CN113965529B - LonWorks communication control method and system based on priority queue - Google Patents
LonWorks communication control method and system based on priority queue Download PDFInfo
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
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- H—ELECTRICITY
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Abstract
The invention discloses a LonWorks communication control method and system based on a priority queue, and relates to the technical field of LonWorks communication. Comprising the following steps: the method comprises the steps that a semiconductor production line is divided into a plurality of detection areas, intelligent detection nodes of each detection area are connected with a plurality of detectors, data acquisition is carried out on the corresponding detection areas, and the priority order of data transmission is set according to a priority queue mode; the intelligent detection node transmits the collected data to a supervision center through a LonWorks network bus according to the set priority order; the supervision center performs analysis and pre-judgment on the received data, sets the priority order of data processing according to the pre-judgment, and processes faults according to the priority according to the data processing result. The invention realizes the real-time monitoring of the semiconductor production line by using the LonWorks communication control, prevents the equipment from being suddenly damaged, and is beneficial to improving the productivity, reducing the cost and shortening the repair time.
Description
Technical Field
The invention relates to the technical field of LonWorks communication, in particular to a LonWorks communication control method and system based on a priority queue.
Background
Semiconductor fabrication is one of the most complex and technically advanced fabrication processes, typically consisting of 500 steps, typical of which are the synthesis of silicon wafers from silicon materials, the fabrication of integrated circuits on newly synthesized silicon wafers, and the placement of the integrated circuits into packages to produce a usable product. It is necessary to effectively predict and detect faults and defects of the production environment and production equipment in the semiconductor production process, which not only can prevent sudden equipment damage, but also helps to improve productivity, reduce costs and repair time. All steps and production environments of semiconductor fabrication are monitored in a factory to generate a large amount of data, but the data is liable to be unstable during transmission; the generated data volume is huge, and the real-time detection of production faults and the processing of the faults are difficult to realize.
Disclosure of Invention
The invention provides a LonWorks communication control method and a LonWorks communication control system based on a priority queue, which are used for solving the problems that the semiconductor manufacture in the prior art is one of the most complex and advanced manufacturing processes, the process is generally composed of 500 steps, the typical manufacturing steps are to synthesize silicon chips by using silicon materials, manufacture integrated circuits on the newly synthesized silicon chips, and put the integrated circuits into packages so as to produce usable products. It is necessary to effectively predict and detect faults and defects of the production environment and production equipment in the semiconductor production process, which not only can prevent sudden equipment damage, but also helps to improve productivity, reduce costs and repair time. All steps and production environments of semiconductor fabrication are monitored in a factory to generate a large amount of data, but the data is liable to be unstable during transmission; the amount of data generated is huge, and the problems of detecting production faults and processing the faults in real time are difficult to realize.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the invention provides a LonWorks communication control method based on a priority queue, which is characterized by comprising the following steps:
s101: the method comprises the steps that a semiconductor production line is divided into a plurality of detection areas, intelligent detection nodes of each detection area are connected with a plurality of detectors, data acquisition is carried out on the corresponding detection areas, and the priority order of data transmission is set according to a priority queue mode;
s102: the intelligent detection node transmits the collected data to a supervision center through a LonWorks network bus according to the set priority order;
s103: the supervision center performs analysis and pre-judgment on the received data, sets the priority order of data processing according to the pre-judgment, and processes faults according to the priority according to the data processing result.
Wherein, the step S101 includes:
s1011: acquiring temperature data, humidity data, dust particle data and equipment operation state in a semiconductor production line through a plurality of detectors;
s1012: the detection area comprises a first detection area, and the priority order of data transmission set by the first detection area comprises the following steps: the priority order is set in order of the device operation state, dust particle data, temperature data, humidity data.
Wherein, the step S103 includes:
s1031: setting a standard range for the temperature data, the humidity data and the dust particle data of the first detection area; wherein the device operating state is set as: a state to be operated, a normal operation state, an operation warning state, an operation accident state and a state to be overhauled;
s1032: the monitoring center compares and analyzes the received temperature data, humidity data and dust particle data.
The detection area comprises an execution unit, a monitoring center and a monitoring center, wherein the execution unit enters a gate area of a semiconductor production area, a camera in the detector transmits monitored information to the monitoring center, the monitoring center carries out intelligent identification processing on a video shot by the camera, the execution unit is identified to work a card and automatically judges whether dust-free clothes and shoes are correctly worn, if the dust-free clothes and shoes are not met, an alarm signal is sent to automatically close a gate, the alarm signal is analyzed by an intelligent detection node, an alarm address and type information are uploaded to the monitoring center, an alarm is generated, and an alarm record is stored; the execution unit accurately judges and processes the live sound and the image.
Wherein, the S101 includes:
acquiring temperature data, humidity data, dust particle data and equipment operation state in a semiconductor production line through a plurality of detectors;
Setting a priority order of data transmission according to the sensitivity of the device to temperature data, humidity data and dust particle data or the influence degree of the humidity data and the dust particle data on the device;
setting a priority order of data transmission according to the receiving time and the emergency for the running state of the equipment;
after the step S103, the method includes:
the supervision center stores the processing mode and the processing result information in the supervision center according to the mode that the fault request service with high priority is processed preferentially; the execution unit displays, processes and inquires the alarm history information in real time through the supervision center.
A priority queue based LonWorks communication control system comprising:
the intelligent detection node of each detection area is connected with a plurality of detectors and is used for collecting data in the corresponding detection area, and the priority order of data transmission is set according to a priority queue mode;
the transmission unit is used for the intelligent detection node to transmit the acquired data to the supervision center through the LonWorks network bus according to the set priority order;
and the analysis processing unit is used for performing analysis on the received data by the supervision center, setting the priority order of data processing according to the pre-judgment, and processing the faults according to the priority according to the data processing result.
Wherein, the collection unit includes:
the first acquisition subunit is used for acquiring temperature data, humidity data, dust particle data and equipment operation state in the semiconductor production line through a plurality of detectors;
the second acquisition subunit is configured to, in the detection area, include a first detection area, where a priority order of data transmission set by the first detection area includes: the priority order is set in order of the device operation state, dust particle data, temperature data, humidity data.
Wherein the analysis processing unit includes:
an analysis processing subunit is arranged for setting a standard range for the temperature data, the humidity data and the dust particle data of the first detection area; wherein the device operating state is set as: a state to be operated, a normal operation state, an operation warning state, an operation accident state and a state to be overhauled;
the first analysis processing subunit is used for comparing and analyzing the received temperature data, humidity data and dust particle data by the monitoring center, and if the first detection area judges that the dust particle data and the temperature data are both beyond the standard range through the comparison data analysis, the dust particle data in the data processing stage are set to be the highest priority, and the dust particle data are processed preferentially to enable the dust particle data to be maintained within the standard range; if the temperature data exceeds the standard range, the humidity data and the dust particle data are normal, setting the temperature of the data processing stage as the highest priority to process the temperature data preferentially; if the data exceeding the standard range are pre-judged to exist, analyzing the reasons of exceeding the standard and stopping the operation of the equipment, and after the processed data meet the requirements, normally operating the equipment;
The second analysis processing subunit is used for preferentially processing the operation accident state equipment according to the equipment request time and the emergency if the operation accident state equipment and the operation warning state equipment exist at the same time, the operation accident state equipment gives out a red light alarm, the execution unit judges the cause of the problem through the supervision center to locate the equipment and power off, the power off information is transmitted to the supervision center through the LonWorks network bus, the supervision center assigns maintenance tasks to corresponding maintenance personnel, and the maintenance personnel process the equipment; the operation warning state equipment sends out a yellow light alarm, and the execution unit acquires and processes the warning reason through the supervision center.
Wherein, the detection zone includes a gate detection unit, the gate detection unit includes:
the monitoring center carries out intelligent identification processing on videos shot by the cameras, identifies the work card of the executing unit and automatically judges whether dust-free clothes and shoes are correctly worn, if not, sends an alarm signal to automatically close the door, and the alarm signal is analyzed by an intelligent detection node, and uploads alarm address and type information to the monitoring center to generate an alarm and store an alarm record; the execution unit accurately judges and processes the live sound and the image.
Wherein, the supervision center includes:
the second acquisition subunit is used for acquiring temperature data, humidity data, dust particle data and equipment running state in the semiconductor production line through a plurality of detectors;
a first data transmission subunit, configured to set a priority order of data transmission according to sensitivity of the device to temperature data, humidity data, dust particle data, or influence degree of the humidity data and the dust particle data on the device; the setting of the priority order of data transmission includes:
collecting all historical temperature data, humidity data, dust particle data and sensitivity historical data and historical fault historical data of equipment through a big data system, and establishing a sensitivity database; carrying out big data cleaning and layered data screening on temperature data, humidity data and dust particle data in a sensitivity database, automatically sequencing sensitivity historical data, and establishing layered screening association sequencing through layered data screening and automatic sequencing; performing priority hierarchical classification on historical fault data of the equipment through hierarchical screening association degree sorting, and establishing the influence degree of humidity data and dust particle data on the equipment; respectively weighting and converting the sensitivity and the influence degree into percentage values, wherein the higher the weight is, the higher the priority of data transmission is set;
The second data transmission subunit is used for setting the priority order of data transmission according to the receiving time and the emergency for the running state of the equipment;
the analysis processing subunit includes:
the supervision center stores the processing mode and the processing result information in the supervision center according to the mode that the fault request service with high priority is processed preferentially;
the execution unit displays, processes and inquires the alarm history information in real time through the supervision center.
Compared with the prior art, the invention has the following advantages:
the invention provides a LonWorks communication control method and a LonWorks communication control system based on a priority queue, comprising the following steps: in order to facilitate detection management, a semiconductor production line is divided into a plurality of detection areas, and intelligent detection nodes of each detection area are connected with a plurality of detectors and collect data in the semiconductor production line, and priority transmission with high priority is ensured according to the sensitivity of equipment to collected data and different setting priorities for judging emergency, so that unstable situations of a large amount of data in the transmission process are avoided; the intelligent detection nodes sequentially transmit the collected data to the supervision center through the LonWorks network bus according to the set priority order, and the LonWorks network bus shares network data in a network variable form in network communication, so that the communication transmission efficiency between the intelligent detection nodes and the supervision center is greatly improved, and the effectiveness of the detection management system is improved; the data received first is analyzed to make a pre-judgment, the priority of the data processing stage is set according to the pre-judgment, the faults requiring processing are processed according to the priority, the faults with high priority are ensured to be processed preferentially through the pre-judgment, and the production efficiency is improved, the cost is reduced, and the repair time is shortened.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims thereof as well as the appended drawings.
The technical scheme of the invention is further described in detail through the drawings and the embodiments.
Drawings
The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate the invention and together with the embodiments of the invention, serve to explain the invention. In the drawings:
FIG. 1 is a flow chart of a control method of LonWorks communication based on a priority queue in an embodiment of the invention;
FIG. 2 is a flow chart of the transmission of test data in a semiconductor manufacturing line to a supervisory system via a LonWorks network bus in an embodiment of the invention;
fig. 3 is a schematic structural diagram of a LonWorks communication control system based on a priority queue in an embodiment of the present invention.
Detailed Description
The preferred embodiments of the present invention will be described below with reference to the accompanying drawings, it being understood that the preferred embodiments described herein are for illustration and explanation of the present invention only, and are not intended to limit the present invention.
The embodiment of the invention provides a LonWorks communication control method based on a priority queue, referring to fig. 1 to 2, the LonWorks communication control method based on the priority queue comprises the following steps:
s101: the method comprises the steps that a semiconductor production line is divided into a plurality of detection areas, intelligent detection nodes of each detection area are connected with a plurality of detectors, data acquisition is carried out on the corresponding detection areas, and the priority order of data transmission is set according to a priority queue mode;
s102: the intelligent detection node transmits the collected data to a supervision center through a LonWorks network bus according to the set priority order;
s103: the supervision center performs analysis and pre-judgment on the received data, sets the priority order of data processing according to the pre-judgment, and processes faults according to the priority according to the data processing result.
The working principle of the technical scheme is as follows: the semiconductor production line is divided into a plurality of detection areas for facilitating partition detection management, each detection area is connected with an intelligent detection point, the intelligent detection point of each detection area is connected with a plurality of detectors, collected data are sequentially transmitted to a supervision center through a LonWorks network bus according to a set priority order after the detection data of the detectors are summarized, the LonWorks network bus plays a role in supporting upward and downward in the supervision system, and the supervision center is effectively connected with intelligent detection nodes distributed in each detection area; the supervision center performs analysis pre-judgment after data processing, sets the priority order of the data processing according to the pre-judgment, gives out an alarm, and processes faults according to the priority according to the data processing result; the LonWorks communication control method based on the priority queue can be applied to online detection.
The beneficial effects of the technical scheme are as follows: in order to facilitate detection management, a semiconductor production line is divided into a plurality of detection areas, and intelligent detection nodes of each detection area are connected with a plurality of detectors and collect data in the semiconductor production line, and priority transmission with high priority is ensured according to the sensitivity of equipment to collected data and different setting priorities for judging emergency, so that unstable situations of a large amount of data in the transmission process are avoided; the intelligent detection nodes sequentially transmit the collected data to the supervision center through the LonWorks network bus according to the set priority order, and the LonWorks network bus shares network data in a network variable form in network communication, so that the communication transmission efficiency between the intelligent detection nodes and the supervision center is greatly improved, and the effectiveness of the detection management system is improved; analyzing and pre-judging the data received first, setting the priority of the data processing stage according to the pre-judgment, and processing the faults requiring processing according to the priority, so as to ensure that the faults with high pre-judgment priority are processed preferentially, thereby being beneficial to improving the productivity, reducing the cost and shortening the repair time; the LonWorks communication control method based on the priority queue can be widely applied to the technical fields of online detection and the like.
In another embodiment, the step S101 includes:
s1021: acquiring temperature data, humidity data, dust particle data and equipment operation state in a semiconductor production line through a plurality of detectors;
s1022: the detection area comprises a first detection area, the priority order of data transmission set by the first detection area comprises: the priority order is set in order of the device operation state, dust particle data, temperature data, humidity data.
The working principle of the technical scheme is as follows: the requirements on the environment in the production process of the semiconductor production line equipment are strict, in particular to a dust-free environment, the temperature and humidity are guaranteed to be proper, the temperature data, the humidity data and the dust particle data in the semiconductor production line are collected through a plurality of detectors, the equipment can display the running state in the running process, and the detectors collect the running state of the equipment; the detection area includes first detection area, and first detection area equipment is more sensitive to dust particle, and secondly the temperature is sensitive, and the running state of equipment is the real-time detection that needs, sets for the priority order of data transmission according to the importance of first detection area data, includes: the priority order is set in order of the device operation state, dust particle data, temperature data, humidity data.
The beneficial effects of the technical scheme are as follows: in order to provide a dust-free environment with proper temperature and humidity for the production process of the semiconductor production line, acquiring temperature data, humidity data and dust particle data in the semiconductor production line through a plurality of detectors; and setting priority for data transmission in the first detection area, and guaranteeing priority transmission of important and sensitive data.
In another embodiment, the step S103 includes:
s1031: setting a standard range for the temperature data, the humidity data and the dust particle data of the first detection area; wherein the device operating state is set as: a state to be operated, a normal operation state, an operation warning state, an operation accident state and a state to be overhauled;
s1032: the monitoring center compares and analyzes the received temperature data, humidity data and dust particle data.
The working principle of the technical scheme is as follows: setting standard ranges of temperature data, humidity data and dust particle data according to the sensitivity of the equipment to temperature, humidity and dust particles in the first detection area semiconductor production process, and setting the standard ranges as follows according to the running state of the equipment: a state to be operated, a normal operation state, an operation warning state, an operation accident state and a state to be overhauled; the monitoring center sets a priority by receiving the importance and the emergency degree of the data, and the highest priority is used for processing preferentially, if the first detection area judges in advance through analysis of the comparison data that both the dust particle data and the temperature data are beyond the standard range, the dust particle data in the data processing stage are set as the highest priority, and the dust particle data are processed preferentially so that the dust particle data are maintained within the standard range; if the operation accident state equipment and the operation warning state equipment exist at the same time, the operation accident state equipment is processed preferentially according to the equipment request time, the operation accident state equipment gives out a red light alarm, the supervision center automatically analyzes the fault reasons to locate the equipment and cut off the power supply, the supervision center assigns maintenance tasks to corresponding maintenance personnel, the maintenance personnel processes the equipment, the emergency fault is processed firstly by setting the priority, the normal operation of the equipment is guaranteed, and the damage to the equipment caused by untimely accident processing is prevented.
The beneficial effects of the technical scheme are as follows: setting a standard range of data according to the sensitivity of equipment to temperature, humidity and dust particles in the semiconductor production process of the first detection area, enabling the temperature, the humidity and the dust particles to be maintained in the data standard range suitable for the semiconductor production equipment, regulating and controlling a control center if certain data are about to exceed the standard range, setting a priority according to the sensitivity of the semiconductor production equipment if certain data are about to exceed the standard range, and regulating and controlling according to the setting of the priority; the device is set as follows according to the running state: when the equipment fails to send out an alarm signal, the management and control center sets the priority according to the emergency degree of the analysis fault, and the execution unit processes the fault with the highest priority, so that the emergency fault is processed first, the normal operation of the equipment is ensured, the damage to the equipment caused by untimely accident processing is prevented, and the production efficiency is improved, the cost is reduced and the repair time is shortened.
In another embodiment, the detection area includes an execution unit entering a gate area of the semiconductor production area, the camera in the detector transmits the monitored information to a monitoring center, the monitoring center performs intelligent recognition processing on the video shot by the camera, recognizes the tablet of the execution unit and automatically judges whether to wear dust-free clothes and shoes correctly, and if not, sends an alarm signal to automatically close the gate.
The working principle of the technical scheme is as follows: in order to provide a dust-free environment for the detection area, strict monitoring management of the execution unit is required; when the execution unit enters the gate area of the semiconductor production area, the camera in the detector transmits the monitored information to the monitoring center, the monitoring center carries out intelligent identification processing on the received information, the work plate of the execution unit is identified, whether dust-free clothes and shoes are correctly worn or not is automatically judged, if the work plate does not meet the requirements, an alarm signal is sent out to automatically close the gate, and therefore the dust-free environment of the detection area is prevented from being damaged due to the fact that the wearing of the execution unit does not meet the requirements.
The beneficial effects of the technical scheme are as follows: when the execution unit enters the gate area of the semiconductor production area, the camera in the detector transmits the monitored information to the monitoring center, the monitoring center carries out intelligent identification processing on the received information, the work plate of the execution unit is identified, whether dust-free clothes and shoes are correctly worn or not is automatically judged, if the work plate is not in accordance with the requirements, an alarm signal is sent out to automatically close the gate, and therefore strict monitoring management of the execution unit is achieved, and dust-free environment of the detection area is prevented from being damaged due to the fact that the execution unit is not in accordance with the requirements.
In another embodiment, temperature data, humidity data, dust particle data and equipment operating conditions in a semiconductor production line are collected by a plurality of detectors; setting a priority order of data transmission according to the sensitivity of the device to temperature data, humidity data and dust particle data or the influence degree of the humidity data and the dust particle data on the device; setting a priority order of data transmission according to the receiving time and the emergency for the running state of the equipment; the supervision center stores the processing mode and the processing result information in the supervision center according to the mode that the fault request service with high priority is processed preferentially; the execution unit displays, processes and inquires the alarm history information in real time through the supervision center.
The working principle of the technical scheme is as follows: the semiconductor production line has higher requirements on temperature, humidity and dust-free, temperature data, humidity data and dust particle data in the semiconductor production line are collected and monitored in real time through a plurality of detectors, the damage to production equipment caused by temperature, humidity and dust-free changes is avoided, and the running state of the equipment is required to be acquired through the detectors; the intelligent detection node gathers the data collected by the detector and transmits the data to the supervision center according to the priority order according to the priority setting; the fault request service with high priority is processed by the supervision center preferentially, so that the equipment is prevented from being damaged due to the fact that the equipment suddenly fails and cannot be processed, the processing mode and the processing result information are stored in the supervision center, so that the execution unit can check the maintenance condition later, the execution unit can timely summarize the problems and give a corresponding scheme, and the production efficiency is improved, and the cost and the repair time are reduced.
The beneficial effects of the technical scheme are as follows: the temperature data, the humidity data and the dust particle data in the semiconductor production line are collected and monitored in real time through the detectors, so that the damage to production equipment caused by the temperature, the humidity and dust-free changes is avoided, the running state of the equipment is obtained through the detectors, the running of the equipment is monitored in real time, and if a fault is encountered, the equipment can be processed in time; the execution unit displays and processes the alarm information in real time and inquires and processes the alarm history information through the supervision center, so that the production equipment of the production line can be known in real time, and sudden damage to the equipment is avoided.
Referring to fig. 3, the embodiment of the present invention provides a priority queue-based LonWorks communication control system, which includes:
in another embodiment, the method comprises:
the intelligent detection node of each detection area is connected with a plurality of detectors and is used for collecting data in the corresponding detection area, and the priority order of data transmission is set according to a priority queue mode;
the transmission unit is used for the intelligent detection node to transmit the acquired data to the supervision center through the LonWorks network bus according to the set priority order;
And the analysis processing unit is used for performing analysis on the received data by the supervision center, setting the priority order of data processing according to the pre-judgment, and processing the faults according to the priority according to the data processing result.
The working principle of the technical scheme is as follows: the semiconductor production line is divided into a plurality of detection areas for facilitating partition detection management, each detection area is connected with an intelligent detection point, the intelligent detection point of each detection area is connected with a plurality of detectors, the acquisition unit is used for summarizing detection data of the detectors, the acquired data are transmitted to the supervision center through the LonWorks network bus through the transmission unit after gathering the detection data according to a set priority order, the LonWorks network bus plays a role in supporting the upper part and the lower part in the supervision system, and the supervision center is effectively connected with intelligent detection nodes distributed in each detection area; the analysis processing unit is used for performing analysis pre-judgment after the data processing by the supervision center, setting the priority order of the data processing according to the pre-judgment, sending out an alarm, and processing the faults according to the priority according to the data processing result.
The beneficial effects of the technical scheme are as follows: in order to facilitate detection management, a semiconductor production line is divided into a plurality of detection areas, and intelligent detection nodes of each detection area are connected with a plurality of detectors and collect data in the semiconductor production line, and priority transmission with high priority is ensured according to the sensitivity of equipment to collected data and different setting priorities for judging emergency, so that unstable situations of a large amount of data in the transmission process are avoided; the intelligent detection nodes sequentially transmit the collected data to the supervision center through the LonWorks network bus according to the set priority order, and the LonWorks network bus shares network data in a network variable form in network communication, so that the communication transmission efficiency between the intelligent detection nodes and the supervision center is greatly improved, and the effectiveness of the detection management system is improved; the data received first is analyzed to make a pre-judgment, the priority of the data processing stage is set according to the pre-judgment, the faults requiring processing are processed according to the priority, the faults with high priority are ensured to be processed preferentially through the pre-judgment, and the production efficiency is improved, the cost is reduced, and the repair time is shortened.
In another embodiment, the acquisition unit comprises:
the first acquisition subunit is used for acquiring temperature data, humidity data, dust particle data and equipment operation state in the semiconductor production line through a plurality of detectors;
the second acquisition subunit is configured to, in the detection area, include a first detection area, where a priority order of data transmission set by the first detection area includes: the priority order is set in order of the device operation state, dust particle data, temperature data, humidity data.
The working principle of the technical scheme is as follows: the requirements on the environment in the production process of the semiconductor production line equipment are strict, particularly a dust-free environment is required to be provided, the temperature and humidity are guaranteed to be proper, the first acquisition subunit acquires the temperature data, the humidity data and the dust particle data in the semiconductor production line through a plurality of detectors, the equipment can display the running state in the running process, and the detectors acquire the running state of the equipment; the detection area includes first detection area, and first detection area equipment is more sensitive to dust particle, and secondly the temperature is sensitive, and the running state of equipment is the real-time detection that needs, sets for the priority order of data transmission at the second acquisition subunit according to the importance of first detection area data, includes: the priority order is set in order of the device operation state, dust particle data, temperature data, humidity data.
The beneficial effects of the technical scheme are as follows: in order to provide a dust-free environment with proper temperature and humidity for the production process of the semiconductor production line, acquiring temperature data, humidity data and dust particle data in the semiconductor production line through a plurality of detectors; and setting priority for data transmission in the first detection area, and guaranteeing priority transmission of important and sensitive data.
In another embodiment, the analysis processing unit includes:
an analysis processing subunit is arranged for setting a standard range for the temperature data, the humidity data and the dust particle data of the first detection area; wherein the device operating state is set as: a state to be operated, a normal operation state, an operation warning state, an operation accident state and a state to be overhauled;
wherein, when a failure occurs in the semiconductor production process, the method can be usedTo detect whether there is a fault in step t, the formula is as follows:
p represents a conditional probability;
representing the nth detector under the monitoring of steps 1-t;
i represents a certain step between steps 1 to t;representing the nth detector under monitoring at step i;
Y t and Y t+1 Represents a binary variable, wherein a number 1 represents that the state is fault-free, and a number 0 represents that the state is fault, Y t And Y t+1 Predicting whether there is a fault in the current step and the next step, respectively.
The first analysis processing subunit is used for comparing and analyzing the received temperature data, humidity data and dust particle data by the monitoring center, and if the first detection area judges that the dust particle data and the temperature data are both beyond the standard range through the comparison data analysis, the dust particle data in the data processing stage are set to be the highest priority, and the dust particle data are processed preferentially to enable the dust particle data to be maintained within the standard range; if the temperature data exceeds the standard range, the humidity data and the dust particle data are normal, setting the temperature of the data processing stage as the highest priority to process the temperature data preferentially; if the data exceeding the standard range are pre-judged to exist, analyzing the reasons of exceeding the standard and stopping the operation of the equipment, and after the processed data meet the requirements, normally operating the equipment;
the second analysis processing subunit is used for preferentially processing the operation accident state equipment according to the equipment request time and the emergency if the operation accident state equipment and the operation warning state equipment exist at the same time, the operation accident state equipment gives out a red light alarm, the execution unit judges the cause of the problem through the supervision center to locate the equipment and power off, the power off information is transmitted to the supervision center through the LonWorks network bus, the supervision center assigns maintenance tasks to corresponding maintenance personnel, and the maintenance personnel process the equipment; the operation warning state equipment sends out a yellow light alarm, and the execution unit acquires and processes the warning reason through the supervision center.
The working principle of the technical scheme is as follows: setting standard ranges of temperature data, humidity data and dust particle data according to the sensitivity of the equipment to temperature, humidity and dust particles in the first detection area semiconductor production process, and setting the standard ranges as follows according to the running state of the equipment: a state to be operated, a normal operation state, an operation warning state, an operation accident state and a state to be overhauled; the monitoring center sets a priority by receiving the importance and the emergency degree of the data, and the highest priority is used for processing preferentially, if the first detection area judges in advance through analysis of the comparison data that both the dust particle data and the temperature data are beyond the standard range, the dust particle data in the data processing stage are set as the highest priority, and the dust particle data are processed preferentially so that the dust particle data are maintained within the standard range; if the operation accident state equipment and the operation warning state equipment exist at the same time, the operation accident state equipment is processed preferentially according to the equipment request time, the operation accident state equipment gives out a red light alarm, the supervision center automatically analyzes the fault reasons to locate the equipment and cut off the power supply, the supervision center assigns maintenance tasks to corresponding maintenance personnel, the maintenance personnel processes the equipment, the emergency fault is processed firstly by setting the priority, the normal operation of the equipment is guaranteed, and the damage to the equipment caused by untimely accident processing is prevented.
The beneficial effects of the technical scheme are as follows: setting a standard range of data according to the sensitivity of equipment to temperature, humidity and dust particles in the semiconductor production process of the first detection area, enabling the temperature, the humidity and the dust particles to be maintained in the data standard range suitable for the semiconductor production equipment, regulating and controlling a control center if certain data are about to exceed the standard range, setting a priority according to the sensitivity of the semiconductor production equipment if certain data are about to exceed the standard range, and regulating and controlling according to the setting of the priority; the device is set as follows according to the running state: when the equipment fails to send out an alarm signal, the management and control center sets the priority according to the emergency degree of the analysis fault, and the execution unit processes the fault with the highest priority, so that the emergency fault is processed first, the normal operation of the equipment is ensured, the damage to the equipment caused by untimely accident processing is prevented, and the production efficiency is improved, the cost is reduced and the repair time is shortened.
In another embodiment, the detection zone includes a doorway detection unit comprising:
The monitoring center carries out intelligent identification processing on videos shot by the cameras, identifies the work card of the executing unit and automatically judges whether dust-free clothes and shoes are correctly worn, if not, sends an alarm signal to automatically close the door, and the alarm signal is analyzed by an intelligent detection node, and uploads alarm address and type information to the monitoring center to generate an alarm and store an alarm record; the execution unit accurately judges and processes the live sound and the image.
The working principle of the technical scheme is as follows: in order to provide a dust-free environment for the detection area, strict monitoring management of the execution unit is required; when the execution unit enters a gate area of a semiconductor production area, when the execution unit is positioned at the gate detection unit, the camera in the detector transmits monitored information to the monitoring center, the monitoring center carries out intelligent identification processing on the received information, the execution unit is identified to work a card and automatically judges whether dust-free clothes and shoes are correctly worn, if the execution unit does not meet the requirements, an alarm signal is sent to automatically close the gate, and therefore the dust-free environment of the detection area is prevented from being damaged due to the fact that the execution unit is not worn.
The beneficial effects of the technical scheme are as follows: when the execution unit enters the gate area of the semiconductor production area, the camera in the detector transmits the monitored information to the monitoring center, the monitoring center carries out intelligent identification processing on the received information, the work plate of the execution unit is identified, whether dust-free clothes and shoes are correctly worn or not is automatically judged, if the work plate is not in accordance with the requirements, an alarm signal is sent out to automatically close the gate, and therefore strict monitoring management of the execution unit is achieved, and dust-free environment of the detection area is prevented from being damaged due to the fact that the execution unit is not in accordance with the requirements.
In another embodiment, the supervision center comprises:
the second acquisition subunit is used for acquiring temperature data, humidity data, dust particle data and equipment running state in the semiconductor production line through a plurality of detectors;
a first data transmission subunit, configured to set a priority order of data transmission according to sensitivity of the device to temperature data, humidity data, dust particle data, or influence degree of the humidity data and the dust particle data on the device; the setting of the priority order of data transmission includes:
collecting all historical temperature data, humidity data, dust particle data and sensitivity historical data and historical fault historical data of equipment through a big data system, and establishing a sensitivity database; carrying out big data cleaning and layered data screening on temperature data, humidity data and dust particle data in a sensitivity database, automatically sequencing sensitivity historical data, and establishing layered screening association sequencing through layered data screening and automatic sequencing; performing priority hierarchical classification on historical fault data of the equipment through hierarchical screening association degree sorting, and establishing the influence degree of humidity data and dust particle data on the equipment; respectively weighting and converting the sensitivity and the influence degree into percentage values, wherein the higher the weight is, the higher the priority of data transmission is set;
The second data transmission subunit is used for setting the priority order of data transmission according to the receiving time and the emergency for the running state of the equipment;
the analysis processing subunit includes:
the supervision center stores the processing mode and the processing result information in the supervision center according to the mode that the fault request service with high priority is processed preferentially;
the execution unit displays, processes and inquires the alarm history information in real time through the supervision center.
The working principle of the technical scheme is as follows: the semiconductor production line has higher requirements on temperature, humidity and dust-free, temperature data, humidity data and dust particle data in the semiconductor production line are collected and monitored in real time through a plurality of detectors, the damage to production equipment caused by temperature, humidity and dust-free changes is avoided, and the running state of the equipment is required to be acquired through the detectors; the setting of the priority order of data transmission includes: collecting all historical temperature data, humidity data, dust particle data and sensitivity historical data and historical fault historical data of equipment through a big data system, and establishing a sensitivity database; carrying out big data cleaning and layered data screening on temperature data, humidity data and dust particle data in a sensitivity database, automatically sequencing sensitivity historical data, and establishing layered screening association sequencing through layered data screening and automatic sequencing; performing priority hierarchical classification on historical fault data of the equipment through hierarchical screening association degree sorting, and establishing the influence degree of humidity data and dust particle data on the equipment; respectively weighting and converting the sensitivity and the influence degree into percentage values, wherein the higher the weight is, the higher the priority of data transmission is set; summarizing the data acquired by the detector at the intelligent detection node of the second data transmission subunit and transmitting the summarized data to the supervision center according to the priority setting and the priority order; the fault request service with high priority is processed by the supervision center preferentially, so that the equipment is prevented from being damaged due to the fact that the equipment suddenly fails and cannot be processed, the processing mode and the processing result information are stored in the supervision center, so that the execution unit can check the maintenance condition later, the execution unit can timely summarize the problems and give a corresponding scheme, and the production efficiency is improved, and the cost and the repair time are reduced;
The beneficial effects of the technical scheme are as follows: the temperature data, the humidity data and the dust particle data in the semiconductor production line are collected and monitored in real time through the detectors, so that the damage to production equipment caused by the temperature, the humidity and dust-free changes is avoided, the running state of the equipment is obtained through the detectors, the running of the equipment is monitored in real time, and if a fault is encountered, the equipment can be processed in time; collecting all historical temperature data, humidity data, dust particle data and sensitivity historical data and historical fault historical data of equipment through a big data system, and establishing a sensitivity database; carrying out big data cleaning and layered data screening on temperature data, humidity data and dust particle data in a sensitivity database, automatically sequencing sensitivity historical data, and establishing layered screening association sequencing through layered data screening and automatic sequencing; performing priority hierarchical classification on historical fault data of the equipment through hierarchical screening association degree sorting, and establishing the influence degree of humidity data and dust particle data on the equipment; respectively weighting and converting the sensitivity and the influence degree into percentage values, wherein the higher the weight is, the higher the priority of data transmission is set; the execution unit displays and processes the alarm information in real time and inquires and processes the alarm history information through the supervision center, so that the production equipment of the production line can be known in real time, and sudden damage to the equipment is avoided.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (4)
1. The LonWorks communication control method based on the priority queue is characterized by comprising the following steps:
s101: a plurality of detectors collect data from the corresponding detection areas;
s102: transmitting the collected data to a supervision center through a LonWorks network bus in sequence according to the priority order set by the priority queue mode;
s103: the supervision center performs pre-judgment on the received data through analysis, sets the priority order of data processing according to the pre-judgment, and processes faults according to the priority according to the data processing result;
the step S101 includes:
s1011: acquiring temperature data, humidity data, dust particle data and equipment operation state in a semiconductor production line through a plurality of detectors;
s1012: the detection area comprises a first detection area, and the priority order of data transmission set by the first detection area comprises the following steps: setting a priority order according to the order of the running state of the equipment, dust particle data, temperature data and humidity data;
The step S103 includes:
s1031: setting a standard range for the temperature data, the humidity data and the dust particle data of the first detection area; wherein the device operating state is set as: a state to be operated, a normal operation state, an operation warning state, an operation accident state and a state to be overhauled;
usingTo analyze whether there is a fault in step t, the formula is as follows:
p represents a conditional probability;
representing the nth detector under the monitoring of steps 1-t;
i represents a certain step between steps 1 to t;representing the nth detector under monitoring at step i;
Y t and Y t+1 Represents a binary variable, wherein a number 1 represents that the state is fault-free, and a number 0 represents that the state is fault, Y t And Y t+1 Predicting whether faults exist in the current step and the next step respectively;
s1032: the monitoring center compares and analyzes the received temperature data, humidity data and dust particle data;
the monitoring center sets a priority by receiving the importance and the emergency degree of the data, and the highest priority is used for processing preferentially, if the first detection area judges in advance through analysis of the comparison data that both the dust particle data and the temperature data are beyond the standard range, the dust particle data in the data processing stage are set as the highest priority, and the dust particle data are processed preferentially so that the dust particle data are maintained within the standard range;
If the temperature data exceeds the standard range, the humidity data and the dust particle data are normal, setting the temperature of the data processing stage as the highest priority to process the temperature data preferentially; if the data exceeding the standard range are pre-judged to exist, analyzing the reasons of exceeding the standard and stopping the operation of the equipment, and after the processed data meet the requirements, normally operating the equipment;
if the operation accident state equipment and the operation warning state equipment exist at the same time, the operation accident state equipment is processed preferentially according to the equipment request time, the operation accident state equipment gives out a red light alarm, a supervision center automatically analyzes the fault cause to locate the equipment and cut off the power, and the supervision center assigns maintenance tasks to corresponding maintenance personnel; the operation warning state equipment sends out a yellow light alarm, and the execution unit acquires and processes a warning reason through the supervision center;
the S101 includes:
acquiring temperature data, humidity data, dust particle data and equipment operation state in a semiconductor production line through a plurality of detectors;
setting a priority order of data transmission according to the sensitivity of the device to temperature data, humidity data and dust particle data or the influence degree of the humidity data and the dust particle data on the device;
Setting the priority order of data transmission includes:
collecting all historical temperature data, humidity data, dust particle data and sensitivity historical data and historical fault historical data of equipment through a big data system, and establishing a sensitivity database; carrying out big data cleaning and layered data screening on temperature data, humidity data and dust particle data in a sensitivity database, automatically sequencing sensitivity historical data, and establishing layered screening association sequencing through layered data screening and automatic sequencing; performing priority hierarchical classification on historical fault data of the equipment through hierarchical screening association degree sorting, and establishing the influence degree of humidity data and dust particle data on the equipment; respectively weighting and converting the sensitivity and the influence degree into percentage values, wherein the higher the weight is, the higher the priority of data transmission is set;
setting a priority order of data transmission according to the receiving time and the emergency for the running state of the equipment;
after the step S103, the method includes:
the supervision center stores the processing mode and the processing result information in the supervision center according to the mode that the fault request service with high priority is processed preferentially; the execution unit displays, processes and inquires the alarm history information in real time through the supervision center.
2. The method for priority queue based LonWorks communication control of claim 1 wherein,
the detection area comprises an execution unit which enters a gate area of the semiconductor production area, the camera in the detector transmits monitored information to the monitoring center, the monitoring center carries out intelligent identification processing on videos shot by the camera, the execution unit is identified to work a card and automatically judges whether dust-free clothes and shoes are correctly worn, if the dust-free clothes and shoes are not met, an alarm signal is sent to automatically close a gate, the alarm signal is analyzed by an intelligent detection node, an alarm address and type information are uploaded to the monitoring center, an alarm is generated, and an alarm record is stored.
3. A priority queue-based LonWorks communication control system, comprising:
the acquisition unit is used for acquiring data from the corresponding detection areas by the plurality of detectors, and setting the priority order of data transmission according to a priority queue mode;
the transmission unit is used for the intelligent detection node to transmit the collected data to the supervision center through the LonWorks network bus in sequence according to the set priority order;
the monitoring center analyzes and judges the received data in advance, sets the priority order of data processing according to the pre-judgment, and processes faults according to the priority according to the data processing result;
The acquisition unit comprises:
the first acquisition subunit is used for acquiring temperature data, humidity data, dust particle data and equipment operation state in the semiconductor production line through a plurality of detectors;
the second acquisition subunit is configured to, in the detection area, include a first detection area, where a priority order of data transmission set by the first detection area includes: setting a priority order according to the order of the running state of the equipment, dust particle data, temperature data and humidity data;
the analysis processing unit includes:
an analysis processing subunit is arranged for setting a standard range for the temperature data, the humidity data and the dust particle data of the first detection area; wherein the device operating state is set as: a state to be operated, a normal operation state, an operation warning state, an operation accident state and a state to be overhauled;
usingTo analyze whether there is a fault in step t, the formula is as follows:
p represents a conditional probability;
representing the nth detector under the monitoring of steps 1-t;
i represents a certain step between steps 1 to t;representing the nth detector under monitoring at step i;
Y t and Y t+1 Represents a binary variable, wherein a number 1 represents that the state is fault-free, and a number 0 represents that the state is fault, Y t And Y t+1 Predicting whether faults exist in the current step and the next step respectively;
the first analysis processing subunit is used for comparing and analyzing the received temperature data, humidity data and dust particle data by the monitoring center, and if the first detection area judges that the dust particle data and the temperature data are both beyond the standard range through the comparison data analysis, the dust particle data in the data processing stage are set to be the highest priority, and the dust particle data are processed preferentially to enable the dust particle data to be maintained within the standard range;
if the temperature data exceeds the standard range, the humidity data and the dust particle data are normal, setting the temperature of the data processing stage as the highest priority to process the temperature data preferentially; if the data exceeding the standard range are pre-judged to exist, analyzing the reasons of exceeding the standard and stopping the operation of the equipment, and after the processed data meet the requirements, normally operating the equipment;
the second analysis processing subunit is used for preferentially processing the operation accident state equipment according to the equipment request time and the emergency if the operation accident state equipment and the operation warning state equipment exist at the same time, the operation accident state equipment gives out a red light alarm, the execution unit judges the cause of the problem through the supervision center to locate the equipment and power off, the power off information is transmitted to the supervision center through the LonWorks network bus, and the supervision center assigns maintenance tasks to corresponding maintenance personnel; the operation warning state equipment sends out a yellow light alarm, and the execution unit acquires and processes a warning reason through the supervision center;
The supervision center comprises:
a first data transmission subunit, configured to set a priority order of data transmission according to sensitivity of the device to temperature data, humidity data, dust particle data, or influence degree of the humidity data and the dust particle data on the device; the setting of the priority order of data transmission includes:
collecting all historical temperature data, humidity data, dust particle data and sensitivity historical data and historical fault historical data of equipment through a big data system, and establishing a sensitivity database; carrying out big data cleaning and layered data screening on temperature data, humidity data and dust particle data in a sensitivity database, automatically sequencing sensitivity historical data, and establishing layered screening association sequencing through layered data screening and automatic sequencing; performing priority hierarchical classification on historical fault data of the equipment through hierarchical screening association degree sorting, and establishing the influence degree of humidity data and dust particle data on the equipment; respectively weighting and converting the sensitivity and the influence degree into percentage values, wherein the higher the weight is, the higher the priority of data transmission is set;
the second data transmission subunit is used for setting the priority order of data transmission according to the receiving time and the emergency for the running state of the equipment;
The analysis processing subunit includes:
the supervision center stores the processing mode and the processing result information in the supervision center according to the mode that the fault request service with high priority is processed preferentially;
the execution unit displays, processes and inquires the alarm history information in real time through the supervision center.
4. The priority queue based LonWorks communication control system of claim 3, wherein the detection zone comprises a doorway detection unit comprising:
the monitoring center carries out intelligent identification processing on videos shot by the cameras, identifies the work card of the executing unit and automatically judges whether dust-free clothes and shoes are correctly worn, if not, sends an alarm signal to automatically close the door, and the alarm signal is analyzed by an intelligent detection node, and uploads alarm address and type information to the monitoring center to generate an alarm and store an alarm record; the execution unit accurately judges and processes the live sound and the image.
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