CN113910052B - Integrated device and method for in-situ repair and monitoring of fused quartz optical element in whole process - Google Patents
Integrated device and method for in-situ repair and monitoring of fused quartz optical element in whole process Download PDFInfo
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- CN113910052B CN113910052B CN202111192450.1A CN202111192450A CN113910052B CN 113910052 B CN113910052 B CN 113910052B CN 202111192450 A CN202111192450 A CN 202111192450A CN 113910052 B CN113910052 B CN 113910052B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/20—Drives or gearings; Equipment therefor relating to feed movement
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
- B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
- B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
- B24B49/045—Specially adapted gauging instruments
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
Abstract
The invention discloses a fused quartz optical element overall process in-situ repair and monitoring integrated device and a method, the device comprises a repair platform, an X-axis linear shaft which is horizontally arranged is arranged on the repair platform, a rigid support adjusting mechanism for installing and fixing a repaired fused quartz optical element is arranged on the X-axis linear shaft, a magnetorheological repair unit and an optical imaging monitoring unit are respectively arranged on the repair platform corresponding to different positions on the X-axis linear shaft, the optical imaging monitoring unit comprises an image generator, an imaging detector and an image monitoring control processing unit, and the image generator and the imaging detector are respectively connected with the image monitoring control processing unit. The method can realize the in-situ detection of the large-caliber fused quartz element and the real-time in-situ monitoring in the magnetorheological repairing process, thereby realizing the shape whole-process repairing of the large-caliber fused quartz element taking the test, the evaluation, the repairing, the monitoring, the evaluation and the decision as the whole process and providing a basis for the process optimization.
Description
Technical Field
The invention relates to a fused quartz optical element processing technology, in particular to a fused quartz optical element overall process in-situ repair and monitoring integrated device and method.
Background
Under the traction of high technical requirements of laser fusion, the quality control problem of the ultra-precision processing surface of a fused quartz element becomes a problem of important attention in inertial confinement fusion research, and the processing surface quality of an optical element directly influences the service performance of a strong laser system. The disc type magneto-rheological technology for realizing rapid large-area repair of small-size damaged points on the surface of a fused quartz element is a novel technology, can effectively solve the problem of rapid repair of large-probability small-size damaged points, and has defects in the repair process. The repair process of the large-caliber fused quartz element is a process of repeated iteration for many times, and not only the change condition of the surface damage point needs to be paid attention to constantly in the repair process, but also the change condition of the shape precision needs to be paid attention to. The two parts of repair and detection in the existing repair scheme are independently carried out, firstly, a large-caliber fused quartz element containing a damage point is installed on a disc type magnetorheological repair platform for repair, and then the repaired element is subjected to surface damage and shape precision detection and evaluation. And if the surface damage point and the shape precision simultaneously meet the set repair requirement, completing the repair. If either the surface damage point or the shape accuracy does not meet the requirements, the element needs to be remounted on the disc type magnetorheological repairing platform to be continuously repaired until the repairing requirements are met. In the repairing process, the repairing effect of the workpiece needs to be repeatedly detected and evaluated according to the repairing iteration number, so that the following problems exist: 1. the whole repairing process needs to mount the workpiece for multiple times, and a huge challenge is provided for positioning in order to ensure the stability of repairing and detecting; 2. the whole repairing process needs the continuous switching of the workpiece between the repairing platform and the detection platform, and great challenge is provided for secondary damage control; 3. the existing detection processes are posterior, the repair process needs to be optimized and adjusted in the next round based on the detection result after the repair is finished every time, and the shape precision cannot be monitored and fed back in the repair process in real time, so that the timeliness and the global property of process optimization are reduced, and the efficiency control of the whole repair process is not facilitated.
Disclosure of Invention
The technical problems to be solved by the invention are as follows: the invention can realize the in-situ detection of the large-caliber fused quartz element and can also realize the real-time in-situ monitoring in the magnetorheological repair process, thereby realizing the shape in-situ repair of the large-caliber fused quartz element in the whole process of testing, evaluating, repairing, monitoring, evaluating and deciding and providing a basis for the process optimization of the large-caliber fused quartz element.
