CN112284230B - Displacement detection device, displacement monitoring method and compressor - Google Patents
Displacement detection device, displacement monitoring method and compressor Download PDFInfo
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Abstract
The application relates to a displacement detection device, a displacement monitoring method and a compressor, wherein the displacement detection device comprises: the two displacement monitoring modules are symmetrically arranged on two sides of the measured body, and the separation module is respectively connected with the two displacement monitoring modules and the differential amplification module; the displacement monitoring module is used for monitoring the distance between the displacement monitoring module and a detected body to obtain a corresponding detection signal; the separation module is used for respectively separating the detection signals of the displacement monitoring modules to obtain the detection signal inductance component corresponding to each displacement monitoring module; the differential amplification module is used for carrying out differential amplification on the inductance components of the detection signals of the two displacement monitoring modules to obtain a displacement signal representing the position change of the detected body. Through the method and the device, the problem that the position detection result of the detected body output by the displacement sensor is inaccurate due to the fact that the displacement sensor is heated unevenly in the operation process of the detected body is solved, the influence of temperature on the position detection result is eliminated, and the detection precision and the safety and the reliability of the detected body are improved.
Description
Technical Field
The application relates to the technical field of computers, in particular to a displacement detection device, a displacement monitoring method and a compressor.
Background
The magnetic suspension bearing uses the electromagnetic force to suspend the rotor in the air, so that there is no mechanical contact between the rotor and the stator. To achieve stable suspension of the shaft in space, it is necessary to ensure that the position of the shaft in space does not shift, and therefore, it is critical to monitor the position of the shaft in space in real time. The displacement sensor used at present is easily interfered by temperature, so that a displacement signal detected by the displacement sensor does not correspond to the actual displacement of the shaft, and the monitored suspension displacement data of the shaft is inaccurate. The inaccurate detected suspension displacement of the shaft can cause the magnetic suspension system not to accurately and stably suspend, and even cause damage to the compressor due to instability in the operation process.
Disclosure of Invention
In order to solve the technical problem that the displacement monitoring result of the magnetic bearing is inaccurate due to the temperature change, the embodiment of the application provides a displacement detection device, a displacement monitoring method and a compressor.
In a first aspect, an embodiment of the present application provides a displacement detection apparatus, including: the device comprises two displacement monitoring modules, a separation module and a differential amplification module, wherein the two displacement monitoring modules are symmetrically arranged on two sides of a measured body, and the separation module is respectively connected with the two displacement monitoring modules and the differential amplification module;
the displacement monitoring module is used for monitoring the distance between the displacement monitoring module and a detected body to obtain a corresponding detection signal;
the separation module is used for respectively separating the detection signals of the displacement monitoring modules to obtain the detection signal inductance component corresponding to each displacement monitoring module;
the differential amplification module is used for carrying out differential amplification on the inductance components of the detection signals of the two displacement monitoring modules to obtain a displacement signal representing the position change of the detected body.
Optionally, the separation module includes two orthogonal locking amplification modules respectively connected to the two displacement monitoring modules, and an excitation module respectively connected to the two displacement monitoring modules and the two orthogonal locking amplification modules;
the two orthogonal locking amplification modules are also connected with the differential amplification module;
the excitation module is used for respectively providing excitation signals for the two displacement monitoring modules;
the excitation module is also used for respectively providing reference signals for the two orthogonal locking amplification modules;
the phase difference between the excitation signal and the reference signal is 90 degrees;
the displacement monitoring module is used for monitoring the distance between the displacement monitoring module and the measured object based on the corresponding excitation signal to obtain a corresponding detection signal;
the orthogonal locking amplification module is used for obtaining corresponding detection signal inductance components according to the correspondingly provided reference signals and the detection signals output by the correspondingly connected displacement monitoring modules.
Optionally, the excitation module comprises a processing unit and a control unit, the control unit is respectively connected with the two orthogonal locking amplification modules and the processing unit, and the processing unit is respectively connected with the two displacement monitoring modules;
the control unit is used for respectively providing reference signals for the two orthogonal locking amplification modules;
the control unit is also used for providing the original signal for the processing unit;
the processing unit is used for processing the original signals to obtain excitation signals and providing the excitation signals for the two displacement monitoring modules;
the original signal is in phase with the reference signal.
Optionally, each quadrature lock-in amplification module includes a corresponding analog multiplier and an integrating circuit;
the first input end of the analog multiplier is connected with the output end of the corresponding displacement monitoring module, the second input end of the analog multiplier is connected with the excitation module, and the output end of the analog multiplier is connected with the input end of the integrating circuit;
the output end of the integrating circuit is connected with the differential amplifying module;
the analog multiplier is used for multiplying the correspondingly provided reference signal and the detection signal output by the correspondingly connected displacement monitoring module to obtain a corresponding intermediate signal;
the integration circuit is used for carrying out integration filtering on the corresponding intermediate signal so as to separate out the corresponding detection signal inductance component.
Optionally, the apparatus further comprises a first filtering module;
the first filtering module is connected with the output end of the differential amplifying module and is used for carrying out first filtering processing on the displacement signal output by the differential amplifying module.
Optionally, the apparatus further comprises a second filtering module;
the second filtering module is connected with the output end of the first filtering module and is used for carrying out second filtering processing on the displacement signal output by the first filtering module.
Optionally, the differential amplification module includes a differential operational amplifier, the first filtering module is an active filtering module, and the second filtering module is a passive filtering module.
Optionally, the displacement monitoring module is an eddy current displacement sensor.
In a second aspect, an embodiment of the present application provides a displacement monitoring method, where the method includes:
acquiring the displacement of the magnetic suspension bearing according to the displacement detection device of any one of the previous items;
and if the displacement of the magnetic suspension bearing exceeds a threshold value, carrying out position correction on the magnetic suspension bearing.
In a third aspect, embodiments of the present application provide a compressor, which includes a displacement detecting device as described in any one of the foregoing.
Compared with the prior art, the technical scheme provided by the embodiment of the application has the following advantages:
in the embodiment of the application, the distance between the displacement monitoring module and the detected object is monitored to obtain a corresponding detection signal; separating the detection signals of the displacement monitoring modules through a separation module to obtain the inductance component of the detection signal corresponding to each displacement monitoring module; the differential amplification module is used for carrying out differential amplification on the inductance components of the detection signals of the two displacement monitoring modules to obtain the displacement signals representing the position change of the detected body, so that the output impedance separation of the displacement sensor is realized, the influence of temperature on the displacement monitoring result of the detected body is eliminated, and the reliability of the magnetic suspension bearing system is improved.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive exercise.
Fig. 1 is a block diagram of a displacement detecting apparatus according to an embodiment;
fig. 2 is a block diagram of a displacement detecting device according to an embodiment;
fig. 3 is a block diagram of a displacement detecting device according to an embodiment;
fig. 4 is a block diagram illustrating a displacement detecting device according to an embodiment;
fig. 5 is a block diagram illustrating a displacement detecting apparatus according to an embodiment;
FIG. 6 is a waveform diagram of a reference signal and a stimulus signal provided in accordance with one embodiment;
FIG. 7 is a waveform diagram of a probing signal provided in one embodiment;
fig. 8 is a block diagram of an analog multiplier according to an embodiment.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Fig. 1 is a block diagram of a displacement detection apparatus according to an embodiment. Referring to fig. 1, the displacement detecting apparatus includes two displacement monitoring modules 1100 and 1200, and further includes a separating module 3000 and a differential amplifying module 4000, wherein the displacement monitoring modules 1100 and 1200 are symmetrically disposed at two sides of the object 2000. The object 2000 may be a cylinder or may have other regular shapes. Taking the measured object 2000 as a cylinder as an example, the displacement monitoring modules 1100 and 1200 are at the same distance from the measured object 2000 in the initial state. If the position of the measured object 2000 is not shifted, the distances between the measured object 2000 and the displacement monitoring modules 1100 and 1200 are always equal; if the position of the object 2000 is shifted, the distances are not equal any more, and there is a deviation. The distances between the object 2000 and the displacement monitoring modules 1100 and 1200 are detected by the displacement monitoring modules 1100 and 1200 respectively and converted into corresponding detection signals, and the distances are not equal, and accordingly, the detection signals are also different. The detection signal represents a distance between the displacement monitoring module 1100 or 1200 and the object 2000. If the difference between the detection signals of the displacement monitoring modules 1100 and 1200 is not 0, it indicates that the object 2000 is displaced.
The displacement monitoring modules 1100 and 1200 are both non-contact eddy current displacement sensors. Specifically, the displacement monitoring modules 1100 and 1200 may be integrated on one eddy current displacement sensor, each displacement monitoring module 1100 and 1200 including a displacement monitoring probe; the displacement monitoring modules 1100 and 1200 may also be 2 different eddy current displacement sensors that are independently disposed, each displacement monitoring module includes a displacement monitoring probe, and the 2 eddy current displacement sensors are symmetrically disposed on two sides of the object 2000. The displacement monitoring modules 1100 and 1200 start to operate to acquire a detection signal after an alternating voltage is applied thereto.
The eddy current displacement sensor includes an eddy current probe and a pre-stage (pre-amplifier). The change of the distance between the probe of the eddy current displacement sensor and the surface of the measured metal can be measured through the change of the impedance of the probe coil. The front-end device of the eddy current displacement sensor outputs a detection signal which is in direct proportion to the distance according to the change of the impedance of the probe coil.
A high-frequency current generated in the pre-oscillator flows into the probe coil from the oscillator, and the coil generates a high-frequency electromagnetic field. When the surface of the metal to be measured approaches the coil, an induced current, i.e., an eddy current, is generated on the metal surface due to the action of the high-frequency electromagnetic field. The current produces an alternating magnetic field in a direction opposite to the coil field, and the superposition of these two fields changes the impedance of the primary coil.
Eddy current sensors are a type of proximity sensing system. The device has the advantages of good long-term working reliability, high sensitivity, strong anti-interference capability, non-contact measurement, high response speed, high temperature resistance, capability of continuously working for a long time in severe environments such as oil, steam, water and the like, no influence of mediums such as oil stains, steam and the like on detection, holographic dynamic characteristics for a precision diagnosis system and effective protection of equipment.
The separation module 3000 is connected to the displacement monitoring modules 1100 and 1200 and the differential amplification module 4000, respectively. The separation module 3000 acquires detection signals of the displacement monitoring modules 1100 and 1200. Because the probe of the displacement monitoring module is a coil which is equivalent to a resistor and an inductor which are connected in series, the detection signal is an alternating voltage signal or an alternating current signal which comprises a direct current component and a frequency multiplication component. The equivalent resistance of the probe is the same as the frequency of the current or voltage on the inductor, and the phase difference is 90 degrees.
For a probe coil wound by a copper wire, the resistance of the coil is obviously changed along with the temperature change, and the inductance of the coil is mainly changed due to the mechanical deformation of a probe framework and a lead caused by the temperature, so that the influence of the temperature on the inductance is small or even negligible, and the inductance of the currently used probe framework and lead is hardly changed when the temperature is changed. Therefore, when the temperature in the detected body changes, the resistance of the coil is mainly influenced, so that the detection signal output by the displacement monitoring module changes, and the inductance of the coil changes very slightly and can be ignored. In summary, the inductance component in the separated detection signal is used to represent the distance between the displacement monitoring module and the measured object, so that the final result of whether the displacement changes is not affected by the temperature change.
Based on the above principle, the separation module 3000 performs separation processing on each detection signal to realize impedance separation, so as to obtain the detection signal inductance component corresponding to each displacement monitoring module. The inductance component of the detection signal is not affected by temperature, and can be used for reflecting or representing the distance change between the displacement monitoring module and the detected body.
The differential amplification module 4000 includes a differential operational amplifier and its related circuits, and is configured to perform differential amplification processing on the two detection signal inductance components separated by the separation module 3000 to obtain a displacement signal representing the position change of the object 2000.
Fig. 2 is a block diagram of a displacement detection apparatus according to an embodiment. On the basis of the displacement detection device shown in fig. 1, the displacement detection device further includes a first filtering module 5000, and the first filtering module 5000 is connected to the output end of the differential amplification module 4000 and is configured to perform a first filtering process on the displacement signal output by the differential amplification module 4000.
Specifically, the first filtering module 5000 may be an active filtering module. The signal in a certain frequency range can pass through, and the signal outside the frequency range is restrained or sharply attenuated. The first filtering process is specifically used to filter out high frequency signals.
Fig. 3 is a block diagram of a displacement detection apparatus according to an embodiment. On the basis of the displacement detection device in fig. 2, the displacement detection device further includes a second filtering module 6000, and the second filtering module 6000 is connected to the output end of the first filtering module 5000 and is configured to perform a second filtering process on the displacement signal output by the first filtering module 5000.
Specifically, the second filtering module 6000 is a passive filtering module. The second filtering module 6000 may be an RC passive filter composed of a resistor R and a capacitor C. The second filtering process is used to filter out high frequency signals.
Fig. 4 is a block diagram of a displacement detection apparatus according to an embodiment. Referring to fig. 4, on the basis of the displacement detecting apparatus of fig. 1, a separation module 3000 includes a quadrature lock amplification module 3100, a quadrature lock amplification module 3200, and an excitation module 3300. A first input end of the orthogonal locking amplification module 3100 is connected with an output end of the displacement monitoring module 1100, a second input end of the orthogonal locking amplification module 3100 is connected with the excitation module 3300, and an output end of the orthogonal locking amplification module 3100 is connected with the differential amplification module 4000; a first input terminal of the quadrature lock amplification module 3200 is connected to the output terminal of the displacement monitoring module 1200, a second input terminal of the quadrature lock amplification module 3200 is connected to the excitation module 3300, and an output terminal of the quadrature lock amplification module 3200 is connected to the differential amplification module 4000. The excitation module 3300 is also connected to the displacement monitoring module 1100 and the displacement monitoring module 1200.
The excitation module 3300 provides the same excitation signal for the displacement monitoring module 1100 and the displacement monitoring module 1200, and the excitation signal is used to drive the displacement monitoring module 1100 and the displacement monitoring module 1200 to operate to obtain the detection signal. The displacement monitoring module 1100 and the displacement monitoring module 1200 start to work under the action of the respective excitation signals to monitor the distance between the measured object and the measured object to obtain the corresponding detection signals.
The excitation module 3300 also provides the same reference signal for the quadrature locked amplification module 3100 and the quadrature locked amplification module 3200. The reference signal is 90 out of phase with the excitation signal.
The quadrature lock amplification module 3100 receives the first detection signal acquired by the displacement monitoring module 1100 and the first reference signal provided by the excitation module 3300, and performs signal processing on the first detection signal based on the first reference signal to obtain a detection signal inductance component corresponding to the first detection signal.
The quadrature lock amplification module 3200 receives the second detection signal acquired by the displacement monitoring module 1200 and the second reference signal provided by the excitation module 3300, and performs signal processing on the second detection signal based on the second reference signal to obtain a detection signal inductance component corresponding to the second detection signal. The quadrature lock amplification module 3200 implements phase detection to eliminate the effect of temperature variations on sensor output.
Fig. 5 is a block diagram of a displacement detection apparatus according to an embodiment. Referring to fig. 5, the excitation module 3300 includes a processing unit 3320 and a control unit 3310; the control unit 3310 is connected to the quadrature lock amplification block 3100, the quadrature lock amplification block 3200, and the processing unit 3320, respectively; the processing unit 3320 is also connected to the displacement monitoring module 1100 and the displacement monitoring module 1200, respectively.
The control unit 3310 provides the same reference signal to the quadrature lock-in amplification block 3100 and the quadrature lock-in amplification block 3200, respectively; the control unit 3310 also provides the processing unit 3320 with the raw signals. The original signal is an ac voltage, which is an excitation source.
The processing unit 3320 processes the original signal to obtain an excitation signal, and provides the excitation signal to the displacement monitoring module 1100 and the displacement monitoring module 1200. The original signal is in phase with the reference signal. The phase of the processed excitation signal of the original signal differs by 90 ° from the original signal. Thus, the excitation signal is 90 ° out of phase with the reference signal.
Specifically, referring to fig. 6, the reference signal (solid line portion) is a square wave, the excitation signal (excitation, dotted line portion) is a sine wave, and the reference signal makes an angle of 90 ° with the excitation signal. The original signal is in the same phase as the reference signal and is also a square wave. The processing unit 3320 processes the square-wave original signal provided by the control unit 3310 to convert the original signal, which is a square wave, into an excitation signal of a sine wave.
The outputs of the displacement monitoring module 1100 and the displacement monitoring module 1200 are:
detection signal 1:
detection signal 2:
referring to fig. 7, a waveform diagram of the detection signal output by the displacement monitoring module 1100 or 1200 is shown.
In one particular embodiment, quadrature locked amplification block 3100 and quadrature locked amplification block 3200 are both quadrature locked amplifiers.
In one particular embodiment, quadrature locked amplification block 3100 and quadrature locked amplification block 3200 each include an analog multiplier and an integrating circuit.
An analog multiplier is an active nonlinear device used to perform a multiplication function on two analog signals (voltage or current).
Referring to fig. 8, a first input terminal of the analog multiplier is connected to an output terminal of the corresponding displacement monitoring module for receiving the detection signal; a second input terminal of the analog multiplier is connected to the excitation module 3300, and is configured to receive a reference signal; the output end of the analog multiplier is connected with the input end of the integrating circuit, and the output end of the integrating circuit is connected with the differential amplifying module 4000.
The analog multiplier is used for multiplying the correspondingly provided reference signal and the detection signal output by the correspondingly connected displacement monitoring module to obtain a corresponding intermediate signal. The intermediate signal contains a frequency multiplication component and a direct current component.
Specifically, a second input terminal of the analog multiplier is connected to the control unit 3310 of the driver module 3300 to receive the reference signal provided by the control unit 3310.
The integration circuit is used for integrating or integrating and filtering the corresponding intermediate signal to separate out the corresponding detection signal inductance component. The inductive component of the detection signal is a direct current component.
For a probe coil, an alternating current voltage is applied to the probe coil as an excitation source, wherein the real part of the voltage on the probe coil represents the resistance of the coil, and the imaginary part represents the inductance of the coil. The real part and the imaginary part of the output voltage of the displacement monitoring module can be separated by using the orthogonal locking amplification module 3100, and the resistance component and the inductance component of the displacement monitoring module can be obtained. The square wave reference signal with 90-degree phase shift is multiplied by the detection signal, the output of the two orthogonal locking amplification modules 3100 passes through the differential amplification module 4000, the high-frequency part of the output is filtered, and the output direct-current component is the inductance component of the detection signal. The separation of the resistance component and the inductance component output by the shift monitoring module is completed, and the influence of temperature on the sensor is greatly reduced.
In one embodiment, the present application further provides a displacement monitoring method, including the steps of:
acquiring the displacement of the magnetic suspension bearing according to the displacement detection device;
and if the displacement of the magnetic suspension bearing exceeds a threshold value, carrying out position correction on the magnetic suspension bearing.
Specifically, the controlled equipment is provided with a magnetic suspension bearing, a displacement detection device and a control device, wherein the magnetic suspension bearing is a system and comprises a bearing rotor and a bearing stator, and the magnetic suspension bearing rotor can be displaced or offset in the working process of the controlled equipment, so that the monitored displacement signal is changed; the control device of the controlled equipment is connected with the displacement detection device, and the displacement detection device is arranged on two sides of the magnetic suspension bearing and used for monitoring the displacement signal of the magnetic suspension bearing and transmitting the displacement signal to the control device; the control device obtains the displacement information of the magnetic suspension bearing according to the displacement signal, if the position of the magnetic suspension bearing rotor changes and the displacement exceeds a certain threshold (tolerance value), the control device can correct the position of the magnetic suspension bearing rotor according to the change of the displacement, so that the magnetic suspension bearing can return to the correct position.
Of course, the controlled equipment can also comprise an alarm device, the alarm device is connected with the control device, and if the displacement of the magnetic suspension bearing exceeds a threshold value, the control device also controls the alarm device to send an alarm signal to remind engineering personnel of timely overhauling.
In one embodiment, the present application further provides a compressor including the displacement detecting device of any one of the preceding claims.
The eddy current displacement sensor is installed in the magnetic suspension compressor, because there is cooling circuit in the compressor, results in two sensor probe temperatures inequality, and then makes two probe parameters of sensor change, for example: the output of the sensor at the bearing even at the central position may not be 0 due to the influence of temperature, for example: the bearing is not in the central position, and the output of the sensor is 0 due to the influence of temperature, so that the monitoring data is messy. The reason for this is that the change of temperature can change the resistance and inductance of the probe coil of the sensor, resulting in the change of both the output amplitude and phase of the sensor, and the error caused by the change of phase can be ignored by the amplitude detection circuit.
The method uses a quadrature lock-in amplifier to separate the output impedance of the probe, and adopts the output of an inductance part to represent the position of a magnetic suspension bearing, so as to realize phase detection. The phase detection method can effectively overcome the temperature drift of the sensor and can improve the measurement precision of the sensor.
The method and the device can solve the problems that the output of the eddy current displacement sensor is changed due to uneven heating in the running process of the compressor, and the suspension displacement change value of the magnetic suspension bearing is inaccurate; the problem that the output signal phases corresponding to the two displacement sensor probes deviate due to the change of the shaft position is solved; the detection precision of the eddy current sensor is improved; the reliability and the service life of the magnetic suspension bearing system are improved.
Of course, the displacement detection device of the application is not only used for axial displacement measurement in the compressor, but also used for various application scenes such as eddy current surface flaw detection, eccentricity and vibration detection, turbine blade testing and the like. For many rotating machines, including steam turbines, gas turbines, water turbines, centrifugal and axial compressors, centrifugal pumps, and the like, are equally applicable.
It is noted that, in this document, relational terms such as "first" and "second," and the like, may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The foregoing are merely exemplary embodiments of the present invention, which enable those skilled in the art to understand or practice the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A displacement detecting device, characterized in that the device comprises: the device comprises two displacement monitoring modules, a separation module and a differential amplification module, wherein the two displacement monitoring modules are symmetrically arranged at two sides of a measured body, and the separation module is respectively connected with the two displacement monitoring modules and the differential amplification module;
the displacement monitoring module is used for monitoring the distance between the displacement monitoring module and the detected object to obtain a corresponding detection signal;
the separation module is used for separating detection signals of the displacement monitoring modules to obtain detection signal inductance components corresponding to each displacement monitoring module, wherein the separation processing enables each detection signal to be in impedance separation, and the detection signals are alternating current signals containing direct current components and frequency doubling components;
the differential amplification module is used for carrying out differential amplification on the inductance components of the detection signals of the two displacement monitoring modules to obtain a displacement signal representing the position change of the detected body.
2. The apparatus of claim 1, wherein the separation module comprises two orthogonal lock-in amplification modules connected to the two displacement monitoring modules, respectively, and an excitation module connected to the two displacement monitoring modules, the two orthogonal lock-in amplification modules, respectively;
the two orthogonal locking amplification modules are also connected with the differential amplification module;
the excitation module is used for respectively providing excitation signals for the two displacement monitoring modules;
the excitation module is further used for respectively providing reference signals for the two orthogonal locking amplification modules;
the excitation signal is 90 ° out of phase with the reference signal;
the displacement monitoring module is used for monitoring the distance between the displacement monitoring module and the measured object based on the corresponding excitation signal to obtain a corresponding detection signal;
the orthogonal locking amplification module is used for obtaining corresponding detection signal inductance components according to the correspondingly provided reference signals and the detection signals output by the correspondingly connected displacement monitoring modules.
3. The device according to claim 2, wherein the excitation module comprises a processing unit and a control unit, the control unit is respectively connected with the two orthogonal lock-in amplification modules and the processing unit, and the processing unit is respectively connected with the two displacement monitoring modules;
the control unit is used for respectively providing reference signals for the two orthogonal locking amplification modules;
the control unit is also used for providing original signals for the processing unit;
the processing unit is used for processing the original signals to obtain excitation signals and providing the excitation signals for the two displacement monitoring modules;
the original signal is in phase with the reference signal.
4. The apparatus of claim 2, wherein each of the quadrature locked amplification modules comprises a corresponding analog multiplier and integrator circuit;
the first input end of the analog multiplier is connected with the output end of the corresponding displacement monitoring module, the second input end of the analog multiplier is connected with the excitation module, and the output end of the analog multiplier is connected with the input end of the integrating circuit;
the output end of the integrating circuit is connected with the differential amplifying module;
the analog multiplier is used for multiplying the correspondingly provided reference signal and the detection signal output by the correspondingly connected displacement monitoring module to obtain a corresponding intermediate signal;
the integration circuit is used for carrying out integration filtering on the corresponding intermediate signal so as to separate out the corresponding detection signal inductance component.
5. The apparatus of claim 1, further comprising a first filtering module;
the first filtering module is connected with the output end of the differential amplifying module and is used for carrying out first filtering processing on the displacement signal output by the differential amplifying module.
6. The apparatus of claim 5, further comprising a second filtering module;
the second filtering module is connected with the output end of the first filtering module and is used for carrying out second filtering processing on the displacement signal output by the first filtering module.
7. The apparatus of claim 6, wherein the differential amplification module comprises a differential operational amplifier, the first filtering module is an active filtering module, and the second filtering module is a passive filtering module.
8. The device of claim 1, wherein the displacement monitoring module is an eddy current displacement sensor.
9. A displacement monitoring method, characterized in that the method comprises:
the displacement detection device of any one of claims 1 to 8, acquiring the displacement of the magnetic bearing;
and if the displacement of the magnetic suspension bearing exceeds a threshold value, carrying out position correction on the magnetic suspension bearing.
10. A compressor, characterized by comprising the displacement detecting device according to any one of claims 1 to 8.
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