JP2007085882A - Relative relation measuring method, relative relation measuring jig, and relative relation measuring instrument - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a relative relation measuring method, capable of obtaining easily and precisely a relative relation between measuring faces facing each other in a work. <P>SOLUTION: This relative relation measuring method is provided with a surface measuring process S10 for acquiring the surface shape data of a tracing-directional position aligning gauge 18 held by a jig 14, a surface side reference face 20a of an uneven-directional position aligning gauge 20, and a surface side measuring face 22a of the work 22, by a measuring machine 28, a reverse face measuring process S14 for acquiring reverse face shape data of the gauge 18 after a work rotation process S12, a reverse-face side reference face 20b of the gauge 20, and a reverse-face side measuring face 22b of the work 22, along a measuring trace line, by the measuring machine 28, and a data-to-data position aligning process for aligning the tracing-directional position of the shape data, based on each feature point information of tracing-directional position aligning gauge information, and for positioning an uneveness-detection direction position of the shape data, based on the parallel and dimensional information of the gauge 20. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a relative relationship measuring method, a relative relationship measuring jig, and a relative relationship measuring apparatus, and more particularly to an improvement of a measured object holding mechanism.

Conventionally, a relative relationship measuring apparatus has been used in order to obtain a workpiece shape and dimension, a positional relationship, a thickness, and the like.
In the conventional apparatus, it is conceivable to use a measuring machine having a single stylus. In the past, one side of the stylus was replaced to measure the back and front of the workpiece.
In the conventional apparatus, it is also conceivable to use a measuring machine having two styluses. Conventionally, the front and back sides of a workpiece have been measured using two styluses (for example, Patent Document 1).

By the way, in relative relationship measurement, it is very important to achieve both ease and high accuracy.
As a conventional relative relationship measuring apparatus, there is an apparatus dedicated to a lens, but an attempt to improve measurement accuracy (for example, Patent Documents 2 and 4).
Moreover, as a conventional relative relationship measuring apparatus, although it is only for lenses, there is also an apparatus that attempts to reduce the size and simplify the configuration (for example, Patent Document 3).
JP-A-6-307825 JP 2002-71344 A JP 2005-83914 A JP 2005-69775 A

However, even in the conventional method, it is difficult to achieve both easy measurement and high accuracy.
That is, when measuring the relative relationship between the front and back sides of the workpiece, if the front and back sides of the workpiece are measured by exchanging the stylus, it takes time to set up calibration and the like each time the stylus is changed.

  Further, when measuring the relative relationship between the front and back sides of the workpiece, using a measuring machine having two styluses as in Patent Document 1 and the like makes the structure complicated and expensive, and therefore the problem of the present invention It was not adopted as a solution.

  Even in Patent Documents 1 to 4, although high accuracy has been attempted, satisfactory high accuracy cannot be obtained, and setup takes time. Moreover, in Patent Documents 2 to 4, the work is dedicated to the lens and lacks versatility for the work. For this reason, none of Patent Documents 1 to 4 has been adopted as the problem solving means of the present invention.

  As described above, in the field of relative relationship measurement, there has been a strong demand for both easy measurement and high accuracy. However, conventionally, there has been no appropriate technique that can solve this simultaneously.

The present invention has been made in view of the above-described problems of the prior art, and a first object thereof is a relative relationship measuring method capable of easily and accurately obtaining a relative relationship between opposing measurement surfaces of a workpiece. Is to provide.
A second object of the present invention is to provide a relative relationship measuring jig capable of easily and accurately obtaining a relative relationship between measurement surfaces facing each other of a workpiece.
A third object of the present invention is to provide a relative relationship measuring apparatus capable of easily and accurately obtaining a relative relationship between measurement surfaces facing each other of a workpiece.

Method In order to achieve the first object, a relative relationship measuring method according to the present invention includes a shape measuring machine for detecting unevenness of an object to be measured along a predetermined measurement trace line, and unevenness detection of the shape measuring machine. Trace direction alignment gauges having feature points opposite to each other, parallel and predetermined dimension unevenness alignment gauges having front and back reference surfaces opposite to each other, and a relative relationship measurement jig holding a workpiece Using a tool, a relative relationship measurement method for measuring a relative relationship between the front and back surfaces of the workpiece facing each other,
The method includes a front surface measurement step, a workpiece rotation step, a back surface measurement step, an inter-data alignment step, and an analysis step.
Here, in the surface measurement step, the shape measuring machine includes a trace direction alignment gauge held on the relative relationship measurement jig, a front side reference surface of the uneven direction alignment gauge, and a front side measurement surface of the workpiece. Then, scanning is performed along the measurement trace line, and surface shape data including gauge information for trace direction alignment, front side reference surface information, and front side measurement surface information is acquired.
In the work rotation step, the relative relationship measuring jig is rotated around a rotation axis that is perpendicular to the measurement trace line.
In the back surface measuring step, the shape of the trace direction alignment gauge, the back side reference surface of the uneven direction alignment gauge and the back side measurement surface of the workpiece, which are held in the relative relationship measurement jig after the work rotating step, Scanning is performed along the measurement trace line with a measuring machine, and back surface shape data including trace direction alignment gauge information, back side reference surface information, and back side measurement surface information is acquired.
The inter-data alignment step is based on the feature point information included in the trace direction alignment gauge information of the surface shape data and the feature point information included in the trace direction alignment gauge information of the back surface shape data. The data and the back surface shape data are aligned in the trace direction. In the inter-data alignment step, alignment of the surface shape data and the back surface shape data in the unevenness detection direction is performed based on the parallel information and the dimension information of the unevenness direction alignment gauge.
The analysis step obtains a relative relationship between the front-side measurement surface and the back-side measurement surface of the workpiece based on the relationship between the surface shape data and the back surface shape data obtained in the inter-data alignment step.

In the relative relationship measurement method of the present invention, it is preferable that the inter-data alignment step includes an inversion step, an uneven direction alignment step, and a trace direction alignment step.
Here, the reversing step coordinates the surface shape data or the back surface shape data so that the surface shape data or the back surface shape data is reversed on a plane passing through the trace line and the unevenness detection axis of the shape measuring machine. Convert.
Further, in the concave / convex direction alignment step, after the reversing step, the front side reference surface information of the surface shape data and the back side reference surface information of the back surface shape data are parallel and possessed by the concave / convex detection direction alignment gauge. The surface shape data or the back surface shape data is coordinate-transformed so as to have a separation distance corresponding to a predetermined dimension.
In the trace direction alignment step, after the reversing step, a feature point based on the trace direction alignment gauge information of the surface shape data and a feature point based on the trace direction alignment gauge information of the back surface shape data, The surface shape data or the back surface shape data is coordinate-transformed so as to coincide in the measurement trace line direction.

Moreover, in the relative relationship measuring method of the present invention, the surface measuring step includes a trace section of the shape measuring machine and a cross section in the plane direction passing through the concave / convex detection axis as the trace direction alignment gauge, having a predetermined diameter and A cylindrical pin gauge having a roundness or a spherical reference sphere is measured.
The back surface measuring step measures the pin gauge or the reference sphere as the trace direction alignment gauge.
The trace direction alignment step includes, as feature points based on the extreme values of the unevenness detection axis direction as feature points based on the trace direction alignment gauge information of the surface shape data and the trace direction alignment gauge information of the back surface shape data. It is preferable to align the front surface shape data and the back surface shape data in the trace direction so that the extreme values in the unevenness detection axis direction of the surface coincide with each other in the trace direction.

Jig Also, in order to achieve the second object, the relative relationship measuring jig according to the present invention is set on a measurement trace line of a shape measuring machine for detecting unevenness information of an object to be measured. A relative measurement jig used to measure the relative relationship between the front measurement surface and the back measurement surface.
A trace direction alignment gauge, an uneven direction alignment gauge, and a jig body are provided.
Here, the trace direction alignment gauge has a feature point opposite to the concave / convex detection axis direction of the shape measuring machine.
The unevenness direction alignment gauge has parallel and predetermined front-side reference surfaces and back-side reference surfaces of predetermined dimensions.
The jig body includes the trace direction alignment gauge, the uneven direction alignment gauge, and the trace direction alignment gauge, and the uneven direction alignment so that the workpiece is positioned on the measurement trace line. Hold the gauge and the workpiece.
The relative measurement jig is rotated between the front surface measurement step and the rear surface measurement step by the shape measuring machine about a rotation axis that is perpendicular to the measurement trace line. It is characterized by that.

  In the relative measurement jig according to the present invention, the trace direction alignment gauge has a columnar cross section having a predetermined diameter and roundness in a plane direction passing through the measurement trace line and the unevenness detection axis. A pin gauge or a spherical reference sphere is preferred.

In the relative relationship measuring jig according to the present invention, it is preferable to include a rotary table and a rotating means.
Here, the jig main body is fixed to the rotary table, and the jig main body is rotated about a rotation axis that is perpendicular to a measurement trace line of the shape measuring machine.
The rotating means rotates the rotating table.

In order to achieve the third object, the relative relationship measuring apparatus according to the present invention detects the unevenness information of the object to be measured along the relative measurement jig according to the present invention and a predetermined measurement trace line. A relative measuring device that measures the relative relationship between the front and back surfaces of the workpiece facing each other,
In the surface measurement process, the shape measuring machine includes a trace direction alignment gauge held on the relative relationship measurement jig, a front side reference surface of the uneven direction alignment gauge, and a front side measurement surface of the workpiece. Scan along a predetermined measurement trace line to obtain surface shape data. In addition, the shape measuring machine includes the trace direction alignment gauge and the concave / convex direction alignment held in the relative relationship measurement jig in a back surface measurement step after the rotation of the relative relationship measurement jig. The back side reference surface of the gauge and the back side measurement surface of the workpiece are scanned along the measurement trace line to acquire back surface shape data.
Further, the relative relationship measuring apparatus includes an inter-data alignment unit and an analysis unit.
Here, the inter-data alignment means includes the feature point information included in the trace direction alignment gauge information obtained in the surface measurement step of the shape measuring machine, and the trace obtained in the back surface measurement step of the shape measuring machine. Based on the feature point information included in the direction alignment gauge information, the surface shape data and the back surface shape data are aligned in the trace direction. The inter-data alignment means aligns the surface shape data and the back surface shape data in the unevenness detection direction based on the parallel information and the dimensional information of the unevenness direction alignment gauge.
The analysis means obtains a relative relationship between the front-side measurement surface and the back-side measurement surface of the workpiece based on the relationship between the surface shape data and the back surface shape data obtained by the inter-data alignment means.

  According to the relative relationship measuring method according to the present invention, since the front surface measuring step and the back surface measuring step, the workpiece rotating step, and the inter-data alignment step are provided, the opposing measurement of the workpiece is performed. The relative relationship between the surfaces can be obtained easily and with high accuracy.

  According to the relative relationship measuring jig according to the present invention, it is rotatably provided around a rotation axis that is perpendicular to the measurement trace line, and holds the trace direction alignment gauge, the uneven direction alignment gauge, and the workpiece. Since the jig main body is provided, it is possible to easily and accurately measure the relative relationship between the measurement surfaces facing each other.

  According to the relative relationship measuring apparatus of the present invention, since the shape measuring machine, the relative relationship measuring jig, and the inter-data alignment means are provided, the measurement surface between the workpieces facing each other is provided. The relative relationship can be easily obtained with high accuracy.

Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings.
Apparatus FIG. 1 shows a schematic configuration of a relative relation measuring apparatus for performing a relative relation measuring method according to an embodiment of the present invention.
1A is a state of a relative relationship measuring apparatus for performing a front surface measuring step, FIG. 1B is a state of the relative relationship measuring apparatus for performing a back surface measuring step, and FIG. This is a schematic configuration of the data processing mechanism.
This embodiment demonstrates the example which measures the thickness of the uneven | corrugated | grooved part of the pressed sheet metal (work), for example.

  The relative relationship measuring apparatus 10 shown in FIG. 1 includes a shape measuring machine main body 12, a relative relationship measuring jig 14, and a data processing mechanism 16.

Here, the shape measuring machine main body 12 includes a trace direction alignment gauge (pin gauge, reference sphere, etc.) 18 held in the relative measurement jig 14 and an uneven direction alignment gauge (gauge) in the surface measurement step. The front surface reference surface 20a of 20 and the front surface measurement surface 22a of the workpiece 22 are scanned along a predetermined measurement trace line (in the drawing in the left-right direction) with the stylus 28 of the detector 26 to obtain surface shape data. get.
In addition, the shape measuring machine main body 12 includes a trace direction alignment gauge 18 and a concave / convex direction alignment held in the relative relationship measurement jig 14 in the back surface measurement process after the rotation of the relative relationship measurement jig 14. The back side reference surface 20b of the gauge 20 and the back side measurement surface 22b of the workpiece 22 are scanned along the measurement trace line (in the left-right direction in the figure) by the stylus 28 of the detector 26 to acquire back surface shape data.

The relative relationship measuring jig 14 includes a trace direction alignment gauge 18, an uneven direction alignment gauge 20, and a jig body 30.
Here, the trace direction alignment gauge 18 has a feature point opposite to the concave / convex detection axis direction (Z-axis direction) of the shape measuring machine main body 12. In this embodiment, the trace direction alignment gauge 18 has a cylindrical pin gauge or spherical shape in which the XZ cross section (the cross section in the plane direction passing through the measurement trace line and the unevenness detection axis) has a predetermined diameter and roundness. The reference sphere is preferable. In this embodiment, a pin gauge is used.
Further, the concave / convex direction alignment gauge 20 has a front side reference surface 20a and a back side reference surface 20b facing each other in parallel and substantially the same thickness (predetermined dimension) as the thickness of the workpiece 22. In this embodiment, a gauge block is used.
The jig body 30 includes the trace direction alignment gauge 18, the uneven direction position gauge 18, the uneven direction position gauge 18, and the uneven direction position gauge 18 so that the workpiece 22 is positioned on the measurement trace line of the stylus 28. The alignment gauge 20 and the workpiece 22 are held.

The relative relationship measuring jig 14 is set on the measurement trace line of the shape measuring machine main body 12 and used when measuring the relative relationship between the front-side measurement surface 22a and the back-side measurement surface 22b facing each other of the workpiece 22. .
The relative measurement jig 14 includes a jig main body 30 centering around a rotation axis (Y axis) perpendicular to the measurement trace line between the front surface measurement process and the rear surface measurement process by the shape measuring machine main body 12. It is rotated.

  The data processing mechanism 16 is formed of, for example, a computer and includes a data memory 32, an inter-data alignment unit 34, and an analysis unit 36.

  Here, the data memory 32 stores the surface shape data obtained in the surface measurement process by the shape measuring machine main body 12. Further, the data memory 32 stores back surface shape data obtained in the back surface measuring process by the shape measuring machine main body 12.

Further, the inter-data alignment means 34 includes the feature point information included in the trace direction alignment gauge information obtained in the surface measurement process of the shape measuring machine main body 12 and the trace obtained in the back surface measurement process of the shape measuring machine main body 12. Based on the feature point information included in the direction alignment gauge information, the front surface shape data and the back surface shape data are aligned in the trace direction.
Further, the inter-data alignment means 34 aligns the surface shape data and the back surface shape data in the unevenness detection direction based on the parallel information and the dimension information that the unevenness direction alignment gauge has.

  Further, the analyzing means 36 is based on the relationship between the front surface measurement surface 22a and the back surface measurement surface 22b (wall thickness) of the workpiece 22 based on the relationship between the surface shape data and the back surface shape data obtained by the inter-data alignment means 34. Etc.).

In this embodiment, the inter-data alignment unit 34 includes a reversing unit 38, a concave / convex direction alignment unit 40, and a trace direction alignment unit 42.
Here, the reversing unit 38 performs coordinate conversion of the surface shape data or the back surface shape data so that the surface shape data or the back surface shape data is reversed on the XZ plane.
Further, after the reversing process is completed, the concave / convex direction alignment means 40 is such that the front side reference surface information of the front surface shape data and the back side reference surface information of the back surface shape data are parallel and of the concave / convex detection direction alignment gauge 20. The surface shape data or the back surface shape data is coordinate-transformed so as to have a separation distance corresponding to the predetermined dimension.
The trace direction alignment means 42 has a feature point based on the trace direction alignment gauge information of the front surface shape data and a feature point based on the trace direction alignment gauge information of the back surface shape data after the reversal process is completed. The surface shape data or the back surface shape data is coordinate-transformed so as to match in the measurement trace line direction.

  As described above, the relative relationship measuring apparatus 10 according to the present embodiment uses the reversal of the shape measuring machine main body 12 and the relative relationship measuring jig 14 between the front-side measurement surface 22a and the back-side measurement surface 22b of the workpiece 22 facing each other. Thickness (relative relationship) can be measured.

  For example, the relative relationship measuring apparatus 10 according to the present embodiment includes a shape measuring machine main body 12 having one stylus 28, and a relative shape of the front and back of the work 22, for example, a shape dimension and a position of an uneven portion of a pressed sheet metal. When measuring the relationship, thickness, etc., there is no need to bother replacing the stylus 28 during the front surface measurement process and during the back surface measurement process, and measurement analysis can be performed easily and accurately.

Method The relative relationship measuring apparatus 10 according to the present embodiment is configured as described above, and the operation thereof will be described below.
The relative relationship measuring method according to the present embodiment includes a front surface measuring step (S10), a workpiece rotating step (S12), and a back surface measuring step (S14) as shown in FIG.

