CN114055265A - Processing device - Google Patents

Abstract

The invention provides a processing device, which shortens the waiting time of a grinding unit and improves the productivity of the grinding device. The conveying unit (100) receives a plurality of plate-shaped workpieces temporarily placed on the temporary placing unit and conveys the workpieces to the 1 st holding surface of the rough grinding part through one operation of the holding part (140) realized by the moving unit (110). That is, the plurality of plate-like works placed in the temporary placement unit can be conveyed onto the 1 st holding surface by one conveyance operation. Therefore, the conveying time for conveying the plurality of plate-like workpieces to the 1 st holding surface can be shortened. This can shorten the waiting time of the rough grinding portion. Therefore, the productivity of the processing apparatus can be improved.

Description

Processing device

Technical Field

The present invention relates to a processing apparatus.

Background

In a grinding apparatus in which a plate-shaped workpiece is held by a holding surface of a chuck table and an upper surface of the plate-shaped workpiece is ground by a grinding wheel, for example, as disclosed in patent document 1, a plurality of plate-shaped workpieces may be held by the holding surface.

Patent document 1: japanese patent laid-open No. 2020-55080

When a plurality of plate-like works are held by the holding surface, the plate-like works are conveyed onto the holding surface by passing the plate-like works a plurality of times one by the conveying means.

Therefore, the conveying time taken to carry out the plate-shaped workpiece after grinding from the holding surface and then carry in a new plate-shaped workpiece onto the holding surface becomes longer than the grinding time taken for grinding. Therefore, a waiting time is generated in the grinding unit.

Disclosure of Invention

Therefore, an object of the present invention is to shorten the waiting time of the grinding unit and improve the productivity of the grinding apparatus.

The processing apparatus (the present processing apparatus) of the present invention includes at least: a holding unit that holds a plate-shaped workpiece by a holding surface; a processing unit that processes the plate-shaped workpiece held on the holding surface; a cassette mounting table for mounting a cassette having a shelf for accommodating a plurality of plate-like workpieces with a gap therebetween in a vertical direction; a temporarily placing unit for temporarily placing the plate-like workpiece taken out from the cassette; and a conveying unit that conveys the plate-shaped workpieces temporarily placed in the temporary placement unit onto the holding surface, wherein the holding unit has a plurality of the holding surfaces, and the temporary placement unit can temporarily place plate-shaped workpieces of a number corresponding to the number of the holding surfaces, the conveying unit including: a holding section that simultaneously holds a plurality of plate-shaped workpieces; and a moving unit that moves the holding portion from the temporary placing unit to the holding unit, wherein the conveying unit receives the plurality of plate-shaped workpieces temporarily placed in the temporary placing unit by one operation of the holding portion by the moving unit and conveys the plurality of plate-shaped workpieces to the holding surface.

In the processing apparatus, the temporarily placing unit may include: an air slider having an air ejection hole that is opened in an upper surface thereof and ejects air, for supporting a lower surface of the plate-shaped workpiece in a non-contact manner by air, and extending from the cassette to a receiving position of the conveying unit; a slider moving unit that moves a plate-like workpiece supported on the upper surface of the air slider in a non-contact manner by the air in an extending direction of the air slider; and a stopping unit that stops the plate-like workpiece moved by the slide moving unit at the receiving position of the conveying unit.

In this case, the slider moving unit may also have a pushing mechanism that pushes one edge of the plate-like workpiece supported on the upper surface of the air slider in a non-contact manner toward the receiving position, and the stopping unit may also have a stopper that contacts the other edge of the plate-like workpiece moved to the receiving position.

Alternatively, the air injection hole may have: a forward air injection hole as the slider moving means formed obliquely in a moving direction from a direction perpendicular to the upper surface of the air slider so as to flow air in the moving direction of the plate-like workpiece; and a reverse air injection hole as the stopping unit having an inclination opposite to the inclination of the forward air injection hole so as to form a flow of air opposite to the flow of air injected from the forward air injection hole, the temporarily placing unit may also support the plate-shaped workpiece in a non-contact manner at the receiving position by the flow of air injected from the forward air injection hole and the flow of air injected from the reverse air injection hole.

Alternatively, the pause unit may include: a 1 st channel composed of a 1 st rail and a 2 nd rail that support both side lower surfaces of the plate-shaped workpiece, respectively; a 2 nd channel which is arranged in parallel with the 1 st channel and which is constituted by a 3 rd rail and a 4 th rail which support both lower surfaces of the plate-like workpiece, respectively, in the same manner as the 1 st channel; and a width changing unit capable of adjusting widths of the 1 st lane and the 2 nd lane at the same time, the width changing unit may include: a 1 st internal thread formed on the 2 nd rail; a 2 nd female screw formed at the 3 rd track at the same pitch as the 1 st female screw; a 3 rd female screw formed at the 4 th track at a pitch double that of the 1 st and 2 nd female screws; a shaft having a 1 st male screw and a 2 nd male screw, the 1 st male screw being screwed with the 1 st female screw and the 2 nd female screw, the 2 nd male screw being screwed with the 3 rd female screw; and a rotating unit that rotates the shaft, and the width changing unit may be configured to simultaneously expand or simultaneously narrow the widths of the 1 st channel and the 2 nd channel by rotating the shaft.

In the processing apparatus, the temporarily placing unit may include: an endless belt; a rotating mechanism that rotates the endless belt; and a front end sensor that detects that the plate-like workpiece placed on the upper surface of the endless belt has reached the receiving position of the conveying unit.

In this case, the processing apparatus may further include: a detection sensor that detects the plate-like workpiece taken out of the cassette and placed on the endless belt; a dimension setting unit that sets a length and a width that are dimensions of the plate-shaped workpiece; a speed setting unit that rotates the endless belt at a predetermined rotational speed by the rotation mechanism; a time measuring section that measures a time from when the detection sensor detects one edge of the plate-shaped workpiece to when the other edge of the plate-shaped workpiece is detected, when the plate-shaped workpiece having the size set by the size setting section is moved at the speed set by the speed setting section; a dimension calculating section that calculates a dimension of the plate-like workpiece based on the rotation speed of the endless belt set by the speed setting section and the time measured by the time measuring section; and a determination section that determines that there is an abnormality in rotation of the endless belt when the size of the plate-shaped workpiece calculated by the size calculation section is smaller than the size of the plate-shaped workpiece set by the size setting section.

In the processing apparatus, the conveying unit receives the plurality of plate-like workpieces temporarily placed in the temporary placing unit by one operation of the holding portion by the moving unit, and conveys the workpieces onto the holding surface. That is, in the present processing apparatus, the plurality of plate-shaped workpieces temporarily placed in the temporary placement unit can be conveyed onto the holding surface by one conveyance operation. Therefore, the conveying time for conveying the plurality of plate-like workpieces to the holding surface can be shortened. This makes it possible to shorten the waiting time of the processing unit in the processing apparatus. Therefore, the processing apparatus can have high productivity.

Drawings

Fig. 1 is a perspective view showing the structure of a processing apparatus according to an embodiment of the present invention.

Fig. 2 is a perspective view showing the position of the temporarily placing unit.

Fig. 3 is a perspective view showing the structure of the conveying unit.

Fig. 4 is a perspective view showing the structure of the cassette conveying mechanism.

Fig. 5 is a perspective view showing the structure of the temporarily placing unit.

Fig. 6 (a) is a cross-sectional view showing a 1 st female screw formed in a 2 nd track, and fig. 6 (b) is a cross-sectional view showing the structure of a 3 rd female screw formed in a 4 th track.

Fig. 7 (a) is a perspective view showing the structure of the 1 st rail, and fig. 7 (b) is an explanatory view showing the structure of the 1 st rail.

Fig. 8 is an explanatory view showing a state where a plate-like workpiece moves on the 1 st guide rail.

Fig. 9 is an explanatory view showing a state where a plate-shaped workpiece moves on the 1 st rail.

Fig. 10 is an explanatory view showing a state where the plate-like workpiece is stopped on the 1 st rail.

Fig. 11 is a perspective view showing the structure of the 1 st belt moving unit.

Fig. 12 is a perspective view showing the structure of the 2 nd belt moving unit.

Fig. 13 is a perspective view showing another example of the temporarily placing unit.