In order to solve the technical problems, the invention adopts the technical scheme that:
the device comprises a repairing platform, wherein an X-axis linear shaft is horizontally arranged on the repairing platform, a rigid support adjusting mechanism used for installing and fixing the repaired fused quartz optical element is arranged on the X-axis linear shaft, a magnetorheological repairing unit and an optical imaging monitoring unit are respectively arranged on the repairing platform corresponding to different positions on the X-axis linear shaft, the optical imaging monitoring unit comprises an image generator, an imaging detector and an image monitoring control processing unit, and the image generator and the imaging detector are respectively connected with the image monitoring control processing unit.
Optionally, the magnetorheological repairing unit comprises a moving shaft system, a polishing motor and a polishing disc, the polishing motor is mounted on the repairing platform through the moving shaft system, and the polishing disc is connected with an output shaft of the polishing motor.
Optionally, the motion shaft system includes a Y-axis linear axis and a Z-axis linear axis, which are arranged perpendicular to each other, the Y-axis linear axis is arranged along a vertical direction, and the Z-axis linear axis is arranged along a horizontal direction and perpendicular to the X-axis linear axis.
Optionally, the optical imaging monitoring unit further comprises an integral support, the image generator and the imaging detector are respectively mounted on the integral support, the image generator and the imaging detector are symmetrically arranged relative to the repaired fused silica optical element, so that an image generated by the image generator is reflected to the visual field of the imaging detector through the repaired fused silica optical element, and the integral support is mounted on the repair platform.
Optionally, be equipped with the iron base on the monolith support, be equipped with the adjustable linking arm that has the magnetism base on the imaging detector, just the magnetism base is connected with iron base magnetism adsorption.
Optionally, the rigid support adjustment mechanism includes bottom lift platform and upper portion adjustment platform, bottom lift platform passes through rotation adjustment mechanism and installs on X axle straight line axle, upper portion adjustment platform links to each other with bottom lift platform through a plurality of adjusting bolt that arrange along vertical direction, just upper portion adjustment platform be equipped with many along the horizontal slide rail of radial distribution and middle part intercommunication on the surface, inlay in the horizontal slide rail and be equipped with the fixation clamp that is used for the fixed prosthetic fused quartz optical element of centre gripping.
The invention provides an application method of the fused quartz optical element whole-process in-situ repair and monitoring integrated device, which comprises the following steps:
1) Mounting and fixing the repaired fused quartz optical element on a rigid support adjusting mechanism;
2) Moving the rigid support adjusting mechanism and the repaired fused quartz optical element to a position corresponding to the optical imaging monitoring unit through an X-axis linear shaft, and detecting the repaired fused quartz optical element through the optical imaging monitoring unit; if the detection is unqualified, skipping to execute the step 3) to continue processing; otherwise, ending and exiting.
3) Moving the rigid support adjusting mechanism and the repaired fused quartz optical element to a position corresponding to the magnetorheological repairing unit through an X-axis linear shaft, and performing magnetorheological modification on the repaired fused quartz optical element through the magnetorheological repairing unit based on a detection result; jump execution step 2).
Optionally, after step 1) and before step 2), the method further comprises the step of adjusting the rigid support adjusting mechanism so that the repaired fused silica optical element is fully aperture-illuminated by the image generator and the complete shape of the repaired fused silica optical element is captured by the imaging detector.
Optionally, when the repaired fused silica optical element is detected by the optical imaging monitoring unit in the step 2), the obtained detection result includes the surface roughness and the number of the damaged points.
Optionally, the detecting of disqualification in step 2) means that at least one of the surface roughness and the number of damage points does not meet the standard; in the step 3), when the magnetorheological repairing unit carries out magnetorheological modification on the repaired fused quartz optical element based on the detection result, if the number of the damage points does not reach the standard, the repaired fused quartz optical element is removed to a specified depth through magnetorheological; and if the number of the damage points reaches the standard and the surface roughness does not reach the standard, modifying the repaired fused quartz optical element by magneto-rheological modification.
Compared with the prior art, the invention has the following advantages: aiming at the problems that a workpiece is low in repeated clamping and positioning precision and easy to deform in the process of repairing a large-caliber fused quartz element by disc type magneto-rheological property, new surface damage and shape error are easy to introduce in the element repairing and detecting conversion process, the element shape precision is easy to lose control in the repairing process, and the like, the non-contact detection technology for the shape error and the damage defect is introduced on a magneto-rheological repairing platform, in-situ monitoring of the large-caliber fused quartz element shape repairing in the whole repairing process is realized, disc type magneto-rheological property repairing is realized, and small-size damage points of the whole-caliber whole surface are quickly removed, so that the in-situ detection of the shape precision and the damage point characteristics of the large-caliber fused quartz element can be realized, in-situ monitoring of the shape precision and the damage point change in the whole-process of the magneto-rheological property repairing process can be realized, in-situ feedback is provided for the magneto-rheological property repairing process, and the overall-process repairing of the large-caliber fused quartz element by testing, evaluating, repairing, monitoring, evaluating and deciding is provided with a basis for process optimization.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
Fig. 1 is a schematic perspective view of a device according to an embodiment of the present invention at a detection position.
Fig. 2 is a schematic perspective view of the apparatus of the embodiment of the present invention at a processing station.
Fig. 3 is a schematic diagram of the working principle of the optical imaging monitoring unit according to the embodiment of the present invention.
FIG. 4 is a schematic diagram showing a comparison of the process flow of the method of using the apparatus of the embodiment of the present invention with the process flow of the conventional method, wherein (a) is the process flow of the conventional method and (b) is the process flow of the method of using the apparatus of the embodiment of the present invention.
Illustration of the drawings: 1. repairing the platform; 2. an X-axis linear axis; 3. a rigid support adjustment mechanism; 31. a bottom lifting platform; 32. an upper adjustment platform; 4. a magnetorheological repairing unit; 41. a motion axis system; 411. a Y-axis linear axis; 412. a Z-axis linear axis; 42. polishing the motor; 43. a polishing disk; 5. an optical imaging monitoring unit; 51. an image generator; 52. an imaging detector; 521. a magnetic base; 522. an adjustable connecting arm; 53. an image monitoring control processing unit; 54. an integral support; 541. a base made of iron.
Detailed Description
The in-situ repair and monitoring integrated device and method for the whole process of the fused quartz optical element will be further described in detail below by taking a large-caliber fused quartz plane mirror as an example of the repaired fused quartz optical element. The whole-process in-situ repair and monitoring integrated device and method can be applied to other structural types of fused quartz optical elements, such as other rotationally symmetrical aspheric surfaces, off-axis aspheric surfaces and even non-rotationally symmetrical free-form surfaces.
As shown in fig. 1, fig. 2 and fig. 3, the present embodiment provides an in-situ repair and monitoring integrated device for a whole process of a fused quartz optical element, which includes a repair platform 1, an X-axis linear shaft 2 horizontally arranged on the repair platform 1, a rigid support adjusting mechanism 3 for installing and fixing the repaired fused quartz optical element on the X-axis linear shaft 2, a magnetorheological repair unit 4 and an optical imaging monitoring unit 5 respectively arranged on the repair platform 1 at different positions corresponding to the X-axis linear shaft 2, the optical imaging monitoring unit 5 including an image generator 51, an imaging detector 52 and an image monitoring control processing unit 53, wherein the image generator 51 and the imaging detector 52 are respectively connected to the image monitoring control processing unit 53.
In this embodiment, the repair platform 1 includes a bottom support platform and a mounting rack for mounting the magnetorheological repair unit 4, and in addition, the repair platform 1 may also be designed to have a desired structure as needed to carry various components to be mounted.
In this embodiment, the X-axis linear shaft 2 is composed of an X-axis slide carriage and an X-axis guide rail which are matched with each other, and a locking mechanism is arranged between the X-axis slide carriage and the X-axis guide rail, the X-axis guide rail is installed on the repairing platform 1, and the rigid support adjusting mechanism 3 is installed on the X-axis slide carriage and used for switching the rigid support adjusting mechanism 3 and the repaired fused quartz optical element between a detection position (see fig. 1) and a processing position (see fig. 2).
