CN114486792B - Photo-thermal interference spectrum gas sensing device and detection method based on near infrared dual-wavelength photonic crystal slow optical waveguide - Google Patents
Photo-thermal interference spectrum gas sensing device and detection method based on near infrared dual-wavelength photonic crystal slow optical waveguide Download PDFInfo
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Abstract
The invention provides a photo-thermal interference spectrum gas sensing device based on a near infrared dual-wavelength photonic crystal slow optical waveguide, which comprises a near infrared detection laser module, a near infrared pump laser module, a near infrared dual-wavelength photonic crystal slow optical waveguide sensing module, an input optical fiber coupler, an optical fiber phase delay device, an optical fiber circulator, an output optical fiber coupler, a phase adjustment module and a second harmonic signal extraction module, wherein the near infrared detection laser module is connected with the near infrared pump laser module; the dual-wavelength photonic crystal slow optical waveguide sensing module consists of a dual-wavelength photonic crystal slow optical waveguide and a coupling waveguide, and is used as one arm of a Mach-Zehnder interferometer, the optical fiber phase delay device is used as the other arm of the Mach-Zehnder interferometer, pump light is absorbed by gas to generate a photo-thermal effect, detection light output by the near infrared detection light source module generates a photo-thermal interference signal through the Mach-Zehnder interferometer, and the concentration of the gas is determined after the detection light is processed through the second harmonic signal extraction module.
Description
Technical Field
The invention belongs to the technical field of infrared analyte detection, and particularly relates to a photothermal interference spectrum gas sensing device and a detection method based on a near infrared dual-wavelength photonic crystal slow optical waveguide.
Background
Conventional optical waveguide sensors rely on evanescent field absorption sensing. And most of the energy of the optical field is distributed in the core layer of the waveguide, the occupied ratio of the evanescent field is small, and the absorbance of the gas detected by the direct absorption spectrum technology is weak, so that the sensitivity of the sensor is low. The dual-wavelength photonic crystal slow optical waveguide can realize slow light effect at room temperature, reduce the group velocity of light, increase the effective optical path, and enhance the interaction between light and analyte, has been applied to various analyte detection, and is one of the on-chip sensing devices with the most application prospect. However, the larger the transmission loss of the dual wavelength photonic crystal slow optical waveguide, the higher the group refractive index of the waveguide, the larger the loss, which makes it difficult to fabricate a sensing device of high group refractive index and long optical path.
The photothermal interference spectroscopy technique can detect weak absorbance in gas and liquid phase materials with very high sensitivity by measuring the change in optical phase of infrared light accumulated over the propagation distance. The slow light effect of the slow light waveguide of the dual-wavelength photonic crystal is utilized to simultaneously reduce the group velocity of the detection light and the pumping light, enhance the absorption of the analyte to the pumping light and increase the phase accumulation of the detection light. On the other hand, the interferometry technique measures the phase change of the probe light, and can ignore the high transmission loss of the dual-wavelength photonic crystal slow optical waveguide, which can be designed as a device with high group refractive index for both the pump light and the probe light, as a source for exciting the photothermal effect of the analyte without being detected. Thereby significantly improving the sensitivity of the sensor.
Compared with a mid-infrared system, the near-infrared sensing system has lower cost and is more beneficial to on-chip integration, so that the pump light and the detection light both use near-infrared wave bands. The slow optical waveguide of the dual-wavelength photonic crystal adopts a non-suspension film structure, has stronger mechanical stability, can be produced in batch, and is favorable for preparing a commercially viable portable sensor.
Disclosure of Invention
Aiming at the characteristics of short optical path, low response speed and low sensitivity of the existing optical waveguide sensing system, the invention discloses a dual-wavelength photonic crystal slow optical waveguide sensor based on a photo-thermal interference spectrum technology, which simultaneously generates a slow light effect in near infrared detection light and pump light bands, increases the effective optical path of the device, enhances the absorption of analytes to the pump light and the phase accumulation of the near infrared detection light, and improves the sensitivity and response speed of the sensor.
