CN201654133U - Resistivity measuring device - Google Patents
Resistivity measuring device Download PDFInfo
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- CN201654133U CN201654133U CN2010201226962U CN201020122696U CN201654133U CN 201654133 U CN201654133 U CN 201654133U CN 2010201226962 U CN2010201226962 U CN 2010201226962U CN 201020122696 U CN201020122696 U CN 201020122696U CN 201654133 U CN201654133 U CN 201654133U
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- coil
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- balancing
- voltage
- resistivity
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Abstract
The utility model discloses a resistivity measuring device which can measure the resistivity of a semiconductor material by vortex change. The device comprises a primary coil and a secondary coil, wherein a first measuring coil and a first balancing coil are connected in series with each other to form the primary coil; a second measuring coil is connected in series with a second balancing coil towards the reverse direction to form the secondary coil; the primary coil is connected with a power supply output terminal of a sine wave generator; and the secondary coil is connected with the measuring circuit. When the sine wave current passes by the primary coil, an alternating magnetic field is generated and the vortex is generated in the specimen; a voltage V is generated on the secondary coil; the voltage V is formed by superposing two parts: one part is the voltage V1 generated by the alternating magnetic field of the primary coil and the other part is the voltage V2 generated by the electric vortex magnetic field in the specimen; the V1 can be eliminated by synchronous demodulation; when the parameters of the device, such as geometrical dimension, distance and the like are determined, the product Rou V2 of the resistivity Rou of the specimen and the measured vortex voltage V2 is a constant; and the value Rou can be obtained by measuring the V2 after the specimen with known resistivity is used for correcting the device.
Description
Technical field
The utility model relates to a kind of measurement mechanism, particularly relates to a kind of resistivity test device.
Background technology
Existing measurement to semiconductor device resistivity, the contact type measurements that adopt more, contact type measurement normally carries out by means of four termination electrodes, under the situation that the semiconductor device volume of sample is less or resistivity is very low to be measured, bigger error can occur, the resistivity that just measures can be apparently higher than its actual resistivity value.Pollute easily on the surface of the potential electrode of contact type measurement and tested sample on the other hand, forms oxide, makes semiconductor device sample to be measured be difficult to have good the contact with electrode, also can further increase measuring error.
The utility model content
In view of above-mentioned existing in prior technology problem, the utility model embodiment provides a kind of resistivity test device, utilizing eddy current to change measures the resistivity of semiconductor material in contactless mode, mensuration can be in the very wide scope of resistivity, realized, the error that causes because of contact measurement can be avoided semiconductor material resistivity.
The purpose of this utility model is achieved through the following technical solutions:
The utility model embodiment provides a kind of resistivity test device, comprising:
Measure coil, two balancing coils, sine-wave generator and metering circuits for two;
Described first measures coil and described first balancing coil composition primary coil that is connected in series, and described second measurement coil and the described second balancing coil differential concatenation connect to form secondary coil; Measure coil for two and be oppositely arranged and keep at a certain distance away, two balancing coils are oppositely arranged and keep at a certain distance away, and the distance between two balancing coils can be regulated;
The primary coil of described composition is connected with the power output end of sine-wave generator, the secondary coil of described composition is connected with metering circuit, metering circuit is used for detecting and handle the voltage that described secondary coil induces, and draws the eddy current voltage that produces in the tested sample and it is shown.
Described two measurement coils are the coil with 10 circle windings.
Described two balancing coils are the coil with 10 circle windings.
Described sine-wave generator comprises:
Oscillator, power amplifier and current controller;
The output terminal of described oscillator is connected with power amplifier, and the output terminal of power amplifier is provided with current controller as power output end on one road output terminal of power amplifier.
Described metering circuit comprises:
Measure signal amplifier, lock detector, indicating instrument and synchronous base processor;
Described measure signal amplifier is connected with indicating instrument through lock detector, and the synchronous base processor is connected with lock detector.
Described measure signal amplifier is connected in sequence by prime amplifier, intermediate amplifier and tuned amplifier.
Described lock detector is by frequency mixer, low-pass filter and be connected amplifier and be connected in sequence, and the output terminal of described connection amplifier is used for being connected with indicating instrument.
Described synchronous base processor is connected in sequence by amplifier, phase shifter and Schmidt trigger, and described amplifier input terminal is used for being connected with the power output end of described sine-wave generator.
From the technical scheme that above-mentioned the utility model embodiment provides as can be seen, after the utility model embodiment measures coil, balancing coil connection by two, under the cooperation of sine-wave generator and metering circuit, utilize eddy-current method easily the resistivity of material to be measured, overcome shortcoming by the surface electrode contact measurement in contactless mode.This measurement mechanism has simple in structure, measurement convenience, measuring accuracy advantages of higher.
Description of drawings
Fig. 1 is the primary coil in the resistivity test device of the utility model embodiment and the connection diagram of secondary coil;
Fig. 2 is the structural representation of the resistivity test device of the embodiment of the invention;
Each label is among the figure: 1-first measures coil; 2-second measures coil; The 3-tested sample; 1 '-the first balancing coil; 2 '-the second balancing coils.
Embodiment
The utility model is described in further detail below in conjunction with the drawings and specific embodiments.
Embodiment
Present embodiment provides a kind of resistivity test device, be that a kind of eddy-current method that utilizes is measured the device of resistivity of material in contactless mode, as shown in Figure 1, 2, this device comprises: measure coils 1,2 for two, two balancing coils 1 ', 2 ', sine-wave generator and metering circuit;
Wherein, described first measures coil 1 and the first balancing coil 1 ' composition primary coil that is connected in series, and the described second measurement coil 2 and second balancing coil, 2 ' differential concatenation connect to form secondary coil; The first measurement coil 1 and the second measurement coil 2 are oppositely arranged and keep at a certain distance away, measure space between the coil 1,2 as the space of placing tested sample 3 for two, first balancing coil 1 ' with second balancing coil 2 ' be oppositely arranged also keeps at a certain distance away, and two balancing coils 1 ', 2 ' between distance can regulate; In the reality, measure coil 1,2 for two and all adopt coil with 10 circle windings, two balancing coils 1 ', 2 ' also all adopt coil with 10 circle windings, two balancing coils 1 ', 2 ' and two measure between the coils 1,2 and keep certain distance, influence each other to avoid in the measuring process magnetic of coil to cause; First measures coil 1 is connected with the power output end of sine-wave generator with the primary coil that first balancing coil 1 ' series connection is formed, second measures coil 2 is connected with metering circuit with the secondary coil that second balancing coil, 2 ' differential concatenation is formed, metering circuit is used for detecting and handling the voltage that secondary coil induces, draw in the tested sample 3 eddy current voltage that produces and it is shown, by drawing the resistivity that the eddy current voltage that produces in the tested sample can further draw tested sample 3.
Sine-wave generator in the above-mentioned measurement mechanism comprises as shown in Figure 2: oscillator, power amplifier and current controller; Wherein, the output of oscillator is connected with power amplifier, the output terminal of power amplifier is measured coil 1 as power output end and first and is connected with the primary coil that first balancing coil 1 ' series connection is formed, and in one tunnel output of power amplifier current controller is set.
Metering circuit in the above-mentioned measurement mechanism comprises as shown in Figure 2: measure signal amplifier, lock detector, indicating instrument and synchronous base processor; Wherein, measure signal amplifier is connected with indicating instrument through lock detector, and the synchronous base processor is connected with lock detector.
Measure signal amplifier in the above-mentioned measurement mechanism is connected in sequence by prime amplifier, intermediate amplifier and tuned amplifier; Lock detector is by frequency mixer, low-pass filter and be connected amplifier and be connected in sequence, and the output terminal that connects amplifier is used for being connected with indicating instrument; The synchronous base processor is connected in sequence by Schmidt trigger, phase shifter and amplifier, and amplifier input terminal is used for being connected with the power output end of sine-wave generator, and the output terminal of Schmidt trigger is connected with the frequency mixer of lock detector.
When above-mentioned measurement mechanism is measured tested sample 3, tested sample 3 is placed on first measures between the coil 1 and the second measurement coil 2, as sine-wave current I
PWhen measuring coil 1 (primary coil), produced an alternating magnetic fields, thereby in tested sample 3, produced eddy current by first; Induce a voltage V on the terminal of the second measurement coil 2 (secondary coil), this voltage V is formed by stacking by two parts component voltage, and a part is the voltage V that is inducted by first alternating magnetic field of measuring coil 1
1, another part then is the voltage V that in the tested sample 3 induct in current vortex magnetic field
2, and V
2Compare V
1On phase place leading 90 °;
Voltage V exports metering circuit to, two component V
1And V
2Undertaken to eliminate component voltage V behind amplifier locking, the synchronous detection by metering circuit
1, only keep and V
1The component voltage V of quadrature
2, phase place differentiate by two balancing coils 1 ', the 2 ' compensator formed accurately adjusts;
The component voltage V that records like this
2Be presented on the indicating instrument of metering circuit, by electromagnetics knowledge as can be known, ferromagnetic material produces eddy current when magnetization size and its resistivity are inversely proportional to, so component voltage V
2Value and the electricalresistivity of tested sample 3 be inversely proportional to, promptly after each parameter (as the physical dimension of each coil, the distance between the coil etc.) of this measurement mechanism is determined, the electricalresistivity of tested sample and the component voltage V that measures
2Long-pending ρ V
2It is a constant, therefore, the known standard sample of available resistivity is proofreaied and correct this measurement mechanism, obtains this constant value, then when the tested sample of measured resistivity ρ the unknown, the component voltage V that in measurement mechanism, inducts according to the tested sample that measures because of current vortex magnetic field
2Value, utilize the constant value recorded, can draw the numerical value of the resistivity of tested sample.
When above-mentioned measurement mechanism is measured the resistivity of tested sample 3, can compensate measurement mechanism by two balancing coils:
In order to make measured value only include the component voltage V that current vortex magnetic field produces
2, should remove the component voltage V that produces by excitation field
1, differentiate accurately V in order to make
1Value can not be excessive, especially less than big to and V
2Value compare, and to accurately determine component voltage V
1The feature reference phase, this can by adjust be connected with first, second measurement coil 1,2 the, second balancing coil 1 ', 2 ' realize (referring to Fig. 1), be specially:
When not having tested sample 3, second of secondary coil is measured and is occurred a voltage V on the coil 2
1a, this voltage V
1aThe excitation field of measuring coil 1 by first of primary coil is inducted and is obtained; Equally, second balancing coil 2 ' on by first balancing coil 1 ' excitation field induct and also obtain a definite voltage V
1b, under the situation that some influence of resistance and electric capacity is ignored, the difference of the voltage that is collected on whole secondary coil (second measure coil 2 and second balancing coil 2 ' be formed by connecting) is V
1a-V
1b(because the second measurement coil 2 and second balancing coil 2 ' be reversal connection), the component voltage V that promptly inducts by excitation field on the secondary coil
1Be by V
1a-V
1bDifference determine and V
1aAnd V
1bBe synchronous (because first measure coil 1 and first balancing coil 1 ' excitation field be by same primary current I
PSupply with).So, by change first balancing coil 1 ' and second balancing coil 2 ' between distance just can change V
1b, make V
1bWith V
1aApproaching as far as possible, so that V
1=V
1a-V
1bBe reduced to and V
2Compare negligible degree, promptly when not having tested sample 3, the value of the indicating instrument of metering circuit is bordering on zero, thereby effective compensation is provided, and has guaranteed the measuring accuracy of this measurement mechanism.
Simultaneously, regulate first balancing coil 1 ' and second balancing coil 2 ' between distance, the phase place that can also harmonize the synchronous detection benchmark, this adjusting be by change first balancing coil 1 ' and second balancing coil 2 ' between distance make component voltage V
1Change, and, make component voltage V by adjusting phase shifter
1Variation no longer the output signal of synchronous detection is made a difference.Do not having under the situation of noise, adjusting the back output signal will equal zero.
First balancing coil 1 ' and second balancing coil 2 ' another effect be can compensate by first to measure the influence that coil 1 and second is measured the capacitive coupling generation between the coil 2.When working in the bigger scope of the attached rate of electricity, such coupling can make component voltage V to be measured under high frequency
2Produce interference components, at this moment, first balancing coil 1 ' and second balancing coil 2 ' between place one with tested sample 3 shapes are basic identical but the sheet metal that resistivity is bigger, just can compensate first influence of measuring the capacitive coupling generation between the coil 1 and the second measurement coil 2.
When adopting above-mentioned measurement mechanism that the resistivity of tested sample is measured, specifically comprise the steps:
Tested sample being placed on two of described measurement mechanism measuring between the coils, is the primary coil power supply by the sine-wave generator of measurement mechanism;
The sine-wave current I of sine-wave generator
PWhen measuring coil, produce an alternating magnetic fields, in tested sample, produce eddy current by first of primary coil;
Measure at second of secondary coil on the lead-out terminal of coil and produce a voltage V, this voltage V comprises: the voltage V that first alternating magnetic field of measuring coil 1 is inducted
1The voltage V that inducts with current vortex magnetic fields in the tested sample 3
2,, this voltage V is carried out obtaining the component voltage V that in the tested sample induct in current vortex magnetic field among the voltage V after amplifier locking, the synchronous detection processing by the metering circuit of measurement mechanism and cooperating of two balancing coils
2, by this component voltage V
2With the relation that the electricalresistivity of tested sample is inversely proportional to, the electricalresistivity that can draw this tested sample.
Described method also comprises: before measuring tested sample, by the material sample with known resistivity measurement mechanism is proofreaied and correct.
In sum, the measurement mechanism that the utility model embodiment provides, connect into primary coil and secondary coil by two measurement coils, two balancing coils, with the cooperation of sine-wave generator and metering circuit under, can contactless mode be measured by part resistivity, have simple in structure, measure accurate advantage, well overcome shortcoming by the surface electrode contact measurement.
The above; it only is the preferable embodiment of the utility model; but protection domain of the present utility model is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the utility model discloses; the variation that can expect easily or replacement all should be encompassed within the protection domain of the present utility model.Therefore, protection domain of the present utility model should be as the criterion with the protection domain of claims.
Claims (8)
1. a resistivity test device is characterized in that, comprising:
Measure coil, two balancing coils, sine-wave generator and metering circuits for two;
Described first measures coil and described first balancing coil composition primary coil that is connected in series, and described second measurement coil and the described second balancing coil differential concatenation connect to form secondary coil; Measure coil for two and be oppositely arranged and keep at a certain distance away, two balancing coils are oppositely arranged and keep at a certain distance away, and the distance between two balancing coils can be regulated;
The primary coil of described composition is connected with the power output end of sine-wave generator, the secondary coil of described composition is connected with metering circuit, metering circuit is used for detecting and handle the voltage that described secondary coil induces, and draws the eddy current voltage that produces in the tested sample and it is shown.
2. resistivity test device as claimed in claim 1 is characterized in that, described two measurement coils are the coil with 10 circle windings.
3. resistivity test device as claimed in claim 1 is characterized in that, described two balancing coils are the coil with 10 circle windings.
4. resistivity test device as claimed in claim 1 is characterized in that, described sine-wave generator comprises:
Oscillator, power amplifier and current controller;
The output terminal of described oscillator is connected with power amplifier, and the output terminal of power amplifier is provided with current controller as power output end on one road output terminal of power amplifier.
5. resistivity test device as claimed in claim 1 is characterized in that, described metering circuit comprises:
Measure signal amplifier, lock detector, indicating instrument and synchronous base processor;
Described measure signal amplifier is connected with indicating instrument through lock detector, and the synchronous base processor is connected with lock detector.
6. resistivity test device as claimed in claim 1 is characterized in that described measure signal amplifier is connected in sequence by prime amplifier, intermediate amplifier and tuned amplifier.
7. resistivity test device as claimed in claim 1 is characterized in that, described lock detector is by frequency mixer, low-pass filter and be connected amplifier and be connected in sequence, and the output terminal of described connection amplifier is used for being connected with indicating instrument.
8. resistivity test device as claimed in claim 1, it is characterized in that, described synchronous base processor is connected in sequence by amplifier, phase shifter and Schmidt trigger, and described amplifier input terminal is used for being connected with the power output end of described sine-wave generator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201226962U CN201654133U (en) | 2010-02-24 | 2010-02-24 | Resistivity measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201226962U CN201654133U (en) | 2010-02-24 | 2010-02-24 | Resistivity measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201654133U true CN201654133U (en) | 2010-11-24 |
Family
ID=43119378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201226962U Expired - Fee Related CN201654133U (en) | 2010-02-24 | 2010-02-24 | Resistivity measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201654133U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104052398A (en) * | 2014-05-27 | 2014-09-17 | 江苏瑞新科技股份有限公司 | Electrical resistivity eddy current testing method of solar silicon chip |
| CN106841805A (en) * | 2017-03-18 | 2017-06-13 | 山东辰宇稀有材料科技有限公司 | A kind of portable semiconductor noncontact resistivity measurement instrument probe and application method |
-
2010
- 2010-02-24 CN CN2010201226962U patent/CN201654133U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104052398A (en) * | 2014-05-27 | 2014-09-17 | 江苏瑞新科技股份有限公司 | Electrical resistivity eddy current testing method of solar silicon chip |
| CN106841805A (en) * | 2017-03-18 | 2017-06-13 | 山东辰宇稀有材料科技有限公司 | A kind of portable semiconductor noncontact resistivity measurement instrument probe and application method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101124 Termination date: 20110224 |