CN211476993U - Differential bridge type eddy current displacement sensor - Google Patents
Differential bridge type eddy current displacement sensor Download PDFInfo
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- CN211476993U CN211476993U CN202020190003.7U CN202020190003U CN211476993U CN 211476993 U CN211476993 U CN 211476993U CN 202020190003 U CN202020190003 U CN 202020190003U CN 211476993 U CN211476993 U CN 211476993U
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Abstract
A differential bridge type eddy current displacement sensor comprises a signal processing device, a group of differential coaxial lines and a group of differential eddy current detection probes. The eddy current detection probe only comprises one detection coil inside. The signal processing device comprises an excitation signal driving circuit, a balance bridge circuit and a signal demodulation circuit. The differential eddy current probes are arranged on two sides of the measured target, the positive probes and the negative probes respectively sense displacement change information on two sides of the measured target to generate differential voltage signals, and analog voltage signals reflecting displacement changes can be obtained after signal demodulation. The balance bridge only amplifies the impedance change of the detection coil, so that the resolution is higher, and the characteristics of temperature drift, interference noise and the like of the two eddy current sensor probes are almost completely consistent, so that the double sensitivity, the extremely low noise and temperature drift are realized, and the effect of reducing the size of the probes on the basis of improving the detection precision is realized.
Description
Technical Field
The utility model relates to a nondestructive test device, in particular to differential bridge type eddy current displacement sensor for to the high accuracy non-contact measurement of conductor displacement.
Background
In recent years, in the fields of machinery, electric power, petroleum, aviation, aerospace and the like, the eddy current displacement sensor has the advantages of non-contact, simple structure, high sensitivity, wide frequency response, strong capability of resisting severe environment, no influence of non-metallic materials and the like, and is widely applied to the detection field.
The eddy current sensor works based on the impedance measurement principle, when the ambient temperature changes slightly near the normal temperature, the output of the sensor is less affected by the temperature, and the numerical value of the measured displacement can be accurately reflected. When the environmental temperature greatly deviates from the normal temperature, the impedance of the detection coil is greatly changed under the influence of the temperature, so that the measured signal can generate large drift. In order to perform temperature compensation, a temperature compensation device is added in a probe of a traditional eddy current sensor, algorithm compensation is performed in a signal processing device, and the compensation precision of the method is low. There are also some commercially available devices that use low temperature coefficient wire to wind the coil to reduce the effect of ambient temperature on the electrical parameters of the sensor, and this approach has limited compensation effect. In addition, the negative temperature coefficient resistor is adopted to compensate the coil, so that the size of the probe is lengthened, and the installation and detection are not facilitated. When the temperature greatly deviates from the normal temperature, the resistance and capacitance values in the circuit can drift, and the measurement precision is influenced. The positive and negative probes of the differential bridge type eddy current displacement sensor are arranged on two sides of a measured target, the positive and negative probes respectively sense displacement change information on the two sides of the measured target to generate differential voltage signals, and analog voltage signals reflecting displacement changes can be obtained after signal demodulation. The balance bridge only amplifies the impedance change of the detection coil, so that the resolution is higher, and the characteristics of temperature drift, interference noise and the like of the two eddy current sensor probes are almost completely consistent, so that the double sensitivity, the extremely low noise and temperature drift are realized, and the effect of reducing the size of the probes on the basis of improving the detection precision is realized.
The resistance, the capacitance and the impedance of the detection coil in the circuit can be greatly changed in a high-temperature environment, and the temperature influence is high, so that the measurement result of the eddy current displacement sensor is seriously influenced by the change of the environmental temperature because the resistivity temperature coefficient of common good metal conductors such as copper, aluminum and the like is high. When the ambient temperature is high, the impedance of the detection coil is greatly changed under the influence of the temperature, so that the measured signal can generate large drift.
SUMMERY OF THE UTILITY MODEL
The technical solution problem of the utility model is that: aiming at the defect that the existing eddy current sensor is difficult to consider the volume and the precision, the design method of the differential bridge type eddy current displacement sensor is provided and is used for high-precision non-contact measurement of conductor displacement.
The technical solution of the utility model is that: a differential bridge type eddy current displacement sensor comprises a signal processing device, a group of differential coaxial cables and a group of differential eddy current detection probes. The eddy current detection probe only comprises one detection coil inside. The signal processing device comprises an excitation signal driving circuit, a balance bridge circuit and a signal demodulation circuit. The excitation signal driving circuit generates alternating current excitation which respectively enters differential probes arranged at two sides of a measured target through differential coaxial lines, the positive probe and the negative probe respectively sense displacement change information at two sides of the measured target to generate differential voltage signals, and analog voltage signals reflecting displacement changes can be obtained after signal demodulation.
The principle of the utility model is that: the excitation signal generates an alternating magnetic field around the detection coil, and the detected conductor in the range of the alternating magnetic field induces an eddy current. The eddy currents in the conductor generate a magnetic field in a direction opposite to the coil magnetic field, and the interaction of the coil magnetic field and the eddy current magnetic field changes the impedance of the detection coil. When the distance is changed, the magnetic field coupling strength of the coil and the target conductor is changed, and the impedance of the coil is changed accordingly. The coil impedance changes cause the differential output voltage of the balanced bridge to change. The differential voltage is amplified by a differential amplifier, demodulated by a reverse switch and amplified by an instrument amplifier, and an analog voltage signal reflecting displacement change can be obtained.
Compared with the prior art, the utility model the advantage lie in: the balance bridge only amplifies the impedance change of the detection coil, so that the resolution is higher, and the characteristics of temperature drift, interference noise and the like of the two eddy current sensor probes are almost completely consistent, so that the double sensitivity, the extremely low noise and temperature drift are realized, and the effect of reducing the size of the probes on the basis of improving the detection precision is realized.
Drawings
Fig. 1 is a schematic diagram of a differential bridge according to the present invention;
FIG. 2 is a block diagram of the present invention;
Detailed Description
The utility model relates to a differential bridge type eddy current sensor device. The displacement in multiple directions can be measured by correspondingly configuring multiple groups of differential probes and signal processing circuits according to different moving directions of the measured target. It mainly comprises: the device comprises a signal processing device, a group of differential coaxial lines and a group of differential eddy current detection probes. The utility model discloses a signal processing device contains: the circuit comprises an excitation signal driving circuit, a balance bridge circuit and a signal demodulation circuit. The utility model discloses an inside detection coil that only contains of difference eddy current testing probe does not have the temperature compensation coil. The detection coil is parallel to the detection surface and is connected with the signal processing device through a coaxial line. The excitation signal driving circuit generates alternating current excitation which respectively enters the differential detection coils through the differential coaxial lines, an alternating magnetic field is generated around the detection coils, and the detected conductor in the range of the alternating magnetic field induces eddy current. The eddy currents in the conductor generate a magnetic field in a direction opposite to the coil magnetic field, and the interaction of the coil magnetic field and the eddy current magnetic field changes the impedance of the detection coil. When the distance is changed, the magnetic field coupling strength of the coil and the target conductor is changed, and the impedance of the coil is changed accordingly. The coil impedance changes cause the differential output voltage of the balanced bridge to change. The differential voltage is amplified by a differential amplifier, demodulated by a reverse switch and amplified by an instrument amplifier, and an analog voltage signal reflecting displacement change can be obtained.
Details not described in the present specification belong to the prior art known to those skilled in the art.
In addition, it should be pointed out that the part names and shapes described in the present invention can be different, and all modifications, additions and improvements made by the structure, features and principle according to the concept of the present invention should be regarded as the protection scope of the present invention.
Claims (5)
1. A differential bridge type eddy current displacement sensor is characterized in that: the differential bridge type eddy current displacement sensor comprises a signal processing device, a group of differential coaxial cables and a group of differential eddy current detection probes; the eddy current detection probe only comprises one detection coil; the signal processing device comprises an excitation signal driving circuit, a balance bridge circuit and a signal demodulation circuit; the excitation signal driving circuit generates alternating current excitation which respectively enters the differential detection coils through the differential coaxial lines, an alternating magnetic field is generated around the detection coils, and the detected conductor in the range of the alternating magnetic field induces eddy current; the eddy current in the conductor generates a magnetic field in a direction opposite to the direction of the coil magnetic field, and the interaction of the coil magnetic field and the eddy current magnetic field changes the impedance of the detection coil; when the distance is changed, the magnetic field coupling strength of the coil and the target conductor is changed, and the impedance of the coil is changed; the coil impedance change causes the differential output voltage of the balanced bridge to change; the differential voltage is amplified by a differential amplifier, demodulated by a reverse switch and amplified by an instrument amplifier, and an analog voltage signal reflecting displacement change can be obtained.
2. A differential bridge eddy current displacement sensor in accordance with claim 1, wherein: the differential eddy current detection probe only comprises a detection coil without a temperature compensation coil; the detection coil is parallel to the detection surface and is connected with the signal processing device through a coaxial line.
3. A differential bridge eddy current displacement sensor in accordance with claim 1, wherein: the balance bridge circuit is composed of a detection bridge arm and a sampling bridge arm, the detection bridge arm is composed of a detection coil and a capacitor in a probe in parallel, and the sampling bridge arm only has a fixed resistor.
4. A differential bridge eddy current displacement sensor in accordance with claim 1, wherein: the excitation signal driving circuit consists of a crystal oscillator, a low-voltage-difference voltage stabilizer, a phase inverter, a shift register and a binary counter; the crystal oscillator generates ultrahigh frequency rectangular waves, and the ultrahigh frequency rectangular waves are subjected to frequency division through the 6-path phase inverter, the secondary system counter and the shift register to generate high-frequency excitation rectangular waves and demodulation rectangular waves; the excitation rectangular wave is output to the probe as an alternating current excitation signal; the output signal of the rectangular wave demodulation balance bridge can be demodulated to obtain a detection output signal.
5. A differential bridge eddy current displacement sensor in accordance with claim 1, wherein: the group of differential eddy current testing probes can be correspondingly configured into a plurality of groups of differential probes and signal processing circuits according to different moving directions of the tested object.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020190003.7U CN211476993U (en) | 2020-02-20 | 2020-02-20 | Differential bridge type eddy current displacement sensor |
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| CN202020190003.7U CN211476993U (en) | 2020-02-20 | 2020-02-20 | Differential bridge type eddy current displacement sensor |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112284230A (en) * | 2020-10-09 | 2021-01-29 | 珠海格力电器股份有限公司 | Displacement detection device, displacement monitoring method and compressor |
| CN112729087A (en) * | 2020-12-16 | 2021-04-30 | 中国科学院苏州生物医学工程技术研究所 | Differential eddy current micro-displacement sensor calibration device, method, computer equipment and storage medium |
| CN114440753A (en) * | 2022-02-24 | 2022-05-06 | 电子科技大学 | Non-contact displacement measuring device based on eddy current principle |
| WO2023221128A1 (en) * | 2022-05-20 | 2023-11-23 | 华为技术有限公司 | Apparatus for measuring thickness of conductive film, and sensor |
-
2020
- 2020-02-20 CN CN202020190003.7U patent/CN211476993U/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112284230A (en) * | 2020-10-09 | 2021-01-29 | 珠海格力电器股份有限公司 | Displacement detection device, displacement monitoring method and compressor |
| CN112284230B (en) * | 2020-10-09 | 2021-11-16 | 珠海格力电器股份有限公司 | Displacement detection device, displacement monitoring method and compressor |
| CN112729087A (en) * | 2020-12-16 | 2021-04-30 | 中国科学院苏州生物医学工程技术研究所 | Differential eddy current micro-displacement sensor calibration device, method, computer equipment and storage medium |
| CN112729087B (en) * | 2020-12-16 | 2022-03-22 | 中国科学院苏州生物医学工程技术研究所 | Differential eddy current micro-displacement sensor calibration device, method, computer equipment and storage medium |
| CN114440753A (en) * | 2022-02-24 | 2022-05-06 | 电子科技大学 | Non-contact displacement measuring device based on eddy current principle |
| CN114440753B (en) * | 2022-02-24 | 2022-11-22 | 电子科技大学 | Non-contact displacement measuring device based on eddy current principle |
| WO2023221128A1 (en) * | 2022-05-20 | 2023-11-23 | 华为技术有限公司 | Apparatus for measuring thickness of conductive film, and sensor |
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