CN114199418B - Quartz tuning fork pressure sensor - Google Patents

Quartz tuning fork pressure sensor Download PDF

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Publication number
CN114199418B
CN114199418B CN202111433981.5A CN202111433981A CN114199418B CN 114199418 B CN114199418 B CN 114199418B CN 202111433981 A CN202111433981 A CN 202111433981A CN 114199418 B CN114199418 B CN 114199418B
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tuning fork
pressure sensor
value
quartz
changes
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CN114199418A (en
Inventor
褚伟航
裴志强
陶硕
刘旭强
张琳琳
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Beijing Chenjing Electronics Co ltd
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Beijing Chenjing Electronics Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/10Measuring force or stress, in general by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings
    • G01L1/106Constructional details

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention belongs to the technical field of sensors, and provides a quartz tuning fork pressure sensor which comprises a shell for providing a vacuum environment, a frame arranged in the shell, a resonant tuning fork assembly and a Q value detection electrode. The resonant tuning fork assembly includes a tuning fork body and a tuning fork actuating device, the tuning fork body being of unitary construction with the frame. The external pressure changes and causes the vacuum degree in the shell to change, the vacuum degree changes and causes the air content to change, the air content changes and causes the damping to change, the damping changes and causes the tuning fork Q value to change, the Q value detection electrode detects and outputs the tuning fork Q value, and the pressure change can be obtained according to the Q value change. The sensitivity of the Q value to temperature is lower than that of the piezoresistor, and the tuning fork main body and the frame are made of quartz, are cut into the same shape and have matched thermal expansion coefficients, so that the temperature drift is lower than that of the piezoresistor type pressure sensor. Further, the sensitivity of the Q value output is higher than that of the frequency output in the same vacuum degree variation range.

Description

Quartz tuning fork pressure sensor
Technical Field
The invention relates to the technical field of sensors, in particular to a quartz tuning fork pressure sensor.
Background
Pressure sensors currently on the market include piezoresistive and resonant types. The sensing element of the piezoresistive pressure sensor is a piezoresistor, and the principle is that when external pressure acts on the piezoresistor, the resistance value is changed, the resistance value is converted into voltage change, and the external pressure value can be obtained by testing the output voltage value. The working principle of the resonant pressure sensor is a frequency signal output type sensor prepared by utilizing the corresponding relation between resonant frequency and pressure.
However, the traditional piezoresistive pressure sensor has the defects of serious temperature drift, low sensitivity of the frequency output type quartz pressure sensor and limited use occasions.
Disclosure of Invention
The invention provides a quartz tuning fork pressure sensor, which is used for solving the defects of serious temperature drift, low sensitivity and limited use occasions of a piezoresistive pressure sensor in the prior art, realizing the effects of reducing the temperature sensitivity and changing the detection mode from the detection frequency to a tuning fork Q value with higher detection sensitivity.
The invention provides a quartz tuning fork pressure sensor, comprising: the shell is in a vacuum environment; a frame connected to the inside of the housing; a resonating tuning fork assembly including a tuning fork body and a tuning fork driving device, the tuning fork body being integrally formed with the frame, the tuning fork driving device being coupled to the tuning fork body for driving the tuning fork body to vibrate; the Q value detection electrode is electrically connected with the tuning fork driving device and is used for detecting the tuning fork Q value; the tuning fork main body and the frame are both made of quartz and are identical in cutting.
According to the quartz tuning fork pressure sensor provided by the invention, the frame comprises the main frame body and the through groove penetrating through the main frame body, and the tuning fork main body is positioned in the through groove.
According to the present invention, there is provided a quartz tuning fork pressure sensor, the tuning fork body comprising: the base part and the main frame are connected into an integrated structure through a connecting beam, and the connecting beam is arranged between the position of the main frame at the bottom of the through groove and the bottom of the base part; the two interdigital wheels are arranged in parallel and are arranged at the top of the base, and spaces for interdigital vibration are reserved between the two interdigital wheels and the inner side surface of the through groove.
According to the quartz tuning fork pressure sensor provided by the invention, the width of the connecting beam is S 1, and the thickness of the tuning fork main body is H, wherein H/3 is less than or equal to S 1 and less than or equal to 2H/3.
According to the quartz tuning fork pressure sensor provided by the invention, an included angle is formed between the outer side face of the interdigital along the width direction and the inner side face of the through groove along the width direction and close to the interdigital, and the distance between one end of the interdigital far away from the base and the inner side face of the through groove is larger than the distance between one end of the interdigital close to the base and the inner side face of the through groove.
According to the quartz tuning fork pressure sensor provided by the invention, the length of the interdigital is S 2, the vibration amplitude of the interdigital is S 3, and the included angle between the outer side surface of the interdigital along the width direction and the inner side surface of the through groove along the width direction is theta, wherein theta=arctan (S 3/S2).
According to the quartz tuning fork pressure sensor provided by the invention, the frame further comprises two cover plates, the two cover plates respectively cover the two sides of the through groove along the thickness direction, and a groove is formed in one side of the cover plate corresponding to the through groove.
According to the quartz tuning fork pressure sensor provided by the invention, the gap between one side of the interdigital finger, which is close to the cover plate, and the cover plate is S 4, wherein S 4 is more than or equal to 5 and less than or equal to 50 microns.
According to the quartz tuning fork pressure sensor provided by the invention, at least two alignment marks are arranged between each cover plate and the main frame body.
According to the quartz tuning fork pressure sensor provided by the invention, the tuning fork driving device is a tuning fork driving electrode.
The invention provides a quartz tuning fork pressure sensor which comprises a shell, a frame, a resonant tuning fork assembly and a Q value detection electrode, wherein the shell is used for providing a vacuum environment, and the frame, the resonant tuning fork assembly and the Q value detection electrode are all arranged in the vacuum environment of the shell. The frame is arranged in the shell and fixedly connected with the shell. The resonant tuning fork assembly includes a tuning fork body and a tuning fork drive that drives the tuning fork in vibration. When the external pressure changes, the vacuum degree of the environment where the resonant tuning fork component and the frame structure are located changes due to pressure changes, the air content changes due to the vacuum degree changes, damping changes are further caused, the tuning fork Q value changes due to damping changes, the tuning fork Q value is detected and output by the Q value detection electrode, and the pressure changes can be obtained according to the Q value changes. The sensitivity of the Q value to temperature is lower than that of the resistance value of the piezoresistor, and the tuning fork main body and the frame are made of quartz, are identical in cutting type and are matched with each other in thermal expansion coefficient, so that the temperature drift is lower than that of the piezoresistor type pressure sensor. Further, the sensitivity of the Q value output is higher than that of the frequency output in the same vacuum degree variation range, and thus, the sensitivity of the sensor is improved.
Drawings
In order to more clearly illustrate the invention or the technical solutions of the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the invention, and other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a three-dimensional structure of a quartz tuning fork pressure sensor provided by the invention;
FIG. 2 is a schematic diagram of the connection structure of the main frame body, the tuning fork main body and the Q value detection electrode of the quartz tuning fork pressure sensor provided by the invention;
FIG. 3 is a front view of a cover plate provided by the present invention;
Reference numerals:
101: a main frame; 102: a cover plate; 103: a groove;
104: a through groove;
201: a base; 202: an interdigital; 203: tuning fork driving electrodes;
300: a Q value detection electrode;
400: a connecting beam;
501: a positioning block; 502: and a positioning groove.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The quartz tuning fork pressure sensor of the present invention is described below with reference to fig. 1 to 3.
The invention provides a quartz tuning fork pressure sensor, which comprises a shell, a frame, a resonant tuning fork assembly and a Q value detection electrode 300, wherein the shell is used for providing a vacuum environment, the frame, the resonant tuning fork assembly and the Q value detection electrode 300 form a detection assembly, and all the detection assemblies are arranged in the shell and are used for detecting the tuning fork Q value when pressure changes and outputting the pressure value according to the tuning fork Q value.
The housing may be a sealed structure, with the interior providing a vacuum environment.
The frame may be quartz and the cut may be Z-shaped.
The resonance tuning fork comprises a tuning fork main body and a tuning fork driving device, wherein the tuning fork main body and the frame are of an integrated structure, and the tuning fork driving device is used for driving the tuning fork main body to vibrate. The tuning fork main body is made of quartz material the same as that of the frame, and the cutting shape is Z-shaped.
The Q-value detecting electrode 300 may be mounted on the frame with a detecting end electrically connected to the tuning fork driving means, and the Q-value detecting electrode 300 is used to detect the Q-value of the tuning fork.
When the external pressure changes, the pressure changes to cause the vacuum degree of the environment where the resonant tuning fork component and the frame structure are located to change, namely, the vacuum degree in the shell changes, the vacuum degree changes to cause the air content in the shell to change, and then the damping changes, the damping changes to cause the tuning fork Q value to change, the Q value of the tuning fork is detected and output by the Q value detection electrode 300, and the change of the pressure can be obtained through the change of the Q value. The sensitivity of the Q value to temperature is lower than that of the piezoresistor, and the tuning fork main body and the frame are made of quartz, are cut into the same shape and have matched thermal expansion coefficients, so that the temperature drift is lower than that of the piezoresistor type pressure sensor. Further, the sensitivity of the Q value output is higher than that of the frequency output in the same vacuum degree variation range, and thus, the sensitivity of the sensor is improved.
In one embodiment of the present invention, the frame may include a main frame 101 and a through slot 104 penetrating the main frame 101, and the main frame 101 may have a rectangular plate structure made of quartz, as shown in fig. 2, an upward direction parallel to the paper surface is an upward direction, a downward direction parallel to the paper surface is a downward direction, a left-right direction parallel to the paper surface is a left-right direction of the main frame 101, a direction perpendicular to the paper surface is a front direction, and a direction perpendicular to the paper surface is a rear direction. The through groove 104 may be provided at a middle position of the two-thirds part of the main frame 101 in the left-right direction, and the through groove 104 may penetrate the main frame 101 in the thickness direction of the main frame 101, or may penetrate the main frame 101 in the front-rear direction.
In one embodiment of the present invention, the tuning fork body described above includes a base 201 and two fingers 202. The base 201 comprises two symmetrical sub-bases, the bottom of each sub-base is of a cuboid structure, the top of each sub-base is of a prismatic table structure, the small end of each prismatic table structure is arranged upwards, the top of each sub-base is provided with an interdigital 202, and the length of each interdigital 202 is far greater than the height of the base 201. One sub-base and the finger 202 on the sub-base are symmetrical to one side to obtain the other sub-base and the finger 202. The two sub-bases are of an integral structure.
The shape of the through groove 104 is substantially similar to that of the tuning fork body, corresponding to the structure of the tuning fork body, but the size of the through groove 104 is larger than the outer edge of the tuning fork body. The upper half of the through groove 104 is used for accommodating the interdigital 202, and is a rectangular groove, the lower half of the through groove 104 is used for accommodating the base 201, the bottom of the part is a rectangular groove, and the top is a trapezoid groove.
Wherein, a connecting beam 400 is arranged between the bottom center of the base 201 and the main frame 101 at the bottom of the through groove 104, and the connecting beam 400, the base 201 and the frame are in an integrated structure by realizing fixed connection through the connecting beam 400.
Further, the connecting beam 400 may have a rectangular parallelepiped structure, and the length of the connecting beam 400 along the front-rear direction may be equal to the length of the base 201 along the front-rear direction, the front-rear ends of the connecting beam 400 are respectively flush with the front-rear ends of the base 201, the bottom of the connecting beam 400 is located at the center of the bottom of the through slot 104 along the left-right direction, and the top of the connecting beam 400 is located at the center of the bottom of the base 201 along the left-right direction. The width of the connecting beam 400 along the left-right direction can be S 1, the thickness of the tuning fork main body along the front-rear direction can be H, and the width of the connecting beam 400 and the thickness of the tuning fork main body meet H/3-S 1 -2H/3.
The width S 1 of the connection beam 400 is in this size range, the sensitivity is highest; when the size is smaller than this range, the connection beam 400 is too narrow and is easily broken, and when the size is larger than this range, the connection beam 400 is too stiff, the energy loss is large, and the sensitivity is lowered.
Spaces for the interdigital 202 to vibrate are provided between the interdigital 202 and the inner side surface of the through groove 104. An included angle is formed between the outer side surface of the interdigital 202 along the width direction and the inner side surface of the through groove 104 along the width direction, namely, an included angle is formed between the left side surface of the interdigital 202 on the left side and the inner side surface of the through groove 104 on the left side, and an included angle is formed between the right side surface of the interdigital 202 on the right side and the inner side surface of the through groove 104 on the right side, and the included angle is larger than 0 degree, namely, the non-parallel state is formed.
Further, taking the left finger 202 as an example, the distance between the left side of the top end of the finger 202 and the inner side of the left side of the through slot 104 is greater than the distance between the left side of the bottom end of the finger 202 and the inner side of the left side of the through slot 104. According to the working principle of the tuning fork, the interdigital 202 vibrates reciprocally in two modes of approaching the main frame 101 and separating from the outer frame, or in this embodiment, the interdigital 202 vibrates reciprocally in the left-right direction. When the tuning fork approaches the main frame 101, the displacement of the end of the interdigital 202 away from the connecting beam 400 is larger than the displacement of the end near the connecting beam 400, the distance between the end of the interdigital 202 near the connecting beam 400 and the left side surface of the through groove 104 is designed to be smaller, the damping can be increased, the film pressing damping is related to the distance, and the smaller the distance is, the larger the film pressing damping is.
In one embodiment of the present invention, the length of the finger 202 may be S 2, the vibration amplitude of the finger 202 is S 3, taking the left finger 202 as an example, the angle between the left side surface of the left finger 202 and the left side inner side surface of the through slot 104 may be θ, where θ=arctan (S 3/S2).
In an embodiment of the present invention, the frame further includes two cover plates 102, where the two cover plates 102 are respectively disposed on the upper half portions of the front side and the rear side of the main frame 101, the cover plates 102 at least need to cover the area corresponding to the fingers 202, and a groove 103 is disposed on the side of the cover plate 102 corresponding to the through groove 104, where the groove 103 can prevent the fingers 202 from interfering with the cover plates 102 when vibrating, and provides a vibration space for the fingers 202.
In a further embodiment, the gap between the side of the finger 202 near the cover plate 102 and the groove 103 of the cover plate 102 may be S 4, where the gap is 5 μm or less and S 4 or less and 50 μm or less.
In one embodiment of the present invention, at least two alignment marks are disposed between the opposite side of each cover plate 102 from the main frame 101 and the main frame 101, and the alignment marks may be a positioning block 501 and a positioning slot 502.
For example, four positioning blocks 501 are provided on the front side of the main frame 101, the four positioning blocks 501 are distributed in a rectangular shape, positioning grooves 502 are provided on the side of the cover plate 102 corresponding to the front side of the main frame 101 and the position corresponding to the positioning blocks 501, and when the positioning blocks 501 are mounted, the positioning blocks 502 are aligned with the positioning grooves 502 and then connected. The connection between the rear side of the main frame 101 and the cover 102 may be referred to as the connection between the front side, and the two structures may be the same.
In one embodiment of the present invention, the tuning fork driving device may be a tuning fork driving electrode 203, where the tuning fork driving electrode 203 is disposed on the interdigital finger 202, and is used to drive the interdigital finger 202 to vibrate.
The Q-value detecting electrode 300 is connected to the signal lead-out terminal of the housing by gold wire bonding or flip-chip bonding.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims (10)

1. A quartz tuning fork pressure sensor, comprising:
The shell is in a vacuum environment;
a frame connected to the inside of the housing;
A resonating tuning fork assembly including a tuning fork body and a tuning fork driving device, the tuning fork body being integrally formed with the frame, the tuning fork driving device being coupled to the tuning fork body for driving the tuning fork body to vibrate;
the Q value detection electrode is electrically connected with the tuning fork driving device and is used for detecting the tuning fork Q value;
the tuning fork main body and the frame are made of quartz and are identical in cutting;
When external pressure changes, the vacuum degree of the environment where the resonant tuning fork component and the frame structure are located changes, namely the vacuum degree in the shell changes, the air content in the shell changes due to the vacuum degree changes, damping changes, the Q value of the tuning fork changes due to the damping changes, the Q value of the tuning fork is detected and output by the Q value detection electrode, and the pressure changes can be obtained through the Q value changes.
2. The quartz tuning fork pressure sensor of claim 1, wherein the frame comprises a main frame body and a through slot extending through the main frame body, the tuning fork body being located within the through slot.
3. The quartz tuning fork pressure sensor of claim 2, wherein the tuning fork body comprises:
the base part and the main frame body are connected into an integrated structure through a connecting beam, and the connecting beam is arranged between the position of the main frame body at the bottom of the through groove and the bottom of the base part;
The two interdigital wheels are arranged in parallel and are arranged at the top of the base, and spaces for interdigital vibration are reserved between the two interdigital wheels and the inner side surface of the through groove.
4. The quartz tuning fork pressure sensor of claim 3, wherein the width of the connecting beam isThe tuning fork body has a thickness/>Wherein/>
5. The quartz tuning fork pressure sensor of claim 3, wherein an included angle is formed between an outer side surface of the interdigital finger in the width direction and an inner side surface of the through groove in the width direction and close to the interdigital finger, and a distance between an end of the interdigital finger far from the base and the inner side surface of the through groove is larger than a distance between an end of the interdigital finger close to the base and the inner side surface of the through groove.
6. The quartz tuning fork pressure sensor of claim 5, wherein the length of the fingers isThe vibration amplitude of the interdigital is/>The included angle between the outer side surface of the interdigital along the width direction and the inner side surface of the through groove along the width direction is/>Wherein/>
7. The quartz tuning fork pressure sensor of claim 3, wherein the frame further comprises two cover plates, the two cover plates respectively cover two sides of the through groove in the thickness direction, and a groove is formed in one side of the cover plate corresponding to the through groove.
8. The quartz tuning fork pressure sensor of claim 7, wherein a gap between a side of the interdigital finger proximate the cover plate and the cover plate isWherein/>
9. The quartz tuning fork pressure sensor of claim 7, wherein at least two alignment marks are provided between each cover plate and the main frame.
10. The quartz tuning fork pressure sensor of claim 1, wherein the tuning fork actuation means is a tuning fork actuation electrode.
CN202111433981.5A 2021-11-29 2021-11-29 Quartz tuning fork pressure sensor Active CN114199418B (en)

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CN213068629U (en) * 2020-07-17 2021-04-27 上海勋光电子科技有限公司 Vehicle-mounted road weather detection device
CN112909158A (en) * 2021-02-07 2021-06-04 北京大学 Organic piezoelectric film with enhanced force-electric sensitivity performance and preparation method thereof
CN214583784U (en) * 2020-11-09 2021-11-02 冯惠恒 Atmospheric pressure sensor using double tuning fork resonators
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US7010978B1 (en) * 1999-06-08 2006-03-14 Optiscan Pty Ltd. Electrically operated tuning fork
CN1526142A (en) * 2001-05-11 2004-09-01 ̩����ѧ��΢�����о��� Actuating and sensing device for scanning probe microscopes
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CN101666646A (en) * 2009-10-16 2010-03-10 中国人民解放军国防科学技术大学 Inclined double-end tuning-fork type silica micromechanical gyroscope and making method thereof
JP2013257174A (en) * 2012-06-11 2013-12-26 Vacuum Products Kk Manufacturing method of device having electrode film, and film formation apparatus
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