CN113938051A - Two-parallel bending vibrator composite actuation stepping piezoelectric driver and working method thereof - Google Patents

Two-parallel bending vibrator composite actuation stepping piezoelectric driver and working method thereof Download PDF

Info

Publication number
CN113938051A
CN113938051A CN202111155880.6A CN202111155880A CN113938051A CN 113938051 A CN113938051 A CN 113938051A CN 202111155880 A CN202111155880 A CN 202111155880A CN 113938051 A CN113938051 A CN 113938051A
Authority
CN
China
Prior art keywords
bending
vibrator
piezoelectric vibrator
piezoelectric
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN202111155880.6A
Other languages
Chinese (zh)
Other versions
CN113938051B (en
Inventor
王良
王鹤然
郭丹丹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northeast Electric Power University
Original Assignee
Northeast Dianli University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Northeast Dianli University filed Critical Northeast Dianli University
Priority to CN202111155880.6A priority Critical patent/CN113938051B/en
Publication of CN113938051A publication Critical patent/CN113938051A/en
Application granted granted Critical
Publication of CN113938051B publication Critical patent/CN113938051B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/0015Driving devices, e.g. vibrators using only bending modes
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075Electrical details, e.g. drive or control circuits or methods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/026Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06Drive circuits; Control arrangements or methods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods

Abstract

The invention relates to a two-parallel bending vibrator composite actuating stepping piezoelectric driver, which comprises: the first bending piezoelectric vibrator, the mounting seat, the V-shaped connecting rod, the rotor, the second bending piezoelectric vibrator and the sliding pair work alternately by the aid of the two parallel bending vibrators, large-stroke stepping motion output is realized, the motion stroke is large, the rotor cannot move back, and output characteristics of the rotor are effectively improved; in the working method, the large-stroke stepping motion output can be realized in the actuating process, and the linear rotor can realize leftward or rightward motion and the rotary rotor can realize clockwise or counterclockwise motion; the output characteristic of the rotor is effectively improved, the rotor has the advantages of large stroke, no displacement backspacing phenomenon, few piezoelectric ceramic elements, few excitation signals and simple control system.