The invention adopts the technical scheme that:
a photo-thermal interference spectrum gas sensing device based on a near infrared dual-wavelength photonic crystal slow optical waveguide comprises a near infrared detection laser module, a near infrared pumping laser module, a near infrared dual-wavelength photonic crystal slow optical waveguide sensing module, an input optical fiber coupler, an optical fiber phase delay device, an optical fiber circulator, an output optical fiber coupler, a phase adjustment module and a second harmonic signal extraction module;
the output end of the near infrared detection laser module is connected with the input end of the input optical fiber coupler, and the two output ends of the input optical fiber coupler are respectively connected with the first port of the near infrared dual-wavelength photonic crystal slow optical waveguide sensing module and the input end of the optical fiber phase retarder;
the three ports of the optical fiber circulator are respectively connected with the output end of the near-infrared pumping laser module, the second port of the near-infrared dual-wavelength photonic crystal slow optical waveguide sensing module and the first input end of the output optical fiber coupler, the second input end of the output optical fiber coupler is connected with the output end of the optical fiber phase delay device, the two output ends of the output optical fiber coupler are respectively connected with the input end of the phase adjustment module and the input end of the second harmonic signal extraction module, and the output end of the phase adjustment module is connected to the ground.
Preferably, the near infrared detection laser module comprises a near infrared detection laser, a first temperature controller and a first current controller, wherein the output end of the first temperature controller is connected with the temperature control input end of the near infrared detection laser, the output end of the first current driver is connected with the current input end of the near infrared detection laser, and the near infrared detection laser is used for outputting near infrared detection light.
Preferably, the near-infrared pumping laser module comprises a near-infrared pumping laser, a second temperature controller and a second current controller, wherein the output end of the second temperature controller is connected with the temperature control input end of the pumping laser, the output end of the second current driver is connected with the current input end of the pumping laser, and the pumping laser is used for outputting near-infrared pumping light.
Preferably, the near infrared dual-wavelength photonic crystal slow optical waveguide sensing module comprises a dual-wavelength photonic crystal slow optical waveguide, a first coupling waveguide, a second coupling waveguide and a gas chamber, wherein the gas chamber comprises an air inlet and an air outlet, the dual-wavelength photonic crystal slow optical waveguide is used as a sensing area to be completely covered inside the gas chamber, and part of the first coupling waveguide and part of the second coupling waveguide are exposed in the air so as to realize end surface coupling of a single-mode optical fiber and the dual-wavelength photonic crystal slow optical wave.
Preferably, the output end of the first coupling waveguide is connected with the input end of the dual-wavelength photonic crystal slow optical waveguide, and is used for coupling near infrared detection light from a single-mode optical fiber into the dual-wavelength photonic crystal slow optical waveguide;
the input end of the second coupling waveguide is connected with the output end of the dual-wavelength photonic crystal slow optical waveguide, and is used for coupling near infrared pumping light into the dual-wavelength photonic crystal slow optical waveguide, and coupling output detection light of the dual-wavelength photonic crystal slow optical waveguide into a single-mode optical fiber, so that near infrared detection light and near infrared pumping light can be transmitted simultaneously.
Preferably, the optical fiber circulator couples the near-infrared pump light into the second coupling waveguide through the first port and the second port thereof, and couples the near-infrared probe light output from the second coupling waveguide into the output optical fiber coupler through the second port and the third port thereof, and prevents the near-infrared pump light from being coupled into the output optical fiber coupler.
Preferably, the phase adjustment module comprises a first photoelectric detector, a high-speed servo controller, a piezoelectric ceramic driver and piezoelectric ceramic, one path of output end of the output optical fiber coupler is connected with the input end of the first photoelectric detector, the output end of the first photoelectric detector is connected with the voltage input end of the high-speed servo controller, the voltage output end of the high-speed servo controller is connected with the voltage input end of the piezoelectric ceramic driver, the voltage output end of the piezoelectric ceramic driver is connected with the positive electrode of the piezoelectric ceramic, and the three-dimensional negative electrode of the piezoelectric ceramic is grounded.
