CN114252759A - Suction nozzle mechanism, detection equipment and detection method - Google Patents
Suction nozzle mechanism, detection equipment and detection method Download PDFInfo
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- CN114252759A CN114252759A CN202111571984.5A CN202111571984A CN114252759A CN 114252759 A CN114252759 A CN 114252759A CN 202111571984 A CN202111571984 A CN 202111571984A CN 114252759 A CN114252759 A CN 114252759A
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- 230000007246 mechanism Effects 0.000 title claims abstract description 57
- 238000001514 detection method Methods 0.000 title claims abstract description 29
- 238000012360 testing method Methods 0.000 claims abstract description 44
- 238000005461 lubrication Methods 0.000 claims description 4
- 230000006978 adaptation Effects 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 2
- 230000000712 assembly Effects 0.000 claims 1
- 238000000429 assembly Methods 0.000 claims 1
- 238000007667 floating Methods 0.000 abstract description 5
- 230000008859 change Effects 0.000 abstract description 2
- 238000009434 installation Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 9
- 230000001050 lubricating effect Effects 0.000 description 7
- 230000009471 action Effects 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008520 organization Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
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- Engineering & Computer Science (AREA)
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- Automatic Analysis And Handling Materials Therefor (AREA)
Abstract
The invention provides a suction nozzle mechanism, detection equipment and a detection method, which relate to the technical field of chip detection, and the suction nozzle mechanism provided by the invention comprises the following components: the device comprises a machine shell, a suction nozzle assembly and a guide assembly; the suction nozzle assembly is connected with the machine shell in a floating mode, the guide assembly is installed on the suction nozzle assembly, and the guide assembly is matched with the limiting portion on the test seat. According to the suction nozzle mechanism, the detection device and the detection method, the suction nozzle component can generate position change through floating relative to the machine shell, and when the guide component is matched with the limiting part, the position of the suction nozzle component can be accurately matched with a test station of the test mechanism, so that the debugging difficulty of the installation position of the suction nozzle component is reduced.
Description
Technical Field
The invention relates to the technical field of chip detection, in particular to a suction nozzle mechanism, detection equipment and a detection method.
Background
One set of suction nozzle module can only accomplish getting of chip or blowing work once, and the suction nozzle module absorbs the chip that has detected from the chip testing station and puts back in having detected the thing test socket, and the chip that detects is put into the chip testing station from the charging tray that detects again, and chip testing station does not have the chip that detects in the in-process that the suction nozzle module got material and puts again, has reduced the test efficiency of chip testing machine from this.
In addition, the multistation suction nozzle module absorbs the chip simultaneously and requires higherly to the motion accuracy and the stability of suction nozzle module, guarantees that the interval and the height of every suction nozzle unit are the same, can guarantee that the suction nozzle is adjusted well with the detection station, has increased the debugging degree of difficulty of suction nozzle mounted position from this.
Disclosure of Invention
The invention aims to provide a suction nozzle mechanism, detection equipment and a detection method, which are used for relieving the technical problem of low precision of a suction nozzle in a multi-station material taking and placing process.
In a first aspect, the present invention provides a nozzle mechanism, comprising: the device comprises a machine shell, a suction nozzle assembly and a guide assembly;
the suction nozzle assembly is connected with the machine shell in a floating mode, the guide assembly is installed on the suction nozzle assembly, and the guide assembly is matched with the limiting portion on the test seat.
With reference to the first aspect, the present invention provides a first possible implementation manner of the first aspect, wherein the nozzle assembly includes: a mounting seat, a catheter shaft, a sucker and an elastic device;
the mounting seat is connected with the catheter shaft, the sucking disc and the guide assembly are respectively mounted on the mounting seat, the catheter shaft is communicated with the sucking disc in a fluid mode, the catheter shaft is inserted into the machine shell, and the elastic device is mounted between the catheter shaft and the machine shell.
With reference to the first possible implementation manner of the first aspect, the present invention provides a second possible implementation manner of the first aspect, wherein a protrusion is provided in the housing, the elastic means elastically extends and contracts in the axial direction of the catheter shaft, and the elastic means is located between the protrusion and the mounting seat;
and a rotary lubricating device is arranged between the convex part and the elastic device.
In combination with the first possible implementation manner of the first aspect, the present invention provides a third possible implementation manner of the first aspect, wherein a guide block is mounted on the catheter shaft, a stopper is mounted on the housing, and the elastic means has a tendency to keep the guide block fitted to the stopper.
With reference to the third possible implementation manner of the first aspect, the present invention provides a fourth possible implementation manner of the first aspect, wherein a guiding inclined surface is provided on the guide block, and the guiding inclined surface faces the limiting member;
the straightening slope inclines in the direction of the acting force of the elastic means acting on the catheter shaft from the direction away from the axis of the catheter shaft to the direction close to the axis of the catheter shaft.
With reference to the fourth possible implementation manner of the first aspect, the present invention provides a fifth possible implementation manner of the first aspect, wherein a plurality of the guiding inclined planes are provided, the plurality of guiding inclined planes are distributed around an axis of the catheter shaft, and the plurality of guiding inclined planes respectively abut against the limiting member to limit rotation of the guide block and the catheter shaft relative to the limiting member around the axis of the catheter shaft.
With reference to the first aspect, the present invention provides a sixth possible implementation manner of the first aspect, wherein the nozzle mechanism further includes: a slider holder, a carriage and a drive device;
the sliding frame is connected to the sliding block seat in a sliding mode, and the machine shell is connected with the sliding frame;
the driving device is installed on the sliding block seat and is in transmission connection with the sliding frame.
With reference to the sixth possible implementation manner of the first aspect, the present invention provides a seventh possible implementation manner of the first aspect, wherein a tension spring is installed between the slider holder and the carriage, and the tension spring is always in a stretched state.
In a second aspect, the present invention provides a detection apparatus comprising: the testing mechanism and the pick-and-place mechanism;
the testing mechanism is provided with a plurality of test accommodating stations;
the pick and place mechanism comprises a plurality of the suction nozzle mechanisms provided by the first aspect, and the number of the suction nozzle mechanisms is integral multiple of the number of the test accommodating stations.
With reference to the second aspect, the present invention provides a first possible implementation manner of the second aspect, wherein a distance sensor is mounted on the pick-and-place mechanism, and the distance sensor is configured to detect a distance between the distance sensor and a measured object.
In a third aspect, the detection method provided by the present invention employs the above detection apparatus, and includes the following steps:
dividing a plurality of suction nozzle mechanisms into a first working group and a second working group, and alternately arranging the first working group and the second working group;
controlling one of the first working group and the second working group to suck the tested piece;
and controlling the other of the first working group and the second working group to release the tested piece.
The embodiment of the invention has the following beneficial effects: the suction nozzle component is connected with the machine shell in a floating mode, the guide component is installed on the suction nozzle component and matched with the limiting part on the test seat, the suction nozzle component can float relative to the machine shell to generate position change, when the guide component is matched with the limiting part, the position of the suction nozzle component can be accurately matched with a test station of a test mechanism, and therefore the debugging difficulty of the installation position of the suction nozzle component is reduced.
In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention or related technologies, the drawings used in the description of the embodiments or related technologies will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a cross-sectional view of a housing, a nozzle assembly, a guide assembly, a rotary lubrication device, a guide block, and a stopper of a nozzle mechanism according to an embodiment of the present invention;
FIG. 2 is a schematic view of a nozzle mechanism provided in an embodiment of the present invention;
fig. 3 is a schematic diagram of a detection apparatus according to an embodiment of the present invention.
Icon: 001-a housing; 101-a boss; 002-a suction nozzle assembly; 201-a mounting seat; 202-a catheter shaft; 203-sucker; 204-an elastic device; 003-a guide member; 301-a first guide pin; 302-a second guide pin; 004-rotating lubrication means; 401 — a first bearing ring; 402-beads; 403-second bearing ring; 005-a guide block; 501-guiding a slope; 006-limit piece; 601-a bearing seat; 602-a ball bearing; 007-slider seat; 008-a carriage; 009-a drive device; 010-a tension spring; 011-distance sensor; 012-first working group; 013 — second working group.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. The term "physical quantity" in the formula, unless otherwise noted, is understood to mean a basic quantity of a basic unit of international system of units, or a derived quantity derived from a basic quantity by a mathematical operation such as multiplication, division, differentiation, or integration.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Example one
As shown in fig. 1, a suction nozzle mechanism according to an embodiment of the present invention includes: a casing 001, a suction nozzle assembly 002 and a guide assembly 003; suction nozzle subassembly 002 floats with casing 001 and is connected, and direction subassembly 003 is installed on suction nozzle subassembly 002, and direction subassembly 003 and the spacing looks adaptation on the test seat.
