CN113899917A - Ultralow frequency servo type vibration acceleration sensor and acceleration measuring method - Google Patents
Ultralow frequency servo type vibration acceleration sensor and acceleration measuring method Download PDFInfo
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- CN113899917A CN113899917A CN202111170969.XA CN202111170969A CN113899917A CN 113899917 A CN113899917 A CN 113899917A CN 202111170969 A CN202111170969 A CN 202111170969A CN 113899917 A CN113899917 A CN 113899917A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
Abstract
The invention belongs to the technical field of vibration sensors, and particularly relates to an ultralow-frequency servo type vibration acceleration sensor and an acceleration measuring method. An ultra-low frequency servo type vibration acceleration sensor, comprising: the electromagnetic element comprises an electromagnetic coil and an annular permanent magnet, and the electromagnetic coil is fixedly connected with the shell and surrounds the annular permanent magnet; one end of the connecting shaft is fixedly connected with the metal mass block, and the other end of the connecting shaft is connected with the shell through an elastic element; the annular permanent magnet is fixedly connected with the connecting shaft; and the control unit is connected with the electromagnetic coil and applies feedback current to the electromagnetic coil so that the relative displacement of the metal mass block and the shell is zero. The ultralow frequency servo type vibration acceleration sensor provided by the invention applies larger electronic mass and electronic damping to a sensor mechanical system through the control unit, and improves the low frequency characteristic of the sensor, so that the acceleration sensor has smaller structural size.
Description
Technical Field
The invention belongs to the technical field of vibration sensors, and particularly relates to an ultralow-frequency servo type vibration acceleration sensor and an acceleration measuring method.
Background
Vibration is a common physical phenomenon, such as bridge vibration, airplane wing vibration, lathe vibration, automobile vibration, and the like. In most cases, the vibration is harmful, and the severe vibration can cause the initiation and the propagation of the cracks of the power structure and finally cause the fatigue damage of the component, thereby influencing the service life of mechanical equipment; therefore, the method for accurately measuring the vibration conditions of various engineering structures has important significance for determining the state of the structure, researching a structure damage mechanism and reducing loss caused by vibration.
In the practice of industrial production line, precision engineering, scientific research and the like, it is very important to control and isolate vibration of a system and measure the vibration of the system. The input speed signal and the output voltage of the traditional magnetoelectric speed sensor are in a linear relation, integral conversion or other complex operations are not needed, zero drift of the output signal cannot be generated, and the traditional magnetoelectric speed sensor has the characteristics of strong anti-interference capability, stable performance, high sensitivity and the like.
Disclosure of Invention
Aiming at the technical problem that the size of a traditional magnetoelectric speed sensor is large, on one hand, the invention provides an ultralow frequency servo type vibration acceleration sensor with small size; on the other hand, a method for measuring acceleration by using an ultra-low frequency servo type vibration acceleration sensor is provided. The specific technical scheme is as follows.
In one aspect, the present invention provides an ultra-low frequency servo type vibration acceleration sensor, including:
the electromagnetic element comprises an electromagnetic coil and an annular permanent magnet, and the electromagnetic coil is fixedly connected with the shell and surrounds the annular permanent magnet; one end of the connecting shaft is fixedly connected with the metal mass block, and the other end of the connecting shaft is connected with the shell through an elastic element; the annular permanent magnet is fixedly connected with the connecting shaft, and the connecting shaft can move along with the annular permanent magnet along the axial direction of the shell;
and the control unit is connected with the electromagnetic coil and applies feedback current to the electromagnetic coil so that the relative displacement of the metal mass block and the shell is zero.
The structure realizes the measurement of the acceleration of the measured object through the connecting shaft, the electromagnetic element, the metal mass block and the control unit; the electromagnetic coil surrounds the annular permanent magnet, so that the sensor is compact in structure; the control unit applies feedback current to the electromagnetic coil, and the feedback current generates electromagnetic force which enables the relative displacement of the metal mass block and the shell to be zero, so that the design of the sensor is realized. Therefore, the acceleration sensor has the advantages of simple structure, small outline dimension and low production cost.
Furthermore, a gap is reserved between the electromagnetic coil and the annular permanent magnet, and the electromagnetic coil is not in contact with the annular permanent magnet in the working process. When no feedback current is applied to the electromagnetic coil, the measured object vibrates, the connecting shaft vibrates along with the measured object, the annular permanent magnet vibrates along with the connecting shaft, and the annular permanent magnet and the electromagnetic coil generate relative displacement.
Further, the shell comprises a first cavity and a second cavity, and the first cavity is communicated with the second cavity through a through hole; a guide bearing is arranged in the through hole; the connecting shaft penetrates through the guide bearing from the first cavity and then extends into the second cavity; the guide bearing limits the radial movement of the connecting shaft, so that the measurement accuracy of the acceleration sensor is improved.
Further, the metal mass block is positioned in the first cavity and cannot penetrate through the guide bearing; the electromagnetic element is located within the second chamber.
Further, the control unit includes: an eddy current meter and a PID controller; the vortex meter is arranged at the end part of the shell and used for measuring the relative displacement of the metal mass block and the shell; and the PID controller is respectively connected with the vortex meter and the electromagnetic coil and applies feedback current to the electromagnetic coil according to the relative displacement of the metal mass block and the shell.
Further, the annular permanent magnet and the electromagnetic coil are coaxially arranged.
Further, under the non-working state, the axial central plane of the electromagnetic coil is superposed with the axial central plane of the annular permanent magnet.
In another aspect, the present invention provides a method for measuring acceleration using an ultra-low frequency servo type vibration acceleration sensor, comprising the steps of:
fixedly connecting the shell with a measured object;
when the object to be measured vibrates, applying feedback current to the electromagnetic coil through the control unit to enable the relative displacement of the metal mass block and the shell to be zero;
and acquiring the electromagnetic force F acted on the annular permanent magnet by the feedback current, and calculating the acceleration of the object to be measured according to the electromagnetic force F.
In the method, when an object to be measured vibrates, the metal mass block and the shell generate relative displacement, feedback current is applied to the electromagnetic coil through the control unit, the feedback current in the coil generates electromagnetic force F, the relative displacement of the metal mass block and the shell is enabled to be zero through the electromagnetic force F, at the moment, the electromagnetic force and the feedback current are in a linear relation, and the acceleration and the electromagnetic force are in a linear relation, so that the acceleration of the object to be measured can be calculated by measuring the feedback current I.
Further, the method for applying a feedback current to the electromagnetic coil through the control unit so that the relative displacement of the metal mass and the shell is zero comprises the following steps:
the relative displacement of the metal mass block and the shell is measured through the eddy current meter, and the PID controller adjusts the magnitude of the feedback current according to the relative displacement until the relative displacement measured by the eddy current meter is zero.
Has the advantages that:
the invention provides an ultra-low frequency servo type vibration acceleration sensor which comprises the following components:
1. the acceleration of the measured object is measured through the connecting shaft, the electromagnetic element, the metal mass block and the control unit, and the structure is simple; the electromagnetic coil surrounds the annular permanent magnet, so that the sensor is compact in structure; the PID controller applies feedback current to the electromagnetic coil, the vibration acceleration of the measured object can be reflected through the feedback current, the PID controller determines the performance of the acceleration sensor, the mechanical structure requirement of the acceleration sensor is reduced, the overall structure size of the sensor is effectively reduced, and meanwhile, the production and manufacturing cost of the acceleration sensor can be reduced.
2. The eddy current meter is used as a measuring element, and has the advantages of non-contact, strong environmental adaptability, large linear range, high sensitivity and the like.
3. A gap is reserved between the annular permanent magnet and the electromagnetic coil, and the current in the electromagnetic coil generates non-contact electromagnetic force, so that the system has a smaller damping coefficient and a longer fatigue life.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an ultra-low frequency servo type vibration acceleration sensor according to an embodiment of the present invention.
