JP2010223666A - Force sensor element and force sensor device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a means for achieving a small force sensor element, having a small height and high sensitivity and a force sensor, at low cost. <P>SOLUTION: The force sensor element includes a tuning fork vibrator 5 including a pair of vibration beams 5a, 5b and a base part 7 connected to the vibration beams 5a, 5b; and a mass 10 formed on the same surface as the tuning fork vibrator 5, supported by the base part 7 via a flexible part 8, and a contact part 12 contactable by any one of the vibration beams 5a, 5b of the tuning fork vibrator 5. A gap is formed between the contact part 12 and the vibration beam 5a or 5b so that the contact part 12 is in contact with the vibration beam 5a or 5b, when the tuning fork vibrator 5 vibrates and the contact part 12 is not in contact with the vibration beam 5a or 5b, when the tuning fork vibrator 5 does not vibrate. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

The present invention relates to a force sensor element and a force sensor device, and more particularly to a force sensor element and a force sensor device that detect a change in vibration loss of a vibration element and sense a minute force.

A force detection element and a force sensor device using a relationship between a stress applied to a piezoelectric vibrator and a change in resonance frequency have been put into practical use. By using a double tuning fork type piezoelectric vibrator as the piezoelectric vibrator, sensitivity to stress is improved, and for example, altitude difference, depth difference, etc. can be detected from a slight change in force.
Patent Document 1 discloses an acceleration sensor element and an acceleration sensor using a double tuning fork type piezoelectric vibrator.
FIG. 6 is a diagram showing the configuration of the acceleration sensor element disclosed in Patent Document 1,
(a) is a top view of an acceleration sensor element, (b) is sectional drawing in QQ of (a).
In the acceleration sensor element 60 shown in FIG. 6, a concave portion 78 is formed by half-etching on the back surface of the Z-cut quartz crystal substrate 70, and further etched to form substantially rectangular through holes 73, 7 parallel to the Y axis.
4 and 75 are formed, and a double tuning fork type crystal vibrating element 80 having a pair of vibrating arms 81 and 85 having a thickness smaller than that of the peripheral edge portion is formed. Each of the vibrating arms 81 and 85 has Y on both sides.
Grooves are formed in the axial direction, and excitation electrodes are formed on the front and back surfaces and side surfaces.

When acceleration in the + Z direction is applied to the acceleration sensor element 60 shown in FIG. 6, the inertial force causes the fixed portion 71 to bend in the −Z direction, and the vibrating arms 81 and 85 are extended. Vibration arm 81, 85
Is extended, the resonance frequency of the double tuning fork vibrating element changes so as to increase. That is, the magnitude of acceleration can be measured from the difference between the resonance frequency of the acceleration sensor element 60 when acceleration is applied and the reference frequency.
On the other hand, when the acceleration in the −Z direction is applied, the vibrating arms 81 and 85 are compressed, and the resonance frequency of the double tuning fork vibrating element changes downward.
As described above, since the double tuning fork type vibrating piece 80 is formed to be biased in the + Z direction in the thickness direction, the vibrating arms 81 and 85 are stretched when bent in the −Z axis direction, so that the resonance frequency is high. Therefore, when the arm is bent in the + Z-axis direction, the resonance arms are lowered because the vibrating arms 81 and 85 are contracted. Therefore, it is disclosed that the direction and magnitude of the applied acceleration can be detected.

JP 2007-163244 A

However, the acceleration sensor element disclosed in Patent Document 1 has a problem that the detection sensitivity cannot be increased when the size is reduced.
In addition, since the piezoelectric substrate is etched in several degrees, it is difficult to reduce the cost.
Further, there is a problem that a reference frequency source is required when calculating force and acceleration.
The present invention has been made to solve the above-described problems, and it is an object of the present invention to provide a force sensor element and a force sensor device that can be downsized and have high sensitivity, that is, that can detect a small force. It is another object of the present invention to provide a force sensor element and a force sensor device that have a good manufacturing yield and can reduce costs.

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

Application Example 1 A tuning fork vibrator having a pair of vibration beams and a base connected to the vibration beam, and supported by the base via a flexible part, and vibration of any one of the tuning fork vibrators A mass body having a contact portion that can contact the beam, and when the tuning fork vibrator vibrates between the contact portion and the vibration beam, the contact portion contacts the vibration beam, and the tuning fork vibration The force sensor element is characterized in that a gap is formed in which the contact portion does not contact the vibration beam when the child is not vibrating.

In a stationary state (non-vibration), one vibration beam of the tuning fork vibrator and the contact portion of the mass body are separated from each other by a predetermined distance, and during excitation (vibration), one vibration beam and the contact portion are in contact with each other. Therefore, when a force in the direction of the tuning fork vibrator is applied to the mass body, the mass body bends in the direction of the tuning fork vibrator from the flexible portion, so that the contact portion is caused by one vibration beam. Since the contact is strong, the Q of the tuning fork vibrator decreases.
Further, when a force in the direction opposite to that of the tuning fork vibrator is applied to the mass body, the force that makes contact with one vibration beam at the contact portion is weakened, and thus the Q of the tuning fork vibrator increases. There is an effect that the magnitude and direction of the force can be detected by using the change in Q of the tuning fork vibrator.
In addition, it is easy to manufacture because it can be constructed on a flat substrate without the need for a reference frequency source.
There is also an effect that miniaturization is possible.

Application Example 2 The force sensor element according to Application Example 1, wherein the contact portion is formed by a protrusion.

By making the contact part a protrusion, the distance between one vibration beam of the tuning fork vibrator and the protrusion can be configured with high accuracy, the contact position where the protrusion contacts the tuning fork vibrator can be made constant, and the contact of the protrusion The variation in the amount of change in Q of the tuning fork vibrator can be reduced.

Application Example 3 As the mass body, a first that can come into contact with one vibration beam of the tuning fork vibrator.
A first mass body having a contact portion and a second mass body having a second contact portion capable of contacting the other vibration beam of the tuning fork vibrator, the first mass body and the base portion A first imaginary line connecting the first mass body and the base portion via a first flexible portion formed between the second mass body and the base portion. The first mass body and the second mass body are the base portion so that a second imaginary line connecting the second mass body and the base portion via the second flexible portion is orthogonal to each other. The force sensor element according to Application Example 1 or 2, wherein

The first and second imaginary lines connecting the first mass body and the base and the second imaginary line connecting the second mass and the base are orthogonal to the base of the pair of vibration beams. By providing this mass body, it is possible to simultaneously detect the magnitudes and directions of the forces Fx and Fy in the two-axis (X-axis and Y-axis) directions from the change in the Q value of the pair of vibration beams.

Application Example 4 The force sensor element according to Application Example 1 and an oscillation circuit that amplifies an output signal output from the vibration beam of the force sensor element are output from the vibration beam to the oscillation circuit. A force sensor device characterized in that a part of the output signal is detected output.

When a force sensor device including the force sensor element of Application Example 1 and an oscillation circuit that excites the tuning fork vibrator of the force sensor element is configured, the output obtained from the input side of the amplifier of the oscillation circuit is a sine wave, The voltage of the sine wave is related to the Q value of the tuning fork vibrator. By rectifying the sine wave voltage into a direct current, the magnitude and direction of the force applied to the force sensor element on the mass body can be detected from the magnitude of the direct current voltage. There is also an advantage that a reference frequency source is not required.

Application Example 5 The force sensor element according to Application Example 3, the first oscillation circuit that amplifies the first output signal output from the first vibration beam of the force sensor element, and the force sensor element A second oscillation circuit for amplifying a second output signal output from the second vibration beam;
A force sensor, wherein a part of the first and second output signals output from the first and second vibration beams to the first and second oscillation circuits, respectively, is detected output. Device.

The force sensor device includes a force sensor element described in Application Example 3 and a first of the force sensor elements.
And an oscillation circuit for exciting the second oscillation beam, and the magnitude of the force in the two-axis (X-axis and Y-axis) directions and the applied force from the changes in the first and second output voltages of the oscillation circuit It is possible to detect the direction of. There is also an advantage that a reference frequency source is not required.