Description of the reference symbols

1: a processing device; 2: a plate-like workpiece; 3: 1, a device base; 5: a 2 nd device base; 7: a control unit; 10: a rough grinding section; 11: a rough grinding feed unit; 12: 1 st holding surface; 13: 1, a chuck worktable; 15: a rough grinding unit; 18: roughly grinding the grinding tool; 30: a finish grinding section; 31: a finish grinding feed unit; 32: a 2 nd holding surface; 33: 2, a chuck workbench; 35: a finish grinding unit; 38: fine grinding and grinding tool; 40: a cassette mounting table; 41: a cartridge; 180: a cassette transfer space; 60: a cassette conveying mechanism; 61: a housing panel; 62: a moving mechanism; 70: a support mechanism; 170: a conveying space; 100: a conveying unit; 101: a housing panel; 110: a mobile unit; 120: a Y-axis moving mechanism; 130: a Z-axis moving mechanism; 140: a holding section; 141: a holding plate; 142: a suction pad; 152: a relay unit; 153: a mobile unit; 154: a relay station; 155: a robot; 190: temporarily placing a space; 200: a temporary playing unit; 201: a base station; 210: temporarily placing a channel part; 211: 1, a channel; 212: track 1; 213: a 2 nd track; 214: a stopper; 253: a pushing mechanism; 215: a 2 nd channel; 216: a 3 rd track; 217: a 4 th track; 205: a 3 rd channel; 206: a 5 th track; 207: a 6 th track; 250: a guide channel; 251: 1, a first guide rail; 252: a 2 nd guide rail; 260: a step portion; 225: a 1 st external thread; 226: a 2 nd external thread; 227: 1 st reverse external thread; 228: 2 nd reverse external thread; 220: a width changing unit; 221: a guide rail; 222: a shaft; 241: 1 st internal thread; 242: a 2 nd internal thread; 243: a 3 rd internal thread; 245: 1 st reverse internal thread; 246: 2 nd reverse internal thread; 247: 3 rd reverse internal thread; P1-P3: pitch of the thread; 229: a base station; 230: a position adjustment unit; 261: 1 st air injection hole; 262: the 2 nd air injection hole; 263: a 3 rd air injection hole; 270: an air source; 400: 1 st belt moving unit; 401: an endless belt; 402: a rotation mechanism; 403: a driven roller; 404: a drive roller; 405: an electric motor; 407: an encoder; 410: a front end sensor; 420: a 2 nd belt moving unit; 421: a detection sensor; 423: a time measuring section; 425: a speed setting section; 427: a size setting section; 429: a size calculation section; 431: a judgment section; 500: and a temporary playing unit.

Detailed Description

As shown in fig. 1, the machining device 1 of the present embodiment includes a rough grinding portion 10, a finish grinding portion 30, and a control portion 7, and grinds a quadrangular plate-shaped workpiece 2 by the rough grinding portion 10 and the finish grinding portion 30 under the control of the control portion 7.

The machining device 1 includes a 1 st device base 3 and a 2 nd device base 5 disposed behind the 1 st device base 3 (+ Y direction side). The plate-like workpiece 2 is carried in and out on the 1 st apparatus base 3. On the 2 nd apparatus base 5, the plate-shaped workpiece 2 is processed by the rough grinding portion 10 or the finish grinding portion 30.

The cassette mounting table 40 and the reservoir 50 are provided on the front surface side (-Y direction side) of the 1 st apparatus base 3. A cassette 41 containing the plate-like workpiece 2 before processing is placed on the cassette mounting table 40. In the magazine 50, a plurality of identical cassettes 41 accommodating the plate-like workpieces 2 before processing can be placed.

The cassette 41 includes a shelf for storing the plate-like workpieces 2 with a gap therebetween in the vertical direction. Plate-like workpieces 2 are stored one by one on each shelf.

The cartridge 41 has an opening facing the + Y direction side. A robot 155 is disposed on the + Y direction side of the opening. The robot 155 carries (stores) the plate-like workpiece 2 after machining into a machining-finished-workpiece storage cassette (not shown).

The robot 155 takes out the plate-like workpiece 2 before processing from the cassette 41 and places the workpiece on the temporary placement unit 200 shown in fig. 2. The temporary placement unit 200 is provided in the temporary placement space 190 indicated by a broken line on the + Y direction side of the cartridge mounting table 40 shown in fig. 1. The temporarily placing unit 200 is used to temporarily place the plate-like workpiece 2 taken out of the cassette 41.

As shown in fig. 1, the rough grinding portion 10 and the finish grinding portion 30 are disposed on the 2 nd apparatus base 5 on the + Y direction side of the provisional air space 190.

The rough grinding portion 10 has a 1 st chuck table 13 for holding the plate-like workpiece 2. The 1 st chuck table 13 is an example of a holding unit for holding the plate-shaped workpiece 2, and has 21 st holding surfaces 12 for suction-holding the plate-shaped workpiece 2. Each 1 st holding surface 12 communicates with a suction source, not shown, and can suction and hold 1 sheet of the plate-like workpiece 2. Therefore, in the present embodiment, the 1 st chuck table 13 can simultaneously hold 2 plate-like workpieces 2 by 21 st holding surfaces 12.

The 1 st chuck table 13 is rotatable about a central axis passing through the center of the 1 st holding surface 12 and extending in the Z-axis direction while the plate-like workpiece 2 is held by suction by the 1 st holding surface 12.

In addition, a 1 st column 14 is provided upright on the 2 nd device base 5 at the rear (+ Y direction side). Further, the rough grinding portion 10 has a rough grinding unit 15 that performs rough grinding on the plate-like workpiece 2 and a rough grinding feed unit 11 that performs grinding feed of the rough grinding unit 15 on the front surface of the 1 st column 14.

The rough grinding unit 15 is an example of a processing unit that processes the plate-shaped workpiece 2 held by the 1 st holding surface 12, and includes a rough grinding wheel 17 including a rough grinding wheel 18. The rough grinding whetstone 18 is an example of a machining tool, and is a whetstone including relatively large abrasive grains.

The rough grinding section 10 also has a 1 st height gauge 19 for measuring the thickness of the plate-like workpiece 2 held by the 1 st holding surface 12 of the 1 st chuck table 13.

In the rough grinding section 10, the plate-like workpiece 2 held by the 1 st holding surface 12 of the 1 st chuck table 13 is roughly ground by a rough grinding wheel 18 that rotates by rotation of the main shaft 16 of the rough grinding unit 15.

The finish-grinding portion 30 has a 2 nd chuck table 33 for holding the plate-like workpiece 2. The 2 nd chuck table 33 is an example of a holding unit for holding the plate-shaped workpiece 2, and has 2 nd holding surfaces 32 for suction-holding the plate-shaped workpiece 2. Each of the 2 nd holding surfaces 32 communicates with a suction source, not shown, and can suction and hold 1 sheet of the plate-like workpiece 2. Therefore, in the present embodiment, the 2 nd chuck table 33 can simultaneously hold 2 plate-shaped workpieces 2 by 2 nd holding surfaces 32.

The 2 nd chuck table 33 is rotatable about a central axis extending in the Z-axis direction through the center of the 2 nd holding surface 32 in a state where the plate-like workpiece 2 is suction-held by the 2 nd holding surface 32.

Further, a 2 nd column 34 is provided upright on the rear side of the 2 nd device base 5 so as to be adjacent to the 1 st column 14. Further, the finish-grinding portion 30 has a finish-grinding unit 35 that finish-grinds the plate-shaped workpiece 2 and a finish-grinding feeding unit 31 that grind-feeds the finish-grinding unit 35 on the front surface of the 2 nd cylinder 34.

The finish grinding unit 35 is an example of a processing unit that processes the plate-shaped workpiece 2 held by the 2 nd holding surface 32, and includes a finish grinding wheel 37 including a finish grinding whetstone 38. The finish grinding whetstone 38 is an example of a processing tool, and is a whetstone including relatively small abrasive grains.

The finish grinding section 30 also includes a 2 nd height gauge 39 for measuring the thickness of the plate-shaped workpiece 2 held by the 2 nd holding surface 32 of the 2 nd chuck table 33.

In the finish grinding section 30, the plate-shaped workpiece 2 held by the 2 nd holding surface 32 of the 2 nd chuck table 33 is finish ground by the finish grinding burr 38 rotated by the rotation of the main shaft 36 of the finish grinding unit 35.

Further, 2 conveying units 100 (see fig. 3) for the rough grinding portion 10 and the finish grinding portion 30 are provided in a conveying space 170 indicated by a broken line in fig. 1 between the rough grinding portion 10 and the finish grinding portion 30 on the 2 nd apparatus base 5.

Fig. 3 shows a conveyance unit 100 for the rough grinding section 10. The conveying unit 100 for the rough grinding portion 10 includes a holding portion 140 for simultaneously holding a plurality of plate-like workpieces 2 and a moving unit 110 for moving the holding portion 140 on a surface on the-X direction side of the housing plate 101 extending in the Y-axis direction.

The moving unit 110 has a Z-axis moving mechanism 130 for moving the holding portion 140 in the Z-axis direction, and a Y-axis moving mechanism 120 for moving the holding portion 140 and the Z-axis moving mechanism 130 in the Y-axis direction.

The Y-axis moving mechanism 120 includes a pair of guide rails 123 extending in the Y-axis direction, a Y-axis table 124 mounted on the guide rails 123, a ball screw 125 extending parallel to the guide rails 123, and a drive motor 126 for rotating the ball screw 125.

The pair of guide rails 123 are disposed on the front surface of the housing plate 101 in parallel with the Y-axis direction. The Y-axis table 124 is provided on the pair of guide rails 123 so as to be slidable along these guide rails 123. The Y-axis table 124 is provided with a Z-axis moving mechanism 130 and a holding unit 140.

The ball screw 125 is screwed to a nut portion (not shown) provided on the Y-axis base 124. The drive motor 126 is coupled to one end of the ball screw 125, and rotationally drives the ball screw 125. By rotationally driving the ball screw 125, the Y-axis table 124, the Z-axis moving mechanism 130, and the holding portion 140 move in the Y-axis direction along the guide rail 123.

The Z-axis moving mechanism 130 includes a mounting plate 134, a guide rail 131 extending in the Z-axis direction, a Z-axis table 132 mounted on the guide rail 131, a ball screw 133 extending parallel to the guide rail 131, a drive motor 135 for rotating the ball screw 133, and an arm 137 for supporting the holding unit 140.

The mounting plate 134 is disposed on a side surface of the Y-axis stage 124. The guide rail 131 is disposed on the mounting plate 134 in parallel to the Z-axis direction. The Z-axis table 132 is provided on the guide rail 131 so as to be slidable along the guide rail 131. An arm 137 is attached to the Z-axis table 132.

The ball screw 133 is screwed to a nut portion (not shown) provided on the Z-axis base 132. The drive motor 135 is coupled to one end of the ball screw 133, and rotationally drives the ball screw 133. By rotationally driving the ball screw 133, the Z-axis table 132, the arm 137, and the holding portion 140 supported by the arm 137 move in the Z-axis direction along the guide rail 131.

The arm 137 is attached to the Z-axis table 132 and extends in the X-axis direction.

The holding portion 140 is supported by the front end of the arm 137. The holding portion 140 includes a pair of holding plates 141 provided so as to sandwich the arm 137, and 2 suction pads 142 each included in the holding plate 141. The suction pad 142 communicates with a suction source, not shown, and can thereby suction and hold the plate-like workpiece 2. In this way, since the holding portion 140 has the plurality of suction pads 142 on 1 holding plate 141, the plurality of plate-shaped workpieces 2 can be held simultaneously.

In the conveying unit 100 for the rough grinding section 10, the holding section 140 holding the plurality of plate-like workpieces 2 is moved from the provisional placement unit 200 to the 1 st chuck table 13 by the moving unit 110. That is, the conveying unit 100 simultaneously holds the 2 plate-shaped workpieces 2 temporarily placed in the temporary placing unit 200 by the holding section 140, and conveys and places them on the 21 st holding surfaces 12 of the 1 st chuck table 13 of the rough grinding section 10.

In this way, the conveying unit 100 receives the plurality of plate-like workpieces 2 temporarily placed in the temporary placement unit 200 by one operation of the holding section 140 by the moving unit 110, and conveys the workpieces onto the 1 st holding surface 12.

After the rough grinding, the conveying unit 100 for the rough grinding section 10 simultaneously holds 2 sheet-like workpieces 2 on the 21 st holding surfaces 12 of the 1 st chuck table 13 by the holding section 140, and places them on the relay table 154 of the relay unit 152 shown in fig. 1.

The relay table 154 is used to move the plate-shaped workpiece 2, which has been roughly ground by the rough grinding section 10, to the finish grinding section 30. The relay table 154 is configured to be able to mount 2 plate-shaped workpieces 2. The relay unit 152 also has a moving unit 153 for moving the relay table 154 in the X-axis direction.

When the plate-like workpiece 2 is placed on the relay table 154 of the relay unit 152 by the conveying unit 100, the relay unit 152 arranges the relay table 154 at the rough grinding position on the-X direction side (the position of the relay table 154 shown in fig. 1) by the moving unit 153.

After the plate-like workpiece 2 after rough grinding is placed on the relay table 154 of the relay unit 152, the relay unit 152 moves the relay table 154 from the rough grinding position on the-X direction side to the finish grinding position on the + X direction side by the moving unit 153.

Further, in the conveying space 170, the conveying unit 100 for the finish grinding section 30 is also arranged on the + X direction side of the conveying unit 100 for the rough grinding section 10. In the configuration of the carrying unit 100 for the rough grinding portion 10 shown in fig. 3, the carrying unit 100 for the finish grinding portion 30 is configured to have the holder 140 and the carrying unit 100 (the Z-axis moving mechanism 130 and the Y-axis moving mechanism 120) on the surface on the + X direction side of the housing plate 101.

The carrying unit 100 for the finish-grinding section 30 simultaneously holds 2 sheets of the plate-shaped workpieces 2 temporarily placed on the relay table 154 at the finish-grinding position on the + X direction side by the holding section 140 and carries them onto the 2 nd holding surfaces 32 of the 2 nd chuck table 33 of the finish-grinding section 30.

After the finish grinding, the carrying unit 100 for the finish grinding section 30 simultaneously holds 2 sheet-like workpieces 2 on the 2 nd holding surfaces 32 of the 2 nd chuck table 33 by the holding section 140, and carries them onto the rotary table 157 of the cleaning unit 156 shown in fig. 1.

The cleaning unit 156 is a spin cleaning unit that cleans the plate-like workpiece 2. The cleaning unit 156 has a rotary table 157 that holds the plate-like workpiece 2, and a nozzle 158 that sprays cleaning water and dry air toward the rotary table 157. The rotary table 157 is configured to be able to hold 2 plate-shaped workpieces 2 at the same time.

In the cleaning unit 156, the rotary table 157 holding the plate-shaped workpiece 2 is rotated, and cleaning water is sprayed toward the plate-shaped workpiece 2 to perform spin cleaning of the plate-shaped workpiece 2. Thereafter, dry air is blown to the plate-like workpiece 2 to dry the plate-like workpiece 2.

The plate-like workpiece 2 cleaned by the cleaning unit 156 is carried into a cassette for storing processed workpieces by the robot 155.

As shown in fig. 1, the reservoir 50 includes a rectangular parallelepiped base 51 and a mounting plate 52 interposed between the base 51 and the cassette 41. The cassette 41 is placed on the upper surface of the mounting plate 52.

Further, the table 51 is provided with 3 plate support portions 511 corresponding to the respective adapter plates 52. The adapter plate 52 is positioned on the table 51 by the 3 plate support portions 511.

As shown in fig. 1, in the processing apparatus 1, a magazine conveyance space 180 indicated by a broken line is provided above the robot 155. The cassette conveying space 180 is provided with a cassette conveying mechanism 60 shown in fig. 4 for conveying the cassette 41 placed in the magazine 50 to the cassette mounting table 40.

The cassette conveyance mechanism 60 includes: a support mechanism 70 for supporting the mounting plate 52 on which the cartridge 41 is mounted; and a moving mechanism 62 that moves the support mechanism 70 between the reservoir 50 and the cartridge table 40.

The moving mechanism 62 is provided on the front surface (-Y direction side surface) of the case plate 61 extending in the X axis direction of the cassette conveying mechanism 60. The moving mechanism 62 includes an X-axis moving mechanism 63 for moving the support mechanism 70 in the X-axis direction and a Z-axis moving mechanism 64 for moving the support mechanism 70 in the Z-axis direction.

The cassette conveyance mechanism 60 is configured to: the cassette 41 placed on the mounting plate 52 of the stage 51 is supported together with the mounting plate 52 by the support mechanism 70, and is transported to the cassette mounting table 40 by the moving mechanism 62.

Here, the structure of the pause unit 200 will be described. The temporary placement unit 200 is configured to be able to temporarily place the plate-shaped workpieces 2 of the number corresponding to the number of the 1 st holding surfaces 12 (the 2 nd holding surfaces 32) of the 1 st chuck table 13 (the 2 nd chuck table 33). Therefore, in the present embodiment, the temporarily placing unit 200 can temporarily place 2 plate-shaped workpieces 2.

As shown in fig. 5, the pause unit 200 includes: a base 201; a pause channel unit 210 including a 1 st channel 211 and a 2 nd channel 215; a width changing unit 220 for adjusting the widths of the 1 st channel 211 and the 2 nd channel 215; a position adjusting unit 230 that adjusts the position of the pause path unit 210 in the X-axis direction; and a guide passage 250 that guides the plate-like workpiece 2 to the temporary placing passage portion 210.

The position adjusting unit 230 supports the width changing unit 220 and the temporary placement path section 210, and adjusts the positions thereof in the X-axis direction.

The position adjustment unit 230 includes a pair of guide rails 231 extending in the X-axis direction, an X-axis table 234 mounted on the guide rails 231, a ball screw 232 extending parallel to the guide rails 231, and a drive motor 233 that rotates the ball screw 232.

The pair of guide rails 231 is disposed on the base 201 in parallel to the X-axis direction. The X-axis table 234 is provided on the pair of rails 231 so as to be slidable along the rails 231. The width changing unit 220 and the temporary placement path section 210 are disposed on the X-axis table 234.

The ball screw 232 is screwed to a nut portion (not shown) provided on the X-axis table 234. The drive motor 233 is coupled to one end of the ball screw 232, and rotationally drives the ball screw 232. By rotationally driving the ball screw 232, the X-axis table 234, the width changing unit 220, and the pause path portion 210 move in the X-axis direction along the guide rail 231. This allows the positions of the width changing unit 220 and the pause path unit 210 in the X-axis direction to be adjusted.

The + Y direction side of the temporary placement path section 210 is disposed at a receiving position of the conveying unit 100 (see fig. 3), that is, a position at which the conveying unit 100 receives the plate-shaped workpiece 2 conveyed to the 1 st chuck table 13. The pause channel section 210 has a 1 st channel 211 and a 2 nd channel 215. The 1 st passage 211 has a 1 st rail 212 and a 2 nd rail 213 which support both side lower surfaces of the plate-like workpiece 2, respectively. These 1 st rail 212 and 2 nd rail 213 extend in the Y-axis direction.

The 2 nd passage 215 is arranged in parallel with the 1 st passage 211. Like the 1 st passage 211, the 2 nd passage 215 has a 3 rd rail 216 and a 4 th rail 217 which support both side lower surfaces of the plate-like workpiece 2, respectively. These 3 rd and 4 th rails 216 and 217 extend in the Y-axis direction.

In addition, in the present embodiment, the 3 rd track 216 of the 2 nd lane 215 is adjacent to the 2 nd track 213 of the 1 st lane 211.

The width changing unit 220 is configured to be able to adjust the widths of the 1 st lane 211 and the 2 nd lane 215 at the same time. The width changing unit 220 includes a base 229 attached to the upper surface of the X-axis table 234 of the position adjusting unit 230. The width changing unit 220 further includes a pair of guide rails 221 extending in the X-axis direction on the base 229.

The pair of guide rails 221 are disposed on the base 201 in parallel to the X-axis direction. The pair of guide rails 221 are provided with a 2 nd rail 213 of the 1 st lane 211, and a 3 rd rail 216 and a 4 th rail 217 of the 2 nd lane 215 so as to be slidable along the guide rails 221.

The 1 st rail 212 is fixed to the base 229.

As shown in fig. 6 (a) and 6 (b), the width changing mechanism 220 includes a 1 st female screw 241 formed on the 2 nd rail 213, a 2 nd female screw 242 formed on the 3 rd rail 216, and a 3 rd female screw 243 formed on the 4 th rail 217.

As shown in fig. 6 (a), the 1 st internal thread 241 of the 3 rd rail 216 and the 2 nd internal thread 242 of the 2 nd rail 213 have the same pitch P1. In addition, as shown in fig. 6 (b), the 3 rd internal thread 243 of the 4 th rail 217 has a pitch P2 that is double the pitch P1 (P2 is 2 × P1).

As shown in fig. 5, the width changing unit 220 has a shaft 222 extending parallel to the guide rail 221. The shaft 222 has: a 1 st male screw 225 screwed with the 1 st female screw 241 of the 2 nd rail 213 and the 2 nd female screw 242 of the 3 rd rail 216 and having a pitch P1; and a 2 nd external thread 226 screwed with the 3 rd internal thread 243 of the 4 th rail 217 and having a thread pitch P2.

The shaft 222 extends in parallel with the guide rail 221 in a state where the 1 st male screw 225 is screwed into the 1 st female screw 241 of the 2 nd rail 213 and the 2 nd female screw 242 of the 3 rd rail 216 and the 2 nd male screw 226 is screwed into the 3 rd female screw 243 of the 4 th rail 217.

Further, width changing section 220 includes: a shaft support portion 224 fixed to a base 229 and rotatably supporting the end of the shaft 222; and a driving motor 233 attached to a distal end of the shaft 222 and rotating the shaft 222. The drive motor 233 is an example of a rotation unit.

The width changing mechanism 220 can simultaneously expand or simultaneously contract the widths of the 1 st channel 211 and the 2 nd channel 215 by driving the motor 233 to rotate the shaft 222.

That is, the 1 st female screw 241 of the 2 nd rail 213 and the 2 nd female screw 242 of the 3 rd rail 216 are screwed with the 1 st male screw 225 of the shaft 222 such that the 2 nd rail 213 and the 3 rd rail 216 move in the-X direction along the guide rail 221 when the shaft 222 rotates clockwise, for example.

The 3 rd female screw 243 of the 4 th rail 217 is also screwed with the 2 nd male screw 226 of the shaft 222 so that the 4 th rail 217 moves in the-X direction along the guide rail 221 when the shaft 222 rotates clockwise. Here, the 3 rd internal thread 243 of the 4 th rail has a double pitch P2 of the pitch P1 of the 1 st internal thread 241 and the 2 nd internal thread 242. Therefore, the moving distance of the 4 th rail 217 accompanying the clockwise rotation of the shaft 222 becomes double the distance between the 2 nd rail 213 and the 3 rd rail 216.

Therefore, when the shaft 222 rotates clockwise, the 2 nd rail 213 moves in the-X direction, and thus, a distance between the 2 nd rail 213 and the fixed 1 st rail 212, i.e., the width of the 1 st passage 211, is enlarged.

Further, as the shaft 222 rotates clockwise, the 3 rd track 216 adjacent to the 2 nd track 213 moves in the-X direction by the same distance as the 2 nd track 213. Therefore, the movement of the 2 nd rail 213 is not hindered. In addition, the 4 th rail 217 moves by a double distance of the 3 rd rail 216. Therefore, the distance between the 3 rd track 216 and the 4 th track 217, that is, the width of the 2 nd tunnel 215 is also enlarged as in the 1 st tunnel 211.

In addition, by rotating the shaft 222 counterclockwise, the 2 nd and 3 rd rails 213 and 216 move in the + X direction, and the 4 th rail 217 moves by a double distance of the 2 nd and 3 rd rails 213 and 216. Therefore, the widths of the 1 st and 2 nd passages 211 and 215 are also narrowed.

In this way, in the width changing means 220, the width of the 1 st path 211 and the 2 nd path 215 can be enlarged or narrowed in accordance with the width of the plate-like workpiece 2 by rotating the shaft 222.

Further, a size setting unit may be provided for setting (acquiring) the size (length and width) of the plate-like workpiece 2.

The guide passage 250 is located on the + Y direction side of the cartridge 41 (refer to fig. 2). As shown in fig. 5, the guide passage 250 has a 1 st guide 251 and a 2 nd guide 252 that support both side lower surfaces of the plate-like workpiece 2, respectively. These 1 st rail 251 and 2 nd rail 252 extend in the Y-axis direction. The distance between the 1 st guide 251 and the 2 nd guide 252, which is the width of the guide passage 250, is configured to be the same as the width of the 1 st passage 211 and the 2 nd passage 215.

In the present embodiment, the position adjusting unit 230 adjusts the position of the pause tunnel part 210 in the X-axis direction so as to match any of the 1 st tunnel 211 and the 2 nd tunnel 215 in the pause tunnel part 210 with the guide tunnel 250 (i.e., to be juxtaposed with the guide tunnel 250 in the Y-axis direction).

Here, the structure of the track in the pause unit 200 will be explained. The 1 st rail 212, the 2 nd rail 213, the 3 rd rail 216, the 4 th rail 217, the 1 st rail 251, and the 2 nd rail 252 in the temporary placement unit 200 have the same configuration except for the presence or absence of the internal thread and the pitch. Therefore, the structure of these rails will be described by taking the 1 st rail 251 as an example.

As shown in fig. 7 (a), the 1 st rail 251 has a substantially L-shaped cross section and has a stepped portion 260 for supporting a side end portion of the plate-shaped workpiece 2. As shown in fig. 7 (a) and 7 (b), a 1 st air injection hole 261 opens on the upper surface of the stepped portion 260. The 1 st air ejection hole 261 is configured to be capable of ejecting air while communicating with the air source 270. The plate-like workpiece 2 supported by the 1 st guide rail 251 is lifted from the step portion 260 by the air jetted from the 1 st air jetting hole 261. Therefore, the 1 st guide rail 251 is configured to support the lower surface of the plate-like workpiece 2 in a non-contact manner by air.

Therefore, the guide passage 250 including the 1 st guide rail 251 and the 2 nd guide rail 252, the 1 st passage 211 including the 1 st rail 212 and the 2 nd rail 213, and the 2 nd passage 215 including the 3 rd rail 216 and the 4 th rail 217 function as an air slider which has the 1 st air ejection hole 261 for ejecting air opened on the upper surface in order to support the lower surface of the plate-shaped workpiece 2 in a non-contact manner by air, and which extends from the cassette 41 to the receiving position of the conveying unit 100.

In addition, as shown in fig. 5, a pushing mechanism 253 is provided between the 1 st rail 251 and the 2 nd rail 252 in the guide passage 250.

The pushing mechanism 253 is configured to push one edge (-edge on the Y direction side) of the plate-like workpiece 2, which is supported on the upper surface of the step portion 260 of the 1 st rail 251 and the 2 nd rail 252 in a non-contact manner by air, toward the temporary discharge path portion 210 including the receiving position of the conveying unit 100, that is, toward the + Y direction.

By being pushed by the pushing mechanism 253, the plate-like workpiece 2 moves in the + Y direction to the receiving position of the conveyance unit 100 on the guide path 250 and the 1 st path 211 or the 2 nd path 215 matching the guide path 250 in a state of being floated by air.

The pushing mechanism 253 is an example of a slider moving means that moves the plate-like workpiece 2 supported by air in a non-contact manner on the upper surfaces of the step portions 260 of the 1 st rail 251 and the 2 nd rail 252 in the extending direction of the guide path 250.

As shown in fig. 5, a stopper 214 is provided at the end of the 1 st channel 211 and the 2 nd channel 215 on the + Y direction side. The stopper 214 is configured to contact the other edge (+ Y direction side edge) of the plate-like workpiece 2 moved to the + Y direction side of the temporary placing path portion 210 located at the receiving position of the carrying unit 100. Thereby, the stopper 214 stops the plate-like workpiece 2 moving in the + Y direction at the receiving position of the conveying unit 100 in the temporary placement path portion 210 (the 1 st path 211 or the 2 nd path 215).

The stopper 214 is an example of a stopping means that stops the plate-like workpiece 2 moved by the pushing mechanism 253 as a slide moving means at the receiving position of the conveying means 100.

In the machining operation of the present embodiment, first, the control unit 7 controls the width changing unit 220 of the provisional unit 200 to change the widths of the 1 st lane 211 and the 2 nd lane 215 in accordance with the width of the plate-shaped workpiece 2 to be machined. In addition, the control unit 7 similarly changes the width of the guide passage 250.

Next, the control section 7 controls the position adjustment unit 230 of the pause unit 200, thereby matching the 1 st lane 211 in the pause lane section 210 with the guide lane 250. Further, the control unit 7 causes the 1 st air injection hole 261 of each track in the pause unit 200 to communicate with the air source 270, and injects air from the 1 st air injection hole 261.

Further, the control unit 7 controls the robot 155 shown in fig. 1 to take out the plate-like workpiece 2 before processing from the cassette 41 and place it on the guide path 250 (on the 1 st rail 251 and the 2 nd rail 252) of the placement unit 200 shown in fig. 5. The plate-like workpiece 2 is supported on the-Y direction side of the guide passage 250 in a state of being floated by air.

The controller 7 controls the pushing mechanism 253 to push the plate-shaped workpiece 2 supported by the guide passage 250 in the + Y direction, and to move the plate-shaped workpiece 2 in the + Y direction. The moving plate-like workpiece 2 is brought into contact with the stopper 214 in the 1 st passage 211 to be stopped. Thus, the 1 st lane 211 supports the plate-like workpiece 2 at the receiving position of the conveying unit 100.

Thereafter, the control unit 7 controls the width changing means 220 so that the 2 nd lane 215 of the pause lane unit 210 matches the guide lane 250. Thereafter, the controller 7 controls the robot 155 and the pushing mechanism 253 to support the other plate-like workpiece 2 through the 2 nd lane 215 in the same manner as described above.

In this way, 2 plate-like workpieces 2 are supported at the receiving position of the conveying unit 100 in the temporary putting tunnel section 210 of the temporary putting unit 200.

Next, the control section 7 controls the conveying unit 100 for the rough grinding section 10 shown in fig. 3, simultaneously holds 2 plate-like workpieces 2 placed at the receiving position of the conveying unit 100 in the temporary placing tunnel section 210 of the temporary placing unit 200 by the holding section 140, and conveys and places them on the 21 st holding surfaces 12 of the 1 st chuck table 13 of the rough grinding section 10 shown in fig. 1. Thereafter, the control unit 7 controls the rough grinding unit 10 to perform rough grinding of the plate-like workpiece 2.

Further, the controller 7 controls the carrying unit 100 for the rough grinding section 10 to carry the plate-shaped workpiece 2 after rough grinding to the relay unit 152, and controls the carrying unit 100 for the fine grinding section 30 to carry and place 2 sheets of the plate-shaped workpiece 2 on the 2 nd holding surfaces 32 of the 2 nd chuck table 33 of the fine grinding section 30. Thereafter, the control unit 7 controls the finish grinding unit 30 to finish grind the plate-shaped workpiece 2.

Next, the controller 7 controls the carrying unit 100 for the finish grinding section 30 to carry the 2 plate-shaped workpieces 2 after finish grinding to the cleaning unit 156 at the same time. Further, the control unit 7 controls the cleaning unit 156, and simultaneously cleans 2 plate-like workpieces 2 by the cleaning unit 156. Thereafter, the controller 7 controls the robot 155 to carry the cleaned plate-like workpiece 2 into a magazine for storing processed workpieces.

As described above, in the present embodiment, the conveying unit 100 receives the plurality of plate-like workpieces 2 temporarily placed in the temporary placing unit 200 by one operation of the holding section 140 by the moving unit 110, and conveys the workpieces to the 1 st holding surface 12 of the rough grinding section 10. That is, in the present embodiment, the plurality of plate-shaped workpieces 2 temporarily placed in the temporary placement unit 200 can be conveyed onto the 1 st holding surface 12 by 1 conveying operation. Therefore, the conveyance time for conveying the plurality of plate-like workpieces 2 to the 1 st holding surface 12 can be shortened.

Thus, in the present embodiment, the waiting time of the rough grinding portion 10 can be shortened. Therefore, the productivity of the processing apparatus 1 can be improved.

In the present embodiment, in the provisional discharge unit 200, the 1 st lane 211, the 2 nd lane 215, and the guide lane 250 of the provisional discharge lane portion 210 function as air sliders that support the lower surface of the plate-like workpiece 2 in a non-contact manner by air. The plate-like workpiece 2 placed on the guide path 250 can be moved to the temporary placement path section 210 including the receiving position of the conveying unit 100 in a non-contact manner, and can be supported in a non-contact manner by the temporary placement path section 210.

In this way, in the present embodiment, since the plate-like workpiece 2 is moved to the temporary placement path section 210 in a non-contact manner and supported, damage to the lower surface of the plate-like workpiece 2 can be suppressed.

In the present embodiment, the widths of the 1 st lane 211 and the 2 nd lane 215 can be arbitrarily changed by the width changing means 220 of the provisional placement means 200 in accordance with the width of the plate-like workpiece 2 to be processed. Therefore, in the present embodiment, even when the plate-shaped workpiece 2 to be machined is changed, the widths of the 1 st lane 211 and the 2 nd lane 215 can be changed quickly in accordance with the width of the plate-shaped workpiece 2 after the change.

The pause unit 200 of the present embodiment includes a pushing mechanism 253 as an example of a slider moving unit that moves the plate-like workpiece 2 in the extending direction of the guide path 250. The temporary placement unit 200 includes a stopper 214 as an example of a stop unit that stops the plate-like workpiece 2 moved by the pushing mechanism 253 at the receiving position of the conveying unit 100.

In this connection, the escrow unit 200 may not have the pushing mechanism 253 and the stopper 214. In this case, for example, the 1 st rail 212, the 2 nd rail 213, the 3 rd rail 216, the 4 th rail 217, the 1 st rail 251, and the 2 nd rail 252 in the pause unit 200 have air injection holes having a shape different from the 1 st air injection hole 261 shown in fig. 5.

In connection with this, as shown in fig. 8, the 1 st rail 251 (and the 2 nd rail 252) of the guide passage 250 has the 2 nd air injection hole 262 on the stepped portion 260. The 2 nd air injection hole 262 is formed to be inclined from a direction perpendicular to the upper surface of the stepped portion 260 of the 1 st guide rail 251 toward the + Y direction as the moving direction so as to flow air toward the + Y direction as the moving direction of the plate-shaped workpiece 2. The 2 nd air ejection hole 262 is an example of a forward air ejection hole as the slider moving means.

The plate-like workpiece 2 placed on the guide path 250 (on the 1 st guide rail 251 and the 2 nd guide rail 252) moves in the + Y direction in a floating state as indicated by an arrow 302 by the air injected from the 2 nd air injection hole 262 as indicated by an arrow 301 in fig. 8. In this way, the 2 nd air ejection hole 262 functions as a slider moving means for moving the plate-like workpiece 2 in the extending direction of the guide passage 250.

As shown in fig. 9, the 1 st rail 212 (the 2 nd rail 213, the 3 rd rail 216, and the 4 th rail 217) of the pause tunnel portion 210 has the same 2 nd air injection hole 262 as the 1 st guide rail 251 on the-Y direction side of the stepped portion 260. Further, the 1 st rail 212 has a 3 rd air injection hole 263 on the + Y direction side of the stepped portion 260. The formation position of the 3 rd air injection hole 263 in the 1 st rail 212 is included in the receiving position of the carrying unit 100.

The 3 rd air injection hole 263 is formed to be inclined in the-Y direction so as to have an inclination facing the inclination of the 2 nd air injection hole 262, so as to form a flow of air facing the flow of air injected from the 2 nd air injection hole 262. The 3 rd air injection hole 263 is an example of a reverse air injection hole as a stopping means.

As shown in fig. 9, the plate-like workpiece 2 moved from the guide passage 250 moves in the + Y direction in a floating state on the upper surface of the step portion 260 of the 1 st rail 212 by the air ejected from the 1 st air ejection hole 261 formed in the 1 st holding surface 12. When the plate-like workpiece 2 reaches the + Y direction side of the 1 st rail 212, as shown in fig. 10, the air ejected from both the 2 nd air ejection hole 262 and the 3 rd air ejection hole 263 is received.

As indicated by an arrow 301, the air injected from the 2 nd air injection hole 262 has a component in the + Y direction. On the other hand, as indicated by an arrow 303, the air injected from the 3 rd air injection hole 263 has a component in the-Y direction. Therefore, on the + Y direction side of the 1 st rail 212, the plate-shaped workpiece 2 that has received the air ejected from both the 2 nd air ejection hole 262 and the 3 rd air ejection hole 263 stops at this position.

In this way, in this configuration, the provisional placement unit 200 supports the plate-shaped workpiece 2 in a non-contact manner at the formation position of the 3 rd air injection hole 263, which is the receiving position of the conveying unit 100, by the flow of air injected from the 2 nd air injection hole 262 and the flow of air injected from the 3 rd air injection hole 263.

In this structure, the pushing mechanism 253 and the stopper 214 shown in fig. 5 need not be provided on the escrow unit 200. Therefore, the cost of the repeater unit 200 can be reduced. In addition, it is not necessary to bring a member into contact with the plate-shaped workpiece 2 in order to move and stop the plate-shaped workpiece 2. Therefore, damage to the plate-shaped workpiece 2 can be more effectively suppressed.

In the present embodiment, in order to support the plate-shaped workpiece 2, the 1 st rail 212, the 2 nd rail 213, the 3 rd rail 216, the 4 th rail 217, the 1 st rail 251, and the 2 nd rail 252 in the provisional unit 200 are formed with the 1 st air injection hole 261, the 2 nd air injection hole 262, or the 3 rd air injection hole 263.

In this connection, instead of having these air injection holes in the respective tracks, the pause unit 200 may have a 1 st belt moving unit 400 as shown in fig. 11 and a 2 nd belt moving unit 420 as shown in fig. 12.

The 1 st belt moving unit 400 is provided between the rails of the guide path 250, the 1 st path 211, and the 2 nd path 215, and is provided to move the plate-like workpiece 2 in each path.

The 1 st belt moving unit 400 shown in fig. 11 is disposed between the rails of the 1 st and 2 nd lanes 211 and 215. The 1 st belt moving unit 400 has an endless belt 401 and a rotating mechanism 402 that rotates the endless belt 401.

The rotating mechanism 402 includes: a driven roller 403 provided at the end of the endless belt 401 on the-Y direction side; a drive roller 404 provided at an end of the endless belt 401 on the + Y direction side; a motor 405 that drives the drive roller 404; and an encoder 407 that detects the rotation angle of the motor 405.

The endless belt 401 is bridged over a driven roller 403 and a driving roller 404 which are in contact with the inner peripheral surface of the endless belt 401. The endless belt 401 is configured to place the plate-like workpiece 2 on the upper surface.

In the 1 st belt moving unit 400 having such a configuration, the plate-like workpiece 2 conveyed from the guide path 250 is placed on the end portion on the-Y direction side of the upper surface of the endless belt 401. In this state, the driving roller 404 is rotated by the motor 405, and the endless belt 401 rotates about the driving roller 404 and the driven roller 403 as rotation axes. Thereby, as indicated by an arrow 310, the plate-like workpiece 2 placed on the upper surface of the endless belt 401 is conveyed in the-Y direction.

In addition, as shown in fig. 11, the 1 st belt moving unit 400 has a front end sensor 410. The front end sensor 410 detects that the front end (+ Y direction side end) of the plate-like workpiece 2 placed on the upper surface of the endless belt 401 has reached the + Y direction side end of the endless belt 401 (the 1 st lane 211 and the 2 nd lane 215). Thus, the front end sensor 410 detects that the plate-like workpiece 2 has reached the receiving position of the conveying unit 100.

For example, in order to transport the plate-like workpiece 2 to the receiving position of the conveying unit 100, the control unit 7 rotates the endless belt 401 on which the plate-like workpiece 2 is placed by the motor 405. When the leading end sensor 410 detects that the leading end of the plate-like workpiece 2 has reached the end portion on the + Y direction side of the endless belt 401, the control unit 7 determines that the plate-like workpiece 2 has reached the receiving position, stops the driving of the motor 405, and stops the rotation of the endless belt 401.

In addition, the 2 nd belt moving unit 420 shown in fig. 12 is disposed between the rails of the guide passage 250. Like the 1 st belt moving unit 400, the 2 nd belt moving unit 420 has an endless belt 401 and a rotating mechanism 402. In the 2 nd belt moving unit 420, the plate-like workpiece 2 taken out of the cassette 41 by the robot 155 shown in fig. 1 is placed on the-Y direction side of the upper surface of the endless belt 401. In this state, the driving roller 404 is rotated by the motor 405, and the endless belt 401 rotates about the driving roller 404 and the driven roller 403 as rotation axes. Thereby, as indicated by an arrow 310, the plate-like workpiece 2 placed on the upper surface of the endless belt 401 is conveyed toward the 1 st lane 211 or the 2 nd lane 215 in the + Y direction side.

In addition, as shown in fig. 12, the 2 nd belt moving unit 420 has a detection sensor 421 that detects the plate-like workpiece 2. The detection sensor 421 detects the plate-like workpiece 2 taken out of the cassette 41 and placed on the endless belt 401. Specifically, the detection sensor 421 detects one edge (one end) and the other edge (the other end) of the plate-like workpiece 2 conveyed in the + Y direction by the endless belt 401.

Further, the 2 nd belt moving unit 420 has: a dimension setting unit 427 that sets (acquires) the dimensions (length and width) of the plate-like workpiece 2; and a speed setting section 425 that sets (controls) the rotation speed of the endless belt 401.

The size setting unit 427 acquires the size of the cassette 41 taken out of the cassette 41 and placed on the endless belt 401, for example, based on information from the control unit 7 (see fig. 1). The speed setting unit 425 controls the rotation speed of the endless belt 401, for example, in accordance with an instruction from the control unit 7. That is, the speed setting unit 425 rotates the endless belt 401 at a predetermined rotational speed by the rotation mechanism 402.

The 2 nd belt moving unit 420 includes a time measuring unit 423 connected to the detection sensor 421, a dimension calculating unit 429 for calculating the dimension of the plate-like workpiece 2, and a determining unit 431 for determining the presence or absence of an abnormality.

When the plate-shaped workpiece 2 whose size is set by the size setting section 427 and which is placed on the endless belt 401 moves at the speed set by the speed setting section 425, the time measuring section 423 measures the time from when the detection sensor 421 detects one edge of the plate-shaped workpiece 2 to when the other edge is detected.

The dimension calculation unit 429 calculates the dimension of the plate-like workpiece 2 placed on the endless belt 401 and moving, based on the rotation speed of the endless belt 401 set by the speed setting unit 425 and the time measured by the time measurement unit 423.

The determination section 431 compares the size of the plate-shaped workpiece 2 set (obtained) by the size setting section 427 with the size of the plate-shaped workpiece 2 calculated by the size calculation section 429. When the size of the plate-shaped workpiece 2 calculated by the size calculating section 429 is smaller than the size of the plate-shaped workpiece 2 set by the size setting section 427, the determining section 431 determines that there is an abnormality in the rotation of the endless belt 401.

In this connection, the endless belt 401 sometimes rotates abnormally due to the generation of slack. In the above configuration, the determination unit 431 can confirm whether or not the endless belt 401 is normally rotated.

Further, the determination unit 431 may determine that there is an abnormality in the rotation of the endless belt 401 when the size of the plate-shaped workpiece 2 set by the size setting unit 427 and the size of the plate-shaped workpiece 2 calculated by the size calculation unit 429 are not different from each other (when the former is smaller than the latter and the former is larger than the latter).

The 1 st belt moving unit 400 shown in fig. 11 may be provided with the detection sensor 421, the time measuring unit 423, the speed setting unit 425, the size setting unit 427, the size calculating unit 429, and the determining unit 431 shown in fig. 12. In this case, whether or not there is an abnormality in the rotation of the endless belt 401 of the 1 st belt moving unit 400 can be determined using the plate-like workpiece 2 that is moved by the 1 st belt moving unit 400.

In the case of using the 2 nd belt moving unit 420 shown in fig. 12, the plate-like workpiece 2 may be taken out of the cassette 41 by the endless belt 401 of the 2 nd belt moving unit 420 instead of the robot 155. In this configuration, the end portion on the-Y direction side of the endless belt 401 is inserted below the plate-like workpiece 2 stored in the cassette 41, and the lower surface of the plate-like workpiece 2 is supported by this end portion. In this state, the plate-like workpiece 2 stored in the cassette 41 is pulled out from the cassette 41 by rotating the endless belt 401.

The machining device 1 according to the present embodiment may include a pause unit 500 as shown in fig. 13 instead of the pause unit 200 shown in fig. 5. The temporary playing unit 500 has the following structure: in the structure of the pause unit 200, the pause channel section 210 has a 3 rd channel 205 in addition to the 1 st channel 211 and the 2 nd channel 215.

In addition, the pause unit 500 also has a guide passage 250 shown in fig. 5. In fig. 13, illustration of the guide passage 250 is omitted.

The 3 rd channel 205 is disposed on the + X direction side of the 1 st channel 211 so as to be adjacent to the 1 st channel 211. The 3 rd passage 205 has a 5 th rail 206 and a 6 th rail 207 which support both side lower surfaces of the plate-like workpiece 2, respectively. These 5 th rail 206 and 6 th rail 207 extend in the Y-axis direction.

In addition, the 5 th track 206 of the 3 rd channel 205 is adjacent to the 1 st track 212 of the 1 st channel 211.

In this configuration, the 1 st rail 212 and the 2 nd rail 213 of the 1 st lane 211, the 3 rd rail 216 and the 4 th rail 217 of the 2 nd lane 215, and the 5 th rail 206 and the 6 th rail 207 of the 3 rd lane 205 are provided on the pair of guide rails 221 of the width changing unit 220 so as to be slidable along the guide rails 221.

That is, in order to change the width of the 1 st lane 211, the 3 rd lane 205 is moved in the same direction as the moving direction of the 1 st rail 212, and the width of the 3 rd lane 205 is changed. In addition, in order to change the width of the 1 st lane 211, the 2 nd lane 215 is moved in the same direction as the moving direction of the 2 nd rail 213, and the width of the 2 nd lane 215 is changed.

Therefore, when the 2 nd rail 213 is moved in the direction opposite to the moving direction of the 1 st rail 212 to rotate the shaft 222, the widths of the 1 st lane 211, the 2 nd lane 215, and the 3 rd lane 205 are simultaneously changed.

In this configuration, the 1 st female screw 241 is formed on the 2 nd rail 213, the 2 nd female screw 242 is formed on the 3 rd rail 216, and the 3 rd female screw 243 is formed on the 4 th rail 217. As described above, the 1 st female screw 241 of the 2 nd rail 213 and the 2 nd female screw 242 of the 3 rd rail 216 have the pitch P1 (see fig. 6 (a)). On the other hand, in this structure, the 3 rd internal thread 243 of the 4 th rail 217 has a pitch P3(P3 is 3 × P1) which is 3 times the pitch P1.

In this configuration, a 1 st reverse female screw 245 is formed in the 1 st rail 212, a 2 nd reverse female screw 246 is formed in the 5 th rail 206, and a 3 rd reverse female screw 247 is formed in the 6 th rail 207. The 1 st internal reverse thread 245 of the 1 st rail 212 and the 2 nd internal reverse thread 246 of the 5 th rail 206 have a thread pitch P1. The 3 rd reverse internal thread 247 of the 6 th rail 207 has a pitch P3 that is 3 times the pitch P1. In addition, the 1 st reverse internal thread 245, the 2 nd reverse internal thread 246, and the 3 rd reverse internal thread 247 are internal threads opposite to the 1 st internal thread 241.

In this configuration, the shaft 222 also includes: a 1 st male screw 225 having a pitch P1 to be screwed with the 1 st female screw 241 of the 2 nd rail 213 and the 2 nd female screw 242 of the 3 rd rail 216; and a 2 nd external thread 226 having a thread pitch P3 that is threadedly engaged with the 3 rd internal thread 243 of the 4 th rail 217. In addition, the shaft 222 has a 1 st reverse external thread 227 of a pitch P1 that threads with the 1 st reverse internal thread 245 of the 1 st rail 212 and the 2 nd reverse internal thread 246 of the 5 th rail 206, and a 2 nd reverse external thread 228 of a pitch P3 that threads with the 3 rd reverse internal thread 247 of the 6 th rail 207.

The shaft 222 extends in parallel with the guide rail 221 in a state where the 1 st male screw 225 is screwed into the 1 st female screw 241 of the 2 nd rail 213 and the 2 nd female screw 242 of the 3 rd rail 216, the 2 nd male screw 226 is screwed into the 3 rd female screw 243 of the 4 th rail 217, the 1 st reverse male screw 227 is screwed into the 1 st reverse female screw 245 of the 1 st rail 212 and the 2 nd reverse female screw 246 of the 5 th rail 206, and the 2 nd reverse male screw 228 is screwed into the 3 rd reverse female screw 247 of the 6 th rail 207.

In this configuration, for example, the 1 st female screw 241 of the 2 nd rail 213 and the 2 nd female screw 242 of the 3 rd rail 216 are screwed with the 1 st male screw 225 of the shaft 222 so that the 2 nd rail 213 and the 3 rd rail 216 move in the-X direction along the guide rail 221 when the shaft 222 rotates clockwise.

The 3 rd female screw 243 of the 4 th rail 217 is also screwed with the 2 nd male screw 226 of the shaft 222 so that the 4 th rail 217 moves in the-X direction along the guide rail 221 when the shaft 222 rotates clockwise. Here, the 3 rd internal thread 243 of the 4 th rail 217 has a pitch P3 3 times that of the 1 st internal thread 241 and the 2 nd internal thread 242, P1. Therefore, the movement distance of the 4 th rail 217 accompanying the clockwise rotation of the shaft 222 becomes 3 times the distance between the 2 nd rail 213 and the 3 rd rail 216.

The 1 st internal reverse thread 245 of the 1 st rail 212 and the 2 nd internal reverse thread 246 of the 5 th rail 206 are screwed with the 1 st external reverse thread 227 of the shaft 222 so that the 1 st rail 212 and the 5 th rail 206 move in the + X direction along the guide rail 221 when the shaft 222 rotates clockwise.

Therefore, when the shaft 222 rotates clockwise, the 2 nd track 213 moves in the-X direction, and on the other hand, the 1 st track 212 moves in the + X direction. Accordingly, the width of the 1 st channel 211, which is the distance between these 2 nd and 1 st tracks 213 and 212, is enlarged. In addition, the 4 th rail 217 is moved in the-X direction by 3 times the distance of the 3 rd rail 216. Therefore, the width of the 2 nd channel 215, which is the distance between the 3 rd track 216 and the 4 th track 217, is also enlarged as in the 1 st channel 211.

In this configuration, the 3 rd reverse internal thread 247 of the 6 th rail 207 is also screwed with the 2 nd reverse external thread 228 of the shaft 222 so that the 6 th rail 207 moves in the + X direction along the guide rail 221 when the shaft 222 rotates clockwise. Here, the 3 rd reverse internal thread 247 of the 6 th rail 207 has a pitch P3 of 3 times the pitch P1. Therefore, the movement distance of the 6 th track 207 in the + X direction accompanying the clockwise rotation of the shaft 222 is 3 times the distance of the 1 st track 212 and the 5 th track 206.

Therefore, the 6 th rail 207 moves in the + X direction by 3 times the distance of the 5 th rail 206 in accordance with the clockwise rotation of the shaft 222. Therefore, the width of the 3 rd channel 205, which is the distance between the 6 th track 207 and the 5 th track 206, is enlarged as in the 1 st channel 211.

In addition, by rotating the shaft 222 counterclockwise, the 2 nd rail 213 and the 3 rd rail 216 move in the + X direction, and the 4 th rail 217 moves in the + X direction by a distance 3 times that of the 2 nd rail 213 and the 3 rd rail 216. Further, the 1 st rail 212 and the 5 th rail 206 move in the-X direction, and the 6 th rail 207 moves in the-X direction by a distance 3 times that of the 1 st rail 212 and the 5 th rail 206. Therefore, the widths of the 1 st, 2 nd, and 3 rd channels 211, 215, and 205 are similarly narrowed.

In this way, in this configuration, by rotating the shaft 222, the widths of the 1 st passage 211, the 2 nd passage 215, and the 3 rd passage 205 can be enlarged or narrowed in accordance with the width of the plate-shaped workpiece 2.

Claims (7)

1. A processing apparatus, comprising at least:

a holding unit that holds a plate-shaped workpiece by a holding surface;

a processing unit that processes the plate-shaped workpiece held on the holding surface;

a cassette mounting table for mounting a cassette having a shelf for accommodating a plurality of plate-like workpieces with a gap therebetween in a vertical direction;

a temporarily placing unit for temporarily placing the plate-like workpiece taken out from the cassette; and

a conveying unit for conveying the plate-like workpiece temporarily placed in the temporary placing unit to the holding surface,

wherein the content of the first and second substances,

the holding unit has a plurality of the holding surfaces,

the temporary placing unit can temporarily place the plate-shaped workpieces with the number corresponding to the number of the holding surfaces,

the conveying unit comprises:

a holding section that simultaneously holds a plurality of plate-shaped workpieces; and

a moving unit that moves the holding portion from the temporarily placing unit to the holding unit,

the conveying unit receives the plurality of plate-shaped workpieces temporarily placed in the temporary placing unit by one operation of the holding portion by the moving unit and conveys the plurality of plate-shaped workpieces to the holding surface.

2. The processing device according to claim 1,

the temporary playing unit comprises:

an air slider having an air ejection hole that is opened in an upper surface thereof and ejects air, for supporting a lower surface of the plate-shaped workpiece in a non-contact manner by air, and extending from the cassette to a receiving position of the conveying unit;

a slider moving unit that moves a plate-like workpiece supported on the upper surface of the air slider in a non-contact manner by the air in an extending direction of the air slider; and

and a stopping unit that stops the plate-shaped workpiece moved by the slide moving unit at the receiving position of the conveying unit.

3. The processing apparatus according to claim 2,

the slider moving unit has a pushing mechanism that pushes one edge of a plate-like workpiece supported on an upper surface of the air slider in a non-contact manner toward the receiving position,

the stop unit has a stopper that contacts the other edge of the plate-like workpiece moved to the receiving position.

4. The processing apparatus according to claim 2,

the air injection hole has:

a forward air injection hole as the slider moving means formed to be inclined in a moving direction from a direction perpendicular to the upper surface of the air slider so as to flow air in the moving direction of the plate-like workpiece; and

a reverse air injection hole as the stopping means having an inclination opposed to the inclination of the forward air injection hole so as to form a flow of air opposed to the flow of air injected from the forward air injection hole,

the temporarily placing unit supports the plate-like workpiece in a non-contact manner at the receiving position by the flow of the air ejected from the forward air ejection hole and the flow of the air ejected from the reverse air ejection hole.

5. The processing apparatus according to claim 2,

the temporary playing unit comprises:

a 1 st channel composed of a 1 st rail and a 2 nd rail that support both side lower surfaces of the plate-shaped workpiece, respectively;

a 2 nd channel which is arranged in parallel with the 1 st channel and which is constituted by a 3 rd rail and a 4 th rail which support both lower surfaces of the plate-like workpiece, respectively, in the same manner as the 1 st channel; and

a width changing unit capable of adjusting widths of the 1 st lane and the 2 nd lane at the same time,

the width changing unit includes:

a 1 st internal thread formed on the 2 nd rail;

a 2 nd female screw formed at the 3 rd track at the same pitch as the 1 st female screw;

a 3 rd female screw formed at the 4 th track at a pitch double that of the 1 st and 2 nd female screws;

a shaft having a 1 st male screw and a 2 nd male screw, the 1 st male screw being screwed with the 1 st female screw and the 2 nd female screw, the 2 nd male screw being screwed with the 3 rd female screw; and

a rotating unit which rotates the shaft,

the width changing means can simultaneously expand or simultaneously narrow the widths of the 1 st channel and the 2 nd channel by rotating the shaft.

6. The processing device according to claim 1,

the temporary playing unit comprises:

an endless belt;

a rotating mechanism that rotates the endless belt; and

and a leading end sensor that detects that the plate-like workpiece placed on the upper surface of the endless belt has reached the receiving position of the conveying unit.

7. The processing device according to claim 6,

the processing device further has:

a detection sensor that detects the plate-like workpiece taken out of the cassette and placed on the endless belt;

a dimension setting unit that sets a length and a width that are dimensions of the plate-shaped workpiece;

a speed setting unit that rotates the endless belt at a predetermined rotational speed by the rotation mechanism;

a time measuring section that measures a time from when the detection sensor detects one edge of the plate-shaped workpiece to when the other edge of the plate-shaped workpiece is detected, when the plate-shaped workpiece having the size set by the size setting section is moved at the speed set by the speed setting section;

a dimension calculating section that calculates a dimension of the plate-like workpiece based on the rotation speed of the endless belt set by the speed setting section and the time measured by the time measuring section; and

and a determination section that determines that there is an abnormality in rotation of the endless belt when the size of the plate-shaped workpiece calculated by the size calculation section is smaller than the size of the plate-shaped workpiece set by the size setting section.

Images