  Here, in the surface measurement step (S10), as shown in FIG. 2A, the trace direction alignment gauge 18 and the concave / convex direction alignment gauge 20 held by the relative measurement jig 14 are used. The front-side reference surface 20a and the front-side measurement surface 22a of the workpiece 22 are scanned along the measurement trace line with the stylus 28, and surface shape data including trace direction alignment gauge information, front-side reference surface information, and front-side measurement surface information is obtained. get.

  In the workpiece rotation step (S12), as shown in FIG. 2B, the relative measurement jig 14 is rotated around the rotation axis 40 perpendicular to the measurement trace line, so Rotate.

  Here, in this embodiment, since the work rotation method is adopted to measure the front and back of the work, and the front and back of the work 22 can be measured by the shape measuring machine main body 12 having one stylus, The structure of 10 is simple and inexpensive.

If the rotation axis is perpendicular to the measurement trace, the setup necessary for rotation is easy.
That is, since the parallelism and dimensions of the alignment gauge 20 are guaranteed, the rotation of the workpiece does not have to be the conventional method, that is, just 180 degrees, and the back and front of the workpiece can be traced. Since the rotation angle can be set to an arbitrary rotation angle, the setup necessary for the rotation becomes easier as compared with the conventional method of just 180 degrees.

  In addition, if the rotation axis is perpendicular to the measurement trace, the center of rotation does not need to be an axis target centered on the center of the conventional method or jig, and the back and front of the work can be traced so that the back and front of the work can be traced. Any rotation center can be set as long as the rotation is possible, so that the setup necessary for the rotation is facilitated as compared with the conventional method in which the rotation center needs to be accurately positioned at a predetermined position.

  In the back surface measurement step (S14), the back side reference surface 20b of the trace direction alignment gauge 18 and the concave / convex direction alignment gauge 20 held by the relative relationship measurement jig 14 after the completion of the workpiece rotation step (S12). The back side measurement surface 22b of the workpiece 22 is scanned along the measurement trace line with the stylus 28, and back surface shape data including the gauge information for trace direction alignment, the back side reference surface information, and the back side measurement surface information is acquired.

The relative relationship measuring method according to the present embodiment further includes an inter-data alignment step (S16) and an analysis step (S18) as shown in FIG. 3 as data processing steps.
In the data between the positioning step (S16), the surface shape data _{D a} trace direction feature point information with the positioning gauge information _{d 1a d 0a} and back shape data _{D b} 'trace direction alignment gauge information _{d 1b} of' Based on the feature point information d _0b ′, the _front surface shape data D _a and the back surface shape data D _b ′ are aligned in the trace direction. Further, in the inter-data alignment step (S16), alignment of the surface shape data D _a and the back surface shape data D _b ′ in the unevenness detection direction is performed based on the parallel information and the dimension information of the unevenness direction alignment gauge. .

In the present embodiment, the inter-data alignment step (S16) includes a reversing step (S20), an uneven direction alignment step (S22), and a trace direction alignment step (S24).
Here, the inversion step (S20), the surface shape data D _a and the back surface shape data D _b, as shown in FIG. 3 (A), XZ plane (trace line and a plane passing through the concave-convex detecting axis of the profile measuring instrument) The surface shape data _Da or the back surface shape data _Db is coordinate-transformed so as to be inverted above. In the present embodiment, the back surface shape data _Db is coordinate-converted. In the same figure, the back surface shape data after inversion is the back surface shape data D _b ′ (FIG. 3B).

Irregularities direction aligning step (S22) after completion of the inversion process (S20), and the front reference plane information _{d 2a} of the surface shape data _{D a,} a 'back reference plane information _{d 2b'} of the back surface shape data _{D b} is, The surface shape data D _a or the back surface shape data D _b ′ are coordinate-transformed so as to have a separation distance L corresponding to a predetermined dimension of the parallel and unevenness detection direction alignment gauge (FIG. 3C).
As described above, in the present embodiment, the front surface shape data D _a and the back surface shape data D _b ′ are parallelized by the front side reference surface information d _2a and the back side reference surface information d _2b ′ of the unevenness direction alignment gauge. Further, the surface shape data D _a and the back surface shape data D _b ′ are separated by a distance corresponding to the dimension of the unevenness direction alignment gauge.

