CN113965529A - LonWorks communication control method and system based on priority queue - Google Patents
LonWorks communication control method and system based on priority queue Download PDFInfo
- Publication number
- CN113965529A CN113965529A CN202111319888.1A CN202111319888A CN113965529A CN 113965529 A CN113965529 A CN 113965529A CN 202111319888 A CN202111319888 A CN 202111319888A CN 113965529 A CN113965529 A CN 113965529A
- Authority
- CN
- China
- Prior art keywords
- data
- equipment
- priority
- dust particle
- humidity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 68
- 238000004891 communication Methods 0.000 title claims abstract description 35
- 238000001514 detection method Methods 0.000 claims abstract description 141
- 238000004519 manufacturing process Methods 0.000 claims abstract description 91
- 238000012545 processing Methods 0.000 claims abstract description 91
- 230000005540 biological transmission Effects 0.000 claims abstract description 67
- 239000004065 semiconductor Substances 0.000 claims abstract description 65
- 230000008569 process Effects 0.000 claims abstract description 43
- 239000000428 dust Substances 0.000 claims description 102
- 239000002245 particle Substances 0.000 claims description 96
- 230000035945 sensitivity Effects 0.000 claims description 40
- 238000004458 analytical method Methods 0.000 claims description 28
- 238000012216 screening Methods 0.000 claims description 20
- 238000012423 maintenance Methods 0.000 claims description 17
- 238000004140 cleaning Methods 0.000 claims description 5
- 238000007405 data analysis Methods 0.000 claims description 5
- 230000009286 beneficial effect Effects 0.000 abstract description 15
- 230000008439 repair process Effects 0.000 abstract description 10
- 238000012544 monitoring process Methods 0.000 abstract description 6
- 238000007726 management method Methods 0.000 description 14
- 230000001276 controlling effect Effects 0.000 description 6
- 230000001105 regulatory effect Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000011897 real-time detection Methods 0.000 description 3
- 238000004904 shortening Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 230000010485 coping Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 238000004148 unit process Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L47/00—Traffic control in data switching networks
- H04L47/50—Queue scheduling
- H04L47/62—Queue scheduling characterised by scheduling criteria
- H04L47/625—Queue scheduling characterised by scheduling criteria for service slots or service orders
- H04L47/6275—Queue scheduling characterised by scheduling criteria for service slots or service orders based on priority
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L67/00—Network arrangements or protocols for supporting network services or applications
- H04L67/01—Protocols
- H04L67/12—Protocols specially adapted for proprietary or special-purpose networking environments, e.g. medical networks, sensor networks, networks in vehicles or remote metering networks
Abstract
The invention discloses a LonWorks communication control method and system based on a priority queue, and relates to the technical field of LonWorks communication. The method comprises the following steps: dividing the semiconductor production line into a plurality of detection areas, connecting an intelligent detection node of each detection area with a plurality of detectors, acquiring data of the corresponding detection area, and setting a priority order of data transmission according to a priority queue mode; the intelligent detection node transmits the acquired data to the supervision center through the LonWorks network bus in sequence according to the set priority order; the monitoring center analyzes the received data to make a pre-judgment, sets a priority order of data processing according to the pre-judgment, and processes the fault according to the priority according to the data processing result. The invention realizes the real-time monitoring of the semiconductor production line by utilizing the LonWorks communication control, prevents equipment from being suddenly damaged, and is beneficial to improving the productivity and reducing the cost and the repair time.
Description
Technical Field
The invention relates to the technical field of LonWorks communication, in particular to a LonWorks communication control method and system based on a priority queue.
Background
Semiconductor manufacturing is one of the most complex and technologically advanced manufacturing processes, which typically consists of over 500 steps, with typical manufacturing steps being the synthesis of silicon wafers from silicon material, the fabrication of integrated circuits on the newly synthesized silicon wafers, and the placement of the integrated circuits into packages to produce usable products. It is necessary to effectively predict and detect malfunctions and defects of production environments and production equipment in a semiconductor production process, which not only prevents sudden equipment damage but also contributes to improvement in productivity, reduction in cost and repair time. All steps of semiconductor manufacturing and production environments are monitored in a factory, thereby generating a large amount of data, but the data is liable to be unstable during transmission; the amount of data generated is huge, and real-time detection and processing of production faults are difficult to realize.
Disclosure of Invention
The invention provides a LonWorks communication control method and system based on priority queue, which aims to solve the problem that the semiconductor manufacture in the prior art is one of the most complex and technologically advanced manufacturing processes, the process is generally formed by more than 500 steps, the typical manufacturing steps are that silicon wafers are synthesized by silicon materials, integrated circuits are manufactured on the newly synthesized silicon wafers, and the integrated circuits are placed in packages so as to produce usable products. It is necessary to effectively predict and detect malfunctions and defects of production environments and production equipment in a semiconductor production process, which not only prevents sudden equipment damage but also contributes to improvement in productivity, reduction in cost and repair time. All steps of semiconductor manufacturing and production environments are monitored in a factory, thereby generating a large amount of data, but the data is liable to be unstable during transmission; the amount of data generated is huge, and it is difficult to realize the above-mentioned problems of detecting and handling production failures in real time.
In order to achieve the purpose, the invention provides the following technical scheme:
the invention provides a LonWorks communication control method based on a priority queue, which is characterized by comprising the following steps:
s101: dividing the semiconductor production line into a plurality of detection areas, connecting an intelligent detection node of each detection area with a plurality of detectors, acquiring data of the corresponding detection area, and setting a priority order of data transmission according to a priority queue mode;
s102: the intelligent detection node transmits the acquired data to the supervision center through the LonWorks network bus in sequence according to the set priority order;
s103: the monitoring center analyzes the received data to make a pre-judgment, sets a priority order of data processing according to the pre-judgment, and processes the fault according to the priority according to the data processing result.
Wherein the step S101 includes:
s1011: collecting temperature data, humidity data, dust particle data and equipment running state in a semiconductor production line through a plurality of detectors;
s1012: the detection area includes a first detection area, and the priority order of data transmission set by the first detection area includes: and setting a priority order according to the order of the equipment running state, the dust particle data, the temperature data and the humidity data.
Wherein the step S103 includes:
s1031: setting standard ranges for the temperature data, the humidity data and the dust particle data of the first detection area; wherein the equipment running state is set as: a to-be-operated state, a normal operation state, an operation warning state, an operation accident state and a to-be-overhauled state;
s1032: and the supervision center contrasts and analyzes the received temperature data, humidity data and dust particle data.
The detection area comprises an execution unit entering a gate area of a semiconductor production area, a camera in the detector transmits monitored information to a supervision center, the supervision center intelligently identifies and processes videos shot by the camera, identifies an execution unit worker plate and automatically judges whether dust-free clothes and shoes are worn correctly or not, if the requirements are not met, an alarm signal is sent out to automatically close a door, the alarm signal is analyzed by an intelligent detection node, alarm address and type information are uploaded to the supervision center, an alarm is generated, and an alarm record is stored; the execution unit accurately judges and processes the images according to the live sound and the images.
Wherein the S101 includes:
collecting temperature data, humidity data, dust particle data and equipment running state in a semiconductor production line through a plurality of detectors;
setting a priority order of data transmission according to the sensitivity of the equipment to temperature data, humidity data and dust particle data or the influence degree of the humidity data and the dust particle data on the equipment;
setting a priority sequence of data transmission for the running state of the equipment according to the receiving time and the emergency;
after the step S103, the method includes:
the supervision center stores the processing mode and the processing result information in the supervision center according to the mode that the fault request service with high priority is processed preferentially; the execution unit displays and processes the alarm information in real time and inquires and processes the alarm historical information through the supervision center.
The LonWorks communication control system based on the priority queue comprises:
the acquisition unit is used for dividing the semiconductor production line into a plurality of detection areas, the intelligent detection node of each detection area is connected with a plurality of detectors and carries out data acquisition on the corresponding detection area, and the priority order of data transmission is set according to a priority queue mode;
the transmission unit is used for transmitting the acquired data to the supervision center by the intelligent detection node through the LonWorks network bus according to the set priority sequence;
and the analysis processing unit is used for analyzing the received data by the supervision center to perform pre-judgment, setting the priority order of data processing according to the pre-judgment and processing the fault according to the priority according to the data processing result.
Wherein, the collection unit includes:
the first acquisition subunit is used for acquiring temperature data, humidity data, dust particle data and equipment running state in the semiconductor production line through a plurality of detectors;
the second acquisition subunit is used for the detection area including a first detection area, and the priority order of data transmission set by the first detection area includes: and setting a priority order according to the order of the equipment running state, the dust particle data, the temperature data and the humidity data.
Wherein the analysis processing unit includes:
the device comprises an analysis processing subunit, a data processing subunit and a data processing subunit, wherein the analysis processing subunit is used for setting standard ranges for the temperature data, the humidity data and the dust particle data of the first detection area; wherein the equipment running state is set as: a to-be-operated state, a normal operation state, an operation warning state, an operation accident state and a to-be-overhauled state;
the first analysis processing subunit is used for comparing and analyzing the received temperature data, humidity data and dust particle data by the monitoring center, and if the first detection area judges that the dust particle data and the temperature data exceed the standard range through comparison data analysis, the dust particle data in the data processing stage is set to be the highest priority, and the dust particle data is processed preferentially to be kept in the standard range; if the temperature data exceeds the standard range and the humidity data and the dust particle data are normal, setting the temperature in the data processing stage as the highest priority to process the temperature data in priority; if the data exceeding the standard range exist in the pre-judgment, analyzing the reason of exceeding the standard and stopping the operation of the equipment, and after the processed data meet the requirements, the equipment normally operates;
the second analysis and processing subunit is used for preferentially processing the operation accident state equipment according to the equipment request time and the emergency if the operation accident state equipment and the operation warning state equipment exist at the same time, the operation accident state equipment sends out a red light alarm, the execution unit judges the cause of the problem through the monitoring center to position and power off the equipment, the power off information is transmitted to the monitoring center through a LonWorks network bus, the monitoring center assigns maintenance tasks to corresponding maintenance personnel, and the maintenance personnel process the equipment; the running warning state equipment sends out a yellow light alarm, and the execution unit acquires and processes a warning reason through the supervision center.
Wherein, the detection zone includes gate detecting element, gate detecting element includes:
the gate detection unit is used for the detection area and comprises a gate area where the execution unit enters the semiconductor production area, the camera in the detector transmits monitored information to the supervision center, the supervision center intelligently identifies and processes videos shot by the camera, identifies the execution unit worker plate and automatically judges whether dust-free clothes and shoes are worn correctly or not, if the dust-free clothes and shoes are not worn correctly, an alarm signal is sent out to automatically close the door, the alarm signal is analyzed by the intelligent detection node, alarm address and type information are uploaded to the supervision center, an alarm is generated, and an alarm record is stored; the execution unit accurately judges and processes the images according to the live sound and the images.
Wherein the supervision center comprises:
the second acquisition subunit is used for acquiring temperature data, humidity data, dust particle data and equipment running state in the semiconductor production line through a plurality of detectors;
the first data transmission subunit is used for setting a priority order of data transmission according to the sensitivity of the equipment to the temperature data, the humidity data and the dust particle data or the influence degree of the humidity data and the dust particle data on the equipment; the setting of the priority order of data transmission includes:
collecting all historical temperature data, humidity data, dust particle data, sensitivity historical data and historical fault historical data of equipment through a big data system, and establishing a sensitivity database; performing big data cleaning and hierarchical data screening on temperature data, humidity data and dust particle data in a sensitivity database, automatically sorting sensitivity historical data, and establishing hierarchical screening relevancy sorting through hierarchical data screening and automatic sorting; carrying out priority hierarchical classification on historical fault data of the equipment through hierarchical screening relevance sorting, and establishing the influence degree of humidity data and dust particle data on the equipment; respectively weighting and converting the sensitivity and the influence degree into percentage values, wherein the larger the weight is, the higher the priority of data transmission is set;
the second data transmission subunit is used for setting the priority order of data transmission according to the receiving time and the emergency condition on the running state of the equipment;
the analysis processing subunit includes:
the supervision center stores the processing mode and the processing result information in the supervision center according to the mode that the fault request service with high priority is processed preferentially;
the execution unit displays and processes the alarm information in real time and inquires and processes the alarm historical information through the supervision center.
