JP3189620B2 - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JP3189620B2 JP3189620B2 JP11238295A JP11238295A JP3189620B2 JP 3189620 B2 JP3189620 B2 JP 3189620B2 JP 11238295 A JP11238295 A JP 11238295A JP 11238295 A JP11238295 A JP 11238295A JP 3189620 B2 JP3189620 B2 JP 3189620B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- piezoelectric
- piezoelectric substrate
- electrode
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 49
- 230000001133 acceleration Effects 0.000 description 14
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 9
- 235000014676 Phragmites communis Nutrition 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 230000010355 oscillation Effects 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000942 Elinvar Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/40—Piezoelectric or electrostrictive devices with electrical input and electrical output, e.g. functioning as transformers
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Gyroscopes (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は圧電振動子に関し、特
にたとえば、加速度センサなどに用いられる圧電振動子
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibrator, and more particularly, to a piezoelectric vibrator used for, for example, an acceleration sensor.
【０００２】[0002]
【従来の技術】図６は従来の圧電振動子の一例を示す図
解図である。圧電振動子１は、短冊状の振動体２を含
む。振動体２の両主面には、圧電素子３ａ，３ｂが厚み
方向に対向するように形成される。圧電素子３ａ，３ｂ
は、それぞれ圧電体層を含み、圧電体層の両主面には、
電極がそれぞれ形成される。そして、圧電体層の一方主
面上の電極が振動体２の主面に接着される。また、圧電
素子３ａ，３ｂは、たとえば、それぞれ外側から振動体
２側へ厚み方向に分極されている。また、圧電素子３
ａ，３ｂには、それぞれリード線４ａ，４ｂが接続され
る。リード線４ａ，４ｂは、圧電素子３ａ，３ｂと、駆
動手段としての発振回路や検出手段としての差動増幅回
路などの外部回路とを接続するためのものである。2. Description of the Related Art FIG. 6 is an illustrative view showing one example of a conventional piezoelectric vibrator. The piezoelectric vibrator 1 includes a strip-shaped vibrator 2. On both main surfaces of the vibrating body 2, piezoelectric elements 3a and 3b are formed so as to oppose each other in the thickness direction. Piezoelectric elements 3a, 3b
Each include a piezoelectric layer, and on both main surfaces of the piezoelectric layer,
Electrodes are respectively formed. Then, an electrode on one main surface of the piezoelectric layer is bonded to the main surface of the vibrating body 2. The piezoelectric elements 3a and 3b are polarized in the thickness direction, for example, from the outside to the vibrating body 2 side. Also, the piezoelectric element 3
Lead wires 4a and 4b are connected to a and 3b, respectively. The lead wires 4a and 4b are for connecting the piezoelectric elements 3a and 3b to an external circuit such as an oscillation circuit as a driving unit and a differential amplifier circuit as a detecting unit.
【０００３】振動子２の長手方向における一端側には、
２つの断面略Ｌ字形状の支持部材５，５が形成される。
支持部材５，５は、振動体２の一端部近傍から振動体２
の幅方向に延びて、振動体２と一体的に形成される。こ
れらの支持部材５，５によって、この圧電振動子１は、
片持ち支持される。At one end of the vibrator 2 in the longitudinal direction,
Two support members 5 and 5 having a substantially L-shaped cross section are formed.
The supporting members 5 and 5 are provided near the vibrating body 2
And is formed integrally with the vibrating body 2. With these support members 5, 5, the piezoelectric vibrator 1
Cantilever supported.
【０００４】このような従来の圧電振動子１は、たとえ
ば加速度センサとして使用される。その場合には、支持
部材５，５を固定することによって振動体２の一端側が
支持される。そして、２つの圧電素子３ａ，３ｂにリー
ド線４ａ，４ｂを介して同位相の駆動信号を印加する
と、振動体２が長さ方向に振動する。その状態で、振動
体２の主面に直交する方向に加速度を加えると、加わっ
た加速度に応じて振動体２が圧電素子３ａおよび３ｂと
ともに撓み、その撓みに応じた電圧が圧電素子３ａおよ
び３ｂに発生する。発生した電圧は、リード線４ａ，４
ｂを介してたとえば差動増幅回路に入力される。そのた
め、圧電素子３ａおよび３ｂに発生する電圧の差を測定
することによって、加速度を測定することができる。[0004] Such a conventional piezoelectric vibrator 1 is used, for example, as an acceleration sensor. In that case, one end side of the vibrating body 2 is supported by fixing the supporting members 5 and 5. When driving signals having the same phase are applied to the two piezoelectric elements 3a and 3b via the lead wires 4a and 4b, the vibrating body 2 vibrates in the length direction. In this state, when acceleration is applied in a direction orthogonal to the main surface of the vibrating body 2, the vibrating body 2 bends together with the piezoelectric elements 3a and 3b in accordance with the applied acceleration, and a voltage corresponding to the bending is applied to the piezoelectric elements 3a and 3b. Occurs. The generated voltage is applied to the leads 4a, 4
The signal is input to, for example, a differential amplifier circuit via b. Therefore, the acceleration can be measured by measuring the difference between the voltages generated in the piezoelectric elements 3a and 3b.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、上述の
ような従来の圧電振動子は、部品点数が多く、組み立て
工数も多くなり、製造工程の合理化が困難であるという
問題があった。また、圧電振動子と外部回路とを電気的
に接続するためのリード線は、取扱いや接続作業に熟練
を要した。However, the conventional piezoelectric vibrator as described above has a problem in that the number of parts is large, the number of assembling steps is large, and it is difficult to rationalize the manufacturing process. In addition, the lead wire for electrically connecting the piezoelectric vibrator and the external circuit requires skill in handling and connection work.
【０００６】それゆえに、この発明の主たる目的は、部
品点数が少ない圧電振動子を提供することである。ま
た、この発明の他の目的は、外部回路との電気的接続に
リード線が不要な、圧電振動子を提供することである。Therefore, a main object of the present invention is to provide a piezoelectric vibrator having a small number of components. It is another object of the present invention to provide a piezoelectric vibrator which does not require a lead wire for electrical connection with an external circuit.
【０００７】[0007]
【課題を解決するための手段】この発明にかかる圧電振
動子は、板状の圧電体基板と、圧電体基板の厚み方向に
対向するようにして、圧電体基板の両主面にそれぞれ形
成され、導電性および恒弾性を有する複数の振動片とを
含む、圧電振動子である。A piezoelectric vibrator according to the present invention is formed on both main surfaces of a piezoelectric substrate so as to face a plate-like piezoelectric substrate and a thickness direction of the piezoelectric substrate. And a plurality of vibrating pieces having conductivity and constant elasticity.
【０００８】また、支持および電気的接続のための支持
部材が、振動片に一体的に接続される。 [0008] The support member for the support and electrical connections, Ru is integrally connected to the resonator element.
【０００９】さらに、支持部材は、振動片のノード部分
に一体的に形成される。 Furthermore, the support member, Ru is formed integrally with the node portion of the vibration piece.
【００１０】また、圧電体基板は、その厚み方向に分極
されることが好ましい。Preferably, the piezoelectric substrate is polarized in the thickness direction.
【００１１】さらに、圧電体基板は、長手方向両側が互
いに逆方向に分極されることが好ましい。Further, it is preferable that both sides in the longitudinal direction of the piezoelectric substrate are polarized in directions opposite to each other.
【００１２】[0012]
【作用】導電性を有する振動片間に電圧を印加すると、
圧電体基板が振動する。この圧電体基板の振動に伴っ
て、恒弾性を有する振動片も振動する。この状態で、圧
電振動子の主面に直交する方向に加速度が加わると、圧
電体基板および振動片に撓みが生じる。すると、圧電体
基板の共振特性が変化して、振動片間に電圧が発生す
る。この電圧を測定することにより、圧電振動子に加わ
った加速度を測定することができる。When a voltage is applied between vibrating pieces having conductivity,
The piezoelectric substrate vibrates. With the vibration of the piezoelectric substrate, the vibrating piece having constant elasticity also vibrates. In this state, when acceleration is applied in a direction perpendicular to the main surface of the piezoelectric vibrator, the piezoelectric substrate and the vibrating piece bend. Then, the resonance characteristic of the piezoelectric substrate changes, and a voltage is generated between the resonator elements. By measuring this voltage, the acceleration applied to the piezoelectric vibrator can be measured.
【００１３】また、支持および電気的接続のための支持
部材が、振動片に一体的に接続されるので、リード線を
介さずに支持部材によって圧電振動子と外部回路とを電
気的に接続することができる。[0013] The support member for the support and electrical connections, since it is integrally connected to the resonator element, electrically connects the piezoelectric vibrator and an external circuit by a support member not through the lead wire be able to.
【００１４】さらに、圧電振動子の支持部材が、振動片
のノード部分に一体的に形成されるので、圧電振動子お
よび振動片を、それらの振動を妨げずに支持することが
できる。Furthermore, the support member of the piezoelectric vibrator, since it is integrally formed with the node portion of the resonator element, it is possible to support the piezoelectric vibrator and the vibrating element, without interfering with their vibration.
【００１５】また、圧電体基板を厚み方向に分極した場
合には、長手方向に伸縮振動する圧電振動子を得ること
ができる。Further, when the piezoelectric substrate is polarized in the thickness direction, a piezoelectric vibrator that expands and contracts in the longitudinal direction can be obtained.
【００１６】さらに、圧電体基板を厚み方向に分極し、
かつ長手方向両側を互いに逆方向に分極した場合には、
長手方向の寸法がほとんど変化せずに伸縮振動する圧電
振動子を得ることができる。Further, the piezoelectric substrate is polarized in the thickness direction,
And when both sides in the longitudinal direction are polarized in opposite directions,
A piezoelectric vibrator that expands and contracts with little change in the longitudinal dimension can be obtained.
【００１７】[0017]
【発明の効果】この発明によれば、部品点数の少ない圧
電振動子を得ることができ、製造工程の合理化を図るこ
とができる。また、導電性を有する支持部材によって圧
電振動子と外部回路とを電気的に接続することができ
る。そのため、従来のようなリード線が不要となり、部
品点数の削減および構造の簡略化を図ることができ、製
造工程の合理化を図ることができる。According to the present invention, a piezoelectric vibrator having a small number of components can be obtained, and the manufacturing process can be rationalized. Further, the piezoelectric vibrator and the external circuit can be electrically connected by the support member having conductivity. Therefore, the conventional lead wire is not required, the number of parts can be reduced, the structure can be simplified, and the manufacturing process can be rationalized.
【００１８】この発明の上述の目的，その他の目的，特
徴および利点は、図面を参照して行う以下の実施例の詳
細な説明から一層明らかとなろう。The above objects, other objects, features and advantages of the present invention will become more apparent from the following detailed description of embodiments with reference to the drawings.
【００１９】[0019]
【実施例】図１はこの発明の一実施例を示す斜視図であ
る。この実施例の圧電振動子１０は、たとえば短冊状の
圧電体基板１２を含む。圧電体基板１２は、たとえば圧
電セラミックからなる。圧電体基板１２の一方主面に
は、短冊状の電極１４ａが全面に形成され、圧電体基板
１２の他方主面には、短冊状の電極１４ｂがほぼ全面に
形成される。圧電体基板１２の長手方向一端側は、図１
に一点鎖線で示すように、電極１４ｂから電極１４ａへ
と向かって分極され、長手方向他端側は、電極１４ａか
ら１４ｂへと向かって分極される。したがって、圧電体
基板１２の分極方向は、長手方向の略中央部で逆転す
る。FIG. 1 is a perspective view showing an embodiment of the present invention. The piezoelectric vibrator 10 of this embodiment includes, for example, a rectangular piezoelectric substrate 12. The piezoelectric substrate 12 is made of, for example, piezoelectric ceramic. On one main surface of the piezoelectric substrate 12, a strip-shaped electrode 14a is formed on the entire surface, and on the other main surface of the piezoelectric substrate 12, a strip-shaped electrode 14b is formed on almost the entire surface. FIG. 1 shows one end of the piezoelectric substrate 12 in the longitudinal direction.
As shown by a dashed line in FIG. 2, the electrode is polarized from the electrode 14b to the electrode 14a, and the other end in the longitudinal direction is polarized from the electrode 14a to 14b. Therefore, the polarization direction of the piezoelectric substrate 12 is reversed at a substantially central portion in the longitudinal direction.
【００２０】また、この圧電振動子１０は、短冊状の振
動片１６ａおよび１６ｂを含む。振動片１６ａは、圧電
体基板１２の一方主面に電極１４ａを覆うようにして形
成され、電極１４ａと電気的および機械的に接続され
る。振動片１６ｂは、圧電体基板１２の他方主面に電極
１４ｂを覆うようにして形成され、電極１４ｂと電気的
および機械的に接続される。振動片１６ａおよび１６ｂ
は、それぞれたとえば、ニッケル、鉄、クロム、チタン
あるいはそれらの合金、たとえばエリンバ、鉄−ニッケ
ル合金などの導電性を有する恒弾性金属材料で形成され
る。The piezoelectric vibrator 10 includes strip-shaped vibrating pieces 16a and 16b. The resonator element 16a is formed on one main surface of the piezoelectric substrate 12 so as to cover the electrode 14a, and is electrically and mechanically connected to the electrode 14a. The resonator element 16b is formed on the other main surface of the piezoelectric substrate 12 so as to cover the electrode 14b, and is electrically and mechanically connected to the electrode 14b. Vibrating bars 16a and 16b
Are formed of a conductive and constant elastic metal material such as nickel, iron, chromium, titanium or an alloy thereof, for example, an elinvar or an iron-nickel alloy.
【００２１】振動片１６ａの長手方向一端側のノード部
分には、幅方向両側に突き出るようにして、細長い棒状
の支持部材１８ａ，１８ａが一体的に形成される。ま
た、振動片１６ｂの長手方向他端側のノード部分には、
幅方向両側に突き出るようにして、細長い棒状の支持部
材１８ｂ，１８ｂが一体的に形成される。支持部材１８
ａおよび１８ｂは、振動片１６ａおよび１６ｂと同じ材
料で形成される。At the node portion at one end in the longitudinal direction of the vibrating reed 16a, elongated rod-shaped support members 18a, 18a are integrally formed so as to protrude to both sides in the width direction. Further, a node portion on the other end in the longitudinal direction of the vibrating reed 16b includes
The elongated rod-shaped support members 18b, 18b are integrally formed so as to protrude to both sides in the width direction. Support member 18
a and 18b are formed of the same material as the vibrating bars 16a and 16b.
