CN112853276A - Oxidation-resistant and pollution-resistant durable compound evaporation source - Google Patents
Oxidation-resistant and pollution-resistant durable compound evaporation source Download PDFInfo
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- CN112853276A CN112853276A CN202011614127.4A CN202011614127A CN112853276A CN 112853276 A CN112853276 A CN 112853276A CN 202011614127 A CN202011614127 A CN 202011614127A CN 112853276 A CN112853276 A CN 112853276A
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- 238000001704 evaporation Methods 0.000 title claims abstract description 54
- 230000008020 evaporation Effects 0.000 title claims abstract description 54
- 150000001875 compounds Chemical class 0.000 title claims abstract description 13
- 230000003647 oxidation Effects 0.000 title claims abstract description 13
- 238000007254 oxidation reaction Methods 0.000 title claims abstract description 13
- 238000010438 heat treatment Methods 0.000 claims abstract description 94
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 21
- 238000001816 cooling Methods 0.000 claims abstract description 14
- 239000000498 cooling water Substances 0.000 claims abstract description 12
- 239000011553 magnetic fluid Substances 0.000 claims abstract description 8
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims abstract 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 22
- 229910002804 graphite Inorganic materials 0.000 claims description 22
- 239000010439 graphite Substances 0.000 claims description 22
- 238000007789 sealing Methods 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 18
- 238000000151 deposition Methods 0.000 claims description 9
- 238000009413 insulation Methods 0.000 claims description 9
- 238000011109 contamination Methods 0.000 claims description 6
- 238000005516 engineering process Methods 0.000 claims description 6
- 238000005229 chemical vapour deposition Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 238000003801 milling Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 10
- 230000007547 defect Effects 0.000 abstract description 3
- 238000001771 vacuum deposition Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 47
- 239000010409 thin film Substances 0.000 description 4
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 2
- 230000032683 aging Effects 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000010329 laser etching Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000005361 soda-lime glass Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000003064 anti-oxidating effect Effects 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000010549 co-Evaporation Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses an oxidation-resistant and pollution-resistant durable compound evaporation source, which belongs to the field of vacuum coating and comprises: the device comprises a crucible, a heating cylinder, a water cooling jacket and an electrode flange, wherein a two-stage heating layer and a temperature thermocouple are arranged in the heating cylinder; the electrode flange is provided with a cooling water channel, a thermocouple wire hole, a heating wire hole and a support rod hole, the side surface of the electrode flange is provided with a water inlet and a water outlet which are communicated with the cooling water channel, a lead wire of a temperature thermocouple passes through the thermocouple wire hole to be connected with a thermocouple wiring terminal, lead wires of a first-stage heating layer and a second-stage heating layer pass through the heating wire hole and are connected with a heating electrode, and a support rod passes through the support rod hole and is connected with a magnetic fluid controller. According to the evaporation source, the two-stage heating layers are directly manufactured on the inner wall of the heating cylinder, so that the problems that the heating wire is easy to age and oxidize in the prior art are solved, the cost for replacing the heating wire is saved, the defect that the crucible is heated unevenly in the prior art is overcome, and the problems of heat loss and uneven material heating are solved.
Description
Technical Field
The invention belongs to the field of vacuum coating, and particularly relates to an antioxidant and anti-pollution durable compound evaporation source for a copper indium gallium selenide high-resistance layer.
Background
Since the first CIS thin-film solar cell in the world was prepared by Wanger et al in 1974, CIS/CIGS solar cells have been widely applied to the market due to the advantages of stable performance, good low-light effect, large conversion efficiency improvement space, capability of being deposited on a flexible substrate, and the like.
CIGS thin film solar cells are photovoltaic devices formed by depositing multiple thin films on glass or other inexpensive substrates, respectively. The traditional CIGS thin-film solar cell is structurally an SLG (soda-lime glass)/bottom electrode (Mo /) absorbing layer (CIGS)/buffer layer (CdS), and in large-scale production, a high-resistance layer in the copper indium gallium selenide is deposited by a mode of continuously coating films in the same equipment by evaporation and sputtering, so that the influence of defects and other impurities of an interface layer on the cell is reduced. However, in the evaporation process, because the evaporation source is exposed in the atmosphere of the evaporation chamber, some evaporation materials are inevitably deposited on the heating wire, and meanwhile, the heating wire works at a high temperature for a long time, the surface of the heating wire can be oxidized or reacted with other substances, so that the resistance and the heating efficiency are affected, the heating wire needs to be replaced regularly, a batch of evaporation sources need to be replaced generally for 2-4 months according to the conditions of the evaporation materials, and the production cost of products is greatly increased.
Disclosure of Invention
In order to solve the problems in the prior art, the invention provides an anti-oxidation and anti-pollution durable compound evaporation source, which solves the problems that an evaporation source heating wire is easy to oxidize and age, and also solves the problems of heat loss, uneven material heating and the like in an evaporation source structure.
The invention adopts the following technical scheme: an oxidation and contamination resistant durable compound evaporation source comprising: the crucible is arranged in the evaporation cavity in a mode that an opening is upward, the heating cylinder is sleeved with the water cooling sleeve, the water cooling sleeve is hermetically connected with the electrode flange through a connecting flange at the bottom, a rotary baffle is arranged above the water cooling sleeve and is positioned right above the evaporation cavity, and the rotary baffle is connected with the supporting rod and rotates along with the rotation of the supporting rod;
a primary heating layer and a secondary heating layer are manufactured on the heating cylinder, a temperature thermocouple is also arranged in the evaporation chamber, a sealing flange is arranged at the bottom of the heating cylinder for sealing, and the temperature thermocouple is connected to the sealing flange in a ceramic sealing mode;
the upper flange surface of the electrode flange is provided with a cooling water channel, the side surface of the electrode flange is provided with a water inlet and a water outlet, the water inlet and the water outlet are communicated with the cooling water channel, and the electrode flange can be cooled by introducing cooling water; the upper flange face of the electrode flange is provided with a thermocouple lead hole, a heating layer lead hole and a support rod hole, a thermocouple wiring terminal, a power supply access point and a magnetic fluid controller are fixed on the lower flange face of the electrode flange, the power supply access point contains 5 electrode connectors, the lead of a temperature thermocouple passes through the thermocouple lead hole to be connected with the thermocouple wiring terminal, the leads of a first-stage heating layer and a second-stage heating layer pass through the heating lead hole to be connected with a heating electrode, and the support rod passes through the support rod hole to be connected with the magnetic fluid controller;
the manufacturing steps of the heating cylinder are as follows:
(1) depositing a layer of cylindrical PBN substrate on a cylindrical substrate by adopting a chemical vapor deposition technology;
(2) etching a bow-shaped groove on the PBN substrate, and leading out a groove lead from the bottom;
(3) depositing a layer of pyrolytic graphite in the groove, milling the pyrolytic graphite outside the groove by using laser when the thickness of the pyrolytic graphite in the groove exceeds the depth of the groove, and only keeping the pyrolytic graphite in the groove to form a primary heating layer and a secondary heating layer;
(4) depositing a layer of PBN on the PBN substrate and the surface of the pyrolytic graphite in the groove to serve as a PBN sealing layer;
the thickness of the PBN substrate is 80-1000 mu m, the depth of the groove is 0.01-0.5 mm, the width of the groove is 3-5 mm, and the thickness of the PBN sealing layer is 0.01-0.5 mm.
According to the invention, the groove is prefabricated on the PBN substrate directly, then the pyrolytic graphite is deposited in the groove, the pyrolytic graphite outside the groove is etched by laser, only the pyrolytic graphite in the groove is reserved to form the primary heating layer and the secondary heating layer, the heating wire in the prior art is replaced, and the PBN sealing protective layer is deposited on the formed heating layer to protect the heating layer from being oxidized, so that the problems of easy aging and oxidation of the heating wire in the prior art can be solved, the cost for replacing the heating wire is saved, the oxidation resistance of the whole evaporation source is improved, and the evaporation source is more durable. And set up two sets of heating layers simultaneously, overcome prior art and heated inhomogeneous shortcoming to the crucible, solved heat loss and material and heated inhomogeneous problem.
Preferably, both the primary and secondary heating layers are "bowed" in shape. The design of "bow" font can increase the area of laying of heating picture layer, realizes the purpose of rapid heating on the one hand, and the whole heating picture layer of on the other hand surrounds around the crucible, can make the crucible be heated more evenly.
Preferably, the temperature thermocouples comprise a top temperature thermocouple and a bottom temperature thermocouple, the top temperature thermocouple is located at the upper half part of the evaporation cavity, the bottom temperature thermocouple is located at the lower half part of the evaporation cavity, the top temperature thermocouple adopts a double-sided symmetrical temperature measurement structure, the measurement accuracy is guaranteed, shutdown inspection is carried out in a whistling alarm mode when the temperature difference between the two top thermocouples is greater than 50 ℃, and the stability of the evaporation process is guaranteed. The bottom thermocouple can detect the temperature of the bottom of the crucible and provides a basis for heating control of the primary heating layer.