Compared with the prior art, the invention has the following advantages:
the invention provides a LonWorks communication control method and a system based on a priority queue, comprising the following steps: the semiconductor production line is divided into a plurality of detection areas for facilitating detection management, an intelligent detection node of each detection area is connected with a plurality of detectors and collects data in the semiconductor production line, priority transmission is set according to the sensitivity of equipment to collected data and the difference of judging emergency, priority transmission with high priority is ensured, and the condition that a large amount of data is unstable in the transmission process is avoided; the intelligent detection node transmits the acquired data to the supervision center through the LonWorks network bus according to the set priority sequence, and the LonWorks network bus shares the network data in a network variable form in network communication, so that the communication transmission efficiency between the intelligent detection node and the supervision center is greatly improved, and the effectiveness of the detection management system is improved; the received data is analyzed to make a pre-judgment, the priority of the data processing stage is set according to the pre-judgment, the fault requested to be processed is processed according to the priority, the fault with high priority is guaranteed to be processed preferentially through the pre-judgment, and the method is beneficial to improving the productivity, reducing the cost and shortening the repair time.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
The technical solution of the present invention is further described in detail by the accompanying drawings and embodiments.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a flow chart of a LonWorks communication control method based on a priority queue according to an embodiment of the present invention;
FIG. 2 is a flow chart of the embodiment of the present invention in which the inspection data in the semiconductor manufacturing line is transmitted to the monitoring system through the LonWorks network bus;
fig. 3 is a schematic structural diagram of a LonWorks communication control system based on a priority queue in the embodiment of the present invention.
Detailed Description
The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are described herein for the purpose of illustration and explanation and not limitation.
An embodiment of the present invention provides a method for controlling LonWorks communication based on a priority queue, please refer to fig. 1 to 2, and the method for controlling LonWorks communication based on the priority queue includes:
s101: dividing the semiconductor production line into a plurality of detection areas, connecting an intelligent detection node of each detection area with a plurality of detectors, acquiring data of the corresponding detection area, and setting a priority order of data transmission according to a priority queue mode;
s102: the intelligent detection node transmits the acquired data to the supervision center through the LonWorks network bus in sequence according to the set priority order;
s103: the monitoring center analyzes the received data to make a pre-judgment, sets a priority order of data processing according to the pre-judgment, and processes the fault according to the priority according to the data processing result.
The working principle of the technical scheme is as follows: the semiconductor production line is divided into a plurality of detection areas to facilitate subarea detection management, each detection area is connected with an intelligent detection point, the intelligent detection point of each detection area is connected with a plurality of detectors, the intelligent detection points collect the detection data of the detectors and transmit the collected data to a supervision center through a LonWorks network bus according to a set priority sequence, and the LonWorks network bus plays a role in starting and stopping in a supervision system to effectively connect the supervision center with the intelligent detection nodes distributed in each detection area; the supervision center carries out analysis pre-judgment after data processing, sets the priority order of data processing according to the pre-judgment, gives an alarm, and processes the fault according to the priority according to the data processing result; the LonWorks communication control method based on the priority queue can be applied to online detection.
The beneficial effects of the above technical scheme are: the semiconductor production line is divided into a plurality of detection areas for facilitating detection management, an intelligent detection node of each detection area is connected with a plurality of detectors and collects data in the semiconductor production line, priority transmission is set according to the sensitivity of equipment to collected data and the difference of judging emergency, priority transmission with high priority is ensured, and the condition that a large amount of data is unstable in the transmission process is avoided; the intelligent detection node transmits the acquired data to the supervision center through the LonWorks network bus according to the set priority sequence, and the LonWorks network bus shares the network data in a network variable form in network communication, so that the communication transmission efficiency between the intelligent detection node and the supervision center is greatly improved, and the effectiveness of the detection management system is improved; the method comprises the steps of analyzing the data received firstly for pre-judgment, setting the priority of a data processing stage according to the pre-judgment, and processing the fault requested to be processed according to the priority, so that the fault with high priority is ensured to be processed preferentially by pre-judgment, thereby being beneficial to improving the productivity, reducing the cost and shortening the repair time; the LonWorks communication control method based on the priority queue can be widely applied to the technical fields of online detection and the like.
In another embodiment, the S101 step includes:
s1021: collecting temperature data, humidity data, dust particle data and equipment running state in a semiconductor production line through a plurality of detectors;
s1022: the detection area includes first detection area, and the priority order of data transmission that first detection area set for includes: and setting a priority order according to the order of the equipment running state, the dust particle data, the temperature data and the humidity data.
The working principle of the technical scheme is as follows: the requirements on the environment in the production process of semiconductor production line equipment are strict, particularly a dust-free environment is required to be provided, the temperature and the humidity are ensured to be proper, the temperature data, the humidity data and the dust particle data in the semiconductor production line are collected through a plurality of detectors, the equipment can display the running state in the running process, and the detectors collect the running state of the equipment; a plurality of detection areas include first detection area, and first detection area equipment is more sensitive to dust particle, and secondly the temperature is sensitive, and the running state of equipment needs real-time detection, sets for the priority order of data transmission according to the importance of first detection area data, includes: and setting a priority order according to the order of the equipment running state, the dust particle data, the temperature data and the humidity data.
The beneficial effects of the above technical scheme are: in order to provide a dust-free environment with proper temperature and humidity for the production process of a semiconductor production line, temperature data, humidity data and dust particle data in the semiconductor production line are collected through a plurality of detectors; and priority is set for data transmission of the first detection area, so that priority transmission of important and sensitive data is guaranteed.
In another embodiment, the S103 step includes:
s1031: setting standard ranges for the temperature data, the humidity data and the dust particle data of the first detection area; wherein the equipment running state is set as: a to-be-operated state, a normal operation state, an operation warning state, an operation accident state and a to-be-overhauled state;
s1032: and the supervision center contrasts and analyzes the received temperature data, humidity data and dust particle data.
The working principle of the technical scheme is as follows: setting standard ranges of temperature data, humidity data and dust particle data according to the sensitivity of equipment to temperature, humidity and dust particles in the production process of a semiconductor in a first detection area, and setting the standard ranges of the temperature data, the humidity data and the dust particle data according to the running state of the equipment as follows: a to-be-operated state, a normal operation state, an operation warning state, an operation accident state and a to-be-overhauled state; the monitoring center sets a priority through the importance and the emergency degree of received data, the highest priority is processed preferentially, if the first detection area judges that the dust particle data and the temperature data exceed the standard range in advance through comparative data analysis, the dust particle data in the data processing stage is set as the highest priority, and the dust particle data is processed preferentially to be kept in the standard range; if the operation accident state equipment and the operation warning state equipment exist at the same time, the operation accident state equipment is processed preferentially according to the equipment request time, the operation accident state equipment sends out a red light alarm, the supervision center automatically analyzes the fault reason to position the equipment and cut off the power supply, the supervision center assigns maintenance tasks to corresponding maintenance personnel, the maintenance personnel process the equipment, the emergency fault is processed firstly by setting the priority, the normal operation of the equipment is guaranteed, and the equipment is prevented from being damaged due to untimely accident processing.
