CN114324988A

CN114324988A - Probe base

Info

Publication number: CN114324988A
Application number: CN202110855691.3A
Authority: CN
Inventors: 黄建军; 吴永红; 赵山; 胡海洋
Original assignee: Stelight Instrument Inc
Current assignee: Stelight Instrument Inc
Priority date: 2021-07-28
Filing date: 2021-07-28
Publication date: 2022-04-12
Anticipated expiration: 2041-07-28
Also published as: CN114324988B

Abstract

The invention discloses a probe seat, which comprises a body, a supporting plate, a probe and a moving point contact probe, wherein the probe is used for being in contact with a chip to be tested, the moving point contact probe is arranged at one end of the supporting plate, a fixed point contact probe which is positioned at the upper part of the moving point contact probe and corresponds to the moving point contact probe is arranged at one side of the lower end surface of the body, a probe seat provided with the probe is fixed at one end of the cantilever, which is far away from the supporting plate, a transfer seat is arranged on the upper surface of the middle part of the supporting plate, and two ends of a first pin shaft are respectively positioned in respective first through holes of a front baffle and a rear baffle; the centroid moment of the supporting plate part, the cantilever, the probe seat and the probe which are positioned on the right side of the first pin shaft is larger than the centroid moment of the rest part of the supporting plate and the moving point contact probe which are positioned on the left side of the first pin shaft. The invention solves the problems of instability and inconsistency of test data in the long-term use process caused by fatigue in the prior art.

Description

Probe base

Technical Field

The invention relates to a probe seat, and belongs to the technical field of chip testing.

Background

In the production test link of the Laser in the optical communication industry, before the COC aging process, the photoelectric performance test of a single Laser chip (LD) is required, so that the performance of the Laser chip (LD) is screened once before aging, the Laser with the problem performance is selected in advance, and the overall yield of the aged COC is improved.

In the testing process of an optical communication single laser chip (LD), the stability of a probe plays a very important role, because the size of a single chip is very small (generally in the range of 300 μm), the position or the angle of the chip is more or less pushed to be deviated by the test probe in the process of contacting the chip, once the position and the angle of the chip are changed, the stability and the test efficiency of subsequent test indexes are directly influenced, and the pressure stability of the test probe is also directly fed back to the stability of a test value, in the mass production test link, one probe needs to detect a large number of chips, and needs to detect the same chip for many times, and the stability and durability of the power-on probe assembly can directly influence the consistency and reproducibility of test data, so that a very strict requirement is provided for the long-term stability of a probe seat in the test process.

Disclosure of Invention

The inventor finds that: the pressure change of the probe acting on the chip can cause the change of the contact resistance, thereby influencing the consistency of test data, and in the long-time test process, if the pressure change is overlarge, the change which can cause the test result to be indistinguishable is caused by the chip or the machine table, thereby causing the test result to lose the comparability. Based on the above findings, the present invention aims to provide a probe holder which solves the problems of unstable and inconsistent test data during long-term use due to fatigue of the probe holder in the prior art.

In order to achieve the purpose, the invention adopts the technical scheme that: a probe seat comprises a body, a supporting plate, a probe used for being in contact with a chip to be tested and a movable point contact probe, wherein one end of the supporting plate is provided with a cantilever, the other end of the supporting plate is provided with the movable point contact probe, one side of the lower end surface of the body is provided with a fixed point contact probe which is positioned at the upper part of the movable point contact probe and corresponds to the movable point contact probe, and one end, far away from the supporting plate, of the cantilever is fixedly provided with the probe seat provided with the probe;

a transfer seat is arranged on the upper surface of the middle part of the supporting plate, the front side and the rear side of the transfer seat are respectively provided with a front baffle and a rear baffle, the front baffle and the rear baffle are respectively provided with a first through hole and 2 guide grooves positioned at two sides of the first through hole, and two ends of a first pin shaft are respectively positioned in the respective first through holes of the front baffle and the rear baffle;

a second pin shaft and a third pin shaft are arranged on the lower convex block on the other side of the lower end face of the body in parallel, the second pin shaft and the third pin shaft are positioned above the first pin shaft and positioned on two sides of the first pin shaft, two ends of the second pin shaft and two ends of the third pin shaft respectively extend out from the front side and the rear side of the lower convex block, a first bearing and a second bearing are respectively sleeved on two ends of the second pin shaft and positioned on the front side and the rear side of the lower convex block, and a third bearing and a fourth bearing are respectively sleeved on two ends of the third pin shaft and positioned on the front side and the rear side of the lower convex block;

the first bearing, the third bearing, the second bearing and the fourth bearing are respectively positioned between the lower lug and the front baffle and the rear baffle, one end of a first elastic part positioned in a vertical through hole of the lower lug is connected with a middle area of a first pin shaft positioned between the front baffle and the rear baffle, the other end of the first elastic part is connected with a fourth pin shaft positioned in the body and positioned above the second pin shaft and the third pin shaft, and the first elastic part is in a stretching state, so that respective moving coils of the first bearing, the second bearing, the third bearing and the fourth bearing are in pressing contact with the side surface of the first pin shaft;

the centroid moment of the supporting plate part, the cantilever, the probe seat and the probe which are positioned on the right side of the first pin shaft is larger than the centroid moment of the rest part of the supporting plate and the moving point contact probe which are positioned on the left side of the first pin shaft.

The further improved scheme in the technical scheme is as follows:

1. in the above scheme, the first elastic member is a spring.

2. In the above scheme, the cantilever further includes the riser and the horizontal plate of being connected with the riser upper end, the riser lower extreme is connected with the backup pad, the horizontal plate is kept away from riser one end and is installed the probe seat.

3. In the above scheme, the body is connected with the fixed point contact probe through an extension plate.

4. In the above scheme, the first bearing, the second bearing, the third bearing and the fourth bearing are all deep groove ball bearings.

Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:

the invention relates to a probe seat, wherein a first pin shaft vertical to the length direction of a supporting plate is arranged on the rotatable supporting plate provided with a probe, a second pin shaft and a third pin shaft which are fixed on a body are arranged at two sides above the first pin shaft, four bearings attached to the first pin shaft are arranged at two ends of the second pin shaft and the third pin shaft, and finally the first pin shaft on the supporting plate and a fourth pin shaft in the body are tensioned through a first elastic part, so that outer rings of the four bearings are kept in pressing contact with the outer circumferential surface of the first pin shaft and can rotate relatively, the fatigue problem in the prior art is solved, the accurate setting of position parameters in the horizontal direction and the vertical direction is facilitated, and the stability of an initial pressure set value can be kept after long-term and high-frequency use, thereby the stability, the repeatability, the comparability and the consistency of detection data are improved, and the separation of the probe and a chip is overcome, the probe has the defect of micro-jitter in the vertical direction, so that the time between adjacent detections is favorably shortened, the detection efficiency is improved, and unnecessary damage to a chip is avoided; and the micro rotation offset of the probe in the horizontal direction is eliminated, the accuracy of the detection data is ensured, and the stability, repeatability, comparability and consistency of the detection data are further improved.

Drawings

FIG. 1 is a schematic diagram of a probe base structure according to the present invention;

FIG. 2 is a schematic view of a partial structure of a probe base according to the present invention;

FIG. 3 is a partial cross-sectional view of a probe mount of the present invention in one orientation;

FIG. 4 is a schematic view of a partial structure of a probe base according to the present invention;

FIG. 5 is a partial cross-sectional view of a probe mount of the present invention in another orientation.

In the above drawings: 1. a body; 2. a support plate; 31. the moving point contacts the probe; 32. a stationary point contact probe; 4. a cantilever; 41. a vertical plate; 42. a horizontal plate; 5. a probe base; 51. a probe; 6. a transfer seat; 61. a front baffle; 62. a tailgate; 7. a first through hole; 8. a guide groove; 9. a first pin shaft; 10. a lower bump; 11. a second pin shaft; 12. a third pin shaft; 13. a first bearing; 14. a second bearing; 15. a third bearing; 16. a fourth bearing; 17. a vertical through hole; 18. a first elastic member; 19. a fourth pin shaft; 20. an extension plate.

Detailed Description

In the description of this patent, it is noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; furthermore, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, as they may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The meaning of the above terms in this patent may be specifically understood by those of ordinary skill in the art.

Example 1: a probe seat comprises a body 1, a supporting plate 2, a probe 51 used for contacting with a chip to be tested and a moving point contact probe 31, wherein one end of the supporting plate 2 is provided with a cantilever 4, the other end of the supporting plate is provided with the moving point contact probe 31, one side of the lower end surface of the body 1 is provided with a dead point contact probe 32 which is positioned at the upper part of the moving point contact probe 31 and corresponds to the moving point contact probe, and one end of the cantilever 4, which is far away from the supporting plate 2, is fixedly provided with a probe seat 5 provided with the probe 51;

a transfer seat 6 is arranged on the upper surface of the middle part of the support plate 2, the front side and the rear side of the transfer seat 6 are respectively provided with a front baffle 61 and a rear baffle 62, the front baffle 61 and the rear baffle 62 are respectively provided with a first through