Preferably, still install four at least layers of thermal-insulated baffles in the coating by vaporization intracavity, thermal-insulated baffle is located at the bottom of the crucible and between the sealing flange, and the thickness of thermal-insulated baffle is 1mm, and the interval between the adjacent thermal-insulated baffle is 1 ~ 3 mm. The heat insulation baffle can avoid the loss of bottom temperature and avoid the problem of uneven evaporation of materials at the bottom of the crucible.
Preferably, the cooling water channel is S-shaped. The S-shaped cooling water channel can increase the cooling area and achieve the purpose of rapid cooling.
Drawings
Fig. 1 is a schematic structural diagram of an evaporation source according to the present invention.
Fig. 2 is a schematic structural view of a heating cylinder in the evaporation source of the present invention.
Fig. 3 is a perspective view showing the structure of a cooling jacket in an evaporation source according to the present invention.
Fig. 4 is a perspective view of the structure of the electrode flange in the evaporation source of the present invention.
FIG. 5 is a perspective view showing the structure of the back surface of an electrode flange in an evaporation source according to the present invention
Detailed Description
Embodiments of the invention are described in detail below with reference to the following figures:
an oxidation-resistant and pollution-resistant durable compound evaporation source is shown in fig. 1-5, and comprises a crucible 200, a heating cylinder 300, a water-cooling jacket 400 and an electrode flange 500, wherein the inner cavity of the heating cylinder 300 is used as an evaporation cavity 301, the crucible 200 is arranged in the evaporation cavity 303 with an upward opening, the water-cooling jacket 400 is sleeved outside the heating cylinder 300, the water-cooling jacket 400 is hermetically connected with the electrode flange 500 through a connecting flange 401 at the bottom, a rotary baffle 100 is arranged above the water-cooling jacket 400, the rotary baffle 100 is positioned right above the evaporation cavity 303, and the rotary baffle 100 is connected with a support rod 101 and rotates along with the rotation of the support rod 101;
the preparation has one-level heating picture layer 304 and second grade heating picture layer 301 on cartridge heater 300, and one-level heating picture layer 304 and second grade heating picture layer 301 all are "bow" font, can increase the area of laying of heating picture layer, realize rapid heating's purpose on the one hand, and the whole heating picture layer of on the other hand is around in the crucible, 200 around, can make crucible 200 be heated more evenly.
The manufacturing steps of the heating cylinder are as follows:
(1) depositing a layer of cylindrical PBN substrate with the length of 500mm, the diameter of 90mm and the thickness of 80-1000 microns on a cylindrical base by adopting a chemical vapor deposition technology;
(2) a bow-shaped groove is etched on the PBN substrate by adopting laser etching, a groove lead is led out from the bottom, the depth of the groove is 0.01-0.5 mm, the width of the groove is 3-5 mm, the material can be heated more uniformly by the design, and the heating stability is ensured.
(3) Depositing a layer of pyrolytic graphite in the groove by adopting a chemical vapor deposition technology, milling out pyrolytic graphite materials deposited on the PBN substrate outside the groove in a machining mode when the thickness of the pyrolytic graphite in the groove exceeds the depth of the groove, and only keeping the pyrolytic graphite in the groove as a heating layer;
(4) a PBN layer with the thickness of 0.01-0.5 mm is deposited on the surface of the PBN substrate and the pyrolytic graphite layer as a PBN sealing layer by adopting a chemical vapor deposition technology, so that the sealing property of the pyrolytic graphite is ensured, and the performance aging problem caused by contact or reaction of the pyrolytic graphite with external oxygen and other substances is avoided.
Two top temperature thermocouples 302 and one bottom temperature thermocouple 305 are further arranged in the evaporation cavity 303, the top temperature thermocouple 302 is located in the upper half portion of the evaporation cavity 303, the bottom temperature thermocouple 305 is located in the lower half portion of the evaporation cavity 303, the top temperature thermocouple 302 adopts a double-sided symmetrical temperature measurement structure, measurement accuracy is guaranteed, shutdown inspection is conducted in a whistle alarm mode when the temperature difference of the two top thermocouples 302 is larger than 50 ℃, and stability of an evaporation process is guaranteed. The bottom thermocouple 305 is capable of detecting the temperature at the bottom of the crucible 200, and provides a basis for heating control of the primary heating layer 304.
