CN113235054A - SiO (silicon dioxide)2Automatic material changing device and vacuum coating machine - Google Patents

SiO (silicon dioxide)2Automatic material changing device and vacuum coating machine Download PDF

Info

Publication number
CN113235054A
CN113235054A CN202110528319.1A CN202110528319A CN113235054A CN 113235054 A CN113235054 A CN 113235054A CN 202110528319 A CN202110528319 A CN 202110528319A CN 113235054 A CN113235054 A CN 113235054A
Authority
CN
China
Prior art keywords
crucible
piece
sio
driving
assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202110528319.1A
Other languages
Chinese (zh)
Other versions
CN113235054B (en
Inventor
张明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Gexi Optical Technology Co ltd
Original Assignee
Jiangsu Gexi Optical Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu Gexi Optical Technology Co ltd filed Critical Jiangsu Gexi Optical Technology Co ltd
Priority to CN202110528319.1A priority Critical patent/CN113235054B/en
Publication of CN113235054A publication Critical patent/CN113235054A/en
Application granted granted Critical
Publication of CN113235054B publication Critical patent/CN113235054B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention relates to SiO2An automatic material changing device and a vacuum coating machine belong to the technical field of vacuum coating and comprise a supporting mechanism; a crucible mechanism arranged on the support mechanism for mixing SiO2Processing the rings one by one; the transmission mechanism is arranged on the supporting mechanism and used for driving the crucible mechanism to rotate intermittently; the feeding mechanism is arranged on the supporting mechanism and used for moving along with the crucible mechanism and mixing SiO2The rings are fed into the crucible mechanism one by one. The automatic material changing mechanism realizes automatic material changing, the whole mechanism can automatically change materials for 24 times by one-time material charging, and the working efficiency is improved.

Description

SiO (silicon dioxide)2Automatic material changing device and vacuum coating machine
Technical Field
The invention relates to the technical field of vacuum coating, in particular to SiO2An automatic material changing device and a vacuum coating machine.
Background
Vacuum coating is an important aspect in the field of vacuum application, and provides a new process for preparing a film for scientific research and practical production by using a physical or chemical method based on a vacuum technology and absorbing a series of new technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency, magnetic control and the like.
The vacuum coating is mainly realized by a vacuum coating machine, and the vacuum coating machine needs to use a material changing device to carry out SiO2The ring is automatically reloaded.
Current SiO2The reloading device needs to be provided with a plurality of mechanisms, such as a crucible mechanism and a reloading mechanism, and is respectively provided with a plurality of transmission mechanisms 2 to drive the reloading device, and in addition, the reloading device and the reloading mechanism need to be coordinated when being driven, thereby influencing the influence on the drivingAnd (4) working efficiency.
Disclosure of Invention
The invention aims to provide SiO2An automatic material changing device and a vacuum coating machine, which solve the problems in the prior art.
In order to achieve the purpose, the invention provides the following technical scheme:
SiO (silicon dioxide)2Automatic device of reloading includes:
a support mechanism;
a crucible mechanism arranged on the support mechanism for mixing SiO2Processing the rings one by one;
the transmission mechanism is arranged on the supporting mechanism and used for driving the crucible mechanism to rotate intermittently;
the feeding mechanism is arranged on the supporting mechanism and used for moving along with the crucible mechanism and mixing SiO2The rings are fed into the crucible mechanism one by one.
As a further aspect of the present invention, the support assembly includes: a base member and a support member; the crucible mechanism includes:
crucible assembly for receiving SiO2A ring;
a crucible supporting member mounted on the base member for supporting a crucible assembly;
a rotation assembly disposed on the crucible assembly for driving the SiO2The ring intermittently rotates with the crucible assembly and causes the SiO to intermittently rotate during the rotation2The ring rotates relative to the crucible assembly.
As a further aspect of the present invention, the transmission mechanism includes:
the driving support part is connected with the supporting mechanism;
one end of the driving component is rotationally connected with the driving support piece;
one end of the driven component is rotatably connected with the driving support piece, and the other end of the driven component is connected with the power piece;
and one end of the transmission component is connected with the driving component, the other end of the transmission component is connected with the driven component and used for driving the driven component, and the rotating angle of the driven component is smaller than that of the driving component.
As a still further technical solution of the present invention, the feeding mechanism includes:
a feeding component arranged on the support component and used for feeding SiO2The rings are sent to the crucible assembly one by one;
the transmission assembly is arranged on the support assembly and used for rotating along with the crucible assembly and driving the feeding assembly to convey SiO to the crucible assembly2And (4) a ring.
A vacuum coating machine comprises a machine body, wherein the SiO is arranged in the machine body2Automatic reloading device.
Compared with the prior art, the invention has the beneficial effects that: driven by arranging a transmission mechanism 2, when the transmission mechanism 2 drives the crucible mechanism to rotate clockwise by 60 degrees, all SiO in the crucible mechanism2The ring also rotates 60 degrees clockwise, when the transmission mechanism 2 drives the crucible to rotate 60 degrees anticlockwise, the crucible base is not moved, and the transmission mechanism 2 drives the crucible mechanism to move SiO on the crucible base2The ring rotates to ensure the electron gun to SiO2The ring is heated uniformly, and in addition, a feeding mechanism drives the single SiO2The ring is sent into the crucible mechanism, so that automatic material changing is realized, the whole mechanism can automatically change materials for 24 times by one-time charging, and the working efficiency is improved.
Drawings
FIG. 1 is SiO2A front view of the automatic refueling device;
FIG. 2 is SiO2The structure schematic diagram of the automatic reloading device;
FIG. 3 is SiO2The structure schematic diagram of a transmission mechanism 2 in the automatic reloading device;
FIG. 4 is SiO2The structure schematic diagram of a sliding pin in the automatic reloading device;
FIG. 5 is SiO2A front view of a crucible mechanism in the automatic reloading device;
FIG. 6 is SiO2A side view of a crucible mechanism in the automatic reloading device;
FIG. 7 is SiO2The structure schematic diagram of a crucible mechanism in the automatic reloading device;
FIG. 8 shows anotherIn one embodiment, SiO2The structure schematic diagram of a crucible mechanism in the automatic reloading device;
FIG. 9 is SiO2The structure schematic diagram of a crucible base in the automatic reloading device;
FIG. 10 shows SiO in another embodiment2The structure schematic diagram of a crucible base in the automatic reloading device;
FIG. 11 is SiO2The structure schematic diagram of the water cooling piece in the automatic reloading device;
FIG. 12 shows SiO in another embodiment2The structure schematic diagram of a crucible base in the automatic reloading device;
FIG. 13 is SiO2The structural schematic diagram of a feeding mechanism in the automatic reloading device;
FIG. 14 shows SiO in another embodiment2The structural schematic diagram of a feeding mechanism in the automatic reloading device;
FIG. 15 is SiO2The structural schematic diagram of a material placing component in the automatic material changing device;
FIG. 16 is SiO in another embodiment2The structural schematic diagram of a material placing component in the automatic material changing device;
FIG. 17 shows SiO in another embodiment2The structural schematic diagram of a material placing component in the automatic material changing device;
FIG. 18 is SiO2A top view of a feeding assembly in the automatic reloading device;
FIG. 19 shows SiO in another embodiment2A top view of a feeding assembly in the automatic reloading device;
FIG. 20 is SiO2The structure schematic diagram of a waste material mechanism in the automatic reloading device.
In the figure: 1-supporting mechanism, 11-supporting base, 12-supporting vertical rod, 2-transmission mechanism, 201-cover shell, 202-power input shaft, 203-first sliding arm, 204-first clamping plate, 205-sliding pin, 206-stop screw, 207-crucible driven shaft, 208-adjusting screw, 209-second sliding arm, 210-rotating shaft, 211-pin piece, 212-rotating shaft hole, 213-threaded hole, 3-crucible mechanism, 301-crucible assembly, 302-crucible supporting member, 303-rotating assembly, 304-crucible base, 305-crucible, 306-base bracket, 307-water cooling member, 3071-water tank, 3702-water tank cover, 3703-water inlet hole, 3704-water outlet hole, 3705-water inlet pipe,3706-water inlet joint, 3707-water outlet pipe, 3708-water outlet joint, 308-connecting rod sleeve, 309-second clamping plate, 310-ratchet barrel, 311-driving gear, 312-crucible upright post, 313-driven gear, 314-crucible gear shaft, 315-shaft sleeve, 316-first through hole, 317-second through hole, 318-crucible hole, 319-SiO2The device comprises a ring, 320-bulges, 321-grooves, 322-baffle bracket, 323-baffle, 324-cam, 4-feeding mechanism, 41-feeding component, 42-first gear, 43-second gear, 44-first gear shaft, 45-second gear, 46-second gear shaft, 47-third gear, 48-discharging component, 4801-discharging base, 4802-cover plate, 4803-cam shaft, 4804-first opening hinge, 4805-second opening hinge, 4806-tension spring, 4807-first limiting chute, 4808-second limiting chute, 4809-sliding shaft, 4810-sliding rod, 49-silicon ring cylinder, 410-spiral rack, 5-waste mechanism, 51-chute and 52-guide plate.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
The embodiment of the invention is realized by the SiO of the vacuum coating machine shown in figures 1 and 22Automatic device of reloading includes:
a support mechanism 1;
a crucible mechanism 3 arranged on the support mechanism 1 for mixing SiO2The rings 319 are processed one by one;
the transmission mechanism 2 is arranged on the supporting mechanism 1 and is used for driving the crucible mechanism 3 to intermittently rotate;
the feeding mechanism 4 is arranged on the supporting mechanism 1 and used for moving along with the crucible mechanism 3 and making SiO move2The rings 319 are fed into the crucible mechanism 3 one by one.
In practical application, the whole body is supported by the support assembly, the transmission mechanism 2 drives the crucible mechanism 3 to rotate intermittently during working, and the rotating intermittent motion is used for SiO through the electron gun2The ring 319 is heated, and meanwhile, the crucible mechanism 3 drives the feeding mechanism 4 to intermittently feed, namely, only one drive is needed to ensure the overall efficient intermittent operation, so that the working efficiency is improved.
As shown in fig. 1, 2 and 5, as a preferred embodiment of the present invention, the support assembly includes: a base member and a support member; the crucible mechanism 3 includes:
a crucible assembly 301 for receiving SiO2 A ring 319;
a crucible support member 302 mounted on the base member for supporting the crucible assembly 301;
a rotation assembly 303 disposed on the crucible assembly 301 for driving SiO2The ring 319 intermittently rotates with the crucible assembly 301 and causes SiO to be intermittently rotated2The ring 319 rotates relative to the crucible assembly 301.
In one aspect of this embodiment, the whole body is supported by the cooperation of a base member and a support member, wherein the base member may be a support base 11 as shown in fig. 2, or may be an existing support frame body, and the support member may be a support vertical rod 12 as shown in fig. 2, or may be an existing support upright column, as long as the two members cooperate to stably support; the crucible assembly 301 is used for SiO2The ring 319 is intermittently received and the processed SiO is removed2The ring 319 is sent out, and the crucible supporting piece 302 is used for supporting the crucible assembly 301 so as to ensure that the crucible assembly 301 can stably run; the rotating assembly 303 is used to drive the crucible assembly 301 to rotate intermittently, thereby ensuring efficient processing.
As another preferred embodiment of the present invention, as shown in fig. 6 to 8, the crucible assembly 301 comprises:
a bottom part provided with SiO2A first through hole 316 and a second through hole 317 in which the ring 319 fits;
the crucible 305 piece is sleeved outside one side of the bottom part and is rotationally connected with the bottom part, and the crucible 305 piece is provided with a plurality of SiO2The ring 319 fits into the crucible hole 318 for carrying SiO2The ring 319 rotates;
a protection member arranged on one side of the crucible 305 piece far away from the bottom piece and used for enabling the crucible 305 piece to rotate stably relative to the bottom piece;
the crucible support 302 includes:
a base support 306 disposed on a side of the bottom member remote from the crucible 305 member for supporting the bottom member;
the rotating assembly 303 includes:
the power piece penetrates through the bottom piece and is rotationally connected with the bottom piece;
the revolution connecting piece is arranged on one side of the bottom piece close to the crucible 305 piece and is used for driving the crucible 305 piece to rotate along with the power piece; the revolution connecting piece comprises: the connecting rod sleeve 308 is sleeved outside the power part and fixedly connected with the power part; one end of the ratchet barrel 310 is connected with the connecting rod sleeve 308 in a sliding mode, and the other end of the ratchet barrel 310 is meshed with the crucible 305 piece and is used for rotating along with the connecting rod sleeve 308 and driving the crucible 305 piece to rotate;
a self-rotation connecting piece arranged on one side of the bottom piece far away from the crucible 305 piece and used for driving the SiO along with the power piece2The ring 319 rotates; the rotation connecting piece includes: the driving gear 311 is rotatably arranged in the crucible supporting piece 302, and the driving gear 311 is sleeved outside the power part and is fixedly connected with the power part; and a driven gear 313 rotatably disposed in the first through hole 316, wherein the driven gear 313 is engaged with the driving gear 311 when SiO is generated2When the ring 319 passes through the first through hole 316, the driven gear 313 carries SiO with it2The ring 319 rotates.
In one aspect of the present embodiment, the bottom part may be a crucible base 304 as shown in fig. 6, the crucible 305 may be a crucible 305 as shown in fig. 6, the crucible 305 may rotate on the crucible base 304, in order to ensure stable operation, the crucible base 304 is mounted on the support base 11 through a base bracket 306, the power part may be a crucible driven shaft 207 as shown in fig. 6, which rotates with the rotation of the transmission mechanism 2, when the crucible driven shaft 207 rotates, the crucible driven shaft drives the connecting rod sleeve 308 to rotate synchronously through a second clamping plate 309, when the connecting rod sleeve 308 rotates clockwise, the crucible 305 is driven to rotate clockwise through the ratchet barrel 310, when the connecting rod sleeve 308 rotates counterclockwise, the ratchet barrel 310 may slide, so the crucible 305 may not be driven to rotate counterclockwise, when the crucible driven shaft 207 continues to rotate clockwise, the ratchet barrel 310 is engaged through the connecting rod sleeve 308, with the crucible 305 rotated clockwise by a corresponding angle, and so onReciprocating to realize intermittent stable driving of the crucible 305, wherein in order to ensure that the ratchet barrel 310 is matched with the connecting rod sleeve 308 during sliding, a groove 321 is formed above the ratchet barrel 310, and a protrusion 320 in sliding connection is arranged in the groove 321, so that the protrusion 320 is fixedly connected with the connecting rod sleeve 308; when the crucible driven shaft 207 rotates, the driven gear 313 in the first through hole 316 is rotated by the driving gear 311, so that SiO is deposited in the crucible 3052After ring 319 comes in, it is intermittently charged with SiO2The ring 319 is rotated to ensure that the electron gun can work with SiO2The ring 319 is heated uniformly, in order to improve the rotation stability of the driving gear 311 and the driven gear 313, the crucible upright column 312 is arranged in the base support 306 to support the driving gear 311, the crucible gear shaft 314 is arranged at the bottom of the driven gear 313, the shaft sleeve 315 is arranged outside the crucible gear shaft 314, and the shaft sleeve 315 is connected with the support base 11.
As shown in fig. 9 to 12, as another preferred embodiment of the present invention, the crucible mechanism 3 further includes a water cooling member 307, and the water cooling member 307 includes:
a water groove 3701 opened at one side of the base member, the water groove 3701 being disposed outside the first through hole 316 and coaxially disposed therewith;
a water tank cover 3702 provided in the water tank 3701 and cooperating therewith to seal the water tank 3701;
a water inlet unit communicated with one end of the water channel cover 3702, for introducing water into the water channel 3701;
and the water outlet unit is communicated with one end, far away from the water inlet unit, of the water tank cover 3702 and is used for guiding out water in the water tank 3701.
In one aspect of this embodiment, the crucible mechanism 3 is cooled by the water cooling element 307, so as to ensure efficient operation, the water inlet unit may be a water inlet pipe 3705 as shown in fig. 11, for convenient connection, one end of the water inlet pipe 3705 is provided with a water inlet connector 3706, the other end of the water inlet pipe 3705 is connected to a water inlet hole 3703 on the water tank cover 3702, the water outlet unit may be a water outlet pipe as shown in fig. 11, for convenient connection, one end of the water outlet connector 3708 is installed at one end of the water outlet unit, the other end of the water outlet connector 3704 is connected to a water outlet hole 3704 on the water tank cover 3702, low-temperature water enters the water tank 3701 from the water inlet pipe 3705 during cooling, after absorbing a certain temperature, hot water is discharged from the water outlet pipe, so as to not affect the normal.
As shown in fig. 3 and 4, as another preferred embodiment of the present invention, the transmission mechanism 2 includes:
the driving support part is connected with the support mechanism 1;
one end of the driving component is rotationally connected with the driving support piece;
one end of the driven component is rotatably connected with the driving support piece, and the other end of the driven component is connected with the power piece;
and one end of the transmission component is connected with the driving component, the other end of the transmission component is connected with the driven component and used for driving the driven component, and the rotating angle of the driven component is smaller than that of the driving component.
In one aspect of this embodiment, when the driving member rotates clockwise, the driven member rotates counterclockwise under the action of the transmission member, so that the driving member reciprocates to rotate forward and backward, and then drives the driven member to rotate forward and backward.
As another preferred embodiment of the present invention, as shown in fig. 3 and 4, the driving supporter includes:
the housing 201 is provided with a first rotating groove matched with the driving component and a second rotating groove matched with the driven component;
the active component includes:
one end of the driving piece is arranged in the first rotating groove and is rotationally connected with the first rotating groove, and the other end of the driving piece is connected with driving equipment;
the first follower is sleeved outside the driving piece and fixedly connected with the driving piece, and a first sliding channel matched with the transmission assembly is arranged on the first follower;
the driven assembly includes:
one end of the driven piece is arranged in the second rotating groove and is rotationally connected with the second rotating groove, and the other end of the driven piece is connected with the crucible assembly 301;
the second follower is sleeved outside the follower and fixedly connected with the follower, and a second sliding channel matched with the transmission assembly is arranged on the second follower;
the transmission assembly includes:
a link member having one end disposed in the first follower and fixedly connected thereto and the other end rotatably disposed in the second follower and slidably connected thereto, the link member driving the second follower and the follower to rotate together by 60 ° when the first follower rotates by 90 ° with the driver;
an adjustment member for adjusting the position of the link member within the first follower;
and the fixing piece is used for fixing the connecting piece and the adjusting piece.
In one aspect of this embodiment, the driving member is a power input shaft 202, and the power input shaft is driven by a driving device to rotate, preferably, the rotation angle is 0-300 °, the first follower is a first sliding arm 203, and can be fixed on the power input shaft 202 by a first clamping plate 204, or can be fixed by welding or bolts, so as to ensure that the first sliding arm 203 can stably rotate with the power input shaft 202, and the first sliding channel is a first sliding groove matched with the transmission assembly; the driven piece can be a crucible driven shaft 207, one end of the driven piece is connected with the crucible assembly 301, the other end of the driven piece is arranged in the second rotating groove and is in rotating connection with the second rotating groove, the second driven piece is a second sliding arm 209, one end of the second sliding arm 209 is sleeved outside the crucible driven shaft 207 and is fixedly connected with the second sliding arm 209, when the second sliding arm 209 rotates, the crucible driven shaft 207 is driven to synchronously rotate, and the second sliding channel is a second sliding groove matched with the transmission assembly; the connecting piece is a sliding pin 205, one end of the sliding pin 205 is fixedly installed in a first follower, the other end of the sliding pin 205 is rotatably arranged in a second follower and is in sliding connection with the second follower, for convenience of installation, a first limit sliding groove 4807 matched with the sliding pin 205 is formed in the first follower, a second limit sliding groove 4808 matched with the sliding pin 205 is formed in the second follower, the first limit sliding groove 4807 is used for fixing the sliding pin 205 at a proper position, and the second limit sliding groove 4808 is used for the sliding pin 205 to slide and rotate, so that when the first follower rotates, the second follower is driven to rotate by the sliding pin 205 moving in the second limit sliding groove 4808, and when the first follower rotates 90 degrees clockwise, the second follower rotates 60 degrees anticlockwise; the adjusting part can be an adjusting screw 208, for convenience of adjustment, the adjusting screw 208 is fixedly mounted on the first follower, the sliding pin 205 is sleeved outside the adjusting screw 208 and is in sliding connection with the adjusting screw 208, for convenience of installation, a rotating shaft 210 is fixedly mounted at one end of the adjusting screw 208, which is arranged in the first limiting sliding groove 4807, a rotating shaft hole 212 matched with the rotating shaft 210 is formed in the sliding pin 205, and a pin piece 211 is mounted on the rotating shaft 210 outside the sliding pin 205 for fixing the sliding pin 205; the fixing piece is a stop screw 206, in order to facilitate installation, a threaded hole communicated with the rotating shaft hole 210 is formed in the sliding pin 205, the stop screw 206 is installed in the threaded hole, and the sliding pin 205 is connected and fixed with the adjusting screw 208 by the contact of the stop screw 206 and the rotating shaft 210; alternatively, the adjusting member is a threaded rod rotatably connected to the first follower, the fixing member is sleeved on the outside of the threaded rod and a nut connected to the threaded rod, the sliding pin 205 is sleeved on the outside of the threaded rod, when the adjusting member rotates the threaded rod, the sliding pin 205 slides in the first limiting chute 4807 to be adjusted due to the limitation of the first limiting chute 4807, and the adjusting member is fixed by rotating the nut after the adjustment is completed.
As shown in fig. 13 and 14, as another preferred embodiment of the present invention, the feeding mechanism 4 includes:
a feeding component 41 arranged on the support component and used for feeding SiO2The rings 319 are fed one by one to the crucible assembly 301;
a transmission assembly arranged on the support assembly and used for rotating with the crucible assembly 301 and driving the feeding assembly 41 to convey SiO to the crucible assembly 3012The ring 319.
In one aspect of the present embodiment, the feeding assembly 41 is driven by the driving assembly to synchronously operate with the crucible assembly 301, so as to feed SiO in the feeding assembly 412The rings 319 are fed into the crucible assembly 301 one by one for each successive runAnd (6) processing.
As shown in fig. 13 and 14, as another preferred embodiment of the present invention, the feeding assembly 41 includes:
a silicon ring cylinder 49 fixedly mounted on the base;
a spiral frame 410 arranged in the silicon ring cylinder 49 and connected with the silicon ring cylinder in a rotating way for conveying SiO2A ring 319;
the transmission assembly includes:
the driving piece is arranged on the crucible 305 of the crucible assembly 301 and is used for synchronously rotating along with the crucible 305; the driving member includes: a fourth gear 47 sleeved outside the crucible 305 and fixedly connected with the crucible;
the driven piece is arranged on the support frame and is in rotary connection with the support frame, and one end of the driven piece penetrates through the silicon ring cylinder 49 and is connected with the spiral rack 410 to drive the spiral rack 410 to rotate; the follower includes: a second gear shaft 46 arranged in the support frame and rotationally connected with the support frame, wherein one end of the second gear shaft 46 penetrates through a silicon ring cylinder 49 and is fixedly connected with the spiral rack 410; the third gear 45 is sleeved outside the second gear shaft 46 and fixedly connected with the second gear shaft;
the rotating part is arranged on the supporting frame and is rotationally connected with the supporting frame, one end of the rotating part is meshed with the driving part, and the other end of the rotating part is meshed with the driven part and is used for rotating along with the driving part and driving the driven part to rotate; the rotating member includes: a first gear shaft 44 disposed within the support frame and rotatably connected thereto; a first gear 42 fixedly installed at one end of the first gear shaft 44, and the fourth gear 47 is engaged with the first gear 42; and a second gear 43 fixedly mounted on an end of the first gear shaft 44 away from the first gear 42, wherein the second gear 43 is meshed with a third gear 45.
In one aspect of this embodiment, the rotation of the screw frame 410 carries with it the SiO within the silicon annulus 492Rings 319 with a SiO inserted between each pitch2Rings 319, which in this embodiment are insertable in total, are SiO for each revolution of the spiral frame 4102The ring 319 moves down a pitch, the lowest SiO2The ring 319 falls out; preferably, the silicon ring cylinder 49 is a split structure consisting of two half cylindersThe combination is formed, one half of the installation seat is fixed on the base, and the other half of the installation seat is detachable, thereby being convenient for installing SiO2The ring 319 is provided with a silicon ring cylinder cover at the upper end, the silicon ring cylinder cover prevents sundries from falling into the silicon ring cylinder 49, and the silicon ring cylinder cover can be made into two separated halves for convenient installation; when the crucible 305 in the crucible assembly 301 rotates each time, the fourth gear 47 drives the first gear 42 to rotate, and then the third gear 45 and the second gear shaft 46 drive the spiral rack 410 to rotate for one circle under the driving of the first gear shaft 44 and the second gear 43, in order to ensure stable transmission, the fourth gear 47 (the number of teeth 48) is fixed on the crucible 305 to rotate together with the crucible 305, and the rotating speed is W1; the fourth gear 47 drives the first gear 42 (with the number of teeth 21) to rotate at a rotation speed of W2= (48/21) W1; the first gear 42 drives the second gear 43 to rotate through the first gear shaft 44, and the rotating speed is W3= W2; the second gear 43 (with the number of teeth 42) drives the third gear 45 (with the number of teeth 16) to rotate at a rotation speed of W4= (42/16) W3=6W 1; the third gear 45 drives the spiral frame 410 to rotate through the second gear shaft 46 and the coupler, and the rotating speed is W4; therefore, the crucible 305 rotates by 60 degrees and the spiral rack 410 rotates by 360 degrees, namely, during the operation, the crucible assembly 301 rotates by 60 degrees every time to send SiO from the spiral rack 4102The ring 319 is fed out, and the spiral frame 410 in the feeding assembly 41 pushes another SiO film out under the action of the driving assembly2The ring 319 is reintroduced into the crucible assembly 301.
As shown in fig. 15 to 19, as another preferred embodiment of the present invention, the feeding mechanism 4 further includes a discharging assembly 48, and the discharging assembly 48 includes:
a discharging piece for discharging materials along with the rotation of the crucible 305 on the crucible assembly 301; the blowing piece includes: a cam 324 fixedly mounted on the outside of the crucible 305 of the crucible assembly 301; an opening and closing unit arranged on the discharging support piece and connected with the discharging support piece in a sliding way, and SiO is arranged when the opening and closing unit is opened2The ring 319 can pass through, SiO when the shutter unit is closed2Ring 319 cannot pass; and a cam shaft 4803 slidably disposed on the support, the cam shaft 4803 having one end engaged with the cam 324 and the other end engaged with the opening and closing unit, the cam shaft 4803 pushing the opening and closing unit to be opened when the cam 324 contacts the cam shaft 4803;
the discharging support piece is used for supporting the discharging piece; the blowing support piece includes: a discharge base 4801 for mounting a discharge member; a cover plate 4802 coupled to the discharge base 4801.
In one aspect of this embodiment, when the crucible 305 of the crucible assembly 301 rotates relative to the crucible base 304, the cam 324 on the crucible 305 is brought into intermittent contact with the cam shaft 4803, the cam 324 pushes the cam shaft 4803 to slide towards the inside of the support when the contact is started, the cam shaft 4803 contacts with the opening and closing unit to open the opening and closing unit, and the SiO on the opening and closing unit is opened2 Ring 319 falls on crucible 305, and when cam 324 crossed camshaft 4803, the unit that opens and shuts resets and takes camshaft 4803 to reset, thereby makes and carries out the blowing again when next time cam 324 contacted with camshaft 4803 again, for improving camshaft 4803's sliding stability first spacing spout 4807 has been seted up on the support piece, install in the first spacing spout 4807 with its sliding connection's smooth axle 4809, smooth axle 4809 one end and camshaft 4803 fixed connection, cooperate with first spacing spout 4807 through smooth axle 4809 promptly, guarantee camshaft 4803's sliding stability, and is specific, the unit that opens and shuts includes:
a first hinge 4804 having one end disposed in the supporter and slidably connected thereto;
a second hinge 4805 with one end disposed in the support and connected with the support in sliding manner, for matching with the first hinge 4804 to match with SiO2Passage of the ring 319 is controlled;
the elastic component is provided with two, and an elastic component one end links to each other with the one end that first page or leaf 4804 stretches out support piece, and the other end links to each other with support piece, and another elastic component one end links to each other with the one end that second page or leaf 4805 stretches out support piece, and the other end links to each other with support piece.
Wherein the elastic member is a tension spring 4806 as shown in fig. 16, in order to ensure the sliding stability of the first hinge 4804 and the second hinge 4805, a second limiting sliding slot 4808 is disposed on the supporting member, one end of the cam shaft 4803 can extend into the second limiting sliding slot 4808, two symmetrically disposed sliding rods 4810 are installed in the second limiting sliding slot 4808, and the two sliding rods 4810 are respectively and fixedly connected to the first hinge 4804 and the second hinge 4805, so that when the cam shaft 4803 contacts the sliding rods 4810, the two sliding rods 4810 are pushed to slide outwards, thereby driving the first hinge 4804 and the second hinge 4805 to move outwards in synchronization, the tension spring 4806 is stretched, when the cam 324 crosses the cam shaft 4803, the cam shaft 4803 is not subjected to an external force, at this time, the first hinge 4804 and the second hinge 4805 are driven to slide inwards by the tension spring 4806, and the cam shaft 4803 is extruded outwards, in order to ensure that the cam shaft 03 and the second hinge 4805 can be pushed stably, chamfers are provided on both the cam shaft 4803 and the slide bar 4810 to ensure that they can be pushed each other when stressed.
As shown in fig. 1, 2 and 20, as another preferred embodiment of the present invention, the apparatus further comprises a waste mechanism 5, wherein the waste mechanism 5 is fixedly mounted on the supporting assembly, specifically, the waste mechanism 5 comprises a trough 51 and a material guiding plate 52 fixedly mounted on the trough 51, preferably, the trough 51 is arc-shaped, the material guiding plate 52 is funnel-shaped, that is, waste material is collected in the trough 51 through the material guiding plate 52, and due to the limited space below the crucible assembly 301, in order to avoid used SiO2The waste material slideway is specially designed for the running of the mechanism with the overhigh influence after the ring 319 is discharged for discharging the discharged SiO2The ring 319 rolls along a track to an open place in the vacuum furnace.
The embodiment provides a vacuum coating machine, which comprises a machine body, wherein the SiO in the embodiment is arranged in the machine body2Automatic reloading device.
The working principle is as follows: the power input shaft 202 rotates 90 degrees anticlockwise firstly, the crucible driven shaft 207 is driven to rotate 60 degrees clockwise through continuous driving, in order to ensure the accuracy of transmission, the transmission mechanism 2 is provided with an adjusting device which can be finely adjusted, the crucible driven shaft 207 rotates 60 degrees clockwise, the connecting rod sleeve 308 rotates 60 degrees clockwise, the ratchet barrel 310 is driven to rotate 60 degrees clockwise through the combination of the tongue and the groove 321, the ratchet barrel 310 and the crucible 305 are completely meshed in a sawtooth shape, and due to the characteristic of the sawtooth, the crucible 305 also rotates 60 degrees clockwise at the moment, and when the crucible 305 rotates 60 degrees clockwise, the spiral rack 410 in the feeding mechanism 4 rotates 360 degrees clockwise through 2 times of gear transmission; and due to the screwThe rotary frame 410 and the silicon ring tube 49 form a structure similar to a ball screw nut pair, and a SiO is inserted between each thread pitch2Rings 319, 24 rings are inserted, so that the spiral frame 410 rotates 360 ° every clockwise, SiO2The ring 319 is moved down by a pitch during which the lowest SiO2The ring 319 will fall onto the lower opening and closing unit; when the crucible 305 rotates clockwise by 60 degrees, the opening and closing unit is opened due to the existence of the discharging component 48, and the opening and closing rack is opened when the opening and closing rack is opened due to the fact that 6 crucible holes 318 are uniformly distributed in the crucible 305 in an annular shape2The ring 319 just falls into the empty crucible hole 318 which is newly rotated at the lower part, and one-time automatic feeding is completed; further, when the crucible 305 is rotated clockwise by 60 °, all of the SiO in the crucible is present2Ring 319 is also rotated 60 clockwise, spent SiO2Ring 319 is just discharging through the waste tap hole and waste chute on crucible base 304 and the new SiO2The ring 319 is turned under the electron gun for standby.
Then the power input shaft 202 rotates clockwise 90 degrees, the crucible driven shaft 207, the connecting rod sleeve 308 and the ratchet wheel cylinder 310 all rotate anticlockwise 60 degrees, and due to the saw tooth characteristic between the ratchet wheel cylinder 310 and the crucible 305, and 6 saw teeth of the ratchet wheel cylinder 310 and the crucible are uniformly distributed in an annular shape at 60 degrees, at the moment, the crucible 305 is kept static, the crucible 305 and the ratchet wheel cylinder 310 are still completely meshed, so that the mechanism is restored, one-time automatic material changing is completed, and the whole mechanism can automatically change materials 24 times after one-time material charging.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (10)

1. SiO (silicon dioxide)2Automatic device reloads, its characterized in that includes:
a support mechanism;
a crucible mechanism arranged on the support mechanism for mixing SiO2Processing the rings one by one;
the transmission mechanism is arranged on the supporting mechanism and used for driving the crucible mechanism to rotate intermittently;
the feeding mechanism is arranged on the supporting mechanism and used for moving along with the crucible mechanism and mixing SiO2The rings are fed into the crucible mechanism one by one.
2. SiO as claimed in claim 12Automatic device reloads, its characterized in that, the supporting component includes: a base member and a support member; the crucible mechanism includes:
crucible assembly for receiving SiO2A ring;
a crucible supporting member mounted on the base member for supporting a crucible assembly;
a rotation assembly disposed on the crucible assembly for driving the SiO2The ring intermittently rotates with the crucible assembly and causes the SiO to intermittently rotate during the rotation2The ring rotates relative to the crucible assembly.
3. SiO as claimed in claim 22Automatic reloading device, its characterized in that, the crucible subassembly includes:
a bottom part provided with SiO2The first through hole and the second through hole are matched with each other;
a crucible piece sleeved outside one side of the bottom piece and rotatably connected with the bottom piece, wherein the crucible piece is provided with a plurality of crucible piecesWith SiO2Ring-fitting crucible hole for carrying SiO2Rotating the ring;
the protection piece is arranged on one side of the crucible part far away from the bottom part and is used for enabling the crucible part to stably rotate relative to the bottom part;
the crucible support includes:
the base support is arranged on one side of the bottom part far away from the crucible part and is used for supporting the bottom part;
the rotating assembly includes:
the power piece penetrates through the bottom piece and is rotationally connected with the bottom piece;
the revolution connecting piece is arranged on one side of the bottom piece close to the crucible piece and is used for driving the crucible piece to rotate along with the power piece; the revolution connecting piece comprises: the connecting rod sleeve is sleeved outside the power part and is fixedly connected with the power part; one end of the ratchet cylinder is connected with the connecting rod sleeve in a sliding mode, and the other end of the ratchet cylinder is meshed with the crucible piece and is used for rotating along with the connecting rod sleeve and driving the crucible piece to rotate;
a self-rotation connecting piece arranged on one side of the bottom piece far away from the crucible piece and used for driving SiO along with the power piece2Rotating the ring; the rotation connecting piece includes: the driving gear is rotatably arranged in the crucible supporting piece, and is sleeved outside the power piece and fixedly connected with the power piece; and a driven gear rotatably disposed in the first through hole, the driven gear being engaged with the driving gear when SiO is formed2When the ring passes through the first through hole, the driven gear drives SiO2The ring rotates.
4. SiO according to claim 32Automatic reloading device, its characterized in that, crucible mechanism still includes water-cooling spare, water-cooling spare includes:
the water tank is arranged on one side of the base piece, is arranged outside the first through hole and is coaxial with the first through hole;
the water tank cover is arranged in the water tank, matched with the water tank and used for sealing the water tank;
the water inlet unit is communicated with one end of the water tank cover and is used for guiding water into the water tank;
and the water outlet unit is communicated with one end of the water tank cover, which is far away from the water inlet unit, and is used for guiding out the water in the water tank.
5. SiO according to claim 32Automatic device reloads, its characterized in that, drive mechanism includes:
the driving support part is connected with the supporting mechanism;
one end of the driving component is rotationally connected with the driving support piece;
one end of the driven component is rotatably connected with the driving support piece, and the other end of the driven component is connected with the power piece;
and one end of the transmission component is connected with the driving component, the other end of the transmission component is connected with the driven component and used for driving the driven component, and the rotating angle of the driven component is smaller than that of the driving component.
6. SiO as claimed in claim 52Automatic reloading device, characterized in that, drive support piece includes:
the housing is provided with a first rotating groove matched with the driving component and a second rotating groove matched with the driven component;
the active component includes:
one end of the driving piece is arranged in the first rotating groove and is rotationally connected with the first rotating groove, and the other end of the driving piece is connected with driving equipment;
the first follower is sleeved outside the driving piece and fixedly connected with the driving piece, and a first sliding channel matched with the transmission assembly is arranged on the first follower;
the driven assembly includes:
one end of the driven piece is arranged in the second rotating groove and is rotationally connected with the second rotating groove, and the other end of the driven piece is connected with the crucible assembly;
the second follower is sleeved outside the follower and fixedly connected with the follower, and a second sliding channel matched with the transmission assembly is arranged on the second follower;
the transmission assembly includes:
a link member having one end disposed in the first follower and fixedly connected thereto and the other end rotatably disposed in the second follower and slidably connected thereto, the link member driving the second follower and the follower to rotate together by 60 ° when the first follower rotates by 90 ° with the driver;
an adjustment member for adjusting the position of the link member within the first follower;
and the fixing piece is used for fixing the connecting piece and the adjusting piece.
7. SiO as claimed in claim 22Automatic device reloads, its characterized in that, feeding mechanism includes:
a feeding component arranged on the support component and used for feeding SiO2The rings are sent to the crucible assembly one by one;
the transmission assembly is arranged on the support assembly and used for rotating along with the crucible assembly and driving the feeding assembly to convey SiO to the crucible assembly2And (4) a ring.
8. SiO as claimed in claim 72Automatic device reloads, its characterized in that, the pay-off subassembly includes:
the silicon ring cylinder is fixedly arranged on the base;
a spiral rack arranged in the silicon ring cylinder and rotationally connected with the silicon ring cylinder for conveying SiO2A ring;
the transmission assembly includes:
the driving piece is arranged on the crucible of the crucible assembly and is used for synchronously rotating along with the crucible; the driving member includes: the fourth gear is sleeved outside the crucible and fixedly connected with the crucible;
the driven part is arranged on the support frame and is in rotary connection with the support frame, and one end of the driven part penetrates through the silicon ring cylinder and is connected with the spiral rack to drive the spiral rack to rotate; the follower includes: the second gear shaft is arranged in the support frame and is rotationally connected with the support frame, and one end of the second gear shaft penetrates through the silicon ring cylinder and is fixedly connected with the spiral rack; the third gear is sleeved outside the second gear shaft and fixedly connected with the second gear shaft;
the rotating part is arranged on the supporting frame and is rotationally connected with the supporting frame, one end of the rotating part is meshed with the driving part, and the other end of the rotating part is meshed with the driven part and is used for rotating along with the driving part and driving the driven part to rotate; the rotating member includes: the first gear shaft is arranged in the support frame and is rotationally connected with the support frame; the first gear is fixedly arranged at one end of the first gear shaft, and the fourth gear is meshed with the first gear; and the second gear is fixedly arranged at one end of the first gear shaft, which is far away from the first gear, and the second gear is meshed with the third gear.
9. SiO as claimed in claim 72Automatic device of reloading, its characterized in that, feeding mechanism still includes the blowing subassembly, the blowing subassembly includes:
the discharging piece is used for discharging materials along with the rotation of the crucible on the crucible assembly; the blowing piece includes: the cam is fixedly arranged on the outer side of the crucible assembly; an opening and closing unit arranged on the discharging support piece and connected with the discharging support piece in a sliding way, and SiO is arranged when the opening and closing unit is opened2The ring can pass through when the open-close unit is closed, SiO2The loop cannot pass through; the cam shaft is arranged on the supporting piece in a sliding mode, one end of the cam shaft is matched with the cam, the other end of the cam shaft is matched with the opening and closing unit, and when the cam is in contact with the cam shaft, the cam shaft pushes the opening and closing unit to be opened;
the discharging support piece is used for supporting the discharging piece; the blowing support piece includes: the discharging base is used for installing a discharging piece; the cover plate is matched with the discharging base.
10. A vacuum coating machine, comprising a machine body, characterized in that the SiO of any one of the claims 1-9 is installed in the machine body2Automatic reloading device.
CN202110528319.1A 2021-05-14 2021-05-14 SiO (silicon dioxide) 2 Automatic material changing device and vacuum coating machine Active CN113235054B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110528319.1A CN113235054B (en) 2021-05-14 2021-05-14 SiO (silicon dioxide) 2 Automatic material changing device and vacuum coating machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110528319.1A CN113235054B (en) 2021-05-14 2021-05-14 SiO (silicon dioxide) 2 Automatic material changing device and vacuum coating machine

Publications (2)

Publication Number Publication Date
CN113235054A true CN113235054A (en) 2021-08-10
CN113235054B CN113235054B (en) 2023-04-07

Family

ID=77134348

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110528319.1A Active CN113235054B (en) 2021-05-14 2021-05-14 SiO (silicon dioxide) 2 Automatic material changing device and vacuum coating machine

Country Status (1)

Country Link
CN (1) CN113235054B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114293152A (en) * 2021-12-22 2022-04-08 维达力实业（赤壁）有限公司 Device for adding film material before melting material in crucible

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090320757A1 (en) * 2008-06-30 2009-12-31 Hon Hai Precision Industry Co., Ltd. Device for film coating
CN209243159U (en) * 2018-12-26 2019-08-13 攀枝花学院 A kind of device for evaporation coating
CN111426196A (en) * 2020-05-07 2020-07-17 北京天利流程技术有限公司 Crucible discharging device and control method thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090320757A1 (en) * 2008-06-30 2009-12-31 Hon Hai Precision Industry Co., Ltd. Device for film coating
CN209243159U (en) * 2018-12-26 2019-08-13 攀枝花学院 A kind of device for evaporation coating
CN111426196A (en) * 2020-05-07 2020-07-17 北京天利流程技术有限公司 Crucible discharging device and control method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114293152A (en) * 2021-12-22 2022-04-08 维达力实业（赤壁）有限公司 Device for adding film material before melting material in crucible

Also Published As

Publication number Publication date
CN113235054B (en) 2023-04-07

Similar Documents

Publication Publication Date Title
CN113235054B (en) SiO (silicon dioxide) 2 Automatic material changing device and vacuum coating machine
CN111573245B (en) Continuous metal round pipe guiding and feeding device
CN110170597A (en) A kind of wear-resisting straightener of steel bar meter
JP2021068686A (en) Discharge device for collecting lithium battery in mobile phone
CN115501820A (en) Deuterated benzene catalytic reaction kettle with continuous catalytic function
CN103723305B (en) Full-automatic packaging machine
CN110871485A (en) Clay mud mould equipment
CN208600646U (en) A kind of screw thread rolling machine
CN203497220U (en) Teabag intermittent movement device and teabag intermittent transmission device thereof
CN207643260U (en) A kind of pipe cutter enters pipe device
EP2288548B1 (en) Carousel-type automatic packaging machine of products in bags
CN209567805U (en) Spring glue machine propulsion device
CN114408483B (en) Track transfer equipment for square tube production, processing and conveying
CN215904873U (en) Material mixing unit of packaging machine
CN116667756A (en) Photovoltaic module support with adjustable angle
CN219988132U (en) Feeding device of internal mixer
CN220887663U (en) Ion plating device for glassware processing
CN219744740U (en) Fluororubber strip production equipment
CN115519076B (en) Intelligent high-efficiency sand adding device
CN211079328U (en) Double-sided film coating structure of plate type PECVD machine
CN215222090U (en) Photovoltaic support device of single-pile structure
CN221027580U (en) Capping machine for upper cover of spray bottle
CN208732961U (en) Coating device is used in a kind of production of organic-inorganic compound fertilizer
CN108178493A (en) A kind of superfine glass rods process units
CN108273926A (en) Expanding rod regulating mechanism and electric tube expander with it

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant