CN114293152A - Device for adding film material before melting material in crucible - Google Patents
Device for adding film material before melting material in crucible Download PDFInfo
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- CN114293152A CN114293152A CN202111581959.5A CN202111581959A CN114293152A CN 114293152 A CN114293152 A CN 114293152A CN 202111581959 A CN202111581959 A CN 202111581959A CN 114293152 A CN114293152 A CN 114293152A
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- crucible
- rotating mechanism
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- melting
- limiting
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- 238000002844 melting Methods 0.000 title claims abstract description 66
- 230000008018 melting Effects 0.000 title claims abstract description 66
- 230000007246 mechanism Effects 0.000 claims abstract description 74
- 238000007599 discharging Methods 0.000 claims abstract description 26
- 239000012528 membrane Substances 0.000 abstract description 19
- 239000000155 melt Substances 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 239000007888 film coating Substances 0.000 abstract description 3
- 238000009501 film coating Methods 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 description 10
- 238000010894 electron beam technology Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 7
- 229910003087 TiOx Inorganic materials 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
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- 230000009471 action Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- HLLICFJUWSZHRJ-UHFFFAOYSA-N tioxidazole Chemical compound CCCOC1=CC=C2N=C(NC(=O)OC)SC2=C1 HLLICFJUWSZHRJ-UHFFFAOYSA-N 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
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Abstract
The application relates to a add membrane material device before crucible melts material, include: the device comprises a base, a crucible connected with the base, a rotating mechanism connected with a driving source, a material melting part, a material adding component and a limiting component; the feeding assembly is connected to the rotating mechanism and can rotate relative to the crucible under the driving of the rotating mechanism, the feeding assembly comprises a charging barrel and a discharging seat which are connected in a rotating mode, the discharging seat is provided with a material leaking hole, one of the charging barrel and the discharging seat is connected with the rotating mechanism, and the limiting assembly is used for limiting the other one of the charging barrel and the discharging seat; when the limiting assembly limits the discharging seat or the material barrel, the rotating mechanism rotates to drive the material barrel and the discharging seat to rotate relatively so that the material barrel moves relative to the material leaking hole and is selectively communicated. In the above scheme, the film material is added when the crucible is melted only through the rotary rotating mechanism, the operation can be carried out without opening the door of the film coating machine, and compared with the prior art in which the film material is added after the crucible is melted and the door is opened after the material is finished, the operation is more convenient, and the production efficiency is higher.
Description
Technical Field
The application relates to the technical field of coating, in particular to a device for adding a coating material before melting the material in a crucible.
Background
Common coating material TiOXThe temperature required in the evaporation process of the (granular with the diameter of 1-3 mm) coating is higher than that of other materials (SiO)2、Al2O3) And higher. The electron gun energy is high in the coating evaporation process, the film material which is not pre-melted is easy to crack and splash when being bombarded by the electron beam, the evaporation rate required by the coating process cannot be achieved, secondly, the splash of the film material can influence the cleanliness in the vacuum chamber, black point-like particles are formed on the surface of a product, and the appearance yield is reduced. To ensure the stability of the coating process, TiOxBefore the material is used, the material needs to be melted to form a block-shaped whole (often called a melting crucible). Melt the crucible process and need divide 5 ~ 6 times to go on usually, add a small amount of membrane material at every turn in the crucible (can cover crucible bottom or the lower extreme has melted the membrane material can, the membrane material adds too much, the electron beam is difficult to the bombardment on lower floor's membrane material, can not reach and melt the crucible effect, lower extreme membrane material still can burst by electron beam bombardment during the use), the high energy electron beam that manual control electron gun sent, the bombardment is on the membrane material, make the membrane material melt gradually, every machine has 12 crucible positions, once can melt 12 crucibles.
The current problem point lies in melting the crucible when the platform need reach high vacuum state, and 12 crucibles melt the material at every turn and accomplish the back, need aerify and open the door and add the membrane material, close the door again and bleed and reach high vacuum state, and the platform single is aerifyd, bleed time consuming time is more than 30min, and a round melts the crucible process consuming time more than 3h, and present 12h can only accomplish 2 rounds and melt the crucible, consuming time for a long time, inefficiency.
In addition, coating process temperature is high, and the crucible upper edge is far away from the cooling water distance, and refrigeration effect is poor, and the crucible mouth warp seriously after using a period of time, can influence the crucible and normally rotate, needs to change new crucible this moment promptly, and current board is more, and the crucible change volume is big, need occupy 1 machine when melting the crucible, and 1 manpower hinders board productivity 12h, and platform coordination difficulty when the production task is heavy, and crucible deformation does not exceed the standard crucible and can not take place often.
Disclosure of Invention
Based on this, it is necessary to provide a crucible adds membrane material device before melting material, aims at solving the inconvenient problem of adding the membrane material of crucible in-process that prior art exists.
The application provides an add membrane material device before crucible melts material, includes: the device comprises a base, a crucible connected with the base, a rotating mechanism connected with a driving source, a material melting part, a material adding component and a limiting component; the feeding assembly is connected to the rotating mechanism and can rotate relative to the crucible under the driving of the rotating mechanism, the feeding assembly comprises a charging barrel and a discharging seat which are connected in a rotating mode, the discharging seat is provided with a material leaking hole, one of the charging barrel and the discharging seat is connected with the rotating mechanism, and the limiting assembly is used for limiting the other one of the charging barrel and the discharging seat; when the limiting assembly limits the blanking seat or the material cylinder, the rotating mechanism rotates to drive the material cylinder and the blanking seat to rotate relatively so that the material cylinder moves relative to the material leakage hole and is selectively communicated.
In any implementation mode, the material cylinder is connected to the rotating mechanism, the limiting assembly limits the blanking seat, and when the limiting assembly limits the blanking seat, the rotating mechanism rotates to drive the material cylinder to rotate relative to the blanking seat so as to move relative to the material leaking hole, so that the material leaking hole is selectively communicated with the material cylinder.
It is rotatory to add the material subassembly through setting up slewing mechanism drive in the above-mentioned scheme, make to add the material subassembly and can remove the crucible relatively, avoid adding the material subassembly to melting the material piece and melting the process production influence of membrane material in the crucible, it is in time spacing to carry out the unloading seat through setting up spacing subassembly, make the unloading seat can fix a position the crucible position, avoid leaking the material, continue rotatory slewing mechanism simultaneously and can also drive the feed cylinder and remove to leaking material hole position, make the prestore membrane material in the feed cylinder can leak to the crucible in from leaking the material hole. In the above scheme, the film material is added when the crucible is melted only through the rotary rotating mechanism, the operation can be carried out without opening the door of the film coating machine, and compared with the prior art in which the film material is added after the crucible is melted and the door is opened after the material is finished, the operation is more convenient, and the production efficiency is higher.
The technical solution of the present application is further described below:
in any implementation mode, the device for adding the film material before melting the material in the crucible further comprises a pre-melting baffle, the pre-melting baffle is fixedly connected with the rotating mechanism through a connecting rod, the rotating mechanism can drive the pre-melting baffle to move relative to the crucible, and the pre-melting baffle can be located above the crucible and can shield the crucible.
In any implementation mode, the periphery of the blanking seat is arc-shaped, and the periphery of the blanking seat is provided with an inwards concave groove.
In any embodiment, the limiting component is fixedly connected with the base, and in the process that the feeding component rotates relative to the crucible, the limiting component can slide along the periphery of the blanking seat and limit the blanking seat when the limiting component is matched with the groove.
In any embodiment, the limiting assembly comprises a fixed seat, a limiting plate and a second elastic part, wherein the fixed seat, the limiting plate and the second elastic part are fixedly connected to the base, a containing cavity is formed in the fixed seat, the limiting plate and the second elastic part are located in the containing cavity, one end of the limiting plate protrudes out of the fixed seat, the fixed seat is abutted to the discharging seat, and two ends of the second elastic part are respectively abutted to the other end of the limiting plate and the side wall of the containing cavity.
In any embodiment, the charging barrel is fixedly connected with the rotating mechanism through a connecting rod, and the rotating mechanism rotates to drive the connecting rod and the charging barrel to synchronously rotate with the rotating mechanism.
In any implementation mode, the blanking seat is provided with a second positioning column, and the second positioning column is fixedly connected with the rotating mechanism and is rotatably connected with the blanking seat.
In any embodiment, the second positioning column is connected with the blanking seat through a rotating pin, and the blanking seat can rotate around the rotating pin relative to the second positioning column.
In any embodiment, the blanking seat is further provided with a first positioning column, the first positioning column is fixedly connected with the blanking seat, and a first elastic part is arranged between the first positioning column and the second positioning column.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the application and, together with the description, serve to explain the application and are not intended to limit the application.
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a device for adding a film material before melting a crucible according to an embodiment of the present application;
FIG. 2 is a schematic structural view of the material feeding assembly of FIG. 1;
fig. 3 is a schematic structural view of the limiting assembly in fig. 1.
Description of reference numerals:
100. a film material adding device before crucible material melting; 110. a base; 120. a crucible; 130. a rotating mechanism; 140. a material melting part; 150. a material adding component; 151. a charging barrel; 1511. a through hole; 152. a blanking seat; 1521. a material leaking hole; 1522. a groove; 153. a connecting rod; 154. a first positioning post; 155. a second positioning column; 156. a first elastic member; 160. a limiting component; 161. a fixed seat; 162. a limiting plate; 163. a second elastic member; 170. a pre-melting baffle; 180. a connecting rod.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present application more comprehensible, embodiments accompanying the present application are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. This application is capable of embodiments in many different forms than those described herein and that modifications may be made by one skilled in the art without departing from the spirit and scope of the application and it is therefore not intended to be limited to the embodiments disclosed below.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "including" and "having," and any variations thereof, in the description and claims of this application and the description of the above figures are intended to cover non-exclusive inclusions.
In the description of the embodiments of the present application, the term "and/or" is only one kind of association relation describing an associated object, and means that three kinds of relations may exist, for example, a and/or B, may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.
In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the present application.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.
Preferred embodiments of the present application will be described below with reference to the accompanying drawings.
As shown in fig. 1 and 2, an apparatus 100 for adding a film material before melting a crucible according to an embodiment of the present application includes: the crucible comprises a base 110, a crucible 120 connected to the base 110, a rotating mechanism 130 connected to a driving source, a melting piece 140, a charging assembly 150 and a limiting assembly 160. The feeding assembly 150 is connected to the rotating mechanism 130 and can rotate relative to the crucible 120 under the driving of the rotating mechanism 130, the feeding assembly 150 includes a material cylinder 151 and a material discharging seat 152 which are rotatably connected, the material discharging seat 152 is provided with a material leaking hole 1521, one of the material cylinder 151 and the material discharging seat 152 is connected to the rotating mechanism 130, and the limiting assembly 160 is used for limiting the other one of the material cylinder 151 and the material discharging seat 152. When the limiting assembly 160 limits the position of the material cylinder 151 or the material discharging seat 152, the rotating mechanism 130 rotates to drive the material cylinder 151 and the material discharging seat 152 to rotate relatively, so that the material cylinder 151 moves relative to the material leaking hole 1521 and is selectively communicated.
In this embodiment, the material cylinder 151 is connected to the rotating mechanism 130, the position-limiting component 160 limits the position of the feeding seat 152 when the material-adding component 150 rotates to the set position, and when the position-limiting component 160 limits the position of the feeding seat 152, the rotating mechanism 130 rotates to drive the material cylinder 151 to rotate relative to the feeding seat 152 so as to move relative to the material leaking hole 1521, so that the material leaking hole 1521 is selectively communicated with the material cylinder 151.
