CN216155956U

CN216155956U - Baking and heating system

Info

Publication number: CN216155956U
Application number: CN202122218544.3U
Authority: CN
Inventors: 张勇军; 卢成; 王伟
Original assignee: Chengdu Guotai Vacuum Equipment Co ltd
Current assignee: Chengdu Guotai Vacuum Equipment Co ltd
Priority date: 2021-09-14
Filing date: 2021-09-14
Publication date: 2022-04-01
Anticipated expiration: 2031-09-14

Abstract

The utility model discloses a baking and heating system, which solves the defects of the prior art, adopts a temperature controller to control a power regulation controller, adopts a mode that the power regulation controller controls a plurality of groups of heaters, can quickly reach the set temperature and enter a constant temperature area, and comprises the temperature controller (1), the power regulation controller (2), a thermocouple (3) and a vacuum chamber cavity (4), wherein the vacuum chamber cavity (4) is internally provided with a plurality of groups of heaters (5), the plurality of groups of heaters (5) are connected and controlled through the power regulation controller (2), and the temperature controller (1) is in control connection with the power regulation controller (2).

Description

Baking and heating system

Technical Field

The utility model relates to the technical fields of semiconductors, film coating and the like, in particular to a baking and heating system.

Background

In the current semiconductor industry and optical coating baking heating, a plurality of groups of temperature control probes (thermocouples) are used for measuring temperature, a plurality of groups of heating wires (heaters) are used for supplying power, and the heating principle of baking is independently controlled (one temperature controller controls one power regulation controller, and one power regulation controller controls one group of heating wires) so as to achieve the temperature uniformity of a workpiece mechanism. The defects are that the cost is high, the structure is complex, the mutual temperature influence of the heating wires in independent groups is large, and the heating wires are difficult to quickly reach the set temperature and enter a constant temperature area.

SUMMERY OF THE UTILITY MODEL

The utility model aims to design a baking and heating system, which solves the defects in the prior art, adopts a mode that one temperature controller is used for controlling one power regulation controller, and one power regulation controller is used for controlling a plurality of groups of heaters, and can quickly reach the set temperature and enter a constant temperature area.

The utility model is realized by the following technical scheme: a baking and heating system comprises a temperature controller, a power regulation controller, a thermocouple and a vacuum chamber cavity, wherein a plurality of groups of heaters are arranged in the vacuum chamber cavity, the plurality of groups of heaters are connected and controlled through one power regulation controller, and the temperature controller is connected with the power regulation controller in a control mode.

In order to further realize the utility model, the following arrangement structure is adopted: the thermocouple detects the temperature in the vacuum chamber cavity and feeds back a signal to the temperature controller to be used as a reference signal of the temperature controller control power regulation controller.

In order to further realize the utility model, the following arrangement structure is adopted: the temperature controller controls the power regulation controller by outputting a 4-20mA current signal.

In order to further realize the utility model, the following arrangement structure is adopted: 5 groups of heaters are arranged in the vacuum chamber, and the power supply voltages of the 5 groups of heaters in the constant temperature stage are respectively 50%, 45%, 55%, 48% and 65% of the input voltage of the power regulation controller.

In order to further realize the utility model, the following arrangement structure is adopted: the fluctuation amplitude of the input voltage of the power regulation controller is +/-10%.

In order to further realize the utility model, the following arrangement structure is adopted: the vacuum chamber cavity adopts a 304 vacuum chamber cavity.

Compared with the prior art, the utility model has the following advantages and beneficial effects:

the utility model solves the defects of the prior art, and can quickly reach the set temperature and enter a constant temperature area by adopting a mode that one temperature controller is used for controlling one power regulation controller and one power regulation controller is used for controlling a plurality of groups of heaters.

The utility model has the advantages of low cost, simple structure and small temperature influence among the heating wires (heaters) which are independently combined

The utility model adopts the independent setting of the heating power of each area, the output is integrally controlled by the temperature controller, and the mutual interference of the temperatures of the adjacent heating areas is avoided by the same rise and fall of the heater power.

Compared with the existing heating control mode, the utility model has the advantages of more accurate temperature control, quicker heating, more uniform overall temperature distribution and lower cost.

