CN113960783A - Flat-top light shaping laser scanning device based on plano-convex lens and working method - Google Patents
Flat-top light shaping laser scanning device based on plano-convex lens and working method Download PDFInfo
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- CN113960783A CN113960783A CN202111466230.3A CN202111466230A CN113960783A CN 113960783 A CN113960783 A CN 113960783A CN 202111466230 A CN202111466230 A CN 202111466230A CN 113960783 A CN113960783 A CN 113960783A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
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- Optics & Photonics (AREA)
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Abstract
The embodiment of the invention discloses a planoconvex lens-based planoconvex laser shaping scanning device and a working method thereof, wherein the device comprises a laser, an optical component, a galvanometer and a planoconvex lens which are connected in sequence, wherein the laser is used for emitting laser beams; the optical component is used for shaping and modulating the laser beam; the plano-convex lens is used for focusing the modulated laser beam output by the optical assembly to obtain a flat-top light spot on a focal plane; and the galvanometer is used for carrying out laser scanning on the processing surface by utilizing the flat-top light spot. The device can solve the problems that the flat-top light distribution is distorted and deviates from the shaping effect of the original design due to the application of the traditional field lens.
Description
Technical Field
The invention relates to the technical field of flat-top light shaping devices, in particular to a flat-top light shaping laser scanning device based on a plano-convex lens and a working method.
Background
Flat-top Optical shaping systems based on DOE (Diffractive Optical Elements) generally require a focusing lens to obtain a designed flat-top light spot on a focal plane. In order to realize the web scanning, an F-Theta lens, namely a field lens, is generally used as a focusing lens in the industry, and the F-Theta lens is combined with a galvanometer application to realize the scanning of a certain web, wherein the focal plane of the field lens is a plane, and a plane material can be just placed on the focal plane.
As shown in fig. 1, the work flow of the conventional flat-top light shaping system is as follows: the output light beam of the laser passes through the beam expander, is expanded to the size of the incident light beam required by the DOE, enters the galvanometer and the field lens after being modulated by the DOE, and finally obtains flat-top light spots on the focal plane. However, the field lens is designed to realize a smaller focused light spot in a common focusing application, the shape and energy distribution of the shaped light spot are not considered in the design of the field lens product in the industry, and when the field lens is applied to the DOE shaping system, the obtained shaped light spot is distorted and deviates from the original light spot shape and energy distribution design.
Therefore, it is necessary to design a new device to solve the problem of the distortion of the flat-top light distribution caused by the conventional field lens application, which deviates from the original design shaping effect.
Disclosure of Invention
The invention aims to provide a flat-top light shaping laser scanning device based on a plano-convex lens and a working method.
In order to solve the technical problems, the invention aims to realize the following technical scheme: the flattop light shaping laser scanning device comprises a laser, an optical component, a galvanometer and a plano-convex lens which are connected in sequence, wherein the laser is used for emitting laser beams; the optical component is used for shaping and modulating the laser beam; the plano-convex lens is used for focusing the modulated laser beam output by the optical assembly to obtain a flat-top light spot on a focal plane; and the galvanometer is used for carrying out laser scanning on the processing surface by utilizing the flat-top light spot.
The further technical scheme is as follows: the optical assembly includes a beam expander and a DOE connected in series.
The further technical scheme is as follows: the plano-convex lens is positioned below the galvanometer.
The further technical scheme is as follows: the focal plane of the plano-convex lens is a spherical surface.
The further technical scheme is as follows: the processing surface is in a focal depth range taking the focal surface of the plano-convex lens as a reference.
The further technical scheme is as follows: still including moving the structure, moving the structure and being located planoconvex lens's below, moving and having placed the processing sample on the structure, be equipped with on the processing sample the machined surface.
In addition, the technical problem to be solved by the present invention is to provide a working method of a flattop light shaping laser scanning device based on a plano-convex lens, comprising:
the laser emits a laser beam;
the optical assembly carries out shaping modulation processing on the laser beam;
the plano-convex lens focuses the modulated laser beam output by the optical assembly to obtain a flat-top light spot on a focal plane;
and the galvanometer scans the processing surface by utilizing the flat-top light spots.
The further technical scheme is as follows: the optical assembly carries out shaping modulation processing on the laser beam and comprises:
expanding the laser beam emitted by the laser to the incident beam size required by the DOE by using a beam expander;
and modulating the light beam input by the beam expander by using the DOE, and inputting the modulated light beam to the galvanometer for processing.
Compared with the prior art, the invention has the beneficial effects that: according to the invention, the field lens is replaced by the plano-convex lens through the laser, the optical component, the vibrating mirror and the plano-convex lens which are connected in sequence, and the plano-convex lens can output ideal flat-top light spots in a small area on a focal plane, so that the problems of flat-top light distribution distortion and deviation from the originally designed shaping effect caused by the application of the traditional field lens are solved.
The invention is further described below with reference to the accompanying drawings and specific embodiments.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of a flat top light shaping system provided in the prior art;
fig. 2 is a schematic structural diagram of a flattop light shaping laser scanning device based on a plano-convex lens according to an embodiment of the present invention;
the labels in the figures illustrate:
10. a laser; 20. a beam expander; 30. a DOE; 40. a galvanometer; 50. a plano-convex lens; 60. and (6) processing the noodles.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It will be understood that the terms "comprises" and/or "comprising," when used in this specification and the appended claims, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
It is also to be understood that the terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in the specification of the present invention and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
It should be further understood that the term "and/or" as used in this specification and the appended claims refers to and includes any and all possible combinations of one or more of the associated listed items.
Referring to fig. 2, fig. 2 is a schematic structural diagram of a flattop leveling laser scanning device based on a plano-convex lens according to an embodiment of the present invention; the plano-convex lens-based plano-convex laser shaping scanning device can be applied to scenes of semiconductor laser annealing, solar cell laser doping and material removal, obtains ideal plano-convex light spots, realizes scanning of a small-width area, and keeps consistent plano-convex light spots at all positions in the area.
Referring to fig. 2, the flattop shaping laser scanning device based on the plano-convex lens includes a laser 10, an optical component, a galvanometer 40, and a plano-convex lens 50, which are connected in sequence, wherein the laser 10 is used for emitting a laser beam; the optical component is used for shaping and modulating the laser beam; the plano-convex lens 50 is used for focusing the modulated laser beam output by the optical component to obtain a flat-top light spot on a focal plane; and the galvanometer is used for carrying out laser scanning on the processing surface 60 by utilizing the flat-top light spots.
In the present embodiment, the field lens is replaced by the plano-convex lens 50, the focal length is F, the focal plane is a spherical surface, and since the processing surface 60 is generally a plane, as long as the processing surface 60 is within the depth of focus DOF range with the focal plane as the reference, the shaping light spots on the processing surface 60 can still maintain the flat-top distribution. DOF ═ F/cos θ -F; the depth of focus of the diffractive optics is related to the lens focal length F as follows: DOF is 0.001 × F. From this, F/cos θ -F is 0.001 × F, and θ is arccos (1/1.001); at this time, tan θ ≈ θ is also satisfied. That is, as long as the deflection angle of the galvanometer 40 is smaller than the value θ, a very close flat-top light spot can be obtained on the processing surface 60, and the corresponding scanning breadth is: 2F tan θ; the scanning linear velocity is F × tan θ ≈ F × θ, and it can be seen that the scanning linear velocity also has a linear relationship with the deflection angular velocity of the oscillating mirror 40. Therefore, the plano-convex lens 50 is used to replace a field lens, so that an ideal flat-top light spot can be obtained, and small-scale scanning of a certain area can be maintained. Therefore, the problem that the flat-top light distribution distortion caused by the traditional field lens application deviates from the shaping effect of the original design is solved.
In one embodiment, referring to fig. 2, the above-mentioned optical assembly includes a beam expander 20 and a DOE30 connected in sequence.
In one embodiment, referring to fig. 2, the plano-convex lens 50 is located below the galvanometer 40.
Specifically, the focal surface of the plano-convex lens 50 is spherical.
The processing surface 60 is located within a focal depth range with respect to the focal surface of the planoconvex lens 50.
For semiconductor annealing application, the light spot needs to be shaped into flat-top distribution and irradiated on the material to realize effective annealing, and for the shaping system applying the plano-convex lens 50, the small-amplitude scanning of the galvanometer 40 and the movement of the wafer placing platform can be combined to realize the annealing of the whole wafer due to the large size of the wafer.
In an embodiment, the flattop leveling laser scanning device based on the plano-convex lens further includes a moving structure, the moving structure is located below the plano-convex lens 50, a processing sample is placed on the moving structure, and a processing surface 60 is arranged on the processing sample.
The movement structure is utilized to drive the processed sample to move, the flat-top light spot output by the plano-convex lens 50 is used for scanning and processing the processed surface 60 of the processed sample, an ideal flat-top light spot can be obtained in a small area on a focal plane, and the defects that the flat-top light distribution distortion is caused by the application of a traditional field lens and the shaping effect is deviated from the originally designed shaping effect are overcome.
For example: for a 6 inch, 150mm diameter wafer annealing application, a plano-convex lens 50 shaping system with a focal length of 330mm is used, and the diameter of the single scan is 2 × F × tan θ is 29.5mm, and for splicing convenience, the single scan area should be designed as a square with a side length of 20 mm. The annealing of the whole wafer can be realized by adopting the method of scanning by the galvanometer 40 and moving the platform.
According to the flat-top light shaping laser scanning device based on the plano-convex lens, the field lens is replaced by the plano-convex lens 50 through the laser 10, the optical component, the galvanometer 40 and the plano-convex lens 50 which are connected in sequence, and the plano-convex lens 50 can output ideal flat-top light spots in a small area on a focal plane, so that the problems that the flat-top light distribution is distorted and deviates from the shaping effect of the original design due to the application of the traditional field lens are solved.
In an embodiment, there is also provided a working method of a planoconvex lens-based planoconvex laser scanning device, including:
the laser 10 emits a laser beam;
the optical assembly modulates the laser beam;
the plano-convex lens 50 focuses the modulated laser beam output by the optical assembly;
the galvanometer 40 scans the processing surface by using the flat-top light spot. Flat-top light spots are obtained on the focal plane.
In addition, the optical module for modulating the laser beam includes:
expanding the laser beam emitted by the laser 10 to an incident beam size required by the DOE30 by using the beam expander 20;
the beam input from the beam expander 20 is modulated by the DOE30 and then input to the galvanometer 40 for processing.
It should be noted that, as can be clearly understood by those skilled in the art, the specific implementation process of the above-mentioned working method of the flattop leveling laser scanning device based on the plano-convex lens may refer to the corresponding description in the foregoing device embodiment, and for convenience and brevity of description, no further description is provided herein.
While the invention has been described with reference to specific embodiments, the invention is not limited thereto, and various equivalent modifications and substitutions can be easily made by those skilled in the art within the technical scope of the invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (8)
1. A flat-top light shaping laser scanning device based on a plano-convex lens is characterized by comprising a laser, an optical component, a galvanometer and the plano-convex lens which are connected in sequence, wherein the laser is used for emitting laser beams; the optical component is used for shaping and modulating the laser beam; the plano-convex lens is used for focusing the modulated laser beam output by the optical assembly to obtain a flat-top light spot on a focal plane; and the galvanometer is used for carrying out laser scanning on the processing surface by utilizing the flat-top light spot.
2. The plano-convex lens-based flat-top laser profiling laser scanning device according to claim 1, wherein the optical assembly comprises a beam expander and a DOE connected in sequence.
3. The plano-convex lens-based plano-convex laser scanning device according to claim 2, wherein the plano-convex lens is located below the galvanometer.
4. The plano-convex lens-based laser scanning device for flat topping shaping according to claim 1, wherein the focal plane of the plano-convex lens is spherical.
5. The planoconvex lens-based laser scanning device for flat topping shaping according to claim 3, wherein the processing surface is within a focal depth range with reference to a focal surface of the planoconvex lens.
6. The flattop reshaping laser scanning device based on the plano-convex lens as claimed in claim 5, further comprising a moving structure, wherein the moving structure is located below the plano-convex lens, a processing sample is placed on the moving structure, and the processing sample is provided with the processing surface.
7. A working method of a flat-top light shaping laser scanning device based on a plano-convex lens is characterized by comprising the following steps:
the laser emits a laser beam;
the optical assembly carries out shaping modulation processing on the laser beam;
the plano-convex lens focuses the modulated laser beam output by the optical assembly to obtain a flat-top light spot on a focal plane;
and the galvanometer scans the processing surface by utilizing the flat-top light spots.
8. The working method of the plano-convex lens-based flat top light shaping laser scanning device according to claim 7, wherein the optical assembly performs shaping modulation processing on the laser beam, and comprises the following steps:
expanding the laser beam emitted by the laser to the incident beam size required by the DOE by using a beam expander;
and modulating the light beam input by the beam expander by using the DOE, and inputting the modulated light beam to the galvanometer for processing.
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| CN202111466230.3A CN113960783A (en) | 2021-12-03 | 2021-12-03 | Flat-top light shaping laser scanning device based on plano-convex lens and working method |
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| CN202111466230.3A CN113960783A (en) | 2021-12-03 | 2021-12-03 | Flat-top light shaping laser scanning device based on plano-convex lens and working method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117182358A (en) * | 2023-11-02 | 2023-12-08 | 无锡超通智能制造技术研究院有限公司 | Fine metal mask laser processing device and processing method thereof |
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2021
- 2021-12-03 CN CN202111466230.3A patent/CN113960783A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117182358A (en) * | 2023-11-02 | 2023-12-08 | 无锡超通智能制造技术研究院有限公司 | Fine metal mask laser processing device and processing method thereof |
| CN117182358B (en) * | 2023-11-02 | 2024-01-26 | 无锡超通智能制造技术研究院有限公司 | Fine metal mask laser processing device and processing method thereof |
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