hole

7 and 2 guide grooves 8 positioned at two sides of the first through hole 7, and two ends of a first pin shaft 9 are respectively positioned in the respective first through holes 7 of the front baffle 61 and the rear baffle 62;

a second pin shaft 11 and a third pin shaft 12 are arranged on the lower convex block 10 positioned on the other side of the lower end face of the body 1 in parallel, the second pin shaft 11 and the third pin shaft 12 are positioned above the first pin shaft 9 and positioned on two sides of the first pin shaft, two ends of the second pin shaft 11 and two ends of the third pin shaft 12 respectively extend out from the front side and the rear side of the lower convex block 10, a first bearing 13 and a second bearing 14 are respectively sleeved on two ends of the second pin shaft 11 and positioned on the front side and the rear side of the lower convex block 10, and a third bearing 15 and a fourth bearing 16 are respectively sleeved on two ends of the third pin shaft 12 and positioned on the front side and the rear side of the lower convex block 10;

the first bearing 13, the third bearing 15, the second bearing 14 and the fourth bearing 16 are respectively positioned between the lower lug 10 and the front baffle plate 61 and the rear baffle plate 62, one end of a first elastic part 18 positioned in a vertical through hole 17 of the lower lug 10 is connected with the middle area of the first pin shaft 9 positioned between the front baffle plate 61 and the rear baffle plate 62, the other end of the first elastic part is connected with a fourth pin shaft 19 positioned in the body 1 and positioned above the second pin shaft 11 and the third pin shaft 12, and the first elastic part 18 is in a stretching state, so that moving coils of the first bearing 13, the second bearing 14, the third bearing 15 and the fourth bearing 16 are respectively in pressing contact with the side surface of the first pin shaft 9;

the moment of the center of mass of the part of the support plate 2, the cantilever 4, the probe holder 5 and the probe 51 located on the right side of the first pin 9 is greater than the moment of the center of mass of the rest of the support plate 2, the moving point contact probe 31 located on the left side of the first pin 9.

The first elastic member 18 is a spring; the body 1 is connected with the dead point contact probe 32 through an extension plate 20; the first bearing 13, the second bearing 14, the third bearing 15, and the fourth bearing 16 are all deep groove ball bearings.

Example 2: a probe seat comprises a body 1, a supporting plate 2, a probe 51 for contacting with a chip to be tested and a moving point contact probe 31, one end of the supporting plate 2 is provided with a cantilever 4, the other end is provided with the moving point contact probe 31, a fixed point contact probe 32 which is positioned at the upper part of the movable point contact probe 31 and corresponds to the movable point contact probe is arranged on one side of the lower end surface of the body 1, when the probe is contacted with the chip to be tested, the movable point contact probe rotates along with the supporting plate to be far away from the fixed point contact probe, the movable point contact probe and the fixed point contact probe are changed into a mutually separated state from an initial state of mutual contact, after a control system for testing the chip receives signals that the movable point contact probe and the fixed point contact probe are mutually separated, the power-on operation is executed to lead the probe to be electrically conducted with the chip, then the chip is tested for various parameters, a probe seat 5 provided with the probe 51 is fixed at one end of the cantilever 4 far away from the supporting plate 2;

hole

The cantilever 4 further comprises a vertical plate 41 and a horizontal plate 42 connected with the upper end of the vertical plate 41, the lower end of the vertical plate 41 is connected with the supporting plate 2, and the end of the horizontal plate 42 far away from the vertical plate 41 is provided with a probe seat 5.

When the probe seat is adopted, the probe seat is generally arranged on a driving mechanism (such as a three-axis motion platform), the probe seat is moved to enable the probe to be contacted with a chip to be tested, the probe applies downward pressure to the chip and simultaneously receives upward reaction force from the chip to drive a supporting plate to rotate, a moving point contact probe arranged on the supporting plate moves downward, the initial state of contact with a fixed point contact probe is changed into a state of separation from the fixed point contact probe, the probe applies proper pressure to the chip, at the moment, a control system for testing the chip executes power-on operation to enable the probe to be electrically conducted with the chip and test various parameters of the chip, after the test is finished, the supporting plate reversely rotates under the action of a second elastic element to restore to the initial horizontal position, and meanwhile, the moving point contact probe is contacted with the fixed point contact probe;

in the process of testing a large number of chips for a long time and reciprocating rotation of the supporting plate, the first pin shaft arranged on the supporting plate is attached to the four bearings which are arranged on the body and arranged at two sides and two ends of the first pin shaft through the first elastic piece, so that the first pin shaft can be accurately limited while the supporting plate can smoothly rotate by taking the first pin shaft as a fulcrum, and the supporting plate can only rotate without deviating in other directions; therefore, the fatigue problem existing in the prior art that the spring piece supporting structure is adopted to support the front-end probe structure can be eliminated, the position parameters in the horizontal direction and the vertical direction can be accurately set, and the stability of the initial pressure set value can be still kept after long-term and high-frequency use, so that the stability, the repeatability, the comparability and the consistency of detection data are improved, the defect that the probe has micro-jitter in the vertical direction when the probe is separated from a chip is overcome, the time between adjacent detections can be shortened, the detection efficiency is improved, and unnecessary damage to the chip is avoided;

furthermore, the micro rotation offset of the probe in the horizontal direction is eliminated, the accuracy of the detection data is ensured, and the stability, repeatability, comparability and consistency of the detection data are further improved.

The probe seat can be expanded to other industries for testing semiconductor chips, is not limited to the optical communication industry, can be synchronously expanded and used in all industries needing the probe seat, and has wide application range.

The above embodiments are merely illustrative of the technical ideas and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and not to limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims

1. A probe mount, comprising: the probe comprises a body (1), a supporting plate (2), a probe (51) used for being in contact with a chip to be tested and a moving point contact probe (31), wherein one end of the supporting plate (2) is provided with a cantilever (4), the other end of the supporting plate is provided with the moving point contact probe (31), one side of the lower end surface of the body (1) is provided with a fixed point contact probe (32) which is positioned at the upper part of the moving point contact probe (31) and corresponds to the moving point contact probe, and one end, far away from the supporting plate (2), of the cantilever (4) is fixedly provided with a probe seat (5) provided with the probe (51);

a switching seat (6) is arranged on the upper surface of the middle part of the supporting plate (2), the front side and the rear side of the switching seat (6) are respectively provided with a front baffle (61) and a rear baffle (62), the front baffle (61) and the rear baffle (62) are respectively provided with a first through hole (7) and 2 guide grooves (8) positioned at two sides of the first through hole (7), and two ends of a first pin shaft (9) are respectively positioned in the respective first through holes (7) of the front baffle (61) and the rear baffle (62);

a second pin shaft (11) and a third pin shaft (12) are arranged on a lower convex block (10) on the other side of the lower end face of the body (1) in parallel, the second pin shaft (11) and the third pin shaft (12) are arranged above the first pin shaft (9) and are arranged on two sides of the first pin shaft, two ends of the second pin shaft (11) and two ends of the third pin shaft (12) respectively extend out from the front side and the rear side of the lower convex block (10), a first bearing (13) and a second bearing (14) are respectively sleeved at two ends of the second pin shaft (11) and are arranged on the front side and the rear side of the lower convex block (10), and a third bearing (15) and a fourth bearing (16) are respectively sleeved at two ends of the third pin shaft (12) and are arranged on the front side and the rear side of the lower convex block (10);

the first bearing (13), the third bearing (15), the second bearing (14) and the fourth bearing (16) are respectively positioned between the lower lug (10) and the front baffle (61) and the rear baffle (62), one end of a first elastic piece (18) positioned in a vertical through hole (17) of the lower lug (10) is connected with the middle area of the first pin shaft (9) positioned between the front baffle (61) and the rear baffle (62), the other end of the first elastic piece is connected with a fourth pin shaft (19) positioned in the body (1) and positioned above the second pin shaft (11) and the third pin shaft (12), and the first elastic piece (18) is in a stretching state, so that respective moving rings of the first bearing (13), the second bearing (14), the third bearing (15) and the fourth bearing (16) are in pressing contact with the side surface of the first pin shaft (9);

the centroid moment of the supporting plate (2) part, the cantilever (4), the probe seat (5) and the probe (51) on the right side of the first pin shaft (9) is larger than the centroid moment of the rest part and the moving point contact probe (31) of the supporting plate (2) on the left side of the first pin shaft (9).

2. The probe holder of claim 1, wherein: the first elastic member (18) is a spring.

3. The probe holder of claim 1, wherein: cantilever (4) further include riser (41) and horizontal plate (42) be connected with riser (41) upper end, riser (41) lower extreme is connected with backup pad (2), vertical plate (41) one end is kept away from in horizontal plate (42) and probe seat (5) are installed.

4. The probe holder of claim 1, wherein: the body (1) is connected with the dead point contact probe (32) through an extension plate (20).

5. The probe holder of claim 1, wherein: the first bearing (13), the second bearing (14), the third bearing (15) and the fourth bearing (16) are all deep groove ball bearings.