CN115282692B - Grinding liquid filtering circulation method of grinding and polishing equipment - Google Patents
Grinding liquid filtering circulation method of grinding and polishing equipment Download PDFInfo
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- CN115282692B CN115282692B CN202210848042.5A CN202210848042A CN115282692B CN 115282692 B CN115282692 B CN 115282692B CN 202210848042 A CN202210848042 A CN 202210848042A CN 115282692 B CN115282692 B CN 115282692B
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- water
- solution
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- 238000000227 grinding Methods 0.000 title claims abstract description 136
- 239000007788 liquid Substances 0.000 title claims abstract description 97
- 238000005498 polishing Methods 0.000 title claims abstract description 94
- 238000001914 filtration Methods 0.000 title claims abstract description 84
- 238000000034 method Methods 0.000 title claims abstract description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 95
- 239000002699 waste material Substances 0.000 claims abstract description 39
- 239000002910 solid waste Substances 0.000 claims abstract description 18
- 239000012530 fluid Substances 0.000 claims abstract description 17
- 238000005086 pumping Methods 0.000 claims abstract description 11
- 230000008929 regeneration Effects 0.000 claims abstract description 9
- 238000011069 regeneration method Methods 0.000 claims abstract description 9
- 239000000203 mixture Substances 0.000 claims abstract description 6
- 238000000926 separation method Methods 0.000 claims abstract description 6
- 238000009826 distribution Methods 0.000 claims description 30
- 239000002245 particle Substances 0.000 claims description 18
- 230000000844 anti-bacterial effect Effects 0.000 claims description 10
- 239000003899 bactericide agent Substances 0.000 claims description 10
- 238000004064 recycling Methods 0.000 claims description 8
- 239000003206 sterilizing agent Substances 0.000 claims description 8
- 244000005700 microbiome Species 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 125000004122 cyclic group Chemical group 0.000 abstract description 2
- 239000000243 solution Substances 0.000 description 55
- 238000001802 infusion Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000002637 fluid replacement therapy Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001502 supplementing effect Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D37/00—Processes of filtration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D36/00—Filter circuits or combinations of filters with other separating devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B04—CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
- B04B—CENTRIFUGES
- B04B5/00—Other centrifuges
- B04B5/10—Centrifuges combined with other apparatus, e.g. electrostatic separators; Sets or systems of several centrifuges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
The invention relates to a grinding fluid filtering and circulating method of grinding and polishing equipment, and belongs to the technical field of filtering water circulation. The method comprises the following steps: step one: pumping the primary waste liquid into a primary grinding and polishing primary filtering unit for primary filtering; pumping the secondary waste liquid into a secondary grinding and polishing primary filtering unit for primary filtering to form secondary circulating liquid, and automatically proportioning the secondary circulating liquid to form secondary grinding liquid; step two: the primary waste liquid after primary filtration is pumped to a primary polishing and polishing fine filtration unit for fine filtration to form a regenerated water mixture and primary circulating liquid; step three: the primary circulating liquid flows back to the primary grinding and polishing primary filtering unit, and is automatically proportioned to form primary grinding liquid; the regenerated water mixture flows into a water regeneration system to carry out solid-liquid separation to form regenerated water and solid waste; step four: the reclaimed water is collected in a shared water tank; the solid waste is introduced into a solid waste barrel. This application is retrieved waste liquid, is filtered, forms the lapping liquid after the back through the ratio, realizes lapping liquid cyclic utilization, practices thrift manufacturing cost.
Description
Technical Field
The invention relates to a grinding fluid filtering and circulating method of grinding and polishing equipment, and belongs to the technical field of filtering water circulation.
Background
The polishing device is widely used as polishing and buffing device in machining, and in the machining process of precision mechanical parts, in order to reduce the grinding and polishing difficulty of workpieces, grinding liquid is sprayed to the grinding surface of the workpieces to grind the workpieces. However, there is a problem in that the polishing liquid after use cannot be recovered and the polishing liquid is wasted in the polishing process.
Disclosure of Invention
The invention aims to solve the technical problem of providing a grinding liquid filtering and circulating method of grinding and polishing equipment aiming at the prior art, which can recover and filter the used grinding liquid, realize the recycling of the grinding liquid and save the production cost.
The invention solves the problems by adopting the following technical scheme: a method of filtering and circulating an abrasive liquid of a polishing apparatus, the method comprising the steps of:
step one: pumping the primary waste liquid generated by the primary grinding and polishing machine into a primary grinding and polishing primary filtering unit for primary filtering; pumping the secondary waste liquid generated by the secondary polishing machine into a secondary polishing primary filtering unit for primary filtering to form secondary circulating liquid, automatically proportioning the secondary circulating liquid to form secondary grinding liquid, and flowing the secondary grinding liquid to the secondary polishing machine for recycling;
step two: the primary waste liquid after primary filtration is pumped to a primary polishing and polishing fine filtration unit for fine filtration to form a regenerated water mixture and primary circulating liquid;
step three: the primary circulating liquid flows back to the primary grinding and polishing primary filtering unit, and is automatically proportioned to form primary grinding liquid, and then flows to the primary grinding and polishing machine for recycling; the regenerated water mixture flows into a water regeneration system to carry out solid-liquid separation to form regenerated water and solid waste;
step four: the reclaimed water is collected in a shared water tank, and is split into a primary grinding and polishing primary filtering unit and a secondary grinding and polishing primary filtering unit for use during automatic proportioning; the solid waste is introduced into a solid waste barrel.
The primary grinding and polishing primary filtering unit and the secondary grinding and polishing primary filtering unit respectively comprise a grinding and polishing water tank, a waste liquid filter and a solution distribution box, and waste liquid in the grinding and polishing water tank is pumped into the corresponding waste liquid filter for primary filtration and then flows to the corresponding solution distribution box; the grinding adding ports of the solution distribution boxes are respectively communicated with the corresponding grinding medium adding boxes through grinding medium pipelines, grinding medium control valves are respectively arranged on the grinding medium pipelines, the water adding ports of the solution distribution boxes are respectively communicated with the common water tank through respective water pipes, and water valves are respectively arranged on the water pipes; the concentration sensor, the particle size sensor and the water quality monitor are arranged in the solution distribution box, the concentration, the particle size and the water quality of the solution in the solution distribution box are detected and fed back to the control system, and then the opening and closing of the grinding medium control valve and the water valve are controlled.
The concentration sensor detects the concentration of the solution in the solution proportioning box in real time, and when the concentration Ct of the solution is in the range of 90-110% C, wherein C is the preset ideal grinding medium concentration, and the grinding medium control valve is closed; when the solution concentration Ct is less than or equal to 90 percent C, a control system controls a grinding medium control valve to be opened, grinding medium is added into a solution proportioning box, and the solution concentration Ct reaches 95 percent C, so that the grinding medium is stopped being added; when the solution concentration Ct is more than or equal to 110 percent C, the control system controls the water valve to be opened, the regenerated water is added into the solution proportioning box, the solution concentration is reduced, and when the solution concentration Ct is reduced to 105 percent C, the addition of the regenerated water is stopped.
The concentration sensor detects the concentration of the solution in the solution proportioning box at regular time, and then grinding medium and regenerated water are added to the solution distribution box at regular time:
the algorithm of the grinding medium addition amount is as follows:
Q C : the amount of grinding media added each time;
i: the ratio between the waste liquid flowing into each filter and the grinding medium;
Q 1 : filter input flow rate, m 3 /h；
Δ t : the time between two adjacent times of detection and water addition;
C 1 : the concentration of the solution after the filtration of the waste liquid filter;
ρ: the density of the solution after the filtration of the waste liquid filter;
the algorithm of the addition amount of the reclaimed water is as follows:
Q S : the amount of water to be added during the interval;
C 2 : the grinding media set the concentration.
The sterilizing agent adding box is respectively communicated with the corresponding solution distribution box through a sterilizing agent pipeline, and a sterilizing agent control valve is arranged on the sterilizing agent pipeline; the water quality monitor samples the solution and analyzes the microorganism quantity, and when the microorganism quantity contained in the sampled solution exceeds the preset value n/mL, the control system controls the opening of the bactericide control valve, so that the bactericide is quantitatively added into the corresponding solution distribution box.
The primary polishing fine filtering unit comprises a vibrating screen, primary waste liquid after primary filtering is pumped into the vibrating screen for fine filtering, and the vibrating screen is communicated with a solution distribution box of the primary polishing primary filtering unit.
The water regeneration system comprises a centrifugal separator, wherein the inlet of the centrifugal separator is communicated with the mixed liquid outlet of the reclaimed water of the vibrating screen, the solid waste outlet of the centrifugal separator is communicated with the solid waste bucket, and the reclaimed water outlet of the centrifugal separator is communicated with the public water tank.
And when the concentration of particles in the secondary circulating liquid in the first step exceeds 5um, pumping the secondary circulating liquid into a water regeneration system for solid-liquid separation.
Compared with the prior art, the invention has the advantages that: a grinding fluid filtration and circulation system for grinding and polishing equipment is used for recovering and filtering waste liquid generated by a grinding and polishing machine to form circulation liquid, and then the circulation liquid is proportioned to form grinding fluid, so that the circulation of the grinding fluid is realized in the corresponding grinding and polishing machine, and the production cost is saved.
Drawings
FIG. 1 is a flow chart of a method for filtering and circulating grinding fluid of a grinding and polishing device according to an embodiment of the invention;
Detailed Description
The invention is described in further detail below with reference to the embodiments of the drawings.
As shown in fig. 1, in the polishing apparatus according to the present embodiment, the polishing apparatus includes a primary polishing machine and a secondary polishing machine, the primary polishing machine corresponds to a large removal amount of a polishing surface, and the secondary polishing machine corresponds to a small removal amount of the polishing surface. The primary grinding and polishing machine and the secondary grinding and polishing machine adopt grinding particles with different particle sizes so as to achieve corresponding polishing effects. The particle size of the particles polished by the primary polishing machine is larger than that of the grinding particles; the particle size of the particles polished by the secondary polishing machine is small.
The grinding fluid filtering and circulating method comprises the following steps:
step one: pumping the first-stage waste liquid generated by the first-stage grinding and polishing machine into a first-stage grinding and polishing primary filtering unit for primary filtering through a first-stage waste liquid pump; and pumping the secondary waste liquid generated by the secondary polishing machine into a secondary polishing primary filtering unit through a secondary waste liquid pump for primary filtering to form secondary circulating liquid, automatically proportioning the secondary circulating liquid to form secondary grinding liquid, and then flowing to the secondary polishing machine for recycling.
Step two: and pumping the primary waste liquid after primary filtration into a primary polishing and polishing fine filtration unit for fine filtration to form reclaimed water mixed liquor and primary circulating liquor.
Step three: the primary circulating liquid flows back to the primary grinding and polishing primary filtering unit, the primary circulating liquid is automatically proportioned to form primary grinding liquid, and then flows to the primary grinding and polishing machine for recycling; and introducing the reclaimed water mixed solution into a water regeneration system for solid-liquid separation to form reclaimed water and solid waste.
Step four: the reclaimed water is collected in a shared water tank, and is split into a primary grinding and polishing primary filtering unit and a secondary grinding and polishing primary filtering unit for use during automatic proportioning; the solid waste is introduced into a solid waste barrel.
The primary polishing and primary filtering unit and the secondary polishing and primary filtering unit respectively comprise a polishing water tank, a waste liquid filter and a solution distribution box, and waste liquid in the polishing water tank is pumped into the corresponding waste liquid filter for primary filtering and then flows to the corresponding solution distribution box. The grinding adding ports of the solution distribution boxes are respectively communicated with the corresponding grinding medium adding boxes through grinding medium pipelines, and the grinding medium pipelines are respectively provided with grinding medium control valves. The water adding ports of the solution distribution box are respectively communicated with the common water tank through respective water pipes, and water valves are respectively arranged on the water pipes. The concentration sensor, the particle size sensor and the water quality monitor are respectively connected with the control system through signals, and detect the concentration, the particle size and the water quality of the solution in the solution distribution box and feed back to the control system, so as to control the opening and closing of the grinding medium control valve and the water valve, and further ensure that the concentration of the solution meets the corresponding grinding requirements.
Has the functions of monitoring fluid infusion in real time and detecting fluid infusion at fixed time during operation,
1. monitoring fluid replacement in real time (taking primary polishing as an example):
the concentration sensor detects the concentration of the solution in the solution proportioning box in real time (the actual sampling frequency can be set to be 5-10 min/time), and when the concentration Ct of the solution is in the range of 90-110% C, wherein C is the preset ideal grinding medium concentration, and the grinding medium control valve is closed; when the solution concentration Ct is less than or equal to 90 percent C, a control system controls a grinding medium control valve to be opened, grinding medium is added into a solution proportioning box, and the solution concentration Ct reaches 95 percent C, so that the grinding medium is stopped being added; when the solution concentration Ct is more than or equal to 110 percent C, the control system controls the water valve to be opened, the regenerated water is added into the solution proportioning box, the solution concentration is reduced, and when the solution concentration Ct is reduced to 105 percent C, the addition of the regenerated water is stopped.
2. The method comprises the steps of detecting and supplementing liquid at regular time, and adding grinding medium and regenerated water into a solution proportioning box at regular time:
the algorithm of the grinding medium addition amount is as follows:
Q C : the amount of grinding media added each time;
i: the ratio between the waste liquid flowing into each filter and the grinding medium;
Q 1 : filter input flow rate, m 3 /h；
Δ t : the time between two adjacent times of detection and water addition;
C 1 : the concentration of the solution after the filtration of the waste liquid filter;
ρ: density of the solution after filtration by the waste liquid filter.
The algorithm of the addition amount of the reclaimed water is as follows:
Q S : the amount of water to be added during the interval;
C 2 : the grinding media set the concentration.
The primary grinding and polishing primary filter unit and the secondary grinding and polishing primary filter unit are also provided with bactericide adding boxes which are respectively communicated with corresponding solution distribution boxes through bactericide pipelines, and the bactericide pipelines are provided with bactericide control valves. The water quality monitor samples the solution and analyzes the microorganism quantity, and when the microorganism quantity in the sampled solution exceeds the preset value n/mL, the control system controls the opening of the bactericide control valve, so that the bactericide is quantitatively added into the corresponding solution distribution box.
The primary polishing fine filtering unit comprises a vibrating screen, primary waste liquid after primary filtering is pumped into the vibrating screen for fine filtering, and the primary waste liquid is separated into primary circulating liquid (mixed liquid conforming to the range of grinding medium particles) and reclaimed water mixed liquid (mixed liquid larger than and smaller than the range of the grinding medium particles) after filtering. The vibrating screen is communicated with the solution distribution box of the primary grinding and polishing primary filtering unit, so that the primary circulating liquid flows to the primary grinding and polishing primary filtering unit for recycling.
And when the particle concentration of the secondary circulating liquid in the first step exceeds 5um, pumping the secondary circulating liquid into a water regeneration system for solid-liquid separation.
The water regeneration system comprises a centrifugal separator, wherein an inlet of the centrifugal separator is communicated with a mixed liquid outlet of the reclaimed water of the vibrating screen, a solid waste outlet of the centrifugal separator is communicated with a solid waste bucket, and a reclaimed water outlet of the centrifugal separator is communicated with a public water tank.
A hydraulic stirring pump is arranged in the solution distribution box to prevent the precipitation of grinding medium particles in the solution distribution box.
The waste liquid that this application can grind the machine of throwing and produce is retrieved, is filtered, forms the circulating fluid, forms the grinding fluid after the ratio afterwards, and then is arranged in corresponding grinding and polishing machine, realizes grinding fluid cyclic utilization, practices thrift manufacturing cost.
In addition to the above embodiments, the present invention also includes other embodiments, and all technical solutions that are formed by equivalent transformation or equivalent substitution should fall within the protection scope of the claims of the present invention.
Claims (5)
1. A grinding fluid filtering and circulating method of grinding and polishing equipment is characterized in that: the method comprises the following steps:
step one: pumping the primary waste liquid generated by the primary grinding and polishing machine into a primary grinding and polishing primary filtering unit for primary filtering; pumping the secondary waste liquid generated by the secondary polishing machine into a secondary polishing primary filtering unit for primary filtering to form secondary circulating liquid, automatically proportioning the secondary circulating liquid to form secondary grinding liquid, and flowing the secondary grinding liquid to the secondary polishing machine for recycling;
step two: the primary waste liquid after primary filtration is pumped to a primary polishing and polishing fine filtration unit for fine filtration to form a regenerated water mixture and primary circulating liquid;
step three: the primary circulating liquid flows back to the primary grinding and polishing primary filtering unit, and is automatically proportioned to form primary grinding liquid, and then flows to the primary grinding and polishing machine for recycling; the regenerated water mixture flows into a water regeneration system to carry out solid-liquid separation to form regenerated water and solid waste;
step four: the reclaimed water is collected in a shared water tank, and is split into a primary grinding and polishing primary filtering unit and a secondary grinding and polishing primary filtering unit for use during automatic proportioning; introducing solid waste into a solid waste barrel;
the primary grinding and polishing primary filtering unit and the secondary grinding and polishing primary filtering unit respectively comprise a grinding and polishing water tank, a waste liquid filter and a solution distribution box, and waste liquid in the grinding and polishing water tank is pumped into the corresponding waste liquid filter for primary filtration and then flows to the corresponding solution distribution box; the grinding adding ports of the solution distribution boxes are respectively communicated with the corresponding grinding medium adding boxes through grinding medium pipelines, grinding medium control valves are respectively arranged on the grinding medium pipelines, the water adding ports of the solution distribution boxes are respectively communicated with the common water tank through respective water pipes, and water valves are respectively arranged on the water pipes; the concentration sensor, the particle size sensor and the water quality monitor are arranged in the solution distribution box, the concentration, the particle size and the water quality of the solution in the solution distribution box are detected and fed back to the control system, and then the opening and the closing of the grinding medium control valve and the water valve are controlled;
the concentration sensor detects the concentration of the solution in the solution proportioning box in real time, and when the concentration Ct of the solution is in the range of 90-110% C, wherein C is the preset ideal grinding medium concentration, and the grinding medium control valve is closed; when the solution concentration Ct is less than or equal to 90 percent C, a control system controls a grinding medium control valve to be opened, grinding medium is added into a solution proportioning box, and the solution concentration Ct reaches 95 percent C, so that the grinding medium is stopped being added; when the solution concentration Ct is more than or equal to 110 percent C, the control system controls the water valve to be opened, the regenerated water is added into the solution proportioning box, the solution concentration is reduced, and when the solution concentration Ct is reduced to 105 percent C, the addition of the regenerated water is stopped.
2. The method for filtering and circulating the grinding fluid of the grinding and polishing equipment according to claim 1, wherein the method comprises the following steps: the concentration sensor detects the concentration of the solution in the solution proportioning box at regular time, and then grinding medium and regenerated water are added to the solution distribution box at regular time:
the algorithm of the grinding medium addition amount is as follows:
Q C : the amount of grinding media added each time;
i: the ratio between the waste liquid flowing into each filter and the grinding medium;
Q 1 : filter input flow rate, m 3 /h；
Δ t : the time between two adjacent times of detection and water addition;
C 1 : the concentration of the solution after the filtration of the waste liquid filter;
ρ: the density of the solution after the filtration of the waste liquid filter;
the algorithm of the addition amount of the reclaimed water is as follows:
Q S : the amount of water to be added during the interval;
C 2 : the grinding media set the concentration.
3. The method for filtering and circulating the grinding fluid of the grinding and polishing equipment according to claim 1, wherein the method comprises the following steps: the sterilizing agent adding box is respectively communicated with the corresponding solution distribution box through a sterilizing agent pipeline, and a sterilizing agent control valve is arranged on the sterilizing agent pipeline; the water quality monitor samples the solution and analyzes the microorganism quantity, and when the microorganism quantity contained in the sampled solution exceeds the preset value n/mL, the control system controls the opening of the bactericide control valve, so that the bactericide is quantitatively added into the corresponding solution distribution box.
4. The method for filtering and circulating the grinding fluid of the grinding and polishing equipment according to claim 1, wherein the method comprises the following steps: the primary polishing fine filtering unit comprises a vibrating screen, primary waste liquid after primary filtering is pumped into the vibrating screen for fine filtering, and the vibrating screen is communicated with a solution distribution box of the primary polishing primary filtering unit.
5. The method for filtering and circulating the grinding fluid of the grinding and polishing equipment according to claim 1, wherein the method comprises the following steps: the water regeneration system comprises a centrifugal separator, wherein the inlet of the centrifugal separator is communicated with the mixed liquid outlet of the reclaimed water of the vibrating screen, the solid waste outlet of the centrifugal separator is communicated with the solid waste bucket, and the reclaimed water outlet of the centrifugal separator is communicated with the public water tank.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210848042.5A CN115282692B (en) | 2022-07-19 | 2022-07-19 | Grinding liquid filtering circulation method of grinding and polishing equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210848042.5A CN115282692B (en) | 2022-07-19 | 2022-07-19 | Grinding liquid filtering circulation method of grinding and polishing equipment |
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| Publication Number | Publication Date |
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| CN115282692A CN115282692A (en) | 2022-11-04 |
| CN115282692B true CN115282692B (en) | 2024-03-08 |
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| JPH08965A (en) * | 1994-06-22 | 1996-01-09 | Noritake Co Ltd | Regeneration of waste process liquid and device therefor |
| CN203003686U (en) * | 2012-06-29 | 2013-06-19 | 旭硝子株式会社 | Grinding agent recovery apparatus |
| CN205870301U (en) * | 2016-05-30 | 2017-01-11 | 深圳汇准科技有限公司 | Intelligence lapping liquid feed system |
| CN110509173A (en) * | 2019-09-04 | 2019-11-29 | 天津中环领先材料技术有限公司 | A kind of polishing fluid recyclable device and its control method |
| CN110743462A (en) * | 2019-09-25 | 2020-02-04 | 重庆大学 | Automatic proportioning system of boron carbide grinding fluid |
| CN212396056U (en) * | 2020-06-10 | 2021-01-26 | 深圳融科科技有限公司 | Large silicon wafer grinding fluid recovery system device |
| CN212701412U (en) * | 2020-06-11 | 2021-03-16 | 深圳融科科技有限公司 | Large silicon wafer grinding fluid proportioning and multi-point conveying system device |
| CN114193329A (en) * | 2021-12-09 | 2022-03-18 | 中环领先半导体材料有限公司 | Slurry utilization method for on-line recovery of abrasive disc |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20140102697A (en) * | 2011-12-22 | 2014-08-22 | 코니카 미놀타 가부시키가이샤 | Abrasive material regeneration method and regenerated abrasive material |
-
2022
- 2022-07-19 CN CN202210848042.5A patent/CN115282692B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08965A (en) * | 1994-06-22 | 1996-01-09 | Noritake Co Ltd | Regeneration of waste process liquid and device therefor |
| CN203003686U (en) * | 2012-06-29 | 2013-06-19 | 旭硝子株式会社 | Grinding agent recovery apparatus |
| CN205870301U (en) * | 2016-05-30 | 2017-01-11 | 深圳汇准科技有限公司 | Intelligence lapping liquid feed system |
| CN110509173A (en) * | 2019-09-04 | 2019-11-29 | 天津中环领先材料技术有限公司 | A kind of polishing fluid recyclable device and its control method |
| CN110743462A (en) * | 2019-09-25 | 2020-02-04 | 重庆大学 | Automatic proportioning system of boron carbide grinding fluid |
| CN212396056U (en) * | 2020-06-10 | 2021-01-26 | 深圳融科科技有限公司 | Large silicon wafer grinding fluid recovery system device |
| CN212701412U (en) * | 2020-06-11 | 2021-03-16 | 深圳融科科技有限公司 | Large silicon wafer grinding fluid proportioning and multi-point conveying system device |
| CN114193329A (en) * | 2021-12-09 | 2022-03-18 | 中环领先半导体材料有限公司 | Slurry utilization method for on-line recovery of abrasive disc |
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| CN115282692A (en) | 2022-11-04 |
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