CN114072995B - 用于平面驱动系统的定子模块的装置 - Google Patents
用于平面驱动系统的定子模块的装置 Download PDFInfo
- Publication number
- CN114072995B CN114072995B CN202080047214.8A CN202080047214A CN114072995B CN 114072995 B CN114072995 B CN 114072995B CN 202080047214 A CN202080047214 A CN 202080047214A CN 114072995 B CN114072995 B CN 114072995B
- Authority
- CN
- China
- Prior art keywords
- stator module
- stator
- mover
- gap
- functional element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004140 cleaning Methods 0.000 claims description 30
- 239000012530 fluid Substances 0.000 claims description 17
- 230000005415 magnetization Effects 0.000 claims description 16
- 230000001954 sterilising effect Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 5
- MROJXXOCABQVEF-UHFFFAOYSA-N Actarit Chemical compound CC(=O)NC1=CC=C(CC(O)=O)C=C1 MROJXXOCABQVEF-UHFFFAOYSA-N 0.000 claims 11
- 238000012545 processing Methods 0.000 description 19
- 239000004020 conductor Substances 0.000 description 15
- 239000007789 gas Substances 0.000 description 10
- 239000007788 liquid Substances 0.000 description 9
- 238000003754 machining Methods 0.000 description 6
- 230000006870 function Effects 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000011012 sanitization Methods 0.000 description 3
- 230000012447 hatching Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000005429 filling process Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 239000003206 sterilizing agent Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/12—Stationary parts of the magnetic circuit
- H02K1/18—Means for mounting or fastening magnetic stationary parts on to, or to, the stator structures
- H02K1/182—Means for mounting or fastening magnetic stationary parts on to, or to, the stator structures to stators axially facing the rotor, i.e. with axial or conical air gap
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G45/00—Lubricating, cleaning, or clearing devices
- B65G45/10—Cleaning devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G54/00—Non-mechanical conveyors not otherwise provided for
- B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/12—Stationary parts of the magnetic circuit
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/30—Structural association with control circuits or drive circuits
- H02K11/33—Drive circuits, e.g. power electronics
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K29/00—Motors or generators having non-mechanical commutating devices, e.g. discharge tubes or semiconductor devices
- H02K29/06—Motors or generators having non-mechanical commutating devices, e.g. discharge tubes or semiconductor devices with position sensing devices
- H02K29/10—Motors or generators having non-mechanical commutating devices, e.g. discharge tubes or semiconductor devices with position sensing devices using light effect devices
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
- H02K2213/09—Machines characterised by the presence of elements which are subject to variation, e.g. adjustable bearings, reconfigurable windings, variable pitch ventilators
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Engineering (AREA)
- Linear Motors (AREA)
- Permanent Magnet Type Synchronous Machine (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102019117431.7A DE102019117431A1 (de) | 2019-06-27 | 2019-06-27 | Anordnung von Statormodulen für ein Planarantriebssystem |
| DE102019117431.7 | 2019-06-27 | ||
| DE102019118635.8 | 2019-07-10 | ||
| DE102019118635 | 2019-07-10 | ||
| PCT/EP2020/068000 WO2020260566A1 (fr) | 2019-06-27 | 2020-06-26 | Agencement de modules de stator pour un système d'entraînement planaire |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114072995A CN114072995A (zh) | 2022-02-18 |
| CN114072995B true CN114072995B (zh) | 2024-03-12 |
Family
ID=71170623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202080047214.8A Active CN114072995B (zh) | 2019-06-27 | 2020-06-26 | 用于平面驱动系统的定子模块的装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20220131426A1 (fr) |
| EP (1) | EP3973623B1 (fr) |
| CN (1) | CN114072995B (fr) |
| CA (1) | CA3143896C (fr) |
| WO (1) | WO2020260566A1 (fr) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102017131320A1 (de) | 2017-12-27 | 2019-06-27 | Beckhoff Automation Gmbh | Planarantriebssystem, Statormodul und Sensormodul |
| DE102017131326A1 (de) | 2017-12-27 | 2019-06-27 | Beckhoff Automation Gmbh | Statormodul |
| DE102017131304A1 (de) | 2017-12-27 | 2019-06-27 | Beckhoff Automation Gmbh | Statormodul |
| DE102017131314A1 (de) | 2017-12-27 | 2019-06-27 | Beckhoff Automation Gmbh | Statormodul |
| DE102017131321B4 (de) | 2017-12-27 | 2020-03-12 | Beckhoff Automation Gmbh | Statoreinheit und Statormodul |
| DE102019117430A1 (de) | 2019-06-27 | 2020-12-31 | Beckhoff Automation Gmbh | Verfahren zum Bewegen eines Läufers in einem Planarantriebssystem |
| DE102022108188A1 (de) * | 2022-04-05 | 2023-10-05 | Syntegon Technology Gmbh | Planar-Antriebssystem und ein Verfahren zur Montage und Demontage von Statormodulen |
| DE102022118128A1 (de) * | 2022-07-20 | 2024-01-25 | Syntegon Technology Gmbh | Planarantriebsvorrichtung und Verfahren zum Betrieb einer Planarantriebsvorrichtung |
| DE102022120674A1 (de) * | 2022-08-16 | 2024-02-22 | Syntegon Technology Gmbh | Planarantrieb, pharmazeutische Anlage und Verfahren zur Dekontamination eines Planarantriebes |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007038845A1 (de) * | 2007-08-16 | 2009-03-19 | Dorma Gmbh + Co. Kg | Anordnung von Statormodulen in einem Linearmotor |
| WO2013059934A1 (fr) * | 2011-10-27 | 2013-05-02 | The University Of British Columbia | Dispositifs de déplacement et leurs procédés de fabrication, d'utilisation et de commande |
| EP2779390A2 (fr) * | 2013-03-15 | 2014-09-17 | Rockwell Automation Technologies, Inc. | Système de déplacement commandé présentant un pont de flux magnétique reliant les sections de moteur linéaire |
| CN107852081A (zh) * | 2015-08-11 | 2018-03-27 | 费斯托股份有限两合公司 | 带有磁体组件的定位系统 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005327993A (ja) * | 2004-05-17 | 2005-11-24 | Canon Inc | 位置決め装置、露光装置及びデバイス製造方法 |
| US7420299B2 (en) * | 2006-08-25 | 2008-09-02 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| KR102126664B1 (ko) * | 2012-10-02 | 2020-06-25 | 가부시키가이샤 니콘 | 이동체 장치, 노광 장치, 및 디바이스 제조 방법 |
| DE102013218402A1 (de) * | 2013-09-13 | 2015-03-19 | Krones Ag | Vorrichtung und Verfahren zum Durchführen von Sonderfunktionen einer Transporteinrichtung in einer Behälterbehandlungsanlage |
| DE102017131324A1 (de) | 2017-12-27 | 2019-06-27 | Beckhoff Automation Gmbh | Statormodul und Planarantriebssystem |
| DE102017131304A1 (de) | 2017-12-27 | 2019-06-27 | Beckhoff Automation Gmbh | Statormodul |
-
2020
- 2020-06-26 CA CA3143896A patent/CA3143896C/fr active Active
- 2020-06-26 WO PCT/EP2020/068000 patent/WO2020260566A1/fr active Search and Examination
- 2020-06-26 CN CN202080047214.8A patent/CN114072995B/zh active Active
- 2020-06-26 EP EP20734944.0A patent/EP3973623B1/fr active Active
-
2021
- 2021-12-03 US US17/541,530 patent/US20220131426A1/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007038845A1 (de) * | 2007-08-16 | 2009-03-19 | Dorma Gmbh + Co. Kg | Anordnung von Statormodulen in einem Linearmotor |
| WO2013059934A1 (fr) * | 2011-10-27 | 2013-05-02 | The University Of British Columbia | Dispositifs de déplacement et leurs procédés de fabrication, d'utilisation et de commande |
| EP2779390A2 (fr) * | 2013-03-15 | 2014-09-17 | Rockwell Automation Technologies, Inc. | Système de déplacement commandé présentant un pont de flux magnétique reliant les sections de moteur linéaire |
| CN107852081A (zh) * | 2015-08-11 | 2018-03-27 | 费斯托股份有限两合公司 | 带有磁体组件的定位系统 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3973623A1 (fr) | 2022-03-30 |
| CA3143896A1 (fr) | 2020-12-30 |
| CN114072995A (zh) | 2022-02-18 |
| EP3973623B1 (fr) | 2023-11-01 |
| EP3973623C0 (fr) | 2023-11-01 |
| CA3143896C (fr) | 2024-01-30 |
| US20220131426A1 (en) | 2022-04-28 |
| WO2020260566A1 (fr) | 2020-12-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN114072995B (zh) | 用于平面驱动系统的定子模块的装置 | |
| DE102019117431A1 (de) | Anordnung von Statormodulen für ein Planarantriebssystem | |
| US6064035A (en) | Process chamber for laser peening | |
| CN104768704B (zh) | 立式加工中心 | |
| KR20050026371A (ko) | 범용 모듈형 웨이퍼 이송 시스템 | |
| NL8105096A (nl) | Informatieschijfcassette. | |
| JP4477496B2 (ja) | レチクル取り扱い装置 | |
| CN208099923U (zh) | 机床 | |
| CN104703751A (zh) | 用于加工工件的加工机和方法 | |
| JP7312541B2 (ja) | 被加工物をクランプし、密封するよう構成されたクランプシステムを伴う可動キャリッジを有する、レーザアブレーションシステム | |
| US20220297961A1 (en) | Transport mechanism and air flow control apparatus | |
| JP2017048407A (ja) | 積層造形装置 | |
| CN218610799U (zh) | 激光工件清洗系统 | |
| CN108986849B (zh) | 智能可移动硬盘存储安全箱 | |
| CA2375587A1 (fr) | Positionneur ne laissant passer aucune lumiere | |
| CN214554782U (zh) | 处理设备 | |
| CN211643215U (zh) | 一种无尘室物料运输窗 | |
| CN113576321A (zh) | 一种吸附式清洁机器人及吸附方法 | |
| JP2020111836A (ja) | 三次元的な物体を付加的に製造するための装置 | |
| CN215089104U (zh) | 档案资料快速杀菌烘干除尘设备 | |
| EP3981307B1 (fr) | Récipient de collecte pour un dispositif de nettoyage | |
| EP1168352A2 (fr) | Système de stockage de données | |
| CN215052606U (zh) | 一种用于卸料车轨道的清扫装置 | |
| CN214755260U (zh) | 一种综合布线系统中的综合布线装置 | |
| CN215790851U (zh) | 石墨加工设备及其刀库 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |