CN105990078A - In-situ high and low frequency fatigue double-inclined sample rod of transmission electron microscope - Google Patents
In-situ high and low frequency fatigue double-inclined sample rod of transmission electron microscope Download PDFInfo
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- CN105990078A CN105990078A CN201510090268.3A CN201510090268A CN105990078A CN 105990078 A CN105990078 A CN 105990078A CN 201510090268 A CN201510090268 A CN 201510090268A CN 105990078 A CN105990078 A CN 105990078A
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Abstract
An in-situ high and low frequency fatigue double-inclined sample rod of a transmission electron microscope provided by the invention mainly comprises a holding handle, a sample rod, a sample rod head and a sample loading table. The sample loading table is mainly composed of two loading portions and two connection portions, the loading portions are symmetrically fixed at two ends of the connection portions, a deformation gap is located between the two loading portions and configured to permit the two loading portions to be mutually close to each other or far away from each other; each loading portion includes a [Beta] shaft, a fatigue loading piece and a sample clamping piece; the sample rod head is arranged with a driving piece, the driving piece is tightly contacted with the [Beta] shaft; when the driving piece is moved from the first position to the second position, the [Beta] shaft steps to an angle stroke [Theta]; and when the driving piece is reset from the second position to the first position, the [Beta] shaft is fixed; and the driving piece is moved from the first position to the second position and reset from the second position to the first position to form a movement period, the rotation angle of the [Beta] shaft is equal to N*[Theta], wherein N is the number of the movement period. According to the invention, the maximum inclination angle of the sample on the [Beta] shaft can exceed +- 30 degrees.
Description
Technical field
The present invention relates to the parts of transmission electron microscope, the double shaft tilting specimen holder of a kind of transmission electron microscope.
Technical background
Transmission electron microscope (Transmission Electron Microscope, hereinafter referred to as TEM) is a kind of large-scale experimental device characterized for material microstructure, can the simultaneously tissue morphology of analysis of material microcell, crystal structure, component etc..Its image-forming principle is that high-power electron beam penetrates sample, and transmission electron beam, through over-focusing and amplification, uses detector to collect signal imaging.Modern high resolution transmission electron microscopy generally can accomplish that atomic resolution, the spherical aberration correcting technology developed rapidly for the nearlyest 5 years make the limiting resolution of TEM reach 50 pm.But reality test is often difficult to reach the limiting resolution of instrument.Main reason is that experimental result is not only limited by the performance of TEM own, it is often more important that depend on sample situation.One of them essential condition is the sample crystal orientation relative to incident beam.For TEM high-resolution imaging, only just can demonstrate the projection of corresponding atom periodic arrangement when electron beam along sample a certain crystallographic direction incidence, thus obtain atomic lattice arrangement image, namely atomic resolution.How to enable the incident beam basic premise that be realize TEM high-resolution imaging parallel with Sample crystals direction.Generally having two kinds of approach: first, fixing sample is motionless, and fascinate electron beam incident angle degree, makes electron beam parallel with a certain crystallographic direction of sample；Second, stationary electron beams, fascinate sample so that sample a certain crystallographic direction parallel electron beam.The first approach fascinates be limited in scope and less application owing to relating to the system reform to TEM electron-optical circuit and electron beam.Common technology route mainly uses the second approach at present, and this just requires that the device loading sample has function of fascinating.
The device loading sample generally includes two parts, and a part is the sample chamber of TEM, also referred to as angle measurement platform；Another part is specimen holder.TEM sample is fixed on specimen holder head, and specimen holder inserts angle measurement platform.The angle measurement platform of TEM is generally configured with the function around specimen holder axial-rotation, namely so-called
Axle verts.So can realize sample by verting of angle measurement platformAxle verts.But for spatial orientation, it is parallel with electron beam that the verting an of direction often cannot realize a certain crystallographic direction of sample.Also need to possess sample around being perpendicular toAxleAxle verts function.This partial function can only be realized by specimen holder.Namely specimen holder must be provided with some tumblers and realizes sample and existVerting of axle.Fig. 1 illustrates the principle of verting of TEM sample bar.Driven eccentric crankshaft or the connecting rod of head by the vertical rotating shaft wearing whole specimen holder body of rod A, the rotation around specimen holder axle center be changed into the flexion-extension motion of specimen cup B, thus realize sample aroundAxle C's verts.
Simultaneously along with the development of scientific research, TEM carries out simple High Resolution Observations and cannot meet requirement of experiment.In substantial amounts of engineering, fatigue failure phenomenon is in the urgent need to carrying out fatigue experiment in situ to disclose the mechanism that fatigue of materials lost efficacy at TEM.This just proposes higher requirement to the specimen holder of TEM, can not only realize double shaft tilting, and can be provided simultaneously with fatigue loading function.
Can possess TEM at present to load in situ the specimen holder of function and mainly have three classes: the first kind, the Gatan 654 original position stretching uniclinal specimen holder that Gatan company of the U.S. produces；Equations of The Second Kind, Sweden Nanofactory
The STM/TEM nano single uniclinal specimen holder that company produces；3rd class, the PI95 nano impress uniclinal specimen holder that Hysitron company of the U.S. produces.
The principle design figure of the Gatan654 original position stretching uniclinal specimen holder that Gatan company of the U.S. produces is as shown in accompanying drawing 2 and Fig. 3, and its operation principle is material can be fixed on drawing stand head.Movable and internal with the bar steel cable in drawing stand head one end is connected, and the steel cable other end connects step micro motor.Order about micro machine and can control moving thus pulling sample of drawing stand one end, sample is realized the deformation of different displacements.This specimen holder can realize stretching at TEM situ, by control the tension of motor with lax be expected to realize low frequency draw pulling fatigue experimental.But due to motor tension with relax intrinsic delayed, what it cannot realize high frequency draws pulling fatigue experimental.And this specimen holder does not possess double shaft tilting function, TEM angle measurement platform can only be relied on to realize verting of a axle.Therefore, it is difficult to be adjusted to a certain crystallographic direction parallel electron beam in sample of interest region and realize atom level full resolution pricture shooting condition.
The STM/TEM that Nanofactory company of Sweden produces
The operation principle of nano single uniclinal specimen holder is made by piezoelectric ceramic tube and drives a probe motion, if nanotube sample can be fixed on the fixing end of probe and opposite side, is expected to realize the repeated tension and compression test of high and low frequency.But due to its flexible loading characteristic, it is only applicable to size 100
The superfine nano wire of below nm.More crucially this specimen holder does not the most possess double shaft tilting function, and TEM angle measurement platform can only be relied on to realize verting of a axle.Therefore, it is difficult to be adjusted to a certain crystallographic direction parallel electron beam in sample of interest region and realize atom level full resolution pricture shooting condition.
The PI95 nano impress uniclinal specimen holder that Hysitron company of the U.S. produces and the STM/TEM of Nanofactory company of Sweden
Nano single uniclinal specimen holder is similar to, and is also to be driven by piezoelectric ceramics, probe is simply changed into diamond penetrator subsidiary force transducer, it is possible to achieve the repeated tension and compression test of high and low frequency.This specimen holder same does not the most possess double shaft tilting function, and TEM angle measurement platform can only be relied on to realizeVerting of axle.Therefore, it is difficult to be adjusted to a certain crystallographic direction parallel electron beam in sample of interest region and realize atom level full resolution pricture shooting condition.
Chinese patent 201110145305.8 discloses the original position power of a kind of used in transmission electron microscope double shaft tilting, electrical property integration test specimen holder (as shown in Figure 4), mainly include holding handle, specimen holder, sample head front end 3 ', sensor microscope carrier 4 ' is fixed on sample head front end 3 ' by being positioned at two support shafts 5 ' inside sample head front end 3 ' two, and verting in the plane being perpendicular to sample head around support shaft 5 ' (i.e. rotates ± 30 around Y-axiso), on the wall of both sides, sample head front end 3, it is symmetrically distributed with from the outside wire I6 ' introduced by specimen holder of Electronic Speculum, and be connected with the queue electrode I7 ' being distributed on two side, sample head front end 3 ', on the electrode interface that the other end of wire I6 ' is connected to hold on handle, it is connected with Electronic Speculum external equipment by electrode interface.The position of queue electrode I7 ' is that line is symmetrically distributed on the two side of sample head front end 3 ' centered by support shaft 5 '.The rotation of sensor microscope carrier 4 ' be by the Y-axis being positioned at its afterbody vert driver 9 ' drive.On sensor microscope carrier 4 ', centered by support shaft 5 ', line makes a groove 10 ', groove 10 ' is a through hole, there is support bottom along supporting sensor, the thickness of sensor is designed so that it is put into groove 10 ' upper surface place plane afterwards and is generally aligned in the same plane with TEM e-book focusing center, makes TEM electron beam pass through the gap on sensor and groove 10 ' and focus on the sample being positioned at sensor upper surface.
The shortcoming of this specimen holder is: 1, the driver of verting of the Y-axis by being arranged at sensor microscope carrier afterbody drives sensor microscope carrier around the rotation of Y-axis, Y-axis driver of verting includes rotating shaft, moving block and the connecting rod of connection sensor microscope carrier, when rotating shaft and moving block rotate, connecting rod raises or reduces, thus band dynamic sensor microscope carrier one end is raised and lowered, it is achieved sensor microscope carrier verting around Y-axis, the volume that this type of drive exists drive mechanism is big, the shortcoming that drive disk assembly quantity is many.
2, the loading of sample is: on sensor microscope carrier, centered by support shaft, line makes a groove, and this groove is a through hole, and there is support bottom along supporting sensor；Sensor is put into groove, with tabletting, sensor is fixed on sensor microscope carrier, the electrode that queue electrode III on tabletting is positioned at below tabletting is connected with the queue electrode II one_to_one corresponding made on sensor, and the degree of depth of sensor thickness and groove is with TEM Electron Beam Focusing center in the same plane；The making a through hole I, this through hole I away from support shaft and guarantee sensor microscope carrier near the vert position of driver of Y-axis rotating around Y-axis when and specimen holder is overall will not contact with the pole shoe of Electronic Speculum when X-axis rotates of sensor microscope carrier.Visible, on sensor in addition to loading the space of sample, also need to arrange the space of electrode, and tabletting sensor to be pushed down, the area of tabletting is obviously greater than sensor area, and sensor microscope carrier not only needs the space accommodating tabletting, the also space of through hole I, it follows that the area of sensor microscope carrier is by the area much larger than sample.Y-axis driver of verting is to drive whole sensor microscope carrier to reach to vert the purpose of sample, and the height space in specimen holder is limited, the most only 2 mm, thus results in sample and is difficult to exceed at the maximum angle that verts of Y-axis30
oShortcoming.
Summary of the invention
In order to overcome existing specimen holder cannot realize in Y-axis (i.e.Axle) vert, or the excessive maximum angle that causes verting of sensor microscope carrier is difficult to exceed ± 30oShortcoming, the invention provides one and be capable of sample and existThe maximum angle that verts of axle exceedes ± 30oThe tired double specimen holders that incline of transmission electron microscope in situ low-and high-frequency.
The tired double specimen holders that incline of transmission electron microscope in situ low-and high-frequency, mainly include holding handle, specimen holder shaft, specimen holder head end and for loading the sample loading stage of sample, sample loading stage withAxle is fixed,Axle is rotatably installed on specimen holder head end；
It is characterized in that: sample loading stage is mainly made up of two loading units and connecting portion, loading unit is fixed on connecting portion two ends symmetrically, has and allow it close to each other or be located remotely from each other deformation gap between two loading units；Each loading unit includes respective b axle, fatigue loading part and sample clamping part,Axle and fatigue loading part are fixed with sample clamping part respectively；When sample is clamped in sample loading stage, sample strides across the two ends of this deformation gap and sample and is separately fixed on a sample clamping part；
Specimen holder head end arranges drivingThe actuator of axle rotated stepwise, actuator and b axle be in close contact, actuator when primary importance moves to the second position,One angular travel of axle stepping；Actuator when the second position resets to primary importance,Axle is fixed；Actuator moves to the second position from primary importance and resets to primary importance one period of motion of composition from the second position,Rotational angle=the N* of axle, wherein N is the number of the period of motion.
Further, fatigue loading part be piezoelectric ceramic piece or by magnetostriction materials make with slide glass.
Further, connecting portion is a fixed block with U-type groove, and loading unit is symmetrical arranged along U-type groove centerline axis, and the outer end wall of fatigue loading part and fixed block is fixed.
Further, actuator when primary importance moves to the second position, actuator withProduce force of sliding friction between axle to makeAxle is followed actuator and is rotated；Actuator from the second position reset to the speed of primary importance make actuator reset timeThe momentum of axle is close to constant.
Further, actuator is pressed in by hold-down mechanismAxle, hold-down mechanism includes tabletting, fixed screw and spring, fixed screw is fixed through tabletting with specimen holder head end, fixed screw has multiple, a spring it is socketed on each fixed screw, spring is between specimen holder head end and tabletting, and actuator is fixed on tabletting, and tabletting makes actuator be pressed in b axle.
Further, actuator mainly includes driving signal generator and piezoelectric ceramic piece or magnetostriction materials.
It is an advantage of the current invention that:
1, b axle is fixed with fatigue loading part, actuator promoteAxle stepwise motion, then can make consistent with the width of sample by the width of fatigue loading part, and the size of sample loading stage is little such that it is able to obtain bigger space, angle of inclination.
2, use piezoelectric ceramic piece or the loading force of fatigue loading part can be controlled by magnetostriction materials as fatigue loading part, the voltage of the voltage signal of controlled loading and frequency, being quick on the draw and accuracy is high.
3, make every timeAxle rotates a fixing low-angle stroke, such as unit angle, utilizes step-by-step movement accumulative effect to reach to makeAxle reaches the purpose of big rotational travel, and the required angle rotated of each b axle is little, so that the driving stroke in actuator each cycle is short, so that actuator volume can be sufficiently small and have the probability in the short space being placed into transmission electron microscope.
4, utilize piezoelectric ceramic piece or magnetostriction materials as actuator, actuator can be controlled and move to the time of the second position from primary importance by the power-on time and dead electricity time controlling actuator and reset to the time of primary importance from the second position, and actuator response is rapidly；Only need to be with wire connection actuator and outside driving signal generator, the volume of actuator is little, simple in construction, it is possible to be placed in the short space of transmission electron microscope.
Accompanying drawing explanation
Fig. 1 is the schematic diagram that in prior art, TEM sample bar verts.
The decomposing schematic representation of the Gatan654 original position stretching uniclinal specimen holder that Gatan company of the Tu2Shi U.S. produces.
The principle design figure of the Gatan654 original position stretching uniclinal specimen holder that Gatan company of the Tu3Shi U.S. produces.
Fig. 4 is the schematic diagram of the sample head front end of Chinese patent 201110145305.8.
Fig. 5 is the schematic diagram of the present invention.
Fig. 6 is the schematic diagram of sample loading stage.
Fig. 7 is the position side view that verts of specimen holder head end.
Detailed description of the invention
As it is shown in figure 5, the tired double specimen holders that incline of transmission electron microscope in situ low-and high-frequency, mainly include holding handle 5, specimen holder shaft 4, specimen holder head end 1 and for loading the sample loading stage 2 of sample, sample loading stage 2 is fixed with b axle 9,Axle be rotatably installed on specimen holder 4 head end.The signaling interface of specimen holder 4 is arranged to be held on handle 5.
As shown in Figure 6, sample loading stage 2 is mainly made up of two loading units A1, A2 and connecting portion 15, and loading unit A1, A2 are fixed on connecting portion 15 two ends symmetrically, has and allow it close to each other or be located remotely from each other deformation clearance C between two loading units A1, A2；Each loading unit includes respectiveAxle 9, fatigue loading part 14 and sample clamping part 13,Axle 9 and fatigue loading part 14 are fixed with sample clamping part 13 respectively；When sample is clamped in sample loading stage 2, sample strides across the two ends of this deformation gap and sample and is separately fixed on a sample clamping part 13.When two fatigue loading part 14 move toward one another, deformation gap diminishes, and sample is compressed.When the adverse movement of two fatigue loading parts 14, be located remotely from each other time, deformation gap becomes big, and sample is stretched.The loading of the compression stress to sample or tensile force is realized by the direction of motion changing two fatigue loading parts.
Specimen holder 4 head end arranges drivingThe actuator of axle 9 rotated stepwise, actuator withAxle 9 is in close contact, actuator when primary importance moves to the second position,One angular travel of axle 9 stepping；Actuator when the second position resets to primary importance,Axle 9 is fixed；Actuator moves to the second position from primary importance and resets to primary importance one period of motion of composition from the second position,Rotational angle=the N* of axle 9, wherein N is the number of the period of motion.
Fatigue loading part 14 for piezoelectric ceramic piece or is made up of magnetostriction materials.Fatigue loading part 14 is connected with the signaling interface held on handle 5 by wire, and signaling interface is connected with the source driving signal driving fatigue loading part 14 motion.Source driving signal is using voltage signal as driving signal, and the direction changing voltage signal can control the direction of motion of fatigue loading part 14, thus realizes sample is loaded compression stress or tensile force.
Connecting portion 15 is a fixed block with U-type groove, and loading unit is symmetrical arranged along U-type groove centerline axis 9, and the outer end wall of fatigue loading part 14 and fixed block is fixed.
Actuator when primary importance moves to the second position, actuator withProduce force of sliding friction between axle 9 to makeAxle 9 is followed actuator and is rotated；Actuator from the second position reset to the speed of primary importance make actuator reset timeThe momentum of axle 9 is close to constant.
Actuator is pressed in by hold-down mechanismAxle 9, hold-down mechanism includes tabletting, fixed screw and spring, fixed screw is fixed through tabletting with specimen holder 4 head end, fixed screw has multiple, a spring it is socketed on each fixed screw, spring is between specimen holder 4 head end and tabletting, and actuator is fixed on tabletting, and tabletting makes actuator be pressed inAxle 9.Actuator and hold-down mechanism are formed and driveAxle rotated stepwiseAxle rotation system 3.
Actuator mainly includes driving signal generator and piezoelectric ceramic piece or magnetostriction materials.
It is an advantage of the current invention that:
1、Axle is fixed with fatigue loading part, actuator promote b axle stepwise motion, then can be made by the width of fatigue loading part consistent with the width of sample, and the size of sample loading stage is little such that it is able to obtain bigger space, angle of inclination.
2, use piezoelectric ceramic piece or the loading force of fatigue loading part can be controlled by magnetostriction materials as fatigue loading part, the voltage of the voltage signal of controlled loading and frequency, being quick on the draw and accuracy is high.
3, make every timeAxle rotates a fixing low-angle stroke, such as unit angle, utilizes step-by-step movement accumulative effect to reach to makeAxle reaches the purpose of big rotational travel, every timeThe required angle rotated of axle is little, so that the driving stroke in actuator each cycle is short, so that actuator volume can be sufficiently small and have the probability in the short space being placed into transmission electron microscope.
4, utilize piezoelectric ceramic piece or magnetostriction materials as actuator, actuator can be controlled and move to the time of the second position from primary importance by the power-on time and dead electricity time controlling actuator and reset to the time of primary importance from the second position, and actuator response is rapidly；Only need to be with wire connection actuator and outside driving signal generator, the volume of actuator is little, simple in construction, it is possible to be placed in the short space of transmission electron microscope.
Content described in this specification embodiment is only enumerating of the way of realization to inventive concept; protection scope of the present invention is not construed as being only limitted to the concrete form that embodiment is stated, protection scope of the present invention also and in those skilled in the art according to present inventive concept it is conceivable that equivalent technologies means.
Claims (6)
1. the tired double specimen holders that incline of transmission electron microscope in situ low-and high-frequency, mainly include holding handle, specimen holder shaft, specimen holder head end and for loading the sample loading stage of sample, sample loading stage with
Axle is fixed,Axle be rotatably installed on specimen holder head end；
It is characterized in that: sample loading stage is mainly made up of two loading units and connecting portion, loading unit is fixed on connecting portion two ends symmetrically, has and allow it close to each other or be located remotely from each other deformation gap between two loading units；Each loading unit includes respectiveAxle, fatigue loading part and sample clamping part,Axle and fatigue loading part are fixed with sample clamping part respectively；When sample is clamped in sample loading stage, sample strides across the two ends of this deformation gap and sample and is separately fixed on a sample clamping part；
Specimen holder head end arranges drivingThe actuator of axle rotated stepwise, actuator withAxle be in close contact, actuator when primary importance moves to the second position,One angular travel of axle stepping；Actuator when the second position resets to primary importance,Axle is fixed；Actuator moves to the second position from primary importance and resets to primary importance one period of motion of composition from the second position,Rotational angle=the N* of axle, wherein N is the number of the period of motion.
2. the tired double specimen holders that incline of transmission electron microscope as claimed in claim 1 low-and high-frequency in situ, it is characterised in that: fatigue loading part be piezoelectric ceramic piece or by magnetostriction materials make with slide glass.
3. the tired double specimen holders that incline of transmission electron microscope as claimed in claim 2 low-and high-frequency in situ, it is characterised in that: connecting portion is a fixed block with U-type groove, and loading unit is symmetrical arranged along U-type groove centerline axis, and the outer end wall of fatigue loading part and fixed block is fixed.
4. the tired double specimen holders that incline of transmission electron microscope as described in one of claim 1-3 low-and high-frequency in situ, it is characterised in that: actuator when primary importance moves to the second position, actuator withProduce force of sliding friction between axle to makeAxle is followed actuator and is rotated；Actuator from the second position reset to the speed of primary importance make actuator reset timeThe momentum of axle is close to constant.
5. the tired double specimen holders that incline of transmission electron microscope as claimed in claim 4 low-and high-frequency in situ, it is characterised in that: actuator is pressed in by hold-down mechanismAxle, hold-down mechanism includes tabletting, fixed screw and spring, and fixed screw is fixed through tabletting with specimen holder head end, fixed screw has multiple, and each fixed screw is socketed a spring, and spring is between specimen holder head end and tabletting, actuator is fixed on tabletting, and tabletting makes actuator be pressed inAxle.
6. the tired double specimen holders that incline of transmission electron microscope as claimed in claim 5 low-and high-frequency in situ, it is characterised in that: actuator mainly includes driving signal generator and piezoelectric ceramic piece or magnetostriction materials.
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| CN201510090268.3A CN105990078B (en) | 2015-02-28 | 2015-02-28 | The double specimen holders that incline of transmission electron microscope original position low-and high-frequency fatigue |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109425627A (en) * | 2017-09-05 | 2019-03-05 | 浙江大学 | Multiple degrees of freedom specimen holder |
| CN109725005A (en) * | 2017-10-27 | 2019-05-07 | 北京纳米能源与系统研究所 | Transmission electron microscope sample club head and the transmission electron microscope sample bar for applying it |
| CN111257355A (en) * | 2018-11-30 | 2020-06-09 | 浙江大学 | Multi-degree-of-freedom sample rod with rotating shaft driving assembly |
| CN111257354A (en) * | 2018-11-30 | 2020-06-09 | 浙江大学 | Multi-degree-of-freedom sample rod |
| CN111638476A (en) * | 2020-04-28 | 2020-09-08 | 香港中文大学（深圳） | Electric transmission sample carrying structure and electric transmission sample carrying operation method |
| CN114203504A (en) * | 2021-11-23 | 2022-03-18 | 百实创(北京)科技有限公司 | Tilting structure of transmission electron microscope sample stage |
| CN114199902B (en) * | 2021-10-26 | 2024-04-12 | 清华大学 | Sample carrying device for electron microscope |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109425627A (en) * | 2017-09-05 | 2019-03-05 | 浙江大学 | Multiple degrees of freedom specimen holder |
| CN109725005A (en) * | 2017-10-27 | 2019-05-07 | 北京纳米能源与系统研究所 | Transmission electron microscope sample club head and the transmission electron microscope sample bar for applying it |
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| CN111257355A (en) * | 2018-11-30 | 2020-06-09 | 浙江大学 | Multi-degree-of-freedom sample rod with rotating shaft driving assembly |
| CN111257354A (en) * | 2018-11-30 | 2020-06-09 | 浙江大学 | Multi-degree-of-freedom sample rod |
| CN111257354B (en) * | 2018-11-30 | 2021-03-05 | 浙江大学 | Multi-degree-of-freedom sample rod |
| CN111638476A (en) * | 2020-04-28 | 2020-09-08 | 香港中文大学（深圳） | Electric transmission sample carrying structure and electric transmission sample carrying operation method |
| CN114199902B (en) * | 2021-10-26 | 2024-04-12 | 清华大学 | Sample carrying device for electron microscope |
| CN114203504A (en) * | 2021-11-23 | 2022-03-18 | 百实创(北京)科技有限公司 | Tilting structure of transmission electron microscope sample stage |
| CN114203504B (en) * | 2021-11-23 | 2023-10-24 | 百实创(北京)科技有限公司 | Tilting structure of transmission electron microscope sample stage |
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