CN117182358A - Fine metal mask laser processing device and processing method thereof - Google Patents
Fine metal mask laser processing device and processing method thereof Download PDFInfo
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Abstract
The invention relates to the technical field of laser processing, in particular to a fine metal mask laser processing device and a processing method thereof. The vibrating mirror processing head is used for performing full-vibrating mirror stroke deflection on the incident laser beam; one side of the dynamic focusing module is provided with a vibrating mirror processing head, and the other side of the dynamic focusing module is provided with a laser head; the laser shaping module is positioned below the vibrating mirror processing head; the objective lens switching module is positioned below the laser shaping module, and a plurality of objective lenses with different multiples are arranged on the objective lens switching module; the automatic focusing module is positioned on one side of the third beam combining lens, integrates the above structures, simultaneously has the three-dimensional processing capability of the vibrating lens processing head and the dynamic focusing lens, the plane shaping capability of the field lens and the hyperfine observation and processing capability of the objective lens, and designs the focal length ratio of the field lens telecentric focusing lens and the plano-convex shaping lens as 1: about 4, the laser is changed into parallel light after passing through the plano-convex plastic mirror, and the diameter of the light spot is enlarged to 4 times of the original diameter.
Description
Technical Field
The invention relates to the technical field of laser processing, in particular to a fine metal mask laser processing device and a processing method thereof.
Background
Precision metal masks (FMMs) are a tool for fabricating micro and nano-scale structures. It is usually made of a metallic material (e.g., aluminum or chromium) with a pattern of high precision. FMM is widely used in microelectronics, photonics, biomedical and nanotechnology fields.
The precision metal mask (FMM) is a core consumable for the production of Organic Light Emitting Diodes (OLED), and the thickness of the FMM is only about 20um, but the length of the FMM can reach 1400mm, and the width of the FMM can reach 400mm. At present, the precise metal mask is produced by etching through a chemical method, but the etching yield is low, so that secondary processing and repair of the precise metal mask are needed later through a laser processing mode.
The difficulty of laser processing the precise metal mask plate is that: and processing a three-dimensional hole pattern with the size of 20um, wherein the processing precision is within 1um, and the gradient of the three-dimensional hole pattern is 1 degree. Therefore, to process a precision metal mask by laser, the conventional laser processing means is far from reaching the index requirement. There is a need to develop a new processing head to meet the small-scale, high-precision three-dimensional processing requirements.
Disclosure of Invention
The invention aims to solve the technical problems that: in order to solve the problems in the prior art in the background technology, a fine metal mask laser processing device and a processing method thereof are provided, wherein the fine metal mask laser processing device has the three-dimensional processing capability of a galvanometer processing head and a dynamic focusing lens, the plane shaping capability of a field lens and the ultra-fine observation and processing capability of an objective lens.
The technical scheme adopted for solving the technical problems is as follows: a laser processing device for a fine metal mask plate comprises
The vibrating mirror processing head is used for performing full-vibrating mirror stroke deflection on an incident laser beam, and finally changing the spatial position of a laser focusing spot in the XY direction in real time;
the dynamic focusing module is provided with a galvanometer processing head at one side and a laser head at the other side, and is used for changing the divergence angle of incident laser in real time and injecting a laser beam with a certain laser divergence angle into the galvanometer processing head so as to change the spatial position of a final laser focusing spot in the Z direction;
the laser shaping module is positioned below the vibrating mirror machining head and is used for fully vibrating the vibrating mirror to deflect a full stroke, so that the machining precision is ensured, laser is focused to a focusing plane in the laser shaping module, and finally, the plane focal plane is kept at the focal length of the objective lens;
the objective lens switching module is positioned below the laser shaping module, and a plurality of objective lenses with different multiples are arranged on the objective lens switching module;
the third beam combining lens is positioned between the laser shaping module and the objective lens switching module;
and the automatic focusing module is positioned at one side of the third beam combining lens, emits measuring laser inside the automatic focusing module, combines the laser with the laser beam through the third beam combining lens and finally focuses on the surface of the object through the objective lens.
Further, the laser shaping module comprises a field lens telecentric focusing lens, a plane-like convex shaping lens and a tube cavity, wherein the field lens telecentric focusing lens is installed at the light inlet end of the tube cavity, the plane-like convex shaping lens is installed at the light outlet end of the tube cavity, the convex surface of the plane-like convex shaping lens faces the inner cavity of the tube cavity, and the plane of the plane-like convex shaping lens is outwards arranged.
Further, the focal length ratio between the field lens-like telecentric focusing lens and the plano-convex shaping lens is 1:2 to 20.
Further, the objective lens switching module is a linear objective lens switching module, the objective lens switching module comprises a linear motor and a grating ruler, and the linear motor is connected with the grating ruler through a transmission assembly and drives the grating ruler to do linear reciprocating motion along the X-axis direction.
Furthermore, a plurality of groups of lens groups which focus the laser emitted by the galvanometer processing head in a focusing plane at the upper part of the tube cavity are arranged in the field lens-like telecentric focusing lens.
Further, a first beam combining lens and a second beam combining lens are sequentially installed between the laser shaping module and the third beam combining lens from top to bottom, a coaxial observation module for realizing coaxial observation is arranged on one side of the first beam combining lens, and a coaxial illumination module for realizing illumination is arranged on one side of the second beam combining lens.
Further, the inclination direction of the first beam combining lens is consistent with the inclination direction of the second beam combining lens, and the inclination direction of the first beam combining lens is opposite to the inclination direction of the third beam combining lens.
A processing method of a fine metal mask laser processing device comprises the following steps:
step 1: focal point calibration
Step 11: calibrating the automatic focusing module to enable the automatic focusing module to focus;
step 12: under the condition that the automatic focusing module focuses, the focal length of the coaxial observation module is adjusted, so that the coaxial observation focus and the automatic focusing focus are ensured to be in focus;
step 13: under the condition that the automatic focusing module focuses, the dynamic focusing module is adjusted to ensure that the focal point of the laser beam for processing is in focus with the focal point of the automatic focusing module and the focal point of the coaxial observation module, and the calibration of the processing head is completed;
step 2: product processing
Step 21: the laser for processing is controlled by a galvanometer processing head and a dynamic focusing module, and finally the laser is swung by the three-dimensional space position of the focal point after focusing by the objective lens,
performing three-dimensional processing;
step 22: drawing and processing a three-dimensional graph through software, generating a processing track, and carrying out plane or curved surface layered filling treatment on the three-dimensional processing graph, namely carrying out rough machining on a three-dimensional hole;
step 23: setting a three-dimensional contour scanning program of the three-dimensional graph, and carrying out laser leveling on the three-dimensional hole wall after three-dimensional processing, namely carrying out finish machining on the three-dimensional hole wall;
step 24: and setting the upper surface cleaning program after the three-dimensional pattern processing, and carrying out laser cleaning on dust or slag on the upper surface of the mask after the three-dimensional processing.
Further, in the product processing process of the step 2, real-time visual detection is performed through the coaxial observation module, and the height of the vibrating mirror processing head in the Z-axis direction can be adjusted in real time through the automatic focusing module.
The beneficial effects of the invention are as follows: 1. the laser shaping module comprises a field lens-like telecentric focusing lens and a plano-convex shaping lens, and the processing range of the objective lens is very small and is generally within 0.1mm because the objective lens is processed finally, so that full-oscillating lens travel is difficult to use through oscillating lens deflection, and further the processing precision is difficult to ensure; the field lens telecentric focusing lens is additionally arranged, so that the vibrating lens processing head can be guaranteed to deflect in a full stroke (the field lens can guarantee that laser is focused in a certain small range in the full stroke range of the vibrating lens), and the focal length ratio of the field lens telecentric focusing lens and the plano-convex shaping lens is designed to be 1: about 2 to 20, ensuring that laser is changed into parallel light after passing through a plano-convex-like shaping mirror (a dynamic focusing module can change a divergence angle by a small margin and is ignored here), and expanding the diameter of a light spot to 2 to 20 times of the original diameter (the larger the diameter of the light spot is, the smaller the focusing light spot is, and the finer the processing scale is);
2. the device integrates the vibrating mirror processing head, the dynamic focusing mirror, the field lens telecentric focusing mirror, the plano-convex shaping mirror and the objective lens into a whole, and simultaneously has the three-dimensional processing capability of the vibrating mirror processing head and the dynamic focusing mirror, the plane shaping capability of the field lens and the ultra-fine observation and processing capability of the objective lens; the hardware is not a simple stacking combination, but combines the processing capabilities of the multi-scale laser processing component through principle innovation, thereby realizing a brand new processing device and processing method.
Drawings
The invention will be further described with reference to the drawings and examples.
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic diagram of the optical path of a laser shaping module;
in the figure: 1. the device comprises a vibrating mirror processing head, a dynamic focusing module, a laser shaping module, an automatic focusing module, a coaxial observing module, a coaxial illuminating module, an objective lens switching module,
9. the first beam combiner, the second beam combiner, the third beam combiner,
12. a field lens-like telecentric focusing lens, a plano-convex-like shaping lens and a lumen;
15. focal plane, 16. Parallel light.
Detailed Description
The invention will now be described in further detail with reference to the accompanying drawings. The drawings are simplified schematic representations which merely illustrate the basic structure of the invention and therefore show only the structures which are relevant to the invention.
1-2, micro-scale special-shaped holes (namely three-dimensional holes) are machined, laser is beaten from top to bottom, the laser can swing through a vibrating mirror, and three-dimensional swing (left and right, front and back, top and bottom) can be carried out;
principle of three-dimensional processing: the large-scale laser is reduced by the pipe diameter because the original vibrating mirror has a large breadth and a breadth of hundreds of millimeters, then the breadth of hundreds of millimeters is reduced to a few micrometers by the scene-like telecentric focusing mirror 12, the reduction is thousands of times, and then the laser is subjected to secondary amplification by the ratio of 1:4 (the characteristic of the laser is that the incident light spot is large, the focusing light spot is small, and the parallel light is thick, so that the focusing point is small, and the processing quality is higher;
comprises a vibrating mirror processing head 1, wherein the principle of the vibrating mirror processing head 1 is that two groups of motors pass through a vibrating mirror processing head 2 16 Or 2 20 Is considered to be 2 16 Or 2 20 The swing amplitude of the laser beam is full stroke, the incident laser beam is subjected to full-oscillating mirror stroke deflection, and finally the space position of a laser focusing light spot in the XY direction is changed in real time, so that the swing angle is used for the full stroke of a small width, and the full stroke is realized in a focusing and amplifying mode;
the dynamic focusing module 2 is provided with the galvanometer processing head 1 at one side of the dynamic focusing module 2, and the laser head is arranged at the other side of the dynamic focusing module 2, so that the laser head is used for changing the divergence angle of incident laser in real time, and injecting laser beams with a certain laser divergence angle into the galvanometer processing head 1, thereby changing the spatial position of a final laser focusing spot in the Z direction, and the position of the final laser focusing spot in a three-dimensional space can be controlled at high speed and high precision through the galvanometer processing head 1 and the dynamic focusing module 2;
the laser shaping module 3 is positioned below the vibrating mirror processing head 1 and is used for fully vibrating the vibrating mirror to deflect a full stroke, so that the processing precision is ensured, laser is focused to a focusing plane 15 in the laser shaping module 3, and finally, the characteristics of a plane focal plane are kept at the focal length of the objective lens;
the objective lens switching module 8 is positioned below the laser shaping module 3, and a plurality of objective lenses 7 with different multiples are arranged on the objective lens switching module 8;
the third beam combining lens 11 is positioned between the laser shaping module 3 and the objective lens switching module 8;
the automatic focusing module 4 is positioned at one side of the third beam combining lens 11, the automatic focusing module 4 internally emits measuring laser, the measuring laser is combined with the laser beam through the third beam combining lens 11, finally, the measuring laser is focused on the surface of an object through the objective lens 7, imaging is carried out in the automatic focusing module 4 after reflection, and the focal position of the objective lens is determined through an imaging principle.
Specifically, the automatic focusing module 4 internally emits a measuring laser to realize automatic focusing, which is similar to a laser microscope, by the principle of laser, that is, the automatic focusing module 4 emits a laser, reflects a laser and realizes automatic searching of a focus.
The position of the autofocus module 4 needs to be placed at the lowest position, because the autofocus module 4 needs to be very accurate, if the autofocus module 4 is placed above, three beam combining lenses will pass, and the focusing performance of the autofocus module 4 will be degraded, so the autofocus module 4 is placed at the position closest to the inner objective lens 7.
The autofocus module 4 is used as a laser source for emitting laser, the laser of 750 wave bands is emitted to the third beam combining lens 11, then reflected downwards to the objective lens 7, focused by the objective lens 7, then reflected back again, the focal length of the objective lens 7 is judged to be correct through the reflected imaging, and the imaging quality and the angle of the divergent laser are judged to judge whether the laser is emitted to the front surface of the product.
The laser shaping module 3 levels the light that shakes the mirror and come out, and the effect of flattening is that let the focal plane of laser be on a plane, and this focal plane is an arc focal plane, and laser shaping module 3 includes class field lens telecentric focusing mirror 12, class plano-convex plastic mirror 13, lumen 14, class field lens telecentric focusing mirror 12 is installed to the light inlet end of lumen 14, class plano-convex plastic mirror 13 is installed to the light outlet end of lumen 14, and the protruding face of class plano-convex plastic mirror 13 is towards the inner chamber of lumen 14, and the plane of class plano-convex plastic mirror 13 sets up outwards.
Wherein, a plurality of groups of lens groups which focus the laser emitted by the galvanometer processing head 1 in a focusing plane 15 at the upper part of the tube cavity 14 are arranged in the field lens-like telecentric focusing lens 12. The field-like telecentric focusing lens 12 focuses the laser light in the same plane, namely a focusing plane 15, that is to say, a common focal plane is a spherical surface, while the field-like telecentric focusing lens 12 in the invention converts a conventional spherical surface into a plane, thereby ensuring that the focal plane of the laser light finally emitted from the objective lens 7 is also a plane instead of the conventional spherical surface, further ensuring the three-dimensional space accuracy of the focal point of the laser light, and if the laser light is uneven, the focal point entering the objective lens 7 is uneven and the focal point is inconsistent, thus the focusing plane 15 is required to be a plane, that is to say, the arc focal plane is changed into a parallel focal plane. The focal length ratio between the field lens-like telecentric focusing lens 12 and the plano-convex shaping lens 13 is preferably 1:4, the laser is further changed into divergent laser after passing through a focusing plane 15 in the tube cavity 14 and enters a plano-convex-like shaping mirror 13, the plano-convex-like shaping mirror 13 shapes the divergent laser into parallel light 16, and the original incident light spot diameter is enlarged by about 4 times.
Meanwhile, in order to control the scale of the emergent parallel light, if the proportion is reduced, the emergent parallel light is thinned, if the emergent parallel light is thinned, the focusing light spot is large, and the quality is poor.
Then, according to the plano-convex-like shaping mirror 13, the purpose of the plano-convex-like shaping mirror 13 is to taper the divergent light (the divergent light is tapered), and then the divergent light passes through the plano-convex-like shaping mirror 13 and then becomes parallel light 16, at this time, the focal plane is still flat since the focal plane was flattened before.
As shown in fig. 1, the objective lens switching module 8 is a linear objective lens switching module, and the objective lens switching module 8 includes a linear motor and a grating scale, where the linear motor is connected with the grating scale through a transmission component and drives the grating scale to do linear reciprocating motion along the X-axis direction.
The specific objective lens switching module 8 is driven by a linear motor, the high-precision grating ruler feeds back the position of the objective lens 7 in real time, and the objective lenses 7 with different multiples are switched at high speed and high precision by the linear switching principle.
The existing annular objective lens switching module is generally adopted, but the annular objective lens switching module has no linear objective lens switching module, and the annular objective lens switching module is provided with no grating ruler, so that the linear objective lens switching module is manufactured through the grating ruler, the precision of the grating ruler is 0.1um, and the high-speed and high-precision switching is realized.
Wherein the objective lenses 7 are bifocal objective lenses, that is, the 4 objective lenses 7 are only multiple different, but the focal lengths of the objective lenses 7 are the same, that is, the focal planes of the 4 objective lenses 7 are the same plane, and the focal lengths of the objective lenses are the same;
the focal plane of the objective lens 7 is very short, only 1 micrometer, i.e. it is not focusable, that is, the height difference between the upper and lower parts is 1 um.
A first beam combining lens 9 and a second beam combining lens 10 are sequentially installed between the laser shaping module 3 and the third beam combining lens 11 from top to bottom, a coaxial observation module 5 for realizing coaxial observation is arranged on one side of the first beam combining lens 9, and a coaxial illumination module 6 for realizing illumination is arranged on one side of the second beam combining lens 10.
The coaxial observation module 5 and the coaxial illumination module 6 are coaxial with the laser through the first beam combining lens 9 and the second beam combining lens 10 respectively, and play roles in illumination and coaxial observation; the in-line vision module 5 comprises a variable focus industrial camera.
The tilting direction of the first beam combiner 9 is identical to the tilting direction of the second beam combiner 10, and the tilting direction of the first beam combiner 9 is opposite to the tilting direction of the third beam combiner 11.
The vibrating mirror processing head 1, the dynamic focusing module 2, the first beam combining lens 9, the second beam combining lens 10, the third beam combining lens 11, the coaxial observation module 5, the coaxial illumination module 6 and the objective lens 7 are all in the prior art, and the vibrating mirror processing head is commercially purchased according to the requirements of a processing device.
A processing method of a fine metal mask laser processing device comprises the following steps:
step 1: focal point calibration
Step 11: calibrating the automatic focusing module 4 to enable the automatic focusing module 4 to focus and automatically focus to a focal plane, wherein the focusing point is very accurate, and the focal plane of the dynamic focusing module 2 is consistent with the focal plane;
step 12: under the condition that the automatic focusing module 4 focuses, the focal length of the coaxial observing module 5 is adjusted, so that the coaxial observing focus and the automatic focusing focus are ensured to be in focus;
step 13: under the condition that the automatic focusing module 4 focuses, the dynamic focusing module 2 is adjusted to ensure that the focal point of the laser beam for processing is in focus with the focal point of the automatic focusing module 4 and the focal point of the coaxial observation module 5, thereby completing the calibration of the processing head;
step 2: product processing
Step 21: the laser for processing is controlled through the vibrating mirror processing head 1 and the dynamic focusing module 2, and finally the three-dimensional space position of the focal point focused by the objective lens 7 is used for swinging the laser, so that three-dimensional processing is performed; in the product processing process, the coaxial observation module 5 is used for real-time visual detection, and the automatic focusing module 4 can be used for real-time adjustment of the height of the vibrating mirror processing head 1 in the Z-axis direction;
step 22: drawing and processing a three-dimensional graph through software, generating a processing track, and carrying out plane or curved surface layered filling treatment on the three-dimensional processing graph, namely carrying out rough machining on a three-dimensional hole;
step 23: setting a three-dimensional contour scanning program of the three-dimensional graph, and carrying out laser leveling on the three-dimensional hole wall after three-dimensional processing, namely carrying out finish machining on the three-dimensional hole wall;
step 24: and setting the upper surface cleaning program after the three-dimensional pattern processing, and carrying out laser cleaning on dust or slag on the upper surface of the mask after the three-dimensional processing.
In addition, in the product processing process of step 2, the coaxial observation module 5 is used for real-time visual detection, and the automatic focusing module 4 can also be used for adjusting the height of the vibrating mirror processing head 1 in the Z-axis direction in real time. The processing process is automatically finished at one time through the vibrating mirror processing head and the dynamic focusing module, and the processing technological parameters of each step, including all processing motion parameters and laser parameters, can be set independently.
With the above-described preferred embodiments according to the present invention as an illustration, the above-described descriptions can be used by persons skilled in the relevant art to make various changes and modifications without departing from the scope of the technical idea of the present invention. The technical scope of the present invention is not limited to the description, but must be determined according to the scope of claims.
Claims (8)
1. A fine metal mask laser processing device is characterized in that: comprising
The vibrating mirror machining head (1) is used for performing full-vibrating mirror stroke deflection on an incident laser beam, and finally changing the spatial position of a laser focusing light spot in the XY direction in real time;
the laser focusing device comprises a dynamic focusing module (2), wherein one side of the dynamic focusing module (2) is provided with a vibrating mirror processing head (1), and the other side of the dynamic focusing module is provided with a laser head for changing the divergence angle of incident laser in real time and injecting a laser beam with a certain laser divergence angle into the vibrating mirror processing head (1), so that the spatial position of a final laser focusing spot in the Z direction is changed;
the laser shaping module (3) is positioned below the vibrating mirror machining head (1) and is used for fully vibrating the vibrating mirror to deflect a full stroke, so that the machining precision is ensured, laser is focused to a focusing plane (15) in the laser shaping module (3), and finally, the plane focal plane is kept at the focal length of the objective lens (7);
the objective lens switching module (8) is positioned below the laser shaping module (3), and a plurality of objective lenses (7) with different multiples are arranged on the objective lens switching module (8);
the third beam combining lens (11) is positioned between the laser shaping module (3) and the objective lens switching module (8);
the automatic focusing module (4) is positioned at one side of the third beam combining lens (11), and the automatic focusing module (4) internally emits measuring laser, combines the measuring laser with the laser beam through the third beam combining lens (11) and finally focuses on the surface of an object through the objective lens (7).
2. The fine metal mask laser processing device according to claim 1, wherein: the laser shaping module (3) comprises a field lens telecentric focusing lens (12), a plano-convex shaping lens (13) and a tube cavity (14), wherein the light inlet end of the tube cavity (14) is provided with the field lens telecentric focusing lens (12), the light outlet end of the tube cavity (14) is provided with the plano-convex shaping lens (13), the convex surface of the plano-convex shaping lens (13) faces the inner cavity of the tube cavity (14), and the plane of the plano-convex shaping lens (13) faces outwards.
3. The fine metal mask laser processing device according to claim 2, wherein: the focal length ratio between the field lens-like telecentric focusing lens (12) and the plano-convex shaping lens (13) is 1:2 to 20.
4. The fine metal mask laser processing device according to claim 2, wherein: the field lens-like telecentric focusing lens (12) is internally provided with a plurality of groups of lens groups which focus laser emitted by the vibrating lens processing head (1) in a focusing plane at the upper part of the tube cavity (14).
5. The fine metal mask laser processing device according to claim 1, wherein: the objective lens switching module (8) is a linear objective lens switching module, the objective lens switching module (8) comprises a linear motor and a grating ruler, and the linear motor is connected with the grating ruler through a transmission assembly and drives the grating ruler to do linear reciprocating motion along the X-axis direction.
6. The fine metal mask laser processing device according to claim 1, wherein: the laser shaping device is characterized in that a first beam combining lens (9) and a second beam combining lens (10) are sequentially arranged between the laser shaping module (3) and the third beam combining lens (11) from top to bottom, a coaxial observation module (5) for realizing coaxial observation is arranged on one side of the first beam combining lens (9), and a coaxial illumination module (6) for realizing illumination is arranged on one side of the second beam combining lens (10).
7. A method for processing a fine metal mask laser processing device, comprising the fine metal mask laser processing device according to any one of claims 1 to 6, characterized in that: the method comprises the following steps:
step 1: focal point calibration
Step 11: calibrating the autofocus module (4) such that the autofocus module (4) focuses;
step 12: under the condition that the automatic focusing module (4) focuses, the focal length of the coaxial observing module (5) is adjusted, so that the coaxial observing focus and the automatic focusing focus are ensured to be in focus;
step 13: under the condition that the automatic focusing module (4) focuses, the dynamic focusing module (2) is adjusted to ensure that the focal point of the laser beam for processing is in focus with the focal point of the automatic focusing module (4) and the focal point of the coaxial observation module (5), and the calibration of the processing head is completed;
step 2: product processing
Step 21: controlling processing laser through a vibrating mirror processing head (1) and a dynamic focusing module (2), and finally swinging the laser through the three-dimensional space position of a focus focused by an objective lens (7) to perform three-dimensional processing;
step 22: drawing and processing a three-dimensional graph through software, generating a processing track, and carrying out plane or curved surface layered filling treatment on the three-dimensional processing graph, namely carrying out rough machining on a three-dimensional hole;
step 23: setting a three-dimensional contour scanning program of the three-dimensional graph, and carrying out laser leveling on the three-dimensional hole wall after three-dimensional processing, namely carrying out finish machining on the three-dimensional hole wall;
step 24: and setting the upper surface cleaning program after the three-dimensional pattern processing, and carrying out laser cleaning on dust or slag on the upper surface of the mask after the three-dimensional processing.
8. The method for processing the fine metal mask by using the laser processing device according to claim 7, wherein the method comprises the following steps: in the product processing process in the step 2, real-time visual detection is carried out through the coaxial observation module (5), and the height of the vibrating mirror processing head (1) in the Z-axis direction can be adjusted in real time through the automatic focusing module (4).
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| CN116393814A (en) * | 2023-04-21 | 2023-07-07 | 英诺激光科技股份有限公司 | Shaping facula correction method of laser processing system and laser processing system |
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