In this embodiment, the rigid support adjusting mechanism 3 is a positioning structure for supporting and accurately adjusting the repaired fused quartz optical element, and needs to simultaneously satisfy displacement adjustment, tilt adjustment and height adjustment in the vertical direction in the horizontal plane, and in order to ensure that the repaired fused quartz optical element needs to be illuminated by the full aperture of the image generator 51 and needs to be acquired by the imaging detector 52 into a complete shape, the adjusting structure is required to be capable of realizing translation adjustment of the measured mirror in the X and Y directions; in order to ensure the in-situ detection precision, the detected mirror surface needs to be adjusted to be parallel to the reference objective table, so that the adjustment structure is required to realize the inclination adjustment of the repaired fused quartz optical element in the X and Y directions; in order to verify the measurement accuracy of the measurement system in the height direction, an adjustment structure is required to enable adjustment of the repaired fused silica optical element in the X direction. In this embodiment, the rigid support adjusting mechanism 3 includes a bottom lifting platform 31 and an upper adjusting platform 32, the bottom lifting platform 31 is installed on the X-axis linear shaft 2 through a rotation adjusting mechanism, the upper adjusting platform 32 is connected with the bottom lifting platform 31 through a plurality of adjusting bolts arranged along the vertical direction, a plurality of horizontal sliding rails distributed along the radial direction and having a middle part communicated are arranged on the surface of the upper adjusting platform 32, and fixing clamps for clamping and fixing the repaired fused quartz optical element are embedded in the horizontal sliding rails. Because the bottom lifting platform 31 is installed on the X-axis linear shaft 2 through the rotation adjusting mechanism, the bottom lifting platform 31 can realize free horizontal rotation; the upper adjusting platform 32 is connected with the bottom lifting platform 31 through a plurality of adjusting bolts arranged in the vertical direction, so that the height of the upper adjusting platform 32 can be adjusted through the stroke of each adjusting bolt, the sizes of different inclined directions and inclined directions of the upper adjusting platform 32 are adjusted, a plurality of horizontal sliding rails which are distributed along the radial direction and are communicated with the middle part are arranged on the surface of the upper adjusting platform 32, and the mounting position of a fixing clamp used for clamping and fixing the repaired fused quartz optical element can be conveniently adjusted. During installation, the repaired fused quartz optical element is placed on the rigid support adjusting mechanism 3, the position of the repaired fused quartz optical element in a plane is adjusted, the repaired fused quartz optical element is imaged in the middle area of the target surface of the imaging detector 52, and the surface of the repaired fused quartz optical element is adjusted to be parallel to the surface of the repairing platform 1. Fixing the measuring head on the height gauge, with the direction of the measuring head facing downwards, measuring the height of the edge point of the flat crystal by using a height gauge combined measuring system, and adjusting the rigid support adjusting mechanism 3 until the height difference of all points on the repaired fused quartz optical element is within 0.01 mm.
When the magnetorheological repairing unit 4 is repaired, the polishing disk is used for driving the rheological property of the magnetorheological fluid in the magnetic field to repair the workpiece, as shown in fig. 1 and fig. 2, in the embodiment, the magnetorheological repairing unit 4 comprises a moving shaft system 41, a polishing motor 42 and a polishing disk 43, the polishing motor 42 is installed on the repairing platform 1 through the moving shaft system 41, and the polishing disk 43 is connected with an output shaft of the polishing motor 42. The output shaft of the polishing motor 42 can drive the polishing disc 43 to rotate and can realize revolution and autorotation, so that the magnetorheological fluid forms Bingham fluid with stronger shearing yield strength to quickly repair the fused quartz optical element.
In this embodiment, the moving shaft system 41 includes a Y-axis linear shaft 411 and a Z-axis linear shaft 412 that are arranged perpendicular to each other, the Y-axis linear shaft 411 is arranged in the vertical direction, and the Z-axis linear shaft 412 is arranged in the horizontal direction and perpendicular to the X-axis linear shaft 2. The Y-axis linear shaft 411 is composed of a Y-axis carriage and a Y-axis guide rail which are matched with each other, and a locking mechanism is arranged between the Y-axis carriage and the Y-axis guide rail. In this embodiment, the polishing motor 42 is mounted on a Y-axis carriage, and the Y-axis guide rail is mounted on the Z-axis linear shaft 412 along the vertical direction, so as to achieve Y-axis direction adjustment of the polishing motor 42. The Z-axis linear shaft 412 is composed of a Z-axis slide carriage and a Z-axis guide rail which are matched with each other, and a locking mechanism is arranged between the Z-axis slide carriage and the Z-axis guide rail. In this embodiment, the Y-axis guide rail is installed on the Z-axis carriage, and the Z-axis guide rail is installed on the repairing platform 1 along the water direction, so as to realize the Z-axis direction adjustment of the polishing motor 42. It should be noted that the order of the Y-axis linear shaft 411 and the Z-axis linear shaft 412 may be interchanged, and the polishing motor 42 may be selectively mounted on the Z-axis linear shaft 412 through the Y-axis linear shaft 411, or the polishing motor 42 may be selectively mounted on the Y-axis linear shaft 411 through the Z-axis linear shaft 412, as required.
In this embodiment, the image generator 51 is an LCD display with a pixel size of 0.51mm and a brightness of 200-300 cd/m 2 The width of the image generator 51 should be larger than twice the caliber of the repaired fused silica optical element, and a 43-inch screen is suitable; other devices having a moving image output function may be used.
In this embodiment, the imaging detector 52 is implemented by a CCD camera. The sensitivity of the imaging detector 52 should be high and the exposure time can be controlled to adjust in real time as needed; the frame frequency should be high enough to meet the requirement of high-speed measurement; for convenient operation, the imaging detector 52 with USB interface can be selected as required.
In this embodiment, the image monitoring control processing unit 53 is implemented by a computer.
As shown in fig. 1 and fig. 2, in the present embodiment, the optical imaging monitoring unit 5 adopts a vertical optical path structure, the optical imaging monitoring unit 5 further includes an integral support 54, the image generator 51 and the imaging detector 52 are respectively mounted on the integral support 54, the image generator 51 and the imaging detector 52 are symmetrically arranged with respect to the repaired fused silica optical element, so that the image generated by the image generator 51 is reflected to the field of view of the imaging detector 52 through the repaired fused silica optical element, and the integral support 54 is mounted on the repair platform 1. Image generator 51 is fixed and is put with the horizontal off-axis branch of imaging detector 52 on whole support 54, and whole support 54 is used for supporting and fixing image generator 51, imaging detector 52, needs to satisfy the better structure of rigidity and material in order to guarantee that overall structure's rigidity and stability are light, can dismantle, the transportation of being convenient for, and it is convenient to dismantle simultaneously, assemble to satisfy the normal position and detect, be convenient for debug image generator 51, imaging detector 52. To further increase the rigidity of the entire support structure, reinforcing ribs are provided around the integral support 54 in this embodiment.
Because the imaging range of the imaging detector 52 needs to be adjusted when the device of the embodiment is used, the detection range of the imaging detector 52 can cover the whole reflector, and meanwhile, the imaging detector 52 needs to be focused, so that the imaging detector 52 can clearly image the measured mirror, namely, the measured mirror is conjugated with the target surface object image of the imaging detector 52. As shown in fig. 1 and fig. 2, in this embodiment, the iron base 541 is disposed on the integral support 54, the adjustable connecting arm 522 with the magnetic base 521 is disposed on the imaging detector 52, and the magnetic base 521 is magnetically attached to the iron base 541, so that the position and the orientation of the imaging detector 52 can be conveniently adjusted, the adjustment flexibility is high, and the adjustment efficiency is improved. After the adjustment and focusing of the imaging region of the imaging detector 52 is completed by adjusting the magnetic base 521 for fixing the imaging detector 52 and the focusing device of the camera, the rotation of the imaging detector 52 needs to be adjusted so that the row and column directions of the pixels are parallel to the row and column directions of the pixels of the image generator 51. The working principle of the optical imaging monitoring unit 5 is shown in fig. 3. The image monitor control processing unit 53 controls the image generator 51 to generate the sine stripe bright spot a s (x s ,y s ,z s ) And the point on the repaired fused silica optical element which satisfies the reflection relation is marked as A M The focal point coordinate of the imaging detector 52 is C (x) c ,y c ,z c ) The bright point As corresponds to the repaired corresponding point A of the fused silica optical element M Focal point coordinates of the imaging detector 52C included angle A s A M C angle bisector A M A N Namely a detection point A on the measured lens M Normal line of the position, then can detect A on the measured mirror M The relative position relationship of the image generator 51, the repaired fused quartz optical element and the imaging detector 52 can be calibrated by utilizing the slope components of the points along the x axis and the y axis and utilizing the methods of three coordinates and the like; similarly, the bright spot Bs on the other side corresponds to the corresponding spot B of the repaired fused silica optical element M And the focal point coordinate C of the imaging detector 52 to form an included angle B s A M Angular bisector B of C M B N I.e. the probe point B on the measured mirror M Normal to (c). On the basis, the conjugate mapping relation between the pixel coordinate of the target surface of the detector and the object image of the measured mirror surface is used as an auxiliary, and the repaired fused quartz optical element A can be calculated M The normal slope of (a). Through a 16-step phase-shifting coding mode, the image monitoring control processing unit 53 processes and finds the corresponding relation between each point of the mirror surface and the image generator 51 and the imaging detector 52, and then the normal slope of each point of the mirror surface can be obtained. And (4) reconstructing the shape of the measured surface and the characteristics of the damage point by integrating the slope of each point. It should be noted that, it is a prior art to obtain the characteristics of the measured surface shape and the damage point based on the corresponding relationship between the repaired fused quartz optical element based on the images between the image generator 51 and the imaging detector 52, and therefore, the description is not provided herein, and the details are as follows: wang S, hou Y, li D, et al.3D shape medium using reverse Hartmann test [ J].Optics Communications,2020,464:125552。
As shown in fig. 4 (b), the present embodiment provides an application method of the above-mentioned integrated apparatus for repairing and monitoring a fused silica optical element in situ in a whole process, including:
1) The repaired fused quartz optical element is fixedly arranged on the rigid support adjusting mechanism 3;
2) The rigid support adjusting mechanism 3 and the repaired fused quartz optical element are moved to a position corresponding to an optical imaging monitoring unit 5 through an X-axis linear shaft 2, and the repaired fused quartz optical element is detected through the optical imaging monitoring unit 5; if the detection is unqualified, skipping to execute the step 3) to continue processing; otherwise, ending and exiting.
