CN114193329B - Slurry utilization method for on-line recovery of abrasive disc - Google Patents
Slurry utilization method for on-line recovery of abrasive disc Download PDFInfo
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- CN114193329B CN114193329B CN202111501895.3A CN202111501895A CN114193329B CN 114193329 B CN114193329 B CN 114193329B CN 202111501895 A CN202111501895 A CN 202111501895A CN 114193329 B CN114193329 B CN 114193329B
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- 238000000034 method Methods 0.000 title claims abstract description 26
- 239000002002 slurry Substances 0.000 title claims abstract description 24
- 238000011084 recovery Methods 0.000 title claims abstract description 13
- 239000007788 liquid Substances 0.000 claims abstract description 100
- 239000004570 mortar (masonry) Substances 0.000 claims abstract description 60
- 238000002156 mixing Methods 0.000 claims abstract description 51
- 238000000227 grinding Methods 0.000 claims abstract description 36
- 239000002699 waste material Substances 0.000 claims abstract description 33
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 23
- 238000001914 filtration Methods 0.000 claims abstract description 13
- 230000008929 regeneration Effects 0.000 claims abstract description 4
- 238000011069 regeneration method Methods 0.000 claims abstract description 4
- 229910052742 iron Inorganic materials 0.000 claims abstract description 3
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims abstract 3
- 239000004576 sand Substances 0.000 claims description 35
- 230000005484 gravity Effects 0.000 claims description 25
- 238000003860 storage Methods 0.000 claims description 15
- 238000010009 beating Methods 0.000 claims description 13
- 239000000654 additive Substances 0.000 claims description 3
- 230000000996 additive effect Effects 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000004744 fabric Substances 0.000 claims description 3
- 230000001502 supplementing effect Effects 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 13
- 239000002245 particle Substances 0.000 abstract description 11
- 239000011863 silicon-based powder Substances 0.000 abstract description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 6
- 125000004122 cyclic group Chemical group 0.000 abstract description 5
- 238000000926 separation method Methods 0.000 abstract description 5
- 238000009826 distribution Methods 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 32
- 239000012535 impurity Substances 0.000 description 7
- 238000005086 pumping Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000000377 silicon dioxide Substances 0.000 description 4
- 235000013312 flour Nutrition 0.000 description 3
- 241000251468 Actinopterygii Species 0.000 description 2
- 229910001018 Cast iron Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010812 mixed waste Substances 0.000 description 2
- 238000003823 mortar mixing Methods 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 238000006748 scratching Methods 0.000 description 2
- 230000002393 scratching effect Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C1/00—Magnetic separation
- B03C1/02—Magnetic separation acting directly on the substance being separated
- B03C1/30—Combinations with other devices, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
Abstract
The invention discloses a method for utilizing slurry recycled by grinding plates on line, which comprises the following steps: s1, firstly, a diaphragm pump is started to extract a certain amount of waste mortar from a waste mortar buffer tank to a total recovery tank (RCV), iron powder in the waste mortar in the total recovery tank (RCV) is removed through an iron rust removing device (MGS), the treated waste liquid is sent to a grading mixing barrel (SEP), the grading mixing barrel (SEP) displays the proportion of the waste liquid received from the total recovery tank (RCV), and the treated waste liquid is sent to a regeneration mixing barrel (RMX) through a centrifugal machine for grading treatment. The invention can realize the full-flow electrified automatic control from the recovery and filtration to the mixing and proportioning, innovatively uses the water separation device to separate the silicon powder, monitors and automatically adjusts the proportion of each part in the process in real time, further controls the particle size distribution, the content of iron powder and silicon powder and the proportion of the circulating mortar, realizes the repeated cyclic utilization of the mortar, and finally achieves the purposes of improving the quality and reducing the cost.
Description
Technical Field
The invention relates to the technical field of control of mortar circulation systems, in particular to a slurry utilization method for online recovery of grinding plates.
Background
At present, in the silicon wafer grinding process, grinding sand (main components of alumina and silica) is matched with a grinding aid in a certain proportion, and then prepared new mortar moves relatively through a cast iron large disc of a grinding machine, grinding sand particles have a grinding effect on a silicon wafer in the grinding process, edges and corners of the grinding sand particles are ground flat, the particles become small or broken, and a part of silicon powder, cast iron powder and other large impurity particles are carried into waste mortar.
