CN114199902B - Sample carrying device for electron microscope - Google Patents
Sample carrying device for electron microscope Download PDFInfo
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- CN114199902B CN114199902B CN202111245584.5A CN202111245584A CN114199902B CN 114199902 B CN114199902 B CN 114199902B CN 202111245584 A CN202111245584 A CN 202111245584A CN 114199902 B CN114199902 B CN 114199902B
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- 238000009434 installation Methods 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 description 10
- 238000011065 in-situ storage Methods 0.000 description 10
- 238000001514 detection method Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000000149 penetrating effect Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000012613 in situ experiment Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004627 transmission electron microscopy Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
- G01N23/20025—Sample holders or supports therefor
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- Chemical & Material Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The invention discloses a sample bearing device for an electron microscope, which is used for being connected with a sample rod, and comprises: a base body; the tilting base is arranged on the base body and can rotate relative to the base body, and is suitable for bearing a sample; the sample bearing assembly is detachably mounted on the tilting base and used for bearing samples. Therefore, the sample bearing device can bear different types of samples by placing the sample on the tilting base or the sample bearing assembly, so that the samples of different types can be used on the same sample rod in a compatible manner, and the universality of the sample rod can be improved.
Description
Technical Field
The invention relates to the field of microscopes, in particular to a sample bearing device for an electron microscope.
Background
Transmission electron microscopy is a core device for characterizing the microstructure of a material under investigation. The sample rod of the electron microscope is used for carrying a sample to be detected, and is one of key components of the transmission electron microscope. With the continuous and deep research of material science, higher requirements are put on the observation and characterization of microstructure of a material based on a transmission electron microscope, and various external fields need to be applied to a sample in situ while double-tilt observation is carried out on the sample, including: various external field environments, such as hot, cold, electrical, force, gas, liquid, etc., are typically provided by the sample rod, and such sample rods are also referred to as in-situ single-tilt sample rods or in-situ double-tilt sample rods. According to the difference of the in-situ functions, the sample rod is divided into: hot bars, cold bars, mechanical bars, thermoelectric integrated bars, gas bars, liquid bars, and the like.
In the related art, each sample rod is only suitable for detecting one sample, for example: the sample rod is only suitable for conventional sample detection with the diameter of 3mm, or is only suitable for sample detection with specific dimensions such as chip samples and the like. Therefore, the existing sample rod has the following defects: (1) The sample rod is only suitable for one type of sample detection, so that the universality of the sample rod is limited; (2) The sample bearing device of the sample rod cannot be replaced, so that the function of the sample rod is relatively single, and the sample rod is poor in universality.
Disclosure of Invention
The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, an object of the present invention is to provide a sample carrier for an electron microscope, which can carry different types of samples, and can realize compatible use of different types of samples on the same sample rod, so as to improve the versatility of the sample rod.
According to the invention, a sample carrier for an electron microscope is provided for connection with a sample rod of the electron microscope, the sample carrier comprising: a base body; the tilting base is arranged on the base body and can rotate relative to the base body, and is suitable for bearing a sample; the sample bearing assembly is detachably mounted on the tilting base and used for bearing samples.
According to the sample bearing device for the electron microscope, the sample is placed on the tilting base or the sample bearing assembly, so that the sample bearing device can bear different types of samples, and the samples of different types can be used on the same sample rod in a compatible mode, and therefore the universality of the sample rod can be improved.
In some examples of the present invention, a pivot shaft is connected between the tilting base and the base body, and the tilting base rotates relative to the base body about a central axis of the pivot shaft.
In some examples of the present invention, the sample carrier device for an electron microscope further comprises: the first fastening piece is arranged in the pivot hole and is connected with the pivot shaft.
In some examples of the invention, the base body defines an installation space that penetrates the base body in a thickness direction of the base body, and the tilting base is provided in the installation space.
In some examples of the invention, the base body has a sample placement region to which the sample carrier assembly is removably mounted.
In some examples of the invention, the sample carrier assembly is detachably mounted to the base body by a second fastener.
In some examples of the invention, the sample carrier assembly comprises: the sample clamp is arranged between the mounting seat and the pressing sheet.
In some examples of the invention, the base body is provided with a first through hole, the sample bearing assembly is provided with a second through hole corresponding to the first through hole, and at least part of the structure of the sample corresponds to the second through hole.