3) The rigid support adjusting mechanism 3 and the repaired fused quartz optical element are moved to a position corresponding to the magnetorheological repairing unit 4 through the X-axis linear shaft 2, and the repaired fused quartz optical element is subjected to magnetorheological modification through the magnetorheological repairing unit 4 based on a detection result; jump execution step 2).
As seen from the steps 1) to 3), the magnetorheological repairing can meet the repairing requirement without one-time processing, and the quality of the processed mirror shape is ensured by relying on a high-precision shape detection technology. Fig. 4 (a) shows a conventional disc repairing process, wherein the disc magnetorheological repairing is completed and then needs to be disassembled for detection, and the conventional magnetorheological repairing large-caliber fused quartz reflector does not need to be processed once to reach the required surface quality, and the quality of the processed reflector needs to be ensured by means of a high-precision detection technology. For detection of the magnetorheological repairing large-caliber fused quartz reflector, a mirror body is usually required to be taken down from a machine tool device after magnetorheological repairing, surface quality detection is completed on a proper detection platform, if the target quality is not achieved, the machining mirror is required to be reloaded back to the machine tool, and the magnetorheological repairing is continued after a machining path is adjusted. As shown in fig. 4 (b), the workpiece does not need to be mounted for multiple times in the entire repairing process of the method of the present embodiment, so that the stability of repairing and detecting is ensured, and the introduction of positioning errors is not considered. The whole repairing process does not need to switch the workpiece between the repairing platform and the detecting platform continuously, and secondary damage to the workpiece is avoided. The existing detection processes are posterior, the repair process needs to be optimized and adjusted in the next round based on the detection result after the repair is completed every time, and the shape precision cannot be monitored and fed back in the repair process in real time, so that the timeliness and the global property of process optimization are reduced, and the efficiency control of the whole repair process is not facilitated. And the existing magneto-rheological repair has obvious polishing grains, small polishing spots and low efficiency, and the adoption of the disc type magneto-rheological repair can realize high efficiency, stable removal function, high surface quality and small sub-surface damage.
In this embodiment, the method further includes, after step 1) and before step 2), the step of adjusting the rigid support adjusting mechanism 3 so that the repaired fused silica optical element is fully aperture-illuminated by the image generator 51 and the imaging detector 52 captures the complete shape of the repaired fused silica optical element.
In this embodiment, when the repaired fused silica optical element is detected by the optical imaging monitoring unit 5 in step 2), the obtained detection result includes the surface roughness and the number of damaged points.
