CN217062008U - Sample platform for scanning electron microscope and scanning electron microscope - Google Patents
Sample platform for scanning electron microscope and scanning electron microscope Download PDFInfo
- Publication number
- CN217062008U CN217062008U CN202220555701.1U CN202220555701U CN217062008U CN 217062008 U CN217062008 U CN 217062008U CN 202220555701 U CN202220555701 U CN 202220555701U CN 217062008 U CN217062008 U CN 217062008U
- Authority
- CN
- China
- Prior art keywords
- sample
- electron microscope
- scanning electron
- mounting hole
- sample platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 claims description 5
- 230000000149 penetrating effect Effects 0.000 claims 1
- 230000008859 change Effects 0.000 abstract description 8
- 238000010586 diagram Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000004880 explosion Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Images
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The utility model discloses a sample platform and scanning electron microscope for scanning electron microscope's sample platform includes: a base; the sample plummer, the sample plummer includes that plummer main part and a plurality of sample hold in the palm, and the plummer main part is established on the base, is equipped with a plurality of mounting structure in the plummer main part, and a plurality of mounting structure and a plurality of sample hold in the palm the one-to-one setting, and every sample holds in the palm detachably and establishes on the mounting structure who corresponds. The utility model discloses a hold in the palm detachably with the sample and set up on the mounting structure who corresponds, make things convenient for the change that the sample held in the palm, improve the convenience.
Description
Technical Field
The utility model belongs to the technical field of scanning electron microscope's spare part and specifically relates to a sample platform and scanning electron microscope for scanning electron microscope is related to.
Background
The sample testing of the scanning electron microscope is to hit the high-energy electron beam on the sample support, the interaction between the high-energy electron beam and the substance excites various physical information, and the physical information is collected and analyzed, and the relative positions of all parts of the scanning electron microscope are relatively close, and the whole structure space is narrow. The samples are various, and the sample tray needs to be replaced frequently, but the related art cannot provide simple replacement operation.
SUMMERY OF THE UTILITY MODEL
The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a sample platform for scanning electron microscope makes things convenient for the change that the sample held in the palm, improves the convenience.
The utility model discloses still provide the scanning electron microscope of an applied above-mentioned sample platform, make things convenient for the change that the sample held in the palm, improve the convenience.
According to the utility model discloses a sample platform for scanning electron microscope, include: a base; the sample plummer, the sample plummer includes that plummer main part and a plurality of sample hold in the palm, the plummer main part is established on the base, be equipped with a plurality of mounting structure in the plummer main part, it is a plurality of mounting structure and a plurality of the sample holds in the palm the one-to-one and sets up, every the sample holds in the palm detachably and establishes corresponding mounting structure is last.
According to the utility model discloses scanning electron microscope's sample platform through holding in the palm detachably with the sample and setting up on the mounting structure that corresponds, makes things convenient for the change that the sample held in the palm, improves the convenience.
In some embodiments, each of the mounting structures includes a mounting hole and a clamping member disposed in the mounting hole, the bottom of the sample holder is provided with a convex pillar, the convex pillar is disposed in the mounting hole, and the clamping member is used for clamping the convex pillar.
Specifically, the clamping piece is a crown spring made of beryllium copper, the crown spring is arranged in the mounting hole, and the convex column penetrates through the crown spring.
In some embodiments, each of the mounting structures further comprises: the fixing piece is in threaded connection with the mounting hole and abuts against the bottom of the clamping piece.
Furthermore, a through hole is formed in the fixing piece, and the through hole extends along the axial direction of the mounting hole.
In some embodiments, the fixing member is provided with a detaching portion, the detaching portion is arranged at one end of the fixing member far away from the sample holder, and the detaching portion is used for detaching the fixing member from the mounting hole.
In some embodiments, the carrier body includes a horizontal portion and an inclined portion, an included angle is formed between the inclined portion and the horizontal portion, and the mounting structure and the sample holder are disposed on both the inclined portion and the horizontal portion.
Specifically, the inclined part is obliquely downward arranged relative to the horizontal part, and an included angle between the inclined part and the horizontal part ranges from 20 degrees to 80 degrees.
In some embodiments, the sample platform for a scanning electron microscope further includes a rotation driving assembly disposed between the base and the stage body, the rotation driving assembly is disposed on the base and has a rotatable driving end, and the driving end is connected to the stage body to drive the stage body to rotate.
According to the utility model discloses scanning electron microscope, including foretell a sample platform that is used for scanning electron microscope.
According to the utility model discloses scanning electron microscope, through holding in the palm detachably with the sample and setting up on the mounting structure that corresponds, make things convenient for the change that the sample held in the palm, improve the convenience.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic structural diagram of a sample platform according to an embodiment of the present invention;
fig. 2 is a first schematic diagram illustrating an explosion of a sample platform according to an embodiment of the present invention;
fig. 3 is an exploded schematic view of a sample platform according to an embodiment of the present invention;
fig. 4 is a third schematic diagram illustrating an explosion of the sample platform according to an embodiment of the present invention;
fig. 5 is a cross-sectional view of a sample holder in an embodiment of the present invention.
Reference numerals are as follows:
100. a sample platform;
10. a base;
20. a sample carrier; 21. a horizontal portion; 22. an inclined portion; 23. a sample holder; 231. a convex column; 24. a mounting structure; 241. mounting holes; 242. a clamping member; 243. a fixing member; 2431. a through hole; 2432. a detaching section; 27. a measured piece; 28. a plummer body;
30. a rotary drive assembly; 31. a worm seat; 32. a worm; 33. a worm gear; 34. a drive member;
50. and a detection member.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are exemplary only for explaining the present invention, and should not be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
Furthermore, features defined as "first" and "second" may explicitly or implicitly include one or more of the features for distinguishing between descriptive features, non-sequential, non-trivial and non-trivial.
In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The following describes a sample platform 100 for a scanning electron microscope according to an embodiment of the present invention with reference to the drawings.
As shown in fig. 1 and fig. 2, according to the sample platform 100 for a scanning electron microscope of the embodiment of the present invention, the sample platform 100 for a scanning electron microscope includes: a base 10, a sample holder 20.
According to the utility model discloses a sample platform 100 for scanning electron microscope, through holding in the palm 23 detachably with the sample and setting up on the mounting structure 24 that corresponds, make things convenient for the sample to hold in the palm 23's change, improve the convenience.
As shown in fig. 5, in some embodiments, each of the mounting structures 24 includes a mounting hole 241 and a clamping member 242 disposed in the mounting hole 241, the bottom of the sample holder 23 is provided with a protruding column 231, the protruding column 231 is disposed in the mounting hole 241, the clamping member 242 is used for clamping the protruding column 231, the protruding column 231 at the bottom of the sample holder 23 is clamped by the clamping member 242, so that stability of the sample holder 23 is ensured, and compared with other connection methods in the related art, when the protruding column 231 extends into the mounting hole 241, clamping of the protruding column 231 by the clamping member 242 can be automatically achieved, which is convenient and fast.
In some embodiments, the clamping force of the clamping member 242 on the convex pillar 231 ranges from 1.8 newtons to 2.6 newtons, so that the sample holder 23 with the sample is not shaken, and at the same time, easy pulling and inserting can be achieved. For example, the clamping force of the clamp 242 on the stud 231 is 2 newtons; or, the clamping force of the clamping piece 242 on the convex column 231 is 1.8 newtons, so that the convex column 231 can be easily inserted and pulled out; or, the clamping force of the clamping piece 242 on the convex column 231 is 2.6 newtons, so that the sample holder 23 is ensured not to shake.
Specifically, the clamping member 242 is a beryllium copper crown spring, the crown spring is disposed in the mounting hole 241, the boss 231 penetrates through the crown spring, and the clamping member 242 is made of the beryllium copper crown spring, so that compared with crown springs made of other materials, the elasticity is improved, and the service life is prolonged.
As shown in fig. 4 and 5, in some embodiments, each mounting structure 24 further includes: and a fixing member 243, wherein the fixing member 243 is screwed into the mounting hole 241 and abuts against the bottom of the clamping member 242, the clamping member 242 is fixed in the mounting hole 241 by arranging the fixing member 243, and the fixing member 243 is screwed into the mounting hole 241 so as to facilitate the installation of the fixing member 243.
Specifically, the fixing member 243 is provided with an external thread on an outer circumferential surface thereof, and an internal thread is provided in the mounting hole 241, the external thread being engaged with the internal thread so that the fixing member 243 is coupled in the mounting hole 241.
As shown in fig. 4 and 5, a through hole 2431 is further formed in the fixing member 243, the through hole 2431 extends in the axial direction of the mounting hole 241, and the through hole 2431 is formed to communicate with the mounting hole 241, so that air is prevented from being trapped in a space defined by the fixing member 243 and the mounting hole 241. It can be understood that when the sem is in a vacuum environment, if the space defined by the fixing member 243 and the mounting hole 241 is filled with air, a pressure difference may exist, which may cause danger.
In some embodiments, the diameter of the protruding pillar 231 is smaller than the diameter of the through hole 2431, so that the protruding pillar 231 can extend into the through hole 2431, and the protruding pillars 231 with different lengths can extend into the mounting hole 241, thereby improving adaptability. For example, the diameter of the protruding pillar 231 is 3.14 mm, the diameter of the through hole 2431 is 3.4 mm, and the protruding pillar 231 may protrude into the through hole 2431. Of course, it is understood that the diameter of the convex pillar 231 is not limited to 3.14 mm, but may be 3.14 mm, and may be other sizes, such as 3.2, 3.25, etc., which are not described herein again.
As shown in fig. 4, in some embodiments, the fixing member 243 is provided with a detaching portion 2432, the detaching portion 2432 is provided at an end of the fixing member 243 far from the sample holder 23, the detaching portion 2432 is used for detaching the fixing member 243 from the mounting hole 241, and the detaching portion 2432 is provided to facilitate detaching the fixing member 243 from the mounting hole 241. For example, the detachment portion 2432 is a linear notch, which is a force-increasing position of the fixing member 243, and facilitates the application of force to the fixing member 243.
As shown in fig. 1 to 4, in some embodiments, the platform main body 28 includes a horizontal portion 21 and an inclined portion 22, an included angle is formed between the inclined portion 22 and the horizontal portion 21, the inclined portion 22 and the horizontal portion 21 are both provided with a mounting structure 24 and a sample holder 23, and the horizontal portion 21 and the inclined portion 22 are provided to provide multiple viewing angles for observing the sample. It should be noted that the inclined portion 22 may be inclined upward or downward relative to the horizontal portion 21, thereby providing various viewing angles. For example, 12 mounting structures 24 are provided on the horizontal portion 21, and 3 mounting structures 24 are provided on the inclined portion 22.
Specifically, the inclined portion 22 is disposed obliquely downward relative to the horizontal portion 21, and an included angle between the inclined portion 22 and the horizontal portion 21 ranges from 20 to 80 degrees, thereby enabling side observation of the sample. For example, the included angle between the inclined portion 22 and the horizontal portion 21 is 45 degrees, which can provide an observation angle of 45 degrees for a lens right above; or the included angle between the inclined part 22 and the horizontal part 21 is 20 degrees; still alternatively, the angle between the inclined portion 22 and the horizontal portion 21 is 80 degrees. Of course, other angles are also possible, such as 30 degrees, 40 degrees, etc., and are not described in detail herein.
As shown in fig. 1 and fig. 2, in some embodiments, the sample platform 100 for a scanning electron microscope further includes a rotation driving assembly 30 disposed between the base 10 and the stage body 28, the rotation driving assembly 30 is disposed on the base 10 and has a rotatable driving end, the driving end is connected to the stage body 28 to drive the stage body 28 to rotate, and the stage body 28 is driven to rotate by the rotation driving assembly 30, so that different samples can be moved to a high-energy electron beam by the rotating stage body 28 for observation.
As shown in fig. 2, in particular, the rotary drive assembly 30 includes: worm seat 31, worm 32, worm wheel 33 and drive 34.
The worm seat 31 is provided on the base 10. The worm 32 is pivotally arranged on the mounting. A worm wheel 33 is provided on the base 10 and engages the worm 32, the worm wheel 33 constituting a drive end. A driving member 34 is provided on the base 10, and the driving member 34 is connected to the worm 32 and drives the worm 32 to rotate. The utility model discloses an above-mentioned rotation, compact structure that set up and realize plummer main part 28.
More specifically, the driving member 34 is a stepping motor, the sample holder 20 is provided with a tested piece 27, the sample platform 100 includes a detecting piece 50, the detecting piece 50 is electrically connected to the stepping motor, the detecting piece 50 can detect the tested piece 27 during the rotation of the sample holder 20 to obtain the start position and the rotation angle of the sample holder 20, and the accurate control of the position of the sample is realized by obtaining the start position and the rotation angle of the sample holder 20.
Alternatively, the detecting element 50 detects the starting position of the sample holder 20 obtained by the object 27 to be detected, and the driving element 34 is a stepping motor, so that the rotation angle can be determined. For example, the detecting member 50 is a micro switch, and when the detected member 27 touches the micro switch, the sample holder 20 is at the start position.
An embodiment of the sample platform 100 for scanning electron microscope of the present invention is described below with reference to fig. 1 to 5.
A sample platform 100 for a scanning electron microscope comprises: a base 10, a sample holder 20, a rotation driving assembly 30 and a detection member 50.
The sample holder 20 comprises a holder body 28 and a plurality of sample holders 23.
The plummer main body 28 is provided on the base 10, the plummer main body 28 includes a horizontal portion 21 and an inclined portion 22, an included angle is formed between the inclined portion 22 and the horizontal portion 21, the inclined portion 22 is provided obliquely downward with respect to the horizontal portion 21, and the included angle between the inclined portion 22 and the horizontal portion 21 is 45 degrees. The horizontal portion 21 is provided with 12 mounting structures 24, the inclined portion 22 is provided with 3 mounting structures 24, and the mounting structures 24 include mounting holes 241, clamping pieces 242, and fixing pieces 243. The holder 242 is a crown spring made of beryllium copper, and the holder 242 is disposed in the mounting hole 241. The fixing member 243 is screwed into the mounting hole 241 and abuts against the bottom of the clamping member 242. The fixing member 243 is provided with a through hole 2431 and a detaching portion 2432, the through hole 2431 extends along the axial direction of the mounting hole 241, the detaching portion 2432 is a straight notch, the detaching portion 2432 is provided at an end of the fixing member 243 far away from the sample holder 23, and the detaching portion 2432 is used for detaching the fixing member 243 from the mounting hole 241. The bearing table main body 28 is also provided with a measured piece 27.
Fifteen sample holders 23 and fifteen mounting structures 24 are arranged in one-to-one correspondence, and a convex column 231 is arranged at the bottom of each sample holder 23, and the convex column 231 penetrates through the crown spring.
The rotation driving assembly 30 is disposed between the base 10 and the platform body 28, and the rotation driving assembly 30 includes a worm seat 31, a worm 32, a worm wheel 33, and a driving member 34. The worm seat 31 is provided on the base 10. The worm 32 is pivotally arranged on the mounting. A worm wheel 33 is provided on the base 10 and engages the worm 32, the worm wheel 33 constituting a drive end. A driving member 34 is provided on the base 10, the driving member 34 is a stepping motor, and the driving member 34 is connected to the worm 32 and drives the worm 32 to rotate.
The detecting member 50 is a microswitch, the detecting member 50 is arranged on the base 10, and the detecting member 50 can detect the detected member 27 in the rotation process of the male platform bearing platform so as to obtain the initial position and the rotation angle of the sample bearing platform 20.
According to the utility model discloses scanning electron microscope, including foretell a sample platform 100 that is used for scanning electron microscope.
According to the utility model discloses scanning electron microscope, through holding in the palm 23 detachably with the sample and setting up on the mounting structure 24 that corresponds, make things convenient for the sample to hold in the palm 23 change, improve the convenience.
Other configurations and operations of the sample platform 100 for a scanning electron microscope according to embodiments of the present invention are known to those of ordinary skill in the art and will not be described in detail herein.
In the description of the present specification, references to the description of the terms "embodiment," "example," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. A sample platform for a scanning electron microscope, comprising:
a base;
the sample plummer, the sample plummer includes that plummer main part and a plurality of sample hold in the palm, the plummer main part is established on the base, be equipped with a plurality of mounting structure in the plummer main part, it is a plurality of mounting structure and a plurality of the sample holds in the palm the one-to-one and sets up, every the sample holds in the palm detachably and establishes corresponding mounting structure is last.
2. The sample platform for a scanning electron microscope according to claim 1, wherein each of the mounting structures includes a mounting hole and a clamping member disposed in the mounting hole, a convex pillar is disposed at a bottom of the sample holder, the convex pillar is disposed in the mounting hole, and the clamping member is configured to clamp the convex pillar.
3. The sample platform for a scanning electron microscope according to claim 2, wherein the clamping member is a crown spring made of beryllium copper, the crown spring is arranged in the mounting hole, and the convex column is arranged in the crown spring in a penetrating manner.
4. A sample platform for a scanning electron microscope as claimed in claim 2, wherein each mounting structure further comprises: the fixing piece is in threaded connection with the inside of the mounting hole and abuts against the bottom of the clamping piece.
5. The sample platform for a scanning electron microscope according to claim 4, wherein the fixing member is provided with a through hole extending in an axial direction of the mounting hole.
6. The sample platform for a scanning electron microscope according to claim 4, wherein the fixing member is provided with a detaching portion, the detaching portion is provided at an end of the fixing member away from the sample holder, and the detaching portion is configured to detach the fixing member from the mounting hole.
7. The sample platform for a scanning electron microscope according to claim 1, wherein the plummer main body comprises a horizontal portion and an inclined portion, an included angle is formed between the inclined portion and the horizontal portion, and the mounting structure and the sample holder are disposed on both the inclined portion and the horizontal portion.
8. The sample platform for a scanning electron microscope according to claim 7, wherein the inclined portion is disposed obliquely downward relative to the horizontal portion, and an included angle between the inclined portion and the horizontal portion ranges from 20 to 80 degrees.
9. The sample platform for a scanning electron microscope according to claim 1, further comprising a rotation driving assembly disposed between the base and the carrier body, the rotation driving assembly being disposed on the base and having a rotatable driving end, the driving end being connected to the carrier body to drive the carrier body to rotate.
10. A scanning electron microscope comprising a sample platform for a scanning electron microscope according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220555701.1U CN217062008U (en) | 2022-03-11 | 2022-03-11 | Sample platform for scanning electron microscope and scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220555701.1U CN217062008U (en) | 2022-03-11 | 2022-03-11 | Sample platform for scanning electron microscope and scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217062008U true CN217062008U (en) | 2022-07-26 |
Family
ID=82489907
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220555701.1U Active CN217062008U (en) | 2022-03-11 | 2022-03-11 | Sample platform for scanning electron microscope and scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217062008U (en) |
-
2022
- 2022-03-11 CN CN202220555701.1U patent/CN217062008U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN217062008U (en) | Sample platform for scanning electron microscope and scanning electron microscope | |
| JP5280984B2 (en) | Thermal insulation device and analyzer equipped with the same | |
| NL2007649C2 (en) | Specimen holder with 3-axis movement for tem 3d analysis. | |
| US8935811B2 (en) | Vertically mounted sample stage for microscopy and scanning probe microscope using the sample stage | |
| JP2014524020A (en) | Syringeless filter device compressor | |
| US11000845B2 (en) | Pipette tip mounting adaptor | |
| JP6865510B2 (en) | Multi-channel pipette | |
| US20200390235A1 (en) | Transfer sleeve | |
| CN217292244U (en) | Overturning bracket and multiplying power mirror | |
| CN219391914U (en) | Clamping assembly of manual ultrasonic nondestructive testing probe | |
| JP7060730B2 (en) | Electrophoresis device | |
| CN114858833A (en) | EBSD sample dismounting and mounting table and EBSD detection method of sample | |
| CN114199902B (en) | Sample carrying device for electron microscope | |
| CN212322849U (en) | Rubber cover disc clamp device | |
| JP2007132823A (en) | Chemical analyzer | |
| CN211989185U (en) | Cell centrifuge | |
| JP2019069588A (en) | Accommodation device and ejector pin with sensor | |
| CN220238632U (en) | Test tube rack | |
| CN115780975B (en) | Auxiliary screw welding mechanism | |
| CN217062009U (en) | Sample platform of scanning electron microscope and scanning electron microscope | |
| CN217727901U (en) | Clamp device capable of being rapidly assembled and disassembled for machining of cnc steel structure | |
| CN117798626B (en) | Manufacturing device for anchor | |
| CN217464335U (en) | Sliding support and lamp with same | |
| CN221655868U (en) | Consumable filling device | |
| CN216736436U (en) | Clamping device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 230088 floor 1-4, zone a, building E2, phase II, innovation industrial park, No. 2800, innovation Avenue, high tech Zone, Hefei, Anhui Province Patentee after: Guoyi Quantum Technology (Hefei) Co.,Ltd. Address before: 230088 floor 1-4, zone a, building E2, phase II, innovation industrial park, No. 2800, innovation Avenue, high tech Zone, Hefei, Anhui Province Patentee before: Guoyi Quantum (Hefei) Technology Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |