CN113916001A - Optimized temperature control heating furnace body - Google Patents
Optimized temperature control heating furnace body Download PDFInfo
- Publication number
- CN113916001A CN113916001A CN202111281645.3A CN202111281645A CN113916001A CN 113916001 A CN113916001 A CN 113916001A CN 202111281645 A CN202111281645 A CN 202111281645A CN 113916001 A CN113916001 A CN 113916001A
- Authority
- CN
- China
- Prior art keywords
- furnace
- temperature
- heating area
- heating
- area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D11/00—Arrangement of elements for electric heating in or on furnaces
- F27D11/02—Ohmic resistance heating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D21/00—Arrangements of monitoring devices; Arrangements of safety devices
- F27D21/04—Arrangements of indicators or alarms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
- F27D2019/0003—Monitoring the temperature or a characteristic of the charge and using it as a controlling value
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Abstract
The invention discloses an optimized temperature control heating furnace body, which is provided with a furnace tube, wherein the furnace tube is divided into a plurality of temperature control areas along the axial direction, each temperature control area comprises an upper heating area, a lower heating area, a left heating area and a right heating area, the four heating areas are distributed in the radial upper direction, the lower direction, the left direction and the right direction of the furnace tube, a heater is correspondingly arranged in each heating area, the upper heater and the lower heater are in one group and are connected with a corresponding power adjusting module, the left heater and the right heater are in one group and are connected with a corresponding power adjusting module, a plurality of groups of external thermocouples are distributed on the periphery of the furnace tube, and each group of external thermocouples are in one-to-one correspondence with the temperature control areas and are respectively and correspondingly connected with the power adjusting modules. According to the invention, four heating areas, namely an upper heating area, a lower heating area, a left heating area and a right heating area are arranged in each temperature control area, the temperatures of the upper heating area, the lower heating area, the left heating area and the right heating area can be independently controlled, the accurate compensation function of a temperature field is realized, the temperature field in the pipe is compensated in a targeted manner, the temperature uniformity in the furnace body is improved, and the temperature uniformity of an overlong constant temperature area of a high-capacity device is better satisfied.
Description
Technical Field
The invention relates to the field of solar cell process equipment, in particular to an optimized temperature control heating furnace body.
Background
The solar photovoltaic cell is a novel cell which directly converts solar light energy into electric energy. Silicon-based silicon photovoltaic cells are commonly used today, including single crystal silicon, polycrystalline silicon, and amorphous silicon photovoltaic cells. In the preparation process of the solar cell, the silicon wafer needs to be subjected to the processes of texturing, diffusion, etching, coating, printing and the like in sequence, and a plurality of steps need to be completed in a heating environment in the preparation process, so that a heating furnace body, such as a diffusion process, needs to be used. The diffusion process is a core process in the preparation process of the solar cell, namely, a silicon wafer is placed into a diffusion furnace by taking a quartz boat as a carrier, and nitrogen and a diffusion source are introduced into the diffusion furnace at a certain temperature so as to diffuse and deposit PN junctions on the surface of the silicon wafer. With the increase of market demand, the production efficiency of silicon wafers needs to be improved, and high-capacity equipment is developed. The existing diffusion furnace equipment adopts the spiral winding arrangement of furnace wires in the length direction of a furnace tube, and adopts the integral temperature control, so that the temperature distribution of different areas in the furnace tube is uneven, the temperature control precision is poor, the technological indexes such as sheet resistance of silicon wafers are different, and particularly the uniformity of an overlong constant-temperature area of high-capacity equipment needs to be improved.
Disclosure of Invention
The applicant aims at the defects of uneven temperature distribution, poor temperature control precision, difference in silicon wafer process effect and the like caused by integral temperature control of the existing process furnace, and provides an optimized temperature control heating furnace body with a reasonable structure, which can realize the accurate compensation function of a temperature field, compensate the temperature field in a pipe in a targeted manner, improve the temperature uniformity in the furnace body, better meet the temperature uniformity of an overlong constant temperature area of high-capacity equipment and has excellent process effect.
The technical scheme adopted by the invention is as follows:
an optimized temperature control heating furnace body is provided with a furnace tube, the furnace tube is divided into a plurality of temperature control areas along the axial direction, each temperature control area comprises an upper heating area, a lower heating area, a left heating area and a right heating area, the four heating areas are distributed in the radial upper direction, the lower direction, the left direction and the right direction of the furnace tube, heaters are correspondingly arranged in each heating area, the upper heaters and the lower heaters are in one group and are connected with corresponding power adjusting modules, the left heaters and the right heaters are in one group and are connected with corresponding power adjusting modules, a plurality of groups of external thermocouples are distributed on the periphery of the furnace tube, and each group of external thermocouples are in one-to-one correspondence with the temperature control areas and are respectively connected with the power adjusting modules.
As a further improvement of the above technical solution:
the heater covers the stove silk of laying for the inner tube periphery of every heating zone, and the stove silk is along the axial straight line distribution of furnace tube.
The furnace wires are respectively positioned on the upper arc section, the lower arc section, the left arc section and the right arc section of the periphery of the inner tube, wherein the furnace wires in four directions are vertically symmetrical and horizontally symmetrical.
Each group of furnace wires is connected with an external power supply through a contact terminal.
The power adjusting module is a silicon controlled rectifier adjusting module.
A power conditioning module is a device having multiple independent channels or multiple independent electrical device modules.
Each group of the out-furnace thermocouples comprises vertical thermocouples and horizontal thermocouples, the vertical thermocouples and the horizontal thermocouples extend from the outer pipe to the inner pipe, the inner pipe is subjected to temperature detection, the vertical thermocouples are arranged in the vertical direction of the furnace tube, and the horizontal thermocouples are arranged in the horizontal direction of the furnace tube.
At least one in-furnace thermocouple is arranged in the inner cavity of the furnace tube, the in-furnace thermocouple is arranged along the axial direction of the furnace tube, and a plurality of temperature measuring points which are in one-to-one correspondence with the temperature control areas are arranged in the linear direction of the in-furnace thermocouple.
And the thermocouple in the furnace is connected with an external display, so that the temperature value and the regulation and control effect of each temperature control area are displayed in real time.
The power adjusting module is connected with a control terminal outside the furnace body, control software is arranged in the control terminal, and the control software can set power compensation following coefficients between the upper heating area and the lower heating area and between the left heating area and the right heating area.
The invention has the following beneficial effects:
according to the invention, four heating areas, namely an upper heating area, a lower heating area, a left heating area and a right heating area are arranged in each temperature control area, and the upper heating area, the lower heating area, the left heating area and the right heating area can independently control the temperature, so that the accurate compensation function of a temperature field is realized, the temperature field in the tube is compensated in a targeted manner, and the temperature uniformity in the furnace body is improved. The furnace body is divided into a plurality of temperature control areas along the axial direction, and the temperature control effect of each temperature control area is optimized, so that the temperature uniformity of an overlong constant temperature area of high-capacity equipment is better met. The invention can effectively improve the uniformity problems of sheet resistance and the like caused by the silicon chip process, and has good process effect on solving the problem of sheet resistance abnormity at a certain specific position such as a single point, a single area and the like in the furnace. The silicon controlled rectifier adjusting module detects the temperature by the thermocouple outside the furnace, and independently adjusts the power distribution of each part of furnace wires according to the conditions of a temperature field and a sheet resistance, thereby achieving the purpose of adjusting and controlling the temperature in a single temperature control area.
Drawings
FIG. 1 is a schematic diagram of the present invention.
Fig. 2 is a left side view of fig. 1.
Fig. 3 is a sectional view taken along line a-a of fig. 1.
Fig. 4 is a cross-sectional view of the present invention.
In the figure: 1. a furnace tube; 2. an upper heating zone; 3. a lower heating zone; 4. a left heating zone; 5. a right heating zone; 6. furnace wires; 7. a contact terminal; 8. a thermocouple outside the furnace; 9. a vertical thermocouple; 10. a horizontal thermocouple; 11. a thermocouple in the furnace; 12. and (6) measuring temperature points.
Detailed Description
The following describes embodiments of the present invention with reference to the drawings.
As shown in fig. 1 to 4, the optimized temperature-controlled heating furnace body of the present invention has a furnace tube 1, the furnace tube 1 is divided into an inner tube and an outer tube, the furnace tube 1 is axially divided into a plurality of temperature-controlled regions, preferably six temperature-controlled regions, each temperature-controlled region includes four heating regions, i.e., an upper heating region, a lower heating region, a left heating region and a right heating region, and the temperature-controlled regions are distributed in four radial directions, i.e., an upper heating region, a lower heating region, a left heating region and a right heating region, of the furnace tube 1. The heater is correspondingly arranged in each heating area, the heater covers the laid furnace wires 6 at the periphery of the inner pipe of each heating area, the furnace wires 6 are linearly distributed along the axial direction of the furnace tube 1 and are respectively positioned at the upper arc section, the lower arc section, the left arc section and the right arc section at the periphery of the inner pipe, the furnace wires 6 in four directions are vertically symmetrical and bilaterally symmetrical, and the furnace wires 6 are preferably heating wires. The furnace wires 6 of the upper heating area 2 and the lower heating area 3 form a group and are connected with corresponding power adjusting modules, the furnace wires 6 of the left heating area 4 and the right heating area 5 form a group and are connected with corresponding power adjusting modules, and the power adjusting modules are preferably silicon controlled adjusting modules. The power conditioning module may be a device having a plurality of independent channels or may be a plurality of independent electrical device modules. Each group of furnace wires 6 is connected with an external power supply through a contact terminal 7.
A plurality of groups of external thermocouples 8 are distributed on the periphery of the furnace tube 1, each group of external thermocouples 8 is arranged in one-to-one correspondence with the temperature control area, each group of external thermocouples 8 comprises vertical thermocouples 9 and horizontal thermocouples 10, the vertical thermocouples 9 are arranged in the vertical direction of the furnace tube 1, extend from the outer tube to the inner tube, detect the temperature of the inner tube, and the vertical thermocouples 9 are correspondingly connected with the power adjusting module. The horizontal thermocouple 10 is arranged in the horizontal direction of the furnace tube 1, extends from the outer tube to the inner tube, detects the temperature of the inner tube, and the horizontal thermocouple 10 is correspondingly connected with the power adjusting module.
At least one in-furnace thermocouple 11 is arranged in the inner cavity of the furnace tube 1, the in-furnace thermocouple 11 is arranged along the axial direction of the furnace tube 1, and a plurality of temperature measuring points 12, preferably six temperature measuring points, which are in one-to-one correspondence with the temperature control areas are arranged in the linear direction of the in-furnace thermocouple 11. The thermocouple 11 in the furnace is connected with an external display and is used for displaying the temperature value and the regulation effect of each temperature control area in real time and detecting the abnormal fluctuation of the temperature. The power adjusting module is connected with a control terminal outside the furnace body, control software is arranged in the control terminal, and the control software can set power compensation following coefficients between the upper heating area and the lower heating area and between the left heating area and the right heating area to obtain a more stable temperature field.
In the implementation of the invention, a furnace tube 1 is axially divided into six temperature control areas, each temperature control area comprises an upper heating area, a lower heating area, a left heating area and a right heating area, furnace wires 6 are respectively and correspondingly laid, the furnace wires 6 are divided into two groups of combinations which are vertically symmetrical and horizontally symmetrical, the upper furnace wire, the lower furnace wire, the left furnace wire, the right furnace wire and the left furnace wire 6 are respectively connected by vertical and horizontal furnace external thermocouples 8 through a silicon controlled rectifier adjusting module, and the silicon controlled rectifier adjusting module independently adjusts the power distribution of each part of the furnace wires 6 according to the conditions of a temperature field and a sheet resistance, thereby achieving the purpose of adjusting and controlling the temperature of a single temperature control area.
On the basis of a normal temperature detection control loop, a furnace thermocouple 11 is added in the inner cavity of the furnace tube 1 to detect the temperature, an upper group of heaters, a lower group of heaters, a left group of heaters and a right group of heaters are respectively monitored, on the basis of power subdivision regulation and control, the regulation and control effect of a temperature field is more visually observed through temperature values, whether heating hardware is normal or not is conveniently analyzed, and if abnormal temperature fluctuation exists, the heating hardware can be quickly detected by a system, and timely adjustment and optimization are carried out. The control terminal is connected with the power adjusting module, and the power compensation following coefficient is set through control software, so that a fixed power compensation coefficient is formed between the upper group of heaters, the lower group of heaters, the left group of heaters and the right group of heaters in the same temperature control area, a more stable temperature field is obtained, and the condition of power fluctuation is avoided. All temperature data are recorded in the system, and a comparison curve is formed, so that the temperature change and fluctuation conditions are visually observed.
According to the invention, four heating areas, namely an upper heating area, a lower heating area, a left heating area and a right heating area are arranged in each temperature control area, and the upper heating area, the lower heating area, the left heating area and the right heating area can independently control the temperature, so that the accurate compensation function of a temperature field is realized, the temperature field in the tube is compensated in a targeted manner, and the temperature uniformity in the furnace body is improved. The furnace body is divided into a plurality of temperature control areas along the axial direction, and the temperature control effect of each temperature control area is optimized, so that the temperature uniformity of an overlong constant temperature area of high-capacity equipment is better met. The invention can effectively improve the uniformity problems of sheet resistance and the like caused by the silicon chip process, and has good process effect on solving the problem of sheet resistance abnormity at a certain specific position such as a single point, a single area and the like in the furnace.
The foregoing description is illustrative of the present invention and is not to be construed as limiting thereof, as the invention may be modified in any manner without departing from the spirit thereof.
Claims (10)
1. An optimize control by temperature change heating furnace body which characterized in that: the furnace tube (1) is provided, the furnace tube (1) is divided into a plurality of temperature control areas along the axial direction, each temperature control area comprises an upper heating area, a lower heating area, a left heating area and a right heating area, the four heating areas are distributed in the radial upper direction, the lower direction, the left direction and the right direction of the furnace tube (1), heaters are correspondingly arranged in each heating area, the upper heaters and the lower heaters are in one group and are connected with corresponding power adjusting modules, the left heaters and the right heaters are in one group and are connected with corresponding power adjusting modules, a plurality of groups of furnace external thermocouples (8) are distributed on the periphery of the furnace tube (1), and each group of furnace external thermocouples (8) are arranged in one-to-one correspondence with the temperature control areas and are respectively connected with the power adjusting modules in a corresponding mode.
2. The optimized temperature-controlled heating furnace body according to claim 1, characterized in that: the heater covers the stove silk (6) of laying for the inner tube periphery of every heating zone, and stove silk (6) are along the axial straight line distribution of boiler tube (1).
3. The optimized temperature-controlled heating furnace body according to claim 2, characterized in that: the furnace wires (6) are respectively positioned on the upper arc section, the lower arc section, the left arc section and the right arc section of the periphery of the inner tube, wherein the furnace wires (6) in four directions are vertically symmetrical and horizontally symmetrical.
4. The optimized temperature-controlled heating furnace body according to claim 3, characterized in that: each group of furnace wires (6) is connected with an external power supply through a contact terminal (7).
5. The optimized temperature-controlled heating furnace body according to claim 1, characterized in that: the power adjusting module is a silicon controlled rectifier adjusting module.
6. The optimized temperature-controlled heating furnace body according to claim 1, characterized in that: a power conditioning module is a device having multiple independent channels or multiple independent electrical device modules.
7. The optimized temperature-controlled heating furnace body according to claim 1, characterized in that: each group of external thermocouples (8) comprises vertical thermocouples (9) and horizontal thermocouples (10), which extend from the outer pipe to the inner pipe and detect the temperature of the inner pipe, the vertical thermocouples (9) are arranged in the vertical direction of the furnace pipe (1), and the horizontal thermocouples (10) are arranged in the horizontal direction of the furnace pipe (1).
8. The optimized temperature-controlled heating furnace body according to claim 1, characterized in that: at least one in-furnace thermocouple (11) is arranged in the inner cavity of the furnace tube (1), the in-furnace thermocouple (11) is arranged along the axial direction of the furnace tube (1), and a plurality of temperature measuring points (12) which are in one-to-one correspondence with the temperature control areas are arranged in the linear direction of the in-furnace thermocouple (11).
9. The optimized temperature-controlled heating furnace body according to claim 8, characterized in that: and the thermocouple (11) in the furnace is connected with an external display, and the temperature numerical value and the regulation and control effect of each temperature control area are displayed in real time.
10. The optimized temperature-controlled heating furnace body according to claim 1, characterized in that: the power adjusting module is connected with a control terminal outside the furnace body, control software is arranged in the control terminal, and the control software can set power compensation following coefficients between the upper heating area and the lower heating area and between the left heating area and the right heating area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111281645.3A CN113916001A (en) | 2021-11-01 | 2021-11-01 | Optimized temperature control heating furnace body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111281645.3A CN113916001A (en) | 2021-11-01 | 2021-11-01 | Optimized temperature control heating furnace body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113916001A true CN113916001A (en) | 2022-01-11 |
Family
ID=79243842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111281645.3A Pending CN113916001A (en) | 2021-11-01 | 2021-11-01 | Optimized temperature control heating furnace body |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113916001A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114452671A (en) * | 2022-02-28 | 2022-05-10 | 中国科学院长春应用化学研究所 | Temperature adjustment system and purification equipment |
-
2021
- 2021-11-01 CN CN202111281645.3A patent/CN113916001A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114452671A (en) * | 2022-02-28 | 2022-05-10 | 中国科学院长春应用化学研究所 | Temperature adjustment system and purification equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6427622B2 (en) | Hot wire chemical vapor deposition method and apparatus using graphite hot rods | |
| KR20180015244A (en) | Heating device and heating chamber | |
| US6214706B1 (en) | Hot wire chemical vapor deposition method and apparatus using graphite hot rods | |
| CN103215635B (en) | A kind of Heat insulation structure of sapphire single crystal furnace | |
| JP2014141748A (en) | Cvd reactor, large area silicon filament and method for producing polysilicon | |
| US8835333B2 (en) | Heat treatment method of semiconductor wafers, manufacturing method of solar battery, and heat treatment device | |
| CN113916001A (en) | Optimized temperature control heating furnace body | |
| CN103668128A (en) | MOCVD (metal organic chemical vapor deposition) equipment, temperature control system and control method | |
| JP3232568U (en) | Vacuum sintering furnace capable of heating body and multi-region temperature control | |
| CN216205256U (en) | Optimized temperature control heating furnace body | |
| CN103081084A (en) | Substrate heating device | |
| CN105390421A (en) | Reaction chamber temperature zone control system | |
| EP2401415B1 (en) | Apparatus for manufacture of solar cells | |
| JP2013100211A (en) | Manufacturing method of polycrystalline silicon | |
| CN217788344U (en) | Heating furnace reaction chamber temperature control device and heating furnace | |
| CN202904399U (en) | Temperature control system, metal organic chemical vapor deposition equipment and semiconductor film deposition equipment | |
| CN112853276A (en) | Oxidation-resistant and pollution-resistant durable compound evaporation source | |
| CN216958070U (en) | Silicon chip heating device and chain furnace | |
| CN219280099U (en) | Heating furnace body for TOPCON battery diffusion with temperature controlled by partitions | |
| CN106637392A (en) | Uniformity-adjustable silicon epitaxial reaction equipment heating device and adjustment method thereof | |
| SE1930124A1 (en) | Device and method for ensuring flatness of wafer during growth | |
| CN220393807U (en) | Annealing furnace heating system | |
| CN216155956U (en) | Baking and heating system | |
| CN115198085B (en) | Three-phase pulse control device for heating electric radiant tube and heat treatment furnace | |
| CN218372514U (en) | Heating cavity |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |