
Toe module；34, spectroscopic data inverting module；35, spectral radiometric calibration module.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining the present invention rather than limiting the invention.It also should be noted that in order to just
Only the parts related to the present invention are shown in description, attached drawing rather than entire infrastructure.
The present invention integrates silicon-based cascade MZI Waveguide array technology, silicon substrate spectrum technology, the spectrum based on hot light phase modulation
Differential analysis technique, on piece detector integrated technology, signal processing and spectrum recovering algorithm, and utilize the above Technology design light wave
Chip is led, the super spectrographic detection micro-system framework of chip-scale is constructed.
Specifically, the present invention collects the radiation optical information of target first, and it is coupled in chip of light waveguide, in waveguide core
In piece, input light through cascade broadband filter carry out spectral width band be divided in advance, rough segmentation be several broadband spectral bands of a spectrum, after by
Slab guide MZI array carries out the super-resolution spectrum in each spectral bands；Heat is introduced in Planar waveguide array unit
Light phase modulation unit can be obtained the spectral information under different optical path differences, and then can be obtained by spectrum difference analysis more fine
Spectral information；For the integrated level for improving system, waveguide optical switch battle array is introduced between broadband filter and hot light phase modulation MZI array
It is listed in each spectrum interband to switch over, realizes the time-sharing multiplex of slab guide super-resolution spectral module；Planar waveguide array
Output optical registration is coupled on the integrated detector of corresponding on piece, and the output light of detector is after reading circuit is read, through light
Spectrum signal restoration disposal obtains the spectral information of target to realize chip-scale, ultraphotic spectral resolution, wide spectral range light
Spectrum detection.
Referring to Fig. 1, the super spectrographic detection micro-system frame diagram of specific embodiment according to the present invention is shown, Fig. 2 shows
The super spectrographic detection microsystem organization figure of specific embodiment according to the present invention.
The super spectrographic detection micro-system includes: that light collects coupling module 1, and waveguide light-splitting chip 2 and spectroscopic data handle mould
Block 3；
The light collects coupling module 1, for collecting the radiation optical information of target, and is coupled to waveguide light-splitting chip 2, should
Radiant light information includes the light of objective emission and reflection；
Waveguide light-splitting chip 2, for carrying out after the radiant light being collected into filtering spectrum using MZI array and passing through
Electric signal is exported after photoelectric conversion；
Spectroscopic data processing module 3, the spectral information for being restored to target for electric signal will to be exported.
Coupling module 1 is collected for light, since spatial light to be directly coupled into the technology of optical waveguide using waveguide optical grating
Scheme is very sensitive for the wavelength of incident light, therefore, the present invention using after optical lens group and fiber coupling, then by optical fiber with
The cascade processing scheme of chip of light waveguide coupling.By one end coupling package of lens group and broadband transmission optical fiber, then by the other end
It is coupled with the input waveguide of the on piece integration module of chip of light waveguide, realizes the front end input of detection optical signal.In optical fiber and wave
When leading coupling, need to consider influence of the light field mode transmission characteristic under certain spectral bandwidth (such as 500nm) to coupling efficiency,
Therefore it is optically coupled using pattern matcher scheme, specially lateral tapered pattern matcher.Which simple process is easy to
It realizes, is theoretical simply complete, by the length of design adjustment output waveguide, width, drawing cone section length and laterally pull and bore function etc.
Higher coupling efficiency may be implemented in parameter.
Specifically, showing the concrete form that light collects coupling module 1 referring to Fig. 3, comprising:
Optical lens group 11 is coated with anti-reflection anti-reflective and filtering film layer, for receiving the radiant light of target spectral coverage, and is had
There is the radiant light of input spectrum bandwidth；Optionally, input spectrum bandwidth is 500nm, so that meeting 1200nm-1700nm wavelength light
Through the cut-off of other spectral coverage wavelength lights.
Transmission fiber 12, for improving the coupling efficiency that radiant light enters optical waveguide as intergrade；
Lateral tapered pattern matcher 13, for radiant light to be coupled into the waveguide light-splitting core from the transmission fiber
Piece.