In another embodiment, the blanking seat 152 may be connected to the rotating mechanism 130, and when the feeding assembly 150 rotates to a set position, the position limiting assembly may limit the position of the cartridge 151. When the limiting assembly limits the material cylinder 151, the rotating mechanism 130 rotates to drive the discharging seat 152 to rotate relative to the material cylinder 151, so that the material leaking hole 1521 is selectively communicated with the material cylinder 151.
The crucible 120 is used for placing a coating material. As shown in fig. 1, the number of crucibles 120 may be plural, and in the present embodiment, the number of crucibles 120 is 12. Generally, the melting material 140 acts only on the crucible 120 nearest to the melting material 140, and when the melting material 140 melts the film material in one crucible 120, the other crucible 120 is rotated to the position nearest to the melting material 140 by rotating the crucible 120. The plurality of crucibles 120 are sequentially rotated, so that the melting member 140 sequentially melts all the film materials in the crucibles 120.
The melting member 140 serves to melt the film material in the crucible 120 into a block-shaped body. In the present embodiment, the melting member 140 is an electron gun, which is a device for generating, accelerating and converging a high energy density electron beam, and emits an electron beam with a certain energy, a certain beam, a certain speed and an angle, which is also called an electron beam.
The material adding assembly 150 is used for adding the film material into the crucible 120 after the melting piece 140 melts the film material in the crucible 120. Wherein, the charging barrel 151 is used for pre-storing the film material, and the blanking seat 152 is arranged between the charging barrel 151 and the crucible 120. In this embodiment, the charging barrel 151 adopts a funnel-shaped structure, the bottom end of the charging barrel 151 is provided with a through hole 1511 matched with the material leaking hole 1521, and when the limiting component 160 is limited to the discharging seat 152, the rotating mechanism 130 rotates to drive the charging barrel 151 to rotate relative to the discharging seat 152 so as to move relative to the material leaking hole 1521, so that the material leaking hole 1521 is communicated with the through hole 1511. When the through hole 1511 and the leaking hole 1521 are at least partially overlapped, the pre-stored film material in the cylinder 151 can leak into the crucible 120 through the leaking hole 1521. When the through hole 1511 and the leaking hole 1521 do not overlap, the charging barrel 151 is sealed by the blanking seat 152, and the leaking of the material in the charging barrel 151 is prevented.
Through making feed cylinder 151 and unloading seat 152 rotate relatively to make feed cylinder 151 can move relative small hole 1521, thereby make the interior membrane material that prestores of feed cylinder 151 can leak into crucible 120 from small hole 1521 in, or utilize unloading seat 152 to seal feed cylinder 151, prevent that the material in feed cylinder 151 from leaking.
After the melting member 140 melts the film material in the crucible 120, the rotating mechanism 130 drives the feeding assembly 150 to move to a set position (i.e., the material leaking hole 1521 of the feeding seat 152 is located above the crucible 120, so that the pre-stored film material in the charging barrel 151 can leak into the crucible 120 from the material leaking hole 1521), and the limiting assembly 160 limits the feeding seat 152, so that the feeding seat 152 is kept at the set position. And then, the rotating mechanism 130 is continuously rotated, so that the rotating mechanism 130 drives the charging barrel 151 to rotate relative to the blanking base 152, and the pre-stored film material in the charging barrel 151 can leak into the crucible 120 from the material leaking hole 1521 when the charging barrel 151 rotates to the position of the material leaking hole 1521.
Add the material subassembly 150 rotation through setting up slewing mechanism 130 drive in the above-mentioned scheme, make and add material subassembly 150 and can remove relative crucible 120, avoid adding material subassembly 150 to melting the process production influence of material piece 140 melting crucible 120 interior membrane material, it is in time spacing to feed socket 152 still through setting up spacing subassembly 160, make feed socket 152 can fix a position crucible 120 position, avoid leaking the material, continue simultaneously rotatory slewing mechanism 130 and can also drive feed cylinder 151 and remove to leaking hole 1521 position, make the membrane material of prestoring in the feed cylinder 151 can leak to crucible 120 in from leaking hole 1521. In the above scheme, the film material is added when the crucible 120 melts the material only through the rotating mechanism 130, the operation can be performed without opening the door of the film coating machine, and compared with the prior art in which the film material is added after the crucible 120 melts the material and the door is opened, the operation is more convenient, and the production efficiency is higher.
Referring to fig. 1, according to some embodiments of the present disclosure, optionally, the device 100 for adding a film material before melting a crucible further includes a pre-melting baffle 170, the pre-melting baffle 170 is fixedly connected to the rotating mechanism 130 through a connecting rod 180, and the rotating mechanism 130 can drive the pre-melting baffle 170 to move relative to the crucible 120, and can be located above the crucible 120 and shield the crucible 120.
The function of the pre-melt baffles 170 is to: when the melting piece 140 melts the film material in the crucible 120, the film material is evaporated from the crucible 120, and in order to prevent the evaporated film material from being deposited in the vacuum chamber of the coater, the pre-melting baffle 170 is moved to the upper side of the crucible 120, so that the partially evaporated film material can be deposited on the surface of the pre-melting baffle 170.
As shown in fig. 1, when the rotating mechanism 130 rotates, the pre-melting baffle 170 rotates synchronously with the rotating mechanism 130, and the rotation path of the pre-melting baffle 170 takes the rotating mechanism 130 as the center of a circle and the length of the connecting rod 180 as the radius.
Referring to fig. 2, according to some embodiments of the present disclosure, optionally, the outer circumference of the blanking seat 152 is arc-shaped, and the outer circumference of the blanking seat 152 is provided with a concave groove 1522. The groove 1522 is used for cooperating with the limiting component 160 to limit the blanking seat 152, so that the blanking seat 152 stops rotating relative to the crucible 120.
Referring to fig. 1 and 2, according to some embodiments of the present disclosure, optionally, the position-limiting assembly 160 is fixedly connected to the base 110, and during the rotation of the charging assembly 150 relative to the crucible 120, the position-limiting assembly 160 can slide along the outer circumference of the blanking seat 152 and limit the blanking seat 152 when the position-limiting assembly 160 is engaged with the groove 1522.
During the rotation of the charging assembly 150 relative to the crucible 120, the relative positions of the blanking seat 152 and the limiting assembly 160 are also from far to near. When beginning to rotate, spacing subassembly 160 does not have the contact with unloading seat 152, and when unloading seat 152 reachd near the settlement position, spacing subassembly 160 butt can slide along the periphery at the periphery of unloading seat 152 for unloading seat 152 reachs the settlement position, and spacing subassembly 160 can be in time spacing unloading seat 152, avoids the relative position of unloading seat 152 and crucible 120 to appear the deviation, causes the membrane material to leak outside crucible 120 and extravagant.
Referring to fig. 3, according to some embodiments of the present disclosure, optionally, the limiting assembly 160 includes a fixing seat 161, a limiting plate 162 and a second elastic member 163 fixedly connected to the base 110, an accommodating cavity is disposed in the fixing seat 161, the limiting plate 162 and the second elastic member 163 are located in the accommodating cavity, one end of the limiting plate 162 protrudes out of the fixing seat 161 and abuts against the blanking seat 152, and two ends of the second elastic member 163 abut against the other end of the limiting plate 162 and a sidewall of the accommodating cavity, respectively.
The second elastic member 163 abuts between the limiting plate 162 and the sidewall of the accommodating chamber, and the second elastic member 163 is in a compressed state and has elastic force to both the limiting plate 162 and the sidewall of the accommodating chamber. The elastic force of the second elastic member 163 against the limit plate 162 can keep the limit plate 162 in abutment with the outer periphery of the blanking seat 152 during the rotation of the blanking seat 152.
The second elastic member 163 may be a spring, an elastic sheet, or the like, and in the present embodiment, the second elastic member 163 is a spring.
Referring to fig. 2, according to some embodiments of the present application, optionally, the material cylinder 151 is fixedly connected to the rotating mechanism 130 through a connecting rod 153, and the rotating mechanism 130 rotates to drive the connecting rod 153 and the material cylinder 151 to rotate synchronously with the rotating mechanism 130.
The charging barrel 151 and the rotating mechanism 130 are fixedly connected through a connecting rod 153, and when the rotating mechanism 130 rotates, the rotation track of the charging barrel 151 takes the rotating mechanism 130 as the center of a circle and the length of the connecting rod 153 as the radius. And the charging barrel 151 is rotatably connected with the feeding seat 152, when no external force acts, the feeding seat 152 and the charging barrel 151 will rotate synchronously with the rotating mechanism 130, so as to realize that the charging barrel 151 and the feeding seat 152 are driven to rotate to the set position by the rotation of the rotating mechanism 130.
Referring to fig. 1 and 2, according to some embodiments of the present disclosure, optionally, the blanking seat 152 is provided with a second positioning column 155, and the second positioning column 155 is fixedly connected to the rotating mechanism 130 and rotatably connected to the blanking seat 152.
The second positioning post 155 is fixedly connected to the rotating mechanism 130, and may adopt a bolt connection, a welding connection, or the like. In the present embodiment, as shown in fig. 1 and 2, the second positioning columns 155 are welded to the connecting rods 153.
Through utilizing second reference column 155 to connect blanking seat 152 to establish to rotate and connect, can be when blanking seat 152 is fixed, drive feed cylinder 151 through rotating slewing mechanism 130 for feed cylinder 151 rotates relative blanking seat 152, to making feed cylinder 151 rotatory to leaking material hole 1521 position, prestore membrane material in feed cylinder 151 can leak to in the crucible 120 from leaking material hole 1521.
According to some embodiments of the present application, optionally, the second positioning pillar 155 is connected to the blanking seat 152 through a rotating pin, and the blanking seat 152 can rotate relative to the second positioning pillar 155 around the rotating pin. When the blanking base 152 is limited by the limiting component 160, the rotating mechanism 130 drives the charging barrel 151 to rotate around the rotating pin relative to the blanking base 152.
Referring to fig. 1 and 2, according to some embodiments of the present disclosure, optionally, the blanking seat 152 further includes a first positioning pillar 154, the first positioning pillar 154 is fixedly connected to the blanking seat 152, and a first elastic member 156 is disposed between the first positioning pillar 154 and the second positioning pillar 155.
The first positioning column 154 is fixedly connected to the blanking seat 152, and may adopt a connection manner such as screw thread connection, welding, etc., in this embodiment, the first positioning column 154 is welded to the blanking seat 152.
The first elastic member 156 is fixedly connected to the first positioning column 154 and the second positioning column 155, and may be a spring, an elastic cord, or the like, in this embodiment, the first elastic member 156 is a spring.
When the blanking seat 152 is limited by the limiting component 160, the rotating mechanism 130 drives the material cylinder 151, so that the material cylinder 151 rotates relative to the blanking seat 152, and in the rotating process, the first elastic member 156 is compressed by the rotation of the second positioning column 155 relative to the blanking seat 152, so as to generate elastic force, and further, the state that the blanking seat 152 is limited by the limiting component 160 is released, so that the blanking seat 152 is reset.
When using a crucible pre-melting and film-adding device 100 shown in the above embodiment:
1. when the TiOX material is melted, the rotating mechanism 130 in FIG. 1 rotates clockwise, so that the pre-melting baffle 170 rotates to a position right above the crucible 120, the melting part 140 is manually controlled to emit high-energy electron beams, the high-energy electron beams strike on the film material in the crucible 120, so that the film material in the crucible 120 is completely melted into a liquid state, and part of the evaporated film material is shielded by the pre-melting baffle 170 and prevented from being deposited in a cavity of the coating machine;
2. the melting part 140 is manually closed, the rotating mechanism 130 is rotated counterclockwise, and the rotating mechanism 130 rotates counterclockwise to drive the charging barrel 151 and the blanking seat 152 to rotate counterclockwise, so that the material leaking hole 1521 of the blanking seat 152 is positioned right above the crucible 120. In the counterclockwise rotation process, the exposed end of the limiting plate 162 rubs against the arc edge of the blanking seat 152, and the second elastic member 163 generates compression deformation. When the groove 1522 on the feeding seat 152 contacts the limiting plate 162, the front end of the limiting plate 162 abuts against the groove 1522 under the action of the second elastic element 163, so that the feeding seat 152 cannot rotate counterclockwise. Because the second positioning column 155 is welded with the connecting rod 153, the first positioning column 154 is welded with the blanking seat 152, and two ends of the first elastic member 156 are sleeved on the first positioning column 154 and the second positioning column 155, the first elastic member 156 is elongated, and the charging barrel 151 continues to rotate counterclockwise under the driving of the connecting rod 153, so that the through hole 1511 at the lower end of the charging barrel 151 is just overlapped with the material leaking hole 1521, the film material leaks into the crucible 120 from the material leaking hole 1521, and the film material addition is completed;
3. when the rotating mechanism 130 is rotated clockwise, the charging barrel 151 also rotates clockwise, when the first elastic member 156 rotates to have no tensile deformation, the first elastic member 156 is compressed and deformed by continuing to rotate, and then the charging seat 152 is extruded, power for clockwise rotation of the discharging seat 152 is provided, at the moment, the material leaking hole 1521 is staggered with the through hole 1511 at the bottom end of the charging barrel 151, the film material stops leaking, and the groove 1522 of the discharging seat 152 is separated from the limiting plate 162. When the pre-melting baffle 170 rotates to the position right above the crucible 120 again, the melting piece 140 is manually controlled to emit high-energy electron beams to melt the newly added film material in the crucible 120 into a liquid state.
4. Repeating the steps 1-3 for a plurality of times until the height of the film material in the crucible 120 is slightly lower than the height of the crucible 120;
5. after the melting of the crucible 120 is completed, the crucible 120 is rotated clockwise, and the melting of the 2 nd crucible 120 is started;
6. and (5) repeating the steps 1-5 to complete the melting of all the crucibles 120.
Finally, it should be noted that: the above embodiments are only used for illustrating the technical solutions of the present application, and are not limited thereto; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may be modified, or some or all of the technical features may be equivalently replaced; these modifications and substitutions do not cause the corresponding technical solutions to depart from the scope of the technical solutions of the embodiments of the present application, and are intended to be covered by the claims and the specification of the present application. In particular, the features mentioned in the embodiments can be combined in any manner, as long as no structural conflict exists. This application is not intended to be limited to the particular embodiments disclosed herein but is to cover all embodiments that may fall within the scope of the appended claims.
Claims (10)
1. A device for adding a film material before melting materials in a crucible is characterized by comprising: the device comprises a base, a crucible connected with the base, a rotating mechanism connected with a driving source, a material melting part, a material adding component and a limiting component;
the feeding assembly is connected to the rotating mechanism and can rotate relative to the crucible under the driving of the rotating mechanism, the feeding assembly comprises a charging barrel and a discharging seat which are connected in a rotating mode, the discharging seat is provided with a material leaking hole, one of the charging barrel and the discharging seat is connected with the rotating mechanism, and the limiting assembly is used for limiting the other one of the charging barrel and the discharging seat;
when the limiting assembly limits the blanking seat or the material cylinder, the rotating mechanism rotates to drive the material cylinder and the blanking seat to rotate relatively so that the material cylinder moves relative to the material leakage hole and is selectively communicated.
2. The crucible material pre-melting film adding device as claimed in claim 1, wherein the material cylinder is connected to the rotating mechanism, the limiting component limits the blanking seat, and when the limiting component limits the blanking seat, the rotating mechanism rotates to drive the material cylinder to rotate relative to the blanking seat so as to move relative to the material leaking hole, so that the material leaking hole is selectively communicated with the material cylinder.
3. The device for adding the film material before melting the material in the crucible according to claim 1, further comprising a pre-melting baffle, wherein the pre-melting baffle is fixedly connected with the rotating mechanism through a connecting rod, and the rotating mechanism can drive the pre-melting baffle to move relative to the crucible and can be positioned above the crucible and shield the crucible.
4. The device for adding the film material before the melting of the crucible as claimed in claim 1, wherein the periphery of the blanking seat is arc-shaped and is provided with a concave groove.
5. The device for adding the film material before the melting of the crucible as claimed in claim 4, wherein the limiting component is fixedly connected with the base, and can slide along the periphery of the blanking seat during the rotation of the feeding component relative to the crucible, and limit the blanking seat when the limiting component is matched with the groove.
6. The crucible material melting front film adding device according to claim 5, wherein the limiting assembly comprises a fixing seat fixedly connected to the base, a limiting plate and a second elastic member, a containing cavity is formed in the fixing seat, the limiting plate and the second elastic member are located in the containing cavity, one end of the limiting plate protrudes out of the fixing seat and is abutted to the blanking seat, and two ends of the second elastic member are abutted to the other end of the limiting plate and the side wall of the containing cavity respectively.
7. The crucible material pre-melting and film material adding device as claimed in claim 1, wherein the charging barrel is fixedly connected with the rotating mechanism through a connecting rod, and the rotating mechanism rotates to drive the connecting rod and the charging barrel to rotate synchronously with the rotating mechanism.
8. The crucible material pre-melting film material adding device as claimed in claim 7, wherein the blanking seat is provided with a second positioning column, and the second positioning column is fixedly connected with the rotating mechanism and is rotatably connected with the blanking seat.
9. The crucible material pre-melting film adding device as claimed in claim 8, wherein the second positioning column is connected with the blanking seat through a rotating pin, and the blanking seat can rotate around the rotating pin relative to the second positioning column.
10. The crucible material pre-melting film material adding device as claimed in claim 8, wherein the blanking base is further provided with a first positioning column, the first positioning column is fixedly connected with the blanking base, and a first elastic member is arranged between the first positioning column and the second positioning column.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111581959.5A CN114293152A (en) | 2021-12-22 | 2021-12-22 | Device for adding film material before melting material in crucible |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111581959.5A CN114293152A (en) | 2021-12-22 | 2021-12-22 | Device for adding film material before melting material in crucible |
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| CN114293152A true CN114293152A (en) | 2022-04-08 |
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| CN202111581959.5A Pending CN114293152A (en) | 2021-12-22 | 2021-12-22 | Device for adding film material before melting material in crucible |
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| CN108784432A (en) * | 2018-04-03 | 2018-11-13 | 杭州博派投资管理有限公司 | A kind of stirring drawing mechanism and the mixing arrangement with the device |
| CN210191866U (en) * | 2019-06-20 | 2020-03-27 | 潘兰英 | Particle compensation mechanism |
| CN113235054A (en) * | 2021-05-14 | 2021-08-10 | 江苏葛西光学科技有限公司 | SiO (silicon dioxide)2Automatic material changing device and vacuum coating machine |
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| KR20010027218A (en) * | 1999-09-11 | 2001-04-06 | 박근섭 | Device for automatically supplying specimen of vacuum evaporator |
| CN205270828U (en) * | 2015-08-18 | 2016-06-01 | 河北丰德机械制造有限公司 | Device is added with metallic additive ration to valve casting |
| CN205629303U (en) * | 2015-08-18 | 2016-10-12 | 河北丰德机械制造有限公司 | Casting of worm wheel valve is with pouring stage metallic additive ration filling device |
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