The beneficial effects of the above technical scheme are: setting standard ranges of data according to the sensitivity of equipment to temperature, humidity and dust particles in the production process of a semiconductor in a first detection area, enabling the temperature, the humidity and the dust particles to be maintained in the data standard ranges suitable for the semiconductor production equipment, if certain data is about to exceed the standard ranges, regulating and controlling by a control center, if data which are about to exceed the standard ranges are available at the same time, setting priorities according to the sensitivity of the semiconductor production equipment, and regulating and controlling according to the setting of the priorities; the equipment is set as follows according to the running state: when the equipment fails and sends out an alarm signal, the management and control center sets the priority according to the emergency degree of the analysis fault, and the execution unit processes the fault with the highest priority, so that the emergency fault is processed firstly, the normal operation of the equipment is ensured, the equipment is prevented from being damaged by the accident processing untimely, and the production efficiency is improved, the cost is reduced, and the repair time is shortened.
In another embodiment, the detection area comprises a doorway area where the execution unit enters the semiconductor production area, the camera in the detector transmits monitored information to the supervision center, the supervision center carries out intelligent identification processing on videos shot by the camera, identifies the execution unit worker plate and automatically judges whether dust-free clothes and shoes are worn correctly, and if the requirements are not met, an alarm signal is sent out to automatically close the door.
The working principle of the technical scheme is as follows: in order to provide a dust-free environment for the detection area, strict monitoring management needs to be performed on the execution unit; when the execution unit gets into the gate region in semiconductor production district, the information transmission that the camera in the detector will be monitored to supervisory center, and supervisory center carries out intelligent identification to the information of receiving and handles, discerns execution unit worker tablet and whether automatic judgement is correctly worn dustless clothing and shoes, if not conform to the requirement then sends alarm signal automatic closing door to avoid destroying the dustless environment of detection zone because of execution unit's wearing is not conform to the requirement.
The beneficial effects of the above technical scheme are: when the execution unit gets into the gate area in semiconductor production district, the information transmission that the camera in the detector will be monitored reaches supervisory center, and supervisory center carries out intelligent identification to the information of receiving and handles, discerns execution unit worker tablet and whether automatic judgement is correctly worn dustless clothing and shoes, if not conform to the requirement then send alarm signal automatic closing door to realized the strict control management to the execution unit, avoided not conforming to the dustless environment that requires to destroy the detection zone because of the wearing of execution unit.
In another embodiment, temperature data, humidity data, dust particle data and equipment running states in a semiconductor production line are collected through a plurality of detectors; setting a priority order of data transmission according to the sensitivity of the equipment to temperature data, humidity data and dust particle data or the influence degree of the humidity data and the dust particle data on the equipment; setting a priority sequence of data transmission for the running state of the equipment according to the receiving time and the emergency; the supervision center stores the processing mode and the processing result information in the supervision center according to the mode that the fault request service with high priority is processed preferentially; the execution unit displays and processes the alarm information in real time and inquires and processes the alarm historical information through the supervision center.
The working principle of the technical scheme is as follows: the semiconductor production line has high requirements on temperature, humidity and dust, and the temperature data, the humidity data and the dust particle data in the semiconductor production line are acquired and monitored in real time through a plurality of detectors, so that the damage to production equipment caused by the change of temperature, humidity and dust is avoided, and the running state of the equipment is acquired through the detectors; the intelligent detection node collects data collected by the detector and transmits the data to the supervision center according to the priority setting and the priority sequence; the fault request service with high priority is processed by the supervision center preferentially, so that damage to the equipment caused by sudden failure of the equipment and failure of processing is prevented, processing modes and processing result information are stored in the supervision center, the execution unit can check maintenance conditions in the later period, the execution unit can timely summarize problems and give a coping scheme, and the method is beneficial to improving the productivity and reducing the cost and the repair time.
The beneficial effects of the above technical scheme are: the temperature data, the humidity data and the dust particle data in the semiconductor production line are collected and monitored in real time through the detectors, so that the production equipment is prevented from being damaged due to the change of temperature, humidity and dust, the running state of the equipment is acquired through the detectors, the running of the equipment is convenient to monitor in real time, and the equipment can be timely processed if faults occur; the execution unit displays and processes alarm information in real time and inquires and processes alarm historical information through the supervision center, so that the production equipment of a production line can be known in real time, and sudden damage to the equipment is avoided.
An embodiment of the present invention provides a priority queue-based LonWorks communication control system, and referring to fig. 3, the priority queue-based LonWorks communication control system includes:
in another embodiment, the method comprises the following steps:
the acquisition unit is used for dividing the semiconductor production line into a plurality of detection areas, the intelligent detection node of each detection area is connected with a plurality of detectors and carries out data acquisition on the corresponding detection area, and the priority order of data transmission is set according to a priority queue mode;
the transmission unit is used for transmitting the acquired data to the supervision center by the intelligent detection node through the LonWorks network bus according to the set priority sequence;
and the analysis processing unit is used for analyzing the received data by the supervision center to perform pre-judgment, setting the priority order of data processing according to the pre-judgment and processing the fault according to the priority according to the data processing result.
The working principle of the technical scheme is as follows: the semiconductor production line is divided into a plurality of detection areas to facilitate subarea detection management, each detection area is connected with an intelligent detection point, the intelligent detection point of each detection area is connected with a plurality of detectors, an acquisition unit is used for summarizing detection data of the detectors by the intelligent detection points and then transmitting the acquired data to a supervision center through a LonWorks network bus according to a set priority order, and the LonWorks network bus plays a role in starting up and starting down in a supervision system and effectively connects the supervision center with the intelligent detection nodes distributed in each detection area; the analysis processing unit is used for the supervision center to carry out analysis pre-judgment after data processing, setting the priority order of data processing according to the pre-judgment, sending out an alarm and processing the fault according to the priority of the data processing result.
The beneficial effects of the above technical scheme are: the semiconductor production line is divided into a plurality of detection areas for facilitating detection management, an intelligent detection node of each detection area is connected with a plurality of detectors and collects data in the semiconductor production line, priority transmission is set according to the sensitivity of equipment to collected data and the difference of judging emergency, priority transmission with high priority is ensured, and the condition that a large amount of data is unstable in the transmission process is avoided; the intelligent detection node transmits the acquired data to the supervision center through the LonWorks network bus according to the set priority sequence, and the LonWorks network bus shares the network data in a network variable form in network communication, so that the communication transmission efficiency between the intelligent detection node and the supervision center is greatly improved, and the effectiveness of the detection management system is improved; the received data is analyzed to make a pre-judgment, the priority of the data processing stage is set according to the pre-judgment, the fault requested to be processed is processed according to the priority, the fault with high priority is guaranteed to be processed preferentially through the pre-judgment, and the method is beneficial to improving the productivity, reducing the cost and shortening the repair time.
In another embodiment, the acquisition unit comprises:
the first acquisition subunit is used for acquiring temperature data, humidity data, dust particle data and equipment running state in the semiconductor production line through a plurality of detectors;
the second acquisition subunit is used for the detection area including a first detection area, and the priority order of data transmission set by the first detection area includes: and setting a priority order according to the order of the equipment running state, the dust particle data, the temperature data and the humidity data.
The working principle of the technical scheme is as follows: the requirements on the environment in the production process of semiconductor production line equipment are strict, particularly a dust-free environment is required to be provided, the temperature and humidity are ensured to be proper, the temperature data, the humidity data and the dust particle data in the semiconductor production line are collected by a first collecting subunit through a plurality of detectors, the running state of the equipment can be displayed in the running process, and the running state of the equipment is collected by the detectors; a plurality of detection areas include first detection area, and first detection area equipment is more sensitive to dust particle, and secondly the temperature is sensitive, and the running state of equipment needs real-time detection, gathers subunit at the second and sets for data transmission's priority order according to the importance of first detection area data, includes: and setting a priority order according to the order of the equipment running state, the dust particle data, the temperature data and the humidity data.
The beneficial effects of the above technical scheme are: in order to provide a dust-free environment with proper temperature and humidity for the production process of a semiconductor production line, temperature data, humidity data and dust particle data in the semiconductor production line are collected through a plurality of detectors; and priority is set for data transmission of the first detection area, so that priority transmission of important and sensitive data is guaranteed.
In another embodiment, the analysis processing unit includes:
the device comprises an analysis processing subunit, a data processing subunit and a data processing subunit, wherein the analysis processing subunit is used for setting standard ranges for the temperature data, the humidity data and the dust particle data of the first detection area; wherein the equipment running state is set as: a to-be-operated state, a normal operation state, an operation warning state, an operation accident state and a to-be-overhauled state;
wherein, when the semiconductor is producedWhen the fault occurs, the device can be used
To detect whether there is a fault in step t, the formula is as follows:
p represents a conditional probability;
i represents a step between steps 1 to t;
indicating the nth detector under monitoring at step i;
Ytand Yt+1Representing binary variables, where a number 1 indicates that the state is faultless, and a number 0 indicates a fault state, YtAnd Yt+1Whether a fault exists in the current step and the next step is predicted respectively.
The first analysis processing subunit is used for comparing and analyzing the received temperature data, humidity data and dust particle data by the monitoring center, and if the first detection area judges that the dust particle data and the temperature data exceed the standard range through comparison data analysis, the dust particle data in the data processing stage is set to be the highest priority, and the dust particle data is processed preferentially to be kept in the standard range; if the temperature data exceeds the standard range and the humidity data and the dust particle data are normal, setting the temperature in the data processing stage as the highest priority to process the temperature data in priority; if the data exceeding the standard range exist in the pre-judgment, analyzing the reason of exceeding the standard and stopping the operation of the equipment, and after the processed data meet the requirements, the equipment normally operates;
the second analysis and processing subunit is used for preferentially processing the operation accident state equipment according to the equipment request time and the emergency if the operation accident state equipment and the operation warning state equipment exist at the same time, the operation accident state equipment sends out a red light alarm, the execution unit judges the cause of the problem through the monitoring center to position and power off the equipment, the power off information is transmitted to the monitoring center through a LonWorks network bus, the monitoring center assigns maintenance tasks to corresponding maintenance personnel, and the maintenance personnel process the equipment; the running warning state equipment sends out a yellow light alarm, and the execution unit acquires and processes a warning reason through the supervision center.
The working principle of the technical scheme is as follows: setting standard ranges of temperature data, humidity data and dust particle data according to the sensitivity of equipment to temperature, humidity and dust particles in the production process of a semiconductor in a first detection area, and setting the standard ranges of the temperature data, the humidity data and the dust particle data according to the running state of the equipment as follows: a to-be-operated state, a normal operation state, an operation warning state, an operation accident state and a to-be-overhauled state; the monitoring center sets a priority through the importance and the emergency degree of received data, the highest priority is processed preferentially, if the first detection area judges that the dust particle data and the temperature data exceed the standard range in advance through comparative data analysis, the dust particle data in the data processing stage is set as the highest priority, and the dust particle data is processed preferentially to be kept in the standard range; if the operation accident state equipment and the operation warning state equipment exist at the same time, the operation accident state equipment is processed preferentially according to the equipment request time, the operation accident state equipment sends out a red light alarm, the supervision center automatically analyzes the fault reason to position the equipment and cut off the power supply, the supervision center assigns maintenance tasks to corresponding maintenance personnel, the maintenance personnel process the equipment, the emergency fault is processed firstly by setting the priority, the normal operation of the equipment is guaranteed, and the equipment is prevented from being damaged due to untimely accident processing.
The beneficial effects of the above technical scheme are: setting standard ranges of data according to the sensitivity of equipment to temperature, humidity and dust particles in the production process of a semiconductor in a first detection area, enabling the temperature, the humidity and the dust particles to be maintained in the data standard ranges suitable for the semiconductor production equipment, if certain data is about to exceed the standard ranges, regulating and controlling by a control center, if data which are about to exceed the standard ranges are available at the same time, setting priorities according to the sensitivity of the semiconductor production equipment, and regulating and controlling according to the setting of the priorities; the equipment is set as follows according to the running state: when the equipment fails and sends out an alarm signal, the management and control center sets the priority according to the emergency degree of the analysis fault, and the execution unit processes the fault with the highest priority, so that the emergency fault is processed firstly, the normal operation of the equipment is ensured, the equipment is prevented from being damaged by the accident processing untimely, and the production efficiency is improved, the cost is reduced, and the repair time is shortened.
In another embodiment, the detection zone includes a doorway detection unit comprising:
the gate detection unit is used for the detection area and comprises a gate area where the execution unit enters the semiconductor production area, the camera in the detector transmits monitored information to the supervision center, the supervision center intelligently identifies and processes videos shot by the camera, identifies the execution unit worker plate and automatically judges whether dust-free clothes and shoes are worn correctly or not, if the dust-free clothes and shoes are not worn correctly, an alarm signal is sent out to automatically close the door, the alarm signal is analyzed by the intelligent detection node, alarm address and type information are uploaded to the supervision center, an alarm is generated, and an alarm record is stored; the execution unit accurately judges and processes the images according to the live sound and the images.
The working principle of the technical scheme is as follows: in order to provide a dust-free environment for the detection area, strict monitoring management needs to be performed on the execution unit; when the execution unit enters a gate area of a semiconductor production area and is located in a gate detection unit, a camera in the detector transmits monitored information to a supervision center, the supervision center carries out intelligent identification processing on the received information, identifies the execution unit worker plate and automatically judges whether dust-free clothes and shoes are worn correctly, and if the received information is not in accordance with requirements, an alarm signal is sent out to automatically close the door, so that the dust-free environment of the detection area is prevented from being damaged due to the fact that the execution unit is worn in accordance with the requirements.
The beneficial effects of the above technical scheme are: when the execution unit gets into the gate area in semiconductor production district, the information transmission that the camera in the detector will be monitored reaches supervisory center, and supervisory center carries out intelligent identification to the information of receiving and handles, discerns execution unit worker tablet and whether automatic judgement is correctly worn dustless clothing and shoes, if not conform to the requirement then send alarm signal automatic closing door to realized the strict control management to the execution unit, avoided not conforming to the dustless environment that requires to destroy the detection zone because of the wearing of execution unit.
In another embodiment, the regulatory center comprises:
the second acquisition subunit is used for acquiring temperature data, humidity data, dust particle data and equipment running state in the semiconductor production line through a plurality of detectors;
the first data transmission subunit is used for setting a priority order of data transmission according to the sensitivity of the equipment to the temperature data, the humidity data and the dust particle data or the influence degree of the humidity data and the dust particle data on the equipment; the setting of the priority order of data transmission includes:
collecting all historical temperature data, humidity data, dust particle data, sensitivity historical data and historical fault historical data of equipment through a big data system, and establishing a sensitivity database; performing big data cleaning and hierarchical data screening on temperature data, humidity data and dust particle data in a sensitivity database, automatically sorting sensitivity historical data, and establishing hierarchical screening relevancy sorting through hierarchical data screening and automatic sorting; carrying out priority hierarchical classification on historical fault data of the equipment through hierarchical screening relevance sorting, and establishing the influence degree of humidity data and dust particle data on the equipment; respectively weighting and converting the sensitivity and the influence degree into percentage values, wherein the larger the weight is, the higher the priority of data transmission is set;
the second data transmission subunit is used for setting the priority order of data transmission according to the receiving time and the emergency condition on the running state of the equipment;
the analysis processing subunit includes:
the supervision center stores the processing mode and the processing result information in the supervision center according to the mode that the fault request service with high priority is processed preferentially;
the execution unit displays and processes the alarm information in real time and inquires and processes the alarm historical information through the supervision center.
The working principle of the technical scheme is as follows: the semiconductor production line has high requirements on temperature, humidity and dust, and the temperature data, the humidity data and the dust particle data in the semiconductor production line are acquired and monitored in real time through a plurality of detectors, so that the damage to production equipment caused by the change of temperature, humidity and dust is avoided, and the running state of the equipment is acquired through the detectors; the setting of the priority order of data transmission includes: collecting all historical temperature data, humidity data, dust particle data, sensitivity historical data and historical fault historical data of equipment through a big data system, and establishing a sensitivity database; performing big data cleaning and hierarchical data screening on temperature data, humidity data and dust particle data in a sensitivity database, automatically sorting sensitivity historical data, and establishing hierarchical screening relevancy sorting through hierarchical data screening and automatic sorting; carrying out priority hierarchical classification on historical fault data of the equipment through hierarchical screening relevance sorting, and establishing the influence degree of humidity data and dust particle data on the equipment; respectively weighting and converting the sensitivity and the influence degree into percentage values, wherein the larger the weight is, the higher the priority of data transmission is set; data collected by the detector are collected at the intelligent detection node of the second data transmission subunit and are transmitted to the supervision center according to the priority setting and the priority sequence; the fault request service with high priority is processed by the supervision center preferentially, so that the equipment is prevented from being damaged due to sudden failure of the equipment and failure of the equipment, the processing mode and the processing result information are stored in the supervision center, the maintenance condition can be checked at the later stage of the execution unit, the execution unit can timely summarize the problems and give a coping scheme, the productivity is improved, and the cost and the repair time are reduced;
the beneficial effects of the above technical scheme are: the temperature data, the humidity data and the dust particle data in the semiconductor production line are collected and monitored in real time through the detectors, so that the production equipment is prevented from being damaged due to the change of temperature, humidity and dust, the running state of the equipment is acquired through the detectors, the running of the equipment is convenient to monitor in real time, and the equipment can be timely processed if faults occur; collecting all historical temperature data, humidity data, dust particle data, sensitivity historical data and historical fault historical data of equipment through a big data system, and establishing a sensitivity database; performing big data cleaning and hierarchical data screening on temperature data, humidity data and dust particle data in a sensitivity database, automatically sorting sensitivity historical data, and establishing hierarchical screening relevancy sorting through hierarchical data screening and automatic sorting; carrying out priority hierarchical classification on historical fault data of the equipment through hierarchical screening relevance sorting, and establishing the influence degree of humidity data and dust particle data on the equipment; respectively weighting and converting the sensitivity and the influence degree into percentage values, wherein the larger the weight is, the higher the priority of data transmission is set; the execution unit displays and processes alarm information in real time and inquires and processes alarm historical information through the supervision center, so that the production equipment of a production line can be known in real time, and sudden damage to the equipment is avoided.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (10)
1. The LonWorks communication control method based on the priority queue is characterized by comprising the following steps:
s101: the plurality of detectors acquire data of the corresponding detection areas;
s102: transmitting the collected data to a supervision center through a LonWorks network bus according to the priority sequence set by the priority queue mode;
s103: the supervision center carries out pre-judgment on the received data through analysis, sets a priority order of data processing according to the pre-judgment, and processes the fault according to the priority according to the data processing result.
2. The method of LonWorks communication control based on priority queue according to claim 1, wherein the step S101 includes:
s1011: collecting temperature data, humidity data, dust particle data and equipment running state in a semiconductor production line through a plurality of detectors;
s1012: the detection area includes a first detection area, and the priority order of data transmission set by the first detection area includes: and setting a priority order according to the order of the equipment running state, the dust particle data, the temperature data and the humidity data.
3. The method of LonWorks communication control based on priority queue according to claim 2, wherein the step S103 includes:
s1031: setting standard ranges for the temperature data, the humidity data and the dust particle data of the first detection area; wherein the equipment running state is set as: a to-be-operated state, a normal operation state, an operation warning state, an operation accident state and a to-be-overhauled state;
s1032: and the supervision center contrasts and analyzes the received temperature data, humidity data and dust particle data.
4. The LonWorks communication control method based on priority queue according to claim 1,
the detection area includes that the execution unit gets into the gate region in semiconductor production district, the information transmission that the camera in the detector will be monitored reaches supervisory center, supervisory center carries out intelligent recognition to the video that the camera was shot and handles, discerns execution unit worker tablet and whether correctly wear dustcoat and shoes automatically, if not conform to the requirement then send alarm signal automatic closing door, alarm signal passes through intelligent detection node analysis, uploads alarm address, type information to supervisory center, produces the warning, and preserves the alarm record.
5. The method for controlling LonWorks communication based on priority queue according to claim 1, wherein the S101 comprises:
collecting temperature data, humidity data, dust particle data and equipment running state in a semiconductor production line through a plurality of detectors;
setting a priority order of data transmission according to the sensitivity of the equipment to temperature data, humidity data and dust particle data or the influence degree of the humidity data and the dust particle data on the equipment;
setting a priority sequence of data transmission for the running state of the equipment according to the receiving time and the emergency;
after the step S103, the method includes:
the supervision center stores the processing mode and the processing result information in the supervision center according to the mode that the fault request service with high priority is processed preferentially; the execution unit displays and processes the alarm information in real time and inquires and processes the alarm historical information through the supervision center.
6. LonWorks communication control system based on priority queue, characterized by including:
the acquisition unit is used for acquiring data of the corresponding detection areas by the detectors and setting the priority sequence of data transmission according to the priority queue mode;
the transmission unit is used for transmitting the acquired data to the supervision center by the intelligent detection node through the LonWorks network bus according to the set priority sequence;
and the analysis processing unit is used for analyzing the received data by the supervision center to perform pre-judgment, setting the priority order of data processing according to the pre-judgment and processing the fault according to the priority according to the data processing result.
7. The LonWorks communication control system based on priority queue of claim 6, wherein the acquisition unit comprises:
the first acquisition subunit is used for acquiring temperature data, humidity data, dust particle data and equipment running state in the semiconductor production line through a plurality of detectors;
the second acquisition subunit is used for the detection area including a first detection area, and the priority order of data transmission set by the first detection area includes: and setting a priority order according to the order of the equipment running state, the dust particle data, the temperature data and the humidity data.
8. The LonWorks communication control system based on priority queue of claim 7, wherein the analysis processing unit comprises:
the device comprises an analysis processing subunit, a data processing subunit and a data processing subunit, wherein the analysis processing subunit is used for setting standard ranges for the temperature data, the humidity data and the dust particle data of the first detection area; wherein the equipment running state is set as: a to-be-operated state, a normal operation state, an operation warning state, an operation accident state and a to-be-overhauled state;
the first analysis processing subunit is used for comparing and analyzing the received temperature data, humidity data and dust particle data by the monitoring center, and if the first detection area judges that the dust particle data and the temperature data exceed the standard range through comparison data analysis, the dust particle data in the data processing stage is set to be the highest priority, and the dust particle data is processed preferentially to be kept in the standard range; if the temperature data exceeds the standard range and the humidity data and the dust particle data are normal, setting the temperature in the data processing stage as the highest priority to process the temperature data in priority; if the data exceeding the standard range exist in the pre-judgment, analyzing the reason of exceeding the standard and stopping the operation of the equipment, and after the processed data meet the requirements, the equipment normally operates;
the second analysis and processing subunit is used for preferentially processing the operation accident state equipment according to the equipment request time and the emergency if the operation accident state equipment and the operation warning state equipment exist at the same time, the operation accident state equipment sends out a red light alarm, the execution unit judges the cause of the problem through the monitoring center to position and power off the equipment, the power off information is transmitted to the monitoring center through a LonWorks network bus, the monitoring center assigns maintenance tasks to corresponding maintenance personnel, and the maintenance personnel process the equipment; the running warning state equipment sends out a yellow light alarm, and the execution unit acquires and processes a warning reason through the supervision center.
9. The LonWorks communication control system based on priority queue of claim 6, wherein the detection zone includes a doorway detecting unit, the doorway detecting unit includes:
the gate detection unit is used for the detection area and comprises a gate area where the execution unit enters the semiconductor production area, the camera in the detector transmits monitored information to the supervision center, the supervision center intelligently identifies and processes videos shot by the camera, identifies the execution unit worker plate and automatically judges whether dust-free clothes and shoes are worn correctly or not, if the dust-free clothes and shoes are not worn correctly, an alarm signal is sent out to automatically close the door, the alarm signal is analyzed by the intelligent detection node, alarm address and type information are uploaded to the supervision center, an alarm is generated, and an alarm record is stored; the execution unit accurately judges and processes the images according to the live sound and the images.
10. The priority queue based LonWorks communication control system of claim 8, wherein the supervision center comprises:
the first data transmission subunit is used for setting a priority order of data transmission according to the sensitivity of the equipment to the temperature data, the humidity data and the dust particle data or the influence degree of the humidity data and the dust particle data on the equipment; the setting of the priority order of data transmission includes:
collecting all historical temperature data, humidity data, dust particle data, sensitivity historical data and historical fault historical data of equipment through a big data system, and establishing a sensitivity database; performing big data cleaning and hierarchical data screening on temperature data, humidity data and dust particle data in a sensitivity database, automatically sorting sensitivity historical data, and establishing hierarchical screening relevancy sorting through hierarchical data screening and automatic sorting; carrying out priority hierarchical classification on historical fault data of the equipment through hierarchical screening relevance sorting, and establishing the influence degree of humidity data and dust particle data on the equipment; respectively weighting and converting the sensitivity and the influence degree into percentage values, wherein the larger the weight is, the higher the priority of data transmission is set;
the second data transmission subunit is used for setting the priority order of data transmission according to the receiving time and the emergency condition on the running state of the equipment;
the analysis processing subunit includes:
the supervision center stores the processing mode and the processing result information in the supervision center according to the mode that the fault request service with high priority is processed preferentially;
the execution unit displays and processes the alarm information in real time and inquires and processes the alarm historical information through the supervision center.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111319888.1A CN113965529B (en) | 2021-11-09 | 2021-11-09 | LonWorks communication control method and system based on priority queue |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111319888.1A CN113965529B (en) | 2021-11-09 | 2021-11-09 | LonWorks communication control method and system based on priority queue |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113965529A true CN113965529A (en) | 2022-01-21 |
| CN113965529B CN113965529B (en) | 2024-04-12 |
Family
ID=79469820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111319888.1A Active CN113965529B (en) | 2021-11-09 | 2021-11-09 | LonWorks communication control method and system based on priority queue |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113965529B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114557323A (en) * | 2022-03-04 | 2022-05-31 | 那坡同益新丝绸科技实业有限公司 | Industrial integrated system for silkworm breeding |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006287884A (en) * | 2005-03-31 | 2006-10-19 | Ara Software:Kk | Intelligent video monitoring system |
| KR101445045B1 (en) * | 2013-04-30 | 2014-09-29 | 이노뎁 주식회사 | System and method for emergency alerting using the sameusing integrated management service |
| KR20190007855A (en) * | 2017-07-14 | 2019-01-23 | 엘지전자 주식회사 | Method and apparatus for managing building management system |
| CN110290023A (en) * | 2019-06-26 | 2019-09-27 | 四川金星清洁能源装备股份有限公司 | A kind of over-the-counter apparatus remote maintenance monitor supervision platform system and monitoring method |
| CN111486894A (en) * | 2020-04-09 | 2020-08-04 | 衡阳师范学院 | Intelligent monitoring system of green manufacturing factory based on internet of things technology |
| CN112327100A (en) * | 2020-10-30 | 2021-02-05 | 浙江大学 | Power failure detection method and system based on Internet of things |
-
2021
- 2021-11-09 CN CN202111319888.1A patent/CN113965529B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006287884A (en) * | 2005-03-31 | 2006-10-19 | Ara Software:Kk | Intelligent video monitoring system |
| KR101445045B1 (en) * | 2013-04-30 | 2014-09-29 | 이노뎁 주식회사 | System and method for emergency alerting using the sameusing integrated management service |
| KR20190007855A (en) * | 2017-07-14 | 2019-01-23 | 엘지전자 주식회사 | Method and apparatus for managing building management system |
| CN110290023A (en) * | 2019-06-26 | 2019-09-27 | 四川金星清洁能源装备股份有限公司 | A kind of over-the-counter apparatus remote maintenance monitor supervision platform system and monitoring method |
| CN111486894A (en) * | 2020-04-09 | 2020-08-04 | 衡阳师范学院 | Intelligent monitoring system of green manufacturing factory based on internet of things technology |
| CN112327100A (en) * | 2020-10-30 | 2021-02-05 | 浙江大学 | Power failure detection method and system based on Internet of things |
Non-Patent Citations (4)
| Title |
|---|
| 单甘霖: "《多传感器协同跟踪管理与应用》", 31 December 2020, 国防工业出版社, pages: 26 - 27 * |
| 王守觉, 《微电子技术》, pages 150 - 151 * |
| 范海: "现场总线技术简介——LonWorks现场总线", 《舰船电子工程》, pages 57 - 59 * |
| 陈燕: "《数据挖掘技术与应用》", 31 August 2020, 大连海事大学出版社, pages: 159 - 161 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114557323A (en) * | 2022-03-04 | 2022-05-31 | 那坡同益新丝绸科技实业有限公司 | Industrial integrated system for silkworm breeding |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113965529B (en) | 2024-04-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106655522B (en) | A kind of main station system suitable for electric grid secondary equipment operation management | |
| CN206115248U (en) | Numerical control fault diagnostic based on internet | |
| CN108268892B (en) | Fault in production management analysis method | |
| US20050010311A1 (en) | Data collection and diagnostic system for a semiconductor fabrication facility | |
| CN102473590B (en) | Methods and arrangements for in-situ process monitoring and control for plasma processing tools | |
| CN106698197A (en) | System for online diagnosis and preventive maintenance of container crane based on big data | |
| US20080154421A1 (en) | Real-time fault detection and classification system in use with a semiconductor fabrication process | |
| US8618807B2 (en) | Arrangement for identifying uncontrolled events at the process module level and methods thereof | |
| CN106790457A (en) | Operational system is patrolled and examined in the movement of power transmission and transformation state monitoring apparatus | |
| CN113965529B (en) | LonWorks communication control method and system based on priority queue | |
| CN104574219A (en) | System and method for monitoring and early warning of operation conditions of power grid service information system | |
| CN109062723A (en) | The treating method and apparatus of server failure | |
| TW202123654A (en) | Network behavior anomaly detection system and method based on mobile internet of things | |
| CN116224925A (en) | Intelligent processing management system | |
| CN116777433A (en) | Industrial production line equipment operation and maintenance management system based on data analysis | |
| CN117391675A (en) | Data center infrastructure operation and maintenance management method | |
| CN112645173A (en) | Elevator monitoring method, device, medium and electronic equipment | |
| CN108107874A (en) | A kind of multi-stage scheduling automated system | |
| KR102519474B1 (en) | System and method for predicting abnormal state of facilities in a building through facilities operation state analysis | |
| CN112579391A (en) | Distributed database automatic operation and maintenance method and system based on artificial intelligence | |
| KR20200129870A (en) | Data collection and analysis monitoring system and control method thereof | |
| CN107947984B (en) | Fault prediction processing method and system for railway passenger service | |
| CN117495357B (en) | Electric power data supervision system and method based on big data | |
| CN117667591A (en) | Remote management system based on supercomputer laboratory and management method thereof | |
| CN116453982B (en) | Insulated gate bipolar transistor production control system and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |