CN211170857U

CN211170857U - Evaporation source device for GIGS solar evaporation coating

Info

Publication number: CN211170857U
Application number: CN201922245967.7U
Authority: CN
Inventors: 徐根保; 刘林; 张宽翔; 王昌华; 王宝玉; 蒋继文
Original assignee: Triumph Photovoltaic Material Co ltd
Current assignee: Triumph Photovoltaic Material Co ltd
Priority date: 2019-12-16
Filing date: 2019-12-16
Publication date: 2020-08-04
Anticipated expiration: 2029-12-16

Abstract

The utility model discloses an evaporation source device for GIGS solar energy evaporation coating, including evaporation source body and locate the crucible in the evaporation source body, its characterized in that, evaporation source body inner wall interval is equipped with first heater strip and second heater strip, and first heater strip is located the head of evaporation source body, and first heater strip and second heater strip all distribute along evaporation source body inner wall annular, and the bottom in the evaporation source body still is equipped with the third heater strip; the head part in the crucible is provided with a beam flow block, the beam flow block is provided with a beam flow hole which is coaxial with the crucible, the beam flow hole is trumpet-shaped, and the beam flow hole is gradually reduced from the head part to the tail part; the device can solve the problem that the evaporation source is easy to block and the evaporation film layer is not uniform.

Description

Evaporation source device for GIGS solar evaporation coating

Technical Field

The utility model relates to a thin-film solar cell manufacture equipment technical field specifically is an evaporation source device for GIGS solar energy evaporation coating film.

Background

The copper indium selenide solar thin film battery is formed by depositing a plurality of layers of metal compound semiconductor thin films on a glass or other cheap substrates, wherein the total thickness of the thin films is about 2-3 mm, and the solar light is utilized to generate electricity. The copper indium selenium battery has the characteristics of low cost, stable performance, strong radiation resistance and the like, the photoelectric conversion efficiency is the first of various thin film solar batteries at present, and the excellent performance of the copper indium selenium battery is internationally called as a cheap solar battery in the next era, so that the copper indium selenium battery attracts a plurality of organizations and experts to research and develop.

In the actual production process, a very large number of devices deposit the film layer required by the CIGS battery by adopting an evaporation coating mode, but in the production process, a plurality of evaporation sources have the phenomena that evaporation ports are easy to block, the service life is short, and the evaporation film layer is not uniform.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide an evaporation source device for GIGS solar evaporation coating, which can solve the problems that an evaporation source is easy to block and an evaporation film layer is not uniform,

the utility model provides a technical scheme that its technical problem adopted is:

an evaporation source device for GIGS solar evaporation coating comprises an evaporation source body and a crucible arranged in the evaporation source body, wherein a first heating wire and a second heating wire are arranged on the inner wall of the evaporation source body at intervals, the first heating wire is positioned at the head of the evaporation source body, the first heating wire and the second heating wire are distributed annularly along the inner wall of the evaporation source body, and a third heating wire is further arranged at the bottom in the evaporation source body;

the head in the crucible is provided with a beam flow block, the beam flow block is provided with a beam flow hole coaxial with the crucible, the beam flow hole is trumpet-shaped, and the beam flow hole is gradually reduced from the head to the tail.

Furthermore, the head of the evaporation source body is provided with a rotary end cover.

Furthermore, the periphery of the evaporation source body is provided with a cooling water jacket, and the cooling water jacket is provided with a cooling water inlet and a cooling water outlet.

The utility model has the advantages that the inside of the evaporation source body realizes the sectional heating, the first heating wire and the second heating wire are arranged at intervals, the evaporation rate of the tail part is prevented from being influenced due to overhigh head process temperature, and the stability of the evaporation rate is ensured; the head in the crucible is provided with the beam flow block, so that the uniformity of heat transfer is ensured, the evaporation source can be continuously ensured to be matched with the control temperature in the head cooling process in the cooling process, the cooling rate is reduced, the blocking of the beam flow hole is avoided, meanwhile, in order to ensure the process matching type, the process temperature of the first heating wire is 250-300 ℃ higher than that of the second heating wire, the temperature reduction process adopts the same-speed temperature reduction process, the blocking of the beam flow hole caused by the temperature reduction of the front-end beam flow hole in the evaporation process of evaporating materials can be avoided through optimization, and the service life of the evaporation source is prolonged.

Drawings

The invention will be further described with reference to the following figures and examples:

fig. 1 is a schematic structural diagram of the present invention;

fig. 2 is an enlarged schematic view of the evaporation source body of the present invention;

FIG. 3 is an enlarged schematic view of the crucible of the present invention;

FIG. 4 is a schematic view of the installation and use of the present invention;

FIG. 5 is a side view of FIG. 4;

fig. 6 is a top view of fig. 4.

Detailed Description

With reference to fig. 1 and 2, the present invention provides an evaporation source device for GIGS solar evaporation coating, including an evaporation source body 1 and a crucible 2 disposed in the evaporation source body, wherein a first heating wire 3 and a second heating wire 4 are disposed at an interval on an inner wall of the evaporation source body 1, the first heating wire 3 is located at a head of the evaporation source body 1, the first heating wire and the second heating wire are both annularly distributed along the inner wall of the evaporation source body, and the interval between the first heating wire 3 and the second heating wire 4 is 10-20 mm; the bottom in the evaporation source body 1 is also provided with a third heating wire 5.

The periphery of the evaporation source body 1 is provided with a cooling water jacket 6, and the cooling water jacket 6 is provided with a cooling water inlet 7 and a cooling water outlet 8. The head of the evaporation source body 1 is further provided with a rotary end cover 9, the rotary end cover 9 can be driven by a motor 11, the motor 11 is connected with the rotary end cover 9 through a rotary shaft 10, the rotary shaft 10 penetrates through the cooling water jacket 6, the rotary end cover 9 is started by the motor 11 to be opened and closed, and the distance of 20-30 mm is reserved between the rotary end cover 9 and the head of the evaporation source body 1.

Referring to fig. 3, a beam flow block 12 is arranged at the head part in the crucible 2, a beam flow hole 13 coaxial with the crucible 2 is arranged on the beam flow block 12, the beam flow hole 13 is horn-shaped, the beam flow hole 13 is gradually reduced from the head part to the tail part, and the distance between the beam flow hole 13 and a material filling area 14 in the crucible is 10-20 mm.

Combine figure 4 ~ 6 to show, during the use, will be a set of the utility model discloses evaporation source device installs on carrier 15, can set up two rows from top to bottom at carrier 15, forms the contained angle of 10 o between two rows of evaporation source devices, and the interval between the adjacent evaporation source device is 200 mm.

The evaporation source body of the utility model realizes the sectional heating inside, the first heating wire and the second heating wire are arranged at intervals, thereby avoiding the influence on the evaporation rate of the tail part due to the overhigh head process temperature and ensuring the stability of the evaporation rate; the head in the crucible is provided with the beam flow block, so that the uniformity of heat transfer is ensured, the evaporation source can be continuously ensured to be matched with the control temperature in the head cooling process in the cooling process, the cooling rate is reduced, the blocking of the beam flow hole is avoided, meanwhile, in order to ensure the process matching type, the process temperature of the first heating wire is 250-300 ℃ higher than that of the second heating wire, and the temperature reduction process adopts the same-speed temperature reduction process, so that the blockage of the beam flow hole caused by the temperature reduction of the front-end beam flow hole in the evaporation process of evaporating materials can be avoided through optimization, and the service life of the evaporation source is prolonged; through letting in cooling water, can avoid causing the influence to adjacent evaporation source device when using.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way; the invention is not limited to the embodiments described herein, but is capable of other embodiments according to the invention, and may be used in various other applications, including, but not limited to, industrial. Therefore, any simple modification, equivalent replacement, equivalent change and modification made to the above embodiments by the technical entity of the present invention all still belong to the protection scope of the technical solution of the present invention.

Claims

1. An evaporation source device for GIGS solar evaporation coating comprises an evaporation source body and a crucible arranged in the evaporation source body, and is characterized in that a first heating wire and a second heating wire are arranged on the inner wall of the evaporation source body at intervals, the first heating wire is positioned at the head of the evaporation source body, the first heating wire and the second heating wire are distributed annularly along the inner wall of the evaporation source body, and a third heating wire is further arranged at the bottom in the evaporation source body;

2. The evaporation source device for GIGS solar evaporation coating according to claim 1, wherein the head of the evaporation source body is provided with a rotary end cap.

3. The evaporation source device for GIGS solar evaporation coating according to claim 1 or 2, wherein the periphery of the evaporation source body is provided with a cooling water jacket, and the cooling water jacket is provided with a cooling water inlet and a cooling water outlet.