Drawings

FIG. 1 is a schematic view of the structure of the present invention.

Fig. 2 is an actual view of the temperature at the time of application of the present invention.

The device comprises a temperature controller 1, a power regulation controller 2, a thermocouple 3, a vacuum chamber 4 and a heater 5.

Detailed Description

The present invention will be described in further detail with reference to examples, but the embodiments of the present invention are not limited thereto.

In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings of the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model.

In the description of the present invention, it is to be understood that the terms etc. indicate orientations or positional relationships based on those shown in the drawings only for the convenience of describing the present invention and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

In the present invention, unless otherwise specifically stated or limited, the terms "mounting," "connecting," "disposing," "fixing," and the like are to be understood in a broad sense, and may be, for example, a fixed connection, a detachable connection, or an integral connection, and are not limited to any conventional mechanical connection means such as screwing, interference fitting, riveting, screw-assisted connection, and the like. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

It is worth noting that: in the present application, when it is necessary to apply the known technology or the conventional technology in the field, the applicant may have the case that the known technology or/and the conventional technology is not specifically described in the text, but the technical means is not specifically disclosed in the text, and the present application is considered to be not in compliance with the twenty-sixth clause of the patent law.

Example 1:

as shown in figure 1, a baking and heating system solves the defects of the prior art, and particularly adopts the following arrangement structure: the temperature controller comprises a temperature controller 1, a power regulation controller 2, a thermocouple 3 and a vacuum chamber cavity 4, wherein a plurality of groups of heaters 5 are arranged in the vacuum chamber cavity 4, the plurality of groups of heaters 5 are connected and controlled through the power regulation controller 2, and the temperature controller 1 is connected with the power regulation controller 2 in a control mode.

As a preferred arrangement scheme, in implementing the present invention, the power regulation controller 2 is modified into multiple sets of outputs, the inputs of which are controlled by a single temperature controller 1, and the multiple sets of outputs of the power regulation controller 2 are set to different output voltages according to the requirements of multiple sets of heaters (heating wires) 5, so that while reducing the cost, since one temperature controller 1 is used to control the multiple outputs of the power regulation controller 2, the purpose of coherent regulation can be achieved, that is, the heating power of each region is independently given, the output of the temperature controllers is integrally controlled, and the temperatures of adjacent heating regions are prevented from interfering with each other by the same increase and decrease of the heater power.

Example 2:

the present embodiment is further optimized based on the above embodiment, as shown in fig. 1, the same parts as those in the foregoing technical solution will not be described herein again, and in order to further implement the present invention better, the following setting structure is particularly adopted: the thermocouple 3 detects the temperature in the vacuum chamber 4 and feeds back a signal to the temperature controller 1 to be used as a reference signal for the temperature controller 1 to control the power regulation controller 2.

When the temperature control device is used, the thermocouple 3 detects the temperature in the area where each group of heaters in the vacuum chamber cavity 4 are located and feeds back signals to the temperature controller 1, and the temperature controller controls each group of outputs of the power regulation controller 2 according to the detected signals, so that the purposes of dynamically regulating the outputs and keeping the temperature constant are achieved.

Example 3:

the present embodiment is further optimized based on any of the above embodiments, as shown in fig. 1, the same parts as those in the foregoing technical solution will not be described herein again, and in order to further implement the present invention better, the following setting structure is particularly adopted: the temperature controller 1 controls the power regulation controller 2 by outputting a 4-20mA current signal.

Example 4:

the present embodiment is further optimized based on any of the above embodiments, as shown in fig. 1, the same parts as those in the foregoing technical solution will not be described herein again, and in order to further implement the present invention better, the following setting structure is particularly adopted: 5 groups of heaters 5 are arranged in the vacuum chamber cavity 4, and the power supply voltages of the 5 groups of heaters in the constant temperature stage are respectively 50%, 45%, 55%, 48% and 65% of the input voltage of the power regulation controller 2.

Example 5:

the present embodiment is further optimized based on any of the above embodiments, as shown in fig. 1, the same parts as those in the foregoing technical solution will not be described herein again, and in order to further implement the present invention better, the following setting structure is particularly adopted: the fluctuation range of the input voltage of the power regulation controller 2 is ± 10%.

Example 6:

the present embodiment is further optimized based on any of the above embodiments, as shown in fig. 1, the same parts as those in the foregoing technical solution will not be described herein again, and in order to further implement the present invention better, the following setting structure is particularly adopted: the vacuum chamber cavity 4 adopts a 304 vacuum chamber cavity.

Example 7:

the present embodiment is further optimized based on any of the above embodiments, as shown in fig. 1, a baking heating system includes a temperature controller 1, the temperature controller 1 is connected with a power adjustment controller 2 capable of simultaneously controlling 5 groups of heaters (heating wires) 5, the 5 groups of heaters 5 are disposed in a vacuum chamber cavity 4 adopting a 304 vacuum chamber cavity, the 5 groups of heaters 5 are respectively a heater a, a heater B, a heater C, a heater D and a heater E, the 5 groups of heaters 5 in the vacuum chamber cavity 4 respectively correspond to measurement areas (for realizing temperature measurement of the area where the 5 groups of heaters are located) which are a measurement area a1, a measurement area B1, a measurement area C1, a measurement area D1 and a measurement area E1, the 5 groups of heaters 5 are respectively located in an area a, an area B, an area C, an area D and an area E; the thermocouple 3 is capable of measuring the temperature of each measurement zone and feeding back the measured temperature signal to the temperature controller 1 for use as a reference signal for the regulation control of the power regulation controller 2.

Wherein, the input voltages of the power adjusting controller 2 for the heater a, the heater B, the heater C, the heater D and the heater E are respectively 50% (U1), 45% (V1), 55% (W1), 48% (U2) and 65% (V2) of the input of the power adjusting controller 2 in the constant temperature stage;

the working principle of the system is as follows:

the temperature controller 1 outputs a 4-20mA current signal to control the power regulation controller 2, and the thermocouple (temperature probe) 3 feeds back a temperature signal to the temperature controller 1 to dynamically regulate the output, thereby achieving the purpose of constant temperature.

When Main Power is 90%:

the voltage input by the heater in the area A is as follows: input power AC220V × (90% × 50%), block B AC220V × (90% × 45%), block C AC220V × (90% × 55%), block D AC220V × (90% × 48%), and block E AC220V × (90% × 65%). The heaters in the A-E areas are output at the maximum power at the initial heating stage, the temperature controller controls the heaters to intervene in the constant temperature stage, each group of heaters are output at the corresponding amplitude limiting power, the heaters enter the controlled adjustment stage, and the constant temperature starts.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way, and all simple modifications and equivalent variations of the above embodiments according to the technical spirit of the present invention are within the scope of the present invention.

Claims

1. The utility model provides a toast heating system, includes temperature controller (1), power regulation controller (2), thermocouple (3) and vacuum chamber cavity (4), its characterized in that: a plurality of groups of heaters (5) are arranged in the vacuum chamber cavity (4), the plurality of groups of heaters (5) are connected and controlled through a power regulation controller (2), and the temperature controller (1) is connected and controlled with the power regulation controller (2).

2. The baking heating system of claim 1, wherein: the thermocouple (3) detects the temperature in the vacuum chamber cavity (4) and feeds back a signal to the temperature controller (1) to be used as a reference signal of the temperature controller (1) for controlling the power regulation controller (2).

3. The baking heating system of claim 2, wherein: the temperature controller (1) controls the power regulation controller (2) by outputting a 4-20mA current signal.

4. The baking heating system according to any one of claims 1 to 3, wherein: and 5 groups of heaters (5) are arranged in the vacuum chamber cavity (4), and the power supply voltages of the 5 groups of heaters in the constant temperature stage are respectively 50%, 45%, 55%, 48% and 65% of the input voltage of the power regulation controller (2).

5. The baking heating system according to any one of claims 1 to 3, wherein: the fluctuation range of the input voltage of the power regulation controller (2) is +/-10%.

6. The baking heating system of claim 4, wherein: the fluctuation range of the input voltage of the power regulation controller (2) is +/-10%.

7. The baking heating system according to any one of claims 1 to 3, wherein: the vacuum chamber cavity (4) adopts a 304 vacuum chamber cavity.