CN114063204B - Light splitting sheet and preparation method thereof - Google Patents
Light splitting sheet and preparation method thereof Download PDFInfo
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- CN114063204B CN114063204B CN202111215808.8A CN202111215808A CN114063204B CN 114063204 B CN114063204 B CN 114063204B CN 202111215808 A CN202111215808 A CN 202111215808A CN 114063204 B CN114063204 B CN 114063204B
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- double
- layer
- flat sheet
- light
- sheet
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- 238000002360 preparation method Methods 0.000 title description 7
- 238000005498 polishing Methods 0.000 claims abstract description 37
- 238000001228 spectrum Methods 0.000 claims abstract description 10
- 229910052984 zinc sulfide Inorganic materials 0.000 claims description 27
- 238000007747 plating Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 4
- 239000005083 Zinc sulfide Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 239000005304 optical glass Substances 0.000 claims description 3
- 238000002310 reflectometry Methods 0.000 claims description 3
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 claims description 3
- 238000002834 transmittance Methods 0.000 claims description 2
- 230000007613 environmental effect Effects 0.000 abstract description 4
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000003331 infrared imaging Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000985 reflectance spectrum Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
- G02B5/286—Interference filters comprising deposited thin solid films having four or fewer layers, e.g. for achieving a colour effect
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Laminated Bodies (AREA)
- Optical Filters (AREA)
Abstract
The invention relates to a light-splitting sheet, which comprises a first double-polishing flat sheet and a second double-polishing flat sheet which are overlapped and bonded, wherein the bonding surface of the first double-polishing flat sheet, which is used for bonding with the second double-polishing flat sheet, is plated with a light-splitting film; the exposed surface of the first double-polished flat piece is plated with a visible light antireflection film; the exposed surface of the second double-polished flat sheet is plated with a visible light and infrared light dual-band antireflection film; the light splitting film comprises a first ZnS layer, an Ag layer and a second ZnS layer which are sequentially arranged from being close to the surface of the first double-polished flat piece to being far away from the surface of the first double-polished flat piece. The light-splitting sheet has the characteristics of visible and infrared double wide spectrum, and meets the requirements of T >90% @400-700nm and R >90@8-12um. The invention has low structural cost and high environmental reliability, can protect the light splitting film with poor stability, and effectively improves the service strength and service life of the light splitting film.
Description
Technical Field
The invention relates to a light splitting sheet and a preparation method thereof.
Background
The spectrum color separation filter is important to the imaging spectrum technology, and is an important device for realizing small volume and light weight of the photoelectric instrument. Infrared imaging technology is widely used in both military and civilian applications by virtue of its excellent concealment, electromagnetic interference resistance and identification. The light-splitting device used in the optical system of infrared light and visible light double-light fusion has the advantages of wide application spectrum band, high spectrum performance index, high requirement on environmental reliability and great difficulty in design and preparation.
Theoretically, there are two design ideas: firstly, the design theory of a shortwave pass filter film is utilized, and the shortwave pass filter film is manufactured by using two full-medium materials with high and low refractive indexes, but the scheme has great difficulty in process realization and high cost for realizing a wide spectrum light splitting sheet with visible light of 400-700nm and infrared reflection of 8-12 mu m; secondly, the principle of metal induced anti-reflection is utilized, and metal and dielectric materials are adopted for manufacturing, but the scheme is limited by the physical and chemical characteristics of the metal materials, the environmental reliability is poor, and the application requirements of the field environment cannot be met.
Disclosure of Invention
The invention provides a light-splitting sheet and a preparation method thereof, wherein the light-splitting sheet can realize a broad spectrum with a transmittance of more than 90% in a visible light wave band (400-700 nm) and a reflectance of more than 90% in an infrared light wave band (8-12 um), has low cost, can protect a middle light-splitting film, and effectively improves the service intensity and service life of the light-splitting film.
The invention is realized by the following technical scheme:
a beam splitter, characterized in that: comprises a first double-polishing flat sheet and a second double-polishing flat sheet which are overlapped and adhered,
the first double-polishing flat sheet is coated with a light splitting film on an adhesive surface of the first double-polishing flat sheet, which is used for being adhered with the second double-polishing flat sheet; the exposed surface of the first double-polished flat piece is plated with a visible light antireflection film;
the exposed surface of the second double-polished flat sheet is plated with a visible light and infrared light dual-band antireflection film;
the light splitting film comprises a first ZnS layer, an Ag layer and a second ZnS layer which are sequentially arranged from being close to the surface of the first double-polished flat piece to being far away from the surface of the first double-polished flat piece.
Further, the visible light antireflection film comprises a first H which is sequentially arranged from being close to the surface of the first double-polished flat piece to being far away from the surface of the first double-polished flat piece 4 Layer, first MgF 2 Layer, second H 4 Layer and second MgF 2 A layer;
the first H 4 The thickness of the layer is 16nm, the first MgF 2 The thickness of the layer is 30nm, the second H 4 The thickness of the layer is 135nm, the second MgF 2 The thickness of the layer was 92nm.
Further, the visible light and infrared light dual-band antireflection film comprises a first YbF which is sequentially arranged from being close to the surface of the second double-polished flat piece to being far away from the surface of the second double-polished flat piece 3 Layer, first ZnS layer, second YbF 3 Layer, second ZnS layer, third YbF 3 Layer, third ZnS layer, fourth YbF 3 The layer of the material is formed from a layer,
first YbF 3 The thickness of the layer is 26nm, the thickness of the first ZnS layer is 17nm, the second YbF 3 The thickness of the layer is 1029nm, the thickness of the second ZnS layer is 10nm, the third YbF 3 The thickness of the layer is 37nm, the thickness of the third ZnS layer is 110nm, and the fourth YbF 3 The thickness of the layer was 85nm.
Specifically, the first double-polished flat piece is K9 optical glass, and the second double-polished flat piece is K9 zinc sulfide crystal.
The exposed surface of the second double-polishing flat sheet is an incident surface, the exposed surface of the first double-polishing flat sheet is an emergent surface, incident light comprises visible light and infrared light, and finally the visible light passes through the light-splitting sheet and the infrared light is reflected out of the light-splitting sheet.
The preparation method of the light-splitting sheet comprises the following steps: preparing a first double-polishing sheet and a second double-polishing sheet; then plating a visible light antireflection film on the exposed surface of the first double polished flat piece; plating a light splitting film on the bonding surface of the first double-polished flat sheet; and finally, bonding the surface of the first double-polished flat piece plated with the light splitting film with the surface of the second double-polished flat piece not plated with the film.
Compared with the prior art, the invention has the following beneficial effects:
the light splitting sheet has the characteristics of visible and infrared double wide spectrum, and meets the requirements of T >90% @400-700nm and R >90@8-12um.
The invention has low structural cost and high environmental reliability, can protect the light splitting film with poor stability, and effectively improves the service strength and service life of the light splitting film.
Drawings
Fig. 1 is a schematic structural view of the present invention.
FIG. 2 is a reflectance spectrum of example 1 of the present invention.
Fig. 3 is a graph showing the reflection spectrum of the visible light antireflection film coated on the first double polished flat sheet in example 1 of the present invention.
FIG. 4 is a graph showing the reflection spectrum of the second double polished flat sheet of example 1 of the present invention after being coated with a dual band anti-reflection film for visible and infrared light.
Detailed Description
The invention is further illustrated in the following in connection with the detailed description:
example 1
A beam splitter comprises a first double-polishing flat sheet 1 and a second double-polishing flat sheet 2 which are overlapped and bonded,
the first double-polishing flat sheet 1 is coated with a light splitting film 1-2 on an adhesive surface for adhering to the second double-polishing flat sheet 2; the exposed surface of the first double-polished flat piece is plated with a visible light antireflection film 1-1;
the exposed surface of the second double-polishing flat sheet 2 is plated with a visible light and infrared light double-band antireflection film 2-1;
the light splitting film 1-2 comprises a first ZnS layer, an Ag layer and a second ZnS layer which are sequentially arranged from the surface close to the first double-polishing flat sheet 1 to the surface far from the first double-polishing flat sheet 1.