Preferably, the phase retarder is a single mode fiber wound on a piezoelectric ceramic, and is used as a reference arm of the Mach-Zehnder interferometer, and the phase adjustment module controls the phase difference of two arms of the Mach-Zehnder interferometer by the following steps:
an optical signal output by one output end of the output optical fiber coupler is converted into an electric signal through a first photoelectric detector, the output electric signal generates an error signal after passing through a high-speed servo controller, the error signal is fed back to a piezoelectric ceramic driver, and the optical fiber wound on the piezoelectric ceramic is controlled to stretch after voltage amplification, so that the phase difference of two arms of the Mach-Zehnder interferometer is stabilized at 90 degrees.
Preferably, the second harmonic signal extraction module comprises a second photoelectric detector, a lock-in amplifier, a data collector and a computer, wherein one output end of the output optical fiber coupler is connected with the input end of the second photoelectric detector, the output end of the second photoelectric detector is connected with the input end of the lock-in amplifier, the output end of the lock-in amplifier is connected with the input end of the data collector, and the output end of the data collector is connected with the computer.
A detection method of a photo-thermal interference spectrum gas sensing device based on a near infrared dual-wavelength photonic crystal slow optical waveguide comprises the following steps:
step 1: near infrared detection light output by the near infrared detection laser module is coupled into the input end of the Mach-Zehnder interferometer through the input optical fiber coupler, near infrared detection light output by the second coupling waveguide is coupled into the output optical fiber coupler through the second port and the third port of the optical fiber circulator, and near infrared detection light is coupled into the first photoelectric detector through the output optical fiber coupler;
step 2: according to the signal output by the first photoelectric detector, a high-speed servo controller in the phase adjustment module is adjusted to control the deformation of the piezoelectric ceramics, so that the phase difference of two arms of the Mach-Zehnder interferometer is stabilized at 90 degrees;
step 3: near-infrared pump light output by the near-infrared pump laser module is coupled into the second coupling waveguide through the first port and the second port of the optical fiber circulator, so that the pump light cannot enter the output optical fiber coupler;
step 4: adjusting the second current controller to enable the wavelength of the near infrared pumping light to scan the absorption wave band of the object to be detected;
step 5: the data acquisition device is used for acquiring an output signal of the lock-in amplifier, and when the wavelength of the near infrared pumping light is regulated, the output signal of the second photoelectric detector is recorded in real time, and a second harmonic wave is extracted to obtain a photo-thermal interference signal;
step 6: the performance of the sensor is analyzed based on photothermal interference signals measured at different analyte concentrations.
The invention has the beneficial effects that:
1. the dual-wavelength photonic crystal slow optical waveguide sensor based on the photo-thermal interference spectrum technology is easy to integrate on a chip, and meanwhile, a slow optical effect is generated in a near infrared detection optical band and a pump optical band, so that the absorption of an analyte to the pump light is enhanced, and the phase accumulation of the detection light is increased.
2. The slow light effect is generated simultaneously in the near infrared communication wave band and the sensing wave band by utilizing the slow light waveguide of the dual-wavelength photonic crystal, so that the phase change of the detection light and the absorption of the gas to the pumping light are enhanced, the amplitude of the photo-thermal interference signal is increased, and the sensitivity of the sensor is greatly improved.
3. The transmission loss of the pump light in the photonic crystal slow optical waveguide can be not considered by adopting the interferometry technology, so that the group refractive index of the pump light can be designed to be as large as possible, and the sensitivity of the sensor is improved.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a system diagram of a photo-thermal interference spectrum gas sensing device based on a near infrared dual wavelength photonic crystal slow optical waveguide of the invention;
FIG. 2 is a top view of a structure of a dual wavelength photonic crystal slow optical waveguide;
FIG. 3 is a dispersion map of a dual wavelength photonic crystal slow optical waveguide, in whichkAs a wave vector of the waves,ais the lattice constant of a photonic crystal slow optical waveguide,n=1.44 is the refractive index of the photonic crystal slow optical waveguide lower cladding;
FIG. 4 is a graph showing the refractive index of a near infrared detection optical band group of a dual-wavelength photonic crystal slow optical waveguide sensor according to the present invention as a function of wavelength;
FIG. 5 is a graph of refractive index of a pump light band group of a dual-wavelength photonic crystal slow optical waveguide sensor according to the present invention as a function of wavelength and methane gas absorbance;
FIG. 6 is a flow chart of measuring an analyte using the present invention.