Description

Two-parallel bending vibrator composite actuation stepping piezoelectric driver and working method thereof
Technical Field
The invention relates to the technical field of piezoelectric drive, in particular to a compound actuation stepping piezoelectric driver with two parallel bending vibrators and a working method thereof.
Background
The piezoelectric driver utilizes the inverse piezoelectric effect of a piezoelectric ceramic material, excites the piezoelectric ceramic-metal composite stator to generate corresponding vibration or deformation by applying an electric signal in a specific form, further realizes mechanical motion output by the friction action between the stator and the rotor, and has the outstanding characteristics of no electromagnetic interference, direct drive, power failure self-locking and the like compared with an electromagnetic motor. According to different vibration states during working, the conventional piezoelectric drivers can be mainly divided into a resonance type and a non-resonance type, wherein the non-resonance type piezoelectric driver has the technical advantages of high resolution, small abrasion and the like.
The non-resonance type piezoelectric actuator mainly comprises three types, namely a direct-drive type piezoelectric actuator, an inertia type piezoelectric actuator and an inchworm type piezoelectric actuator, wherein the motion stroke of the direct-drive type piezoelectric actuator is limited by the maximum deformation of a piezoelectric ceramic element, is usually in the order of mum, and is limited in application in a large-stroke occasion; the inertial type piezoelectric driver and the inchworm type piezoelectric driver have the advantage of large movement stroke, but the inertial type piezoelectric driver usually causes the motion rollback phenomenon of the rotor in the working process due to the actuation principle of the inertial type piezoelectric driver, so that the output characteristic is degraded, while the inchworm type piezoelectric driver usually comprises at least three piezoelectric ceramic elements, so that the required excitation signals are more, the requirement on a driving power supply is high, and the integral structure and the control system are more complex.
Disclosure of Invention
Aiming at the technical problems in the prior art, the invention designs the two parallel bending vibrators for compositely actuating the stepping piezoelectric driver, and the two parallel bending vibrators are compositely actuated to actuate the stepping piezoelectric driver, so that the large-stroke stepping motion output can be realized in the actuating process, the output characteristic of the rotor can be effectively improved, and the output step pitch of the rotor is increased.
One technical scheme for realizing the invention is as follows: two parallel bending vibrator composite actuation marching type piezoelectric actuator, characterized by, it includes: first crooked piezoelectric vibrator 1, mount pad 2, V-arrangement connecting rod 3, active cell 4, the crooked piezoelectric vibrator 6 of second, slide pair 7 establish drive foot 3.1 in the intersection of two down tube of V-arrangement connecting rod 3, drive foot 3.1 appearance be the semi-cylindrical surface two down tube tip of V-arrangement connecting rod 3 set up the same connecting seat 3.3 respectively, first crooked piezoelectric vibrator 1 and the crooked piezoelectric vibrator 6 of second one end link firmly with connecting seat 3.3 respectively, first crooked piezoelectric vibrator 1 and the crooked piezoelectric vibrator 6 parallel arrangement of second, the other end of first crooked piezoelectric vibrator 1 and the crooked piezoelectric vibrator 6 of second link firmly with mount pad 2 slide pair 7 and drive foot 3.1 between set up active cell 4, the upper and lower track of active cell 4 contact slide pair 7 and drive foot 3.1 respectively.
Further, the first bending piezoelectric vibrator 1 or the second bending piezoelectric vibrator 6 includes: the piezoelectric vibrator comprises an even number of pieces of square piezoelectric ceramics 1.1 and a vibrator end cover 1.2, wherein the even number of pieces of square piezoelectric ceramics 1.1 comprise a left polarization subarea and a right polarization subarea which have opposite polarization directions.
Further, the V-shaped link 3 includes: the driving foot 3.1, the flexible hinge 3.2 and the connecting seat 3.3, and the flexible hinge 3.2 is respectively arranged on the two inclined rods of the V-shaped connecting rod 3.
Furthermore, the sliding pair 7 is a guide rail sliding block.
Further, the mover 4 may be a linear mover or a rotary mover.
The other technical scheme for realizing the invention is as follows: the working method of the two parallel bending vibrators combined actuation stepping piezoelectric driver is characterized by comprising the following steps:
1) the second bending piezoelectric vibrator 6 applies negative voltage and bends rightwards, meanwhile, the first bending piezoelectric vibrator 1 applies positive voltage and bends leftwards, and the driving foot 3.1 moves to the lowest point in the vertical direction to press the rotor 4;
2) the voltage of the second bending piezoelectric vibrator 6 is kept unchanged, and meanwhile, the first bending piezoelectric vibrator 1 applies negative voltage to bend rightwards, and the driving foot 3.1 moves to the limit position on the right side in the horizontal direction;
3) the second bending piezoelectric vibrator 6 applies positive voltage to bend leftwards, meanwhile, the voltage of the first bending piezoelectric vibrator 1 keeps unchanged, and the driving foot 3.1 moves to the highest point in the vertical direction;
4) the voltage of the second bending piezoelectric vibrator 6 is kept unchanged, meanwhile, the first bending piezoelectric vibrator 1 applies positive voltage to bend leftwards, and the driving foot 3.1 moves to the left limit position in the horizontal direction;
5) the second bending piezoelectric vibrator 6 applies positive voltage to bend rightwards, meanwhile, the voltage of the first bending piezoelectric vibrator 1 is kept unchanged, and the driving foot 3-1 moves to the lowest point in the vertical direction;
6) the steps 2) to 5) are a complete driving process, and the steps 2) to 5) are repeated to realize the large-stroke step-by-step driving of the rotor 4 to the right.
The two parallel bending vibrators of the invention are combined to actuate the stepping piezoelectric driver, and the beneficial effects are as follows:
the two parallel bending vibrators of the two parallel bending vibrator composite actuating stepping piezoelectric driver can realize large-stroke stepping motion output through the actuating process, and have the outstanding characteristics of large motion stroke, no motion rollback phenomenon of a rotor, effective improvement of the output characteristic of the rotor, few piezoelectric ceramic elements, few excitation signals, simple integral structure, simple control system and the like.
Drawings
FIG. 1 is a front view of a two parallel bending vibrator compound actuation step piezoelectric driver;
FIG. 2 is a schematic diagram of excitation signals required by the operation of a two-parallel bending vibrator composite actuation stepping piezoelectric driver;
in the figure: 1. the piezoelectric vibrator comprises a first bending piezoelectric vibrator, 1.1 even number pieces of square piezoelectric ceramics, 1.2 vibrator end covers, 2 an installation seat, 3V-shaped connecting rods, 3.1 driving feet, 3.2 flexible hinges, 3.3 connecting seats, 4 movers, 5 bolts, 6 second bending piezoelectric vibrators and 7 sliding pairs.
Detailed Description
The present invention will be described in further detail with reference to the accompanying fig. 1-2 and the embodiments described herein, which are provided for illustration only and are not intended to limit the invention.
As shown in fig. 1, the two-parallel bending vibrator composite actuation stepping piezoelectric driver comprises two bending piezoelectric vibrators 1 arranged in parallel, a mounting base 2, a V-shaped connecting rod 3 and a rotor 4; the bending piezoelectric vibrator 1 comprises an even number of square piezoelectric ceramics 1.1 and a vibrator end cover 1.2, the even number of square piezoelectric ceramics 1.1 comprises a left polarization subarea and a right polarization subarea which have opposite polarization directions, so that when electric signal excitation is applied, one side subarea becomes thin while the other side subarea becomes thick, the whole square piezoelectric ceramics 1.1 generates bending deformation, the polarization subareas corresponding to two adjacent square piezoelectric ceramics 1.1 have opposite polarization directions, so that the whole bending piezoelectric vibrator generates bending deformation when the same signal excitation is applied, and a through hole is formed in the center position of the square piezoelectric ceramics; the top and the bottom of the vibrator end cover 1.2 are respectively provided with a threaded hole; the mounting base 2 is provided with three through holes along the front and back directions thereof for realizing the integral mounting and fixing of the piezoelectric driver, and is provided with two through holes along the up and down directions thereof; the bolt 5 penetrates through holes in the vertical direction of the mounting seat 2 and through holes of even number of pieces of square piezoelectric ceramics 1.1 to be in threaded connection with the vibrator end cover 1.2, so that clamping and mounting of the even number of pieces of square piezoelectric ceramics 1.1 are realized, and the bending piezoelectric vibrator 1 is formed; the V-shaped connecting rod 3 is characterized in that through holes are formed in connecting seats 3.3 at the tops of two sides of the V-shaped connecting rod 3, bolts penetrate through the through holes to be in threaded connection with a vibrator end cover 1.2, installation of the V-shaped connecting rod is achieved, a driving foot 3.1 is arranged at the intersection of two inclined rods of the V-shaped connecting rod 3, the driving foot 3.1 is in contact with a rotor 4, a flexible hinge 3.2 is arranged on the two inclined rods of the V-shaped connecting rod 3 close to the intersection of the two inclined rods, the angle of the intersection of the V-shaped connecting rod 3 is larger than 0 degree and smaller than 180 degrees, a rotor 4 is arranged between the sliding pair 7 and the driving foot 3.1, upper and lower tracks of the rotor 4 are in contact with the sliding pair 7 and the driving foot 3.1 respectively, the rotor 4 is a linear rotor or a rotary rotor, linear or rotary motion output is correspondingly achieved, the driving foot 3.1 adopts an arc surface, the linear contact is in line contact with the rotor 4, and the sliding pair 7 is a guide rail slider.
As shown in fig. 2, the linear mover moves leftwards or rightwards and the rotary mover moves clockwise or anticlockwise, wherein the operation method of the linear mover is illustrated as the rightward movement,
a working method of a two-parallel bending vibrator composite actuation stepping piezoelectric driver comprises the following steps:
1) (0-1T/4): the second bending piezoelectric vibrator 6 applies negative voltage and bends rightwards, meanwhile, the first bending piezoelectric vibrator 1 applies positive voltage and bends leftwards, and the driving foot 3.1 moves to the lowest point in the vertical direction to press the rotor 4;
2) (1T/4-2T/4): the voltage of the second bending piezoelectric vibrator 6 is kept unchanged, and meanwhile, the first bending piezoelectric vibrator 1 applies negative voltage to bend rightwards, and the driving foot 3.1 moves to the limit position on the right side in the horizontal direction;
3 (2T/4-3T/4)): the second bending piezoelectric vibrator 6 applies positive voltage to bend leftwards, meanwhile, the voltage of the first bending piezoelectric vibrator 1 keeps unchanged, and the driving foot 3.1 moves to the highest point in the vertical direction;
4) (3T/4-T): the voltage of the second bending piezoelectric vibrator 6 is kept unchanged, meanwhile, the first bending piezoelectric vibrator 1 applies positive voltage to bend leftwards, and the driving foot 3.1 moves to the left limit position in the horizontal direction;
5) (T-5T/4): the second bending piezoelectric vibrator 6 applies positive voltage to bend rightwards, meanwhile, the voltage of the first bending piezoelectric vibrator 1 is kept unchanged, and the driving foot 3-1 moves to the lowest point in the vertical direction;
6) the steps 2) to 5) are a complete driving process, and the steps 2) to 5) are repeated to realize the large-stroke step-by-step driving of the rotor 4 to the right.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and improvements can be made without departing from the principle of the present invention, and these modifications and improvements should also be considered as the protection scope of the present invention.

Claims (6)

1. Two parallel bending vibrator composite actuation marching type piezoelectric actuator, characterized by, it includes: a first bending piezoelectric vibrator (1), a mounting seat (2), a V-shaped connecting rod (3), a mover (4), a second bending piezoelectric vibrator (6) and a sliding pair (7), a driving foot (3.1) is arranged at the intersection of the two inclined rods of the V-shaped connecting rod (3), the end parts of the two inclined rods of the V-shaped connecting rod (3) are respectively provided with the same connecting seat (3.3), one end of the first bending piezoelectric vibrator (1) and one end of the second bending piezoelectric vibrator (6) are fixedly connected with the connecting seat (3.3) respectively, the first bending piezoelectric vibrator (1) and the second bending piezoelectric vibrator (6) are arranged in parallel, the other ends of the first bending piezoelectric vibrator (1) and the second bending piezoelectric vibrator (6) are fixedly connected with the mounting seat (2), a rotor (4) is arranged between the sliding pair (7) and the driving foot (3.1), the upper track and the lower track of the rotor (4) are respectively in contact with the sliding pair (7) and the driving foot (3.1).
2. The two-parallel bending vibrator composite actuation stepping piezoelectric driver according to claim 1, wherein the first bending piezoelectric vibrator (1) or the second bending piezoelectric vibrator (6) comprises: the piezoelectric vibrator comprises an even number of pieces of square piezoelectric ceramics (1.1) and a vibrator end cover (1.2), wherein the even number of pieces of square piezoelectric ceramics (1.1) comprise a left polarization subarea and a right polarization subarea which have opposite polarization directions.
3. The two-parallel bending vibrator composite actuation stepping piezoelectric driver according to claim 1, wherein the V-shaped connecting rod (3) comprises: the driving foot (3.1), the flexible hinge (3.2) and the connecting seat (3.3), wherein the two inclined rods of the V-shaped connecting rod (3) are respectively provided with the flexible hinge (3.2).
4. The two-parallel bending vibrator composite actuation stepping piezoelectric driver as claimed in claim 1, wherein the sliding pair (7) is a guide rail slider.
5. Two parallel bending vibrator compound actuation step piezoelectric driver according to claim 1, claim 2, claim 3 or claim 4, wherein the mover (4) can be a linear mover or a rotary mover.
6. The working method of the two parallel bending vibrator composite actuating stepping piezoelectric driver as claimed in claim 1, characterized in that it comprises the following steps:
1) the second bending piezoelectric vibrator 6 applies negative voltage and bends rightwards, meanwhile, the first bending piezoelectric vibrator 1 applies positive voltage and bends leftwards, and the driving foot (3.1) moves to the lowest point in the vertical direction to press the rotor 4;
2) the voltage of the second bending piezoelectric vibrator 6 is kept unchanged, meanwhile, the first bending piezoelectric vibrator 1 applies negative voltage and bends rightwards, and the driving foot (3.1) moves to the limit position on the right side in the horizontal direction;
3) the second bending piezoelectric vibrator 6 applies positive voltage to bend leftwards, meanwhile, the voltage of the first bending piezoelectric vibrator 1 keeps unchanged, and the driving foot (3.1) moves to the highest point in the vertical direction;
4) the voltage of the second bending piezoelectric vibrator 6 is kept unchanged, meanwhile, the first bending piezoelectric vibrator 1 applies positive voltage to bend leftwards, and the driving foot (3.1) moves to the left limit position in the horizontal direction;
5) the second bending piezoelectric vibrator 6 applies positive voltage to bend rightwards, meanwhile, the voltage of the first bending piezoelectric vibrator 1 is kept unchanged, and the driving foot (3.1) moves to the lowest point in the vertical direction;
6) the step 2) to the step 5) are a complete driving process, and the step 2) to the step 5) is repeated to realize the large-stroke step-by-step driving of the rotor (4) to the right.
CN202111155880.6A 2021-09-29 2021-09-29 Two-parallel bending vibrator compound actuation stepping piezoelectric driver and working method thereof Active CN113938051B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111155880.6A CN113938051B (en) 2021-09-29 2021-09-29 Two-parallel bending vibrator compound actuation stepping piezoelectric driver and working method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111155880.6A CN113938051B (en) 2021-09-29 2021-09-29 Two-parallel bending vibrator compound actuation stepping piezoelectric driver and working method thereof

Publications (2)

Publication Number Publication Date
CN113938051A true CN113938051A (en) 2022-01-14
CN113938051B CN113938051B (en) 2023-09-29

Family

ID=79277335

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111155880.6A Active CN113938051B (en) 2021-09-29 2021-09-29 Two-parallel bending vibrator compound actuation stepping piezoelectric driver and working method thereof

Country Status (1)

Country Link
CN (1) CN113938051B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE545844C2 (en) * 2022-10-17 2024-02-20 Precibeo Ab A drive element with two separate monolithic actuators for an electromechanical motor

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD145830A1 (en) * 1979-09-03 1981-01-07 Reinhard Mettke STEPPER DRIVE WITH PIEZO BENDING STRIPS AND METHOD FOR CONTROLLING
JPH0446253A (en) * 1990-06-06 1992-02-17 Uchi Nippon Syst:Kk Actuator mechanism having displacement enlarging and power assisting function
CN101262182A (en) * 2008-04-15 2008-09-10 华南农业大学 Compound vibrator line ultrasonic electromotor
CN101694974A (en) * 2009-10-16 2010-04-14 南京航空航天大学 Tower-shaped linear ultrasonic motor and electric excitation mode
CN101697460A (en) * 2009-10-28 2010-04-21 南京航空航天大学 Two-way single-mode ramp type tower-shaped linear ultrasonic motor and electric excitation method
CN104485837A (en) * 2014-12-11 2015-04-01 南京航空航天大学 Composite vibrator standing wave ultrasonic motor and excitation method thereof
CN105048863A (en) * 2015-07-31 2015-11-11 南京航空航天大学 Bending vibration mode-based linear ultrasonic motor and electric excitation method thereof
CN106953539A (en) * 2017-04-14 2017-07-14 哈尔滨工业大学 The vertical accurate piezoelectric actuator of curved compound creeping motion type and its motivational techniques
CN107124120A (en) * 2017-06-16 2017-09-01 吉林大学 A kind of single butterfly stator piezoelectricity straight line driver
CN109889085A (en) * 2019-04-09 2019-06-14 哈尔滨工业大学 The ultraprecise three-freedom planar motion platform and its motivational techniques of Piezoelectric Driving
CN111711381A (en) * 2020-06-16 2020-09-25 武汉大学 Stick-slip piezoelectric driver for realizing bidirectional driving and control method
CN112542959A (en) * 2020-11-25 2021-03-23 上海工程技术大学 Single-phase excitation bidirectional movement miniature ultrasonic motor and method

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD145830A1 (en) * 1979-09-03 1981-01-07 Reinhard Mettke STEPPER DRIVE WITH PIEZO BENDING STRIPS AND METHOD FOR CONTROLLING
JPH0446253A (en) * 1990-06-06 1992-02-17 Uchi Nippon Syst:Kk Actuator mechanism having displacement enlarging and power assisting function
CN101262182A (en) * 2008-04-15 2008-09-10 华南农业大学 Compound vibrator line ultrasonic electromotor
CN101694974A (en) * 2009-10-16 2010-04-14 南京航空航天大学 Tower-shaped linear ultrasonic motor and electric excitation mode
CN101697460A (en) * 2009-10-28 2010-04-21 南京航空航天大学 Two-way single-mode ramp type tower-shaped linear ultrasonic motor and electric excitation method
CN104485837A (en) * 2014-12-11 2015-04-01 南京航空航天大学 Composite vibrator standing wave ultrasonic motor and excitation method thereof
CN105048863A (en) * 2015-07-31 2015-11-11 南京航空航天大学 Bending vibration mode-based linear ultrasonic motor and electric excitation method thereof
CN106953539A (en) * 2017-04-14 2017-07-14 哈尔滨工业大学 The vertical accurate piezoelectric actuator of curved compound creeping motion type and its motivational techniques
CN107124120A (en) * 2017-06-16 2017-09-01 吉林大学 A kind of single butterfly stator piezoelectricity straight line driver
CN109889085A (en) * 2019-04-09 2019-06-14 哈尔滨工业大学 The ultraprecise three-freedom planar motion platform and its motivational techniques of Piezoelectric Driving
CN111711381A (en) * 2020-06-16 2020-09-25 武汉大学 Stick-slip piezoelectric driver for realizing bidirectional driving and control method
CN112542959A (en) * 2020-11-25 2021-03-23 上海工程技术大学 Single-phase excitation bidirectional movement miniature ultrasonic motor and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE545844C2 (en) * 2022-10-17 2024-02-20 Precibeo Ab A drive element with two separate monolithic actuators for an electromechanical motor
SE2251213A1 (en) * 2022-10-17 2024-02-20 Precibeo Ab A drive element with two separate monolithic actuators for an electromechanical motor

Also Published As

Publication number Publication date
CN113938051B (en) 2023-09-29

Similar Documents

Publication Publication Date Title
US6806621B2 (en) Electroactive polymer rotary motors
US7456549B2 (en) Electroactive polymer motors
CN112383241B (en) Bidirectional inertia linear piezoelectric motor
CN1018126B (en) Piezo-electric motor
CN113938051A (en) Two-parallel bending vibrator composite actuation stepping piezoelectric driver and working method thereof
CN102361411B (en) Piezoelectric linear driver
CN1833351A (en) Piezoelectric electromechanical drive unit
CN115441769B (en) Linear-rotary two-degree-of-freedom piezoelectric actuator based on inertia driving
CN102185096A (en) Piezoelectric actuator and linear piezoelectric motor
CN106787935B (en) A kind of inertia non-resonant biped piezoelectric straight line actuator
CN110798094B (en) Piezoelectric linear precision driving device based on parasitic inertia principle
CN1592071A (en) Lever-arm displacement-increasing device
CN101051798A (en) Prism longitudinal bend composite vibrator linear supersonic motor
CN110768571A (en) Novel bionic creeping type piezoelectric precision driving device based on parasitic inertia principle
CN113131783B (en) Clamp-controlled inertia linear piezoelectric motor
US7161278B2 (en) Peristaltic electromechanical actuator
CN110912444A (en) Bionic creeping type piezoelectric actuator
CN112787544B (en) Staggered four-foot driving piezoelectric stepping linear motor
WO2013072811A1 (en) Piezoelectric actuation device
JP5740397B2 (en) Electromechanical motor
CN211127621U (en) Linear motor with precise driving and positioning functions
CN113938052B (en) Piezoelectric stick-slip driver based on two-stage lever amplifying mechanism
CN201022181Y (en) Piezoelectricity inertia stepping driving device
KR100683930B1 (en) Micro piezoelectric linear motor
CN110855179B (en) Creeping type piezoelectric precision driving device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant