CN114150371A - 冷却组件及其控制方法、晶体生长装置 - Google Patents
冷却组件及其控制方法、晶体生长装置 Download PDFInfo
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- CN114150371A CN114150371A CN202111478128.5A CN202111478128A CN114150371A CN 114150371 A CN114150371 A CN 114150371A CN 202111478128 A CN202111478128 A CN 202111478128A CN 114150371 A CN114150371 A CN 114150371A
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- cooling
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/203—Controlling or regulating the relationship of pull rate (v) to axial thermal gradient (G)
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
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Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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CN202111478128.5A CN114150371B (zh) | 2021-12-06 | 2021-12-06 | 冷却组件及其控制方法、晶体生长装置 |
TW111146758A TW202314065A (zh) | 2021-12-06 | 2022-12-06 | 冷卻組件及其控制方法、晶體生長裝置 |
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CN202111478128.5A CN114150371B (zh) | 2021-12-06 | 2021-12-06 | 冷却组件及其控制方法、晶体生长装置 |
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CN114150371A true CN114150371A (zh) | 2022-03-08 |
CN114150371B CN114150371B (zh) | 2023-05-12 |
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CN202111478128.5A Active CN114150371B (zh) | 2021-12-06 | 2021-12-06 | 冷却组件及其控制方法、晶体生长装置 |
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CN (1) | CN114150371B (zh) |
TW (1) | TW202314065A (zh) |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62138384A (ja) * | 1985-12-11 | 1987-06-22 | Shin Etsu Handotai Co Ltd | 単結晶の引上方法 |
JPH06183874A (ja) * | 1992-12-16 | 1994-07-05 | Komatsu Denshi Kinzoku Kk | シリコン単結晶製造装置およびシリコン単結晶の製造方法 |
JP2009184863A (ja) * | 2008-02-05 | 2009-08-20 | Shin Etsu Handotai Co Ltd | 単結晶製造装置及び単結晶製造方法 |
CN103966668A (zh) * | 2014-05-30 | 2014-08-06 | 江苏中电振华晶体技术有限公司 | 一种基于保护气氛控制棒状蓝宝石晶体直径的生长方法 |
CN105442037A (zh) * | 2015-12-08 | 2016-03-30 | 西安交通大学 | 一种高速单晶生长装置 |
US20170029975A1 (en) * | 2015-07-31 | 2017-02-02 | Sumco Techxiv Corporation | Manufacturing method of silicon monocrystal |
CN108624950A (zh) * | 2018-06-15 | 2018-10-09 | 宝鸡志普有色金属加工有限公司 | 高效热交换单晶炉和单晶炉冷却导流筒及气冷系统 |
CN112281210A (zh) * | 2020-10-10 | 2021-01-29 | 徐州鑫晶半导体科技有限公司 | 晶体的生长装置及生长方法 |
CN113122910A (zh) * | 2020-01-15 | 2021-07-16 | 华坪隆基硅材料有限公司 | 单晶炉热场装置、单晶炉及单晶生长控制方法 |
CN113529164A (zh) * | 2021-06-02 | 2021-10-22 | 徐州鑫晶半导体科技有限公司 | 温区控制系统和晶体生长设备 |
-
2021
- 2021-12-06 CN CN202111478128.5A patent/CN114150371B/zh active Active
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2022
- 2022-12-06 TW TW111146758A patent/TW202314065A/zh unknown
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62138384A (ja) * | 1985-12-11 | 1987-06-22 | Shin Etsu Handotai Co Ltd | 単結晶の引上方法 |
EP0229322A2 (en) * | 1985-12-11 | 1987-07-22 | Shin-Etsu Handotai Company Limited | Method and apparatus for Czochralski single crystal growing |
JPH06183874A (ja) * | 1992-12-16 | 1994-07-05 | Komatsu Denshi Kinzoku Kk | シリコン単結晶製造装置およびシリコン単結晶の製造方法 |
JP2009184863A (ja) * | 2008-02-05 | 2009-08-20 | Shin Etsu Handotai Co Ltd | 単結晶製造装置及び単結晶製造方法 |
CN103966668A (zh) * | 2014-05-30 | 2014-08-06 | 江苏中电振华晶体技术有限公司 | 一种基于保护气氛控制棒状蓝宝石晶体直径的生长方法 |
US20170029975A1 (en) * | 2015-07-31 | 2017-02-02 | Sumco Techxiv Corporation | Manufacturing method of silicon monocrystal |
JP2017031004A (ja) * | 2015-07-31 | 2017-02-09 | Sumco Techxiv株式会社 | シリコン単結晶の製造方法 |
CN105442037A (zh) * | 2015-12-08 | 2016-03-30 | 西安交通大学 | 一种高速单晶生长装置 |
CN108624950A (zh) * | 2018-06-15 | 2018-10-09 | 宝鸡志普有色金属加工有限公司 | 高效热交换单晶炉和单晶炉冷却导流筒及气冷系统 |
CN113122910A (zh) * | 2020-01-15 | 2021-07-16 | 华坪隆基硅材料有限公司 | 单晶炉热场装置、单晶炉及单晶生长控制方法 |
CN112281210A (zh) * | 2020-10-10 | 2021-01-29 | 徐州鑫晶半导体科技有限公司 | 晶体的生长装置及生长方法 |
CN113529164A (zh) * | 2021-06-02 | 2021-10-22 | 徐州鑫晶半导体科技有限公司 | 温区控制系统和晶体生长设备 |
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Publication number | Publication date |
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CN114150371B (zh) | 2023-05-12 |
TW202314065A (zh) | 2023-04-01 |
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