In some examples of the present invention, the sample carrier device for an electron microscope further comprises: the micro circuit board is arranged on the base body, the conductive needle of the micro circuit board is suitable for pressing the sample against the tilting base, and the conductive needle of the micro circuit board is suitable for being electrically connected with the sample.
In some examples of the present invention, the sample carrier device for an electron microscope further comprises: the reset driving piece is arranged on the base body, and the reset driving piece is suitable for driving the tilting base to reset after the tilting base rotates relative to the base body.
In some examples of the invention, the reset driver includes: the tilting base is provided with a connecting part, the tilting fixed pin is installed on the base body, and the tilting torsion spring is sleeved outside the tilting fixed pin and connected with the connecting part.
In some examples of the invention, the tilting base is provided with a driving part, and the sample rod is suitable for pushing the driving part to drive the tilting base to rotate.
In some examples of the invention, the base body is removably mounted to the sample rod.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
The foregoing and/or additional aspects and advantages of the invention will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:
FIG. 1 is an exploded view of a sample carrier device carrying a first sample according to an embodiment of the present invention;
FIG. 2 is a schematic illustration of a sample carrier device carrying a first sample according to an embodiment of the invention;
FIG. 3 is an exploded view of a sample carrier device carrying a second sample according to an embodiment of the present invention;
fig. 4 is a schematic view of a sample carrier device carrying a second sample according to an embodiment of the invention.
Reference numerals:
sample carrier device 100;
a base body 10; a pivot shaft 11; a first fastener 12; a pivot hole 13; a mounting space 14; a third fastener 15;
tilting the base 20; a sample placement area 21; a first through hole 22; a connection portion 23; a driving section 24; a positioning hole 25;
a sample carrier assembly 30; a second fastener 31; a mounting base 32; tabletting 33; a second through hole 34; a placement groove 35; a positioning pin 36;
a micro circuit board 40; a conductive needle 41;
a reset driving member 50; a tilting fixing pin 51; a tilting torsion spring 52;
chip sample 200; standard sample 300 is conventional.
Detailed Description
Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the invention.
A sample carrier device 100 for an electron microscope according to an embodiment of the present invention is described below with reference to fig. 1 to 4, where the electron microscope is a transmission electron microscope, the sample carrier device 100 is used to be connected to a sample rod of the electron microscope, the sample rod is used to carry a sample to be detected, further, the sample carrier device 100 carries the sample to be detected, the sample rod can move with the sample carrier device 100, and the sample rod can also rotate with the sample carrier device 100.
As shown in fig. 1 to 4, a sample carrier device 100 according to an embodiment of the present invention includes: a base body 10, a tilting base 20 and a sample carrier assembly 30. The tilting base 20 is disposed on the base body 10, and the tilting base 20 is rotatable relative to the base body 10, and the tilting base 20 is suitable for carrying a sample to be detected. The sample carrying assembly 30 is detachably mounted on the tilting base 20, and the sample carrying assembly 30 is used for carrying a sample to be detected.
It should be noted that the sample to be detected has various types of samples, such as: the sample to be tested comprises: a first sample and a second sample, wherein the first sample may be a conventional standard sample 300, the second sample may be a chip sample 200, the conventional standard sample 300 may be a standard 3mm sample, and the sample to be detected is described herein as a conventional standard sample 300 and a chip sample 200.
When the sample carrying device 100 is used, the sample carrying device 100 is mounted on a sample rod, when the chip sample 200 is detected, the chip sample 200 is directly loaded on the tilting base 20, at the moment, the sample carrying assembly 30 is detached from the tilting base 20, when the conventional standard sample 300 is detected, the sample carrying assembly 30 is mounted on the tilting base 20, the conventional standard sample 300 is loaded on the sample carrying assembly 30, and then the sample carrying device 100 can be inserted into an electron microscope for detection through controlling the sample rod, so that in-situ functional transmission electron microscope test under the double-tilting condition is performed. In the application, by using the sample carrying device 100 to carry different types of samples on the tilting base 20 or the sample carrying assembly 30, the sample carrying device 100 can carry different types of samples, so that the compatible use of the chip sample 200 and the standard 3mm sample on the same transmission electron microscope (electron microscope) sample rod is realized, and the universality of a single in-situ sample rod is greatly expanded.
