CN114114699B - Beam shaping apparatus, system and method - Google Patents
Beam shaping apparatus, system and method Download PDFInfo
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- CN114114699B CN114114699B CN202111308804.4A CN202111308804A CN114114699B CN 114114699 B CN114114699 B CN 114114699B CN 202111308804 A CN202111308804 A CN 202111308804A CN 114114699 B CN114114699 B CN 114114699B
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- 238000007493 shaping process Methods 0.000 title claims abstract description 88
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0916—Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/0977—Reflective elements
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Abstract
The invention discloses a beam shaping device, a system and a method, wherein the beam shaping device comprises a first spectroscope and a first reflecting component, wherein: the first spectroscope is positioned on the light path of the original light beam, and is used for dividing the original light beam into a first group of light beams and a second group of light beams with different light paths, wherein the original light beam is a light beam which is emitted by the light source and contains a plurality of laser beams; the first reflection assembly is used for changing the light path of the second group of light beams and rotating the second group of light beams along the optical axis by a first preset angle so as to convert the second group of light beams into a third group of light beams which are coincident with the optical axis of the first group of light beams; the original light beam is split into two, and then the turning of the light beam in space is controlled to realize the random rotation of the light beam shape in the direction, so that one part of the light beam axially rotates along the optical axis and then coincides with the other part of the light beam, thereby achieving better light beam shaping effect, having no requirements on the light spot size and the light beam intensity of the incident light, and having better practicability without complex adjustment process.
Description
Technical Field
The present invention relates to the field of laser shaping technology, and in particular, to a beam shaping apparatus, system, and method.
Background
In the field of laser processing, a material is cut by a laser beam. In operations such as cutting, drilling, etc., it is necessary to shape the gaussian beam into a flat-top beam in order to obtain a high quality processing effect.
The traditional beam shaping technology has certain limitations, cannot consider various situations, and has low practicability. For example, the beam intensity of the incident beam is required to be high by shaping the beam by using diffraction optical devices ((Diffractive Optical Elements, DOE), and each DOE device can only correspond to one incident spot diameter, so that the practicality is low, the beam transmission distance is short and the adjustment difficulty is high, so that the practicability is low, although the flat-top beam can be obtained by shaping by using an aspheric lens scheme, and the beam can be homogenized again after being scattered by using a microlens array scheme, the spot size of the scheme is large, the scheme is not suitable for a small spot scheme, and the energy conversion efficiency is low, so that the scheme is not practical.
Disclosure of Invention
The invention provides a beam shaping device, a beam shaping system and a beam shaping method, which are used for solving the problems that in the prior art, the beam shaping technology has certain limitations, and various conditions cannot be considered, so that the practicability is low.
In order to achieve the above purpose, the invention adopts the following technical scheme:
there is provided a beam shaping apparatus comprising a first beam splitter and a first reflecting assembly, wherein:
the first spectroscope is positioned on the light path of the original light beam, and is used for dividing the original light beam into a first group of light beams and a second group of light beams with different light paths, wherein the original light beam is a light beam which is emitted by the light source and contains a plurality of laser beams;
the first reflection assembly is used for changing the light path of the second group of light beams and rotating the second group of light beams along the optical axis by a first preset angle so as to convert the second group of light beams into a third group of light beams which are coincident with the optical axis of the first group of light beams.
Optionally, the beam shaping device further includes a first mirror, where the first mirror is configured to change an optical path of the original beam so that the original beam is incident on the first beam splitter.
Optionally, the first beam splitter is a half-mirror, and the third group of light beams is incident to and passes through the half-mirror and then coincides with the optical axis of the first group of light beams.
Optionally, the first reflecting component includes a plurality of mirrors, and the second group of light beams is reflected by the plurality of mirrors in sequence to form a third group of light beams.
Optionally, the third group of light beams and the optical axis of the first group of light beams coincide to form an intermediate group of light beams, and the beam shaping device further comprises:
the second beam splitter is positioned on the light path of the middle group of light beams and divides the middle group of light beams into a fourth group of light beams and a fifth group of light beams with different light paths;
the second reflection assembly is used for changing the light path direction of the fifth group of light beams and rotating the fifth group of light beams along the optical axis by a first preset angle so as to convert the fifth group of light beams into a sixth group of light beams which are coincident with the optical axis of the fourth group of light beams.
There is provided a beam shaping system comprising a light source and the beam shaping device described above.
There is provided a beam shaping method comprising:
turning on the light source to make the light source emit an original light beam containing a plurality of laser beams;
dividing the original light beam into a first group of light beams and a second group of light beams with different light paths by using a first spectroscope;
the optical path of the second group of light beams is changed by the first reflection assembly, and the second group of light beams are rotated along the optical axis by a first preset angle so as to be converted into a third group of light beams which are coincident with the optical axis of the first group of light beams.
Further, before splitting the original beam of light into the first set of beams and the second set of beams using the first beam splitter, the method further comprises:
the light path of the original light beam is changed by using the first reflector, so that the original light beam is incident into the first spectroscope.
Further, the first spectroscope is a semi-transparent mirror, and the third group of light beams are coincided with the optical axis of the first group of light beams after entering and passing through the semi-transparent mirror.
Further, the first reflecting assembly comprises a plurality of reflecting mirrors, and the second group of light beams are reflected by the plurality of reflecting mirrors in sequence to form a third group of light beams.
Further, after the third group of light beams and the optical axis of the first group of light beams are overlapped to form an intermediate group of light beams, the first reflection assembly is utilized to change the optical path of the second group of light beams, and the second group of light beams are rotated along the optical axis by a first preset angle so as to be converted into the third group of light beams with the optical axis overlapped with the optical axis of the first group of light beams, the method further comprises:
dividing the intermediate group of light beams into a fourth group of light beams and a fifth group of light beams with different light paths by using a second beam splitter;
and changing the light path direction of the fifth group of light beams by using the second reflection assembly, and rotating the fifth group of light beams by a second preset angle along the optical axis so as to convert the fifth group of light beams into a sixth group of light beams which are coincident with the optical axis of the fourth group of light beams.
The beam shaping device, the system and the method provided by the embodiment of the invention have the beneficial effects that:
the beam shaping device provided by the embodiment of the invention comprises a light source, a first spectroscope and a first reflecting component, wherein the light source is used for emitting an original beam containing a plurality of laser beams; the first spectroscope is positioned on the light path of the original light beam and is used for dividing the original light beam into a first group of light beams and a second group of light beams with different light paths; the first reflection assembly is used for changing the light path of the second group of light beams and rotating the second group of light beams along the optical axis by a first preset angle so as to convert the second group of light beams into a third group of light beams which are coincident with the optical axis of the first group of light beams; the original light beam is split into two, and then the turning of the light beam in space is controlled to realize the random rotation of the light beam shape in the direction, so that one part of the light beam axially rotates along the optical axis and then coincides with the other part of the light beam, a laser spot diagram formed after the coincidence has lower radiation intensity difference between the edge and the inside, the whole radiation intensity is more uniform, the better beam shaping effect is achieved, the light spot size and the light beam intensity of the incident light are not required, the complex adjustment process is not required, and the laser spot diagram has better practicability.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the description of the embodiments of the present invention will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an optical path shaping device according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a light path shaping device according to an embodiment of the present invention;
FIG. 3 is a light spot diagram of an original light beam converted by an optical path shaping device to form different light beams according to an embodiment of the present invention;
FIG. 4 is a flow chart illustrating a method for shaping an optical path according to an embodiment of the invention.
Wherein, each reference sign in the figure:
1-an original beam; 11-a first set of light beams; 12-a second set of light beams; 13-a third set of light beams; 14-fourth set of beams; 15-a fifth set of light beams; 16-sixth set of beams;
21-a first spectroscope; 22-a second beam splitter;
3-a first mirror; 31-a second mirror; 32-a third mirror; 33-a fourth mirror; 34-a fifth mirror; 35-a sixth mirror; 36-seventh mirror;
41-a second mirror; 42-a third mirror; 43-fourth mirror; 44-a fifth mirror; 45-sixth mirror;
51-an original light spot diagram; 52-a first spot diagram; 53-second spot diagram; 54-a third spot diagram; 55-fourth spot diagram.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present application more clear, the technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the drawings and the embodiments, and it is obvious that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It will be understood that when an element is referred to as being "mounted" or "disposed" on another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are merely for convenience in describing and simplifying the description based on the orientation or positional relationship shown in the drawings, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus are not to be construed as limiting the invention.
Referring to fig. 1 to 3, a beam shaping apparatus according to an embodiment of the invention will be described.
A light beam shaping device comprises N shaping matrixes, wherein N is greater than or equal to 1, each shaping matrix comprises a spectroscope and a reflecting component, an original light beam is divided into two groups of light beams by the spectroscope after passing through the spectroscope in the shaping matrix, one group of light beams is overlapped with the other group of light beams after being spatially transformed by the reflecting component to become more laser light beams and uniformly distributed on the circumference, and the light beam shaping effect can be realized, wherein the original light beam is a light beam which is emitted by a light source and comprises multiple laser beams.
As shown in fig. 1, taking N as 1 as an example for illustration, the beam shaping device provided in this embodiment includes a first shaping matrix, where the first shaping matrix includes a first beam splitter 21 and a first reflection component. Wherein, after the light source emits the original light beam 1 including a plurality of laser beams, the first beam splitter 21 is located on the optical path of the original light beam 1, and the first beam splitter 21 is used for dividing the original light beam 1 into a first group of light beams 11 and a second group of light beams 12, and the first group of light beams 11 and the second group of light beams 12 have different optical paths. The first reflection assembly is used for changing the optical path of the second group of light beams 12 and rotating the second group of light beams 12 along the optical axis by a first preset angle to convert the second group of light beams 12 into a third group of light beams 13 which are coincident with the optical axis of the first group of light beams 11. That is, the first reflecting component is located on the optical path of the second group of light beams 12, and after the second group of light beams 12 pass through the first reflecting component, both axial rotation along the optical axis direction and optical path change occur, and finally, a third group of light beams 13 which are coincident with the optical axis of the first group of light beams 11 are formed. In other words, without considering the light intensity, it is considered that the first group of light beams 11 at least partially coincides with the light path of the third group of light beams 13 after rotating by the first preset angle about the optical axis as the rotation axis.
In a specific embodiment, as shown in fig. 2, for convenience of description, the propagation direction of the third group of light beams 13/the first group of light beams 11 is set to be a positive Z-axis direction, the optical axis direction of the second group of light beams 12 is set to be a negative Y-axis direction, and the directions perpendicular to the Z-axis and the Y-axis are set to be X-axes. It should be readily understood that, depending on the specific optical path design, the optical axis direction of the first set of light beams 11 does not necessarily need to be perpendicular to the optical axis direction of the third set of light beams 13, and neither perpendicular nor perpendicular affects the above and following related descriptions, and the following description will take the third set of light beams 13 perpendicular to the optical axis direction of the first set of light beams 11 as an example for convenience of description. In other embodiments, the second set of light beams 12 is not perpendicular to the optical axis of the first set of light beams 11, and the direction perpendicular to the third set of light beams 13 is the Y axis.
The original beam 1 can be projected on a plane perpendicular to its optical axis, i.e. the (X, Z) plane, to form an original spot pattern 51, each partial pattern in the original spot pattern 51 being formed by projection of a plurality of laser beams contained in the original beam 1. Taking the example that the original beam 1 includes two laser beams, the original light spot pattern 51 formed by the original beam 1 is shown in fig. 3 (the general laser beam is cylindrical, so the partial pattern shown in fig. 3 is circular, and other shapes are also possible in other embodiments), the first mirror divides the original beam 1 into two groups of beams, the second group of beams 12 pass through the first reflecting component and axially rotate along the optical axis by a first preset included angle (rotating by 90 ° as shown in fig. 3), then the optical paths of the second group of beams 12 are changed to form a third group of beams 13 (the third group of beams 13 axially rotate along the optical axis by 90 ° and form a first light spot pattern 52 in a plane perpendicular to the optical axis of the third group of beams 13), the optical axis of the third group of beams 13 coincides with the optical axis of the first group of beams 11, and a second light spot pattern 53 having a plurality of areas is formed in a plane perpendicular to the optical axis of the coincident beams. The radiation intensity of the original beam 1 is concentrated on the respective partial pattern in the original projected spot 51, while the radiation intensities of the overlapping first set of beams 11 and third set of beams 13 are concentrated on the respective partial pattern on the second spot pattern 53. Since the first set of beams 11 and the third set of beams 13 are actually split from the original beam 1, but have more local patterns on the second spot diagram 53, which corresponds to dispersing the radiation intensity of the original beam 1 to more positions. It can be seen from the projection light spot diagrams before and after shaping, the radiation intensity difference between the edge and the central area is smaller because the projection light spot diagrams after shaping are more dispersed, so that the radiation intensity is more uniform, and the shaping of the original light beam 1 is realized.
As can be seen from the above principle process, in this embodiment, by dividing the original beam 1 into two, and then rotating one part of the beams axially along the optical axis and overlapping the other part of the beams, the radiation intensity of the original beam 1 is dispersed into more laser beams, and the formed second spot diagram 53 has a lower radiation intensity difference at the edge and inside, so that the overall radiation intensity is more uniform, and shaping of the laser beam is achieved. The beam shaping process has no requirements on the spot size and the beam intensity of incident light, the spatial position of each reflecting mirror in the first reflecting assembly is regulated, the turning of the beam in space is controlled to realize the random rotation of the beam shape in the direction, so that the change of the relative position of the beam in space is caused, the beam is caused to be uniformly distributed on the circumference so as to be overlapped into a flat-top beam, the better beam shaping effect is achieved, the long-distance transmission of the beam can be realized through the reflecting assembly, the complex regulation process is not needed, the energy conversion rate is high, and the high-practicability is realized.
The first beam splitter 21 in this embodiment is a half lens, and after the original beam 1 is split by the half lens (the first beam splitter 21), a part of the original beam 1 is reflected to form a first group of beams 11, and another part of the original beam 1 is transmitted through the half lens to form a second group of beams 12. The half lens is an optical device capable of transmitting part of light, and after passing through the half lens, the sum of the light intensity of the reflected light and the light intensity of the transmitted light is equal to the light intensity of the incident light, which is equivalent to dividing the original light beam 1 into two parts with different light paths, and since the purpose of the beam shaping device is to shape the original light beam 1 so that the radiation intensity of the original light beam 1 is more uniform at the projection position, in a preferred embodiment, the transmittance of the half lens can be 50%, that is, the original light beam 1 is uniformly divided into two parts, that is, into the first group of light beams 11 and the second group of light beams 12 with the same intensity, so as to ensure the uniformity of the light beams after the subsequent shaping. In a specific embodiment, the first set of light beams 11 may be perpendicular or parallel to the original light beam 1, and the second set of light beams 12 perpendicular to the first set of light beams 11.
Since the first beam splitter 21 is a half lens, the third group of light beams 13 is incident and passes through the half lens (the first beam splitter 21) after being emitted from the first reflecting component, and coincides with the optical axis of the first group of light beams 11. Since the first group of light beams 11 can be regarded as light beams extending along the Z axis starting from the half mirror, the portion of the third group of light beams 13 passing through the half lens, i.e. overlapping the first group of light beams 11, constitutes a shaped light beam. Wherein the semi-transparent mirror (first beam splitter 21) has a relatively large reflectivity towards the end face of the original light beam 1, so that a part of the light rays of the original light beam 1 are reflected to form a second set of light beams 12; the end face of the semi-transparent mirror facing the third group of light beams 13 has relatively smaller reflectivity, that is, higher transmittance, so that the third group of light beams 13 can pass through the semi-transparent mirror as completely as possible, and the semi-transparent mirror can be realized by means of film plating, surface treatment, special material adding and the like, which are not described in detail.
Optionally, as shown in fig. 1 and fig. 2, the beam shaping device in this embodiment further includes a first mirror 3, where the first mirror 3 is configured to change the optical path direction of the original beam 1, so that the original beam 1 is incident on the first beam splitter 21 to split, and by setting the first mirror 3 to adjust the optical path direction of the original beam, the original beam is incident on the first beam splitter 21 without setting a light source at a fixed position, so that any setting of the position of the light source can be implemented, and the practicality of the beam shaping device is improved.
Optionally, the first reflecting assembly includes a plurality of mirrors, and the second set of light beams 12 are reflected by the plurality of mirrors in sequence to form a third set of light beams 13.
In a specific embodiment as shown in fig. 2 and 3, the original beam 1 includes a first laser beam and a second laser beam distributed along the positive direction of the Z-axis, and the first reflecting assembly 3 may include a second mirror 31, a third mirror 32, a fourth mirror 33, a fifth mirror 34, a sixth mirror 35, a seventh mirror 36, and the like, which are sequentially arranged.
The second mirror 31 has a mirror surface normal lying on a plane (Y, Z) and a mirror surface normal at 45 ° to the incident light. The second set of light beams 12 is incident on the second mirror in the negative Y-axis direction and is reflected as beam set a. The beam group a is rotated by 90 ° in the axial direction with respect to the second group 12, and the optical path direction is changed by 90 ° and propagates in the negative Z-axis direction.
The third mirror 32 has a specular normal lying on the plane (X, Z) and a specular normal at 45 ° to the incident light. The beam group a is incident on the third mirror along the negative Z-axis direction and is reflected as beam group B. The beam group B is changed by 90 ° with respect to the beam group a in the optical path direction, and propagates in the positive direction of the X axis (in the present embodiment, the positive direction and the negative direction of the X axis are not limited and are described only as relative relations).
The fourth mirror 33 has a mirror surface normal lying on the plane (X, Y) and having a mirror surface normal at 45 ° to the incident light. The beam group B is incident on the fourth mirror in the positive X-axis direction and is reflected as a beam group C. The beam group C rotates 90 degrees in the axial direction relative to the beam group B, and the direction of the light path changes by 90 degrees, and the light propagates along the positive direction of the Y axis.
The fifth mirror 34 has a mirror surface normal lying on the plane (X, Y) and having a mirror surface normal at 45 ° to the incident light. The beam group C is incident on the fifth mirror in the Y-axis positive direction and is reflected as a beam group D. The beam group D is 90 DEG changed relative to the beam group C, and propagates along the X-axis negative direction.
The sixth mirror 35 has a mirror surface normal lying on the plane (X, Y) and a mirror surface normal at 45 ° to the incident light. The beam group D is incident on the sixth mirror in the negative X-axis direction and is reflected as beam group E. The beam group E is changed by 90 degrees relative to the beam group D in the light path direction, and propagates along the positive direction of the Y axis.
The seventh mirror 36 has a specular normal lying on the plane (Z, Y) and a specular normal at 45 ° to the incident light. The beam group E is incident on the seventh mirror in the Y-axis normal direction and is reflected as the third group beam 13. The third group 13 of beams is directed 90 ° relative to the beam group E and propagates in the positive Z-axis direction.
As can be seen from the above-described respective mirrors and corresponding optical path relationships, in the course of the second group beam 12 to the third group beam 13, the beam shape is rotated by 90 ° in the optical axis direction, that is, the beam shape is rotated by 90 ° in the Z-axis direction, and is changed a plurality of times in the optical path direction, and finally changed to the positive direction of the Z-axis, which is the same as the propagation direction of the first group beam 11.
As can be seen from fig. 3, when the original beam 1 is projected on a plane perpendicular to its optical axis, an original spot pattern 51 with two spots is formed. After being divided into the first group of light beams 11 and the second group of light beams 12, the first group of light beams 11 is projected on a plane perpendicular to the optical axis to form an original light spot diagram 51, and the second group of light beams 12 is axially rotated by 90 degrees in the process of being converted into the third group of light beams 13, so that the third group of light beams 13 is projected on a plane perpendicular to the optical axis to form a second light spot diagram 52, and the third group of light beams 13 and the first group of light beams 11 are overlapped to form a third light spot diagram 53 on a plane perpendicular to the optical axis to form four light spots, so that the distribution is more uniform, and the laser shaping process is realized to a certain extent.
In other embodiments, the number of lasers included in the original beam 1 may be other, and the corresponding number of original projection spots formed by the original beam 1 may also be other, for example, the original beam 1 may also form three spots, after the above process, the overlapping third group of beams 13 and the first group of beams 11 may form six spots, and the original beam 1 may also form four spots, five spots, and so on. It will be readily appreciated that in embodiments where the original beam 1 forms two spots, the direction of rotation of the axes of the second set of beams 12 is 90 ° in order to make the spot distribution uniform, and in other embodiments other degrees are possible, for example 60 °, 45 °, 270 °.
In other embodiments, the sixth mirror 35 and the seventh mirror 36 may be combined into one mirror, and the target shaping effect may be achieved by changing the spatial relationship of the combined mirrors.
Alternatively, as shown in fig. 1 and fig. 2, after the primary shaping is completed, a shaping matrix, that is, a second shaping matrix, may be added to the beam shaping device based on the same principle, so as to perform the primary shaping on the beam, so that the radiation intensity of the shaped beam is more uniform. The second shaping matrix comprises a second beam splitter 22 and a second reflecting component, and for convenience of description, the beam group obtained by combining the first group of light beams 11 and the third group of light beams 13 is called an intermediate group of light beams (which are consistent with the light paths of the first group of light beams 11). The second beam splitter 22 is located in the optical path of the intermediate group of light beams for splitting the intermediate group of light beams into a fourth group of light beams 14 and a fifth group of light beams 15, which differ in optical path. The second reflection assembly is located on the optical path of the fifth group of light beams 15, and is used for changing the direction of the optical path of the fifth group of light beams 15, and rotating the fifth group of light beams 15 along the optical axis by a first preset angle so as to convert the fifth group of light beams into a sixth group of light beams 16 which are coincident with the optical axis of the fourth group of light beams 14. After passing through the second reflecting assembly, the fifth group of light beams 15 both rotates axially in the direction of the optical axis and changes the optical path, and finally forms a sixth group of light beams 16 coinciding with the optical axis of the fourth group of light beams 14. In other words, without considering the light intensity, it is considered that the fourth group of light beams 14 at least partially coincides with the light path of the sixth group of light beams after rotating by the second preset angle about the optical axis as the rotation axis.
Specifically, the second beam splitter 22 is the same as the first beam splitter 21 described above, and the second reflecting component is formed by a plurality of reflecting mirrors. The principle is the same as that of the first beam splitter 21 and the first reflecting component, the second beam splitter 22 and the second reflecting component divide the intermediate light into two again, and then after one part of the light is axially rotated, the light is overlapped with the other part of the light, for convenience of description, the beam group formed by overlapping the sixth beam group 16 and the fourth beam group 14 is called a target beam group, and the light path of the target beam group is identical to that of the fourth beam group 14.
As shown in fig. 3, when the original beam 1 is projected on a plane perpendicular to the optical axis thereof, an original spot diagram 51 with two spots is formed, the original beam 1 is split by the first beam splitter 21 to form a second group of beams 12, the second group of beams 12 are reflected by the first reflection assembly and axially rotated to form a third group of beams 13, and the third group of beams 13 form a first spot diagram 53 on a plane (X, Y) perpendicular to the optical axis thereof; the third group of light beams 13 and the second group of light beams 12 are overlapped to form an intermediate group of light beams, the intermediate group of light beams form a second light spot diagram 53 with four light spots on a plane (X, Y) perpendicular to the optical axis of the intermediate group of light beams, the fourth group of light beams 14 still correspond to the third light spot diagram 53, the sixth group of light beams 16 axially rotate relative to the fifth group of light beams 15 to form a third light spot diagram 54 on a plane perpendicular to the optical axis of the fifth group of light beams, and the target group of light beams formed by overlapping the fourth group of light beams 14 and the sixth group of light beams 16 have eight light spots to form a fourth light spot diagram 55. As can be seen from fig. 3, compared with the second light spot pattern 53 formed after being shaped by one shaping matrix, the fourth light spot pattern 54 formed after being shaped by two shaping matrices has more uniform distribution of light spots on the circumference, that is, the distribution of laser beams on the circumference is more uniform, so that the shaped target group beams have better radiation intensity, and the better the beam shaping effect is.
The second beam splitter 22 is a half-mirror, and the end surface of the second beam splitter 22 facing the middle group of light beams has relatively large reflectivity, so that a part of light rays of the middle group of light beams are reflected to form a fourth group of light beams 14; and on the end face of the second beam splitter 22 facing the sixth group of light beams 16 has a relatively low reflectivity, i.e. a high transmittance, so that the sixth group of light beams 16 can pass through the second beam splitter 22 as completely as possible.
In a specific embodiment, as shown in fig. 1 and 2, the second reflecting assembly includes an eighth reflecting mirror 41, a ninth reflecting mirror 42, a tenth reflecting mirror 43, an eleventh reflecting mirror 44, and a twelfth reflecting mirror 45, which are sequentially arranged:
the eighth reflecting mirror 41 has a mirror surface normal lying on the plane (X, Z) and a mirror surface normal at 22.5 ° to the incident light. The fifth group of light beams 15 is incident on the eighth reflecting mirror 41 in the positive Z-axis direction, reflected as the group of light beams F, and propagates in a direction 45 ° to the negative Z-axis direction with a 45 ° change in the optical path.
The ninth reflecting mirror 42 has a normal line of 45 ° to the incident light, the beam group F is incident on the ninth reflecting mirror 42, reflected as a beam group G, and the optical path is changed by 90 ° and rotated by a second preset angle (45 °) along the optical axis, and propagates in the positive direction of the Y axis.
The tenth reflecting mirror 43 has a mirror surface normal line of 45 ° to the incident light, and the beam group G is incident on the tenth reflecting mirror 43 and reflected as a beam group H, and the optical path is changed by 90 ° and propagates in a direction 45 ° to the positive Z-axis direction.
The eleventh reflecting mirror 44 has a mirror surface normal line on the plane (X, Z) and a mirror surface normal line 45 ° to the incident light, and the beam group H is incident on the eleventh reflecting mirror 44 and reflected as a beam group I, and the optical path changes by 90 °, and propagates in the negative direction of the Z axis.
The twelfth reflecting mirror 45 has a mirror surface normal line 45 ° to the incident light, and the light beam group I enters the twelfth reflecting mirror 45 and is reflected to become the sixth light beam group 16, and the light path changes by 90 ° and propagates in the negative Y-axis direction.
It is to be understood that, in the embodiment where the original beam 1 forms two light spots, in order to make the light spots uniformly distributed, the axis of the fifth group of beams 15 rotates in a direction of 90 °, and in other embodiments, other degrees are also possible, which will not be described herein.
In other embodiments, the number of the shaping matrixes can be determined according to the actual shaping requirement of the light beam, and then the angle of the reflecting component in each shaping matrix for the light beam to rotate along the optical axis is adjusted, so that the light beam can be shaped rapidly and accurately. The beam shaping device comprises a light source, a first shaping matrix, a second shaping matrix and a … … Nth shaping matrix, wherein the larger the number of N is, the more the number of the shaping matrices is, the more uniformly the light beams are distributed on the circumference, and the better the beam shaping effect is.
In an embodiment, a beam shaping system is provided, comprising a light source and the beam shaping device described above. As can be seen from the principle process, the beam splitter splits the incident light beam into two, and then one part of the light beam axially rotates along the optical axis and then overlaps with the other part of the light beam, so that the radiation intensity of the incident light beam is dispersed into more laser beams, the formed light spots have lower radiation intensity difference at the edge and the inside, and the overall radiation intensity is more uniform, thereby realizing the shaping of the laser beams. The beam shaping process has no requirements on the spot size and the beam intensity of incident light, the spatial position of each reflecting mirror in the first reflecting assembly is regulated, the turning of the beam in space is controlled to realize the random rotation of the beam shape in the direction, so that the change of the relative position of the beam in space is caused, the beam is caused to be uniformly distributed on the circumference so as to be overlapped into a flat-top beam, the better beam shaping effect is achieved, the long-distance transmission of the beam can be realized through the reflecting assembly, the complex regulation process is not needed, the energy conversion rate is high, and the high-practicability is realized.
In one embodiment, as shown in fig. 4, a beam shaping method is provided, and the beam shaping device in fig. 2 is taken as an example to illustrate the method, which includes the following steps:
s10: the light source is turned on to make the light source emit an original light beam containing a plurality of laser beams.
S20: the original light beam is divided into a first group of light beams and a second group of light beams with different light paths by using a first spectroscope.
S30: the optical path of the second group of light beams is changed by the first reflection assembly, and the second group of light beams are rotated along the optical axis by a first preset angle so as to be converted into a third group of light beams which are coincident with the optical axis of the first group of light beams.
When the laser beams are required to be shaped, the light source is started to enable the light source to emit original beams containing a plurality of laser beams, then the original beams are divided into a first group of beams and a second group of beams with different light paths by using the first spectroscope, the light paths of the second group of beams are changed by using the first reflection assembly, and the second group of beams are rotated along the optical axis by a first preset angle so as to be converted into a third group of beams which are overlapped with the optical axis of the first group of beams. The shaping process parameters of the beam shaping device for the original beam are described above and will not be described here again.
In this embodiment, the light source is turned on to make the light source emit an original beam containing multiple beams of laser, then the original beam is divided into a first group of beams and a second group of beams with different light paths by using the first spectroscope, then the light path of the second group of beams is changed by using the first reflection assembly, and the second group of beams is rotated by a first preset angle along the optical axis so as to be converted into a third group of beams overlapped with the optical axis of the first group of beams.
In one embodiment, before step S20, that is, before the original beam is split into the first set of beams and the second set of beams by using the first beam splitter, the method further includes the steps of:
s11: the light path of the original light beam is changed by using the first reflector, so that the original light beam is incident into the first spectroscope.
The first reflector is arranged on the light path of the original light beam, and the light path of the original light beam is changed by using the first reflector, so that the original light beam is injected into the first spectroscope, the optional setting of the light source position can be realized, and the practicability of the light beam shaping device is further improved.
In one embodiment, the first beam splitter is a half mirror, and the third set of light beams is incident on and passes through the half mirror (the first beam splitter) and then coincides with the optical axis of the first set of light beams.
In one embodiment, the first reflecting assembly includes a plurality of reflecting mirrors, and the second set of light beams are reflected by the plurality of reflecting mirrors in sequence to form a third set of light beams. The structure of the first reflecting component and the forming process of the third group of light beams are as described above, and are not repeated here.
In an embodiment, the third set of light beams and the optical axis of the first set of light beams are overlapped to form an intermediate set of light beams, in step S30, after the optical path of the second set of light beams is changed by using the first reflection assembly and the second set of light beams are rotated along the optical axis by a first preset angle to be converted into the third set of light beams with the optical axis overlapped to the optical axis of the first set of light beams, the method further includes:
s31: the intermediate group of light beams is split into a fourth group of light beams and a fifth group of light beams having different optical paths by using a second beam splitter.
After the optical path of the second group of light beams is changed by utilizing the first reflection assembly and the second group of light beams are rotated along the optical axis by a first preset angle so as to be converted into a third group of light beams with the optical axis coincident with the optical axis of the first group of light beams, the middle group of light beams are divided into a fourth group of light beams and a fifth group of light beams with different optical paths by utilizing the second beam splitter, and the second beam splitter is positioned on the optical path of the middle group of light beams.
The laser shaping device in this embodiment further includes a second beam splitter and a second reflecting component, and the structures of the second beam splitter and the second reflecting component, and the process of dividing the middle group of light beams into a fourth group of light beams and a fifth group of light beams with different light paths are referred to above, which are not described herein again.
S32: and changing the light path direction of the fifth group of light beams by using the second reflection assembly, and rotating the fifth group of light beams by a second preset angle along the optical axis so as to convert the fifth group of light beams into a sixth group of light beams which are coincident with the optical axis of the fourth group of light beams.
After the middle group of light beams are divided into a fourth group of light beams and a fifth group of light beams with different light paths by using a second beam splitter, the light path direction of the fifth group of light beams is changed by using a second reflection assembly, and the fifth group of light beams are rotated along the optical axis by a second preset angle so as to be converted into a sixth group of light beams which are coincident with the optical axis of the fourth group of light beams. The formation process of the sixth group of light beams is as described above, and will not be described here again.
In this embodiment, the first reflection assembly is used to change the optical path of the second group of light beams, and rotate the second group of light beams along the optical axis by a first preset angle to convert the second group of light beams into a third group of light beams with the optical axis coincident with the optical axis of the first group of light beams, then the second beam splitter is used to split the middle group of light beams into a fourth group of light beams and a fifth group of light beams with different optical paths, the second reflection assembly is used to change the optical path direction of the fifth group of light beams, and rotate the fifth group of light beams along the optical axis by a second preset angle to convert the fifth group of light beams into a sixth group of light beams with the optical axis coincident with the fourth group of light beams, and the light beams are again rotated along the optical axis by the second beam splitter and the second reflection assembly, so that the number of laser beams is more, and the distribution on the circumference is more uniform, thereby the shaped target group of light beams has better radiation intensity and better beam shaping effect.
It should be understood that the sequence number of each step in the foregoing embodiment does not mean that the execution sequence of each process should be determined by the function and the internal logic, and should not limit the implementation process of the embodiment of the present invention.
The above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention, and are intended to be included in the scope of the present invention.
Claims (5)
1. A beam shaping device comprising a first shaping matrix comprising a first beam splitter and a first reflecting assembly, wherein:
the first spectroscope is positioned on the light path of an original light beam, and is used for dividing the original light beam into a first group of light beams and a second group of light beams with different light paths, wherein the original light beam is a light beam which is emitted by a light source and comprises a plurality of laser beams;
the first reflection assembly is used for changing the light path of the second group of light beams and rotating the second group of light beams along the optical axis by a first preset angle so as to convert the second group of light beams into a third group of light beams which are coincident with the optical axis of the first group of light beams;
the first spectroscope is a semi-transparent mirror, and the third group of light beams are incident and pass through the semi-transparent mirror and then coincide with the optical axis of the first group of light beams;
the beam shaping device further comprises a first reflecting mirror, wherein the first reflecting mirror is used for changing the light path of the original beam so as to enable the original beam to enter the first spectroscope; the first reflecting assembly comprises a plurality of reflecting mirrors, and the second group of light beams are reflected by the reflecting mirrors in sequence to form the third group of light beams.
2. The beam shaping device according to claim 1, wherein the third set of light beams and the first set of light beams form an intermediate set of light beams after being coincident with each other in optical axis, the beam shaping device further comprising:
a second shaping matrix comprising a second beam splitter and a second reflecting component;
the second beam splitter is positioned on the optical path of the middle group of light beams and is used for splitting the middle group of light beams into a fourth group of light beams and a fifth group of light beams with different optical paths;
the second reflection assembly is used for changing the light path direction of the fifth group of light beams and rotating the fifth group of light beams along the optical axis by a first preset angle so as to convert the fifth group of light beams into a sixth group of light beams which are coincident with the optical axis of the fourth group of light beams.
3. A beam shaping system comprising a light source and a beam shaping device as claimed in any one of claims 1-2.
4. A method of beam shaping comprising:
turning on a light source to make the light source emit an original light beam containing a plurality of laser beams;
dividing the original light beam into a first group of light beams and a second group of light beams with different light paths by using a first spectroscope;
changing the light path of the second group of light beams by using a first reflection assembly, and rotating the second group of light beams along the optical axis by a first preset angle so as to convert the second group of light beams into a third group of light beams which are coincident with the optical axis of the first group of light beams;
the first spectroscope is a semi-transparent mirror, and the third group of light beams are incident and pass through the semi-transparent mirror and then coincide with the optical axis of the first group of light beams;
wherein, the light path of the original light beam is changed by a first reflector, so that the original light beam is incident on the first spectroscope; the first reflecting assembly comprises a plurality of reflecting mirrors, and the second group of light beams are reflected by the reflecting mirrors in sequence to form the third group of light beams.
5. The beam shaping method according to claim 4, wherein after the third group of light beams coincides with the optical axis of the first group of light beams to form an intermediate group of light beams, the first reflection assembly is used to change the optical path of the second group of light beams, and the second group of light beams is rotated by a first preset angle along the optical axis to be converted into a third group of light beams whose optical axes coincide with the optical axis of the first group of light beams, the method further comprises:
dividing the intermediate group of light beams into a fourth group of light beams and a fifth group of light beams with different light paths by using a second beam splitter;
and changing the light path direction of the fifth group of light beams by using a second reflection assembly, and rotating the fifth group of light beams by a second preset angle along the optical axis so as to convert the fifth group of light beams into a sixth group of light beams which are coincident with the optical axis of the fourth group of light beams.
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Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009032780A (en) * | 2007-07-25 | 2009-02-12 | Sumitomo Heavy Ind Ltd | Optical axis changing device, beam irradiation device, and beam irradiation method |
| CN102540476A (en) * | 2012-03-01 | 2012-07-04 | 浙江大学 | Three-dimensional hollow light spot generating method and device |
| CN102597845A (en) * | 2009-11-02 | 2012-07-18 | 奥林巴斯株式会社 | Beam splitter apparatus, light source apparatus, and scanning observation apparatus |
| JP2017224708A (en) * | 2016-06-15 | 2017-12-21 | 株式会社日本製鋼所 | Method of producing polycrystalline semiconductor film, laser annealing device, thin film transistor, and display |
| CN109681790A (en) * | 2017-10-18 | 2019-04-26 | 深圳市绎立锐光科技开发有限公司 | Light-source system and lighting apparatus |
| CN110380327A (en) * | 2019-07-30 | 2019-10-25 | 中国人民解放军国防科技大学 | Light beam near-field intensity distribution self-homogenizing high-energy laser |
| WO2020093727A1 (en) * | 2018-11-06 | 2020-05-14 | 浙江大学 | Structured light generation device and method based on beam shaping |
| WO2020213200A1 (en) * | 2019-04-16 | 2020-10-22 | 株式会社日本製鋼所 | Laser irradiation device, laser irradiation method, and method of manufacturing semiconductor device |
| CN111896937A (en) * | 2020-08-24 | 2020-11-06 | 西安炬光科技股份有限公司 | Optical module for light beam superposition and laser system |
| CN112612141A (en) * | 2020-12-31 | 2021-04-06 | 华中科技大学 | Optical system for shaping light beam |
-
2021
- 2021-11-05 CN CN202111308804.4A patent/CN114114699B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009032780A (en) * | 2007-07-25 | 2009-02-12 | Sumitomo Heavy Ind Ltd | Optical axis changing device, beam irradiation device, and beam irradiation method |
| CN102597845A (en) * | 2009-11-02 | 2012-07-18 | 奥林巴斯株式会社 | Beam splitter apparatus, light source apparatus, and scanning observation apparatus |
| CN102540476A (en) * | 2012-03-01 | 2012-07-04 | 浙江大学 | Three-dimensional hollow light spot generating method and device |
| JP2017224708A (en) * | 2016-06-15 | 2017-12-21 | 株式会社日本製鋼所 | Method of producing polycrystalline semiconductor film, laser annealing device, thin film transistor, and display |
| CN109681790A (en) * | 2017-10-18 | 2019-04-26 | 深圳市绎立锐光科技开发有限公司 | Light-source system and lighting apparatus |
| WO2020093727A1 (en) * | 2018-11-06 | 2020-05-14 | 浙江大学 | Structured light generation device and method based on beam shaping |
| WO2020213200A1 (en) * | 2019-04-16 | 2020-10-22 | 株式会社日本製鋼所 | Laser irradiation device, laser irradiation method, and method of manufacturing semiconductor device |
| CN110380327A (en) * | 2019-07-30 | 2019-10-25 | 中国人民解放军国防科技大学 | Light beam near-field intensity distribution self-homogenizing high-energy laser |
| CN111896937A (en) * | 2020-08-24 | 2020-11-06 | 西安炬光科技股份有限公司 | Optical module for light beam superposition and laser system |
| CN112612141A (en) * | 2020-12-31 | 2021-04-06 | 华中科技大学 | Optical system for shaping light beam |
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Address after: 518000, Building 101, 1st floor, 2nd floor, 4th floor, 3rd floor, 7th floor, 1st floor, and 4th floor of Building 3, Dahua Laser Intelligent Manufacturing Center, No. 12 Chongqing Road, Heping Community, Fuhai Street, Bao'an District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Han's CNC Technology Co.,Ltd. Country or region after: China Address before: 518101 5 / F, 1 / 2 / F, 14 / F, 17 / F, No.3 Factory building, antuoshan hi tech Industrial Park, Xinsha Road, Shajing street, Bao'an District, Shenzhen City, Guangdong Province Patentee before: Shenzhen Han's CNC Technology Co.,Ltd. Country or region before: China |