JPH05322579A - Gyroscopic device - Google Patents

Abstract

PURPOSE:To detect input angular velocity on the basis of the change of the electrostatic capacity obtained from the detection electrodes corresponding to the respective wall surfaces of a gyroscopic device, especially, a vibrator having a square cross section. CONSTITUTION:In a gyroscopic device, the vibrator 1 supported on a support member 2 in a freely vibratory state and having a square cross section is used. The detection electrodes 3, 4 corresponding to the vibrator 1 are constituted of a silicon substrate along with the vibrator and input angular velocity is detected on the basis of the change of electrostatic capacity.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gyro device,
In particular, the present invention relates to a new improvement for providing a pair of detection electrodes corresponding to each wall surface of a vibrator having a quadrangular cross section and detecting an input angular velocity by a change in a pair of capacitances.

[0002]

2. Description of the Related Art Although a gyro device of this type that has been conventionally used is not shown here, for example, there is a mechanical structure disclosed in Japanese Utility Model Laid-Open No. 1-61611. it can.

[0003]

Since the conventional gyro device is constructed as described above, the following problems exist. That is, in the case of the conventional gyro device, since the displacement of the rotating body when the angular velocity is applied to the rotating body rotated by the motor is electrically detected by the torquer coil, the configuration becomes extremely complicated and the cost is reduced. And it was impossible to mass-produce as an inexpensive product.

The present invention has been made to solve the above problems, and in particular, provides a gyro device having a microminiature structure that detects displacement of a vibrator when an angular velocity is input as a difference in capacitance. The purpose is to do.

[0005]

A gyro device according to the present invention includes a vibrator which is supported by a support member in a vibrating state and has a quadrangular cross section, and a first parallel plate which corresponds to a first wall surface of the vibrator. A first detection electrode having a detection wall surface, a second detection electrode having a second detection wall surface parallel to the second wall surface of the vibrator, and an insulating substrate for supporting the detection electrodes are provided. It is a composition.

More specifically, the vibrator is cantilevered by the support member.

More specifically, in the recess of the insulating substrate, an electrode portion is formed corresponding to the bottom surface of the vibrator.

More specifically, the vibrator and each detection electrode are made of a silicon plate having a surface orientation of 110 planes and are formed by anisotropic etching.

More specifically, the vibrator is vibrated by a vibration generator provided on the insulating substrate.

More specifically, the configuration is such that a signal is applied between the vibrator and the electrode section to vibrate the vibrator.

[0011]

In the gyro device according to the present invention, a vibrator having a rectangular cross section and a pair of detection electrodes are provided on one surface of 110.
Since it has been obtained by anisotropically etching silicon having a plane orientation, each wall surface of the vibrator and each detection wall surface of each detection electrode are in a completely parallel state, and a capacitor for detecting electrostatic capacitance. It is possible to configure the air gaps that compose the above with high accuracy, and it is possible to detect the electrostatic capacitance with high accuracy. Therefore, in the above-mentioned configuration, when the input angular velocity is applied while the vibrator is vibrating, the vibrator vibrates in the lateral direction, and the difference in capacitance detected by each detection electrode at this time can be detected. The input angular velocity can be obtained by

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the gyro device according to the present invention will be described in detail below with reference to the drawings. 1 to 4
FIG. 1 is a schematic perspective view, FIG. 2 is a configuration diagram showing an angular velocity detection state, and FIG. 3 is a configuration diagram showing an assembly process.

In FIG. 1, reference numeral 1 is a vibrator having a quadrangular cross section and formed in a rod shape. This vibrator 1 is a cantilever type in which one end 1a is fixed to an insulating support member 2. It is configured.

A pair of first detection electrode 3 and second detection electrode 4 are provided on both sides of the vibrator 1 so as to hold the vibrator 1, and the first detection electrode 3 detects the first detection electrode 3 and the second detection electrode 4. wall 3a is disposed so as to hold the first distance D ₁ given in parallel to the first wall surface 1b of the vibrator 1. Also,
Second detection wall 4a of the second detection electrode 4 is arranged to hold a predetermined second distance D ₂ in parallel to the second wall surface 1c of the vibrator 1.

As shown in FIG. 3, the vibrator 1 and the detection electrodes 3 and 4 are made of a single crystal silicon wafer 10 having a surface orientation of 110 planes. After patterning, anisotropic etching is performed. Is applied to each wall 1 of the vibrator 1.
In b and 1c, 111 surfaces are exposed, and at the same time, each detection wall surface 3a,
4a also has 111 faces. Each wall surface 1b, 1 of the vibrator 1
c and the detection wall surfaces 3a and 4a of the detection electrodes 3 and 4 are in parallel with each other to form the first capacitor 20 and the second capacitor 21. In addition, each wall surface 1b, 1 described above
The c, 3a and 3b are configured vertically.

The detection electrodes 3 and 4 are attached to the surface 30a of an insulating substrate 30 made of glass, and the vibrator 1 is provided in a recess 31 formed in the insulating substrate 30. The electrode portion 32 is formed corresponding to the bottom surface 1d of the.

Therefore, the case where the input angular velocity is detected in the above-described configuration will be described. First, in order to vibrate the vibrator 1 from the outside, the vibrator 1 is vibrated by the vibration generator 40 such as a piezoelectric vibrator provided on the back surface of the insulating substrate 30, or an alternating current is applied between the vibrator 1 and the electrode portion 32. When an input angular velocity ω is applied from the outside while a vibrator 1 is vibrated by applying a drive signal composed of signals, a lateral vibration B is generated in the vibrator 1 as shown in FIG.

When the lateral vibration B of the vibrator 1 occurs, the distance D ₁ between the vibrator 1 and the detection electrodes 3 and 4 is
Since D ₂ changes, the electrostatic capacities C _A and C _{B of the} capacitors 20 and 21 change. Each capacitance C _A, by obtaining a difference _{C B (C A -C B)} , it is possible to detect the magnitude of the input angular velocity omega.

The electrode portion 32 can be used not only as an electrode for vibration, but also as a vibration amount sensing electrode for detecting the vibration amount of the vibrator 1.

[0020]

Since the gyro device according to the present invention is constructed as described above, the following effects can be obtained. Since the oscillator and the detection electrode are formed by anisotropic etching of silicon, the parallel state between the wall surfaces can be obtained with high precision, and the capacitance can be detected with high precision. Further, since the electrodes can be directly formed on the insulating substrate made of glass, the vibrating electrode and the vibration amount sensing electrode can be formed. Therefore, compared with the configuration of the conventional mechanical gyro, its mechanical configuration is greatly simplified, and by obtaining an ultra-compact, ultra-low price, ultra-light gyro, it can be applied to ultra-compact electronic devices. is there.

[Brief description of drawings]

FIG. 1 is a perspective view of a main part showing a schematic configuration of a gyro device according to the present invention.

FIG. 2 is an enlarged front view of FIG.

FIG. 3 is a schematic configuration diagram showing a manufacturing process of the gyro device according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 vibrator 1b 1st wall surface 1c 2nd wall surface 1d bottom surface 2 support member 3 1st detection electrode 4 2nd detection electrode part 3a 1st detection wall surface 4a 2nd detection wall surface 30 insulating substrate 31 recessed part 32 electrode part 40 vibration generator

[Procedure amendment]

[Submission date] July 1, 1992

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0012

[Correction method] Change

[Correction content]

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the gyro device according to the present invention will be described in detail below with reference to the drawings. 1 to 4
FIG. 1 is a schematic perspective view, FIG. 2 is a configuration diagram showing an angular velocity detection state, and FIG. 3 is a configuration diagram showing a gyro device according to the present invention.

[Procedure Amendment 2]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 3

[Correction method] Change

[Correction content]

[Figure 3]

Claims (6)

[Claims] 1. A vibrator (1) which is supported by a support member (2) in a freely vibrating state and has a quadrangular cross section, and the vibrator (1).
First detection electrode (3) having a first detection wall surface (3a) parallel to the first wall surface (1b) of the above, and the second wall surface (1c) of the vibrator (1).
And a second detection electrode (4) having a second detection wall surface (4a) parallel to each other, and an insulating substrate (30) for supporting the respective detection electrodes (3, 4). (1) A gyro device characterized in that an input angular velocity is detected by a change in a pair of capacitances existing between the respective wall surfaces (1b, 1c) and the respective detection electrodes (3, 4). 2. The gyro device according to claim 1, wherein the vibrator (1) is cantilevered by the support member (2). 3. The recessed portion (31) of the insulating substrate (30) is provided with an electrode portion (32) corresponding to the bottom surface (1d) of the vibrator (1). The gyro device according to Item 1. 4. The vibrator (1) and each of the detection electrodes (3, 4) are made of a silicon plate having a surface orientation of 110 planes, and are anisotropically etched. The gyro device according to claim 1. 5. A vibration generator (4) provided on the insulating substrate (30).
The gyro device according to claim 1, wherein the vibrator is vibrated by 0). 6. The gyro device according to claim 3, wherein a signal is applied between the vibrator (1) and the electrode portion (32) to vibrate the vibrator (1).