【００２２】支持部材１８ａには、駆動手段としての発
振回路２０の一方端が電気的に接続され、支持部材１８
ｂには、発振回路２０の他方端が電気的に接続される。
同様にして、支持部材１８ａには、検出手段としての差
動増幅回路（図示せず）の一方端がリード線を介さずに
電気的に接続され、支持部材１８ｂには、差動増幅回路
の他方端がリード線を介さずに電気的に接続される。す
なわち、支持部材１８ａおよび１８ｂは、たとえば支持
基板（図示せず）に固着される。その際に、支持部材１
８ａおよび１８ｂの固着された支持基板の部分には、そ
れぞれ電極（図示せず）が形成される。これらの電極と
支持部材１８ａおよび１８ｂとが、たとえば半田付けや
溶接などの方法により接続される。そして、支持基板に
形成された電極には、パターン電極（図示せず）を介し
て発振回路２０や差動増幅回路などの外部回路が接続さ
れる。こうして圧電振動子１０は、支持部材１８ａおよ
び１８ｂによって電気的に接続されるとともに、機械的
に支持される。One end of an oscillation circuit 20 as driving means is electrically connected to the support member 18a.
The other end of the oscillation circuit 20 is electrically connected to b.
Similarly, one end of a differential amplifier circuit (not shown) as a detecting means is electrically connected to the support member 18a without passing through a lead wire, and the support member 18b is connected to the differential amplifier circuit. The other end is electrically connected without a lead wire. That is, the support members 18a and 18b are fixed to, for example, a support substrate (not shown). At this time, the support member 1
Electrodes (not shown) are formed on the portions of the support substrate 8a and 18b to which they are fixed. These electrodes and support members 18a and 18b are connected by, for example, soldering or welding. Then, external circuits such as the oscillation circuit 20 and the differential amplifier circuit are connected to the electrodes formed on the support substrate via pattern electrodes (not shown). Thus, the piezoelectric vibrator 10 is electrically connected by the support members 18a and 18b and is mechanically supported.
【００２３】次に、この圧電振動子１０をたとえば加速
度センサとして用いた場合について説明する。この圧電
振動子１０は、駆動信号を印加すれば長手方向に振動す
る。この場合、圧電体基板１２は、長手方向の略中央部
で分極方向が逆転するように分極されているため、長手
方向の一端側が伸びた際には、他端側が縮み、長手方向
の一端側が縮んだ際には、他端側が伸びるという振動を
交互に繰り返す。したがって、この圧電振動子１０は、
伸縮振動時に、長手方向の寸法がほとんど変化しない。
また、支持部材１８ａおよび１８ｂは、圧電振動子１０
のノード部分に形成される。そのため、この圧電振動子
１０は、振動漏れが少なく、安定に振動する。Next, a case where the piezoelectric vibrator 10 is used as, for example, an acceleration sensor will be described. This piezoelectric vibrator 10 vibrates in the longitudinal direction when a drive signal is applied. In this case, since the piezoelectric substrate 12 is polarized so that the polarization direction is reversed at a substantially central portion in the longitudinal direction, when one end in the longitudinal direction is extended, the other end is contracted, and the one end in the longitudinal direction is extended. When contracted, the vibration that the other end extends is alternately repeated. Therefore, this piezoelectric vibrator 10
During stretching vibration, the dimension in the longitudinal direction hardly changes.
Further, the support members 18a and 18b are
Is formed at the node portion of. Therefore, the piezoelectric vibrator 10 has a small vibration leakage and vibrates stably.
【００２４】圧電振動子１０が振動している状態で、そ
の主面に直交する方向に加速度が加わると、圧電体基板
１２および振動片１６ａ，１６ｂに撓みが生じる。する
と、圧電体基板１２の共振特性が変化して、振動片１６
ａ，１６ｂ間に電圧が発生する。この電圧を検出手段で
測定することにより、圧電振動子１０に加わった加速度
を知ることができる。When acceleration is applied in a direction perpendicular to the main surface of the piezoelectric vibrator 10 while vibrating, the piezoelectric substrate 12 and the vibrating pieces 16a and 16b bend. Then, the resonance characteristic of the piezoelectric substrate 12 changes, and the resonator element 16
A voltage is generated between a and 16b. By measuring this voltage with the detecting means, the acceleration applied to the piezoelectric vibrator 10 can be known.
【００２５】この実施例によれば、従来に比べて部品点
数の少ない圧電振動子を得ることができ、製造工程の合
理化を図ることができる。また、この実施例の圧電振動
子１０は、導電性を有する支持部材１８ａおよび１８ｂ
によって圧電振動子１０と外部回路とを電気的に接続す
ることができる。そのため、従来のようなリード線が不
要となり、部品点数の削減および構造の簡略化、製造工
程の簡略化を図ることができる。According to this embodiment, it is possible to obtain a piezoelectric vibrator having a smaller number of parts as compared with the prior art, and it is possible to streamline the manufacturing process. In addition, the piezoelectric vibrator 10 of this embodiment has conductive supporting members 18a and 18b.
Accordingly, the piezoelectric vibrator 10 and an external circuit can be electrically connected. This eliminates the need for a conventional lead wire, thereby reducing the number of components, simplifying the structure, and simplifying the manufacturing process.
【００２６】なお、上述の圧電体基板１２としては、２
つの短冊状の圧電体基板を組み合わせて形成してもよ
い。その場合には、長手方向の一端側の圧電体基板の分
極方向と、他端側の圧電体基板の分極方向とを逆向きに
形成することにより、上述と同様の効果を得ることがで
きる。The above-mentioned piezoelectric substrate 12 includes
It may be formed by combining two strip-shaped piezoelectric substrates. In this case, the same effect as described above can be obtained by forming the polarization direction of the piezoelectric substrate at one end in the longitudinal direction opposite to the polarization direction of the piezoelectric substrate at the other end.
【００２７】図２は、図１に示す圧電振動子の変形例を
示す斜視図である。図１に示す実施例と比べて、図２に
示す圧電振動子１０の支持部材１８ａは、振動片１６ａ
の長手方向の一端部から幅方向両側に突き出るようにし
て形成される。また、図２に示す圧電振動子１０の支持
部材１８ｂは、振動片１６ｂの長手方向の一端側におい
て、全長の約１／４の部分の幅方向両側に突き出るよう
にして形成される。図２に示す圧電振動子１０をたとえ
ば加速度センサとして用いた場合にも、図１に示す実施
例と同様に動作する。図２に示す実施例でも、従来に比
べて部品点数の少ない圧電振動子を得ることができる。
また、従来のようなリード線が不要となり、部品点数の
削減および構造の簡略化、および製造工程の合理化を図
ることができる。FIG. 2 is a perspective view showing a modification of the piezoelectric vibrator shown in FIG. Compared with the embodiment shown in FIG. 1, the support member 18a of the piezoelectric vibrator 10 shown in FIG.
Are formed to protrude from both ends in the width direction from one end in the longitudinal direction. The support member 18b of the piezoelectric vibrator 10 shown in FIG. 2 is formed so as to protrude from one end of the vibrating reed 16b in the longitudinal direction on both sides in the width direction of about の of the entire length. When the piezoelectric vibrator 10 shown in FIG. 2 is used as, for example, an acceleration sensor, the operation is the same as in the embodiment shown in FIG. Also in the embodiment shown in FIG. 2, it is possible to obtain a piezoelectric vibrator having a smaller number of components than the conventional one.
Further, the conventional lead wire is not required, so that the number of parts can be reduced, the structure can be simplified, and the manufacturing process can be rationalized.
【００２８】図３は、図１に示す圧電振動子の他の変形
例を示す斜視図である。図３に示す圧電振動子１０の支
持部材１８ａおよび１８ｂは、図１に示す実施例と比べ
て、振動片１６ａおよび１６ｂの長手方向の略中央部か
ら幅方向両側に突き出るようにして形成される。圧電体
基板１２は、図３に一点鎖線で示すように、電極１４ｂ
から電極１４ａへと向かって分極される。図３に示す圧
電振動子１０をたとえば加速度センサとして用いた場合
には、圧電振動子１０はその長手方向に伸縮振動する。
そして、その状態で、圧電振動子１０の主面に直交する
方向に加速度が加わると、圧電体基板１２および振動片
１６ａ，１６ｂに撓みが生じる。すると、圧電体基板１
２の共振特性が変化し、振動片１６ａ，１６ｂ間に電圧
が発生する。この電圧を検出手段で測定することによ
り、圧電振動子１０に加わった加速度を知ることができ
る。図３に示す実施例でも、従来に比べて部品点数の少
ない圧電振動子を得ることができる。また、従来のよう
なリード線が不要となり、部品点数の削減および構造の
簡略化、および製造工程の合理化を図ることができる。FIG. 3 is a perspective view showing another modification of the piezoelectric vibrator shown in FIG. The support members 18a and 18b of the piezoelectric vibrator 10 shown in FIG. 3 are formed so as to protrude from both sides in the width direction from substantially the center in the longitudinal direction of the vibrating pieces 16a and 16b, as compared with the embodiment shown in FIG. . As shown by a dashed line in FIG.
To the electrode 14a. When the piezoelectric vibrator 10 shown in FIG. 3 is used as, for example, an acceleration sensor, the piezoelectric vibrator 10 expands and contracts in its longitudinal direction.
In this state, when acceleration is applied in a direction orthogonal to the main surface of the piezoelectric vibrator 10, the piezoelectric substrate 12 and the vibrating pieces 16a and 16b bend. Then, the piezoelectric substrate 1
2 changes, and a voltage is generated between the resonator elements 16a and 16b. By measuring this voltage with the detecting means, the acceleration applied to the piezoelectric vibrator 10 can be known. Also in the embodiment shown in FIG. 3, it is possible to obtain a piezoelectric vibrator having a smaller number of components than the conventional one. Further, the conventional lead wire is not required, so that the number of parts can be reduced, the structure can be simplified, and the manufacturing process can be rationalized.
【００２９】図４は、図１に示す圧電振動子のさらに他
の変形例を示す斜視図である。図４に示す圧電振動子１
０は、図１に示す実施例と比べて、平面正方形の圧電体
基板１２を含む。圧電体基板１２の一方主面には、電極
１４ａが全面に形成され、圧電体基板１２の他方主面に
は、電極１４ｂが全面に形成される。圧電体基板１２
は、図４に一点鎖線で示すように、電極１４ｂから電極
１４ａへと向かって分極される。FIG. 4 is a perspective view showing still another modification of the piezoelectric vibrator shown in FIG. Piezoelectric vibrator 1 shown in FIG.
Reference numeral 0 includes a piezoelectric substrate 12 having a square planar shape as compared with the embodiment shown in FIG. On one main surface of the piezoelectric substrate 12, an electrode 14a is formed on the entire surface, and on the other main surface of the piezoelectric substrate 12, an electrode 14b is formed on the entire surface. Piezoelectric substrate 12
Are polarized from the electrode 14b toward the electrode 14a, as shown by the dashed line in FIG.
【００３０】また、図４に示す圧電振動子１０は、図１
に示す実施例と比べて、平面正方形の振動片１６ａおよ
び１６ｂを含む。振動片１６ａは、圧電体基板１２の一
方主面に電極１４ａを覆うようにして形成され、電極１
４ａと電気的および機械的に接続される。振動片１６ｂ
は、圧電体基板１２の他方主面に電極１４ｂを覆うよう
にして形成され、電極１４ｂと電気的および機械的に接
続される。Further, the piezoelectric vibrator 10 shown in FIG.
As compared with the embodiment shown in FIG. The vibrating reed 16a is formed on one main surface of the piezoelectric substrate 12 so as to cover the electrode 14a.
4a is electrically and mechanically connected. Vibrating piece 16b
Is formed on the other main surface of the piezoelectric substrate 12 so as to cover the electrode 14b, and is electrically and mechanically connected to the electrode 14b.
【００３１】振動片１６ａには、対向する両辺から外側
に突き出るようにして、細長い棒状の支持部材１８ａ，
１８ａが一体的に形成される。また、振動片１６ｂに
は、他の対向する両辺から外側へ突き出るようにして、
支持部材１８ｂ，１８ｂが形成される。したがって、支
持部材１８ａ，１８ａは、支持部材１８ｂ，１８ｂと直
交する方向に延びる。さらに、振動片１６ａの一方主面
には、一方主面と直交する方向に延びる支持部材１８ｃ
が形成される。支持部材１８ｃは、振動片１６ａの主面
を略コ字状に切り欠き、その部分を引き起こして形成さ
れる。支持部材１８ｃも支持部材１８ａおよび１８ｂと
同様に、圧電振動子１０と外部回路との電気的接続、お
よび圧電振動子１０の機械的支持に用いられる。図４に
示す圧電振動子１０は、たとえば拡がり振動モードの圧
電振動子として用いることができる。図４に示す実施例
でも、従来に比べて部品点数の少ない圧電振動子を得る
ことができる。また、従来のようなリード線が不要とな
り、部品点数の削減および構造の簡略化、および製造工
程の合理化を図ることができる。The vibrating reed 16a protrudes outward from both sides facing each other, and has an elongated rod-shaped support member 18a,
18a are integrally formed. Also, the vibrating piece 16b is made to protrude outward from both opposite sides,
Support members 18b, 18b are formed. Therefore, the support members 18a, 18a extend in a direction orthogonal to the support members 18b, 18b. Further, a support member 18c extending in a direction orthogonal to the one main surface is provided on one main surface of the vibrating piece 16a.
Is formed. The support member 18c is formed by cutting out the main surface of the resonator element 16a in a substantially U-shape and raising the portion. Similarly to the support members 18a and 18b, the support member 18c is used for electrical connection between the piezoelectric vibrator 10 and an external circuit and for mechanical support of the piezoelectric vibrator 10. The piezoelectric vibrator 10 shown in FIG. 4 can be used, for example, as a piezoelectric vibrator in a spreading vibration mode. Also in the embodiment shown in FIG. 4, it is possible to obtain a piezoelectric vibrator having a smaller number of components than the conventional one. Further, the conventional lead wire is not required, so that the number of parts can be reduced, the structure can be simplified, and the manufacturing process can be rationalized.
【００３２】さらに、支持部材１８ａおよび１８ｂは、
図４に破線で示すように、振動片１６ａおよび１６ｂの
一方主面と直交する方向に折り曲げられて形成されても
よい。このような場合には、支持基板の形状や外部回路
に対応して、圧電振動子１０の機械的支持および電気的
接続が可能となる。Further, the supporting members 18a and 18b
As shown by a broken line in FIG. 4, the vibrating bars 16a and 16b may be formed by being bent in a direction orthogonal to one main surface. In such a case, the piezoelectric vibrator 10 can be mechanically supported and electrically connected according to the shape of the support substrate and the external circuit.
【００３３】図５は、図１に示す圧電振動子の別の変形
例を示す斜視図である。図５に示す圧電振動子１０は、
図１に示す実施例と比べて、平面円形の圧電体基板１２
を含む。圧電体基板１２の一方主面には、円形の電極１
４ａが全面に形成され、圧電体基板１２の他方主面に
は、円形の電極１４ｂが全面に形成される。圧電体基板
１２は、図５に一点鎖線で示すように、電極１４ｂから
電極１４ａへと向かって分極される。FIG. 5 is a perspective view showing another modification of the piezoelectric vibrator shown in FIG. The piezoelectric vibrator 10 shown in FIG.
Compared to the embodiment shown in FIG.
including. A circular electrode 1 is provided on one main surface of the piezoelectric substrate 12.
4a is formed on the entire surface, and on the other main surface of the piezoelectric substrate 12, a circular electrode 14b is formed on the entire surface. The piezoelectric substrate 12 is polarized from the electrode 14b to the electrode 14a, as shown by a dashed line in FIG.
【００３４】また、図５に示す圧電振動子１０は、図１
に示す実施例と比べて、平面円形の振動片１６ａおよび
１６ｂを含む。振動片１６ａは、圧電体基板１２の一方
主面に電極１４ａを覆うようにして形成され、電極１４
ａと電気的および機械的に接続される。振動片１６ｂ
は、圧電体基板１２の他方主面に電極１４ｂを覆うよう
にして形成され、電極１４ｂと電気的および機械的に接
続される。The piezoelectric vibrator 10 shown in FIG.
As compared with the embodiment shown in FIG. The vibrating piece 16a is formed on one main surface of the piezoelectric substrate 12 so as to cover the electrode 14a.
a and electrically and mechanically. Vibrating piece 16b
Is formed on the other main surface of the piezoelectric substrate 12 so as to cover the electrode 14b, and is electrically and mechanically connected to the electrode 14b.
【００３５】振動片１６ａには、直径方向の両外側に突
き出るようにして、細長い棒状の支持部材１８ａ，１８
ａが一体的に形成される。また、振動片１６ｂには、支
持部材１８ａ，１８ａと直交する方向に延びる方向に、
直径方向両外側へ突き出るようにして、支持部材１８
ｂ，１８ｂが形成される。図４に示す圧電振動子１０
は、図３に示す実施例と同様に動作する。図４に示す実
施例でも、従来に比べて部品点数の少ない圧電振動子を
得ることができる。また、従来のようなリード線が不要
となり、部品点数の削減および構造の簡略化、および製
造工程の合理化を図ることができる。Each of the vibrating bars 16a has a long and narrow rod-like support member 18a, 18a protruding outward on both sides in the diameter direction.
a is integrally formed. In addition, the vibrating reed 16b has a direction in which it extends in a direction orthogonal to the support members 18a, 18a.
The support member 18 is projected so as to protrude diametrically on both sides.
b, 18b are formed. Piezoelectric vibrator 10 shown in FIG.
Operates similarly to the embodiment shown in FIG. Also in the embodiment shown in FIG. 4, it is possible to obtain a piezoelectric vibrator having a smaller number of components than the conventional one. Further, the conventional lead wire is not required, so that the number of parts can be reduced, the structure can be simplified, and the manufacturing process can be rationalized.
【図１】この発明の一実施例を示す斜視図である。FIG. 1 is a perspective view showing an embodiment of the present invention.
【図２】図１に示す圧電振動子の変形例を示す斜視図で
ある。FIG. 2 is a perspective view showing a modification of the piezoelectric vibrator shown in FIG.
【図３】図１に示す圧電振動子の他の変形例を示す斜視
図である。FIG. 3 is a perspective view showing another modified example of the piezoelectric vibrator shown in FIG.
【図４】図１に示す圧電振動子のさらに他の変形例を示
す斜視図である。FIG. 4 is a perspective view showing still another modification of the piezoelectric vibrator shown in FIG.
【図５】図１に示す圧電振動子の別の変形例を示す斜視
図である。FIG. 5 is a perspective view showing another modified example of the piezoelectric vibrator shown in FIG.
【図６】従来の圧電振動子の一例を示す斜視図である。FIG. 6 is a perspective view showing an example of a conventional piezoelectric vibrator.
１０ 圧電振動子 １２ 圧電体基板 １４ａ，１４ｂ 電極 １６ａ，１６ｂ 振動片 １８ａ，１８ｂ，１８ｃ 支持部材 DESCRIPTION OF SYMBOLS 10 Piezoelectric vibrator 12 Piezoelectric substrate 14a, 14b Electrode 16a, 16b Vibrating piece 18a, 18b, 18c Support member
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) G01P 15/09 H01J 41/08 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. 7 , DB name) G01P 15/09 H01J 41/08
Claims (3)
板の厚み方向に対向するようにして、前記圧電体基板の
両主面にそれぞれ形成され、導電性および恒弾性を有す
る複数の振動片を含むとともに、支持および電気的接続
のための支持部材が、前記振動片のノード部分に一体的
に接続される、圧電振動子。1. A plate-shaped piezoelectric substrate and a plurality of vibrations having conductivity and constant elasticity formed on both main surfaces of the piezoelectric substrate so as to face each other in the thickness direction of the piezoelectric substrate. Includes pieces , supports and electrical connections
Support member is integrated with the node portion of the vibrating piece.
Connected to the piezoelectric vibrator.
される、請求項１に記載の圧電振動子。2. The piezoelectric substrate is polarized in its thickness direction.
It is the piezoelectric vibrator according to claim 1.
に逆方向に分極される、請求項２に記載の圧電振動子。3. The piezoelectric substrate according to claim 1, wherein both sides in the longitudinal direction are mutually opposed.
The piezoelectric vibrator according to claim 2, wherein the piezoelectric vibrator is polarized in the opposite direction .
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11238295A JP3189620B2 (en) | 1995-04-12 | 1995-04-12 | Piezoelectric vibrator |
| DE19614369A DE19614369C2 (en) | 1995-04-12 | 1996-04-11 | Piezoelectric vibrator unit |
| GB9607687A GB2299861B (en) | 1995-04-12 | 1996-04-12 | Piezoelectric vibrator unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11238295A JP3189620B2 (en) | 1995-04-12 | 1995-04-12 | Piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08285882A JPH08285882A (en) | 1996-11-01 |
| JP3189620B2 true JP3189620B2 (en) | 2001-07-16 |
Family
ID=14585288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11238295A Expired - Lifetime JP3189620B2 (en) | 1995-04-12 | 1995-04-12 | Piezoelectric vibrator |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP3189620B2 (en) |
| DE (1) | DE19614369C2 (en) |
| GB (1) | GB2299861B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7812784B2 (en) | 2005-11-02 | 2010-10-12 | Chung Lung Chang | Headrest mounted entertainment system |
| US7894003B2 (en) | 2000-11-14 | 2011-02-22 | Chang Chung L | Flat thin screen TV/monitor automotive roof mount |
| US8388060B2 (en) | 2007-04-16 | 2013-03-05 | Chung Lung Chang | Headrest-mounted entertainment systems |
| US8585140B2 (en) | 2002-08-14 | 2013-11-19 | Chung L. Chang | Headrest-mounted monitor |
| KR101664553B1 (en) | 2014-08-20 | 2016-10-11 | 현대자동차주식회사 | Shielding apparatus for vehicle lamp |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2543928B1 (en) * | 2013-12-30 | 2016-05-31 | Zobele Espana Sa | Device for diffusion of volatile substances |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2441959A1 (en) * | 1978-11-16 | 1980-06-13 | Suisse Horlogerie | PIEZOELECTRIC DIAPASON RESONATOR |
| GB2143326B (en) * | 1983-07-14 | 1986-08-13 | Standard Telephones Cables Ltd | Surface acoustic wave accelerometer |
| JPS6146609A (en) * | 1984-08-10 | 1986-03-06 | Murata Mfg Co Ltd | Piezoelectric vibrator |
| DE3539504A1 (en) * | 1985-11-07 | 1987-05-21 | Schott Glaswerke | FLAT HOUSING FOR THE HERMETIC ENCLOSURE OF PIEZOELECTRIC COMPONENTS |
| DE3843143A1 (en) * | 1988-12-22 | 1990-06-28 | Bosch Gmbh Robert | SENSOR FOR DETERMINING THE ANGLE SPEED |
-
1995
- 1995-04-12 JP JP11238295A patent/JP3189620B2/en not_active Expired - Lifetime
-
1996
- 1996-04-11 DE DE19614369A patent/DE19614369C2/en not_active Expired - Lifetime
- 1996-04-12 GB GB9607687A patent/GB2299861B/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7894003B2 (en) | 2000-11-14 | 2011-02-22 | Chang Chung L | Flat thin screen TV/monitor automotive roof mount |
| US8585140B2 (en) | 2002-08-14 | 2013-11-19 | Chung L. Chang | Headrest-mounted monitor |
| US7812784B2 (en) | 2005-11-02 | 2010-10-12 | Chung Lung Chang | Headrest mounted entertainment system |
| US8388060B2 (en) | 2007-04-16 | 2013-03-05 | Chung Lung Chang | Headrest-mounted entertainment systems |
| KR101664553B1 (en) | 2014-08-20 | 2016-10-11 | 현대자동차주식회사 | Shielding apparatus for vehicle lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08285882A (en) | 1996-11-01 |
| GB9607687D0 (en) | 1996-06-12 |
| GB2299861B (en) | 1999-01-13 |
| DE19614369C2 (en) | 1998-03-19 |
| GB2299861A (en) | 1996-10-16 |
| DE19614369A1 (en) | 1996-10-24 |
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