CN113235054B - SiO (silicon dioxide) 2 Automatic material changing device and vacuum coating machine - Google Patents

SiO (silicon dioxide) 2 Automatic material changing device and vacuum coating machine Download PDF

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CN113235054B
CN113235054B CN202110528319.1A CN202110528319A CN113235054B CN 113235054 B CN113235054 B CN 113235054B CN 202110528319 A CN202110528319 A CN 202110528319A CN 113235054 B CN113235054 B CN 113235054B
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crucible
piece
sio
driving
gear
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CN113235054A (en
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张明
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Jiangsu Gexi Optical Technology Co ltd
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Jiangsu Gexi Optical Technology Co ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10—Glass or silica
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention relates to SiO 2 An automatic material changing device and a vacuum coating machine, which belong to the technical field of vacuum coating and comprise a supporting machineStructuring; a crucible mechanism arranged on the support mechanism for dissolving SiO 2 Processing the rings one by one; the transmission mechanism is arranged on the supporting mechanism and used for driving the crucible mechanism to rotate intermittently; the feeding mechanism is arranged on the supporting mechanism and used for moving along with the crucible mechanism and enabling SiO to be sprayed on 2 The rings are fed into the crucible mechanism one by one. The automatic material changing mechanism realizes automatic material changing, the whole mechanism can automatically change materials for 24 times by one-time material charging, and the working efficiency is improved.

Description

SiO (silicon dioxide) 2 Automatic material changing device and vacuum coating machine
Technical Field
The invention relates to the technical field of vacuum coating, in particular to SiO 2 An automatic material changing device and a vacuum coating machine.
Background
Vacuum coating is an important aspect in the field of vacuum application, and provides a new process for preparing a film for scientific research and practical production by using a physical or chemical method based on a vacuum technology and absorbing a series of new technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency, magnetic control and the like.
The vacuum coating is mainly realized by a vacuum coating machine, and a material changing device is required to be used for SiO in the vacuum coating machine 2 The ring is automatically reloaded.
Current SiO 2 The reloading device needs to be provided with a plurality of mechanisms, such as a crucible mechanism and a reloading mechanism, and is respectively provided with a plurality of transmission mechanisms 2 to drive the reloading device, and in addition, the reloading device and the reloading mechanism need to be coordinated when being driven by the crucible mechanism and the reloading mechanism, so that the working efficiency is influenced.
Disclosure of Invention
The invention aims to provide SiO 2 An automatic material changing device and a vacuum coating machine, which solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme:
SiO (silicon dioxide) 2 Automatic device of reloading includes:
a support mechanism;
a crucible mechanism arranged on the support mechanism for mixing SiO 2 Processing the rings one by one;
the transmission mechanism is arranged on the supporting mechanism and used for driving the crucible mechanism to rotate intermittently;
the feeding mechanism is arranged on the supporting mechanism and used for moving along with the crucible mechanism and mixing SiO 2 The rings are fed into the crucible mechanism one by one.
As a further aspect of the present invention, the support mechanism includes: a base member and a support member; the crucible mechanism includes:
crucible assembly for receiving SiO 2 A ring;
a crucible supporting member mounted on the base member for supporting a crucible assembly;
a rotation assembly disposed on the crucible assembly for driving the SiO 2 The ring intermittently rotates with the crucible assembly and causes the SiO to intermittently rotate during the rotation 2 The ring rotates relative to the crucible assembly.
As a further aspect of the present invention, the transmission mechanism includes:
the driving support part is connected with the supporting mechanism;
one end of the driving component is rotationally connected with the driving support piece;
one end of the driven component is rotationally connected with the driving support piece, and the other end of the driven component is connected with the power piece;
and one end of the transmission component is connected with the driving component, the other end of the transmission component is connected with the driven component and used for driving the driven component, and the rotating angle of the driven component is smaller than that of the driving component.
As a still further technical solution of the present invention, the feeding mechanism includes:
a feeding component arranged on the supporting mechanism and used for feeding SiO 2 The rings are sent to the crucible assembly one by one;
a transmission component arranged on the supporting mechanism and used for rotating along with the crucible component and driving the feeding component to convey SiO to the crucible component 2 And (4) a ring.
A vacuum coating machine comprises a machine body, wherein the SiO is arranged in the machine body 2 Automatic reloading device.
Compared with the prior art, the invention has the beneficial effects that: driven by arranging a transmission mechanism 2, when the transmission mechanism 2 drives the crucible mechanism to rotate clockwise by 60 degrees, all SiO in the crucible mechanism 2 The ring also rotates clockwise by 60 degrees, when the transmission mechanism 2 drives the crucible to rotate anticlockwise by 60 degrees, the crucible base is not moved, and the transmission mechanism 2 drives the crucible mechanism to move the SiO on the crucible base 2 Is surrounded byRotate to ensure the electron gun to SiO 2 The ring is heated uniformly, and in addition, a feeding mechanism drives the single SiO 2 The ring is sent into the crucible mechanism, so that automatic material changing is realized, the whole mechanism can automatically change materials for 24 times by one-time charging, and the working efficiency is improved.
Drawings
FIG. 1 is SiO 2 A front view of the automatic reloading device;
FIG. 2 is SiO 2 The structure schematic diagram of the automatic reloading device;
FIG. 3 is SiO 2 The structure schematic diagram of a transmission mechanism 2 in the automatic reloading device;
FIG. 4 is SiO 2 The structure schematic diagram of a sliding pin in the automatic reloading device;
FIG. 5 is SiO 2 A front view of a crucible mechanism in the automatic reloading device;
FIG. 6 is SiO 2 A side view of a crucible mechanism in the automatic reloading device;
FIG. 7 is SiO 2 The structure schematic diagram of a crucible mechanism in the automatic reloading device;
FIG. 8 shows SiO in another embodiment 2 The structure schematic diagram of a crucible mechanism in the automatic reloading device;
FIG. 9 is SiO 2 A schematic structural diagram of a crucible base in the automatic reloading device;
FIG. 10 shows SiO in another embodiment 2 The structure schematic diagram of a crucible base in the automatic reloading device;
FIG. 11 is SiO 2 The structure schematic diagram of the water cooling piece in the automatic reloading device;
FIG. 12 shows SiO in another embodiment 2 The structure schematic diagram of a crucible base in the automatic reloading device;
FIG. 13 is SiO 2 The structural schematic diagram of a feeding mechanism in the automatic reloading device;
FIG. 14 shows SiO in another embodiment 2 The structural schematic diagram of a feeding mechanism in the automatic reloading device;
FIG. 15 is SiO 2 The structural schematic diagram of a material placing component in the automatic material changing device;
FIG. 16 shows another embodimentSiO in the examples 2 The structural schematic diagram of a material placing component in the automatic material changing device;
FIG. 17 shows SiO in another embodiment 2 The structural schematic diagram of a material placing component in the automatic material changing device;
FIG. 18 is SiO 2 A top view of a material placing component in the automatic material changing device;
FIG. 19 shows SiO in another embodiment 2 A top view of a material placing component in the automatic material changing device;
FIG. 20 is SiO 2 The structure schematic diagram of a waste material mechanism in the automatic reloading device.
In the figure: 1-support mechanism, 11-support base, 12-support vertical rod, 2-transmission mechanism, 201-cover shell, 202-power input shaft, 203-first slide arm, 204-first clamping plate, 205-slide pin, 206-stop screw, 207-crucible driven shaft, 208-adjusting screw, 209-second slide arm, 210-rotating shaft, 211-pin sheet, 212-rotating shaft hole, 213-threaded hole, 3-crucible mechanism, 301-crucible assembly, 302-crucible support, 303-rotating assembly, 304-crucible base, 305-crucible, 306-base bracket, 307-water cooling piece, 3071-water tank, 3702-water tank cover, 3703-water inlet hole, 3704-water outlet hole, 3705-water inlet pipe, 3706-water inlet joint, 3707-water outlet pipe, 3708-water outlet joint, 308-connecting rod sleeve, 309-second clamping plate, 310-ratchet barrel, 311-driving gear, 312-crucible, 313-driven gear shaft sleeve, 314-317, crucible shaft sleeve, 3707-water outlet pipe, 3708-water outlet joint, 308-connecting rod sleeve, 309-second through hole, siO-driven gear shaft hole, 319-driven gear sleeve, 313-driven gear shaft sleeve, 314-driven gear sleeve, 316-crucible shaft sleeve, 316-SiO 2-through hole, 319, and SiO-driven gear sleeve 2 The device comprises a ring, 320-protrusions, 321-grooves, 322-baffle plate brackets, 323-baffles, 324-cams, 4-feeding mechanisms, 41-feeding components, 42-first gears, 43-second gears, 44-first gear shafts, 45-second gears, 46-second gear shafts, 47-third gears, 48-discharging components, 4801-discharging bases, 4802-cover plates, 4803-cam shafts, 4804-first opening hinges, 4805-second opening hinges, 4806-tension springs, 4807-first limiting chutes, 4808-second limiting chutes, 4809-sliding shafts, 4810-sliding rods, 49-silicon ring cylinders, 410-spiral racks, 5-waste mechanisms, 51-chutes and 52-guide plates.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.
The embodiment of the invention is realized by the SiO of the vacuum coating machine shown in figures 1 and 2 2 Automatic device of reloading includes:
a support mechanism 1;
a crucible mechanism 3 arranged on the support mechanism 1 for dissolving SiO 2 The rings 319 are processed one by one;
the transmission mechanism 2 is arranged on the supporting mechanism 1 and is used for driving the crucible mechanism 3 to intermittently rotate;
the feeding mechanism 4 is arranged on the supporting mechanism 1 and used for moving along with the crucible mechanism 3 and making SiO move 2 The rings 319 are fed into the crucible mechanism 3 one by one.
In practical application, the whole body is supported by the supporting mechanism, the transmission mechanism 2 drives the crucible mechanism 3 to rotate intermittently during working, and the rotating intermittent motion is used for SiO through the electron gun 2 The ring 319 is heated, and meanwhile, the crucible mechanism 3 drives the feeding mechanism 4 to intermittently feed, namely, only one drive is needed to ensure the overall efficient intermittent operation, so that the working efficiency is improved.
As shown in fig. 1, 2 and 5, as a preferred embodiment of the present invention, the supporting mechanism includes: a base member and a support member; the crucible mechanism 3 includes:
a crucible assembly 301 for receiving SiO 2 A ring 319;
a crucible support member 302 mounted on the base member for supporting the crucible assembly 301;
a rotation assembly 303 disposed on the crucible assembly 301 for driving SiO 2 The ring 319 rotates intermittently with the crucible assembly 301 and causes the SiO to rotate intermittently as the rotation is interrupted 2 The ring 319 rotates relative to the crucible assembly 301.