Five layers of heat insulation baffles 306 are further mounted at the bottom of the evaporation cavity 303, the thickness of each heat insulation baffle 306 is 1mm, the distance between every two adjacent heat insulation baffles 306 is 2-3 mm, the heat insulation baffles 306 can avoid the loss of bottom temperature, and the problem of uneven evaporation of materials at the bottom of the crucible 200 is avoided; the bottom of the heating cylinder 300 is sealed by a sealing flange 307, and the three temperature thermocouples 302 and 305 are connected to the sealing flange 307 in a ceramic sealing manner.
An S-shaped cooling water channel 502 is formed in the upper flange surface of the electrode flange 500, a water inlet 504 and a water outlet are formed in the side surface of the electrode flange 500, and the water inlet 504 and the water outlet are communicated with the cooling water channel 502; the upper flange face of the electrode flange 500 is provided with three thermocouple lead holes 503, a heating lead hole 505 and a support rod hole 501, a thermocouple wiring terminal 506, a power supply access point 508 and a magnetic fluid controller 507 are fixed on the lower flange face of the electrode flange 500, the power supply access point 508 comprises 5 electrode connectors 509, leads of two top temperature thermocouples 302 and one bottom temperature thermocouple 305 respectively penetrate through the three thermocouple lead holes 503 and are respectively connected with the thermocouple wiring terminal 506, leads of a first-stage heating layer 304 and a second-stage heating layer 301 penetrate through the heating lead hole 505 and are connected with the electrode connectors 509 of the power supply access point 508, a support rod 101 penetrates through the support rod hole 501 and is connected with the magnetic fluid controller 507, a magnetic fluid sealing technology is adopted, evaporation materials are blocked through a simple switch valve, and debugging of multi-source co-evaporation is more convenient.
According to the evaporation source, the arch-shaped groove is directly prefabricated on the PBN substrate, then pyrolytic graphite is deposited, the pyrolytic graphite outside the arch-shaped groove area is removed through laser etching, only the pyrolytic graphite in the groove is reserved, the primary heating layer 304 and the secondary heating layer 301 are formed, the heating wire in the prior art is replaced, the PBN is deposited on the heating layer for sealing protection, the problem that the heating wire in the prior art is easy to age and oxidize can be solved, and the cost for replacing the heating wire is saved. And two groups of heating layers are arranged simultaneously, so that the defect that the crucible 200 is heated unevenly in the prior art is overcome, and the problems of heat loss and uneven heating of materials are solved.
The above description is only for the preferred embodiment of the present invention, but the present invention should not be limited to the disclosure of the embodiment and the drawings, and therefore, all equivalent substitutions and modifications without departing from the spirit of the present invention should fall within the protection scope of the present invention.
Claims (6)
1. An oxidation and contamination resistant durable compound evaporation source comprising: the crucible is arranged in an evaporation coating cavity of the heating cylinder in a mode that an opening is upward, the heating cylinder is sleeved with the water cooling sleeve, the water cooling sleeve is hermetically connected with the upper flange surface of the electrode flange through a connecting flange at the bottom, a rotary baffle is arranged above the water cooling sleeve, the rotary baffle is positioned right above the evaporation coating cavity and connected with the supporting rod and rotates along with the rotation of the supporting rod;
the method is characterized in that:
a primary heating layer and a secondary heating layer are manufactured on the heating cylinder, a temperature thermocouple is further arranged in an evaporation coating cavity of the heating cylinder, the bottom of the heating cylinder is sealed by a sealing flange, and the temperature thermocouple is connected to the sealing flange in a ceramic sealing mode;
a cooling water channel is formed on the upper flange surface of the electrode flange, a water inlet and a water outlet are formed in the side surface of the electrode flange, and the water inlet and the water outlet are communicated with the cooling water channel; the upper flange surface of the electrode flange is provided with a thermocouple wire hole, a heating wire hole and a support rod hole, the lower flange surface of the electrode flange is fixed with a thermocouple wiring terminal, a heating electrode and a magnetic fluid controller, a lead wire of a temperature measuring thermocouple passes through the thermocouple wire hole to be connected with the thermocouple wiring terminal, lead wires of a first-stage heating layer and a second-stage heating layer pass through the heating wire hole to be connected with the heating electrode, and a support rod passes through the support rod hole to be connected with the magnetic fluid controller;
the manufacturing steps of the heating cylinder are as follows:
(1) depositing a layer of cylindrical PBN substrate on a cylindrical substrate by adopting a chemical vapor deposition technology;
(2) etching a bow-shaped groove on the PBN substrate, and leading out a groove lead from the bottom;
(3) depositing a layer of pyrolytic graphite in the groove, milling the pyrolytic graphite outside the groove by using laser when the thickness of the pyrolytic graphite in the groove exceeds the depth of the groove, and only keeping the pyrolytic graphite in the groove to form a primary heating layer and a secondary heating layer;
(4) and depositing a layer of PBN on the PBN substrate and the surface of the pyrolytic graphite in the groove to serve as a PBN sealing layer.
2. The evaporation source of oxidation-resistant and contamination-resistant durable compound as claimed in claim 1, wherein the thickness of the PBN substrate is 80-1000 μm, the depth of the trench is 0.01-0.5 mm, the width is 3-5 mm, and the thickness of the PBN sealing layer is 0.01-0.5 mm.
3. The evaporation source of oxidation and contamination resistant durable compound as claimed in claim 1 or 2, wherein the first heating layer and the second heating layer are both in a "bow" shape.
4. The oxidation and contamination resistant durable compound evaporation source of claim 1, wherein the temperature thermocouples comprise a top temperature thermocouple and a bottom temperature thermocouple, the top temperature thermocouple being located in an upper half of the evaporation chamber and the bottom temperature thermocouple being located in a lower half of the evaporation chamber.
5. The oxidation and pollution resistant durable compound evaporation source according to claim 1, wherein at least four layers of heat insulation baffle plates are further installed in the evaporation chamber, the heat insulation baffle plates are located between the crucible bottom and the sealing flange, the thickness of each heat insulation baffle plate is 1mm, and the distance between adjacent heat insulation baffle plates is 1-3 mm.
6. The oxidation and contamination resistant durable compound evaporation source of claim 1, wherein the cooling water channel is S-shaped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011614127.4A CN112853276A (en) | 2020-12-31 | 2020-12-31 | Oxidation-resistant and pollution-resistant durable compound evaporation source |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011614127.4A CN112853276A (en) | 2020-12-31 | 2020-12-31 | Oxidation-resistant and pollution-resistant durable compound evaporation source |
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| CN112853276A true CN112853276A (en) | 2021-05-28 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117966103A (en) * | 2024-02-04 | 2024-05-03 | 浙江晟霖益嘉科技有限公司 | Evaporation vacuum equipment production line |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5702764A (en) * | 1993-12-22 | 1997-12-30 | Shin-Etsu Chemical Co., Ltd. | Method for the preparation of pyrolytic boron nitride-clad double-coated article |
| JP2001006854A (en) * | 1999-06-25 | 2001-01-12 | Shin Etsu Chem Co Ltd | Double layer ceramic heater |
| CN110572889A (en) * | 2019-10-21 | 2019-12-13 | 山东国晶新材料有限公司 | method for preparing internal CVD deposition three-dimensional composite ceramic heater |
| CN110592557A (en) * | 2019-10-21 | 2019-12-20 | 山东国晶新材料有限公司 | Internal CVD deposition three-dimensional composite ceramic heater |
| CN110983258A (en) * | 2019-12-13 | 2020-04-10 | 山东国晶新材料有限公司 | Ceramic point source for evaporation equipment |
| CN111733387A (en) * | 2020-06-28 | 2020-10-02 | 埃频(上海)仪器科技有限公司 | High-temperature evaporation source and cooling device thereof |
-
2020
- 2020-12-31 CN CN202011614127.4A patent/CN112853276A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5702764A (en) * | 1993-12-22 | 1997-12-30 | Shin-Etsu Chemical Co., Ltd. | Method for the preparation of pyrolytic boron nitride-clad double-coated article |
| JP2001006854A (en) * | 1999-06-25 | 2001-01-12 | Shin Etsu Chem Co Ltd | Double layer ceramic heater |
| CN110572889A (en) * | 2019-10-21 | 2019-12-13 | 山东国晶新材料有限公司 | method for preparing internal CVD deposition three-dimensional composite ceramic heater |
| CN110592557A (en) * | 2019-10-21 | 2019-12-20 | 山东国晶新材料有限公司 | Internal CVD deposition three-dimensional composite ceramic heater |
| CN110983258A (en) * | 2019-12-13 | 2020-04-10 | 山东国晶新材料有限公司 | Ceramic point source for evaporation equipment |
| CN111733387A (en) * | 2020-06-28 | 2020-10-02 | 埃频(上海)仪器科技有限公司 | High-temperature evaporation source and cooling device thereof |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117966103A (en) * | 2024-02-04 | 2024-05-03 | 浙江晟霖益嘉科技有限公司 | Evaporation vacuum equipment production line |
| CN117966103B (en) * | 2024-02-04 | 2024-06-18 | 浙江晟霖益嘉科技有限公司 | Evaporation vacuum equipment production line |
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Application publication date: 20210528 |
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