Fig. 2 is a schematic cross-sectional view taken along a-a in fig. 1.
FIG. 3 is a schematic diagram of an eddy current meter in an ultra-low frequency servo type vibration acceleration sensor according to an embodiment of the present invention.
FIG. 4 is an equivalent simplified diagram of the operating principle of the eddy current meter in the ultra-low frequency servo type vibration acceleration sensor according to the embodiment of the present invention.
FIG. 5 is a structural dimension diagram of an electromagnetic element of an ultra-low frequency servo type vibration acceleration sensor according to an embodiment of the present invention.
Fig. 6a is one of the motion states and force diagrams of the metal mass of the ultra-low frequency servo type vibration acceleration sensor in the embodiment of the present invention.
FIG. 6b is a second embodiment of the present invention, which is an ultra-low frequency servo type vibration acceleration sensor.
Reference numerals: 1. a housing; 11. a first chamber; 12. a second chamber; 13. a connecting flange; 2. a connecting shaft; 3. an electromagnetic element; 31. an annular permanent magnet; 32. an electromagnetic coil; 33. a collar; 4. a metal mass block; 5. a guide bearing; 6. an eddy current meter; 61. an eddy current probe; 62. a signal conversion amplifier; 7. a PID controller; 8. an elastic element.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art. In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Example 1
The present embodiment provides an ultra-low frequency servo-type vibration acceleration sensor, which includes a housing 1 and a control unit.
As shown in fig. 1, the housing 1 is provided with an electromagnetic element 3, a connecting shaft 2 and a metal mass 4 inside. The shell 1 is a cylinder and comprises a first cavity 11 and a second cavity 12, and the first cavity 11 is communicated with the second cavity 12 through a through hole; a guide bearing 5 is arranged in the through hole; the connecting shaft 2 penetrates through the guide bearing 5 from the first chamber 11 and then extends into the second chamber 12; the guide bearing 5 limits the radial movement of the connecting shaft 2.
A metal mass block 4 is arranged in the first cavity 11, and the metal mass block 4 is connected with one end of the connecting shaft 2. The other end of the connecting shaft 2 is connected with the shell 1 through an elastic element 8. And a connecting flange 13 is arranged at one end of the shell 1 connected with the elastic element 8, and the connecting flange 13 and the shell 1 are coaxially arranged. The metal mass block 4 is a cylindrical metal mass block 4, and the diameter of the metal mass block 4 is larger than that of the through hole of the guide bearing 5.
The second chamber 12 is internally provided with an electromagnetic coil 32, an annular permanent magnet 31, a collar 33 and an elastic element 8, the annular permanent magnet 31 is fixed on the connecting shaft 2 through the collars 33 at the upper end and the lower end of the annular permanent magnet 31, the electromagnetic coil 32 is fixedly connected with the inner wall of the shell 1, the electromagnetic coil 32 surrounds the annular permanent magnet 31, a gap is reserved between the electromagnetic coil 32 and the annular permanent magnet 31, and the shell 1, the electromagnetic coil 32, the annular permanent magnet 31 and the connecting shaft 2 are coaxially arranged. In this embodiment, the width Dm of the ring-shaped permanent magnet 31 is the width D of the electromagnetic coil 32cAnd the elastic element 8 may be a linear spring. In the initial state, the central plane of the electromagnetic coil 32 and the central plane of the annular permanent magnet 31 are coincident in the axial direction, and the windings of the electromagnetic coil 32 are not in contact with the annular permanent magnet 31 in the working process.
The control unit comprises a vortex meter 6 and a PID controller 7;
the eddy current meter 6 comprises an eddy current probe 61 and a signal conversion amplifier 62, wherein the eddy current probe 61 is mounted at the end part of the shell 1, the eddy current probe 61 is opposite to the metal mass block 4, and the eddy current probe 61 is used for measuring the relative displacement of the metal mass block 4 and the shell 1; the signal conversion amplifier 62 is connected to the eddy current probe 61, and outputs impedance corresponding to the relative displacement between the eddy current probe 61 and the metal mass 4 as corresponding voltage.
The PID controller 7 is respectively connected with the vortex meter 6 and the electromagnetic coil 32, the voltage signal output by the signal conversion amplifier 62 is adjusted by the PID controller 7 to form feedback current, and the feedback current is transmitted to the electromagnetic coil 32.
The working principle of the ultralow frequency servo type vibration acceleration sensor in the embodiment is as follows: the acceleration sensor is connected with a measured object, and when the measured object vibrates, the connecting shaft 2 moves axially, so that the metal mass block 4 and the upper shell 1 generate relative displacement. Due to the eddy current effect, the eddy current probe 61 can detect the relative displacement between the metal mass 4 and the shell 1, then the equivalent impedance of the coil of the eddy current probe 61 corresponding to the relative displacement is converted into a corresponding voltage signal through the signal conversion amplifier 62, the voltage signal is adjusted by the PID controller 7 to form a feedback current and is transmitted to the electromagnetic coil 32, the electromagnetic coil 32 generates electromagnetic force due to electromagnetic induction, the electromagnetic force acts on the annular permanent magnet 31, so that the relative displacement between the annular permanent magnet 31 and the electromagnetic coil 32 tends to zero, the relative displacement between the connecting shaft 2 and the shell 1 tends to zero, and the relative displacement between the metal mass 4 and the shell 1 tends to zero. Therefore, the electromagnetic force can reflect the vibration acceleration of the object to be measured, the magnitude of the electromagnetic force and the feedback current are in a linear relation, and the vibration acceleration of the object to be measured can be reflected through the feedback current.
The acceleration sensor is provided with a PID controller 7, the performance of the acceleration sensor is mainly determined by the electronic PID controller 7, and larger electronic mass and electronic damping can be applied to a mechanical system of the acceleration sensor, so that the acceleration sensor still has larger equivalent mass even under the condition that the mass of the metal mass block 4 is not large, the low-frequency characteristic of the acceleration sensor can be effectively improved, the requirement of the acceleration sensor on a mechanical structure is reduced, and the size of the appearance structure of the acceleration sensor can be obviously reduced; the electromagnetic force of the electromagnetic element 3 has non-contact property, so that the system has smaller damping coefficient and longer fatigue life; the annular permanent magnet 31 and the electromagnetic coil 32 are nested for use, so that the structure is more compact, and the cost of the small overall structure size in the aspects of processing, manufacturing and assembling is lower; the eddy current meter 6 is used as a measuring element, and has the advantages of non-contact, strong environmental adaptability, large linear range, high sensitivity and the like.
Example 2
The present embodiment provides a method for measuring acceleration by using the low-frequency servo vibration acceleration sensor of embodiment 1, which specifically includes the following steps:
fixedly connecting the shell with a measured object;
when the measured object vibrates, the eddy current meter 6 measures the relative displacement of the metal mass block 4 and the shell 1, and the PID controller 7 adjusts the magnitude of the feedback current according to the relative displacement until the relative displacement measured by the eddy current meter 6 is zero.
The electromagnetic force F acting on the ring-shaped permanent magnet 31 by the feedback current is obtained, and the acceleration of the object to be measured is calculated based on the electromagnetic force F.
The principle of the measuring method is as follows: when the object to be measured vibrates, the probe of the eddy current meter 6 and the metal conductor generate relative displacement, the impedance of the coil of the probe of the eddy current meter 6 changes, and the signal conversion amplifier 62 converts the equivalent impedance of the coil of the eddy current probe 61 into a corresponding voltage signal U0Output, voltage signal U0The feedback current I is formed after the regulation is carried out by the PID controller 7, so that the system is added with an electromagnetic force F which can enable the relative displacement of the metal mass block 4 and the upper shell 1 of the sensor to be zero, the electromagnetic force and the feedback current are in a linear relation, and the acceleration a of the measured object can be reflected by the magnitude of the feedback current.
In this embodiment, the operating principle of the vortex finder 6 is shown in fig. 3. When the coil of the eddy current probe 61 is supplied with a high-frequency current I1, a continuously fluctuating magnetic field H1 is generated around the coil of the eddy current probe 61. In the fluctuating magnetic field, the metal mass 4 generates small eddy current I2 on the surface, and the new magnetic field H2 generated by I2 in turn hinders the change of H1, so that the equivalent impedance of the coil of the eddy current probe 61 and the metal mass 4 is obtained, and the change of the impedance can reflect the change of the distance between the coil of the eddy current probe 61 and the metal mass 4, and can be simplified into an equivalent circuit as shown in FIG. 4.
According to kirchhoff voltage balance equation:
obtaining by solution:
in the formula: l is1Equivalent inductance of the coil of the eddy current probe 61; r is a coil resistance; j is an imaginary unit; h1 is equivalent inductance in the metal to be tested; r1Is the equivalent resistance of the coil of the eddy current probe 61; m is L and L1Mutual inductance coefficient between; u is the excitation voltage.
Eddy current probe 61 coil equivalent impedance:
by deriving the above equation set, the equivalent impedance Z of the coil of the eddy current probe 61 can be simplified as:
Z＝f(ω1,μ,x,ρ)
in the formula: omega1Is the frequency of the excitation current in the coil; mu is the magnetic permeability of the measured body; rho is the resistivity of the measured body; x is the relative distance of the coil of the eddy current probe 61 and the metal mass 4.
Therefore, the relative displacement of the metal mass 4 and the coil of the eddy current probe 61, that is, the relative displacement of the metal mass 4 and the housing 1 can be reflected by the equivalent impedance Z of the coil of the eddy current probe 61.
The specific estimation process of the electromagnetic force reflecting the vibration acceleration of the object to be measured is as follows. As shown in fig. 6a and 6b, after the electromagnetic force F is introduced, the metal mass 4 moves by a displacement xoNamely the superposition of the movement displacement when the electromagnetic force is not introduced and the movement displacement under the action of the introduced electromagnetic force.
Equation of motion of the metal mass 4 in the absence of electromagnetic force:
and (3) carrying out Laplacian transformation to obtain:
in the formula: m is the mass of the metal mass block 4; c is system damping; k is the spring rate; x is the number ofiThe vibration displacement of the detected body is obtained; x is the number ofiIs the displacement of the measured object;
the velocity of the object to be measured;
is the velocity of the metal mass;
is the acceleration of the metal mass; s is a complex variable, and s is α + j α ω;
when electromagnetic force is introduced, the motion equation of the metal mass block 4 is as follows:
and (3) carrying out Laplacian transformation to obtain:
in the formula: f is the electromagnetic force of the electromagnetic element 3; x is the number ofo2Displacement of the metal mass block due to electromagnetic force F;
the speed of the metal mass block generated by the electromagnetic force F;
the acceleration of the metal mass due to the electromagnetic force F.
According to the superposition principle, the movement displacement of the metal mass block 4 after the electromagnetic force F is added:
the relative displacement between the metallic mass 4 and the housing 1 is then:
as can be seen from the above formula, when the relative displacement x between the metal mass 4 and the housing 1 approaches zero, the electromagnetic force of the electromagnetic element 3:
F＝ms2xi
conversion to differential equation:
therefore, the electromagnetic force can reflect the vibration acceleration of the measured object; x is the number ofiIs the displacement of the measured object;
is the acceleration of the object under test.
In this embodiment, the electromagnetic force F is BILsin θ, where B is the magnetic induction intensity in the magnetic field; i is a feedback current; l is the conductor length of the electromagnetic coil 32 in the magnetic field; theta is the included angle between the magnetic induction intensity direction and the current direction.
The magnitude of the electromagnetic force F can be obtained by the feedback current I, and the acceleration of the object to be measured can be obtained by the electromagnetic force F
Therefore, the acceleration of the measured object can be measured through the feedback current I
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications of the invention may be made without departing from the spirit or scope of the invention.
Claims (9)
1. An ultra-low frequency servo-type vibration acceleration sensor, comprising:
the electromagnetic device comprises a shell (1), wherein an electromagnetic element (3), a connecting shaft (2) and a metal mass block (4) are arranged in the shell (1), the electromagnetic element (3) comprises an electromagnetic coil (32) and an annular permanent magnet (31), and the electromagnetic coil (32) is fixedly connected with the shell (1) and surrounds the annular permanent magnet (31); one end of the connecting shaft (2) is fixedly connected with the metal mass block (4), and the other end of the connecting shaft is connected with the shell (1) through an elastic element (8); the annular permanent magnet (31) is fixedly connected with the connecting shaft (2), and the connecting shaft (2) can move along with the annular permanent magnet (31) along the axial direction of the shell (1);
and the control unit is connected with the electromagnetic coil (32) and applies feedback current to the electromagnetic coil (32) to enable the relative displacement of the metal mass block (4) and the shell (1) to be zero.
2. The ultra-low frequency servo-type vibration acceleration sensor according to claim 1, wherein a gap is left between the electromagnetic coil (32) and the annular permanent magnet (31).
3. The ultra low frequency servo-type vibration acceleration sensor according to claim 1, wherein the housing (1) comprises a first chamber (11) and a second chamber (12), the first chamber (11) and the second chamber (12) are communicated through a through hole; a guide bearing (5) is arranged in the through hole; the connecting shaft (2) penetrates through the guide bearing (5) from the first cavity (11) and then extends into the second cavity (12); the guide bearing (5) limits the radial movement of the connecting shaft (2).
4. The ultra low frequency servo-type vibration acceleration sensor according to claim 3, characterized in that the metal mass (4) is located in the first chamber (11) and cannot pass through the guide bearing (5); the electromagnetic element (3) is located within the second chamber (12).
5. The ultra-low frequency servo-type vibration acceleration sensor according to claim 1, wherein the control unit comprises: a vortex meter (6) and a PID controller (7); the vortex meter (6) is arranged at the end part of the shell (1) and is used for measuring the relative displacement of the metal mass block (4) and the shell (1); and the PID controller (7) is respectively connected with the vortex meter (6) and the electromagnetic coil (32), and applies feedback current to the electromagnetic coil (32) according to the relative displacement of the metal mass block (4) and the shell (1).
6. The ultra low frequency servo-type vibration acceleration sensor according to any one of claims 1 to 5, wherein the ring-shaped permanent magnet (52) and the electromagnetic coil (51) are coaxially arranged.
7. The ultra low frequency servo-type vibration acceleration sensor according to any one of claims 1-5, wherein the axial center plane of the electromagnetic coil (32) coincides with the axial center plane of the annular permanent magnet (31) in the non-operating state.
8. A method for measuring acceleration using a sensor according to any of claims 1-7, comprising the steps of:
fixedly connecting the shell with a measured object;
when the object to be measured vibrates, feedback current is applied to the electromagnetic coil (32) through the control unit, so that the relative displacement between the metal mass block (4) and the shell (1) is zero;
and acquiring the electromagnetic force F acted on the annular permanent magnet (31) by the feedback current, and calculating the acceleration of the object to be measured according to the electromagnetic force F.
9. The method of measuring acceleration according to claim 8, characterized in that: the method for applying feedback current to the electromagnetic coil (32) through the control unit so that the relative displacement of the metal mass (4) and the shell (1) is zero comprises the following steps:
the eddy current meter (6) is used for measuring the relative displacement of the metal mass block (4) and the shell (1), and the PID controller (7) is used for adjusting the magnitude of the feedback current according to the relative displacement until the relative displacement measured by the eddy current meter (6) is zero.
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| CN202111170969.XA CN113899917A (en) | 2021-10-08 | 2021-10-08 | Ultralow frequency servo type vibration acceleration sensor and acceleration measuring method |
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| CN202111170969.XA CN113899917A (en) | 2021-10-08 | 2021-10-08 | Ultralow frequency servo type vibration acceleration sensor and acceleration measuring method |
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Application publication date: 20220107 |