In one aspect of this embodiment, the whole body is supported by the cooperation of the base member and the supporting member, wherein the base member may be a supporting base 11 as shown in fig. 2, or may be an existing supporting frame body, the supporting member may be a supporting vertical rod 12 as shown in fig. 2, may be an existing supporting upright,as long as the two are matched to stably support; the crucible assembly 301 is used for SiO 2 The ring 319 is intermittently received and the processed SiO is removed 2 The ring 319 is sent out, and the crucible supporting piece 302 is used for supporting the crucible assembly 301 so as to ensure that the crucible assembly 301 can stably run; the rotating assembly 303 is used to drive the crucible assembly 301 to rotate intermittently, thereby ensuring efficient processing.
As shown in fig. 6 to 8, as another preferred embodiment of the present invention, the crucible assembly 301 comprises:
a bottom part provided with SiO 2 A first through hole 316 and a second through hole 317 in which the ring 319 fits;
the crucible 305 piece is sleeved outside one side of the bottom part and is rotationally connected with the bottom part, and the crucible 305 piece is provided with a plurality of SiO 2 The ring 319 fits into the crucible hole 318 for carrying SiO 2 The ring 319 rotates;
a protection member arranged on one side of the crucible 305 piece far away from the bottom piece and used for enabling the crucible 305 piece to rotate stably relative to the bottom piece;
the crucible support 302 includes:
a base support 306 disposed on a side of the bottom member remote from the crucible 305 for supporting the bottom member;
the rotating assembly 303 includes:
the power piece penetrates through the bottom piece and is connected with the bottom piece in a rotating way;
the revolution connecting piece is arranged on one side of the bottom piece close to the crucible 305 piece and is used for driving the crucible 305 piece to rotate along with the power piece; the revolution connecting piece comprises: a connecting rod sleeve 308 sleeved outside the power part and fixedly connected with the power part; one end of the ratchet barrel 310 is connected with the connecting rod sleeve 308 in a sliding mode, and the other end of the ratchet barrel 310 is meshed with the crucible 305 piece and is used for rotating along with the connecting rod sleeve 308 and driving the crucible 305 piece to rotate;
a self-rotation connecting piece arranged on one side of the bottom piece far away from the crucible 305 piece and used for driving the SiO along with the power piece 2 The ring 319 rotates; the rotation connecting piece includes: is rotatably arranged on the crucible supportA driving gear 311 in the member 302, the driving gear 311 being sleeved outside the power member and fixedly connected therewith; and a driven gear 313 rotatably disposed in the first through hole 316, wherein the driven gear 313 is engaged with the driving gear 311 when SiO is generated 2 When the ring 319 passes through the first through hole 316, the driven gear 313 carries SiO 2 The ring 319 rotates.
In one case of this embodiment, the bottom part may be a crucible base 304 as shown in fig. 6, the crucible 305 may be a crucible 305 as shown in fig. 6, the crucible 305 may rotate on the crucible base 304, in order to ensure stable operation, the crucible base 304 is mounted on the support base 11 through a base bracket 306, the power part is a crucible driven shaft 207 as shown in fig. 6, which rotates along with the rotation of the transmission mechanism 2, when the crucible driven shaft 207 rotates, the crucible driven shaft is driven by the second clamping plate 309 to rotate synchronously with the connecting rod sleeve 308, when the connecting rod sleeve 308 rotates clockwise, the crucible 305 is driven by the ratchet barrel 310 to rotate clockwise, when the connecting rod sleeve 308 rotates counterclockwise, the ratchet barrel 310 can slide, so that the crucible 305 is not driven to rotate counterclockwise, when the crucible driven shaft 207 continues to rotate clockwise, the ratchet barrel 308 is engaged with the ratchet barrel 310 by the connecting rod sleeve 308, the crucible 305 is driven to rotate by a corresponding angle, and so as to reciprocate, intermittent stable driving of the crucible 305 is realized, in order to ensure that the ratchet barrel 310 is engaged with the connecting rod sleeve 308, a groove 321 is formed above the ratchet barrel 310, and a protrusion 320 is arranged in a fixed connection with the connecting rod sleeve 320; when the crucible driven shaft 207 rotates, the driven gear 313 in the first through hole 316 is rotated by the driving gear 311, so that SiO is deposited in the crucible 305 2 After ring 319 comes in, it is intermittently charged with SiO 2 The ring 319 is rotated to ensure that the electron gun can work with SiO 2 The ring 319 is uniformly heated, in order to improve the rotational stability of the driving gear 311 and the driven gear 313, the crucible post 312 is installed in the base support 306 to support the driving gear 311, the crucible gear shaft 314 is installed at the bottom of the driven gear 313, the bushing 315 is installed outside the crucible gear shaft 314, and the bushing 315 is connected with the support base 11, and in addition, in order to improve the rotational stability of the crucible 305, the crucible is installed in the crucibleA baffle 323 is arranged above the crucible 305, and the baffle 323 is connected with the crucible base 304 through a baffle bracket 322 to ensure the stable rotation of the crucible 305.
