JP2010008192A - Fixture for measuring shape of object to be measured and method for measuring three-dimensional shape - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To speedily and three-dimensionally measure the front and back surfaces of an object to be measured with high accuracy. <P>SOLUTION: A fixture 10 for measuring the shape of an object to be measured for measuring the three-dimensional shapes of both front and back surfaces of a lens 20; reference spheres 20A and 20B; and a reference plane 30 from either the front surface side or the back surface side is used to obtain coordinates of the center points of the reference spheres 20A and 20B; the tilt of the plane of the reference plane 30; coordinates Pr1 and Pr2 of the vertices of an R1 surface and an R2 surface of the lens 20: and the directions of their optical axes L1 and L2. Measurement data on the R2 surface side are rotated on a Y-axis by 180&deg;, and measurement data on the R1 surface side and the R2 surface side are moved in parallel in such a way, for example, that coordinates O1 of the center point of the reference sphere 20A may be matched to determine the eccentricity d and tilt &theta; of the R2 surface to the R1 surface. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention provides a measuring object shape measuring tool for determining the eccentricity and inclination of the front and back surfaces based on the relative positional relationship between the front and back surfaces of a measuring object such as a lens with a measuring machine such as a three-dimensional shape measuring machine. The present invention relates to a tool and a three-dimensional shape measuring method.

  Conventionally, for example, the following methods are known as methods for obtaining the eccentricity and inclination of the front and back surfaces of a lens. The measurement method disclosed in the following Patent Document 1 measures the three-dimensional shape data of the lens and the center point coordinates of three reference spheres using a measurement object holding jig that can be measured from the front side and the back side, The three-dimensional shape data of the front and back surfaces of the lens is synthesized with reference to the center point coordinates of the reference sphere, and the eccentricity and inclination between the front and back surfaces of the lens are calculated from the lens front and back surface synthesis data.

JP 2006-78398 A

  However, in the measurement method disclosed in Patent Document 1, three reference spheres are three-dimensionally measured to obtain respective center point coordinates, and then the three-dimensional measurement of the lens front and back surfaces is performed using these center point coordinates as a reference. In order to align the data and measure the eccentricity and inclination of the vertices on the front and back surfaces of the lens, there is a problem that, particularly, the reference three-dimensional measurement takes time, and the whole three-dimensional measurement takes time.

  The present invention has been made in view of such problems, and a measurement object shape measuring jig and a three-dimensional shape measurement method capable of performing high-precision and high-speed three-dimensional measurement of the front and back surfaces of the measurement object. The purpose is to provide.

  In order to solve the above-described problems and achieve the object, a workpiece shape measurement jig according to the present invention includes a plate-like body having a first surface and a second surface facing the first surface, the first surface, and the first surface. Each of the second surfaces has two reference spheres fixed to the plate-like body so that the surface is exposed to the outside, and a first plane and a second plane parallel to each other, and the first and second planes. An object to be measured having a reference plane fixed to the plate-like body so that the first plane and the second plane are exposed to the outside, and a hole formed so as to penetrate the plate-like body. And a measured object holding portion for holding the measured object in the hole so that the front surface and the back surface are exposed on the first surface and the second surface, respectively.

  By configuring the object shape measuring jig according to the present invention as described above, the reference surface (reference surface) of the object to be measured can be obtained by three-dimensional shape measurement of two reference spheres and a reference plane. Therefore, three-dimensional measurement of the front and back surfaces of the object to be measured can be performed with high accuracy and high speed.

  In addition, the said to-be-measured object shape measurement jig | tool can further be provided with the support shaft part which supports the said plate-shaped object so that rotation is possible so that the said 1st surface and the said 2nd surface can be reversed.