Therefore, by placing the sample on the tilting base 20 or the sample carrying assembly 30, the sample carrying device 100 can carry samples of different types, so that the samples of different types can be used on the same sample rod in a compatible manner, and the universality of the sample rod can be improved.
In some embodiments of the present invention, as shown in fig. 1, a pivot shaft 11 (a gem axis) is connected between the tilting base 20 and the base body 10, the tilting base 20 rotates around a central axis of the pivot shaft 11 relative to the base body 10, further, the pivot shaft 11 extends in a front-rear direction in fig. 1, and when the tilting base 20 rotates relative to the base body 10, an angle of a sample to be detected relative to the base body 10 can be changed, so that a structure of the sample to be detected can be better detected by an electron microscope.
In some embodiments of the present invention, as shown in fig. 1, the sample carrier device 100 may further comprise: the first fastening member 12 may be provided as a fastening screw, the base body 10 is provided with a pivot hole 13, a part of the structure of the pivot shaft 11 extends into the pivot hole 13, the first fastening member 12 is provided in the pivot hole 13 and is used for stopping the pivot shaft 11, wherein the tilting base 20 may also be provided with the pivot hole 13, the pivot hole 13 of the tilting base 20 is provided corresponding to the pivot hole 13 of the base body 10, one end of the pivot shaft 11 is inserted into the pivot hole 13 of the tilting base 20, the other end of the pivot shaft 11 is inserted into the pivot hole 13 of the base body 10, the first fastening member 12 may be in threaded connection with the pivot hole 13 of the base body 10, the first fastening member 12 stops the pivot shaft 11, the pivot shaft 11 may be prevented from moving out of the pivot hole 13 of the base body 10, the pivot shaft 11 may be prevented from falling off from the sample bearing device 100, and thus the assembly reliability of the base body 10 and the tilting base 20 may be ensured.
In some embodiments of the present invention, as shown in fig. 1, the base body 10 defines an installation space 14, the installation space 14 penetrates through the base body 10 in the thickness direction of the base body 10, the tilting base 20 is disposed in the installation space 14, when the tilting base 20 rotates relative to the base body 10, the tilting base 20 is prevented from being limited to rotate by the base body 10 by the installation space 14, smooth rotation of the tilting base 20 can be ensured, and the tilting base 20 can be disposed inside the base body 10, so that the structure of the sample carrying device 100 can be more compact, and the volume of the sample carrying device 100 can be reduced, and the occupation space of the sample carrying device 100 can be reduced.
In some embodiments of the present invention, as shown in fig. 1, the tilting base 20 has a sample placement area 21, and the sample carrier assembly 30 is detachably mounted to the sample placement area 21. When the chip sample 200 is detected, the chip sample 200 is directly loaded in the sample placement area 21, at this time, the sample carrying component 30 is detached from the tilting base 20, when the normal standard sample 300 is detected, the sample carrying component 30 is mounted in the sample placement area 21, the normal standard sample 300 is loaded on the sample carrying component 30, and then the sample carrying device 100 can be inserted into the electron microscope for detection by controlling the sample rod, so as to perform an in-situ functional transmission electron microscope test under the double tilting condition. Therefore, different types of samples can be loaded on the tilting base 20 or the sample bearing assembly 30, and compatible use of the chip sample 200 and the standard 3mm sample on the same transmission electron microscope (electron microscope) sample rod is realized, so that the universality of a single in-situ sample rod is greatly expanded.
In some embodiments of the present invention, as shown in fig. 1, the sample carrier assembly 30 may be detachably mounted on the tilting base 20 through the second fastening member 31, further, the second fastening member 31 may be configured as a standard screw, so that the purpose of detachably mounting the sample carrier assembly 30 on the tilting base 20 can be achieved, the disassembly and assembly of the sample carrier assembly 30 can be facilitated, and the structure of the sample carrier device 100 can be simplified.
In some embodiments of the present invention, as shown in fig. 1, the sample carrier assembly 30 may comprise: mount 32 and preforming 33, the sample is pressed from both sides between mount 32 and preforming 33. Further, the mounting base 32 may be provided with a placement groove 35, the sample to be detected is placed in the placement groove 35, the pressing piece 33 presses the sample against the placement groove 35, and further, after the pressing piece 33 presses the sample against the placement groove 35, the surface of the pressing piece 33 away from the sample does not protrude from the surface of the mounting base 32. Specifically, when the conventional standard sample 300 is detected, the conventional standard sample 300 is placed in the placement groove 35, the second fastening member 31 passes through the pressing piece 33, the mounting seat 32 and the tilting base 20 to mount the sample bearing assembly 30 on the tilting base 20, and at this time, the sample is clamped between the mounting seat 32 and the pressing piece 33, so that the position of the conventional standard sample 300 is not moved, and the position stability of the conventional standard sample 300 is improved.
Further, the second fastening members 31 may be provided in two, one second fastening member 31 penetrating through the tilting base 20 and the mounting base 32, the mounting base 32 being mounted on the tilting base 20, and the other second fastening member 31 penetrating through the end of the pressing piece 33 away from the sample, the mounting base 32, the tilting base 20, and the sample carrying member 30 being mounted on the tilting base 20, so that the sample carrying member 30 can be firmly mounted on the tilting base 20.
In some embodiments of the present invention, as shown in fig. 1, the tilting base 20 may be provided with a first through hole 22, the first through hole 22 penetrating the tilting base 20 in a thickness direction of the tilting base 20, the sample carrying assembly 30 being provided with a second through hole 34 corresponding to the first through hole 22, and at least a portion of the structure of the sample corresponds to the second through hole 34. Further, the mounting seat 32 and the pressing piece 33 may be provided with a second through hole 34, the second through hole 34 of the mounting seat 32 penetrates through the mounting seat 32 in the thickness direction of the mounting seat 32, the second through hole 34 of the pressing piece 33 penetrates through the pressing piece 33 in the thickness direction of the pressing piece 33, the second through hole 34 of the mounting seat 32, the second through hole 34 of the pressing piece 33 and the first through hole 22 are correspondingly arranged, at least part of projection of a sample is located in the second through hole 34 in the thickness direction of the tilting base 20, and when the electron microscope detects the sample, an electron beam emitted by the electron microscope simultaneously penetrates through the first through hole 22, the second through hole 34 of the mounting seat 32 and the second through hole 34 of the pressing piece 33, and the electron beam acts on the sample, thereby ensuring the working performance of the electron microscope.
In some embodiments of the present invention, as shown in fig. 1, the sample carrier device 100 may further comprise: the microcircuit board 40, the microcircuit board 40 is installed in the tilting base 20, and microcircuit board 40 detachably installs in the tilting base 20, and further, microcircuit board 40 passes through the screw to be installed in the tilting base 20, and tilting base 20 and microcircuit board 40 all can be provided with locating hole 25, and locating pin 36 can wear to locate simultaneously in the locating hole 25 of tilting base 20 and the locating hole 25 of microcircuit board 40, when installing microcircuit board 40 to tilting base 20, through locating pin 36 location, can install microcircuit board 40 in tilting base 20 fast, can promote the assembly efficiency of sample carrier 100.
Further, as shown in fig. 4, the conductive pin 41 of the micro circuit board is suitable for pressing the sample against the tilting base 20, and the conductive pin 41 of the micro circuit board 40 is suitable for being electrically connected with the sample, it is to be noted that, when the chip sample 200 is detected, the sample bearing assembly 30 is detached, the chip sample 200 is placed in the sample placement area 21, the conductive pin 41 (tungsten pin) of the micro circuit board 40 presses the sample against the tilting base 20, the second fixing member 31 limits the chip sample 200, the chip sample 200 is positioned on the tilting base 20 by matching the conductive pin 41 and the second fixing member 31, meanwhile, the micro circuit board 40 is connected with the conductive wire harness, the conductive pin 41 is electrically connected with the chip sample 200, the micro circuit board 40 can be used for powering up and heating the chip sample 200 by the conductive pin 41, and the sample rod is inserted into the transmission electron microscope (electron microscope) to perform the heating, powering up or thermoelectric integrated in-situ experiment.
Further, as shown in fig. 2, when the standard sample is detected, the sample carrying component 30 is mounted on the tilting base 20, the conventional standard sample 300 is loaded on the sample carrying component 30, and the conductive pins 41 of the micro circuit board 40 can press the mounting seat 32 against the tilting base 20, so that the sample carrying component 30 can be stably mounted on the tilting base 20, and the position of the sample carrying component 30 can be prevented from moving.
In some embodiments of the present invention, as shown in fig. 1, the sample carrier device 100 may further comprise: the reset driving piece 50, the reset driving piece 50 is arranged on the base body 10, the reset driving piece 50 is suitable for driving the tilting base 20 to reset after the tilting base 20 rotates relative to the base body 10, and the setting can automatically drive the tilting base 20 to reset, so that the physical strength of an experimenter can be saved.
Further, as shown in fig. 1, the reset driving member 50 may include: the tilting fixing pin 51 and the tilting torsion spring 52, the tilting base 20 is provided with the connecting portion 23, further, the connecting portion 23 can be provided as a connecting pin, the tilting fixing pin 51 is installed on the base body 10, the tilting torsion spring 52 is sleeved outside the tilting fixing pin 51, and the tilting torsion spring 52 is connected with the connecting portion 23, wherein the tilting torsion spring 52 is assembled and fixed on the base body 10 through the tilting fixing pin 51, and the tilting base 20, the tilting fixing pin 51 and the tilting torsion spring 52 jointly form a tilting system of the transmission electron microscope sample rod. Specifically, after the sample carrier 100 is mounted on the sample rod, the sample rod can push the tilting base 20 to rotate, and when the sample rod does not push the tilting base 20 to rotate or separate from the tilting base 20, the tilting torsion spring 52 drives the tilting base 20 to move to the initial position under the action of the tilting torsion spring 52, so that the tilting base 20 is reset.
Further, as shown in fig. 1, the tilting base 20 is provided with a driving part 24, and the sample rod is adapted to push the driving part 24 to drive the tilting base 20 to rotate. Wherein, drive portion 24 and tilting base 20 are constructed as integrated into one piece, and drive portion 24 inclines to set up relative tilting base 20, and the lower surface of drive portion 24 can set up to the driving surface, and the partial structure of sample pole stretches into in the installation space 14, and the cooperation of sample pole and driving surface promotes drive portion 24 drive tilting base 20 rotation.
In some embodiments of the present invention, as shown in FIG. 1, the base body 10 is removably mounted to the sample rod. Further, the base body 10 may be detachably mounted on the sample rod by the third fastening member 15, and the third fastening member 15 may be configured as a set screw, so that the sample carrier 100 can be detachably mounted on the sample rod, so that the sample carrier 100 is convenient to be mounted on the sample rod, and the sample carrier 100 is also convenient to be detached from the sample rod.
The sample carrying device 100 with different structures and functions can be designed and manufactured, and different users have different requirements on in-situ experimental study of the transmission electron microscope, if the in-situ sample rod end structural member (i.e. the sample carrying device 100) can be conveniently replaced, different researchers can conveniently design and process the sample carrying device 100 with different structures and functions according to the unique experimental requirements of the researchers, so that different experimental study requirements are met. Therefore, the sample bearing device 100 with different functions and structures is arranged on the sample rod, so that the use functionality and the universality of the sample rod can be further expanded, meanwhile, the design and the research and development of the sample rods with different functions are facilitated, and different experimental requirements are met.
Further, the tilting base 20 and the base body 10 are all formed as an integral part, the base body 10, the tilting base 20, the mounting seat 32, the pressing piece 33, the micro circuit board 40 and the reset driving piece 50 with different structures form sample bearing devices 100 with different functions, and the sample bearing devices 100 with different structures and functions are assembled and disassembled with the sample rod body through positioning screws for replacement.
In some embodiments of the present invention, the upper surface of the sample carrier assembly 30 is located at the same level as the upper surface of the chip sample 200 on the tilting base 20, and further, the total thickness of the sample carrier assembly 30 and the conventional standard sample 300 is the same as the thickness of the chip sample 200.
In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the invention, the scope of which is defined by the claims and their equivalents.
Claims (2)
1. A sample carrier for an electron microscope, the sample carrier for connection with a sample rod, the sample carrier comprising:
a base body;
the tilting base is arranged on the base body and can rotate relative to the base body, and is suitable for bearing a sample;
the sample bearing assembly is detachably arranged on the tilting base and is used for bearing a sample;
the sample to be tested comprises: a conventional standard sample and a chip sample, wherein the conventional standard sample is a standard 3mm sample;
when the chip sample is detected, the sample bearing assembly is detached from the tilting base, and the chip sample is loaded on the tilting base so as to detect the chip sample;
when detecting the conventional standard sample, mounting the sample bearing assembly on the tilting base, and loading the conventional standard sample on the sample bearing assembly to detect the conventional standard sample;
a pivot shaft is connected between the tilting base and the base body, and the tilting base rotates relative to the base body around the central axis of the pivot shaft;
the first fastening piece is arranged in the pivot hole and used for stopping the pivot shaft;
the base body defines an installation space, the installation space penetrates through the base body in the thickness direction of the base body, and the tilting base is arranged in the installation space;
the tilting base is provided with a sample placement area, and the sample bearing assembly is detachably arranged in the sample placement area;
the sample bearing assembly is detachably mounted on the tilting base through a second fastening piece;
the sample carrier assembly comprises: the sample to be detected is clamped between the mounting seat and the pressing sheet;
the mounting seat is provided with a placing groove, the sample to be detected is placed in the placing groove, the pressing sheet presses the sample in the placing groove, and after the pressing sheet presses the sample in the placing groove, the surface of the pressing sheet, which is far away from the sample, is not protruded out of the surface of the mounting seat;
the tilting base is provided with a first through hole, the sample bearing assembly is provided with a second through hole corresponding to the first through hole, and at least part of the structure of the sample corresponds to the second through hole;
the reset driving piece is arranged on the base body, and is suitable for driving the tilting base to reset after the tilting base rotates relative to the base body;
the reset driving member includes: the tilting base is provided with a connecting part, the tilting fixed pin is arranged on the base body, and the tilting torsion spring is sleeved outside the tilting fixed pin and is connected with the connecting part;
the tilting base is provided with a driving part, and the sample rod is suitable for pushing the driving part to drive the tilting base to rotate;
the base body is detachably mounted to the sample rod.
2. The sample carrier device for an electron microscope of claim 1, further comprising: the micro circuit board is arranged on the tilting base, the conductive needle of the micro circuit board is suitable for pressing the sample against the tilting base, and the conductive needle of the micro circuit board is suitable for being electrically connected with the sample.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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| CN105990078A (en) * | 2015-02-28 | 2016-10-05 | 浙江大学 | In-situ high and low frequency fatigue double-inclined sample rod of transmission electron microscope |
| KR101714623B1 (en) * | 2015-09-30 | 2017-03-10 | 한국기초과학지원연구원 | Integral Apparatus for Controlling Specimen Mounted on Electron Microscope Body |
| CN107315020A (en) * | 2017-07-31 | 2017-11-03 | 中国科学院宁波材料技术与工程研究所 | A kind of chip fixing structure in situ of example of transmission electron microscope bar |
| CN207148005U (en) * | 2017-03-23 | 2018-03-27 | 重庆大学 | A kind of transmission electron microscope height of compatible needle-like sample verts in-situ mechanical specimen holder |
| CN109856168A (en) * | 2019-02-02 | 2019-06-07 | 安徽泽攸科技有限公司 | One kind being used for electron microscope double shaft tilting original position specimen holder |
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2021
- 2021-10-26 CN CN202111245584.5A patent/CN114199902B/en active Active
Patent Citations (5)
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|---|---|---|---|---|
| CN105990078A (en) * | 2015-02-28 | 2016-10-05 | 浙江大学 | In-situ high and low frequency fatigue double-inclined sample rod of transmission electron microscope |
| KR101714623B1 (en) * | 2015-09-30 | 2017-03-10 | 한국기초과학지원연구원 | Integral Apparatus for Controlling Specimen Mounted on Electron Microscope Body |
| CN207148005U (en) * | 2017-03-23 | 2018-03-27 | 重庆大学 | A kind of transmission electron microscope height of compatible needle-like sample verts in-situ mechanical specimen holder |
| CN107315020A (en) * | 2017-07-31 | 2017-11-03 | 中国科学院宁波材料技术与工程研究所 | A kind of chip fixing structure in situ of example of transmission electron microscope bar |
| CN109856168A (en) * | 2019-02-02 | 2019-06-07 | 安徽泽攸科技有限公司 | One kind being used for electron microscope double shaft tilting original position specimen holder |
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| A cartridge-based turning specimen holder with wireless tilt angle measurement for magnetic induction mapping in the transmission electron microscope;Patrick Diehle et al;Ultramicroscopy;第220卷;第1-13页 * |
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| CN114199902A (en) | 2022-03-18 |
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