CN116393814A - Shaping facula correction method of laser processing system and laser processing system - Google Patents
Shaping facula correction method of laser processing system and laser processing system Download PDFInfo
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- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
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Abstract
The invention belongs to the technical field of laser processing, and particularly relates to a shaping facula correction method of a laser processing system, the laser processing system, a laser processing method and a correction model. The shaping light spot correction method comprises the following steps: obtaining an ideal Gaussian beam model G 0 The method comprises the steps of carrying out a first treatment on the surface of the Acquiring a transfer function T through an optical model of the beam shaper; calculating the beam function G before the incident field lens 0 * T is a T; acquiring a transfer function F (x, y) through an optical model of a field lens; through G 0 *T*F(x,y)*δ(x,y)＝H 0 Solving a correction function delta (x, y), wherein H 0 As an ideal shaped light spot distribution function, the convolution is expressed; acquiring a gray scale corresponding to the correction function delta (x, y), and inputting the gray scale into a phaseA bit programmable to correct for the shaped spot scanned to position (x, y) in the field lens swath. The phase programmable device can correct the light spot at a certain position in the breadth of the field lens when the vibrating lens scans to obtain ideal and uniform shaping light spots, and can realize that the whole breadth of the field lens can reach the ideal shaping light spots.
Description
Technical Field
The invention belongs to the technical field of laser processing, and particularly relates to a shaping facula correction method of a laser processing system, the laser processing system, a laser processing method and a correction model.
Background
In laser processing applications, it is often necessary to shape and transform a laser beam into a spot with a specific light field distribution for material processing, where the common shaped spot includes flat top light, multiple focal points, a ring, and the like. For example, it is common to shape a gaussian beam into a flat-top light, wherein the edge of the flat-top light generated by the DOE of the diffractive optical element is steep, and the energy distribution is uniform, so that the application is wider.
In practical laser processing application, in order to improve processing efficiency, laser scanning processing needs to be performed on materials, and a common laser processing system realizes a breadth scanning function by being provided with a vibrating mirror and a field lens. The field lens commonly used in industry is designed for realizing smaller focusing light spots in common focusing application, and can form the laser beam into the focusing light spots with uniform size in a certain range of a processing plane, and the size distribution of the focus Spot of the 532nm field lens in a 210×210mm breadth is shown in fig. 2, so that the focus size of the whole breadth is relatively uniform (12.1 um-13.6 um).
The design of the common field lens is not optimized for a specific beam shaping system, and for a beam shaping processing system, the shaping light spots at each point on the field lens breadth have different degrees of difference and distortion, so that the practical application process effect is affected. Particularly, for laser processing with higher precision requirements, such as laser annealing of a semiconductor wafer and laser doping of a photovoltaic cell, large-breadth scanning is required after flat top light shaping, and shaping light spots with uniform energy distribution and consistent light spot shape can be required to be achieved at each point of the whole breadth, but the field lens commonly used in the industry at present is difficult to meet the requirements, and the ideal technological effect cannot be achieved.
For example, flat-top light shaping systems based on Diffractive Optics (DOE) typically require the use of a focusing lens to obtain the designed flat-top spot at the focal plane. In order to achieve a swath scan, the industry typically uses F-Theta lenses (field lenses) as focusing lenses, in combination with galvanometer applications, to achieve a swath scan. The focal plane of the field lens is a plane, and the planar material can be placed just above the focal plane. As shown in fig. 1, the output beam of the laser passes through the beam expander, expands to the size of the incident beam required by the DOE, enters the galvanometer and the field lens after being modulated by the DOE, and finally obtains a flat-top light spot on the focal plane.
However, the design of the field lens is not optimized for the diffraction beam modulated by the DOE, the shape and energy distribution of the shaped light spot are not considered in the design, and various types of aberration can exist in the field lens due to processing and assembly errors, so that the shaped light spot obtained in a partial area on the whole field lens breadth can generate distortion, and the shape and energy distribution of the light spot deviate from the original design. Referring to fig. 3, a flat-top light distribution obtained at a focus is obtained by using a normal plano-convex lens instead of a field lens using an ideal gaussian beam model incidence simulation, and it can be seen that the flat-top light energy distribution obtained by the DOE and the plano-convex lens is very uniform and the square shape is also regular. Referring to fig. 4, there is shown the use of a field lens (model S4LFT1330/292, SILL OPTICS, germany) in a DOE system, and comparing fig. 3 and 4, it can be seen that flat-top spots at different coordinates of the field lens web, for example, the four corners of the spot at the center (0, 0) of the web, have energy depressions, and the energy distribution is further degraded at four coordinates +/-75mm from the center.
Disclosure of Invention
The invention aims to provide a shaping light spot correction method of a laser processing system, the laser processing method and a correction model, so as to solve the technical problem that the shaping light spots at all positions of a scanning breadth of a field lens in the laser processing system are large in difference.
In order to solve the technical problems, the invention provides a shaping facula correction method of a laser processing system, comprising the following steps: obtaining an ideal Gaussian beam model G 0 The method comprises the steps of carrying out a first treatment on the surface of the Acquiring a transfer function T through an optical model of the beam shaper; calculating the beam function G before the incident field lens 0 * T is a T; acquiring a transfer function F (x, y) through an optical model of a field lens; through G 0 *T*F(x,y)*δ(x,y)＝H 0 Solving a correction function delta (x, y), wherein H 0 As an ideal shaped light spot distribution function, the convolution is expressed; acquisition schoolThe gray map corresponding to the positive function delta (x, y) is input to a phase programmable to correct for the shaped spot scanned to position (x, y) in the field lens swath.
Further, the shaping facula correction method of the laser processing system further comprises the following steps: correcting distortion of the light beam before entering the beam shaper; the method for correcting distortion of the light beam before entering the light beam shaper comprises the following steps: wave front measurement is carried out on the light beam before entering the beam shaper through the wave front detector so as to obtain a wave front distribution gray level diagram; acquiring a wavefront distortion correction gray scale map according to the wavefront distribution gray scale map; the wavefront distortion correction gray scale map is input to a phase programmable to be corrected.
In yet another aspect, the present invention also provides a beam shaping laser processing system, including: the laser device comprises a laser emitting device, a phase programmable device, a beam shaper, a galvanometer, a field lens and a processing module which are sequentially arranged; the laser emission device, the phase programmable device and the galvanometer are electrically connected with the processing module; the processing module is suitable for controlling the phase programmable device to correct the shaping light spot scanned to the corresponding position in the field lens breadth according to the scanning position of the galvanometer.
Further, the laser emitting device comprises a laser and a beam expander which are sequentially arranged; the laser is electrically connected with the processing module; the beam expander is used for expanding the laser beam emitted by the laser.
Further, the laser processing system further includes: the wave front detector is electrically connected with the processing module; the wavefront sensor is adapted to perform wavefront measurements on the beam before entering the beam shaper; the processing module is suitable for controlling the phase programmable device to correct according to the wave front data measured by the wave front detector so as to output Gaussian beams after phase correction.
Further, a plurality of reflecting mirrors are arranged between the phase programmable device and the galvanometer.
Further, the phase programmable device includes: a liquid crystal spatial light modulator, a DMD spatial light modulator; the beam shaper comprises: flat top light shaper, multi-focal shaper, circular ring shaper.
In yet another aspect, the present invention further provides a laser processing method, including: the laser emitting device emits laser beams; the phase programmable device processes the laser beam; the beam shaper modulates the output beam; focusing the laser beam output by the phase programmable device by a field lens to obtain a shaping light spot on a processing surface; scanning the processing surface by using a vibrating mirror; the phase programmable device is suitable for correcting the shaping light spot scanned to the corresponding position in the field lens breadth according to the scanning position of the galvanometer.
Further, the beam shaping laser processing method further includes: the phase programmable device corrects the light beam according to the wave front data of the light beam before entering so as to output Gaussian light beam after phase correction.
In yet another aspect, the present invention further provides a field lens format shaping flare correction model, including:
G 0 *T*F(x,y)*δ(x,y)＝H 0 ；
wherein G is 0 For an ideal gaussian beam model, x represents the convolution, T is the transfer function obtained by the optical model of the beam shaper, G 0 * T is the diffraction beam function before entering the field lens, F (x, y) is the transfer function obtained by the optical model of the field lens, delta (x, y) is the correction function input to the phase programmable machine, and (x, y) is the position scanned into the field lens breadth.
The correction method for the shaping light spot of the laser processing system, the laser processing method and the phase programmable device of the correction model have the advantages that the shaping light spot at a certain position in the breadth of the field lens can be corrected in real time when the vibrating mirror scans the position, so that the ideal uniform shaping light spot can be obtained, and the ideal shaping light spot can be achieved for the whole breadth of the field lens.
Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and drawings.
In order to make the above objects, features and advantages of the present invention more comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a prior art field lens based conventional beam shaping laser processing system;
FIG. 2 is a field lens format focus size distribution diagram;
FIG. 3 is a uniform plano-top light obtained by a beam shaper through a plano-convex lens;
FIG. 4 is a graph of the position flat top light distribution obtained by the beam shaper through the field lens;
FIG. 5 is a schematic diagram of a beam shaping laser processing system according to an embodiment of the present invention;
fig. 6 is a wavefront gray scale map acquired by a wavefront sensor.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The first embodiment of the invention provides a shaping facula correction method of a laser processing system, which comprises the following steps: obtaining an ideal Gaussian beam model G 0 The method comprises the steps of carrying out a first treatment on the surface of the Acquiring a transfer function T through an optical model of the beam shaper; calculating incidenceDiffraction beam function G in front of field lens 0 * T is a T; acquiring a transfer function F (x, y) through an optical model of a field lens; through G 0 *T*F(x,y)*δ(x,y)＝H 0 Solving a correction function delta (x, y), wherein H 0 As an ideal shaping light spot distribution function, the shaping light spot is defined according to the light field distribution of the shaping light spot which is specifically required, and the shaping light spot can be flat top light, multi-focus, circular ring and the like; * Representing a convolution; and acquiring a gray level diagram corresponding to the correction function delta (x, y), and inputting the gray level diagram into a phase programmable device to correct the shaping light spot scanned to the position (x, y) in the field lens breadth.
In some application scenarios, it is difficult to make the wavefront of the actual output beam of the laser undistorted, and the wavefront is further distorted after passing through devices such as a beam expander of the external optical path. While the beam shaper of the diffraction optical type is designed according to the undistorted ideal Gaussian beam incidence condition, if the wave front of the input beam is distorted, the effect of finally obtaining the shaped light spot is affected, and the light field distribution and the shape deviate from the design.
In this embodiment, preferably, the method for correcting a shaping flare of the laser processing system further includes: correcting distortion of the light beam before entering the beam shaper; the method for correcting distortion of the light beam before entering the light beam shaper comprises the following steps: wave front measurement is carried out on the light beam before entering the beam shaper through the wave front detector so as to obtain a wave front distribution gray level diagram; acquiring a wavefront distortion correction gray scale map according to the wavefront distribution gray scale map; the wavefront distortion correction gray scale map is input to a phase programmable to be corrected.
In one application scenario, the laser emits an initial gaussian beam, which after passing through some elements (e.g., beam expander, power regulator, etc.), can be used to make wavefront measurements on the beam before it enters the beam shaper; then, a wavefront distortion correction gray scale map is calculated through the obtained wavefront distribution gray scale map (see fig. 6), the wavefront distortion correction gray scale map is input into a phase programmable device for correction, and then a Gaussian beam with corrected phase is output, so that the Gaussian beam is more approximate to an ideal Gaussian beam; the Gaussian beam after phase correction enters a beam shaper, and ideal shaping light spots can be obtained on the focal plane of the lens theoretically; the phase programmable device may be, but is not limited to, a liquid crystal spatial light modulator, a DMD spatial light modulator, and the beam shaper may be, but is not limited to, a flattop light shaper, a multi-focal shaper, a circular ring shaper.
However, for the galvanometer and the field lens scanning system, the conventional field lens in industry is designed to focus the Gaussian beam as uniformly as possible on the whole breadth, but due to the existence of aberration, the focusing light spots at all positions on the breadth always have differences, so that the light beam modulated by the beam shaper is focused on the light spots at different positions on the breadth through the field lens and is not ideal shaping light spot (see fig. 3 and 4), namely, the different positions on the breadth of the field lens correspond to a transfer function F (x, y);
ideal Gaussian beam G 0 Focusing by a field lens, and obtaining a beam shaping light spot G on the breadth 0 * T is F (x, y), and the ideal shaping light spot distribution function is set as H 0 G due to aberration of field lens 0 * T.F (x, y) and H 0 With a certain deviation, which can be described by delta (x, y), and by G 0 *T*F(x,y)*δ(x,y)＝H 0 The correction function delta (x, y) can be obtained, a gray level diagram corresponding to the correction function delta (x, y) is obtained through calculation by a calculation program, and the gray level diagram is input into a phase programmable device so as to correct the shaping light spot scanned to the position (x, y) in the field lens breadth in real time; for example, when scanning to a certain position of the field lens web, e.g. (x) 0 ，y 0 ) The phase programmable device loads the corresponding satisfying G 0 *T*F(x 0 ,y 0 )*δ(x 0 ,y 0 )＝H 0 Delta (x) 0 ,y 0 ) The value can be adjusted to an ideal shaping light spot at the position, and the ideal and uniform shaping light spot H can be obtained for the whole field lens breadth 0 。
In this embodiment, the optical model acquisition transfer function T of the beam shaper may be acquired from the beam shaper designer; the optical model acquisition transfer function F (x, y) of the field lens can be acquired from the field lens designer.
On the basis of the above embodiments, referring to fig. 2, a second inventive embodiment of the present invention provides a laser processing system including: the laser device comprises a laser emitting device, a phase programmable device, a beam shaper, a galvanometer, a field lens and a processing module which are sequentially arranged; the laser emission device, the phase programmable device and the galvanometer are electrically connected with the processing module; the processing module is suitable for controlling the phase programmable device to correct the shaping light spot scanned to the corresponding position in the field lens breadth according to the scanning position of the galvanometer.
In this embodiment, the phase programmable device may correct the light spot at a certain position in the field lens format when the galvanometer scans the position to obtain an ideal shaping light spot, so that the whole format of the field lens can reach the ideal shaping light spot.
In this embodiment, optionally, the laser emitting device includes a laser, a beam expander, and a power regulator, which are sequentially disposed; the laser is electrically connected with the processing module; the beam expander is used for expanding the laser beam emitted by the laser; the power regulator is used for regulating the power of the beam after beam expansion.
In some application scenarios, conventional industrial lasers, due to minor imperfections in the optical element itself, the effects of heat and mounting and fixing processes on the element, cause some distortion in the wavefront of the laser output beam. The wavefront quality of the light beam is further degraded by the external optical path components such as beam expanders and power regulators due to optical design, lens processing and assembly defects. Therefore, the light beam entering the beam shaper has a certain deviation from an ideal single-mode Gaussian light beam, the energy distribution of the finally shaped light spot is uneven, the shape of the light spot also becomes irregular, and the light spot deviates from the designed shaped light spot, so that the actual application effect is affected.
Thus, in this embodiment, the laser processing system further includes: the wave front detector is electrically connected with the processing module; the wavefront sensor is adapted to perform wavefront measurements on the beam before entering the beam shaper; the processing module is suitable for controlling the phase programmable device to correct according to the wave front data measured by the wave front detector so as to output Gaussian beams after phase correction; the specific correction method can be referred to the above method for correcting distortion of the light beam before entering the beam shaper, and will not be described herein.
In this embodiment, optionally, a plurality of mirrors are disposed between the phase programmable device and the galvanometer.
In this embodiment, the processing module may be a PC.
On the basis of the foregoing embodiments, a third embodiment of the present invention provides a laser processing method, including: the laser emitting device emits laser beams; the phase programmable device processes the laser beam; the beam shaper modulates the output beam; focusing the laser beam output by the phase programmable device by a field lens to obtain a shaping light spot on a processing surface; scanning the processing surface by using a vibrating mirror; the phase programmable device is suitable for correcting the shaping light spot scanned to the corresponding position in the field lens breadth according to the scanning position of the galvanometer.
In this embodiment, optionally, the laser processing method further includes: the phase programmable device corrects the light beam according to the wave front data of the light beam before entering the light beam shaper so as to output a Gaussian light beam after phase correction.
On the basis of the above embodiment, a fourth embodiment of the present invention provides a field lens web-shaping flare correction model, including:
G 0 *T*F(x,y)*δ(x,y)＝H 0 ；
wherein G is 0 T is a transfer function obtained by an optical model of DOE, G is a Gaussian beam after phase correction 0 * T is the diffraction beam function before entering the field lens, F (x, y) is the transfer function obtained by the optical model of the field lens, delta (x, y) is the correction function input to the phase programmable machine, and (x, y) is the position scanned into the field lens breadth.
The following is an example of application of a flat-top laser processing system
In a specific application scenario for laser annealing of semiconductors, the main components and parameters involved in the laser processing system are as follows:
1. a laser: wavelength 532nm, power 40W, repetition frequency 20kHz, pulse width 10ns, output light spot 0.8mm;
2. beam expander: 2-8 times of adjustable;
3. phase programmable: a DMD spatial light modulator;
4. beam shaper: the incident light spot is 6mm, the flat-topped light is square, and the size of the light spot is 100 um@300mm;
5. a field lens: focal length 300mm, breadth 160 x 160mm;
6. wavefront sensor: a wavefront analyzer of model SID4, brand name of PHASICS, france;
the specific implementation mode of the invention is as follows:
1. testing the wavefront of the laser beam after passing through the beam expander by using a wavefront analyzer, as shown in fig. 6;
2. the wave front distortion correction gray level diagram is obtained through calculation of the obtained wave front data, the wave front distortion correction gray level diagram is input into the spatial light modulator for correction, gaussian beams after phase correction are output, so that wave front distribution is uniform and the wave front distribution is free of distortion;
3. the transfer function T is obtained by an optical model of the beam shaper (which can be obtained from a beam shaper designer), and the diffraction beam function of the incident field lens is G 0 *T；
4. The transfer function F (x, y) is obtained by an optical model of the field lens (which can be obtained by the field lens designer), and delta (x, y) is calculated by a computer matlab program such that G 0 *T*F(x,y)*δ(x,y)＝H 0 ；
5. Inputting the gray pattern corresponding to delta (x, y) into the spatial light modulator, and synchronizing with the galvanometer scanning process, when the field breadth is scanned to a certain position (x 0 ，y 0 ) When the spatial light modulator is loaded with the corresponding delta (x 0 ,y 0 ) Value of G 0 *T*F(x 0 ,y 0 )*δ(x 0 ,y 0 )＝H 0 So that (x) 0 ，y 0 ) The position is an ideal uniform flat-top light, thereby realizing that the whole scene breadth can obtain the ideal uniform flat-top light H 0 。
The components (components not illustrating specific structures) selected in the application are all common standard components or components known to those skilled in the art, and the structures and principles of the components are all known to those skilled in the art through technical manuals or through routine experimental methods.
In the description of embodiments of the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the several embodiments provided in this application, it should be understood that the disclosed systems, devices, and methods may be implemented in other manners. The above-described apparatus embodiments are merely illustrative, for example, the division of the units is merely a logical function division, and there may be other manners of division in actual implementation, and for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some communication interface, device or unit indirect coupling or communication connection, which may be in electrical, mechanical or other form.
The units described as separate units may or may not be physically separate, and units shown as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
In addition, each functional unit in the embodiments of the present invention may be integrated in one processing unit, or each unit may exist alone physically, or two or more units may be integrated in one unit.
With the above-described preferred embodiments according to the present invention as an illustration, the above-described descriptions can be used by persons skilled in the relevant art to make various changes and modifications without departing from the scope of the technical idea of the present invention. The technical scope of the present invention is not limited to the description, but must be determined according to the scope of claims.
Claims (10)
1. A method for correcting a shaped spot of a laser processing system, comprising:
obtaining an ideal Gaussian beam model G 0 ；
Acquiring a transfer function T through an optical model of the beam shaper;
calculating the diffraction beam function G before the incident field lens 0 *T；
Acquiring a transfer function F (x, y) through an optical model of a field lens;
through G 0 *T*F(x,y)*δ(x,y)＝H 0 Solving a correction function delta (x, y), wherein H 0 As an ideal shaped light spot distribution function, the convolution is expressed;
and acquiring a gray level diagram corresponding to the correction function delta (x, y), and inputting the gray level diagram into a phase programmable device to correct the shaping light spot scanned to the position (x, y) in the field lens breadth.
2. The method of shaping spot correction according to claim 1, further comprising:
correcting distortion of the light beam before entering the beam shaper;
the method for correcting distortion of the light beam before entering the light beam shaper comprises the following steps:
wave front measurement is carried out on the light beam before entering the beam shaper through the wave front detector so as to obtain a wave front distribution gray level diagram;
acquiring a wavefront distortion correction gray scale map according to the wavefront distribution gray scale map;
the wavefront distortion correction gray scale map is input to a phase programmable to be corrected.
3. A laser processing system, comprising:
the laser device comprises a laser emitting device, a phase programmable device, a beam shaper, a galvanometer, a field lens and a processing module which are sequentially arranged;
the laser emission device, the phase programmable device and the galvanometer are electrically connected with the processing module;
the processing module is suitable for controlling the phase programmable device to correct the shaping light spot scanned to the corresponding position in the field lens breadth according to the scanning position of the galvanometer.
4. A laser processing system as set forth in claim 3, wherein,
the laser emitting device comprises a laser and a beam expander which are sequentially arranged;
the laser is electrically connected with the processing module;
the beam expander is used for expanding the laser beam emitted by the laser.
5. The laser processing system of claim 3, further comprising:
the wave front detector is electrically connected with the processing module;
the wavefront sensor is adapted to perform wavefront measurements on the beam before entering the beam shaper;
the processing module is suitable for controlling the phase programmable device to correct according to the wave front data measured by the wave front detector so as to output Gaussian beams after phase correction.
6. A laser processing system as set forth in claim 3, wherein,
a plurality of reflecting mirrors are arranged between the phase programmable device and the galvanometer.
7. A laser processing system as set forth in claim 3, wherein,
the phase programmable device includes: a liquid crystal spatial light modulator, a DMD spatial light modulator;
the beam shaper comprises: flat top light shaper, multi-focal shaper, circular ring shaper.
8. A laser processing method, comprising:
the laser emitting device emits laser beams;
the phase programmable device processes the laser beam;
the beam shaper modulates the output beam;
focusing the laser beam output by the phase programmable device by a field lens to obtain a shaping light spot on a processing surface;
scanning the processing surface by using a vibrating mirror; wherein the method comprises the steps of
The phase programmable device is suitable for correcting the shaping light spot scanned to the corresponding position in the field lens breadth according to the scanning position of the galvanometer.
9. The laser processing method according to claim 1, characterized by further comprising:
the phase programmable device corrects the light beam according to the wave front data of the light beam before entering the light beam shaper so as to output a Gaussian light beam after phase correction.
10. A field lens web shaping spot correction model, comprising:
G 0 *T*F(x,y)*δ(x,y)＝H 0 ；
wherein G is 0 For an ideal gaussian beam model, x represents the convolution, T is the transfer function obtained by the optical model of the beam shaper, G 0 * T is the diffraction beam function before entering the field lens, F (x, y) is the transfer function obtained by the optical model of the field lens, delta (x, y) is the correction function input to the phase programmable machine, and (x, y) is the position scanned into the field lens breadth.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117182358A (en) * | 2023-11-02 | 2023-12-08 | 无锡超通智能制造技术研究院有限公司 | Fine metal mask laser processing device and processing method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117182358A (en) * | 2023-11-02 | 2023-12-08 | 无锡超通智能制造技术研究院有限公司 | Fine metal mask laser processing device and processing method thereof |
| CN117182358B (en) * | 2023-11-02 | 2024-01-26 | 无锡超通智能制造技术研究院有限公司 | Fine metal mask laser processing device and processing method thereof |
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