CN214583784U - Atmospheric pressure sensor using double tuning fork resonators - Google Patents
Atmospheric pressure sensor using double tuning fork resonators Download PDFInfo
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- CN214583784U CN214583784U CN202022556686.6U CN202022556686U CN214583784U CN 214583784 U CN214583784 U CN 214583784U CN 202022556686 U CN202022556686 U CN 202022556686U CN 214583784 U CN214583784 U CN 214583784U
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Abstract
The utility model relates to an use atmospheric pressure sensor of two tuning fork syntonizers, mainly used aircraft flying height's measurement and the flight atmosphere data system of aircraft also can be used to meteorological department's atmospheric pressure measurement. The utility model provides an use atmospheric pressure sensor of two tuning fork oscillators, the resonant frequency who utilizes two tuning forks is relevant with the vertical atress of two tuning forks, the piezoceramics piece that two sides plated the conductive metal layer is used to do the perception output element of tuning fork vibration excitation component and tuning fork vibration, the output signal with two tuning fork vibration perception piezoceramics pieces adds the input of an amplifier, and the output of amplifier adds the excitation piezoceramics piece of two tuning forks, and make amplifier input and output signal's phase place the same, when the amplification of amplifier is enough big, form the tuning fork oscillation circuit of a closed loop promptly, its oscillation frequency is the resonant frequency of two tuning forks promptly, this frequency is relevant with the vertical atress of two tuning forks, can experience atmospheric pressure's change.
Description
Technical Field
The utility model relates to an atmospheric pressure sensor using a double-tuning-fork resonator, which is mainly used for measuring the (air pressure) height and the airspeed (and Mach number) of an aircraft and is an important sensor of an airplane flight atmospheric data system; it can also be used for atmospheric pressure measurement in the meteorological department, and for pressure measurement of liquids.
Background
Barometric pressure sensors are widely used in many fields, for example, modern aircraft use barometric pressure sensors to measure the altitude and speed of the aircraft, and are used in flight atmosphere data systems of aircraft; the weather department uses atmospheric pressure sensors to measure ambient air pressure, etc. Atmospheric pressure sensors come in many forms, and in modern aircraft vibrating cylinder atmospheric pressure sensors are increasingly used. The vibrating cylinder type atmospheric pressure sensor consists of two coaxial thin-walled cylinders with single-end openings. One of them is an internal vibration cylinder, and the other is an external protection cylinder. The space of the inner vibration cylinder is communicated with the measured atmosphere, and the atmosphere is introduced into the cavity of the inner vibration cylinder. The wall of the inner vibrating tube is tensioned by the pressure acting on the inner surface of the inner vibrating tube, the tension enables the resonant frequency of the inner vibrating tube to change along with the change of the atmospheric pressure, and a closed-loop oscillating circuit is formed through an amplifying circuit. When the resonance frequency of the internal vibration cylinder changes, the frequency increment is directly detected, and the information is sent to the amplifier. Because the air pressure is introduced into the inner wall of the internal vibration cylinder, the resonance frequency of the internal vibration cylinder is not only related to the atmospheric pressure, but also related to the humidity of the air, and in severe cases, the overhigh humidity of the air can be dewed on the inner wall of the internal vibration cylinder at low temperature, so that the resonance frequency of the internal vibration cylinder and the atmospheric pressure do not keep the due correct relationship any more, and the obtained air pressure is not the actual air pressure any more.
Disclosure of Invention
In order to overcome not enough on using of current vibration section of thick bamboo formula atmospheric pressure sensor, the utility model provides an use atmospheric pressure sensor of two tuning fork syntonizers utilizes the resonant frequency of two tuning forks and the vertical atress of two tuning forks relevant, uses the sense element that two tuning forks regard as atmospheric pressure change. The piezoelectric ceramic plate is used as a double-tuning fork vibration exciting element and a double-tuning fork vibration sensing output element, and when an exciting signal is added to the exciting piezoelectric ceramic plate of the double-tuning fork, the sensing ceramic plate of the double-tuning fork can output a sensing signal. The output signal of the double-tuning-fork vibration sensing output piezoelectric ceramic piece is applied to the input end of an amplifier, the output end of the amplifier is applied to the double-tuning-fork excitation piezoelectric ceramic piece, and the phase positions of the input signal and the output signal of the amplifier are the same. When the amplification of the amplifier is large enough, a closed-loop tuning fork oscillation circuit is formed, and the oscillation frequency of the closed-loop tuning fork oscillation circuit is the resonance frequency of the double tuning fork, and the frequency is related to the longitudinal force of the double tuning fork. The utility model discloses the concrete technical scheme who takes is: the double tuning fork (5) is provided with 2 fork strands, two ends of the double tuning fork are provided with fixed supports (4 and 9), and the fixed support (4) at one end of the double tuning fork is welded with the circular corrugated diaphragm (3); the circular corrugated diaphragm (3) is welded on the sensor shell (12); the other end of the double tuning fork is fixedly supported (9) and is welded and fixed with the sensor shell (12); the two outer side surfaces of the excitation piezoelectric ceramic piece (6) and the sensing piezoelectric ceramic piece (10) are provided with metal coatings (silver or gold), each ceramic piece is provided with a (+ -) electrode, the piezoelectric ceramic pieces coated with conductive metal are bonded at the lower ends (close to the end head 9) of the two sides of the double-tuning fork (5) by glue, and the electrodes of the piezoelectric ceramic pieces are connected with the lead-out terminal pins (8) by thin wires (only 2 lead-out terminal pins are drawn on the attached drawing). One end fixing support (4) of a double tuning fork (5) pasted with a piezoelectric ceramic piece is welded with the circular corrugated diaphragm (3), the circular corrugated diaphragm (3) welded with the one end fixing support (4) of the double tuning fork (5) is welded with the sensor shell (12) and the atmosphere interface (1) by using a vacuum electron beam welding process, and an electrode lead of the piezoelectric ceramic piece is welded with a lead-out terminal pin (8). The welding of the mechanical parts of the sensor is carried out in a vacuum electron beam welding process mode, so that a cavity (11) where the double-tuning-fork sensitive element is positioned is a vacuum chamber. The pressure generated by the outside atmosphere to the circular corrugated diaphragm (3) through the atmosphere interface (1) and the atmosphere cavity (2) directly changes the longitudinal stress of the double tuning fork (5), so that the resonant frequency of the double tuning fork (5) is changed, namely the change of the resonant frequency of the double tuning fork is directly related to the atmospheric pressure.
The utility model has the advantages that: by utilizing the characteristic that the resonant frequency of the double tuning forks is related to the longitudinal stress of the double tuning forks, the double tuning fork resonator atmospheric pressure sensor can realize the measurement output of the frequency quantity (digitization) of the pressure of the atmospheric pressure sensor.
Drawings
The invention is further explained below with reference to the drawings and the examples. FIG. 1 is a schematic cross-sectional view of a dual tuning-fork resonator atmospheric pressure sensor, wherein 1 is an atmospheric interface; 2 is an atmospheric cavity; 3 is a circular corrugated diaphragm; 4, a fixed support of a double tuning fork; 5 is a double tuning fork; 6 is an excitation piezoelectric ceramic plate; 7 is a glass insulator with lead-out pins; 8 is an outgoing line pin; 9 is another fixed support of the double tuning fork; 10 is another piezoelectric ceramic piece of the double tuning fork; 11 is a vacuum chamber; 12 sensor housing. FIG. 2 is a front and side projection view of a dual tuning fork, wherein 3 is a fixed support; 5 is a double tuning fork; 7 and 8 are piezoelectric ceramic plates with metal coatings; and 9 is another fixed support.
Detailed Description
The utility model discloses the concrete technical scheme who takes is: the 2 ends of the double tuning fork are provided with fixed supports. A fixed support (9) at one end of the double tuning fork is welded and fixed with a sensor shell (12), and the other fixed support (4) of the double tuning fork is welded with the circular corrugated diaphragm (3); the circular corrugated diaphragm (3), the sensor shell (12) and the atmosphere interface (1) are welded together by using a vacuum electron beam welding process; metal coatings (silver or gold) are arranged on the surfaces of the two sides of the excitation piezoelectric ceramic piece (6) and the sensing piezoelectric ceramic piece (10), and metal thin wires serving as two electrodes of the piezoelectric ceramic pieces are respectively led out from the piezoelectric ceramic pieces; the piezoelectric ceramic plates with the surfaces plated with conductive metals on the two sides are adhered to the lower ends of the two sides of the double-tuning fork by glue, and the electrodes of the piezoelectric ceramic plates are connected with lead-out pins (8) by metal thin wires (only 2 lead-out pins are drawn on the attached drawing). The double tuning fork is made of nickel-based constant-elasticity alloy (such as 3J53) with good characteristics. A fixed support (4) at one end of the double-tuning-fork, which is pasted with the piezoelectric ceramic piece, is welded with the circular corrugated diaphragm (3), and the circular corrugated diaphragm (3) welded with the fixed support (4) is welded with the sensor shell (12) and the atmosphere interface (1). After the electrode lead of the piezoelectric ceramic piece and the lead pin (8) are completely welded, the circular corrugated diaphragm (3), the sensor shell (12) and the atmosphere interface (1) forming the atmosphere cavity (2) are welded together by using a vacuum electron beam welding process, at the moment, the pressure generated by the outside atmosphere on the circular corrugated diaphragm (3) through the atmosphere interface (1) and the atmosphere cavity (2) directly changes the longitudinal stress of the tuning fork, so that the resonant frequency of the tuning fork is changed, namely the change of the resonant frequency of the tuning fork is directly related to the atmospheric pressure.
Claims (2)
1. An atmospheric pressure sensor using a dual tuning fork resonator, comprising: the double tuning fork is used as a sensing element of atmospheric pressure change, 2 ends of the double tuning fork are provided with fixed supports, a fixed support (9) at one end of the double tuning fork is fixedly welded with a sensor shell (12), and the other fixed support (4) of the double tuning fork is welded with a circular corrugated diaphragm (3); the circular corrugated diaphragm (3), the sensor shell (12) and the atmosphere interface (1) are welded together by using a vacuum electron beam welding process.
2. The atmospheric pressure sensor using a dual tuning fork resonator as set forth in claim 1, wherein: the outer side surfaces of the excitation piezoelectric ceramic piece (7) and the sensing piezoelectric ceramic piece (8) are plated with conductive metal (silver or gold) which are respectively used as two electrodes of the piezoelectric ceramic pieces, the electrodes of the piezoelectric ceramic pieces are connected with lead-out pins (11) by thin wires (only 2 lead-out pins are drawn on the attached drawing), and the piezoelectric ceramic pieces with the outer side surfaces plated with the conductive metal are bonded at the lower ends of the two sides of the tuning fork by glue.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202022556686.6U CN214583784U (en) | 2020-11-09 | 2020-11-09 | Atmospheric pressure sensor using double tuning fork resonators |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202022556686.6U CN214583784U (en) | 2020-11-09 | 2020-11-09 | Atmospheric pressure sensor using double tuning fork resonators |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114199418A (en) * | 2021-11-29 | 2022-03-18 | 北京晨晶电子有限公司 | Quartz tuning fork pressure sensor |
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2020
- 2020-11-09 CN CN202022556686.6U patent/CN214583784U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114199418A (en) * | 2021-11-29 | 2022-03-18 | 北京晨晶电子有限公司 | Quartz tuning fork pressure sensor |
| CN114199418B (en) * | 2021-11-29 | 2024-05-10 | 北京晨晶电子有限公司 | Quartz tuning fork pressure sensor |
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