It can be improved using lateral tapered pattern matcher 13 and enter as the radiant light of signal light from the transmission fiber
The coupling efficiency of the waveguide light-splitting chip avoids the light frequency selectivity of waveguide optical grating when incident light is wide spectral range
Lose incident optical signal；
Wherein, radiant light and the coupling efficiency of transmission fiber can indicate in space are as follows:
Wherein a is that the diameter of optical lens group propagates backward to the diameter ratio of the field before optical lens with optical fiber mode fields；
AR、ACRespectively the coupling mirror area of optical lens group and speckle area；
x1、x2It is incident on the spot size on optical lens for light field, the hot spot of respectively main shaft and its vertical direction is big
It is small.
And it is theoretical according to simplified waveguide transmission, single mode transport need to meet the following conditions:
Wherein under symmetrical optical waveguide,Respectively waveguide core layer and substrate/coating refractive index.Both,
Waveguide core layer thicknessUnder identical waveguiding structure parameter, if short wavelength meets single mode condition, long wavelength is same
Single mode condition will be met.Waveguide parameter will be designed respectively adjustment according to different piece and effect in subsequent module.
For waveguide light-splitting chip 2, referring to Fig. 1 and Fig. 2, multiple components are integrated in such a way that on piece is integrated, comprising:
It cascades MZI waveguide filter 21, wave-guide optical switch array 22, hot light phase modulation MZI array 23, on piece and integrates linear array detector 24.
Wherein, MZI guide filter 21 is cascaded, for the input spectrum bandwidth to be divided into n optical channel, each optical channel
With certain optical channel bandwidth, the product of the optical channel bandwidth and optical channel quantity is equal to output input spectrum bandwidth.One
In a specific embodiment, MZI waveguide filter 21 is cascaded, the input spectrum bandwidth of 500nm is divided into 4 125nm bandwidth
Optical channel.
Wave-guide optical switch array 22 is gated for n optical channel to be carried out n × 1.In a specific embodiment, by 4
A 125nm bandwidth optical channel carries out 4 × 1 gatings；
Hot light phase modulation MZI array 23 for the optical channel gated to be carried out spatial Fourier light splitting, and passes through hot light tune
Mutually realize spectrum fine tuning；
On piece integrates linear array detector 24, for the optical signal of the hot light phase modulation MZI Waveguide array output to be carried out light
Electricity conversion output electric signal.
The present invention passes through the pre- light splitting technology of broadband spectral by taking the spectrographic detection range to 1200nm-1700nm as an example first
Investigative range is divided into multiple spectral bands, spectrum cutting is carried out to a wide range of spectrum, forms the close of 4 125nm spectral widths
Like rectangular window bandpass filter.Broadband spectral filter proposed adoption cascades MZI scheme, i.e., is filtered using cascade MZI waveguide
Wave realizes big bandwidth, the spectrum of high-isolation is divided in advance by the selection of design and parameter to MZI structure.
Cascade MZI waveguide can choose design and verifying that silicon nitride material is filtered device, and refractive index of silicon nitride is about
2, it is very low in 450nm-2000nm range inner waveguide transmission loss, and be widely used in CMOS technology, processing cost is lower.
By adjusting etch process parameters, changes waveguide sections shape, can be realized effective dispersion management, it is low convenient for designing and producing out
It is lost, the filtering device of high-isolation,
Further, in order to which the complexity for reducing follow-up signal processing drops as far as possible during designing filtering device
Power jitter in low bands of a spectrum can cooperate the dispersion management scheme based on cascade MZI, to realize that flat rubber belting filters.Referring to fig. 4,
Show the pre- spectral module effect picture of ideal wide spectrum.
After broadband spectral is divided in advance, ultrahigh resolution subdivision is carried out to the spectrum in each spectral bands in order to realize, is needed
Super-resolution Subsection spectrum module is connected to adding in each bands of a spectrum, but this will will lead to entire on piece filtering high-resolution light splitting
System occupies biggish chip area.Simultaneously as each latter linked super-resolution spectrum module of spectral bands is full
Under foot-eye definition case, it can be designed using identical structure.Therefore integrated level in order to further increase, the present invention is in grade
It is switched between each spectral bands after connection MZI waveguide using wave-guide optical switch array, removes the module of redundancy, realize light
Compose the gating of light passing bands of a spectrum and the time division multiplexing of super-resolution spectroscopic module.
Specifically, the wave-guide optical switch array 22 is based on silicon integreted phontonics technology, MMI is injected using carrier
(Multimode Interference).Carrier concentration is injected by changing, changes the absorption coefficient of material, thus successively real
The switching of existing multiple and different central wavelength spectral bands.The waveguide optical switch should improve the response speed of photoswitch as far as possible
Degree reduces the loss and crosstalk of photoswitch, improves extinction ratio, realizes polarization insensitive.The bandwidth and optical channel of each photoswitch
Bandwidth is consistent.Referring to Fig. 5, the 1200nm-1325nm optical switch module effect picture of specific embodiment according to the present invention is shown.
Super-resolution Subsection spectrum module after photoswitch is used and is based on silicon substrate ultrahigh resolution spectral module.
It is to be based on Planar waveguide array, and introduce hot light phasing technique on this basis based on silicon substrate ultrahigh resolution spectral module,
By detecting and analyzing spectrum differential signal come the super-resolution spectroscopic behaviour of further hoisting module.
Specifically, MZI structure is introduced into Waveguide array, sky is utilized present invention employs hot light phase modulation MZI array 23
Between heterodyne technology improve the spectral resolution of system.Hot light phase modulation MZI array belongs to slab guide MZI array, is based on battle array
The design philosophy of train wave guide grating (AWG) replaces waveguide delay line phase and star in AWG to couple using waveguide MZI structure
Device.The fixed length difference of MZI difference, realizes the relevant light splitting of different wavelengths of light in each channel.The beam-splitting structure category of this structure
Static Fourier spectrum beam-splitting structure determines that the maximum length of array MZI structure is poor according to spectral resolution in the design；According to
Detecting light spectrum range determines the stepping-in amount of phase delay；In conjunction with spectrographic detection range and resolution ratio, the channel of Waveguide array is determined
Number.Wherein spectrographic detection resolution ratio expression formula are as follows:
Spectrographic detection spectrum width:
Wherein λ0For the central wavelength of distinguishable spectral region；neffFor waveguide effective index；N is MZI number of arrays；Δ
LminIt is poor for MZI two-arm minimum length.
To realize big spectral region, high spectral resolution design, it is necessary to increase MZI array quantity, to increase technique
Difficulty.In order to reduce processing technology difficulty, the present invention uses hot light phasing technique, and an arm of each MZI introduces heat in an array
Light adjustable elements change the optical path difference of two-arm in each array element MZI structure, obtain the Output optical power under different optical path differences,
Referring to Fig. 6, the hot light phase modulation Waveguide array unit amplification frame diagram of silicon substrate is shown.Minimum optical path difference before introducing hot light phase modulation is
ΔLmin, the output power of each output port is Pout(li), it introduces the minimum optical path difference after heat is adjusted between MZI interferometer and changes
For Δ Lmin+ΔL0, the output power after heat is adjusted is Pout(li+iΔL0).Wave number σ will be changed at this time0, and then change distinguishable light
The central wavelength lambda of spectral limit0, to realize finer spectrographic detection, emphasis SPECTRAL REGION can be carried out finer
Spectrographic detection.The collected data of detector linear array are subjected to Fourier variation, inverting obtains signal spectrum information.
On piece integrates linear array detector 24, for the optical signal of the hot light phase modulation MZI Waveguide array output to be carried out light
Electricity conversion output electric signal.
It is integrated for the on piece of linear array detector 24, using heterogeneous or Manufacturing resource method, realizes optical detector and divide
The on piece of optical module is integrated.Wherein, the method for isomery is will to meet III-V race's material that detection requires to pass through bonding and optical splitter
Part is coupled, and then does device technology again, or the detector chip being ready for directly is bonded with light-splitting device；
Directly in one layer of Ge material of device surface selection area epitaxial growth or III-V race's material, then heterogeneous method is usually
Device technology is done again.
For heterogeneous or Manufacturing resource, when detector is coupled with waveguide, end coupling or evanescent wave coupling are mainly used
It closes, and fully considers the coupling efficiency of two kinds of coupled modes, technique is directed at difficulty, and the influence for dark current etc..