In the embodiment, the unqualified detection in the step 2) means that at least one of the surface roughness and the number of damage points does not reach the standard; in the step 3), when the magnetorheological modification unit 4 performs magnetorheological modification on the repaired fused quartz optical element based on the detection result, if the number of the damage points does not reach the standard (for example, the number of the damage points with the standard of less than 50 μm in the embodiment is reduced by ninety percent compared with the original number of the damage points), the repaired fused quartz optical element is removed by the magnetorheological to a specified depth; and if the number of the damage points meets the standard and the surface roughness does not meet the standard (for example, the standard in the embodiment is that the surface roughness is better than 1 nm), carrying out magnetorheological modification on the repaired fused quartz optical element. Through the mode, compared with the existing magneto-rheological equipment, the material removal efficiency is improved, the in-situ monitoring of the shape repair of the large-caliber fused quartz element in the whole repair process is improved, and the quick removal of small-size damage points of the whole caliber is realized through disc type magneto-rheological repair. Under traditional monitoring, the mirror body is usually required to be taken down from a machine tool device after being subjected to magnetorheological processing and repairing, surface shape measurement is completed on a proper detection platform, if the repairing requirement is not met, the processing mirror is required to be reloaded back to the machine tool, and the magnetorheological repairing is continuously carried out after the processing parameters are adjusted. In the process, when the machined mirror is reloaded on the machine tool, the position before detection is difficult to ensure, and the stress of the clamp is uncontrollable during clamping, so that a new clamping error is caused, the measurement repeatability is reduced, and new damage and a new shape error are caused. In the embodiment, when the shape and the damage point are monitored in situ, the disc type magnetorheological repairing platform only needs to be moved to the position below the image generator 51 along the X axis for monitoring, and the damaged element does not need to be detached from the platform. In addition, when the repaired fused quartz optical element is removed to the designated depth through the magneto-rheological property, the residence time can be further analyzed and solved according to the shape error, and the designated depth of the magneto-rheological property can be further determined by combining the type of the damage point.
In conclusion, the application method of the integrated device for in-situ repair and monitoring of the whole process of the fused quartz optical element in the embodiment is directed at the problems that the repeated clamping and positioning precision of a workpiece is low and easy to deform, new surface damage and shape error are easy to introduce in the element repair and detection conversion process, the element shape precision is easy to lose control in the repair process and the like in the disc type magnetorheological repair process of repairing a large-caliber fused quartz element, a non-contact detection technology for shape error and damage defect is introduced on a disc type magnetorheological repair platform, in-situ monitoring of the shape repair of the large-caliber fused quartz optical element in the whole repair process is realized, and the disc type magnetorheological repair is realized to quickly remove small-sized damage points of the whole-caliber surface. By applying the technology, the shape precision and the damage point characteristic in-situ detection of the large-caliber fused quartz element can be realized, the shape precision and the damage point change can be monitored in the disc type magneto-rheological repair process in real time in situ, and in-situ feedback is provided for the disc type magneto-rheological repair process, so that the basis for the shape whole-process repair process optimization of the large-caliber fused quartz element in the whole process of testing, evaluation, repair, monitoring, evaluation and decision is provided.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to those skilled in the art without departing from the principles of the present invention should also be considered as within the scope of the present invention.
Claims (8)
1. The application method of the integrated device for the whole-process in-situ restoration and monitoring of the fused quartz optical element is characterized in that the integrated device for the whole-process in-situ restoration and monitoring of the fused quartz optical element comprises a restoration platform (1), an X-axis linear shaft (2) horizontally arranged is arranged on the restoration platform (1), a rigid support adjusting mechanism (3) for installing and fixing the restored fused quartz optical element is arranged on the X-axis linear shaft (2), a magnetorheological restoration unit (4) and an optical imaging monitoring unit (5) are respectively arranged on the restoration platform (1) corresponding to different positions on the X-axis linear shaft (2), the optical imaging monitoring unit (5) comprises an image generator (51), an imaging detector (52) and an image monitoring control processing unit (53), the image generator (51) and the imaging detector (52) are respectively connected with the image monitoring control processing unit (53), the optical imaging monitoring unit (5) further comprises an integrated bracket (54), the image generator (51) and the imaging detector (52) are respectively arranged on the integrated bracket (54), and the fused quartz optical imaging detector (51) and the image generator (52) and the imaging detector (52) are symmetrically arranged in the view field of the restored quartz optical element (51) through the fused quartz optical element, the integral support (54) is arranged on the repair platform (1); the application method comprises the following steps:
1) Mounting and fixing the repaired fused quartz optical element on a rigid support adjusting mechanism (3);
2) The rigid support adjusting mechanism (3) and the repaired fused quartz optical element are moved to a position corresponding to an optical imaging monitoring unit (5) through an X-axis linear shaft (2), and the repaired fused quartz optical element is detected through the optical imaging monitoring unit (5); if the detection is unqualified, skipping to execute the step 3) to continue processing; otherwise, ending and exiting;
3) The rigid support adjusting mechanism (3) and the repaired fused quartz optical element are moved to the position corresponding to the magnetorheological repairing unit (4) through the X-axis linear shaft (2), and the repaired fused quartz optical element is subjected to magnetorheological modification through the magnetorheological repairing unit (4) based on the detection result; skipping to execute the step 2);
the step 2) of detecting the repaired fused silica optical element through the optical imaging monitoring unit (5) comprises the following steps: for image monitoringThe control processing unit (53) controls the sinusoidal fringe bright spots on one side generated by the image generator (51)
The point on the repaired fused silica optical element that satisfies the reflection relationship is recorded as
The focal point coordinate of the imaging detector (52) is
According to the sine stripe bright spots
Corresponding point of repaired fused silica optical element
Focal point coordinates of an imaging detector (52)
The included angle formed by the three
Angle bisector of
Is the corresponding point of the repaired fused quartz optical element
Normal to the surface of the optical element, and measuring the corresponding point of the repaired fused quartz optical element
The slope components along the x-axis and y-axis are used to calibrate the image generator (51), repaired fused silica optics, and the like using three-dimensional coordinatesThe relative positional relationship of the elements to the imaging detector (52); through a coding mode of 16-step phase shifting, the relative position relation between each point of the mirror surface, the image generator (51) and the imaging detector (52) is found through the processing of the image monitoring control processing unit (53), the normal slope of each point on the repaired fused quartz optical element is obtained, and the measured surface shape and the characteristics of the damaged point of the repaired fused quartz optical element are reconstructed through the integration of the normal slopes of each point.
2. The application method of the integrated full-process in-situ repair and monitoring device for the fused quartz optical element as claimed in claim 1, wherein the magnetorheological repair unit (4) comprises a motion shaft system (41), a polishing motor (42) and a polishing disk (43), the polishing motor (42) is mounted on the repair platform (1) through the motion shaft system (41), and the polishing disk (43) is connected with an output shaft of the polishing motor (42).
3. The application method of the integrated in-situ repairing and monitoring device for the whole process of the fused silica optical element as claimed in claim 2, wherein the moving shafting (41) comprises a Y-axis linear shaft (411) and a Z-axis linear shaft (412) which are arranged perpendicularly to each other, the Y-axis linear shaft (411) is arranged along the vertical direction, and the Z-axis linear shaft (412) is arranged along the horizontal direction and is perpendicular to the X-axis linear shaft (2).
4. The application method of the integrated device for the whole-process in-situ repair and monitoring of the fused quartz optical element according to claim 1, wherein an iron base (541) is arranged on the integral support (54), an adjustable connecting arm (522) with a magnetic base (521) is arranged on the imaging detector (52), and the magnetic base (521) is in magnetic adsorption connection with the iron base (541).
5. The application method of the integrated device for in-situ repairing and monitoring of the whole process of the fused quartz optical element according to claim 1, wherein the rigid support adjusting mechanism (3) comprises a bottom lifting platform (31) and an upper adjusting platform (32), the bottom lifting platform (31) is installed on the X-axis linear shaft (2) through a rotation adjusting mechanism, the upper adjusting platform (32) is connected with the bottom lifting platform (31) through a plurality of adjusting bolts arranged along the vertical direction, a plurality of horizontal sliding rails which are distributed along the radial direction and are communicated with the middle part are arranged on the surface of the upper adjusting platform (32), and fixing clamps for clamping and fixing the repaired fused quartz optical element are embedded in the horizontal sliding rails.
6. The method for applying the integrated apparatus for in-situ repairing and monitoring of fused silica optical element in the whole process of claim 1, wherein the method further comprises the step of adjusting the rigid support adjusting mechanism (3) after the step 1) and before the step 2), so that the repaired fused silica optical element is fully bore-illuminated by the image generator (51) and the imaging detector (52) captures the complete shape of the repaired fused silica optical element.
7. The application method of the integrated device for repairing and monitoring the fused quartz optical element in situ in the whole process according to claim 6, wherein the detection result obtained in the step 2) comprises surface roughness and the number of damaged points when the repaired fused quartz optical element is detected by the optical imaging monitoring unit (5).
8. The method for applying the integrated device for repairing and monitoring the fused quartz optical element in situ in the whole process according to claim 7, wherein the disqualification detection in the step 2) means that at least one of the surface roughness and the number of the damage points does not meet the standard; in the step 3), when the magnetorheological correction unit (4) performs magnetorheological correction on the repaired fused quartz optical element based on the detection result, if the number of the damage points does not reach the standard, the repaired fused quartz optical element is removed to a specified depth through magnetorheological; and if the number of the damage points reaches the standard and the surface roughness does not reach the standard, modifying the repaired fused quartz optical element by magneto-rheological modification.
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