When suction nozzle subassembly 002 is close accredited testing organization's test station, spacing portion on the test seat is cooperated to direction subassembly 003 to make suction nozzle subassembly 002 produce position variation for casing 001, make suction nozzle subassembly 002's position can accurate adaptation in accredited testing organization's test station from this, and then reduced the requirement of suction nozzle subassembly 002 position accuracy, thereby reduced the debugging degree of difficulty of suction nozzle subassembly 002 mounted position.
It should be noted that the suction nozzle assembly 002 has a margin of movement in the axial direction of the catheter shaft 202 and a margin of movement in the radial direction of the catheter shaft 202 with respect to the housing 001, so that the suction nozzle assembly 002 can be shifted or deflected in the radial direction of the catheter shaft 202 with respect to the housing 001, thereby achieving a floating connection of the suction nozzle assembly 002 with the housing 001.
In the embodiment of the present invention, the suction nozzle assembly 002 includes: a mount 201, a catheter shaft 202, a suction cup 203, and an elastic means 204;
mounting base 201 is connected with catheter shaft 202, suction cup 203 and guide assembly 003 are respectively mounted on mounting base 201, catheter shaft 202 is in fluid communication with suction cup 203, catheter shaft 202 is inserted in housing 001, and elastic device 204 is mounted between catheter shaft 202 and housing 001.
In the present embodiment, the elastic means 204 includes a compression spring or an elastic rubber sleeve, and the elastic means 204 abuts between the boss portion of the catheter shaft 202 and the boss portion 101 in the housing 001, so that the catheter shaft 202 can have a tendency to protrude downward with respect to the housing 001. When the suction cup 203 is pressed on the device under test, the elastic device 204 can push the catheter shaft 202, thereby preventing the mounting base 201 from moving towards the shell 001, and further enabling the suction cup 203 to be tightly attached to the device under test.
Further, a boss 101 is provided in the housing 001, the elastic device 204 elastically extends and contracts along the axial direction of the catheter shaft 202, and the elastic device 204 is located between the boss 101 and the mounting seat 201; between the boss 101 and the resilient means 204 is mounted a rotary lubricating means 004.
The elastic means 204 includes a spring sleeved on the catheter shaft 202, the rotating lubricating means 004 can be pushed to fit to the boss 101 by the elastic means 204, and the catheter shaft 202 and the spring can be synchronously rotated around the axis of the catheter shaft 202 relative to the housing 001 under the lubricating action of the rotating lubricating means 004.
Specifically, the rotary lubrication device 004 includes: the rotary lubricating device 004 can fully exert the rotary lubricating effect by the aid of the first bearing ring 401, the balls 402 and the second bearing ring 403, the balls 402 are arranged between the first bearing ring 401 and the second bearing ring 403, the end face, away from the balls 402, of the first bearing ring 401 abuts against the boss 101, and the end face, away from the balls 402, of the second bearing ring 403 abuts against the elastic device 204.
Further, a guide block 005 is mounted on the catheter shaft 202, a stopper 006 is mounted on the housing 001, and the elastic member 204 tends to keep the guide block 005 fitted to the stopper 006.
Under the action of the elastic device 204, the catheter shaft 202 drives the guide block 005 to keep fitting with the position-limiting member 006, so that the catheter shaft 202 is centered with respect to the housing 001.
Further, a guiding inclined plane 501 is disposed on the guiding block 005, and the guiding inclined plane 501 faces the limiting member 006;
the straightening slope 501 is inclined in the direction of the force applied to the catheter shaft 202 by the elastic means 204 from the axis away from the catheter shaft 202 toward the axis closer to the catheter shaft 202.
Under the action of the elastic device 204, the catheter shaft 202 has a tendency to slide along its own axis direction relative to the housing 001, and the guiding inclined plane 501 is tightly attached to the stopper 006, so that the catheter shaft 202 has a tendency to extend along the plumb direction under the action of the guiding inclined plane 501.
Further, the guide block 005 is provided with a plurality of guiding slopes 501, the plurality of guiding slopes 501 are provided at intervals around the axis of the catheter shaft 202, and the plurality of guiding slopes 501 are respectively abutted against the stoppers 006. In this embodiment, the guide block 005 is provided with four guiding inclined planes 501, four cylindrical balls 602 are respectively mounted on the bearing seat 601, and the four balls 602 are in one-to-one correspondence with the four guiding inclined planes 501. In the circumferential direction of the catheter shaft 202, the axes of any two adjacent balls 602 are perpendicular, and the pilot slopes 501 engage with the cylindrical surfaces of the balls 602, so that the nozzle assembly 002 can be restricted from rotating about the axis of the catheter shaft 202.
Further, the limiting member 006 includes: a bearing housing 601 and balls 602, the balls 602 being rotatably connected to the bearing housing 601, a plurality of balls 602 being disposed at intervals around the circumferential direction of the catheter shaft 202. Guide member 003 can be fitted to the stopper on the test socket when catheter shaft 202 is tilted with respect to the plumb direction, thereby allowing suction cup 203 to closely adhere to the device under test. When the catheter shaft 202 is inclined with respect to the plumb direction, the balls 602 allow the guide block 005 to swing smoothly with respect to the housing 001, thereby reducing the resistance of the suction nozzle assembly 002 to float with respect to the housing 001.
Further, the guide member 003 includes: the guide device comprises a first guide pin 301 and a second guide pin 302, wherein the first guide pin 301 and the second guide pin 302 are arranged at intervals, and the first guide pin 301 and the second guide pin 302 are parallel. The first guide pin 301 and the second guide pin 302 can be respectively inserted into the limiting holes on the test socket, so as to ensure that the suction cup 203 is accurately positioned relative to the tested piece on the test socket.
As shown in fig. 2, the suction nozzle mechanism further includes: a slider mount 007, a carriage 008 and a drive device 009;
the sliding guide 008 is connected to the sliding block seat 007 in a sliding mode, and the shell 001 is connected with the sliding guide 008;
the driving device 009 is installed on the slider holder 007, and the driving device 009 is drivingly connected with the carriage 008.
Specifically, the driving device 009 includes an electric telescopic cylinder, an air cylinder or a belt driving device, and the driving device 009 can drive the sliding guide 008 to move relative to the sliding rail on the sliding block holder 007, so as to adjust the position height of the suction nozzle assembly 002.
Further, a tension spring 010 is installed between the slider holder 007 and the carriage 008, and the tension spring 010 is always in a stretched state. The tension spring 010 in the tension state can make the carriage 008 stable relative to the slider seat 007, so that the vibration of the carriage 008 is relieved, and the stability of the suction nozzle assembly 002 is improved.
Example two
As shown in fig. 3, the detection apparatus provided in the embodiment of the present invention includes: the testing mechanism and the pick-and-place mechanism;
the testing mechanism is provided with a plurality of testing accommodating stations;
the pick and place mechanism comprises a plurality of suction nozzle mechanisms provided by the first embodiment, and the number of the suction nozzle mechanisms is integral multiple of the number of the test accommodating stations.
Specifically, 24 suction nozzle mechanisms can be arranged, 12 suction nozzle mechanisms are arranged in a row, and two rows of suction nozzle mechanisms are arranged in parallel. In addition, the plurality of suction nozzle mechanisms alternately take materials and discharge materials during working, and after one group of suction nozzle mechanisms absorb the tested piece, the other group of suction nozzle mechanisms can release the tested piece, so that the working efficiency of taking materials and discharging materials is improved.
In the embodiment of the invention, a distance sensor 011 is installed on the pick-and-place mechanism, and the distance sensor 011 is used for detecting the distance between the distance sensor 011 and a tested piece. The distance sensor 011 adopts a photoelectric detection mode to test the distance, when data fed back by the distance sensor 011 is in an allowable fluctuation range, the chip is flat in the material hole, and when the data exceeds the range, the chip is not flat in the material hole, so that whether the tested chip is flatly placed in the material hole on the test seat can be judged.
EXAMPLE III
As shown in fig. 3, the detection method provided by the embodiment of the present invention adopts the detection apparatus provided by the second embodiment, and includes the following steps:
dividing the plurality of nozzle mechanisms into first workgroups 012 and second workgroups 013, and alternately arranging the first workgroups 012 and the second workgroups 013;
controlling one of the first working group 012 and the second working group 013 to suck the tested piece;
the other of the first and second workgroups 012, 013 is controlled for release of the test piece.