In the trace direction aligning step (S24), feature points based on the surface shape data D _a trace direction alignment gauge information d _1a of the (extreme) d _0a, trace direction alignment gauge information back surface shape data D _{b '} The surface shape data D _{a to the} back surface shape data D _b ′ are coordinate-transformed so that the feature point (extreme value) d _0b ′ based on d _1b ′ matches in the trace direction. In this way, the front surface shape data D _a and the back surface shape data D _b ′ are aligned in the trace direction (FIG. 3D).

  In this state, the shape of the workpiece is faithfully expressed.

In the analysis step (S18), the front-side measurement surface information d _{3a of} the surface shape data D _a obtained in the trace direction alignment step (S24) and the back-side measurement surface information d _3b ′ of the back surface shape data D _b ′ Based on the relationship, the relative relationship between the front side measurement surface and the back side measurement surface of the workpiece is obtained.

Conventionally, it is conceivable to measure the thickness of a workpiece using a shape measuring machine.
However, in the conventional method, it was realized by a structure using two upper and lower styluses or by changing the stylus, so there were disadvantages such as complicated structure, high cost, and complicated setup.

Conventionally, it is also conceivable to measure by rotating the front and back of the workpiece using a jig.
However, it is usually necessary to rotate the jig properly by 180 degrees, and the setup is troublesome.

  In addition, when using jig rotation, it is very important to align the surface shape data with the back surface shape data. Usually, the setup for measurement, data processing, etc. is very complicated. It was troublesome.

On the other hand, the present invention is a standard structure that traces in one direction, performs measurement by a method of rotating the workpiece, applies some contrivance to the periphery of the workpiece, and performs processing such as coordinate conversion on the captured data. Thus, an accurate measurement result can be easily obtained.
That is, in this embodiment, the alignment gauge is held in the jig together with the workpiece, and after the surface shape data and the back surface shape data obtained by rotating the workpiece are obtained, the alignment gauge has. By aligning the surface shape data or the back surface shape data based on the feature point information, the parallel information, and the dimension information, the alignment between the surface shape data and the back surface shape data is simplified and made highly accurate. In addition, the present embodiment has achieved more reliable high accuracy by greatly reducing complicated setup.

As described above, the present embodiment has the following effects.
(1) Easy measurement There is no need to build a special measuring machine or complicated setup, and measurement analysis can be performed easily.
(2) Higher accuracy In principle, the method is simple, the setup is small, and the cause of uncertainty is low, so the accuracy of measurement analysis can be improved.

In the following, the relative relationship measuring jig characteristic of the present embodiment will be described more specifically.
FIG. 4 is a view of the main part of the relative relationship measuring jig as viewed from the side.
5A and 5B are views of the entire relative relationship measuring jig as viewed from above. FIG. 5A shows the state during the front surface measurement process, and FIG. 5B shows the state during the back surface measurement process.

The relative relationship measuring jig 14 according to the present embodiment includes a trace direction alignment gauge 18, an uneven direction alignment gauge 20, and a jig body 30.
Here, the trace direction alignment gauge 18 is made of, for example, a pin gauge, a reference sphere, or the like, and has a feature point that is opposed to the direction of the unevenness detection axis of the shape measuring machine. In the present embodiment, a cylindrical pin gauge whose XZ cross section has a predetermined diameter and roundness is used as the trace direction alignment gauge 18.
The concave / convex direction alignment gauge 20 is made of, for example, a gauge block, and has a parallel reference surface and a reverse reference surface having a predetermined dimension.
The jig main body 30 includes the trace direction alignment gauge 18, the concave / convex direction alignment gauge 20, and the concave / convex direction alignment gauge 18 and the concave / convex direction alignment so that the workpiece 22 is positioned on the measurement trace line. The gauge 20 and the work 22 are held.
Then, the relative relationship measuring jig 14 is set on the measurement trace line of the shape measuring machine main body, and is used when measuring the relative relationship between the front-side measurement surface and the back-side measurement surface of the workpiece 22 facing each other.

In addition, the jig main body is rotated around a rotation axis that is perpendicular to the measurement trace line between the front surface measurement step and the back surface measurement step by the shape measuring machine.
For this purpose, in this embodiment, a turntable 50 is further provided.
The turntable 50 includes a turntable 52, an outer square rotation means 54, and a lever 56.
Here, the jig body 30 is fixed to the rotary table 52, and the jig body 30 is rotated around a rotation axis that is perpendicular to the measurement trace line of the shape measuring machine.
The rotating means 54 rotates the rotary table 52.
The lever 56 causes the rotating table 52 to rotate by the rotating means 54 by the rotation operation.

  In the present embodiment, the trace direction alignment gauge 18, the concave / convex direction alignment gauge 20, and the work 22 are fixed to the jig main body 30 by a pressing member 60 and a fixing member 62.

  And the jig body is rotated around the rotation axis perpendicular to the measurement trace line between the surface measurement process and the back surface measurement process by the shape measuring machine having one shape measuring machine, Reverse the front and back of the workpiece.

  By configuring the jig of the present embodiment in this way, the method of the present embodiment by the apparatus of the present embodiment can be easily and reliably performed. The relative relationship can be obtained easily and with high accuracy.

Further, in the present embodiment, as the gauge for alignment in the trace direction, a cylindrical pin gauge having a predetermined diameter and roundness or a spherical reference sphere is used, whereby data processing (position by the data processing means) In this case, the starting point (feature point) can be confirmed more easily and reliably, so that the data can be aligned more accurately.
Therefore, in the present embodiment, the relative relationship between the measurement surfaces facing each other of the workpiece can be obtained more easily and with higher accuracy than in the other embodiments.

In each of the above configurations, an example using a pin gauge as a trace direction alignment gauge has been described, but the present invention is not limited to this, and a reference sphere may be used instead of the pin gauge. preferable.

  In each of the above-described configurations, the example in which the shape measuring machine uses a contact type probe (stylus) is described as the shape measuring machine. However, the present invention is not limited to this, and instead of the contact type. It is also preferable to use a non-contact type.

  In each of the above-described configurations, an example in which the detector (stylus) of the shape measuring machine is moved relative to the workpiece in the direction of the measurement trace line as the relative movement of the workpiece and the detector of the shape measuring machine in the direction of the measurement trace line. However, the present invention is not limited to this, and it is also preferable to move the workpiece relative to the detector of the shape measuring machine in the direction of the measurement trace line.

It is explanatory drawing of schematic structure of the relative relationship measuring apparatus concerning one Embodiment of this invention. It is a flowchart which shows the procedure of the measuring method in the procedure of the relative relationship measuring method concerning one Embodiment of this invention. It is a flowchart which shows the procedure of the data processing method in the relative relationship measuring method concerning one Embodiment of this invention. It is the figure which looked at the jig for relative relation measurement concerning one embodiment of the present invention from the side. It is the figure which looked at the jig for relative relation measurement concerning one embodiment of the present invention from the upper part.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Relative measurement apparatus 12 Shape measuring machine main body 14 Relative measurement jig 16 Data processing mechanism 18 Trace direction alignment gauge 20 Uneven direction alignment gauge 30 Jig main body 34 Inter-data alignment means 36 Analysis means

Claims (7)

A shape measuring machine that detects unevenness of the object to be measured along a predetermined measurement trace line, and a trace direction alignment gauge having feature points opposite to the unevenness detection direction of the shape measuring machine, parallel and relative to a predetermined dimension Relative relationship between the front and back measurement surfaces facing each other using a concave / convex direction alignment gauge having a facing reference surface and a back reference surface and a relative measurement jig holding the workpiece A relative relationship measuring method for measuring
Trace direction alignment gauges held in the relative relationship measurement jig, the reference side surface of the uneven direction alignment gauge, and the front side measurement surface of the workpiece along the measurement trace line with the shape measuring machine A surface measurement step of scanning and acquiring surface shape data including gauge information for alignment in the trace direction, front side reference surface information and front side measurement surface information;
A work rotation step of rotating the relative measurement jig about a rotation axis perpendicular to the measurement trace line;
The trace direction alignment gauge held in the relative relationship measurement jig after the workpiece rotation step, the back side reference surface of the uneven direction alignment gauge and the back side measurement surface of the workpiece are measured with the shape measuring machine. Back surface measurement step of scanning along the measurement trace line to obtain back surface shape data including gauge information for trace direction alignment, back side reference surface information and back side measurement surface information,
Alignment in the trace direction between the surface shape data and the back surface shape data based on the feature point information possessed by the gauge information for the trace direction alignment of the surface shape data and the feature point information possessed by the gauge information for the trace direction alignment of the back surface shape data. And an inter-data alignment step of aligning the surface shape data and the back surface shape data in the unevenness detection direction based on parallel information and dimension information of the unevenness direction alignment gauge,
Based on the relationship between the surface shape data and the back surface shape data obtained in the data alignment step, an analysis step for obtaining a relative relationship between the front side measurement surface and the back side measurement surface of the workpiece,
A relative relationship measuring method comprising: The relative relationship measuring method according to claim 1,
The inter-data alignment step coordinates the surface shape data or the back surface shape data so that the surface shape data or back surface shape data is reversed on a plane passing through the trace line and the unevenness detection axis of the shape measuring machine. An inversion process to convert,
After the reversing step, the front side reference surface information of the surface shape data and the back side reference surface information of the back surface shape data are parallel and have a separation distance according to a predetermined dimension of the unevenness detection direction alignment gauge. , A concave / convex direction alignment step for converting the coordinates of the surface shape data or the back surface shape data;
After the inversion step, the feature point based on the trace direction alignment gauge information of the surface shape data and the feature point based on the trace direction alignment gauge information of the back surface shape data match in the measurement trace line direction. As described above, a trace direction alignment step for converting the coordinates of the surface shape data or the back surface shape data,
A relative relationship measuring method comprising: The relative relationship measuring method according to claim 2,
In the surface measurement step, as the trace direction alignment gauge, a cross-section in the plane direction passing through the trace line and the unevenness detection axis of the shape measuring machine has a cylindrical pin gauge or spherical shape having a predetermined diameter and roundness. Measure the reference sphere,
The back surface measuring step measures the pin gauge or the reference sphere as the trace direction alignment gauge,
The trace direction alignment step includes, as feature points based on the extreme values of the unevenness detection axis direction as feature points based on the trace direction alignment gauge information of the surface shape data and the trace direction alignment gauge information of the back surface shape data. A method of measuring a relative relationship, wherein the surface shape data and the back surface shape data are aligned in the trace direction so that the extreme value in the unevenness detection axis direction of the first and second surfaces coincides in the trace direction. This is a relative measurement jig that is set on the measurement trace line of a shape measuring machine that detects unevenness information of the object to be measured and used to measure the relative relationship between the front and back measurement surfaces facing each other. There,
A trace direction alignment gauge having feature points opposite to the unevenness detection axis direction of the shape measuring machine;
Concave and convex direction alignment gauges having parallel and predetermined front and back reference surfaces opposite to each other, and
The trace direction alignment gauge, the uneven direction alignment gauge, and the jig for holding the workpiece so that the trace direction alignment gauge, the uneven direction alignment gauge, and the work are positioned on the measurement trace line. The tool body,
And the jig body is rotated about a rotation axis perpendicular to the measurement trace line between the front surface measurement step and the back surface measurement step by the shape measuring machine. Jig. In the relative relationship measuring jig according to claim 4,
The trace direction alignment gauge is a cylindrical pin gauge or a spherical reference sphere having a predetermined diameter and roundness in a plane section passing through the measurement trace line and the unevenness detection axis. Relative measurement jig. In the relative relationship measuring jig according to claim 4,
The jig body is fixed, and a rotary table that rotates the jig body around a rotation axis that is perpendicular to the measurement trace line of the shape measuring machine;
Rotating means for rotating the rotating table;
A jig for measuring a relative relationship, comprising: A relative relationship measuring jig according to any one of claims 4 to 6,
A shape measuring machine that detects unevenness information of an object to be measured along a predetermined measurement trace line,
A relative relationship measuring device for measuring a relative relationship between the front and back measurement surfaces facing each other of the workpiece,
In the surface measurement process, the shape measuring machine predetermines a trace direction alignment gauge held on the relative relationship measurement jig, a front side reference surface of the uneven direction alignment gauge, and a front side measurement surface of the workpiece. The surface shape data is obtained by scanning along the measurement trace line, and after the rotation of the relative relationship measurement jig, the trace direction position held by the relative relationship measurement jig in the back surface measurement step The back surface shape data is obtained by scanning the alignment gauge, the back side reference surface of the unevenness direction alignment gauge and the back side measurement surface of the workpiece along the measurement trace line,
Further, feature point information possessed by the gauge information for trace direction alignment obtained in the surface measurement process of the shape measuring machine and feature point possessed by the gauge information for trace direction alignment obtained in the back surface measurement process of the shape measuring machine Based on the information, the surface shape data and the back surface shape data are aligned in the trace direction, and the surface shape data and the back surface shape data are based on the parallel information and the dimension information of the unevenness direction alignment gauge. An inter-data alignment means for performing alignment in the unevenness detection direction of
Based on the relationship between the surface shape data and the back surface shape data obtained by the inter-data alignment means, analysis means for obtaining a relative relationship between the front side measurement surface and the back side measurement surface of the workpiece,
A relative relationship measuring apparatus comprising:

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