As shown in fig. 9 to 12, as another preferred embodiment of the present invention, the crucible mechanism 3 further includes a water cooling member 307, and the water cooling member 307 includes:
a water groove 3701 opened at one side of the base member, the water groove 3701 being disposed outside the first through hole 316 and coaxially disposed therewith;
a water tank cover 3702 provided in the water tank 3701 and cooperating therewith to seal the water tank 3701;
a water inlet unit communicated with one end of the water channel cover 3702, for introducing water into the water channel 3701;
and the water outlet unit is communicated with one end, far away from the water inlet unit, of the water tank cover 3702 and is used for guiding out water in the water tank 3701.
In one aspect of this embodiment, the crucible mechanism 3 is cooled by the water cooling element 307, so as to ensure efficient operation, the water inlet unit may be a water inlet pipe 3705 as shown in fig. 11, for convenient connection, one end of the water inlet pipe 3705 is provided with a water inlet connector 3706, the other end of the water inlet pipe 3705 is connected to a water inlet hole 3703 on the water tank cover 3702, the water outlet unit may be a water outlet pipe as shown in fig. 11, for convenient connection, one end of the water outlet connector 3708 is installed at one end of the water outlet unit, the other end of the water outlet connector 3704 is connected to a water outlet hole 3704 on the water tank cover 3702, low-temperature water enters the water tank 3701 from the water inlet pipe 3705 during cooling, after absorbing a certain temperature, hot water is discharged from the water outlet pipe, so as to not affect the normal operation of the crucible mechanism 3, but also take heat away sufficiently, so as to ensure efficient operation of the crucible mechanism 3.
As shown in fig. 3 and 4, as another preferred embodiment of the present invention, the transmission mechanism 2 includes:
the driving support part is connected with the support mechanism 1;
one end of the driving component is rotationally connected with the driving support piece;
one end of the driven component is rotatably connected with the driving support piece, and the other end of the driven component is connected with the power piece;
and one end of the transmission component is connected with the driving component, the other end of the transmission component is connected with the driven component and used for driving the driven component, and the rotating angle of the driven component is smaller than that of the driving component.
In one aspect of this embodiment, when the driving component rotates clockwise, the driven component rotates counterclockwise under the action of the transmission component, so that the driving component reciprocates to rotate forward and backward, and then the driving component is driven to reciprocate to rotate forward and backward.
As shown in fig. 3 and 4, as another preferred embodiment of the present invention, the driving supporter includes:
the housing 201 is provided with a first rotating groove matched with the driving component and a second rotating groove matched with the driven component;
the active component includes:
one end of the driving piece is arranged in the first rotating groove and is rotationally connected with the first rotating groove, and the other end of the driving piece is connected with driving equipment;
the first follower is sleeved outside the driving piece and fixedly connected with the driving piece, and a first sliding channel matched with the transmission assembly is arranged on the first follower;
the driven assembly includes:
one end of the driven piece is arranged in the second rotating groove and is rotationally connected with the second rotating groove, and the other end of the driven piece is connected with the crucible assembly 301;
the second follower is sleeved outside the follower and fixedly connected with the follower, and a second sliding channel matched with the transmission assembly is arranged on the second follower;
the transmission assembly includes:
a link member having one end disposed in the first follower and fixedly connected thereto and the other end rotatably disposed in the second follower and slidably connected thereto, the link member driving the second follower and the follower to rotate together by 60 ° when the first follower rotates by 90 ° with the driver;
an adjustment member for adjusting the position of the link member within the first follower;
and the fixing piece is used for fixing the connecting piece and the adjusting piece.
In one aspect of this embodiment, the driving member is a power input shaft 202, and the power input shaft is driven by a driving device to rotate, preferably, the rotation angle is 0-300 °, the first follower is a first sliding arm 203, and can be fixed on the power input shaft 202 by a first clamping plate 204, or can be fixed by welding or bolts, so as to ensure that the first sliding arm 203 can stably rotate with the power input shaft 202, and the first sliding channel is a first sliding groove matched with the transmission assembly; the driven part can be a crucible driven shaft 207, one end of the crucible driven shaft 207 is connected with the crucible assembly 301, the other end of the crucible driven shaft is arranged in the second rotating groove and is rotationally connected with the second rotating groove, the second driven part is a second sliding arm 209, one end of the second sliding arm 209 is sleeved outside the crucible driven shaft 207 and is fixedly connected with the second sliding arm 209, when the second sliding arm 209 rotates, the crucible driven shaft 207 is driven to synchronously rotate, and a second sliding channel is a second sliding groove matched with the transmission assembly; the connecting piece is a sliding pin 205, one end of the sliding pin 205 is fixedly installed in a first follower, the other end of the sliding pin 205 is rotatably arranged in a second follower and is in sliding connection with the second follower, for convenience of installation, a first limit sliding groove 4807 matched with the sliding pin 205 is formed in the first follower, a second limit sliding groove 4808 matched with the sliding pin 205 is formed in the second follower, the first limit sliding groove 4807 is used for fixing the sliding pin 205 at a proper position, and the second limit sliding groove 4808 is used for the sliding pin 205 to slide and rotate, so that when the first follower rotates, the second follower is driven to rotate by the sliding pin 205 moving in the second limit sliding groove 4808, and when the first follower rotates 90 degrees clockwise, the second follower rotates 60 degrees anticlockwise; the adjusting part can be an adjusting screw 208, for convenience of adjustment, the adjusting screw 208 is fixedly mounted on the first follower, the sliding pin 205 is sleeved outside the adjusting screw 208 and is in sliding connection with the adjusting screw 208, for convenience of installation, a rotating shaft 210 is fixedly mounted at one end of the adjusting screw 208, which is arranged in the first limiting sliding groove 4807, a rotating shaft hole 212 matched with the rotating shaft 210 is formed in the sliding pin 205, and a pin piece 211 is mounted on the rotating shaft 210 outside the sliding pin 205 for fixing the sliding pin 205; the fixing piece is a stop screw 206, in order to facilitate installation, a threaded hole communicated with the rotating shaft hole 210 is formed in the sliding pin 205, the stop screw 206 is installed in the threaded hole, and the sliding pin 205 is connected and fixed with the adjusting screw 208 through the contact of the stop screw 206 and the rotating shaft 210; alternatively, the adjusting member is a threaded rod rotatably connected to the first follower, the fixing member is sleeved on the outside of the threaded rod and a nut connected to the threaded rod, the sliding pin 205 is sleeved on the outside of the threaded rod, when the adjusting member rotates the threaded rod, the sliding pin 205 slides in the first limiting chute 4807 to be adjusted due to the limitation of the first limiting chute 4807, and the adjusting member is fixed by rotating the nut after the adjustment is completed.
As shown in fig. 13 and 14, as another preferred embodiment of the present invention, the feeding mechanism 4 includes:
a feeding component 41 arranged on the supporting mechanism and used for feeding SiO 2 The rings 319 are fed one by one to the crucible assembly 301;
a transmission assembly arranged on the supporting mechanism and used for rotating with the crucible assembly 301 and driving the feeding assembly 41 to convey SiO to the crucible assembly 301 2 The ring 319.
In one aspect of the present embodiment, the feeding assembly 41 is driven by the driving assembly to synchronously operate with the crucible assembly 301, so as to feed SiO in the feeding assembly 41 2 The rings 319 are fed one by one into the crucible assembly 301 for processing one by one.
As shown in fig. 13 and 14, as another preferred embodiment of the present invention, the feeding assembly 41 includes:
a silicon ring cylinder 49 fixedly mounted on the base;
a spiral frame 410 arranged in the silicon ring cylinder 49 and connected with the silicon ring cylinder in a rotating way for conveying SiO 2 A ring 319;
the transmission assembly includes:
the driving piece is arranged on the crucible 305 of the crucible assembly 301 and is used for synchronously rotating along with the crucible 305; the driving member includes: a fourth gear 47, which is sleeved outside the crucible 305 and is fixedly connected with the crucible;
the driven piece is arranged on the support frame and is in rotary connection with the support frame, and one end of the driven piece penetrates through the silicon ring cylinder 49 and is connected with the spiral rack 410 to drive the spiral rack 410 to rotate; the follower includes: a second gear shaft 46 arranged in the support frame and rotationally connected with the support frame, wherein one end of the second gear shaft 46 penetrates through a silicon ring cylinder 49 and is fixedly connected with the spiral rack 410; the third gear 45 is sleeved outside the second gear shaft 46 and fixedly connected with the second gear shaft;
the rotating part is arranged on the supporting frame and is rotationally connected with the supporting frame, one end of the rotating part is meshed with the driving part, and the other end of the rotating part is meshed with the driven part and is used for rotating along with the driving part and driving the driven part to rotate; the rotating member includes: a first gear shaft 44 disposed within the support frame and rotatably connected thereto; a first gear 42 fixedly installed at one end of the first gear shaft 44, and the fourth gear 47 is engaged with the first gear 42; and a second gear 43 fixedly mounted on an end of the first gear shaft 44 away from the first gear 42, wherein the second gear 43 is meshed with a third gear 45.
In one aspect of this embodiment, the rotation of the screw frame 410 carries with it the SiO within the silicon annulus 49 2 Rings 319 with a SiO inserted between each pitch 2 Rings 319, which are all insertable in this embodiment, of SiO per revolution of the gantry 410 2 The ring 319 moves down a pitch, the lowest SiO 2 The ring 319 falls out; preferably, the silicon ring cylinder 49 is a separate structure and is formed by combining two half cylinders, one half of the installation seat is fixed on the base, and the other half of the installation seat is detachable, so that the installation of SiO is facilitated 2 The ring 319 is provided with a silicon ring cylinder cover at the upper end, the silicon ring cylinder cover prevents sundries from falling into the silicon ring cylinder 49, and the silicon ring cylinder cover can be made into two separated halves for convenient installation; when the crucible 305 in the crucible assembly 301 rotates each time, the fourth gear 47 drives the first gear 42 to rotate, and then the third gear 45 and the second gear shaft 46 drive the spiral rack 410 to rotate for one circle under the driving of the first gear shaft 44 and the second gear 43, in order to ensure stable transmission, the fourth gear 47 (the number of teeth 48) is fixed on the crucible 305 to rotate together with the crucible 305, and the rotating speed is W1; the fourth gear 47 drives the first gear 42 (with the number of teeth 21) to rotate at a rotation speed of W2= (48/21) W1; the first gear 42 drives the second gear 43 to rotate through the first gear shaft 44, and the rotating speed is W3= W2; the second gear 43 (teeth 42) rotates the third gear 45 (teeth 16), and the rotation speed is W4= (42/16) W3=6W1; the third gear 45 drives the spiral frame 410 to rotate through the second gear shaft 46 and the coupler, and the rotating speed is W4; so that crucible 305 rotates 60 ° and helicoidal rack 410 rotates 360 °, i.e. in operation, crucible assembly 301 rotates 60 ° each time and SiO supplied by helicoidal rack 410 is delivered by helicoidal rack 301 2 The ring 319 is fed out, and the spiral frame 410 in the feeding assembly 41 pushes another SiO film out under the action of the driving assembly 2 The ring 319 is reintroduced into the crucible assembly 301.
As shown in fig. 15 to 19, as another preferred embodiment of the present invention, the feeding mechanism 4 further includes a discharging assembly 48, and the discharging assembly 48 includes:
a discharging piece for discharging materials along with the rotation of the crucible 305 on the crucible assembly 301; the blowing piece includes: a cam 324 fixedly mounted on the outside of the crucible 305 of the crucible assembly 301; an opening and closing unit arranged on the material placing support and connected with the material placing support in a sliding way, and SiO is arranged when the opening and closing unit is opened 2 The ring 319 can pass through, siO when the shutter unit is closed 2 Ring 319 cannot pass; and a cam shaft 4803 slidably disposed on the support, the cam shaft 4803 having one end engaged with the cam 324 and the other end engaged with the opening and closing unit, the cam shaft 4803 pushing the opening and closing unit to be opened when the cam 324 contacts the cam shaft 4803;
the discharging support piece is used for supporting the discharging piece; the blowing support piece includes: a discharge base 4801 for mounting a discharge member; a cover plate 4802 coupled to the discharge base 4801.
In one aspect of this embodiment, when the crucible 305 of the crucible assembly 301 rotates relative to the crucible base 304, the cam 324 on the crucible 305 is brought into intermittent contact with the cam shaft 4803, the cam 324 pushes the cam shaft 4803 to slide towards the inside of the support when the contact is started, the cam shaft 4803 contacts with the opening and closing unit to open the opening and closing unit, and the SiO on the opening and closing unit is opened 2 The ring 319 is dropped onto the crucible 305 and when the cam 324 passes over the cam shaft 4803, the opening and closing unit is reset with the cam shaft 4803 reset, so that the material is discharged again when the cam 324 comes into contact with the cam shaft 4803 next time, in order to improve the sliding stability of the cam shaft 4803The nature be in first limit chute 4807 has been seted up on the support piece, install in the first limit chute 4807 with its sliding connection's slide bar 4809, slide bar 4809 one end and camshaft 4803 fixed connection, through slide bar 4809 and the cooperation of first limit chute 4807 promptly, guarantee camshaft 4803's slip stability, it is specific, the unit that opens and shuts includes:
a first hinge 4804 having one end disposed in the supporter and slidably connected thereto;
a second hinge 4805 having one end disposed in the support and slidably connected thereto for matching with the first hinge 4804 to SiO 2 Passage of the ring 319 is controlled;
the elastic component is provided with two, and an elastic component one end links to each other with the one end that first page or leaf 4804 stretches out support piece, and the other end links to each other with support piece, and another elastic component one end links to each other with the one end that second page or leaf 4805 stretches out support piece, and the other end links to each other with support piece.
Wherein the elastic member is a tension spring 4806 as shown in fig. 16, in order to ensure the sliding stability of the first opening/closing leaf 4804 and the second opening/closing leaf 4805, a second limit sliding slot 4808 is disposed on the supporting member, one end of the camshaft 4803 can extend into the second limit sliding slot 4808, two symmetrically disposed sliding rods 4810 are installed in the second limit sliding slot 4808, and the two sliding rods 4810 are respectively and fixedly connected to the first opening/closing leaf 4804 and the second opening/closing leaf 4805, so when the camshaft 4803 contacts the sliding rods 4810, the two sliding rods 4810 are pushed to slide outwards, thereby driving the first opening/closing leaf 4804 and the second opening/closing leaf 4805 to move outwards in synchronization, the tension spring 4806 is stretched, when the cam 324 crosses the camshaft 4803, the camshaft 4803 is not subjected to an external force, at this time, the first opening/closing leaf 04 and the second opening/closing leaf 4805 are driven to slide inwards under the action of the tension spring 4806, and the camshaft 4803 and is pushed outwards, and when the cam 4810 and the sliding rods 4810 and the chamfer angle is pushed mutually.
As shown in fig. 1, 2 and 20, as another preferred embodiment of the present invention, the apparatus further comprises a waste mechanism 5, wherein the waste mechanism 5 is fixedly mounted on the supporting mechanismSpecifically, the waste material mechanism 5 comprises a trough 51 and a material guiding plate 52 fixedly mounted on the trough 51, preferably, the trough 51 is arc-shaped, and the material guiding plate 52 is funnel-shaped, that is, waste material is collected in the trough 51 through the material guiding plate 52, and since the space below the crucible assembly 301 is limited, in order to avoid used SiO 2 The waste material slideway is specially designed for the running of the mechanism with the overhigh influence after the ring 319 is discharged for discharging the discharged SiO 2 The ring 319 rolls along a track to an open place in the vacuum furnace.
The embodiment provides a vacuum coating machine which comprises a machine body, wherein the SiO film in the embodiment is arranged in the machine body 2 Automatic reloading device.
The working principle is as follows: the power input shaft 202 rotates 90 degrees anticlockwise firstly, the crucible driven shaft 207 is driven to rotate 60 degrees clockwise through continuous driving, in order to ensure the accuracy of transmission, the transmission mechanism 2 is provided with an adjusting device which can be finely adjusted, the crucible driven shaft 207 rotates 60 degrees clockwise, the connecting rod sleeve 308 rotates 60 degrees clockwise, the ratchet barrel 310 is driven to rotate 60 degrees clockwise through the combination of the tongue and the groove 321, the ratchet barrel 310 and the crucible 305 are completely meshed in a sawtooth shape, and due to the characteristic of the sawtooth, the crucible 305 also rotates 60 degrees clockwise at the moment, and when the crucible 305 rotates 60 degrees clockwise, the spiral rack 410 in the feeding mechanism 4 rotates 360 degrees clockwise through 2 times of gear transmission; and because the spiral frame 410 and the silicon ring tube 49 form a structure similar to a ball screw nut pair, and a SiO is inserted between every two screw pitches 2 Rings 319, 24 rings are inserted, so that the spiral frame 410 rotates 360 ° every clockwise, siO 2 The ring 319 is moved down by a pitch during which the lowest SiO 2 The ring 319 will fall onto the lower opening and closing unit; when the crucible 305 rotates clockwise by 60 degrees, the opening and closing unit is opened due to the existence of the emptying assembly 48, and because the crucible 305 is internally and annularly provided with 6 crucible holes 318, when the opening and closing rack is opened, siO on the opening and closing rack is opened 2 The ring 319 just falls into the empty crucible hole 318 which is newly rotated at the lower part, and one-time automatic feeding is completed; further, when the crucible 305 is rotated clockwise by 60 °, all SiO therein is present 2 Ring 319 is also rotated 60 clockwise, spent SiO 2 The ring 319 just right through the crucibleThe waste drain port and waste chute on the crucible base 304 drain, and the new SiO 2 The ring 319 is then turned under the gun for standby.
Then the power input shaft 202 rotates clockwise 90 degrees, the crucible driven shaft 207, the connecting rod sleeve 308 and the ratchet wheel cylinder 310 all rotate anticlockwise 60 degrees, and due to the saw tooth characteristic between the ratchet wheel cylinder 310 and the crucible 305, and 6 saw teeth of the ratchet wheel cylinder 310 and the crucible are uniformly distributed in an annular shape at 60 degrees, at the moment, the crucible 305 is kept static, the crucible 305 and the ratchet wheel cylinder 310 are still completely meshed, so that the mechanism is restored, one-time automatic material changing is completed, and the whole mechanism can automatically change materials 24 times after one-time material charging.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims (8)

1. SiO (silicon dioxide) 2 Automatic device reloads, its characterized in that includes:
a support mechanism, the support mechanism comprising: a base member and a support member;
a crucible mechanism arranged on the support mechanism for mixing SiO 2 The rings are processed one by one, and the crucible mechanism comprises:
crucible assembly for receiving SiO 2 A ring, the crucible assembly comprising:
a bottom part provided with SiO 2 A first through hole and a second through hole which are matched with each other;
a plurality of crucible pieces which are sleeved outside one side of the bottom piece and are rotationally connected with the bottom piece, wherein the crucible pieces are provided with a plurality of SiO 2 Ring-fitting crucible hole for carrying SiO 2 Rotating the ring;
the protection piece is arranged on one side of the crucible part far away from the bottom part and is used for enabling the crucible part to stably rotate relative to the bottom part;
a crucible support member mounted on the base member for supporting the crucible assembly, the crucible support member comprising:
the base support is arranged on one side of the bottom part far away from the crucible part and is used for supporting the bottom part;
a rotation assembly disposed on the crucible assembly for driving the SiO 2 The ring intermittently rotates with the crucible assembly and causes the SiO to intermittently rotate during the rotation 2 The ring rotates relative to the crucible assembly, the rotating assembly comprising:
the power piece penetrates through the bottom piece and is rotationally connected with the bottom piece;
the revolution connecting piece is arranged on one side of the bottom piece close to the crucible piece and is used for driving the crucible piece to rotate along with the power piece; the revolution connecting piece comprises: the connecting rod sleeve is sleeved outside the power part and is fixedly connected with the power part; one end of the ratchet cylinder is connected with the connecting rod sleeve in a sliding mode, and the other end of the ratchet cylinder is meshed with the crucible piece and is used for rotating along with the connecting rod sleeve and driving the crucible piece to rotate;
a self-rotation connecting piece arranged on one side of the bottom piece far away from the crucible piece and used for driving SiO along with the power piece 2 Rotating the ring; the rotation connecting piece includes: the driving gear is rotatably arranged in the crucible supporting piece, and the driving gear is sleeved outside the power piece and is fixedly connected with the power piece; and a driven gear rotatably disposed in the first through hole, the driven gear being engaged with the driving gear when SiO is formed 2 When the ring passes through the first through hole, the driven gear drives SiO 2 The ring rotates;
the transmission mechanism is arranged on the supporting mechanism and used for driving the crucible mechanism to rotate intermittently;
the feeding mechanism is arranged on the supporting mechanism and used for moving along with the crucible mechanism and mixing SiO 2 The rings are fed into the crucible mechanism one by one.