Original simple and easy mortar triaxial filter equipment passes through the filter screen and strong magnetic rod simply gets rid of great foreign particle and few part iron powder in the abandonment mortar, the regeneration thick liquid after retrieving still more impurity leads to the hard fish tail of silicon chip surface bad, after the waste mortar recycles a certain time, the mortar bucket wall, quicksand pipeline and dish groove pile up thick one deck black hard piece, the principal ingredients is iron powder and silica flour, and it is bad to drop along with the mortar flows and leads to the hard fish tail of silicon chip surface equally, cause very big influence to the product quality, filter the unable whole flow electronic automated control that realizes of mixture ratio from retrieving simultaneously, can't realize the innovation formula and use water separator with the silica flour separation, and each partial proportion real time monitoring of process and independently adjust.
Disclosure of Invention
The invention aims to provide a slurry utilization method for online recovery of grinding discs, which aims to solve the problems that the original simple mortar triaxial filtering device provided by the background technology simply removes larger impurity particles and a small part of iron powder in waste mortar through a filter screen and a strong magnetic rod, the recovered regenerated mortar still contains more impurities to cause poor hard scratching on the surface of a silicon wafer, after the waste mortar is recycled for a certain time, a thicker layer of black hard blocks are accumulated on the wall of a mortar barrel, a sand flowing pipeline and a disc groove, the main components of the black hard blocks are iron powder and silicon powder, the hard scratching on the surface of the silicon wafer is also caused by the fact that the black hard blocks drop along with the flowing of the mortar, the product quality is greatly influenced, the whole-flow electrified automatic control cannot be realized from the recovery and filtration to the mixing ratio, the silicon powder can not be separated by innovatively using a water separation device, and the specific gravity of each part in the process can be monitored in real time and automatically adjusted.
In order to achieve the purpose, the invention provides the following technical scheme: a method for utilizing slurry recycled by grinding plates on line comprises the following steps:
s1, firstly, starting a diaphragm pump to extract a certain amount of waste mortar from a waste mortar buffer tank to an RCV waste mortar mixing tank, removing iron powder from the waste mortar in RCV through an MGS device, delivering the treated waste liquid to an SEP mixing tank, displaying the specific gravity of the waste liquid received from the RCV waste tank, carrying out classification treatment through a centrifugal machine, delivering the treated waste liquid to an RMX mixing tank, adjusting the specific gravity of the recovered sand slurry refined and classified from the SEP through the RMX mixing tank, delivering the recovered sand slurry to a filter, starting the filtering device, filtering the recovered mortar output by the SEP, completing the filtration, cleaning filter cloth, starting classification, returning the classified specific gravity to the SEP mixing tank or returning the recovered sand slurry to the SEP mixing tank when the specific gravity is not ideal, if no abnormity exists, introducing the recovered sand in an old liquid storage tank into an RS-1 mixing tank, adding a grinding aid to the mortar according to a set proportion, maintaining the specific gravity to a corresponding range requirement, and delivering the mixed waste mortar to an RS-2 finished product tank.
S2, adding bagged F0 sand into a PWD sand storage tank, guiding the ground sand into a NMX new liquid blending barrel through an air pump, blending the new liquid blending barrel NMX according to a certain proportion, correcting to reach a set density in the process, guiding the blended new liquid into an NS new liquid storage barrel through the NMX new liquid blending barrel, and transmitting the new liquid by the NS according to a liquid level signal of an RS-2 finished product barrel.
And S3, finally mixing the NS fresh liquid and the RS-1 recovered liquid according to a certain volume proportion to meet the set density requirement, supplying the NS fresh liquid and the RS-1 recovered liquid to a machine table end through an air pump, circulating the NS fresh liquid and the RS-1 recovered liquid in a pipeline through a circulating pump, arranging a liquid pumping device at the machine table end liquid pumping machine table end, controlling the liquid pumping device in a key mode, connecting the liquid pumping device to a flow dividing pipeline of the RS-2 finished product barrel, adding a liquid level control line to a mortar barrel at the liquid pumping end to reach the corresponding liquid level, and automatically pausing the liquid pumping until the RS-2 does not continue to supply the liquid.
Preferably, the RMX tempering tank is required to adjust the specific gravity range of the recovered sand slurry refined and classified from the SEP to 1.23 to 1.25g/cc.
Preferably, the ratio of the new liquid blending barrel NMX is water: grinding sand: additive =30L:10KG:0.9L, and in the process, the set density is corrected to 1.23-1.25g/cc.
Preferably, the volume mixing ratio of the NS fresh solution to the RS-1 recovered solution is 1.3, and the set density requirement is 1.23-1.25g/cc.
Preferably, the working principle of removing iron powder by the MGS device is that the iron powder is adsorbed by an electromagnet, and a liquid level control line is added to a mortar barrel at a liquid beating end and is 300L.
Preferably, the grinding aid ratio mortar with the set proportion is equal to 0.03:1, and maintaining the specific gravity to be in the range of 1.25-1.27 g/cc.
Compared with the prior art, the invention has the beneficial effects that:
the invention can realize the full-flow electrified automatic control from the recovery and filtration to the mixing and proportioning, innovatively uses the water separation device to separate the silicon powder, monitors and automatically adjusts the proportion of each part in the process in real time, further controls the particle size distribution, the content of iron powder and silicon powder and the proportion of the circulating mortar, realizes the repeated cyclic utilization of the mortar, and finally achieves the purposes of improving the quality and reducing the cost.
Drawings
FIG. 1 is a D50 particle size parameter chart of the mortar for grinding chips of the present invention.
FIG. 2 is a viscosity parameter diagram of the grinding mortar of the present invention.
FIG. 3 is a process diagram of the circulation system of the present invention.
FIG. 4 is a comparison table of the defect rates of the mortar components of the present invention.
FIG. 5 is a comparative table of comprehensive cost of mortar with various components of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 to 5, a method for utilizing slurry recycled on-line from a grinding chip includes the steps of:
s1, firstly, starting a diaphragm pump to extract a certain amount of waste mortar from a waste mortar buffer tank to an RCV waste mortar mixing tank, removing iron powder from the waste mortar in RCV through an MGS device, delivering the treated waste liquid to an SEP mixing tank, displaying the specific gravity of the waste liquid received from the RCV waste tank, carrying out classification treatment through a centrifugal machine, delivering the treated waste liquid to an RMX mixing tank, adjusting the specific gravity of the recovered sand slurry refined and classified from the SEP through the RMX mixing tank, delivering the recovered sand slurry to a filter, starting the filtering device, filtering the recovered mortar output by the SEP, completing the filtration, cleaning filter cloth, starting classification, returning the classified specific gravity to the SEP mixing tank or returning the recovered sand slurry to the SEP mixing tank when the specific gravity is not ideal, if no abnormity exists, introducing the recovered sand in an old liquid storage tank into an RS-1 mixing tank, adding a grinding aid to the mortar according to a set proportion, maintaining the specific gravity to a corresponding range requirement, and delivering the mixed waste mortar to an RS-2 finished product tank.
S2, adding bagged F0 sand into a PWD sand storage tank, guiding the ground sand into a NMX new liquid blending barrel through an air pump, blending the new liquid blending barrel NMX according to a certain proportion, correcting to reach a set density in the process, guiding the blended new liquid into an NS new liquid storage barrel through the NMX new liquid blending barrel, and transmitting the new liquid by the NS according to a liquid level signal of an RS-2 finished product barrel.
And S3, finally mixing the NS fresh liquid and the RS-1 recovered liquid according to a certain volume proportion to meet the set density requirement, supplying the NS fresh liquid and the RS-1 recovered liquid to a machine table end through an air pump, circulating the NS fresh liquid and the RS-1 recovered liquid in a pipeline through a circulating pump, arranging a liquid beating device at the machine table end of the liquid beating device, controlling the liquid beating device in a key mode, connecting the liquid beating device to a diversion pipeline of an RS-2 finished product barrel, increasing a liquid level control line of a mortar barrel at the liquid beating end to reach a corresponding liquid level, automatically pausing the liquid beating, avoiding the RS-2 from continuously supplying liquid, realizing the cyclic recycling of the mortar by controlling the iron content and specific gravity of the cyclic mortar, filtering and removing impurities and using modes of the cyclic proportioning mortar of the finished product, and greatly reducing the production cost.
In this embodiment: the RMX mixing barrel adjusts the specific gravity range of the recovered sand slurry refined and graded from the SEP to be 1.23-1.25g/cc, so that the proportion of the recovered sand slurry is more accurate, and the integral utilization effect is improved.
In this embodiment: the proportion of the new liquid blending barrel NMX is water: grinding sand: additive =30L:10KG:0.9L, and in the process, the set density is corrected to 1.23-1.25g/cc.
In this embodiment: the volume mixing ratio of the NS new liquid and the RS-1 recovered liquid is 1.3, and the set density requirement is 1.23-1.25g/cc.
In this embodiment: the operating principle that the MGS device gets rid of the iron powder is for adsorbing through the electro-magnet, and beats the mortar bucket of liquid end and increase the liquid level control line and be 300L, can realize impurity separation to the mortar, gets rid of iron powder and silica flour more than 90%, filters the impurity particle who screens and be greater than certain particle size scope.
In this embodiment: setting the proportion of grinding aid to mortar equal to 0.03:1, and maintaining the specific gravity to be within the range of 1.25-1.27g/cc, adding grinding aid in the same proportion again to the recovered mortar, adjusting the specific gravity, and mixing with new sand in a certain proportion to form circulating proportioning mortar, thereby realizing uninterrupted recycling.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes, modifications, equivalents, improvements and the like can be made therein without departing from the spirit and scope of the invention.
Claims (6)
1. A method for utilizing slurry recycled on line by grinding plates is characterized by comprising the following steps: the slurry utilization method comprises the following steps:
s1, firstly, starting a diaphragm pump to extract a certain amount of waste mortar from a waste mortar buffer tank to a total recovery tank (RCV), removing iron powder from the waste mortar in the total recovery tank (RCV) through a rust removing device (MGS), sending the treated waste liquid to a grading mixing barrel (SEP), displaying the specific gravity of the waste liquid received from the total recovery tank (RCV), grading the waste liquid through a centrifuge, conveying the treated waste liquid to a regeneration mixing barrel (RMX), adjusting the specific gravity of the refined and graded recovered mortar liquid from the grading mixing barrel (SEP) through the regeneration mixing barrel (RMX), conveying the refined and graded recovered mortar liquid to a filter, starting the filter, filtering the recovered mortar output by the grading mixing barrel (SEP), completing filtering, starting grading after cleaning filter cloth, returning the graded specific gravity to the grading mixing barrel (SEP) when the specific gravity is lower than a target value or the specific gravity is adjusted, returning to the grading mixing barrel (SEP), if no abnormity, introducing the old liquid, introducing the recovered mortar into a recovered mortar density proportioning storage tank (RS-1) of the used liquid storage tank, setting the specific gravity ratio, adding a new grinding aid, and maintaining the mixed grinding aid in a mixed mortar-RS range after mixing of the grinding aid is not ideal grinding aid is completed;
s2, adding bagged grinding sand (F0) into a sand storage tank, introducing the grinding sand into a new liquid mixing barrel through an air pump, mixing the new liquid mixing barrel according to a certain proportion, supplementing and correcting in the process to reach a set density, introducing the mixed new liquid into a new liquid storage barrel (NS) through the new liquid mixing barrel, and transmitting the new liquid through the new liquid storage barrel (NS) according to a liquid level signal of a new and old sand mixed product barrel (RS-2);
and S3, finally, mixing the new liquid in a new liquid storage barrel (NS) and the recovered liquid in a recovered sand density ratio storage barrel (RS-1) according to a certain volume ratio to meet the set density requirement, supplying the mixed liquid to a machine table end through an air pump, circulating the mixed liquid in a pipeline through a circulating pump, arranging a liquid beating device at the machine table end, controlling the liquid beating device in a key mode, connecting the liquid beating device to a diversion pipeline of a new and old sand mixed product barrel (RS-2), increasing a liquid level control line to the mortar barrel at the liquid beating end to reach a corresponding liquid level, automatically pausing the liquid beating, and preventing the new and old sand mixed product barrel (RS-2) from continuously supplying the liquid.
2. The method for utilizing the slurry recycled by the grinding chip in line according to claim 1, characterized in that: the regenerated mixing barrel (RMX) is required to adjust the specific gravity range of the recovered sand slurry refined and classified from the classifying mixing barrel (SEP) to be 1.23-1.25g/cc.
3. The method for utilizing the slurry recycled by the grinding chip in line according to claim 1, characterized in that: the proportion of the new liquid mixing barrel is as follows: grinding sand: additive =30L:10KG:0.9L, and the density is adjusted to 1.23-1.25g/cc.
4. The method for utilizing slurry recycled by grinding chips in line according to claim 1, wherein: the new liquid storage barrel (NS) is used for storing the new liquid and the recovered sand, the density ratio of the new liquid to the recovered sand is 1.3, the volume mixing ratio of the recovered liquid in the storage barrel (RS-1) is 1.23-1.25g/cc, and the set density requirement is 1.23-1.25g/cc.
5. The method for utilizing the slurry recycled by the grinding chip in line according to claim 1, characterized in that: the working principle of removing iron powder by the iron rust removing device (MGS) is that the iron powder is adsorbed by an electromagnet, and a liquid level control line is increased to 300L by a mortar barrel at a liquid beating end.
6. The method for utilizing the slurry recycled by the grinding chip in line according to claim 1, characterized in that: the grinding aid ratio mortar with the set proportion is equal to 0.03:1, and maintaining the specific gravity to be in the range of 1.25-1.27 g/cc.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111501895.3A CN114193329B (en) | 2021-12-09 | 2021-12-09 | Slurry utilization method for on-line recovery of abrasive disc |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111501895.3A CN114193329B (en) | 2021-12-09 | 2021-12-09 | Slurry utilization method for on-line recovery of abrasive disc |
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| CN114193329A CN114193329A (en) | 2022-03-18 |
| CN114193329B true CN114193329B (en) | 2023-03-21 |
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| CN115282692B (en) * | 2022-07-19 | 2024-03-08 | 江阴萃科智能制造技术有限公司 | Grinding liquid filtering circulation method of grinding and polishing equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW546189B (en) * | 2002-06-21 | 2003-08-11 | Phoenix Silicon Int Corp | System and method for recycling polishing slurry |
| ITRM20050329A1 (en) * | 2005-06-24 | 2006-12-25 | Guido Fragiacomo | PROCEDURE FOR TREATING ABRASIVE SUSPENSIONS EXHAUSTED FOR THE RECOVERY OF THEIR RECYCLABLE COMPONENTS AND ITS PLANT. |
| ITRM20060692A1 (en) * | 2006-12-22 | 2008-06-23 | Garbo S R L | PROCEDURE FOR THE TREATMENT OF ABRASIVE SUSPENSIONS EXHAUSTED FROM THE LAPPING PROCESS FOR THE RECOVERY OF THE RECYCLABLE ABRASIVE COMPONENT AND ITS RELATIVE PLANT. |
| CN102295981B (en) * | 2011-07-26 | 2013-07-24 | 李欣 | Separation method of mortar generated in silicon chip cutting |
| CN202865196U (en) * | 2012-08-30 | 2013-04-10 | 江苏大阳光辅股份有限公司 | System for recovering cutting fluid and silicon carbide in waste mortar in silicon wafer cutting |
| CN203582627U (en) * | 2013-11-02 | 2014-05-07 | 东莞市亚美精密机械配件有限公司 | Cutting fluid filtering, purifying and regeneration system |
| CN205926577U (en) * | 2016-08-20 | 2017-02-08 | 王永娟 | Energy comprehensive utilization's online recovery system of mortar |
| CN206204023U (en) * | 2016-08-26 | 2017-05-31 | 福能科技江苏有限公司 | A kind of waste mortar recycle and reuse system |
| CN210819020U (en) * | 2019-09-04 | 2020-06-23 | 天津中环领先材料技术有限公司 | Polishing solution recovery device |
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Address after: 214000 Dongyi Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee after: Zhonghuan Leading Semiconductor Technology Co.,Ltd. Country or region after: China Address before: 214000 Dongyi Avenue, Yixing Economic and Technological Development Zone, Wuxi City, Jiangsu Province Patentee before: Zhonghuan leading semiconductor materials Co.,Ltd. Country or region before: China |