Spectroscopic data processing module 3, the spectral information for being restored to target for electric signal will to be exported.Referring to Fig. 7, show
The spectroscopic data processing module figure of specific embodiment according to the present invention.MZI gusts of the spectroscopic data processing module and hot light phase modulation
Train wave, which is led, to match, and changes processing signal spectrum information in real time according to hot phase modulation, specifically, by control circuit to hot light phase modulation
Control, realize target optical spectrum within the scope of super spectrographic detection.Include:
Noise remove module 31 mainly includes detector for filtering out the background noise signal in spectrographic detection micro-system
Dark current output when no light inputs, and the noise due to caused by bias light etc., these interference noises are mainly shown as dry
Relate to the undulation in recovery spectrum caused by the burr generated on signal；Recovered light caused by the nonlinear response of detector
Spectral amplitude it is non-linear etc..Above-mentioned error be a bit instrument inherently, at any time occur slowly variation, built using instrument
Mould and analysis to apparatus function, can correct to a certain extent, such as detector non-linear, instrument linear function etc.,
Occur at random there are also some errors, but can be detected by the real-time interferogram signal that instrument obtains according to its feature
And correction, such as the correction of burr and phase error.
Flat field correction module 32 obtains the response coefficient of optical detector difference pixel for calibrating optical detector, compensation
The signal errors as caused by its inhomogeneities；
ADC apodization module 33 restores real spectrum signal for carrying out apodization operation, improves signal-to-noise ratio.Apodization is main
It is that cannot obtain whole interference signals for since detector bandwidth limits, have to the collected interference signal of detector
The spectroscopic data that inversion integral obtains in limit bandwidth is the convolution of real spectrum information and detector response function, is typically expressed as
Rectangular window function can restore real spectrum signal using apodization, improve signal-to-noise ratio.
Spectroscopic data inverting module 34 obtains preliminary spectral information for carrying out spectroscopic data inverting.
Spectral radiometric calibration module 35 carries out the spectral information being finally inversed by for carrying out radiation calibration to spectrum
Correction, output spectrum information.
Inverting and calibration are non-constant primarily directed to the response for different wave length such as optical system, waveguide, detector.
Optional replacement of the invention:
In the present invention, optical lens group is preferably used in light collection, but can also use conventional lenses, and advantage exists
It is more mature in technology, but disadvantage is that volume is big, and weight is big.
Current-carrying sub switch is preferably used in wave-guide optical switch array 22, but thermo-optical switch can also be used, advantage is
Technology maturation, defect are that switching speed is slow；Or electric absorption photoswitch is used, advantage is that extinction ratio is big, and defect is wave
Long and polarization dependence is strong.
Hot light phase modulation MZI array is preferably used in super-resolution Subsection spectrum module, but carrier dispersion can also be used
Effect phase modulation, advantage are that modulating speed is fast, unrelated with polarization, but defect is to be lost greatly.
In the pre- spectral module of wide spectrum based on cascade MZI filter, waveguide is preferably silicon nitride material, but also optional
With polymer material, III-V race's material etc., and adulterates multiple material and realize waveguide low-loss transmission and the filtering of specific light spectral coverage
Effect.
Therefore, the invention has the advantages that
(1) present invention proposes the chip-scale super-resolution spectrographic detection micro-system framework based on silicon light integrated technology, by waveguide
It is integrated on the same base to cascade broadband spectral filter, slab guide MZI array spectral module and detector, it is super compared to tradition
Spectrum investigating system is substantially reduced volume, weight and power consumption, be not necessarily to scan module, can lifting system stability, realize chip
The super spectrographic detection of grade.
(2) the cascade architectural framework that the present invention is divided in advance using broadband spectral and waveguide MZI array spectral is finely divided, can
It realizes big spectrographic detection range and more high spectral resolution spectrographic detection, and there is preferable spectral coverage expansion.
(3) present invention is proposed using hot light phasing technique on the basis of waveguide array MZI spectrum to each
MZI optical path difference is adjusted, and then realizes the ultraspectral resolution detector within the scope of target optical spectrum, is not increasing MZI array
Under the premise of quantity, the Output optical power under different optical path differences can get.
The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be said that
A specific embodiment of the invention is only limitted to this, for those of ordinary skill in the art to which the present invention belongs, is not taking off
Under the premise of from present inventive concept, several simple deduction or replace can also be made, all shall be regarded as belonging to the present invention by institute
Claims of submission determine protection scope.
Claims (10)
1. a kind of super spectrographic detection micro-system, comprising:
Light collects coupling module, for collecting the radiation optical information of target, and is coupled to waveguide light-splitting chip；
Waveguide light-splitting chip, for carrying out after the radiant light being collected into filtering spectrum using MZI array and turning through photoelectricity
Electric signal is exported after changing；
Spectroscopic data processing module, the spectral information for being restored to target for electric signal will to be exported.