  The three-dimensional shape measuring method according to the present invention includes a first surface and a second surface opposite to the first surface, and a plate that holds two reference spheres and a reference plane having two planes parallel to each other. A measuring object shape measuring jig comprising a body, wherein the reference sphere, the reference plane and at least one object to be measured are held in a state in which the surfaces of the first surface and the second surface are exposed. Measuring the three-dimensional shape of each of the two reference spheres to calculate the center point coordinates of each reference sphere; measuring the three-dimensional shape of each of the reference planes; Based on the step of calculating the inclination and the inclination about the Y axis, the step of measuring the three-dimensional shape of one surface of the object to be measured to obtain measurement data, and the measurement result of the three-dimensional shape of the reference plane , The reference plane is horizontal , The step of performing coordinate conversion on the center point coordinates, the tilt, and the measurement data, and the center point coordinates, the tilt so that a line connecting the center point coordinates of the two reference spheres is parallel to the Y axis. And the step of performing coordinate transformation about the Z-axis orthogonal to the X-axis and the Y-axis with respect to the measurement data, for each of the front surface and the back surface of the measurement object, A step of calculating relative position data between the front surface and the back surface based on measurement data obtained on the front surface and measurement data obtained on the back surface of the object to be measured.

According to the present invention, high-accuracy and high-speed three-dimensional measurement of the front and back surfaces of the object to be measured using the measurement results of the reference sphere and reference plane of the object shape measuring jig having two reference spheres and a reference plane Can be done.
In addition, three-dimensional shape measurement data acquired in different steps can be aligned by coordinate conversion using the measurement results of the reference sphere and the reference plane, and analyzed as three-dimensional shape data measured in one step.
Furthermore, by using the surface provided on the reference plane, it is possible to increase the accuracy compared to the alignment of the front and back surfaces of the object to be measured using only the reference sphere, and to measure the eccentricity and inclination of the front and back surfaces at high speed. .

  DESCRIPTION OF EMBODIMENTS Hereinafter, preferred embodiments of an object shape measuring jig and a three-dimensional shape measuring method according to the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a perspective view showing the overall configuration of a workpiece shape measuring jig according to an embodiment of the present invention. In the embodiment described below, the workpiece is manufactured by resin molding, for example. A lens will be described as an example, and in order to determine the eccentricity and inclination of the front and back surfaces of this lens, an example in which the three-dimensional shape measuring method according to the present invention is applied will be described.

  As shown in FIG. 1, an object shape measuring jig (hereinafter referred to as “measuring jig”) 10 is made of a material such as steel, stainless steel, aluminum, or brass having XY planes formed on both front and back surfaces. Is formed in a rectangular shape, and the lens 20 as at least one object to be measured is held in a state where the front and back surfaces of the lens 20 are exposed from both the front and back surfaces of the plate body 11. The measuring jig 10 is configured so as to be able to measure the eccentricity and inclination by measuring the three-dimensional shape of the lens 20 from either the front or back side of the lens 20.

  The measuring jig 10 includes two reference spheres 20A and 20B formed by processing a material such as ceramics or cemented carbide into a substantially spherical shape, an optical parallel made of a material such as ceramics or glass, steel or ceramics, or the like. A reference plane 30 having two parallel surfaces such as a gauge block made of the above material is fixed and held on the plate-like body 11.

  Specifically, the measurement jig 10 includes, for example, a measured object holding portion 12 that holds the lens 20 in a state where the front and back surfaces are exposed at the center portion of the plate-like body 11, and two reference spheres 20A and 20B. Is a reference sphere mounting portion 13 attached by bonding or the like with the respective surfaces exposed from both the front and back surfaces of the plate-like body 11 on one end side of the plate-like body 11, and the reference plane 30 is a plate-like body. 11 on the other end side opposite to the end portion provided with the reference sphere mounting portion 13 and the object-to-be-measured holding portion 12, with the flat surfaces exposed from both the front and back surfaces of the plate-like body 11. A reference plane mounting portion 14 attached by means of, for example, and a support shaft portion 15 that supports the plate-like body 11 on both front and back surfaces so as to be rotatable in a direction indicated by an arrow R in FIG. The DUT holding part 12 has a hole (not shown) so that the front and back surfaces of the DUT are exposed when the DUT is held.

  FIG. 2 is a perspective view illustrating an example of the entire three-dimensional shape measuring apparatus including the measuring jig 10 configured as described above. The three-dimensional shape measuring apparatus includes, for example, a non-contact type three-dimensional measuring machine 1 and a computer system 2 that drives and controls the three-dimensional measuring machine 1 and executes necessary data processing.

  The coordinate measuring machine 1 is configured as follows, for example. That is, a measurement table 4 that rotatably holds the measurement jig 10 is mounted on the gantry 3, and the measurement table 4 is driven in the Y-axis direction by a Y-axis drive mechanism (not shown). Support arms 5 and 6 extending upward are fixed to the center of both side edges of the gantry 3, and an X-axis guide 7 is fixed so as to connect both upper ends of the support arms 5 and 6. An imaging unit 8 is supported on the X-axis guide 7. The imaging unit 8 is driven along the X-axis guide 7 by an X-axis drive mechanism (not shown).

  The inside of the imaging unit 8 is configured as follows. That is, a slider (not shown) is provided so as to be movable along the X-axis guide 7, and a Z-axis guide (not shown) is fixed integrally with the slider. The Z-axis guide is provided with a support plate (not shown) that is slidable in the Z-axis direction. The support plate is provided with a CCD camera 31 that is an imaging means for image measurement, and a laser probe 32 that is a non-contact displacement meter. And is attached. As a result, the CCD camera 31 and the laser probe 32 can move simultaneously in the three axis directions of X, Y, and Z while maintaining a fixed positional relationship.

  As shown in FIG. 3, an illumination device 33 for illuminating the imaging range is added to the CCD camera 31. In order to confirm the measurement position of the laser probe 32 by the laser beam, a CCD camera 34 that images the periphery of the measurement position and an illuminating device 35 for illuminating the measurement position of the laser probe 32 are located near the laser probe 32. And are provided. The laser probe 32 is supported by a vertical movement mechanism 36 for retracting the laser probe 32 when the imaging unit 8 is moved, and a rotation mechanism 37 for adapting the directivity of the laser beam to an optimum direction. .

  The laser probe 32 includes a semiconductor laser 51 and a light amount control unit 51 a that limits the amount of light emitted from the semiconductor laser 51. The light emitted from the semiconductor laser 51 forms a light spot on the measurement portion of the measurement jig 10 via a beam splitter, a quarter wavelength plate, and an objective lens (not shown). The light reflected from the measurement jig 10 is reflected by the beam splitter through the quarter wavelength plate, passes through the conoscope section (not shown), and forms interference fringes on the CCD element of the CCD camera.

  The conoscope unit is composed of an incident-side polarizer, an exit-side grating, and a birefringent crystal sandwiched between them. In other words, the incident light is polarized in the polarizer and is split into two wavefronts orthogonal to the polarization direction in the birefringent crystal, and a phase difference is generated between the two polarized light components. This leads to a 90 ° phase shift. Then, concentric interference fringes are generated by superimposing again through the lattice.

  At this time, since the period of the generated interference fringe is determined by the height (scattering angle) of the object, the frequency of the interference fringe is analyzed to detect the displacement of the measurement target in the optical axis direction. Can do. As described above, since the output of the laser probe 32 includes height information, there is an advantage that information such as a cross-sectional shape and a surface property on the scanning surface can be obtained.

  In the three-dimensional measuring machine 1, an image signal obtained by imaging the measuring jig 10 with the CCD camera 31 for image measurement and the CCD camera 34 for confirming the measurement position of the laser probe 32 is supplied to the computer 21. One of these two types of images is selected by a selection circuit Sc described later and displayed on the CRT display 25. Illumination light necessary for imaging by the CCD cameras 31 and 34 is given by the illumination control units 74 and 75 controlling the illumination devices 33 and 35, respectively, based on the control of the computer 21.

  The displacement signal obtained from the laser probe 32 is temporarily stored in the second memory 83 via the A / D converter 76 and supplied to the computer 21. Then, the imaging unit 8 including these is driven in the XYZ axis direction by an XYZ axis driving unit 77 that operates based on the control of the computer 21. The position of the imaging unit 8 in the XYZ axis direction is detected by the XYZ axis encoder 78 and supplied to the computer 21. The light amount control unit 51 a that controls the amount of laser light emitted from the semiconductor laser 51 in the laser probe 32 executes control based on a control signal from the CPU 81.

  On the other hand, the computer 21 includes a CPU 81 that is the center of control, a first memory 82 connected to the CPU 81, a second memory 83, a program storage unit 84, a work memory 85, and interfaces 86, 87, and 89. In order to display the multi-value image data stored in the first memory 82 or the image signal supplied from the CCD camera 34 and the multi-value image data selected by the selection circuit Sc on the CRT display 25. Display control unit 88.

  The CPU 81 switches the selection circuit Sc between the image measurement mode and the laser measurement mode. The image based on the multi-value image data stored in the first memory 82 or the image based on the image signal supplied from the CCD camera 34 is displayed on the CRT display 25 by the display control operation of the display control unit 88.

  On the other hand, operator instruction information input from the keyboard 22, joystick 23 and mouse 24 is input to the CPU 81 via the interface 86. Further, the CPU 81 takes in the displacement detected by the laser probe 32, XYZ coordinate information from the XYZ axis encoder 78, and the like.

  Based on the input information, the operator's instruction, the program stored in the program storage unit 84, and the table 84t, the CPU 81 moves the stage by the XYZ axis drive unit 77, analyzes the image of the lens 20 of the measurement jig 10, and the like. Various processes such as a measurement value calculation process and a control process of the output laser light amount of the semiconductor laser 51 are executed. Further, the CPU 81 controls a rotation mechanism of the measurement jig 10 (not shown) provided on the measurement table 4 to rotate the measurement jig 10 about the support shaft portion 15.

  The work memory 85 provides a work area for various processes of the CPU 81. The measured value is output to the printer 26 via the interface 87. The interface 89 is for converting CAD data of the lens 20 or the like provided by an external CAD system or the like (not shown) into a predetermined format and inputting it to the computer system 2.

  4 and 5 are flowcharts showing an example of a 3D shape measurement processing procedure of the object to be measured using the object shape measuring jig according to the embodiment of the present invention. An example of processing for measuring the three-dimensional shape of the lens 20 by attaching the measurement jig 10 with the lens 20 set thereto to the coordinate measuring machine 1 will be described. For convenience of explanation, the concave surface side of the lens 20 is described as the R1 surface side, and the convex surface side is described as the R2 surface side. As shown in FIG. 4, first, the lens 20 is attached and fixed to the hole of the measured object holding part 12 of the measuring jig 10 (step S100).

  Then, it is determined whether or not the R1 surface side of the lens 20 attached to the measurement jig 10 is up (step S101). If it is determined that the lens 20 is up (Y in step S101), step S102 is performed. Then, the measurement jig 10 is placed on the measurement table 4 of the coordinate measuring machine 1 with the R1 surface side of the lens 20 positioned upward (step S102).

  On the other hand, if it is determined that it is not up (N in step S101), the process proceeds to step S112, and the measurement jig 10 is placed on the measurement table of the coordinate measuring machine 1 while the R2 surface side of the lens 20 is positioned upward. 4 (step S112). Here, the processing after step S112 will be described later.

  When the lens 20 is disposed with the R1 surface side positioned on the upper side, next, the two reference spheres 20A and 20B attached to the reference sphere mounting portion 13 of the measurement jig 10 are three-dimensionally measured, and each reference Reference sphere measurement data, which is the three-dimensional shape measurement data of the spheres 20A and 20B, is acquired, and the reference sphere measurement data is recorded and stored in the first memory 82 provided in the computer 21 (step S103).

  Then, using the obtained reference sphere measurement data, the coordinates O1, O2 of the respective center points of the reference spheres 20A, 20B are calculated as shown in FIG. Step S104), the center point coordinate calculation results of the reference spheres 20A, 20B are stored in the first memory 82 or the like.

  Next, the reference plane 30 attached to the reference plane mounting portion 14 of the measurement jig 10 is three-dimensionally measured to obtain reference plane measurement data that is three-dimensional shape measurement data of the reference plane 30, and this reference plane The measurement data is recorded and stored in the first memory 82 or the like (step S105).

  Then, the CPU 81 performs arithmetic processing such as coordinate transformation using the obtained reference plane measurement data, and the inclination of the reference plane 30 around the X axis in the drawing around the X axis in the measuring machine coordinate system 100 and around the Y axis. The inclination in the direction of arrow β in the figure is calculated (step S106), and the inclination calculation result of 30 of the reference plane is stored in the first memory 82 or the like.

  Next, three-dimensional shape measurement is performed on the R1 surface side of the lens 20 fixedly held by the measurement object holding unit 12 of the measuring jig 10, and R1 surface side measurement which is three-dimensional shape measurement data of the R1 surface of the lens 20 is measured. Data is acquired, and this R1 plane side measurement data is stored in the first memory 82 or the like (step S107).

  Then, the R1 surface side measurement data is used to calculate the vertex coordinate Pr1 on the R1 surface side of the lens 20 and the direction of the optical axis L1 by calculation processing by the CPU 81 (step S108), and the R1 surface side calculation result of the lens 20 is calculated. Saved in the first memory 82 or the like.

  Here, the CPU 81 performs coordinate conversion based on the inclination calculation result (inclination in the α direction and β direction) of the reference plane 30 stored in the first memory 82 or the like in step S106, so that the reference plane 30 is horizontal. All measurement data (reference sphere measurement data, reference plane measurement data, R1 plane side measurement data) are rotated in the direction (step S109).

  When the measurement data is rotated, the CPU 81 uses the center point coordinate calculation results of the reference spheres 20A and 20B stored in the first memory 82 and the like in the above step S104, so that the CPU 81 uses the center point coordinates O1, The line segment LR1 connecting O2 is rotated in the γ direction around the Z axis so as to be parallel to the Y axis of the measuring machine coordinate system 100 (step S110). Here, the rotation is not performed in directions other than the γ direction.

  When the processing so far is completed, it is determined whether or not the three-dimensional shape measurement has been completed for the R2 surface side of the lens 20 (step S111). If it is determined that the measurement has not been completed (N in step S111), Shifting to step S112, as shown in FIG. 7, the step S113 to step S120 are also performed on the R2 surface side of the lens 20 in the same manner as the above steps S103 to S110, and each measurement data (reference sphere measurement data, Reference plane measurement data, R2 plane side measurement data) and calculation results (center point coordinate calculation results of the reference spheres 20A and 20B, tilt calculation results of the reference plane 30, R2 plane side calculation results of the lens 20 (vertex on the R2 plane side) The direction of the coordinates Pr2 and the optical axis L2)) and the measurement data rotation process (step S119) and the γ direction rotation process (S120).

  When each process on the R2 surface side of the lens 20 is thus completed, it is similarly determined whether or not the three-dimensional shape measurement has been completed for the R1 surface side of the lens 20 (step S121). (N of step S121) transfers to said step S102, and performs the subsequent processes.

  When the three-dimensional shape measurement has been completed for both the R2 surface side of the lens 20 and the R1 surface side of the lens 20 (Y in step S111, Y in step S121), as shown in FIG. For example, the measurement data on the R2 plane side of the lens 20 is rotated 180 ° in the β direction around the Y axis of the measuring machine coordinate system 100 (step S122).

  Then, the R1 surface side measurement data and the R2 surface side measurement data of the lens 20 are translated so that, for example, the center point coordinates O1 of the reference sphere 20A coincide with each other (step S123), and as shown in FIG. The R2 surface eccentricity d and inclination θ of the lens 20 are obtained with reference to the R1 surface (step S124), and the series of three-dimensional shape measurement processing according to this flowchart is terminated. In step S124, the eccentricity d of the two surfaces R1 and R2 of the lens 20 is obtained. However, for example, the eccentricity d of the two surfaces with respect to the outer diameter of the lens 20 may be obtained.

  As described above, according to the above-described embodiment, the measurement results of the reference spheres 20A and 20B and the reference plane 30 of the measurement jig 10 including the two reference spheres 20A and 20B and the reference plane 30 are used. It is possible to perform three-dimensional measurement of the front and back surfaces (R1 surface, R2 surface) of the lens 20 with high accuracy and high speed.

  Further, the three-dimensional shape measurement data acquired in different steps on the R1 surface side and the R2 surface side of the lens 20 are aligned by coordinate conversion using the measurement results of the reference spheres 20A and 20B and the reference plane 30, and as a result It becomes possible to analyze the lens 20 as three-dimensional shape data measured in one process.

  Further, by using the surface provided on the reference plane 30, the accuracy is improved as compared with the alignment of the front and back surfaces of the lens 20 using only the reference spheres 20A and 20B, and the eccentricity d and the inclination θ of the front and back surfaces can be measured at high speed. Can be performed.

  The measurement process described above is for the case where one lens 20 is held in the measurement jig 10, but when a plurality of lenses are held, the above process may be performed for each lens, and the reference sphere The measurement order for 20A, 20B, the reference plane 30 and the lens 20 can be arbitrarily determined, and the measurement order for the R1 and R2 surfaces of the lens 20 can also be arbitrarily determined.

  In addition, the three-dimensional shape measuring method described in the present embodiment is realized by executing a program prepared in advance on the surface texture measuring device including not only the above-described three-dimensional measuring machine 1 but also a contour shape measuring machine. be able to. This program is recorded on a computer-readable recording medium such as a hard disk, a flexible disk, a CD-ROM, an MO, a DVD, or a Blu-ray Disc, and is executed by being read from the recording medium by the computer. Further, this program may be a transmission medium that can be distributed via a network such as the Internet.

  As described above, according to the present invention, it is useful for measuring the eccentricity and inclination of an object to be manufactured so that the optical axes coincide on the front and back surfaces of a lens or the like by three-dimensional shape measurement.

It is a perspective view which shows the whole structure of the to-be-measured object shape measuring jig which concerns on one Embodiment of this invention. It is a perspective view which shows the example of the whole three-dimensional shape measuring apparatus provided with the to-be-measured object shape measuring jig which concerns on one Embodiment of this invention. It is a block diagram which shows the example of an internal structure of a computer system. It is a flowchart which shows the example of the three-dimensional shape measurement process sequence of the to-be-measured object using the to-be-measured object shape measuring jig which concerns on one Embodiment of this invention. It is a flowchart which shows the example of the three-dimensional shape measurement process sequence of the to-be-measured object using the to-be-measured object shape measuring jig which concerns on one Embodiment of this invention. It is explanatory drawing which shows the measurement state by the side of R1 of the same to-be-measured object. It is explanatory drawing which shows the measurement state by the side of R2 surface of the same to-be-measured object. It is explanatory drawing which shows the eccentricity and inclination on the basis of R1 surface of the to-be-measured object.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 CMM 2 Computer system 3 Base 4 Measurement table 5, 6 Support arm 7 X-axis guide 8 Imaging unit 10 Measured object shape measurement jig (measurement jig)
DESCRIPTION OF SYMBOLS 11 Plate-like body 12 Measured object holding part 13 Reference sphere mounting part 14 Reference plane mounting part 15 Support shaft part 20 Lens 20A Reference sphere 20B Reference sphere 21 Computer 22 Keyboard 23 Joystick 24 Mouse 26 Printer 30 Reference plane 100 Measuring machine coordinate system

Claims (3)

A plate-like body having a first surface and a second surface facing the first surface;
Two reference spheres fixed to the plate-like body such that the surfaces of the first surface and the second surface are exposed to the outside;
A reference plane having a first plane and a second plane parallel to each other and fixed to the plate-like body so that the first plane and the second plane are exposed to the outside on the first plane and the second plane; ,
The hole is formed so as to penetrate the plate-like body, and the object to be measured is held in the hole so that the front surface and the back surface of the object to be measured are exposed on the first surface and the second surface, respectively. A measuring object shape measuring jig comprising: a measuring object holding part.   The object shape measuring jig according to claim 1, further comprising a support shaft portion that rotatably supports the plate-like body so that the first surface and the second surface can be reversed. . In an object shape measuring jig comprising a plate-like body that has a first surface and a second surface opposite to the first surface and holds two reference spheres and a reference plane having two planes parallel to each other, Holding the reference sphere, the reference plane and at least one object to be measured in a state where the surfaces of the first sphere and the second surface are exposed on each of the first surface and the second surface;
Measuring the three-dimensional shape of each of the two reference spheres to calculate the center point coordinates of each reference sphere;
Measuring the reference plane in a three-dimensional shape and calculating an inclination about the X axis and an inclination about the Y axis of the reference plane;
Measuring the three-dimensional shape of one surface of the object to be measured to obtain measurement data;
Based on the measurement result of the three-dimensional shape of the reference plane, performing a coordinate transformation on the center point coordinates, the inclination, and the measurement data so that the reference plane is horizontal;
About the center point coordinate, the inclination, and the measurement data, the line connecting the center point coordinates of the two reference spheres is around the Z axis orthogonal to the X axis and the Y axis. Performing the coordinate transformation step for each of the front surface and the back surface of the object to be measured;
Calculating relative position data between the front surface and the back surface based on measurement data obtained regarding the surface of the device under test and measurement data obtained regarding the back surface of the device under test. A characteristic three-dimensional shape measuring method.

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