CN100554887C - Radial direction magnetic bearing integrated type differential electric inductance sensing device - Google Patents

Radial direction magnetic bearing integrated type differential electric inductance sensing device Download PDF

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Publication number
CN100554887C
CN100554887C CNB2007100469866A CN200710046986A CN100554887C CN 100554887 C CN100554887 C CN 100554887C CN B2007100469866 A CNB2007100469866 A CN B2007100469866A CN 200710046986 A CN200710046986 A CN 200710046986A CN 100554887 C CN100554887 C CN 100554887C
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China
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wire
lead
pcb
inductance
radial direction
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CN101140169A (en
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汪希平
夏翠艳
雷永锋
钟德华
江鹏
朱礼进
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University of Shanghai for Science and Technology
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University of Shanghai for Science and Technology
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Abstract

The present invention relates to a kind of radial direction magnetic bearing integrated type differential electric inductance displacement sensing apparatus.It comprises printed circuit board (PCB) and sensing probe; Sensing probe is a coiling on the magnetic core skeleton, and the two ends of coil are drawn by lead-in wire and are connected to printed circuit board (PCB); Have four sensing probes, with in the circumferential uniform radially mounting hole that radially is installed in an annular retainer, annular retainer is fixedlyed connected with printed circuit board (PCB) and is integral; Printed circuit board (PCB) is a disc, is installed on the radial direction magnetic bearing end.Compact conformation of the present invention, it is little to take up room, and antijamming capability is strong, and the signal to noise ratio (S/N ratio) height is highly sensitive, the reliability height, stability is high.

Description

Radial direction magnetic bearing integrated type differential electric inductance sensing device
Technical field
The present invention relates to a kind of inductance displacement sensing device, particularly a kind of displacement sensing apparatus that is applied to radial magnetic bearing.
Background technology
Displacement signal sensor is the important component part of active magnetic bearing system, and the quality of its performance influences the performance of total system to a great extent.Active magnetic bearing system is contactless to first requirement of displacement transducer.See theoretically, utilize sound waves such as electric capacity, inductance, photosensitive, grating, Hall effect all can realize this purpose.Electromagnetic bearing also has the requirement of displacement transducer: the change in displacement that can reflect rotor center truly; Have very high sensitivity, signal to noise ratio (S/N ratio), the linearity, temperature stability, antijamming capability and accurate repeatability, also require to have certain frequency response range simultaneously.At present, magnetic bearing system mainly is to use the separate type eddy current displacement sensor, measurement all be the situation of movement of rotor surface, can only reflect the position of rotor center indirectly, when rotor rotation, reflection be the situation of rotor eddy.Using the separate type eddy current displacement sensor in active magnetic bearing system exists a lot of not enough: signal to noise ratio (S/N ratio) is lower, the cost height, and sensitivity is not high, improve the linear range limited system of sensitivity.
What another kind of application was wider is inductive displacement transducer.Inductance type transducer is the device that utilizes the variation realization non-electricity measure of self-induction of loop or mutual inductance.Summary of the invention
The purpose of this invention is to provide a kind of compact conformation, it is little to take up room, and antijamming capability is strong, and the signal to noise ratio (S/N ratio) height is highly sensitive, reliability height, the radial direction magnetic bearing integrated type differential electric inductance sensing device that stability is high.
For achieving the above object, design of the present invention is:
Theoretical foundation of the present invention is a kind of lumped inductance parameter bit displacement sensor that utilizes coil self-inductance to make between current vortex and inductance sensor.The present invention can change the displacement physical quantity of input through being converted into correspondent voltage, promptly realize the conversion of non electrical quantity to electric weight.Advantage of the present invention is: compact conformation, and it is little to take up room; Antijamming capability is strong; The signal to noise ratio (S/N ratio) height; Highly sensitive; The reliability height; Stability is high; Use simple on the engineering; And can eliminate installation site and the rotor shapes error phenomenon of using the traditional electrical eddy displacement sensor to cause.
This integrated type differential electric inductance displacement transducer, its physical construction comprise magnetic core skeleton, spacer sleeve, the annular retainer of sensor probe, printed circuit board (PCB).The profile of printed circuit board (PCB) is circular ring texture, and 1 power supply and signal output socket are arranged on the plate, has several apertures to be used to install and fix all around; Annular retainer is installed in the middle of the pcb board; Adopt slight interference machinery to cooperate between printed circuit board (PCB) and the annular retainer, add CARBURIZING FURNACE FOR STAINLESS FASTENER and fix.Annular retainer has four mounting holes, magnetic core skeleton, coil is housed in each mounting hole, reaches spacer sleeve.This structure is very compact, and it is little to take up room, and is convenient to install, dismantle, and is convenient to machining simultaneously;
The integrated type differential electric inductance displacement transducer that the present invention relates to, its circuit feature is: it comprises three parts, is respectively alternating current bridge circuit, AD598 main circuit, DC current gain circuit.This non-electric charge quantity signalling of the displacement of electromagnetic bearing rotor becomes voltage signal through the alternating current bridge circuit conversion, this signal input AD598 main circuit is through certain processing output signal, after process DC current gain circuit carries out the amplification (also can dwindle) of signal, draw the d. c. voltage signal that becomes corresponding relation with the rotor displacement size and Orientation.
The magnetic core skeleton of above-mentioned sensor probe adopts behind the Ferrite Material thermal sintering as core material, spacer sleeve adopts good permeability magnetic material, annular retainer is the organic polymer composite goods, advantage: non-magnetic conduction, high temperature resistant, anticorrosive, printed circuit board (PCB) are that matrix constitutes with glass fibre and epoxy resin.
According to above-mentioned inventive concept, the present invention adopts following technical proposals:
A kind of radial direction magnetic bearing integrated type differential electric inductance displacement sensing apparatus comprises printed circuit board (PCB) and sensing probe, it is characterized in that
1), described sensing probe is coiling on the magnetic core skeleton, the two ends of coil are drawn by lead-in wire and are connected to printed circuit board (PCB),
2), have four described sensing probes, with in the circumferential uniform radially mounting hole that radially is installed in an annular retainer.
3), described annular retainer fixedlys connected with described printed circuit board (PCB) and is integral,
4), described printed circuit board (PCB) is disc, is installed on the radial direction magnetic bearing end.
After spacer sleeve, above-mentioned sensing probe outside suit is fixedly mounted in the mounting hole of annular retainer; Circumferentially four uniform fairleads are arranged on the described printed circuit board (PCB), and the lead-in wire of four sensing probes is drawn from these four fairleads respectively.
Circuit structure on the above-mentioned printed circuit board (PCB) is:
1), the coil of four sensing probes becomes four inductance of two alternating current bridge circuit of 2 directions respectively;
2), described alternating current bridge circuit connects an AD598 main circuit, DC current gain circuit of AD598 main circuit connection, output of DC current gain circuit and the proportional DC voltage of rotor displacement.
Above-mentioned alternating current bridge circuit is made of the inductance of 2 symmetries, 2 resistance and a zero potentiometer; The series connection of two inductance, two resistance series connection and connect into ring with two inductance, the zero potentiometer of connecting between two resistance, the lead-in wire C between the termination lead-in wire A of an inductance, two inductance and the adjustment pin lead-in wire B of zero potentiometer are connected described AD598 main circuit.
The circuit structure of above-mentioned AD598 main circuit is: the LEV1 of AD598 chip end and two resistance that are connected in series between LEV2 holds, FREQ1 end be connected in series an electric capacity between FREQ2 holds, B1 end be connected in series an electric capacity between B2 holds,-Vs termination-15V power supply, + Vs termination+15V power supply,-Vs end is connected in series two electric capacity and these two electric capacity middle grounds with+Vs between holding, SIG REF holds ground connection, SIG OUT end be connected in series two resistance between FEEDBACK holds, FEEDBACK end be connected in series an electric capacity between OUTFILT holds, A1FILT end be connected in series an electric capacity between A2FILT holds, the Exc1 end is through electric capacity lead-in wire D, Vb end lead-in wire E and the corresponding respectively lead-in wire A that is connected described alternating current bridge circuit of Va end lead-in wire F, lead-in wire B and lead-in wire C, SIG OUT end lead-in wire G connects described DC current gain circuit.
Above-mentioned DC current gain circuit constitutes reverse proportional amplifier by an operational amplifier, three resistance, a potentiometer and an electric capacity, and constitute voltage follower by another operational amplifier, the input end lead-in wire H of described reverse proportional amplifier connects the lead-in wire G of described AD598 main circuit, the output terminal of described proportional amplifier connects the input end of described voltage follower, the output terminal K output and the proportional DC voltage of rotor displacement of described voltage follower.
The present invention compared with prior art, have following conspicuous outstanding substantive distinguishing features and remarkable advantage: this non-electric charge quantity signalling of the displacement of electromagnetic bearing rotor becomes voltage signal through the alternating current bridge circuit conversion, the signal Processing main circuit that this signal constitutes through AD598, can obtain and the proportional high precision of rotor displacement, the DC voltage of high duplication, but its precision is influenced by the size of air gap, measurement sensitivity under the air gaps situation may be subjected to certain constraint, and the DC current gain circuit that designs among the present invention can be eliminated this adverse effect, the sensitivity that makes the present invention under any circumstance all can obtain to be fit to.The space that printed circuit board (PCB) both provided circuit to install also is the fixed part of annular retainer.The outer ring physical dimension requirement on machining accuracy of circuit board is higher, generally should make it reach the requirement of application with corresponding magnetic bearing center after assembling; Simultaneously, also should reach slight interference machinery cooperate degree within annular retainer and the printed circuit board (PCB) between the circle; For guaranteeing to satisfy above-mentioned mounting condition, can add CARBURIZING FURNACE FOR STAINLESS FASTENER in the present invention's design and fix.That is, finally reach the present invention's sensor measurement center and suspension rotor center wherein is overlapping, can reduce the difficulty of circuit zeroing process to greatest extent.
One, description of drawings
Fig. 1 is installed on the magnetic bearing end view for the present invention.
Fig. 2 is mechanical construction drawing probe line graph of the present invention.
Fig. 3 is the present invention's line graph of popping one's head in.
Fig. 4 is a circuit system block diagram of the present invention.
Fig. 5 is an alternating current bridge circuit diagram of the present invention.
Fig. 6 is an AD598 main circuit diagram of the present invention.
Fig. 7 is a DC current gain circuit diagram of the present invention.
Among the figure, printed circuit board (PCB) 1; Annular retainer 2; Fairlead 3; Spacer sleeve 4; Magnetic core skeleton 5; Lead-in wire 6; Coil (enameled wire) 7.
Two, embodiment
Referring to Fig. 1, Fig. 2 and Fig. 3, a preferred embodiment of the present invention accompanying drawings is as follows: the physical construction of present embodiment is by sensor probe (magnetic core skeleton 5, coil 7), spacer sleeve 4, annular retainer 2, and printed circuit board (PCB) 1 is formed.Thickness be 1.5mm be that the printed circuit board (PCB) profile of matrix is a circular configuration with glass fibre and epoxy resin, with annular retainer 2 centers and printed circuit board (PCB) 1 centrally aligned that highly is the organic polymer composite of 7mm, and with screw or engineering adhesive that annular retainer 2 and printed circuit board (PCB) 1 is fixing.On the magnetic core skeleton 5 that sintering obtains after Ferrite Material shapes, directly be that 0.06mm QZ type high strength enamelled wire coiling 350 circles become coil 7 with line.Coil 7 adds insulating paper, and installs spacer sleeve 4 additional.Before assembling, should take the necessary measures, confirm that 4 coils 7 on the annular retainer 2 all meet the related electric requirement, guarantee that simultaneously short circuit, breaking phenomena do not appear in each coil 7 inside; Coil 7 short circuit and breaking phenomena do not occur too with the outside; Measure the parameter (resistance value, inductance value) of each coil 7 with the DL-6243LC tester; Coil 7 is assemblied on each magnetic core skeleton 5, and coil 7 lines on each magnetic core skeleton 5 as shown in Figure 3.Fig. 3 is magnetic core skeleton 5 and coil 7 and line 6 synoptic diagram, and other 3 probes also have similar line on the spacer sleeve 4.The line 6 of each coil 7 leads to the 1mm copper wire, and each direction (degree of freedom) has 4 lead-in wire 6 joints, and per two is the extension line of a telefault.4 probes are respectively 4 inductance of the alternating current bridge composition on 2 directions (degree of freedom).The magnetic core skeleton 5 of diameter 4mm is installed in the mounting hole of annular retainer 2, is spacer sleeve 4 between magnetic core skeleton 5 and the mounting hole.The effect of spacer sleeve 4 is armoured magnetic fields.
Printed circuit board (PCB) 1 circuit structure of present embodiment is referring to Fig. 4, and an AD598 main circuit 10 connects an alternating current bridge circuit 9 and a DC current gain circuit 11.Referring to Fig. 1, printed circuit board (PCB) 1 is installed in the end of radial direction magnetic bearing 8.
The alternating current bridge circuit 9 of present embodiment as shown in Figure 5.Alternating current bridge circuit 9 has zero potentiometer W1, is used for the equilibrium point adjustment at (circuit zero point).Apply a high-frequency excitation signal to coil, pumping signal is to be produced by the low-distortion sine wave oscillator of the sensor-specific chip AD598 inside of Analog Devices company itself and output amplifier.It is the sinusoidal signal of 20Hz to 20kHz that AD598 inside can produce frequency, and the amplitude of this signal output is fixing ± 11v.Control capacittance C 12Size can change the frequency of pumping signal.In the present embodiment, disturb for the beat of eliminating between the two-freedom, 2 directions (degree of freedom) go up the shared same driving source of telefault.When alternating current bridge reaches balance, there is not signal to be detected at output point.And change and when causing the self-induction of telefault to change, cause that the balance of alternating current bridge lost efficacy when the suspension rotor displacement in the magnetic suspension bearing, can detect corresponding rotor-position voltage signal at output point this moment.This position signalling is handled through AD598 and is promptly obtained and the proportional voltage signal of suspension rotor displacement.AD598 is a high performance one chip linear displacement differential transformer (LVDT) Signal Regulation special chip, integrated circuit such as excitation signal generator, signal demodulation, amplification, temperature compensation.In the present embodiment, then using it for to the imbalance of alternating current bridge output handles.Utilize the high integration characteristics of AD598, make that the inductance displacement sensor metering circuit structure of utilizing this chip design is very compact.The AD598 main circuit as shown in Figure 6, the D point is the input point that main circuit provides high-frequency excitation signal, E, F accept the output signal from the alternating current bridge circuit, G is a signal output.Resistance R 14, R 11, C 12The decision output signal frequency.For preventing chip circuit vibration, capacitor C 13, C 14Power filtering capacitor for chip.Capacitor C 11 is the capacitance of ac-excited signal, and certain amplitude limit effect is arranged simultaneously.Resistance R 14, R 16Be the build-out resistor of output, determine by output performance.Signal Processing main circuit through the AD598 formation, can obtain DC voltage with the proportional high precision of rotor displacement, high duplication, when measurement sensitivity can not meet the demands, the DC current gain circuit that connects after can utilizing carried out suitable compensation, to change the sensitivity of sensor.The DC current gain circuit as shown in Figure 7, it by reverse proportional amplifier (by resistance R 311, resistance R 312, resistance R 313, capacitor C 311, potentiometer W 311, operational amplifier U 311AForm) and voltage follower (by operational amplifier U 311BForm) form.Resistance R 311, potentiometer W 311, resistance R 313Constitute the adjustment link of gain, capacitor C 311Prevent vibration, resistance R 312Be balance resistance.Voltage follower improves the load capacity of circuit.The J point passes through R 311, R 313, W 311Cross at 1 and locate to obtain suitable voltage, voltage is exported from K via voltage follower.The output signal of voltage follower is the d. c. voltage signal with the proportional relation of rotor displacement size and Orientation.

Claims (6)

1, a kind of radial direction magnetic bearing integrated type differential electric inductance displacement sensing apparatus comprises printed circuit board (PCB) (1) and sensing probe, it is characterized in that
A. described sensing probe is that a magnetic core skeleton (5) is gone up coiling (7), and the two ends of coil (7) are drawn by lead-in wire (6) and are connected to printed circuit board (PCB) (1),
B. have four described sensing probes, with in the circumferential uniform radially mounting hole that radially is installed in an annular retainer (2);
C. described annular retainer (2) is fixedlyed connected with described printed circuit board (PCB) (1) and is integral,
D. described printed circuit board (PCB) (1) is a disc, is installed on radial direction magnetic bearing (8) end.
2, radial direction magnetic bearing integrated type differential electric inductance displacement sensing apparatus according to claim 1 is characterized in that being fixedly mounted in the mounting hole of annular retainer (2) after described sensing probe outside suit spacer sleeve (4); Circumferentially uniform four fairleads (3) are arranged on the described printed circuit board (PCB) (1), and the lead-in wire of four sensing probes (6) is drawn from these four fairleads (3) respectively.
3, radial direction magnetic bearing integrated type differential electric inductance displacement sensing apparatus according to claim 1 is characterized in that the circuit structure on the described printed circuit board (PCB) (1) is:
1), the coil of four sensing probes (7) becomes four inductance (SL1, SL2) of two alternating current bridge circuit (9) of 2 directions respectively
2), described alternating current bridge circuit (9) connects an AD598 main circuit (10), AD598 main circuit (a 10) connection DC current gain circuit (11), DC current gain circuit (11) output and the proportional DC voltage of rotor displacement.
4, radial direction magnetic bearing integrated type differential electric inductance displacement sensing apparatus according to claim 3 is characterized in that described alternating current bridge circuit (9) is made of inductance (SL1, SL2), 2 resistance (R12, R13) and a zero potentiometer (W1) of 2 symmetries; Two inductance (SL1, SL2) series connection, two resistance (R12, R13) are connected and are connected into ring with two inductance (SL1, SL2), the zero potentiometer (W1) of connecting between two resistance (R12, R13), the lead-in wire C between the termination lead-in wire A of an inductance, two inductance and the adjustment pin lead-in wire B of zero potentiometer are connected described AD598 main circuit (10).
5, radial direction magnetic bearing integrated type differential electric inductance displacement sensing apparatus according to claim 3, the circuit structure that it is characterized in that described AD598 main circuit (10) is: the LEV1 of an AD598 chip (U1) end and two resistance (R15 that are connected in series between LEV2 holds, R11), FREQ1 end be connected in series an electric capacity (C12) between FREQ2 holds, B1 end be connected in series an electric capacity (C15) between B2 holds,-Vs termination-15V power supply, + Vs termination+15V power supply,-Vs end is connected in series two electric capacity (C13 with+Vs between holding, C14) and these two electric capacity (C13, C14) middle ground, SIG REF holds ground connection, SIG OUT end be connected in series two resistance (R16 between FEEDBACK holds, R14), FEEDBACK end be connected in series an electric capacity (C17) between OUTFILT holds, A1FILT end be connected in series an electric capacity (C16) between A2FILT holds, the Exc1 end is through electric capacity (C11) lead-in wire D, Vb end lead-in wire E and the corresponding respectively lead-in wire A that is connected described alternating current bridge circuit (9) of Va end lead-in wire F, lead-in wire B and lead-in wire C, SIG OUT end lead-in wire G connects described DC current gain circuit (11).
6, radial direction magnetic bearing integrated type differential electric inductance displacement sensing apparatus according to claim 5, it is characterized in that described DC current gain circuit (11) is by an operational amplifier (U311A), three resistance (R311, R312, R313), a potentiometer (W311) and an electric capacity (C311) constitute reverse proportional amplifier, and constitute voltage follower by another operational amplifier (U311B), the input end lead-in wire H of described reverse proportional amplifier connects the lead-in wire G of described AD598 main circuit (10), the output terminal of described proportional amplifier connects the input end of described voltage follower, the output terminal K output and the proportional DC voltage of rotor displacement of described voltage follower.
CNB2007100469866A 2007-10-12 2007-10-12 Radial direction magnetic bearing integrated type differential electric inductance sensing device Expired - Fee Related CN100554887C (en)

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Families Citing this family (10)

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CN101776433A (en) * 2010-03-23 2010-07-14 哈尔滨工业大学 Separate differential displacement sensor suitable for micro displacement detection
CN102288171B (en) * 2011-04-28 2014-05-14 中国船舶重工集团公司第七0七研究所 Active magnetically-suspended gyroscope floater centering and adjusting device
CN102435131B (en) * 2011-11-11 2013-08-28 北京中科科仪股份有限公司 Radial displacement sensor and rotor radial displacement detection system of magnetically levitated molecular pump
CN104266665B (en) * 2014-09-17 2016-09-28 上海兰宝传感科技股份有限公司 Inductance type transducer
CN105716515A (en) * 2014-12-04 2016-06-29 珠海格力节能环保制冷技术研究中心有限公司 Current vortex sensor
CN107024233B (en) * 2017-05-26 2023-08-11 成都凯天电子股份有限公司 Inductance-type proximity sensor analog inductance output circuit
CN109780985A (en) * 2019-03-14 2019-05-21 苏州赛得尔智能科技有限公司 A kind of magnetic suspension bearing micro-displacement detection device
CN110849255B (en) * 2019-11-27 2021-08-20 中国科学院理化技术研究所 Displacement sensor
CN111023957B (en) * 2019-12-20 2021-05-28 北京航空航天大学 High-temperature-resistant radial displacement sensor device
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