When one of the first workgroup 012 and the second workgroup 013 sucks the tested piece, the pick-and-place mechanism moves a distance of one station relative to the testing mechanism, so that the other one of the first workgroup 012 and the second workgroup 013 can place a new tested piece on a test accommodating station of the testing mechanism, the idle running time of the detection station is greatly reduced, the reciprocating times of the pick-and-place mechanism are also reduced, the abrasion of the transmission mechanism is further reduced, and the service life of the equipment is prolonged.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (11)
1. A suction nozzle mechanism, comprising: a machine shell (001), a suction nozzle component (002) and a guide component (003);
suction nozzle subassembly (002) with casing (001) float and are connected, install direction subassembly (003) on suction nozzle subassembly (002), just direction subassembly (003) and the spacing looks adaptation on the test seat.
2. A nozzle mechanism according to claim 1, wherein said nozzle assembly (002) comprises: a mounting (201), a catheter shaft (202), a suction cup (203), and an elastic means (204);
the mounting seat (201) is connected with the catheter shaft (202), the suction cups (203) and the guide assemblies (003) are respectively mounted on the mounting seat (201), the catheter shaft (202) is in fluid communication with the suction cups (203), the catheter shaft (202) is inserted into the casing (001), and the elastic means (204) is mounted between the catheter shaft (202) and the casing (001).
3. A nozzle mechanism according to claim 2, wherein a boss (101) is provided in said housing (001), said elastic means (204) elastically expands and contracts in the axial direction of said catheter shaft (202), and said elastic means (204) is located between said boss (101) and said mount (201);
a rotary lubrication device (004) is mounted between the boss (101) and the resilient device (204).
4. The nozzle mechanism according to claim 2, wherein a guide block (005) is mounted on the catheter shaft (202), a stopper (006) is mounted on the housing (001), and the elastic means (204) has a tendency to keep the guide block (005) fitted to the stopper (006).
5. A nozzle mechanism according to claim 4, characterized in that the guiding block (005) is provided with a guiding inclined surface (501), and the guiding inclined surface (501) faces the limiting member (006);
the straightening slope (501) is inclined in the direction of the force applied by the elastic means (204) to the catheter shaft (202) from the axis away from the catheter shaft (202) to the axis close to the catheter shaft (202).
6. The nozzle mechanism according to claim 5, wherein the straightening slopes (501) are provided in plural, the plurality of straightening slopes (501) are distributed around the axis of the catheter shaft (202), and the plurality of straightening slopes (501) abut against the stoppers (006), respectively, to restrict the guide block (005) and the catheter shaft (202) from rotating around the axis of the catheter shaft (202) relative to the stoppers (006).
7. The nozzle mechanism according to claim 1, further comprising: a slider seat (007), a carriage (008) and a driving device (009);
the sliding block seat (007) is connected with the sliding block (008) in a sliding mode, and the shell (001) is connected with the sliding block seat (008);
the driving device (009) is installed on the slider seat (007), and the driving device (009) is in transmission connection with the sliding frame (008).
8. A nozzle arrangement according to claim 7, characterized in that a tension spring (010) is mounted between the slider holder (007) and the carriage (008), said tension spring (010) being always in a stretched state.
9. A detection apparatus, comprising: the testing mechanism and the pick-and-place mechanism;
the testing mechanism is provided with a plurality of test accommodating stations;
the pick and place mechanism includes a plurality of nozzle mechanisms according to any one of claims 1 to 8, the number of the nozzle mechanisms being an integer multiple of the number of the test containment stations.
10. The detection apparatus according to claim 9, wherein the pick-and-place mechanism is provided with a distance sensor (011), and the distance sensor (011) is used for detecting the distance between the distance sensor (011) and the measured object.
11. A detection method, characterized in that the detection method employs the detection apparatus of any one of claims 9 to 10, and comprises the steps of:
dividing a plurality of nozzle mechanisms into a first workgroup (012) and a second workgroup (013), and alternately arranging the first workgroup (012) and the second workgroup (013);
controlling one of the first working group (012) and the second working group (013) to suck the tested piece;
and controlling the other one of the first working group (012) and the second working group (013) to release the tested piece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202111571984.5A CN114252759B (en) | 2021-12-21 | 2021-12-21 | Suction nozzle mechanism, detection equipment and detection method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111571984.5A CN114252759B (en) | 2021-12-21 | 2021-12-21 | Suction nozzle mechanism, detection equipment and detection method |
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| CN114252759A true CN114252759A (en) | 2022-03-29 |
| CN114252759B CN114252759B (en) | 2024-05-28 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114890135A (en) * | 2022-05-27 | 2022-08-12 | 杭州长川科技股份有限公司 | Floating suction nozzle mechanism, floating suction nozzle device and auxiliary detection system |
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