It is the schematic which showed the structure of the force sensor element which concerns on this invention, (a) is a top view, (b) is a side view. It is a figure explaining a tuning fork vibrator, (a) is a top view and (b) is a sectional view. (A) And (b) is a circuit diagram which shows the structure of a 1st force sensor apparatus. It is the schematic which showed the structure of the 2nd force sensor element, (a) is a top view, (b) is a side view. It is a schematic circuit diagram which shows the structure of a 2nd force sensor apparatus. It is the figure which showed the structure of the conventional acceleration sensor element, (a) is a top view, (b) is sectional drawing.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic view showing a configuration of a force sensor element 1 according to an embodiment of the present invention, where FIG. 1 (a) is a plan view and FIG. 1 (b) is a side view.
The force sensor element 1 includes a tuning fork vibrator 5 having a pair of vibration beams 5a and 5b and a base 7 connected to the vibration beams 5a and 5b, and the same surface as the surface where the vibration beams 5a and 5b are arranged (tuning fork vibrator). 1 and is supported by the base portion 7 through the flexible portion 8 and is provided with either one of the vibration beams of the tuning fork vibrator 5, or 5b in the case of the embodiment of FIG. Contact part 1 that can be contacted
2 having a mass body 10.
The contact portion 12 and one vibration beam 5b of the tuning fork vibrator 5 are in a state where the tuning fork vibrator 5 is not excited, that is, when there is no vibration, a gap G of, for example, several μm is formed between the contact portion 12 and the vibration beam 5b. It is formed and has a structure that does not contact.
On the other hand, when the tuning fork vibrator 5 is excited, that is, when vibrating, the vibrating beam 5b of the tuning fork vibrator 5 is used.
, The gap G is formed so that the vibration beam 5 b slightly contacts the contact portion 12.

As an example of the force sensor element 1, a quartz substrate having a tuning fork vibrator 5 substrate and a mass body 10 shown in FIG. 1 is formed on a Z-cut quartz substrate using a photolithography technique and an etching technique. The force sensor element 1 is configured by forming an excitation electrode and a lead electrode by vapor deposition or sputtering. Note that an imaginary line connecting the mass body 10 and the base portion 7 via the flexible portion 8 formed between the mass body 10 and the base portion 7 is defined as Cy. The imaginary line Cy is the vibration beam 5a, 5
It is parallel to b and also to the Y axis. It is desirable that the mass of the mass body 10 in the figure from the imaginary line Cy and the mass in the figure below the imaginary line Cy are substantially equal. This is because when the force F acts on the mass body 10, the flexible portion 8 is not twisted.

2A and 2B are diagrams showing a configuration of a general tuning fork vibrator. FIG. 2A is a plan view and FIG. 2B is a cross-sectional view.
As shown in FIG. 2B, by applying voltages having different signs to the corresponding surfaces of the vibrating beams 5a and 5b, electric fields in opposite directions are generated in the vibrating beams 5a and 5b, respectively.
As shown by the curve in FIG. 2A, a bending vibration symmetric with respect to the center line Cc of the tuning fork vibrator can be excited.
The vibration amplitude of the vibration beams 5a and 5b is changed from the base 7 of the tuning fork vibrator 5 to the vibration beams 5a and 5b.
It becomes larger as it goes to the tip (right side in the figure). Therefore, the contact portion 12 provided in the mass body 10
And the position of contact with the vibration beam 5b, the position of the tuning fork vibrator 5 is changed little by little.
The change in value was examined. When the contact portion 12 is provided at a position near the tip of the vibration beam, the Q value of the tuning fork vibrator 5 is significantly reduced. If a contact position is provided near the base 7, the Q value hardly changes, and the tuning fork vibrator 5 can be continuously excited.
However, the closer to the base 7, the smaller the vibration amplitude, so the width of the gap G between the contact portion 12 and the vibration beam 5b in the static state (non-vibration) becomes narrow, and the machining accuracy of the gap G needs to be increased. There is.

The force sensor element 1 is one vibration beam 5b of the tuning fork vibrator 5 in a stationary state (when not vibrating).
And the contact portion 12 of the mass body 10 are spaced apart from each other by a predetermined distance so that one vibration beam 5b and the contact portion 12 are in contact with each other during excitation (during vibration). The tuning fork vibrator 5 of the force sensor element 1 is connected to an oscillation circuit and excited.
When a force in the direction of the tuning fork vibrator (+ X axis direction) is applied to the mass body 10, the mass body 10 becomes the flexible portion 8.
Is bent in the direction of the tuning fork vibrator 5 (+ X-axis direction), the contact portion 12 is more strongly brought into contact with one vibration beam 5b, so that the Q of the tuning fork vibrator 5 is lowered.
Further, when a force in the direction opposite to the tuning fork vibrator (−X axis direction) is applied to the mass body 10, the force that makes contact with one vibration beam 5 b of the contact portion 12 is weakened. Will grow. There is an effect that the magnitude and direction of the force can be detected by using the change in Q of the tuning fork vibrator 5. Moreover, since the force sensor element 1 can be configured using a flat thin plate, it is easy to manufacture and has an effect that it can be miniaturized.
Further, by making the contact portion 12 a protrusion, the distance between one vibration beam 5b of the tuning fork vibrator 5 and the protrusion can be configured with high accuracy, and the contact position where the protrusion contacts the tuning fork vibrator 5 is made constant. And the variation in the amount of change in Q of the tuning fork vibrator due to the contact of the protrusions can be reduced.

FIG. 3A is a circuit diagram showing a configuration of the first force sensor device 2.
The first force sensor device 2 includes output signals output from the first force sensor element 1 shown in FIG. 1A and the vibration beams 5a and 5b of the tuning fork vibrator 5 of the first force sensor element 1. And an oscillation circuit 30 that amplifies and oscillates.
As an example of the oscillation circuit 30, an amplifier Amp and a resistor R1 as shown by a broken line in FIG.
Are connected in parallel, and are connected by connecting capacitors C1 and C2 between the two connecting portions and the ground, respectively.
The first force sensor element 1 is connected in parallel between the input and the output of the amplifier Amp. On the output side of the amplifier Amp, the resonance frequency of the tuning fork vibrator 5 is output as a rectangular wave.
A sine wave having the same frequency is obtained at the output terminal OUT on the input side.
When the force sensor element 1 is connected to the oscillation circuit 30 shown in FIG. 3A and the tuning fork vibrator 5 is excited, the vibration beams 5a and 5b of the tuning fork vibrator 5 are excited in the bending vibration mode and the vibration beam 5b.
Repeats contact with the contact portion 12 of the mass body 10 at the resonance frequency of the fork vibrator 5. At this time, the output voltage waveform V obtained from the output terminal OUT of the oscillation circuit 30 is a curve P1 shown in FIG.
When a force F in the + X-axis direction is applied to the mass body 10 of the force sensor element 1 shown in FIG. 1A, the mass body 10 bends in the + X-axis direction around the flexible portion 8 by the force F, and the vibration beam 5b. Is more strongly in contact with the contact portion 12 of the mass body 10, the Q value of the tuning fork vibrator 5 decreases, and the oscillation circuit 30
The output voltage waveform V of the output terminal OUT becomes smaller as shown by the curve P3.

On the other hand, when a force F in the −X-axis direction is applied to the mass body 10, the mass body 10 is bent in the −X-axis direction around the flexible portion 8 by the force F, and the contact portion 12 between the vibration beam 5 b and the mass body 10. , The Q value of the tuning fork vibrator 5 increases, and the output voltage waveform V at the output terminal OUT of the oscillation circuit 30 increases as shown by the curve P2. By rectifying the output voltage V of the output terminal OUT to obtain the DC voltage Vf, the magnitude and direction of the force F applied to the mass body 10 can be detected from the magnitude of the voltage Vf.
In order to detect the magnitude of the force more accurately, a correspondence table between the force F and the output voltage Vf is stored in the memory of the force sensor device 1, and the magnitude of the force is obtained with reference to the correspondence table. It is good to.
When the force sensor device 2 including the force sensor element 1 shown in FIG. 1 and the oscillation circuit 30 for exciting the tuning fork vibrator 5 of the force sensor element 1 is configured, the force sensor device 2 is obtained from the input side of the amplifier Amp of the oscillation circuit 30. The output is a sine wave, and the voltage V of the sine wave is related to the Q value of the tuning fork vibrator. By rectifying the sine wave voltage V and converting it to DC, there is an effect that the magnitude of the force applied to the mass body 10 of the force sensor element 1 and its direction can be detected from the magnitude of the DC voltage. .

Moreover, the force sensor device 1 of FIG. 3 can also be used as an acceleration sensor device. FIG.
When acceleration α in the −X-axis direction is applied to the mass body 10 of the force sensor element 1 shown in FIG. 5A, a force F in the + X-axis direction (= α × m, m is the mass body 10 due to inertial force. Mass). The operation after the force F is applied is as described above. By dividing the force F by the mass m of the mass body 10, the force sensor device 1 can be used to detect the magnitude of acceleration and the direction of acceleration. However, since the mass body 10 of the force sensor element 1 shown in FIG. 1A has a small mass, when used as an acceleration sensor device, an additional mass may be attached to the mass body 10 to appropriately adjust the detection sensitivity.

FIG. 4A is a schematic diagram illustrating the configuration of the force sensor element 3 according to the second embodiment.
a) is a plan view, and FIG.
The force sensor element 3 of the second embodiment includes a first vibration beam 6a, 6b, a base 7 connected to the first and second vibration beams 6a, 6b, a first vibration beam 6a, It is formed on the same plane (on the same plane as the first and second vibrating beams 6a and 6b) with the second vibrating beam 6b, and is supported by the base 7 via the first flexible portion 8a. Along with the first vibration beam 6a
And a first mass body 10a having a first contact portion 12a that can come into contact with the first mass body 10a.
Further, the first vibration beam 6a and the second vibration beam 6b are formed on the same plane (on the same plane as the first and second vibration beams 6a and 6b), and the second flexible portion 8b. And a second contact portion 12b that is supported by the base portion 7 via the first contact portion 12b and can contact the second vibration beam 6b.
Mass body 10b.
The first and second oscillating beams 6a and 6b have substantially the same frequency, but the excitation electrode and the lead electrode have the first and second oscillating beams 6a, 6a, 6b, respectively, so that they are excited in independent bending vibration modes. 6b.

As shown in FIG. 4A, the first mass body 10a and the base portion 7 are connected via the first flexible portion 8a formed between the first mass body 10a and the base portion 7. Let 1 virtual line be Cy. A second imaginary line connecting the second mass body 10b and the base portion 7 through the second flexible portion 8b formed between the second mass body 10b and the base portion 7 is defined as Cx. First virtual line Cy and second virtual line Cx
The second force sensor element 3 is configured such that the first mass body 10 a and the second mass body 10 b are connected to the base portion 7 so as to be orthogonal to each other.
Between the first contact portion 12a (second contact portion 12b) and the first vibration beam 6a (second vibration beam 6b), the first and second vibration beams 6a and 6b are not excited, That is, when there is no vibration, a gap G of, for example, several μm is formed and has a structure that does not contact.
When the first and second vibrating beams 6a and 6b are excited, that is, when vibrating, the first vibrating beam 6a (second vibrating beam 6b) is excited in the bending vibration mode.
A gap G is formed so as to slightly contact 2a (second contact portion 12b).
Further, the mass of the upper part (left part) in the figure from the imaginary line Cy (Cx) of the first mass body 10a (second mass body 10b) and the lower part (right part) of the figure from the imaginary line Cy (Cx). It is desirable to make the mass approximately equal. This is the force Fx in the X direction applied to the first mass body 10a (second mass body 10b).
This is because when the (Y-direction force Fy) acts, the first flexible portion 8a (second flexible portion 8b) is not twisted.

When a force Fx (Fy) in the + X-axis direction (+ Y-axis direction) is applied to the first mass body 10a (second mass body 10b) shown in FIG. 4A, the second force sensor element 3 About operation | movement, it is the same as that of the operation | movement of the force sensor element 1 of Fig.1 (a). However, the difference from the force sensor element 1 shown in FIG. 1A is that, in the force sensor element 1, the pair of vibration beams 5a and 5b are excited in the tuning fork vibration mode, but the force of the second embodiment is different. In the sensor element 3, the first and second vibrating beams 6 a and 6 b are excited in independent bending modes, and the base 7 further includes a second
The flexible portion 8b is continuously provided, and the second mass body 10b is supported by the flexible portion 8b.
When the first vibration beam 6a (second vibration beam 6b) is excited, the first vibration beam 6a is excited.
Since the (second vibration beam 6b) bends and vibrates, the first vibration beam 6a (second vibration beam 6b) contacts the first contact portion 12a (second contact portion 12b), The contact is repeated at the resonance frequency of the first vibration beam 6a (second vibration beam 6b) and the vibration is continued. When a force Fx (Fy) is applied to the first mass body 10a (second mass body 10b), the Q value of the vibration beam 6a (6b) changes depending on the magnitude and direction of the force Fx (Fy). First vibrating beam 6
The magnitude and direction of the force applied to the first vibration beam 6a (second vibration beam 6b) can be detected from the change in the Q value of a (second vibration beam 6b).
A feature of the second force sensor element 3 is that it is configured so that the magnitudes and directions of the forces Fx and Fy in the two directions of the X axis and the Y axis can be detected simultaneously. There is also an advantage that a reference frequency source is not required.

FIG. 5 is a circuit diagram showing a configuration of the second sensor device.
The second sensor device 4 includes a second force sensor element 3 shown in FIG. 4A and an oscillation circuit 25 indicated by a broken line. The oscillation circuit 25 includes a first oscillation circuit and a second oscillation circuit.
The first oscillation circuit is a circuit obtained by serially connecting a parallel connection circuit of the amplifier A1 and the resistor R1, a parallel connection circuit of the amplifier A2 and the resistor R2, and a parallel connection circuit of the amplifier A3 and the resistor R3. Capacitors C1 and C2 are respectively connected between both ends of the capacitor and the ground, a connection point between the input side of the amplifier A1 and the capacitor C1 is connected to an input side of the amplifier B1, and an output side of the amplifier B1 is defined as an output terminal OUT1. Circuit. Two terminals (lead electrodes) of the first vibration beam 6a of the second force sensor element 3
Are connected to the output side of the amplifier A3 and the input side of the amplifier A1.
The second oscillation circuit is configured such that the output side of the amplifier A5 of the circuit obtained by connecting the parallel circuit of the amplifier A4 and the resistor R4 and the parallel circuit of the amplifier A5 and the resistor R4 is connected to the first oscillation circuit. Connected to the input side of the amplifier A3, a capacitor C3 is connected between the input side of the amplifier A4 and the ground, the input side of the amplifier B2 is connected to the connection point, and the output side of the amplifier B2 is used as the output terminal OUT2. Circuit. Two terminals (lead electrodes) of the second vibration beam 6b of the second force sensor element 3 are connected to the output side of the amplifier A3 and the input side of the amplifier A4.

Since the Q values of the first and second vibrating beams 6a and 6b of the second sensor element 3 change according to the applied force Fx in the X-axis direction and the force Fy in the Y-axis direction, the second sensor device 4, the output voltages (sine waves) of the output terminals OUT1 and OUT2 change as shown by curves P1 to P3 in FIG. By rectifying this output waveform and converting it to direct current, from the magnitude of the direct current voltage,
The magnitude and direction of the applied forces Fx and Fy can be detected.
The feature of the second sensor device 4 is that it can detect the magnitude of the force in the two-axis (X-axis, Y-axis) direction, the direction of the applied force, and a reference frequency source like the conventional force sensor device. It is a point that does not.

DESCRIPTION OF SYMBOLS 1, 3 ... Force sensor element 2, 2, 4 ... Force sensor apparatus, 5 ... Tuning fork vibrator, 5a, 5b ... Vibration beam, 6a ... First vibration beam, 6b ... Second vibration beam, 7 ... Base part, 8 ... flexible part,
8a ... first flexible part, 8b ... second flexible part, 10 ... mass body, 10a ... first mass body, 10
b ... 2nd mass body, 12 ... contact part, 12a ... 1st contact part, 12b ... 2nd contact part, 20
25, oscillation circuit, Amp, A1, A2, A3, A4, A5, B1, B2 ... amplifier, R1
, R3, R4, R5 ... resistors, C1, C2, C3 ... capacitance, OUT, OUT1, OUT2 ... output terminals

Claims (5)

A tuning fork vibrator having a pair of vibration beams and a base connected to the vibration beams;
A mass body supported by the base via a flexible portion and having a contact portion capable of contacting any one of the vibration beams of the tuning fork vibrator;
When the tuning fork vibrator vibrates between the contact portion and the vibration beam, the contact portion contacts the vibration beam, and when the tuning fork vibrator does not vibrate, the contact portion does not contact the vibration beam. A force sensor element characterized by forming a gap. The force sensor element according to claim 1, wherein the contact portion is formed by a protrusion. As the mass body, a first mass body having a first contact portion that can come into contact with one vibration beam of the tuning fork vibrator and a second contact portion that can come into contact with the other vibration beam of the tuning fork vibrator. A second mass body having
A first imaginary line connecting the first mass body and the base portion via a first flexible portion formed between the first mass body and the base portion; and the second mass body; The first mass body so that a second imaginary line connecting the second mass body and the base portion via the second flexible portion formed between the base portion and the base portion is orthogonal to each other. The force sensor element according to claim 1, wherein the second mass body is supported by the base portion. A force sensor element according to claim 1 and an oscillation circuit for amplifying an output signal output from the vibration beam of the force sensor element, wherein one of output signals output from the vibration beam to the oscillation circuit A force sensor device characterized in that a part is used as a detection output. 4. The force sensor element according to claim 3, a first oscillation circuit for amplifying a first output signal output from the first vibration beam of the force sensor element, and the second of the force sensor element.
And a second oscillation circuit for amplifying a second output signal output from the first oscillation beam, and the second oscillation signal output from the first and second oscillation beams to the first and second oscillation circuits, respectively. A force sensor device characterized in that a part of the first and second output signals is used as a detection output.

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