2. SiO as claimed in claim 1 2 Automatic reloading device, its characterized in that, crucible mechanism still includes water-cooling spare, water-cooling spare includes:
the water tank is arranged on one side of the base part, is arranged outside the first through hole and is coaxial with the first through hole;
the water tank cover is arranged in the water tank, matched with the water tank and used for sealing the water tank;
the water inlet unit is communicated with one end of the water tank cover and is used for guiding water into the water tank;
and the water outlet unit is communicated with one end of the water tank cover, which is far away from the water inlet unit, and is used for guiding out the water in the water tank.
3. SiO as claimed in claim 1 2 Automatic device reloads, its characterized in that, drive mechanism includes:
the driving support is connected with the support mechanism;
one end of the driving component is rotationally connected with the driving support piece;
one end of the driven component is rotatably connected with the driving support piece, and the other end of the driven component is connected with the power piece;
and one end of the transmission component is connected with the driving component, the other end of the transmission component is connected with the driven component and used for driving the driven component, and the rotating angle of the driven component is smaller than that of the driving component.
4. SiO as claimed in claim 3 2 Automatic reloading device, characterized in that, drive support piece includes:
the housing is provided with a first rotating groove matched with the driving component and a second rotating groove matched with the driven component;
the active component includes:
one end of the driving piece is arranged in the first rotating groove and is rotationally connected with the first rotating groove, and the other end of the driving piece is connected with driving equipment;
the first follower is sleeved outside the driving piece and fixedly connected with the driving piece, and a first sliding channel matched with the transmission assembly is arranged on the first follower;
the driven assembly includes:
one end of the driven part is arranged in the second rotating groove and is rotationally connected with the second rotating groove, and the other end of the driven part is connected with the crucible assembly;
the second follower is sleeved outside the follower and fixedly connected with the follower, and a second sliding channel matched with the transmission assembly is arranged on the second follower;
the transmission assembly includes:
the connecting piece is arranged in the first follower at one end and fixedly connected with the first follower, the other end is rotatably arranged in the second follower and slidably connected with the second follower, and when the first follower rotates 90 degrees along with the driving piece, the connecting piece drives the second follower and the driven piece to rotate together for 60 degrees;
an adjustment member for adjusting the position of the link member within the first follower;
and the fixing piece is used for fixing the connecting piece and the adjusting piece.
5. SiO as claimed in claim 1 2 Automatic device reloads, its characterized in that, feeding mechanism includes:
a feeding component arranged on the supporting mechanism and used for feeding SiO 2 The rings are sent to the crucible assembly one by one;
a transmission component arranged on the supporting mechanism and used for rotating along with the crucible component and driving the feeding component to convey SiO to the crucible component 2 And (4) a ring.
6. SiO as claimed in claim 5 2 Automatic device reloads, its characterized in that, the pay-off subassembly includes:
the silicon ring cylinder is fixedly arranged on the base;
a spiral rack arranged in the silicon ring cylinder and rotationally connected with the silicon ring cylinder for conveying SiO 2 A ring;
the transmission assembly includes:
the driving piece is arranged on the crucible of the crucible assembly and is used for synchronously rotating along with the crucible; the driving member includes: the fourth gear is sleeved outside the crucible and fixedly connected with the crucible;
the driven part is arranged on the support frame and is rotationally connected with the support frame, and one end of the driven part penetrates through the silicon ring cylinder and is connected with the spiral rack to drive the spiral rack to rotate; the follower includes: the second gear shaft is arranged in the support frame and is rotationally connected with the support frame, and one end of the second gear shaft penetrates through the silicon ring cylinder and is fixedly connected with the spiral rack; the third gear is sleeved outside the second gear shaft and fixedly connected with the second gear shaft;
the rotating part is arranged on the supporting frame and is rotationally connected with the supporting frame, one end of the rotating part is meshed with the driving part, and the other end of the rotating part is meshed with the driven part and is used for rotating along with the driving part and driving the driven part to rotate; the rotating member includes: the first gear shaft is arranged in the support frame and is rotationally connected with the support frame; the first gear is fixedly arranged at one end of the first gear shaft, and the fourth gear is meshed with the first gear; and the second gear is fixedly arranged at one end of the first gear shaft, which is far away from the first gear, and the second gear is meshed with the third gear.
7. SiO as claimed in claim 5 2 Automatic device of reloading, its characterized in that, feeding mechanism still includes the blowing subassembly, the blowing subassembly includes:
the discharging piece is used for discharging materials along with the rotation of the crucible on the crucible assembly; the blowing piece includes: the cam is fixedly arranged on the outer side of the crucible assembly; an opening and closing unit arranged on the material placing support piece and sliding with the material placing support pieceMoving connections, siO when the switching units are open 2 The ring can pass through when the open-close unit is closed, siO 2 The loop cannot pass through; the cam shaft is arranged on the supporting piece in a sliding mode, one end of the cam shaft is matched with the cam, the other end of the cam shaft is matched with the opening and closing unit, and when the cam is in contact with the cam shaft, the cam shaft pushes the opening and closing unit to be opened;
the discharging support piece is used for supporting the discharging piece; the blowing support piece includes: the discharging base is used for installing a discharging piece; the cover plate is matched with the discharging base.
8. A vacuum coating machine, comprising a machine body, characterized in that the SiO of any one of the claims 1-7 is installed in the machine body 2 Automatic reloading device.
CN202110528319.1A 2021-05-14 2021-05-14 SiO (silicon dioxide) 2 Automatic material changing device and vacuum coating machine Active CN113235054B (en)

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Denomination of invention: A SiO2automatic material changing device and vacuum coating machine

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