The visible light antireflection film 1-1 of the scheme comprises a first H which is sequentially arranged from being close to the surface of the first double-polishing flat piece 1 to being far away from the surface of the first double-polishing flat piece 1 4 Layer, first MgF 2 Layer, second H 4 Layer and second MgF 2 A layer;
the first H 4 The thickness of the layer is 16nm, the first MgF 2 The thickness of the layer is 30nm, the second H 4 The thickness of the layer is 135nm, the second MgF 2 The thickness of the layer was 92nm.
The reflectivity of the visible light antireflection film 1-1 in the scheme is less than 0.5% at 400-700 nm.
The dual-band antireflection film 2-1 for visible light and infrared light according to this embodiment includes a first YbF disposed in order from a surface proximate to the second double-cast flat sheet 2 to a surface remote from the second double-cast flat sheet 2 3 Layer, first ZnS layer, second YbF 3 Layer, second ZnS layer, third YbF 3 Layer, third ZnS layer, fourth YbF 3 The layer of the material is formed from a layer,
first YbF 3 The thickness of the layer is 26nm, the thickness of the first ZnS layer is 17nm, the second YbF 3 The thickness of the layer is 1029nm, the thickness of the second ZnS layer is 10nm, the third YbF 3 The thickness of the layer is 37nm, the thickness of the third ZnS layer is 110nm, and the fourth YbF 3 Thickness of layerThe degree was 85nm.
The reflectivity of the visible light and infrared light dual-band antireflection film in the wave bands of 400-700nm and 8-12um is less than 1.0%.
Specifically, the first double polished flat sheet 1 is K9 optical glass, and the second double polished flat sheet 2 is a K9 zinc sulfide crystal.
The preparation method of the light-splitting sheet comprises the following steps: preparing a first double-polishing sheet and a second double-polishing sheet; then plating a visible light antireflection film 1-1 on the exposed surface of the first double polished flat sheet 1; plating a light splitting film 1-2 on the bonding surface of the first double-polished flat sheet 1; and finally, the surface of the first double-polished flat piece plated with the light splitting film 1-2 is bonded with the surface of the second double-polished flat piece 2 which is not plated with the film.
The present invention is not limited to the above embodiments, but any modifications or substitutions according to the principles of the present invention should be considered as falling within the scope of the present invention.
Claims (3)
1. A beam splitter, characterized in that: comprises a first double-polishing flat sheet (1) and a second double-polishing flat sheet (2) which are overlapped and adhered,
the first double-polishing flat sheet (1) is coated with a light splitting film (1-2) on the bonding surface of the first double-polishing flat sheet, which is used for bonding with the second double-polishing flat sheet (2); the exposed surface of the first double-polished flat piece is plated with a visible light antireflection film (1-1);
the exposed surface of the second double-polishing flat sheet (2) is plated with a visible light and infrared light double-band antireflection film (2-1);
the light splitting film (1-2) comprises a first ZnS layer, an Ag layer and a second ZnS layer which are sequentially arranged from the surface close to the first double-polishing flat sheet (1) to the surface far away from the first double-polishing flat sheet (1);
the visible light antireflection film (1-1) comprises a first H which is sequentially arranged from being close to the surface of the first double-polished flat piece (1) to being far away from the surface of the first double-polished flat piece (1) 4 Layer, first MgF 2 Layer, second H 4 Layer and second MgF 2 A layer;
the first H 4 The thickness of the layer is 16nm, the first MgF 2 The thickness of the layer is 30nm, the second H 4 The thickness of the layer is 135nm, the second MgF 2 The thickness of the layer was 92nm;
the visible light and infrared light dual-band antireflection film (2-1) comprises a first YbF which is sequentially arranged from the surface close to the second double-polished flat sheet (2) to the surface far from the second double-polished flat sheet (2) 3 Layer, first ZnS layer, second YbF 3 Layer, second ZnS layer, third YbF 3 Layer, third ZnS layer, fourth YbF 3 The layer of the material is formed from a layer,
first YbF 3 The thickness of the layer is 26nm, the thickness of the first ZnS layer is 17nm, the second YbF 3 The thickness of the layer is 1029nm, the thickness of the second ZnS layer is 10nm, the third YbF 3 The thickness of the layer is 37nm, the thickness of the third ZnS layer is 110nm, and the fourth YbF 3 The thickness of the layer was 85nm;
the light splitting sheet can realize a wide spectrum with the transmittance of more than 90% in a visible light wave band of 400-700nm and the reflectivity of more than 90% in an infrared light wave band of 8-12um.
2. A beam splitter according to claim 1, wherein: the first double-polished flat piece (1) is K9 optical glass, and the second double-polished flat piece (2) is K9 zinc sulfide crystal.
3. The method for preparing a spectroscopic sheet according to claim 1 or 2, characterized in that: the method comprises the following steps: preparing a first double-polishing sheet and a second double-polishing sheet; then plating a visible light antireflection film (1-1) on the exposed surface of the first double polished flat sheet (1); plating a light splitting film (1-2) on the bonding surface of the first double-polished flat sheet (1); and plating a visible light and infrared light dual-band antireflection film (2-1) on the exposed surface of the second double-polishing flat sheet, and finally bonding the surface of the first double-polishing flat sheet plated with the light splitting film (1-2) with the surface of the second double-polishing flat sheet (2) not plated with the film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111215808.8A CN114063204B (en) | 2021-10-19 | 2021-10-19 | Light splitting sheet and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111215808.8A CN114063204B (en) | 2021-10-19 | 2021-10-19 | Light splitting sheet and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114063204A CN114063204A (en) | 2022-02-18 |
| CN114063204B true CN114063204B (en) | 2024-02-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111215808.8A Active CN114063204B (en) | 2021-10-19 | 2021-10-19 | Light splitting sheet and preparation method thereof |
Country Status (1)
| Country | Link |
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| CN (1) | CN114063204B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101226244A (en) * | 2008-02-01 | 2008-07-23 | 中国科学院上海技术物理研究所 | Membrane series structure of visible/infrared broad spectrum color-separation plate |
| CN203250040U (en) * | 2013-04-26 | 2013-10-23 | 中国科学院上海技术物理研究所 | Wide spectrum out band rejection optical filter |
| CN106526732A (en) * | 2016-12-29 | 2017-03-22 | 三明福特科光电有限公司 | Integrated day and night optical filter |
| CN108931832A (en) * | 2018-09-28 | 2018-12-04 | 杭州科汀光学技术有限公司 | Deep cut-off narrow band filter and optical instrument based on ultra-wide wavelength high reflection |
| CN111552012A (en) * | 2020-06-19 | 2020-08-18 | 福建福特科光电股份有限公司 | Anti-reflection lens convenient to repair and preparation method thereof |
| CN112578481A (en) * | 2020-12-11 | 2021-03-30 | 中材人工晶体研究院有限公司 | Large-angle medium-long wave infrared anti-reflection protective film and preparation method thereof |
-
2021
- 2021-10-19 CN CN202111215808.8A patent/CN114063204B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101226244A (en) * | 2008-02-01 | 2008-07-23 | 中国科学院上海技术物理研究所 | Membrane series structure of visible/infrared broad spectrum color-separation plate |
| CN203250040U (en) * | 2013-04-26 | 2013-10-23 | 中国科学院上海技术物理研究所 | Wide spectrum out band rejection optical filter |
| CN106526732A (en) * | 2016-12-29 | 2017-03-22 | 三明福特科光电有限公司 | Integrated day and night optical filter |
| CN108931832A (en) * | 2018-09-28 | 2018-12-04 | 杭州科汀光学技术有限公司 | Deep cut-off narrow band filter and optical instrument based on ultra-wide wavelength high reflection |
| CN111552012A (en) * | 2020-06-19 | 2020-08-18 | 福建福特科光电股份有限公司 | Anti-reflection lens convenient to repair and preparation method thereof |
| CN112578481A (en) * | 2020-12-11 | 2021-03-30 | 中材人工晶体研究院有限公司 | Large-angle medium-long wave infrared anti-reflection protective film and preparation method thereof |
Non-Patent Citations (1)
| Title |
|---|
| 特宽光谱分光膜的镀制;谭宇;应用光学;第26卷(第4期);53-55 * |
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| CN114063204A (en) | 2022-02-18 |
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