CN114008240A - 前驱体供应腔室 - Google Patents
前驱体供应腔室 Download PDFInfo
- Publication number
- CN114008240A CN114008240A CN202080045851.1A CN202080045851A CN114008240A CN 114008240 A CN114008240 A CN 114008240A CN 202080045851 A CN202080045851 A CN 202080045851A CN 114008240 A CN114008240 A CN 114008240A
- Authority
- CN
- China
- Prior art keywords
- precursor
- chamber
- precursor supply
- supply chamber
- heating element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002243 precursor Substances 0.000 title claims abstract description 627
- 238000010438 heat treatment Methods 0.000 claims abstract description 110
- 238000000231 atomic layer deposition Methods 0.000 claims abstract description 17
- 229910052751 metal Inorganic materials 0.000 claims description 49
- 239000002184 metal Substances 0.000 claims description 49
- 239000010410 layer Substances 0.000 claims description 38
- 238000007789 sealing Methods 0.000 claims description 15
- 238000009413 insulation Methods 0.000 claims description 11
- 239000002344 surface layer Substances 0.000 claims description 7
- 238000013022 venting Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 50
- 239000012159 carrier gas Substances 0.000 description 12
- 239000007788 liquid Substances 0.000 description 9
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 238000005485 electric heating Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4485—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation without using carrier gas in contact with the source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
Abstract
Description
Claims (14)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20195336 | 2019-04-25 | ||
FI20195336A FI129734B (en) | 2019-04-25 | 2019-04-25 | Feeding chamber for preform |
PCT/FI2020/050269 WO2020216996A1 (en) | 2019-04-25 | 2020-04-24 | Precursor supply chamber |
Publications (1)
Publication Number | Publication Date |
---|---|
CN114008240A true CN114008240A (zh) | 2022-02-01 |
Family
ID=72941536
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202080045851.1A Pending CN114008240A (zh) | 2019-04-25 | 2020-04-24 | 前驱体供应腔室 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20220220614A1 (zh) |
EP (1) | EP3959351A4 (zh) |
CN (1) | CN114008240A (zh) |
FI (1) | FI129734B (zh) |
WO (1) | WO2020216996A1 (zh) |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5377429A (en) * | 1993-04-19 | 1995-01-03 | Micron Semiconductor, Inc. | Method and appartus for subliming precursors |
US6158454A (en) * | 1998-04-14 | 2000-12-12 | Insync Systems, Inc. | Sieve like structure for fluid flow through structural arrangement |
US20050000428A1 (en) * | 2003-05-16 | 2005-01-06 | Shero Eric J. | Method and apparatus for vaporizing and delivering reactant |
CN206976835U (zh) * | 2017-06-26 | 2018-02-06 | 北京合纵科技股份有限公司 | 一种夹心式iac级高压开关柜柜体 |
US20180094351A1 (en) * | 2016-09-30 | 2018-04-05 | Asm Ip Holding B.V. | Reactant vaporizer and related systems and methods |
US20180163307A1 (en) * | 2016-12-12 | 2018-06-14 | Applied Materials, Inc. | Precursor control system and process |
WO2019004749A1 (ko) * | 2017-06-28 | 2019-01-03 | 엘지전자 주식회사 | 비디오 압축을 위한 변환 커널의 저복잡도 연산을 수행하는 방법 및 장치 |
US20190055649A1 (en) * | 2017-08-18 | 2019-02-21 | Samsung Electronics Co., Ltd. | Precursor Supply Unit, Substrate Processing System, and Method of Fabricating Semiconductor Device Using the Same |
CN109518164A (zh) * | 2018-12-20 | 2019-03-26 | 北京北方华创微电子装备有限公司 | 原子层沉积设备及方法 |
-
2019
- 2019-04-25 FI FI20195336A patent/FI129734B/en active IP Right Grant
-
2020
- 2020-04-24 EP EP20795118.7A patent/EP3959351A4/en active Pending
- 2020-04-24 US US17/605,633 patent/US20220220614A1/en active Pending
- 2020-04-24 WO PCT/FI2020/050269 patent/WO2020216996A1/en unknown
- 2020-04-24 CN CN202080045851.1A patent/CN114008240A/zh active Pending
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5377429A (en) * | 1993-04-19 | 1995-01-03 | Micron Semiconductor, Inc. | Method and appartus for subliming precursors |
US6158454A (en) * | 1998-04-14 | 2000-12-12 | Insync Systems, Inc. | Sieve like structure for fluid flow through structural arrangement |
US20050000428A1 (en) * | 2003-05-16 | 2005-01-06 | Shero Eric J. | Method and apparatus for vaporizing and delivering reactant |
US20180094351A1 (en) * | 2016-09-30 | 2018-04-05 | Asm Ip Holding B.V. | Reactant vaporizer and related systems and methods |
CN107881483A (zh) * | 2016-09-30 | 2018-04-06 | Asm Ip 控股有限公司 | 反应物汽化器和相关系统与方法 |
US20180163307A1 (en) * | 2016-12-12 | 2018-06-14 | Applied Materials, Inc. | Precursor control system and process |
CN206976835U (zh) * | 2017-06-26 | 2018-02-06 | 北京合纵科技股份有限公司 | 一种夹心式iac级高压开关柜柜体 |
WO2019004749A1 (ko) * | 2017-06-28 | 2019-01-03 | 엘지전자 주식회사 | 비디오 압축을 위한 변환 커널의 저복잡도 연산을 수행하는 방법 및 장치 |
US20190055649A1 (en) * | 2017-08-18 | 2019-02-21 | Samsung Electronics Co., Ltd. | Precursor Supply Unit, Substrate Processing System, and Method of Fabricating Semiconductor Device Using the Same |
CN109518164A (zh) * | 2018-12-20 | 2019-03-26 | 北京北方华创微电子装备有限公司 | 原子层沉积设备及方法 |
Non-Patent Citations (1)
Title |
---|
P. D. SZKUTNIK等: "Qualification of a sublimation tool applied to the case of metalorganic chemical vapor deposition of In2O3 from In(tmhd)3 as a solid precursor", 《REV. SCI. INSTRUM.》, vol. 87, pages 1 - 9 * |
Also Published As
Publication number | Publication date |
---|---|
FI20195336A1 (en) | 2020-10-26 |
EP3959351A1 (en) | 2022-03-02 |
FI129734B (en) | 2022-08-15 |
EP3959351A4 (en) | 2022-06-01 |
US20220220614A1 (en) | 2022-07-14 |
WO2020216996A1 (en) | 2020-10-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information |
Address after: Espoo, Finland Applicant after: BENEQ Group Ltd. Address before: Espoo, Finland Applicant before: BENEQ OY |
|
CB02 | Change of applicant information | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20220909 Address after: Espoo, Finland Applicant after: BENEQ OY Address before: Espoo, Finland Applicant before: BENEQ Group Ltd. |
|
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20230426 Address after: Room 205-5-7, 2nd Floor, East Office Building, No. 45 Beijing Road, Qianwan Bonded Port Area, Qingdao, Shandong Province, China (Shandong) Pilot Free Trade Zone (A) Applicant after: QINGDAO SIFANG SRI INTELLIGENT TECHNOLOGY Co.,Ltd. Address before: Espoo, Finland Applicant before: BENEQ OY |
|
TA01 | Transfer of patent application right |