The reference numerals are as follows:
001. a near infrared detection laser module; 002. a near infrared pump laser module; 003. a dual wavelength photonic crystal slow optical waveguide sensing module; 004. an input fiber coupler; 005. an optical fiber phase retarder; 006 fiber optic circulator; 007. an output fiber coupler; 008 phase adjustment module; 009. a second harmonic signal extraction module;
110. a dual wavelength photonic crystal slow optical waveguide; 111. a first coupling waveguide; 112. and a second coupling waveguide.
Description of the embodiments
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
The embodiment provides a photo-thermal interference spectrum gas sensing device based on a near infrared dual-wavelength photonic crystal slow optical waveguide, which as shown in fig. 1, comprises a near infrared detection laser module 001, a near infrared pump laser module 002, a dual-wavelength photonic crystal slow optical waveguide sensing module 003, an input optical fiber coupler 004, an optical fiber phase delay 005, an optical fiber circulator 006, an output optical fiber coupler 007, a phase adjustment module 008 and a second harmonic signal extraction module 009.
Specifically, the output of the near infrared detection laser module is connected with the input end of the input optical fiber coupler; the input optical fiber coupler is provided with two output ends which are respectively connected with a first port of the near infrared dual-wavelength photonic crystal slow optical waveguide sensing module and an input end of the optical fiber phase retarder;
the optical fiber circulator is provided with three ports, a first port of the optical fiber circulator is connected with the output end of the near-infrared pumping laser module, a second port of the optical fiber circulator is connected with a second port of the near-infrared dual-wavelength photonic crystal slow optical waveguide sensing module, and a third port of the optical fiber circulator is connected with the first output end of the optical fiber output optical fiber coupler;
the second input end of the output optical fiber coupler is connected with the output end of the optical fiber phase retarder, and the two output ends of the output optical fiber coupler are respectively connected with the input end of the phase adjustment module and the input end of the second harmonic signal extraction module.
In this embodiment, the near infrared detection laser module includes a near infrared detection laser, a first temperature controller, and a first current controller, where an output end of the first temperature controller is connected to a temperature control input end of the near infrared detection laser, and an output end of the first current driver is connected to a current input end of the near infrared detection laser. The near-infrared pumping laser module comprises a near-infrared pumping laser, a second temperature controller and a second current controller, wherein the output end of the second temperature controller is connected with the temperature control input end of the pumping laser, and the output end of the second current driver is connected with the current input end of the pumping laser.
The near infrared detection laser module is used for generating detection light with the wavelength of 1550nm, and the near infrared pump laser module is used for generating pump light which can be absorbed by gas.
The first temperature controller is used for controlling the temperature of the near infrared detection laser to be constant, and the second temperature controller is used for controlling the temperature of the near infrared pumping laser to be constant;
the first current controller is used for controlling the current of the near-infrared detection laser to be constant, and the second current controller is used for controlling the current of the near-infrared pumping laser to enable the wavelength of output light of the near-infrared pumping laser module to sweep through a gas absorption peak.
As shown in fig. 2, the near infrared dual wavelength photonic crystal slow optical waveguide sensing module 003 includes a dual wavelength photonic crystal slow optical waveguide 110, a first coupling waveguide 111, a second coupling waveguide 112, and a gas cell. The output end of the first coupling waveguide 111 is connected to the input end of the dual-wavelength photonic crystal slow optical waveguide 110, and the input end of the second coupling waveguide 112 is connected to the output end of the dual-wavelength photonic crystal slow optical waveguide 110.
The near-infrared dual-wavelength photonic crystal slow optical waveguide sensing module 003 is provided with an input end and an output end, and is used for simultaneously transmitting the detection light output by the near-infrared detection laser module 001 and the pump light output by the near-infrared pump laser module 002, and the dual-wavelength photonic crystal slow optical waveguide 110 generates slow optical effects at the two wavelengths of the detection light and the pump light; the dual wavelength photonic crystal slow optical waveguide 110 is an etched hole array structure in a silicon plate, the substrate is silicon, the core layer is silicon, the lower cladding layer is silicon dioxide, and the upper cladding layer is air.
The air chamber is made of Polydimethylsiloxane (PDMS) material and is provided with an air inlet and an air outlet, the dual-wavelength photonic crystal slow optical waveguide is used as a sensing area to be completely covered inside the air chamber, and part of the first coupling waveguide and part of the second coupling waveguide are exposed in the air so as to realize end face coupling of the single-mode optical fiber and the dual-wavelength photonic crystal slow optical waveguide.
The first coupling waveguide 111 is a rectangular waveguide, the substrate is silicon, the core layer is silicon, the lower cladding layer is silicon dioxide, and the upper cladding layer is air, and is used for coupling the detection light generated by the near infrared detection laser module from a single mode fiber into the dual-wavelength photonic crystal slow optical waveguide 110.
The second coupling waveguide 112 is configured to couple the near-infrared pump light into the dual-wavelength photonic crystal slow optical waveguide 110, and couple the output probe light of the dual-wavelength photonic crystal slow optical waveguide 110 into the single-mode optical fiber, so that the near-infrared probe light and the pump light can be transmitted simultaneously; the substrate is silicon, the core layer is silicon, the lower cladding layer is silicon dioxide, and the upper cladding layer is air.
The embodiment also provides a preparation flow of the near infrared dual-wavelength photonic crystal slow optical waveguide sensing module 003, which mainly comprises the following steps:
step 1: the method comprises the steps of (1) cutting a six-inch SOI substrate with a surface silicon layer thickness of 220nm, a silicon dioxide layer thickness of 3 microns and a substrate silicon thickness of 700 microns into silicon wafers with a thickness of 1cm multiplied by 2cm, dripping a ZEP520A photoresist on the silicon wafer, and forming a photoresist mask through electron beam exposure, wherein the photoresist throwing speed is about 2500 rpm, and the photoresist thickness is ensured to be greater than 400 nm;
step 2: developing, and etching a pattern on the silicon layer by dry etching;
step 3: removing the photoresist mask by photoresist stripping to finally form a dual-wavelength photonic crystal slow optical waveguide 110, a first coupling waveguide 111 and a second coupling waveguide 112;
step 4: and sticking the PDMS air chamber on the silicon wafer.
The input optical fiber coupler 004 is a 1×2 beam splitter, and has two output ends, which are respectively connected with the port 1 of the near infrared dual-wavelength photonic crystal slow optical waveguide sensing module 003 and the input end of the optical fiber phase delay 005, and is used for realizing the beam splitting of near infrared detection light, so that the two detection light beams respectively enter the sensing arm and the reference arm of the Mach-Zehnder interferometer.
The optical fiber phase retarder 005 is a single mode fiber wound on PZT, and is used as a reference arm of a mach-zehnder interferometer, and has an input end and an output end, which are connected to an output end of the input optical fiber coupler 004 and an input end of the output optical fiber coupler 007, respectively.
The optical fiber circulator 006 has three ports, a first port of the optical fiber circulator 006 is connected to an output end of the near-infrared pump laser module 002, a second port of the optical fiber circulator 006 is connected to an output end of the near-infrared dual-wavelength photonic crystal slow optical waveguide sensing module 003, and a third port of the optical fiber circulator 006 is connected to an input end of the optical fiber output optical fiber coupler 007, so as to couple near-infrared pump light into the second coupling waveguide through the first port and the second port, and couple detection light output by the near-infrared second coupling waveguide into the output optical fiber coupler 007 through the second port and the third port, and meanwhile, the near-infrared pump light cannot be coupled into the output optical fiber coupler 007.
The output optical fiber coupler 007 has two input ends and two output ends, the two input ends of the output optical fiber coupler 007 are respectively connected with the third port of the optical fiber circulator 006 and the output end of the optical fiber phase retarder 005, the two output ends are respectively connected with the input end of the phase adjustment module 008 and the input end of the second harmonic signal extraction module 009, and the two output ends are used for coupling the detection light after interference into the first and second photodetectors respectively.
The phase adjustment module 008 comprises a first photoelectric detector, a high-speed servo controller, a piezoelectric ceramic driver and piezoelectric ceramic, one path of output end of the output optical fiber coupler 007 is connected with the input end of the first photoelectric detector, the output end of the first photoelectric detector is connected with the voltage input end of the high-speed servo controller, the voltage output end of the high-speed servo controller is connected with the voltage input end of the piezoelectric ceramic driver, the voltage output end of the piezoelectric ceramic driver is connected with the positive electrode of the piezoelectric ceramic, and the three-dimensional negative electrode of the piezoelectric ceramic is grounded.
The phase adjustment module 008 controls the phase difference between the two arms of the mach-zehnder interferometer as follows:
an optical signal output by one output end of the output optical fiber coupler is converted into an electric signal through a first photoelectric detector, the output electric signal generates an error signal after passing through a high-speed servo controller, the error signal is fed back to a piezoelectric ceramic driver, and the optical fiber wound on the piezoelectric ceramic is controlled to stretch after voltage amplification, so that the phase difference of two arms of the Mach-Zehnder interferometer is stabilized at 90 degrees.
The second harmonic signal extraction module 009 comprises a second photoelectric detector, a lock-in amplifier, a data collector and a computer, wherein the output end of the output optical fiber coupler 007 is connected with the input end of the second photoelectric detector, the output end of the second photoelectric detector is connected with the input end of the lock-in amplifier, the output end of the lock-in amplifier is connected with the input end of the data collector, and the output end of the data collector is connected with the computer.
The second harmonic signal is extracted by the following method: the second photodetector converts one path of optical signal output by the output optical fiber coupler 007 into an electrical signal, and then inputs the electrical signal to the lock-in amplifier, the lock-in amplifier is used for extracting the amplitude of the second harmonic of the photo-thermal interference signal, and the amplitude is input to the computer after being collected by the data collector.
Referring to FIG. 3, a dispersion diagram of a dual wavelength photonic crystal slow optical waveguide of the present invention is shown, in whichaIs the lattice constant of a dual wavelength photonic crystal slow optical waveguide,λas a function of the wavelength(s),nfor the refractive index of the lower cladding layer,kas a wave vector of the waves,n=1.44 is the refractive index of the lower cladding of the photonic crystal slow optical waveguide, two guided modes occur in the bandgap, and the lower frequency guided mode is used to guide the pump light, and the higher frequency guided mode is used to guide the probe light.
Referring to FIG. 4, a graph showing the change of group refractive index of detection light band of the sensor according to the present invention with the wavelength of 1550nmn g =13；
Referring to FIG. 5, a graph showing the refractive index of the sensor pump light band group according to the present invention with wavelength of 1654nm and the absorbance of methane gas is shownn g =35；
Referring to fig. 6, a flow chart of measuring an analyte using the present invention is shown. The specific description is as follows:
step 1: near infrared detection light output by the near infrared detection laser module 001 is coupled into the input end of the Mach-Zehnder interferometer through the input optical fiber coupler 004, near infrared detection light output by the second coupling waveguide 112 is coupled into the output optical fiber coupler 007 through the second port and the third port of the optical fiber circulator 006, and near infrared detection light is coupled into the first photoelectric detector through the output optical fiber coupler 007;
step 2: according to the signal output by the first photoelectric detector, a high-speed servo controller in the phase adjustment module 008 is adjusted to control the deformation of the piezoelectric ceramics, so that the phase difference of two arms of the Mach-Zehnder interferometer is stabilized at 90 degrees;
step 3: the near-infrared pump light output by the near-infrared pump laser module 002 is coupled into the second coupling waveguide 112 through the first port and the second port of the fiber circulator 006, so that the pump light cannot enter the output fiber coupler 007;
step 4: adjusting the second current controller to enable the wavelength of the near infrared pumping light to scan the absorption wave band of the object to be detected;
step 5: the data acquisition device is used for acquiring an output signal of the lock-in amplifier, and when the wavelength of the near infrared pumping light is regulated, the output signal of the second photoelectric detector is recorded in real time, and a second harmonic wave is extracted to obtain a photo-thermal interference signal;
step 6: the performance of the sensor is analyzed based on photothermal interference signals measured at different analyte concentrations.
The foregoing is merely illustrative of the present invention and not restrictive, and other modifications and equivalents thereof may occur to those skilled in the art without departing from the spirit and scope of the present invention.
Claims (5)
1. The photo-thermal interference spectrum gas sensing device based on the near infrared dual-wavelength photonic crystal slow optical waveguide is characterized by comprising a near infrared detection laser module, a near infrared pump laser module, a near infrared dual-wavelength photonic crystal slow optical waveguide sensing module, an input optical fiber coupler, an optical fiber phase delay device, an optical fiber circulator, an output optical fiber coupler, a phase adjustment module and a second harmonic signal extraction module;
the output end of the near infrared detection laser module is connected with the input end of the input optical fiber coupler, and the two output ends of the input optical fiber coupler are respectively connected with the first port of the near infrared dual-wavelength photonic crystal slow optical waveguide sensing module and the input end of the optical fiber phase retarder;
the three ports of the optical fiber circulator are respectively connected with the output end of the near-infrared pumping laser module, the second port of the near-infrared dual-wavelength photonic crystal slow optical waveguide sensing module and the first input end of the output optical fiber coupler, the second input end of the output optical fiber coupler is connected with the output end of the optical fiber phase delay device, the two output ends of the output optical fiber coupler are respectively connected with the input end of the phase adjustment module and the input end of the second harmonic signal extraction module, and the output end of the phase adjustment module is connected to the ground;
the phase adjustment module comprises a first photoelectric detector, a high-speed servo controller, a piezoelectric ceramic driver and piezoelectric ceramic, wherein one output end of the output optical fiber coupler is connected with the input end of the first photoelectric detector, the output end of the first photoelectric detector is connected with the voltage input end of the high-speed servo controller, the voltage output end of the high-speed servo controller is connected with the voltage input end of the piezoelectric ceramic driver, the voltage output end of the piezoelectric ceramic driver is connected with the positive electrode of the piezoelectric ceramic, and the three-dimensional negative electrode of the piezoelectric ceramic is grounded;
the optical fiber phase delayer is a single mode optical fiber wound on piezoelectric ceramics and is used as a reference arm of the Mach-Zehnder interferometer, and the phase adjusting module controls the phase difference of two arms of the Mach-Zehnder interferometer to be as follows:
an optical signal output by one output end of the output optical fiber coupler is converted into an electric signal through a first photoelectric detector, the electric signal is output to generate an error signal after passing through a high-speed servo controller, the error signal is fed back to a piezoelectric ceramic driver, and the optical fiber wound on the piezoelectric ceramic is controlled to stretch after voltage amplification, so that the phase difference of two arms of the Mach-Zehnder interferometer is stabilized at 90 degrees;
the near-infrared dual-wavelength photonic crystal slow optical waveguide sensing module comprises a dual-wavelength photonic crystal slow optical waveguide, a first coupling waveguide, a second coupling waveguide and a gas chamber, wherein the gas chamber comprises an air inlet and an air outlet, the dual-wavelength photonic crystal slow optical waveguide is used as a sensing area to be completely covered inside the gas chamber, and part of the first coupling waveguide and part of the second coupling waveguide are exposed in the air so as to realize end face coupling of a single-mode optical fiber and the dual-wavelength photonic crystal slow optical waveguide;
the output end of the first coupling waveguide is connected with the input end of the dual-wavelength photonic crystal slow optical waveguide and is used for coupling near infrared detection light from a single-mode fiber into the dual-wavelength photonic crystal slow optical waveguide;
the input end of the second coupling waveguide is connected with the output end of the dual-wavelength photonic crystal slow optical waveguide, and is used for coupling near infrared pumping light into the dual-wavelength photonic crystal slow optical waveguide, and coupling output detection light of the dual-wavelength photonic crystal slow optical waveguide into a single-mode optical fiber, so that near infrared detection light and near infrared pumping light can be transmitted simultaneously;
the optical fiber circulator couples the near infrared pump light into the second coupling waveguide through the first port and the second port of the optical fiber circulator, couples the near infrared probe light output by the second coupling waveguide into the output optical fiber coupler through the second port and the third port of the optical fiber circulator, and enables the near infrared pump light not to be coupled into the output optical fiber coupler;
the slow optical waveguide of the dual-wavelength photon crystal is of an etched hole array structure in a silicon plate, a substrate is silicon, a core layer is silicon, a lower cladding layer is silicon dioxide, and an upper cladding layer is air.
2. The photo-thermal interference spectrum gas sensing device based on the near infrared dual-wavelength photonic crystal slow optical waveguide according to claim 1, wherein the near infrared detection laser module comprises a near infrared detection laser, a first temperature controller and a first current controller, an output end of the first temperature controller is connected with a temperature control input end of the near infrared detection laser, an output end of the first current controller is connected with a current input end of the near infrared detection laser, and the near infrared detection laser is used for outputting near infrared detection light.
3. The photo-thermal interference spectrum gas sensing device based on the near-infrared dual-wavelength photonic crystal slow optical waveguide according to claim 1, wherein the near-infrared pumping laser module comprises a near-infrared pumping laser, a second temperature controller and a second current controller, an output end of the second temperature controller is connected with a temperature control input end of the near-infrared pumping laser, an output end of the second current controller is connected with a current input end of the near-infrared pumping laser, and the near-infrared pumping laser is used for outputting near-infrared pumping light.
4. The photo-thermal interference spectrum gas sensing device based on the near infrared dual-wavelength photonic crystal slow optical waveguide according to claim 1, wherein the second harmonic signal extraction module comprises a second photoelectric detector, a phase-locked amplifier, a data acquisition unit and a computer, the output end of the output optical fiber coupler is connected with the input end of the second photoelectric detector, the output end of the second photoelectric detector is connected with the input end of the phase-locked amplifier, the output end of the phase-locked amplifier is connected with the input end of the data acquisition unit, and the output end of the data acquisition unit is connected with the computer.
5. The detection method of the photothermal interference spectrum gas sensing device based on the near infrared dual-wavelength photonic crystal slow optical waveguide according to any one of claims 1 to 4, wherein the detection method comprises the following steps:
step 1: near infrared detection light output by the near infrared detection laser module is coupled into the input end of the Mach-Zehnder interferometer through the input optical fiber coupler, near infrared detection light output by the second coupling waveguide is coupled into the output optical fiber coupler through the second port and the third port of the optical fiber circulator, and near infrared detection light is coupled into the first photoelectric detector through the output optical fiber coupler;
step 2: according to the signal output by the first photoelectric detector, a high-speed servo controller in the phase adjustment module is adjusted to control the deformation of the piezoelectric ceramics, so that the phase difference of two arms of the Mach-Zehnder interferometer is stabilized at 90 degrees;
step 3: near-infrared pump light output by the near-infrared pump laser module is coupled into the second coupling waveguide through the first port and the second port of the optical fiber circulator, so that the pump light cannot enter the output optical fiber coupler;
step 4: adjusting a second current controller in the near-infrared pumping laser module to enable the wavelength of the near-infrared pumping light to scan the absorption wave band of the object to be detected;
step 5: the data acquisition device in the second harmonic signal extraction module is used for acquiring an output signal of the lock-in amplifier, and when the wavelength of the near-infrared pumping light is regulated, the output signal of the second photoelectric detector in the second harmonic signal extraction module is recorded in real time, and a second harmonic is extracted, so that a photo-thermal interference signal is obtained;
step 6: the performance of the sensor is analyzed based on photothermal interference signals measured at different analyte concentrations.
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