2. super spectrographic detection micro-system according to claim 1, it is characterised in that:
The light is collected coupling module and is specifically included:
Optical lens group is coated with anti-reflection anti-reflective and filtering film layer, for receiving the radiant light of target spectral coverage, and obtains having input
The radiant light of spectral bandwidth；
Transmission fiber, for improving the coupling efficiency that radiant light enters optical waveguide as intergrade；
Lateral tapered pattern matcher, for radiant light to be coupled into the waveguide light-splitting chip from the transmission fiber.
3. super spectrographic detection micro-system according to claim 2, it is characterised in that:
It is collected in coupling module in the light, radiant light and the coupling efficiency of transmission fiber indicate in space are as follows:
Wherein a is that the diameter of optical lens group propagates backward to the diameter ratio of the field before optical lens with optical fiber mode fields；
AR、ACRespectively the coupling mirror area of optical lens group and speckle area；
x1、x2The spot size on optical lens, the respectively spot size of main shaft and its vertical direction are incident on for light field.
4. super spectrographic detection micro-system according to claim 1, it is characterised in that:
The waveguide light-splitting chip specifically includes:
It cascades MZI waveguide filter, wave-guide optical switch array, hot light phase modulation MZI array, on piece and integrates linear array detector.
Wherein, MZI guide filter is cascaded, for the input spectrum bandwidth to be divided into n optical channel, each optical channel has one
Fixed optical channel bandwidth；
Wave-guide optical switch array is gated for n optical channel to be carried out n × 1；
Hot light phase modulation MZI array for the optical channel gated to be carried out spatial Fourier light splitting, and is realized by hot light phase modulation
Spectrum fine tuning；
On piece integrates linear array detector, for the optical signal of the hot light phase modulation MZI Waveguide array output to be carried out photoelectric conversion
Export electric signal.
5. super spectrographic detection micro-system according to claim 4, it is characterised in that:
The input spectrum bandwidth of 500nm is divided into the optical channel of 4 125nm bandwidth by the cascade MZI waveguide filter.
6. super spectrographic detection micro-system according to claim 4, it is characterised in that:
The wave-guide optical switch array is based on silicon integreted phontonics technology, injects MMI (Multimode using carrier
Interference), carrier concentration is injected by changing, changes the absorption coefficient of material, to successively realize multiple and different
The switching of central wavelength spectral bands.
7. super spectrographic detection micro-system according to claim 4, it is characterised in that:
The spectrographic detection resolution ratio expression formula of the hot light phase modulation MZI array are as follows:
Spectrographic detection spectrum width:
Wherein λ0For the central wavelength of distinguishable spectral region；neffFor waveguide effective index；N is MZI number of arrays；ΔLminFor
MZI two-arm minimum length is poor.
8. super spectrographic detection micro-system according to claim 7, it is characterised in that:
It is Δ L that the hot light phase modulation MZI array, which introduces the minimum optical path difference before hot light phase modulation,min, the output work of each output port
Rate is Pout(li), it introduces the minimum optical path difference after heat is adjusted between MZI interferometer and changes into Δ Lmin+ΔL0, heat adjust after output work
Rate is Pout(li+iΔL0), to change wave number σ0, and then change the central wavelength lambda of distinguishable spectral region0, realize more
Fine spectrographic detection.
9. super spectrographic detection micro-system according to claim 4, it is characterised in that:
The on piece integrates linear array detector, realizes that on piece is integrated using heterogeneous or Manufacturing resource method.
10. super spectrographic detection micro-system according to claim 1, it is characterised in that:
The spectroscopic data processing module, specifically includes:
Noise remove module, for filtering out the background noise signal in spectrographic detection micro-system；
Flat field correction mould obtains the response coefficient of optical detector difference pixel for calibrating optical detector, and compensation is by its unevenness
Signal errors caused by even property；
ADC apodization module restores real spectrum signal for carrying out apodization operation, improves signal-to-noise ratio；
Spectroscopic data inverting module obtains preliminary spectral information for carrying out spectroscopic data inverting.
Spectral radiometric calibration module, it is defeated for being corrected to the spectral information being finally inversed by spectrum progress radiation calibration
Spectral information out.
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