CN114114699A - Beam shaping device, system and method - Google Patents
Beam shaping device, system and method Download PDFInfo
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- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0916—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers
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- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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Abstract
The invention discloses a light beam shaping device, a system and a method, wherein the light beam shaping device comprises a first spectroscope and a first reflection assembly, wherein: the first beam splitter is positioned on the light path of the original light beam and is used for splitting the original light beam into a first group of light beams and a second group of light beams with different light paths, and the original light beam is a light beam which is emitted by the light source and contains a plurality of laser beams; the first reflection assembly is used for changing the light path of the second group of light beams and rotating the second group of light beams by a first preset angle along the optical axis so as to convert the second group of light beams into a third group of light beams which are overlapped with the optical axis of the first group of light beams; the original light beam is divided into two parts, and then the turning of the light beam in space is controlled to realize the random rotation of the shape of the light beam in the direction, so that one part of the light beam is overlapped with the other part of the light beam after rotating along the axial direction of the optical axis, thereby achieving better light beam shaping effect, having no requirements on the spot size and the light beam intensity of the incident light, having no need of complex adjustment process and having better practicability.
Description
Technical Field
The invention relates to the technical field of laser shaping, in particular to a light beam shaping device, a light beam shaping system and a light beam shaping method.
Background
In the field of laser processing, materials are cut by means of a laser beam. In operations such as cutting, drilling, etc., a gaussian beam needs to be shaped into a flat-top beam in order to obtain a high quality machining result.
The traditional light beam shaping technology has certain limitation, can not take into account multiple conditions, and has lower practicability. For example, the light is shaped by a diffraction Optical Device (DOE), the requirement on the beam intensity of an incident beam is high, each DOE can only correspond to one incident light spot diameter, so that the practicability is low, although a flat-top beam can be shaped by adopting an aspheric lens scheme, the beam transmission distance is short, the adjustment difficulty is large, so that the practicability is low, and although the beam can be homogenized again after being scattered by adopting a micro-lens array scheme, the light spot of the scheme is large, so that the scheme is not suitable for a small light spot scheme, and the energy conversion efficiency of the scheme is low, so that the practicability is not high.
Disclosure of Invention
The invention provides a light beam shaping device, a light beam shaping system and a light beam shaping method, which aim to solve the problem that in the prior art, the light beam shaping technology has certain limitations, and can not take various conditions into consideration, so that the practicability is low.
In order to achieve the purpose, the invention adopts the technical scheme that:
there is provided a beam shaping device comprising a first beam splitter and a first reflective component, wherein:
the first beam splitter is positioned on the light path of the original light beam and is used for splitting the original light beam into a first group of light beams and a second group of light beams with different light paths, and the original light beam is a light beam which is emitted by the light source and contains a plurality of laser beams;
the first reflection assembly is used for changing the optical path of the second group of beams and rotating the second group of beams by a first preset angle along the optical axis so as to convert the second group of beams into a third group of beams coincident with the optical axis of the first group of beams.
Optionally, the beam shaping device further comprises a first mirror for changing the optical path of the original light beam so that the original light beam is incident on the first beam splitter.
Optionally, the first beam splitter is a semi-transparent mirror, and the third group of light beams, after entering and passing through the semi-transparent mirror, coincide with the optical axis of the first group of light beams.
Optionally, the first reflective assembly comprises a plurality of mirrors, and the second group of beams are reflected by the plurality of mirrors in sequence to form a third group of beams.
Optionally, the third group of light beams and the first group of light beams form an intermediate group of light beams after being overlapped by the optical axes, and the light beam shaping device further includes:
the second beam splitter is positioned on the light path of the middle group of light beams and divides the middle group of light beams into a fourth group of light beams and a fifth group of light beams with different light paths;
and the second reflection assembly is used for changing the light path direction of the fifth group of light beams and rotating the fifth group of light beams by a first preset angle along the optical axis so as to convert the fifth group of light beams into a sixth group of light beams which are overlapped with the optical axis of the fourth group of light beams.
There is provided a beam shaping system comprising a light source and the beam shaping device.
There is provided a beam shaping method comprising:
turning on a light source to make the light source emit an original light beam comprising a plurality of laser beams;
dividing the original light beam into a first group of light beams and a second group of light beams with different light paths by using a first spectroscope;
and changing the optical path of the second group of beams by using the first reflection assembly, and rotating the second group of beams by a first preset angle along the optical axis to convert the second group of beams into a third group of beams which are overlapped with the optical axis of the first group of beams.
Further, before splitting the original light beam into the first set of light beams and the second set of light beams by the first beam splitter, the method further comprises:
and changing the optical path of the original light beam by using the first reflecting mirror so that the original light beam is emitted into the first beam splitter.
Furthermore, the first beam splitter is a semi-transparent mirror, and the third group of light beams are incident and pass through the semi-transparent mirror and then coincide with the optical axis of the first group of light beams.
Further, the first reflection assembly comprises a plurality of reflection mirrors, and the second group of light beams are reflected by the plurality of reflection mirrors in sequence to form a third group of light beams.
Furthermore, after the third group of beams and the optical axis of the first group of beams coincide to form an intermediate group of beams, the first reflection assembly is used to change the optical path of the second group of beams and rotate the second group of beams by a first preset angle along the optical axis so as to be converted into the third group of beams, the optical axis of which coincides with the optical axis of the first group of beams, the method further comprises:
dividing the intermediate group of light beams into a fourth group of light beams and a fifth group of light beams with different optical paths by using a second beam splitter;
and changing the light path direction of the fifth group of light beams by using the second reflection assembly, and rotating the fifth group of light beams by a second preset angle along the optical axis to convert the fifth group of light beams into a sixth group of light beams which are overlapped with the optical axis of the fourth group of light beams.
The beam shaping device, the system and the method provided by the embodiment of the invention have the beneficial effects that:
the light beam shaping device provided by the embodiment of the invention comprises a light source, a first spectroscope and a first reflection assembly, wherein the light source is used for emitting an original light beam containing a plurality of laser beams; the first beam splitter is positioned on the light path of the original light beam and is used for splitting the original light beam into a first group of light beams and a second group of light beams with different light paths; the first reflection assembly is used for changing the light path of the second group of light beams and rotating the second group of light beams by a first preset angle along the optical axis so as to convert the second group of light beams into a third group of light beams which are overlapped with the optical axis of the first group of light beams; the original light beam is divided into two parts, then the turning of the light beam in space is controlled to realize the random rotation of the shape of the light beam in the direction, so that one part of the light beam is overlapped with the other part of the light beam after rotating along the axial direction of the optical axis, a laser light spot pattern formed after the overlapping has lower radiation intensity difference at the edge and inside, the whole radiation intensity is more uniform, a better light beam shaping effect is achieved, the requirements on the size of a light spot and the intensity of the light beam of incident light are avoided, a complex adjusting process is not needed, and the practicability is better.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments of the present invention will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without inventive labor.
Fig. 1 is an optical path diagram of an optical path shaping device according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an optical path shaping device according to an embodiment of the present invention;
FIG. 3 is a speckle pattern of different light beams formed by converting an original light beam by a light path shaping device according to an embodiment of the present invention;
fig. 4 is a schematic flow chart of an optical path shaping method according to an embodiment of the invention.
Wherein, in the figures, the respective reference numerals:
1-original beam; 11-a first set of light beams; 12-a second set of beams; 13-third set of beams; 14-a fourth set of light beams; 15-a fifth set of beams; 16-a sixth set of light beams;
21-a first beam splitter; 22-a second beam splitter;
3-a first mirror; 31-a second mirror; 32-a third mirror; 33-a fourth mirror; 34-a fifth mirror; 35-a sixth mirror; 36-a seventh mirror;
41-a second mirror; 42-a third mirror; 43-a fourth mirror; 44-a fifth mirror; 45-a sixth mirror;
51-original speckle pattern; 52-first pattern of spots; 53-second speckle pattern; 54-third speckle pattern; 55-fourth pattern of spots.
Detailed Description
In order to make the technical problems, technical solutions and advantages to be solved by the present invention more clearly and clearly understood, the technical solutions in the embodiments of the present invention are described below in detail and completely with reference to the accompanying drawings and the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, as used herein, refer to an orientation or positional relationship indicated in the drawings that is solely for the purpose of facilitating the description and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and is therefore not to be construed as limiting the invention.
Referring to fig. 1 to fig. 3, a beam shaping apparatus according to an embodiment of the present invention will be described.
A light beam shaping device comprises N shaping matrixes, wherein N is greater than or equal to 1, each shaping matrix comprises a spectroscope and a reflection assembly, original light beams are divided into two groups of light beams by the spectroscope after passing through the spectroscope in the shaping matrixes, one group of light beams are overlapped with the other group of light beams after being subjected to space transformation by the reflection assembly to form more laser light beams which are uniformly distributed on the circumference, and the light speed shaping effect can be realized, wherein the original light beams are light beams which are emitted by a light source and contain multiple laser beams.
As shown in fig. 1, taking N as 1 for explanation, the light beam shaping device provided in this embodiment includes a first shaping matrix, where the first shaping matrix includes a first beam splitter 21 and a first reflection assembly. Wherein, after the light source emits an original light beam 1 comprising a plurality of laser beams, the first beam splitter 21 is located on the optical path of the original light beam 1, and the first beam splitter 21 is used for splitting the original light beam 1 into a first group of light beams 11 and a second group of light beams 12, and the first group of light beams 11 and the second group of light beams 12 have different optical paths. The first reflecting component is used for changing the optical path of the second group of light beams 12 and rotating the second group of light beams 12 by a first preset angle along the optical axis so as to convert the second group of light beams 12 into a third group of light beams 13 which are coincident with the optical axis of the first group of light beams 11. That is, the first reflection assembly is located on the optical path of the second group of light beams 12, and after the second group of light beams 12 passes through the first reflection assembly, the second group of light beams 12 both rotate axially along the optical axis direction and change the optical path, and finally, a third group of light beams 13 coinciding with the optical axis of the first group of light beams 11 is formed. In other words, without considering the light intensity, it can be considered that the first group of light beams 11 at least partially coincides with the optical path of the third group of light beams 13 after rotating by a first preset angle with the optical axis as the rotating axis.
In a specific embodiment, as shown in fig. 2, for convenience of description, the propagation direction of the third group beam 13/the first group beam 11 is set as the positive Z-axis direction, the optical axis direction of the second group beam 12 is set as the negative Y-axis direction, and the direction perpendicular to the Z-axis and the Y-axis is set as the X-axis. It is easy to understand that, according to a specific optical path design, the optical axis direction of the first group of light beams 11 does not necessarily need to be perpendicular to the optical axis direction of the third group of light beams 13, and whether the two are perpendicular or not does not affect the above and the following related description, and for convenience of description, the following description will take the case where the optical axis direction of the third group of light beams 13 is perpendicular to the optical axis direction of the first group of light beams 11 as an example. In other embodiments, the optical axes of the second group of light beams 12 and the first group of light beams 11 are not perpendicular, and the direction perpendicular to the third group of light beams 13 is the Y-axis.
The original beam 1 can be projected on a plane perpendicular to its optical axis, i.e. an (X, Z) plane, to form an original spot pattern 51, and each partial pattern in the original spot pattern 51 is formed by projection of a plurality of laser beams included in the original beam 1. Taking an example that the original beam 1 includes two laser beams, an original spot pattern 51 formed by the original beam 1 is as shown in fig. 3 (the laser beam is generally cylindrical, so the partial pattern shown in fig. 3 is circular, and may have other shapes in other embodiments), the first mirror divides the original beam 1 into two groups of beams, wherein the second group of beams 12 passes through the first reflection assembly and is rotated by a first predetermined angle (rotated by 90 ° as shown in fig. 3) along the axial direction of the optical axis, and then the optical path of the second group of beams 12 is changed to form a third group of beams 13 (after the third group of beams 13 is rotated by 90 ° along the axial direction of the optical axis, a first spot pattern 52 is formed on a plane perpendicular to the optical axis of the third group of beams 13), the optical axis of the third group of beams 13 coincides with the optical axis of the first group of beams 11, and a second spot pattern 53 having a plurality of regions is formed on a plane perpendicular to the optical axis of the coinciding beams. The radiation intensity of the original beam 1 is concentrated on the respective partial pattern in the original projected spot 51 and the radiation intensity of the coincident first and third sets of beams 11, 13 is concentrated on the respective partial pattern on the second spot pattern 53. Since the first set of beams 11 and the third set of beams 13 are actually split from the original beam 1, but have more local patterns on the second spot pattern 53, which is equivalent to spreading the radiation intensity of the original beam 1 to more locations. As can be seen from the projection spot patterns before and after shaping, the radiation intensity difference between the edge and the central area is smaller because the radiation intensity of the projection spot pattern after shaping is more dispersed, so that the radiation intensity is more uniform, and the original light beam 1 is shaped.
As can be seen from the above principle and process, in the present embodiment, the original beam 1 is divided into two, and then one of the two beams is rotated along the optical axis and then overlapped with the other beam, so that the radiation intensity of the original beam 1 is dispersed into more beams, and the formed second optical spot pattern 53 has a lower radiation intensity difference between the edge and the inside, so that the overall radiation intensity is more uniform, thereby realizing the shaping of the laser beam. The beam shaping process has no requirement on the spot size and the beam intensity of incident light, the spatial position of each reflector in the first reflection assembly is adjusted, the turning of the beam in the space is controlled to realize the random rotation of the beam shape in the direction, the change of the relative position of the beam in the space is enabled, the beam is enabled to be uniformly distributed on the circumference to be superposed into a flat-top beam, the better beam shaping effect is achieved, the beam can be transmitted for a long distance through the reflection assembly, the complex adjustment process is not needed, the energy conversion rate is high, and the practicability is better.
The first beam splitter 21 in this embodiment is a semi-transparent mirror, after the original light beam 1 is split by the semi-transparent mirror (the first beam splitter 21), a part of the original light beam 1 is reflected to form a first group of light beams 11, and another part of the original light beam 1 passes through the semi-transparent mirror to form a second group of light beams 12. The half mirror is an optical device capable of transmitting part of light, after passing through the half mirror, the sum of the light intensities of the reflected light and the transmitted light is equal to the light intensity of the incident light, which is equivalent to dividing the original light beam 1 into two parts with different light paths, and since the purpose of the light beam shaping device is to shape the original light beam 1 so that the radiation intensity of the original light beam 1 is more uniform at the projection position, in a preferred embodiment, the transmittance of the half mirror can be 50%, that is, the original light beam 1 is uniformly divided into two parts, that is, into a first group of light beams 11 and a second group of light beams 12 with the same intensity, so as to ensure the uniformity of the light beams after subsequent shaping. In a specific embodiment, the first set of light beams 11 may be perpendicular or parallel to the original light beam 1, and the second set of light beams 12 is perpendicular to the first set of light beams 11.
Since the first beam splitter 21 is a half-mirror, the third group of light beams 13 are emitted from the first reflection element, and then enter and pass through the half-mirror (the first beam splitter 21), and coincide with the optical axis of the first group of light beams 11. Since the first group of light beams 11 can be regarded as light beams extending along the Z-axis from the semi-transparent mirror, the third group of light beams 13 passes through the semi-transparent mirror, i.e. coincides with the first group of light beams 11, and forms shaped light beams. Wherein, the semi-transparent mirror (first beam splitter 21) has a relatively large reflectivity towards the end face of the original light beam 1, so that a part of the light rays of the original light beam 1 are reflected to form a second group of light beams 12; the end surface of the half-lens facing the third group of light beams 13 has a relatively small reflectivity, i.e., a relatively high transmittance, so that the third group of light beams 13 can pass through the half-lens as completely as possible, and can be realized by performing film coating, surface treatment, adding special materials and the like on the half-lens, which is not specifically described in detail.
Optionally, as shown in fig. 1 and fig. 2, the light beam shaping device in this embodiment further includes a first reflecting mirror 3, where the first reflecting mirror 3 is configured to change the optical path direction of the original light beam 1, so that the original light beam 1 enters the first beam splitter 21 for splitting, and the optical path direction of the original light beam is adjusted by setting the first reflecting mirror 3, so that the original light beam can enter the first beam splitter 21 without setting the light source at a fixed position, and thus, any setting of the position of the light source can be achieved, and the practicability of the light beam shaping device is improved.
Optionally, the first reflective assembly comprises a plurality of mirrors, and the second set of beams 12 is reflected by the plurality of mirrors in sequence to form the third set of beams 13.
In a specific embodiment as shown in fig. 2 and 3, the original beam 1 includes a first laser beam and a second laser beam distributed along the positive direction of the Z-axis, and the first reflection assembly 3 may include a second reflection mirror 31, a third reflection mirror 32, a fourth reflection mirror 33, a fifth reflection mirror 34, a sixth reflection mirror 35, a seventh reflection mirror 36, and the like, which are arranged in sequence.
The second reflecting mirror 31 has a mirror surface normal on the plane (Y, Z) and a mirror surface normal at 45 ° to the incident light. The second group of beams 12 is incident on the second mirror in the negative Y-axis direction and reflected as beam group a. The beam group a is rotated 90 ° axially with respect to the second group of beams 12, and the optical path direction changes by 90 ° and propagates along the negative Z-axis.
The third mirror 32 has its mirror surface normal at 45 ° to the incident light, and is located on the plane (X, Z). The light beam group a enters the third mirror in the negative Z-axis direction and is reflected as a light beam group B. The beam group B changes its optical path direction by 90 ° with respect to the beam group a, and propagates in the positive X-axis direction (in the present embodiment, the positive and negative X-axis directions are not limited, and are described only as relative relationships).
The fourth mirror 33 has a mirror surface normal on the plane (X, Y) and a mirror surface normal at 45 ° to the incident light. The light beam group B enters the fourth mirror in the positive X-axis direction and is reflected as a light beam group C. The beam group C is axially rotated by 90 degrees relative to the beam group B, and the optical path direction changes by 90 degrees and propagates along the positive direction of the Y axis.
The fifth mirror 34 has a mirror surface normal on the plane (X, Y) and a mirror surface normal at 45 ° to the incident light. The beam group C enters the fifth mirror in the positive Y-axis direction and is reflected as a beam group D. The beam group D is opposite to the beam group C, the optical path direction changes by 90 degrees, and the light propagates along the negative direction of the X axis.
The sixth mirror 35 has a mirror surface normal on the plane (X, Y) and a mirror surface normal at 45 ° to the incident light. The beam group D enters the sixth mirror in the negative X-axis direction and is reflected as a beam group E. The beam group E is opposite to the beam group D, the optical path direction changes by 90 degrees, and the light propagates along the positive direction of the Y axis.
The seventh mirror 36 has a mirror surface normal on the plane (Z, Y) and a mirror surface normal at 45 ° to the incident light ray. The beam group E enters the seventh mirror in the positive Y-axis direction and is reflected as a third group beam 13. The third group 13 of light beams is changed by 90 degrees in the optical path direction relative to the light beam group E and propagates along the positive direction of the Z axis.
As can be seen from the above-mentioned relationship between the respective mirrors and the corresponding optical paths, in the process from the second group of beams 12 to the third group of beams 13, the beams are rotated by 90 ° in the optical axis direction, that is, the beam shape is rotated by 90 ° in the Z-axis direction, and is changed a plurality of times in the optical path direction, and finally changed to the Z-axis positive direction, which is the same as the propagation direction of the first group of beams 11.
As can be seen from fig. 3, when the original beam 1 is projected on a plane perpendicular to its optical axis, an original spot pattern 51 with two spots is formed. After being divided into the first group of beams 11 and the second group of beams 12, the first group of beams 11 still forms the original spot pattern 51 by being projected on a plane perpendicular to the optical axis thereof, because the second group of beams 12 is axially rotated by 90 ° in the process of being converted into the third group of beams 13, the third group of beams 13 is projected on the plane perpendicular to the optical axis thereof to form the second spot pattern 52, and the third group of beams 13 and the first group of beams 11 are superposed to form the third spot pattern 53 by being projected on the plane perpendicular to the optical axis thereof, so that the laser shaping process is realized to a certain extent.
In other embodiments, the number of the lasers included in the original beam 1 may be other, and correspondingly, the original projection spot formed by the original beam 1 may also be composed of other numbers of spots, for example, the original beam 1 may also form three spots, after the above process, the third group of beams 13 and the first group of beams 11 that are coincident may form six spots, and the original beam 1 may also form four spots, five spots, and the like. It will be readily appreciated that in the embodiment where the original beam 1 forms two spots, the direction of rotation of the second group of beams 12 is 90 ° in order to make the spots evenly distributed, and in other embodiments, other degrees, such as 60 °, 45 °, 270 °, etc., are also possible.
In other embodiments, the sixth mirror 35 and the seventh mirror 36 may be combined into one mirror, and the spatial relationship of the combined mirror is changed to achieve the target shaping effect.
Alternatively, as shown in fig. 1 and fig. 2, after the above-mentioned primary shaping is completed, based on the same principle, a shaping matrix, i.e. a second shaping matrix, may be added to the beam shaping device to shape the beam again, so that the radiation intensity of the shaped beam is more uniform. The second shaping matrix comprises a second beam splitter 22 and a second reflecting component, and for convenience of description, the beam group formed by combining the first group of beams 11 and the third group of beams 13 is referred to as an intermediate group of beams (which are in optical path with the first group of beams 11). The second beam splitter 22 is located in the optical path of the intermediate set of light beams for splitting the intermediate set of light beams into a fourth set of light beams 14 and a fifth set of light beams 15 having different optical paths. The second reflection assembly is located on the optical path of the fifth group of light beams 15, and is configured to change the optical path direction of the fifth group of light beams 15, and rotate the fifth group of light beams 15 by a first preset angle along the optical axis to convert the fifth group of light beams 15 into a sixth group of light beams 16 coinciding with the optical axis of the fourth group of light beams 14. After passing through the second reflection assembly, the fifth group of light beams 15 both rotate axially along the optical axis and change the optical path, and finally form a sixth group of light beams 16 coinciding with the optical axis of the fourth group of light beams 14. In other words, without considering the light intensity, it can be considered that the fourth group of light beams 14 at least partially coincide with the light path of the sixth group of light beams after rotating by the second preset angle with the optical axis as the rotation axis.
Specifically, the second beam splitter 22 is the same as the first beam splitter 21, and is not described in detail, and the second reflection assembly is composed of a plurality of reflection mirrors. The principle of the beam splitter is the same as that of the first beam splitter 21 and the first reflection assembly, the second beam splitter 22 and the second reflection assembly divide the intermediate light into two again, and then one part of the light is axially rotated and then is overlapped with the other part of the light, for convenience of description, a light beam group formed by overlapping the sixth light beam 16 and the fourth light beam 14 is referred to as a target group light beam, and the light path of the target group light beam is consistent with that of the fourth light beam 14.
As shown in fig. 3, when the original light beam 1 is projected on a plane perpendicular to the optical axis thereof, an original spot pattern 51 having two spots is formed, the original light beam 1 is split by the first beam splitter 21 to form a second group of light beams 12, the second group of light beams 12 are reflected by the first reflection assembly and then axially rotated to form a third group of light beams 13, and the plane (X, Y) perpendicular to the optical axis of the third group of light beams 13 forms a first spot pattern 53; the third group of light beams 13 and the second group of light beams 12 are overlapped to form an intermediate group of light beams, the intermediate group of light beams form a second light spot pattern 53 with four light spots on a plane (X, Y) perpendicular to the optical axis of the intermediate group of light beams, the fourth group of light beams 14 still correspond to the third light spot pattern 53, the sixth group of light beams 16 axially rotate relative to the fifth group of light beams 15 to form a third light spot pattern 54 on the plane perpendicular to the optical axis of the fifth group of light beams, and the target group of light beams formed by overlapping the fourth group of light beams 14 and the sixth group of light beams 16 have eight light spots to form a fourth light spot pattern 55. As can be seen from fig. 3, compared with the second spot pattern 53 formed by shaping through one shaping matrix, the fourth spot pattern 54 formed by shaping through two shaping matrices has more uniform distribution of spots on the circumference, that is, more uniform distribution of laser beams on the circumference, so that the shaped target group beams have better radiation intensity and the better beam shaping effect.
The second beam splitter 22 is a half-lens, and the end surface of the second beam splitter 22 facing the middle group of light beams has a relatively large reflectivity, so that a part of light rays of the middle group of light beams are reflected to form a fourth group of light beams 14; and a relatively small reflectivity, i.e. a high transmission, at the end of the second beam splitter 22 facing the sixth beam 16, so that the sixth beam 16 can pass through the second beam splitter 22 as completely as possible.
In one embodiment, as shown in fig. 1 and 2, the second reflecting assembly includes an eighth reflecting mirror 41, a ninth reflecting mirror 42, a tenth reflecting mirror 43, an eleventh reflecting mirror 44, and a tenth reflecting mirror 45 arranged in this order:
the eighth mirror 41 has a mirror surface normal on the plane (X, Z) and a mirror surface normal at 22.5 ° to the incident light. The fifth group light flux 15 enters the eighth reflecting mirror 41 in the positive Z-axis direction, is reflected as a light flux group F, changes its optical path by 45 °, and propagates in a direction at 45 ° to the negative Z-axis direction.
The normal of the mirror surface of the ninth reflector 42 forms 45 degrees with the incident light, the light beam group F enters the ninth reflector 42 and is reflected into a light beam group G, the light path changes by 90 degrees, and the light beam group G rotates by a second preset angle (45 degrees) along the optical axis and propagates along the positive direction of the Y axis.
The tenth mirror 43 has a mirror surface normal of 45 ° to the incident light, and the light beam group G enters the tenth mirror 43 and is reflected as a light beam group H, and the optical path changes by 90 ° and propagates in a direction of 45 ° to the positive direction of the Z axis.
The normal line of the mirror surface of the eleventh reflecting mirror 44 is positioned on the plane (X, Z), and the normal line of the mirror surface is 45 degrees with the incident light, the light beam group H is incident on the eleventh reflecting mirror 44, reflected into the light beam group I, the light path is changed by 90 degrees, and the light beam is transmitted along the Z-axis negative direction.
The tenth reflecting mirror 45 has a mirror surface normal of 45 ° to the incident light, and the light beam group I enters the tenth reflecting mirror 45, is reflected as the sixth light beam group 16, and changes its optical path by 90 °, and propagates in the negative Y-axis direction.
It is easily understood that in the embodiment where the original light beam 1 forms two light spots, in order to make the light spots uniformly distributed, the direction of the axis rotation of the fifth group of light beams 15 is 90 °, and in other embodiments, other degrees may be adopted, and details are not described here again.
In other embodiments, the number of the shaping matrixes can be determined according to the actual shaping requirement of the light beam, and then the angle of the reflection assembly in each shaping matrix for rotating the light beam along the optical axis is adjusted, so that the light beam can be rapidly and accurately shaped. The light beam shaping device comprises a light source, a first shaping matrix, a second shaping matrix and an … … Nth shaping matrix, wherein the larger the numerical value of N is, the larger the number of the shaping matrices is, the more uniform the light beam is distributed on the circumference, and the better the light beam shaping effect is.
In an embodiment, a beam shaping system is provided, comprising a light source and the beam shaping device as described above. According to the principle process, the incident light beam is divided into two parts by the spectroscope, and then one part of the light beam is overlapped with the other part of the light beam after being axially rotated along the optical axis, so that the radiation intensity of the incident light beam is dispersed into more laser beams, the formed light spots have lower radiation intensity difference between the edge and the inside, the whole radiation intensity is more uniform, and the laser beam is shaped. The beam shaping process has no requirement on the spot size and the beam intensity of incident light, the spatial position of each reflector in the first reflection assembly is adjusted, the turning of the beam in the space is controlled to realize the random rotation of the beam shape in the direction, the change of the relative position of the beam in the space is enabled, the beam is enabled to be uniformly distributed on the circumference to be superposed into a flat-top beam, the better beam shaping effect is achieved, the beam can be transmitted for a long distance through the reflection assembly, the complex adjustment process is not needed, the energy conversion rate is high, and the practicability is better.
In an embodiment, as shown in fig. 4, a beam shaping method is provided, which is described by taking the beam shaping apparatus in fig. 2 as an example, and includes the following steps:
s10: the light source is turned on so that the light source emits an original light beam including a plurality of laser beams.
S20: the original light beam is split into a first group of light beams and a second group of light beams with different optical paths by using a first beam splitter.
S30: and changing the optical path of the second group of beams by using the first reflection assembly, and rotating the second group of beams by a first preset angle along the optical axis to convert the second group of beams into a third group of beams which are overlapped with the optical axis of the first group of beams.
When the laser beams need to be shaped, the light source is started to enable the light source to emit original beams containing a plurality of lasers, then the original beams are divided into a first group of beams and a second group of beams with different optical paths by the first beam splitter, then the optical paths of the second group of beams are changed by the first reflection assembly, and the second group of beams are rotated by a first preset angle along the optical axis to be converted into a third group of beams which are overlapped with the optical axis of the first group of beams. The parameters of the original beam shaping process performed by the beam shaping device are described above, and will not be described in detail herein.
In the embodiment, the light source is turned on to make the light source emit an original light beam containing a plurality of lasers, the original light beam is divided into a first group of light beams and a second group of light beams with different light paths by the first beam splitter, the light path of the second group of light beams is changed by the first reflection assembly, the second group of light beams is rotated by a first preset angle along the optical axis to be converted into a third group of light beams which are overlapped with the optical axis of the first group of light beams, the original light beams are divided into two parts, the turning of the light beams on the space is controlled to realize the random rotation of the shapes of the light beams in the direction, so that one part of the light beams are overlapped with the other part of the light beams after being axially rotated along the optical axis, a laser light spot pattern formed after being overlapped has lower radiation intensity difference between the edge and the inside, the whole radiation intensity is more uniform, thereby achieving a better light beam shaping effect, and having no requirements on the spot size and the intensity of incident light, and a complex adjusting process is not needed, the energy conversion rate is higher, and the practicability is better.
In one embodiment, before step S20, i.e. before splitting the original light beam into the first and second groups of light beams by the first beam splitter, the method further comprises the following steps:
s11: and changing the optical path of the original light beam by using the first reflecting mirror so that the original light beam is emitted into the first beam splitter.
The first reflector is arranged on the light path of the original light beam, and the light path of the original light beam is changed by the first reflector, so that the original light beam is incident into the first spectroscope, the light source position can be arbitrarily set, and the practicability of the light beam shaping device is further improved.
In one embodiment, the first beam splitter is a semi-transparent mirror, and the third set of light beams enters and passes through the semi-transparent mirror (the first beam splitter) and then coincides with the optical axis of the first set of light beams.
In one embodiment, the first reflective assembly includes a plurality of mirrors, and the second set of beams is reflected by the plurality of mirrors in sequence to form a third set of beams. The structure of the first reflecting assembly and the formation process of the third set of beams are as described above and will not be described herein.
In an embodiment, after the step S30 of changing the optical path of the second group of light beams by using the first reflective component and rotating the second group of light beams by a first predetermined angle along the optical axis to convert the second group of light beams into the third group of light beams with the optical axis coinciding with the optical axis of the first group of light beams, the method further includes:
s31: and the second beam splitter is used for splitting the intermediate group of beams into a fourth group of beams and a fifth group of beams with different optical paths.
After the optical path of the second group of beams is changed by the first reflection assembly and the second group of beams is rotated by a first preset angle along the optical axis to be converted into a third group of beams of which the optical axis is coincident with the optical axis of the first group of beams, the middle group of beams are divided into a fourth group of beams and a fifth group of beams of which the optical paths are different by the second beam splitter, and the second beam splitter is positioned on the optical path of the middle group of beams.
The laser shaping device in this embodiment further includes a second beam splitter and a second reflection assembly, the structures of the second beam splitter and the second reflection assembly, and the process of splitting the middle group of light beams into a fourth group of light beams and a fifth group of light beams with different optical paths refer to the foregoing, which are not described herein again.
S32: and changing the light path direction of the fifth group of light beams by using the second reflection assembly, and rotating the fifth group of light beams by a second preset angle along the optical axis to convert the fifth group of light beams into a sixth group of light beams which are overlapped with the optical axis of the fourth group of light beams.
After the second beam splitter is used for splitting the middle group of light beams into a fourth group of light beams and a fifth group of light beams with different light paths, the light path direction of the fifth group of light beams is changed by using a second reflection assembly, and the fifth group of light beams are rotated by a second preset angle along the optical axis to be converted into a sixth group of light beams which are coincident with the optical axis of the fourth group of light beams. The process of forming the sixth set of beams is as described above and will not be described herein.
In this embodiment, the first reflection assembly is used to change the optical path of the second group of beams, the second group of beams is rotated by a first preset angle along the optical axis to be converted into a third group of beams with the optical axis coinciding with the optical axis of the first group of beams, the second beam splitter is used to divide the middle group of beams into a fourth group of beams and a fifth group of beams with different optical paths, the second reflection assembly is used to change the optical path direction of the fifth group of beams, the fifth group of beams is rotated by a second preset angle along the optical axis to be converted into a sixth group of beams coinciding with the optical axis of the fourth group of beams, and the second beam splitter and the second reflection assembly rotate the beams along the optical axis again, so that the number of laser beams is increased, and the distribution on the circumference is more uniform, therefore, the shaped target group of beams has better radiation intensity, and the beam shaping effect is better.
It should be understood that, the sequence numbers of the steps in the foregoing embodiments do not imply an execution sequence, and the execution sequence of each process should be determined by its function and inherent logic, and should not constitute any limitation to the implementation process of the embodiments of the present invention.
The above-mentioned embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not substantially depart from the spirit and scope of the embodiments of the present invention, and are intended to be included within the scope of the present invention.
Claims (10)
1. A beam shaping device comprising a first beam splitter and a first reflective element, wherein:
the first beam splitter is positioned on an optical path of an original light beam, and is used for splitting the original light beam into a first group of light beams and a second group of light beams with different optical paths, wherein the original light beam is a light beam emitted by a light source and comprises a plurality of laser beams;
the first reflection assembly is used for changing the light path of the second group of light beams and rotating the second group of light beams by a first preset angle along the optical axis so as to convert the second group of light beams into a third group of light beams which coincide with the optical axis of the first group of light beams.
2. The beam shaping device of claim 1, further comprising a first mirror for changing the optical path of the original beam so that the original beam is incident on the first beam splitter.
3. The beam-shaping device of claim 1, wherein the first beam splitter is a semi-transparent mirror, and the third set of light beams incident on and passing through the semi-transparent mirror is coincident with the optical axis of the first set of light beams.
4. The beam-shaping device of claim 1 wherein the first reflective assembly comprises a plurality of mirrors, the second set of beams being reflected in sequence by the plurality of mirrors to form the third set of beams.
5. The beam-shaping device according to any one of claims 1 to 4, wherein the third group of beams is coincident with the optical axis of the first group of beams to form an intermediate group of beams, and the beam-shaping device further comprises:
the second beam splitter is positioned on the optical path of the middle group of beams and used for splitting the middle group of beams into a fourth group of beams and a fifth group of beams with different optical paths;
and the second reflection assembly is used for changing the light path direction of the fifth group of light beams and rotating the fifth group of light beams by a first preset angle along the optical axis so as to convert the fifth group of light beams into a sixth group of light beams which are coincident with the optical axis of the fourth group of light beams.
6. A beam-shaping system comprising a light source and a beam-shaping device as claimed in any one of claims 1 to 5.
7. A method of beam shaping, comprising:
turning on a light source to make the light source emit an original light beam comprising a plurality of laser beams;
dividing the original light beam into a first group of light beams and a second group of light beams with different optical paths by using a first spectroscope;
and changing the light path of the second group of beams by using a first reflection assembly, and rotating the second group of beams by a first preset angle along the optical axis to convert the second group of beams into a third group of beams coincident with the optical axis of the first group of beams.
8. The method of beam shaping as defined in claim 7, wherein prior to splitting the original beam into the first and second sets of beams using the first beam splitter, the method further comprises:
and changing the optical path of the original light beam by using a first reflecting mirror so as to enable the original light beam to enter the first beam splitter.
9. The method of claim 7, wherein the first reflective assembly comprises a plurality of mirrors, and wherein the second plurality of beams are sequentially reflected by the plurality of mirrors to form the third plurality of beams.
10. A method for shaping a beam according to any one of claims 7-9, wherein after said third group of beams is coincident with the optical axis of said first group of beams to form an intermediate group of beams, said using the first reflecting element to change the optical path of said second group of beams and rotate said second group of beams by a first predetermined angle along the optical axis to convert said second group of beams into a third group of beams having optical axes coincident with the optical axis of said first group of beams, said method further comprising:
utilizing a second beam splitter to split the intermediate group of light beams into a fourth group of light beams and a fifth group of light beams with different optical paths;
and changing the light path direction of the fifth group of light beams by using a second reflection assembly, and rotating the fifth group of light beams by a second preset angle along the optical axis so as to convert the fifth group of light beams into a sixth group of light beams which are overlapped with the optical axis of the fourth group of light beams.
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