CN113889836A - High-precision multi-section cooling type deflection mirror - Google Patents
High-precision multi-section cooling type deflection mirror Download PDFInfo
- Publication number
- CN113889836A CN113889836A CN202111281288.0A CN202111281288A CN113889836A CN 113889836 A CN113889836 A CN 113889836A CN 202111281288 A CN202111281288 A CN 202111281288A CN 113889836 A CN113889836 A CN 113889836A
- Authority
- CN
- China
- Prior art keywords
- cooling
- sub
- cooling block
- deflection mirror
- block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 title claims abstract description 261
- 230000003287 optical effect Effects 0.000 claims abstract description 52
- 239000000956 alloy Substances 0.000 claims description 25
- 229910045601 alloy Inorganic materials 0.000 claims description 25
- 239000007788 liquid Substances 0.000 claims description 25
- 239000002826 coolant Substances 0.000 claims description 15
- 238000009414 blockwork Methods 0.000 claims description 5
- 239000003574 free electron Substances 0.000 abstract description 22
- 230000005540 biological transmission Effects 0.000 abstract description 16
- 238000012827 research and development Methods 0.000 abstract description 2
- 238000013461 design Methods 0.000 description 9
- 230000005469 synchrotron radiation Effects 0.000 description 4
- 239000000498 cooling water Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S4/00—Devices using stimulated emission of electromagnetic radiation in wave ranges other than those covered by groups H01S1/00, H01S3/00 or H01S5/00, e.g. phonon masers, X-ray lasers or gamma-ray lasers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Particle Accelerators (AREA)
Abstract
The invention provides a high-precision multi-section cooling type deflection mirror which comprises a deflection mirror main body, wherein a cooling block is arranged on the deflection mirror main body, and the high-precision multi-section cooling type deflection mirror is characterized in that the cooling block is composed of N sub cooling blocks, N is more than or equal to 3, each sub cooling block can be independently started and closed, and the cooling blocks can work in different cooling modes by starting different numbers of sub cooling blocks so as to adapt to ultrafast light beam pulses in different modes. The high-precision multi-section cooling type deflection mirror provided by the invention can effectively control the surface shape of a high-precision optical element in hard X-ray free electron laser, solves the problem of the nanoscale key technology of the surface shape error of the deflection mirror in a hard X-ray free electron laser device, solves the technical problem of effective transmission of a plurality of cooling modes and a plurality of ultrafast beam modes of a single-side deflection mirror, realizes the independent research and development of key equipment in a hard X-ray free electron laser device project, ensures the continuous promotion of a first set of hard X-ray large scientific device project in China, and reduces the technical gap in the field of foreign advanced light sources.
Description
Technical Field
The invention relates to a high-precision deflection mirror capable of being used in a hard X-ray free electron laser beam transmission process, and belongs to the technical field of advanced light sources.
Background
In the field of advanced light sources, high-precision optical elements have a decisive influence on the beam transmission. Especially, the optical element with high precision, high repetition frequency and high heat load in the first set of hard X-ray free electron laser device project in China puts forward extremely extreme technical requirements.
In the transmission process of the hard X-ray free electron laser beam, the optical surface of the high-precision optical element can generate thermal deformation to influence the light quality, especially the problem of spot focusing because the high-precision optical element is irradiated by the ultrafast X-ray with high thermal load and high repetition frequency, and even the whole large scientific device can not effectively transmit the hard X-ray free electron laser beam. Therefore, in order to ensure that the hard X-ray free electron laser can ensure normal transmission, the surface shape error of the optical element must be controlled within a range of a few nanometers.
In the european free electron laser device, the optical component has a surface shape error of less than 2 nm in normal operation, which is equivalent to a one-meter long deflection mirror, and the optical surface shape error of the optical component cannot exceed 1/10 of the diameter of human hair in operation, and the surface shape error includes a plurality of factors, such as a thermal deformation surface shape error, a processing surface shape error, a surface shape error generated by low-stress clamping, and the like.
At present, the first set of hard X-ray free electron laser devices in China are under construction, an energy 8GeV continuous wave superconducting linear accelerator is constructed in the project, 3 free electron laser undulator lines in a photon energy range of 0.4-25keV can be generated, and 3 beam lines are constructed; the repetition frequency of the X-ray free electron laser pulse with ultrahigh peak brightness and average brightness can reach 1MHz, and the ultrafast pulse is less than 10 femtoseconds, so that the experimental station has nanoscale ultrahigh space resolution capability and femtosecond ultrafast time resolution capability, and the optical element in the project must meet the surface shape quality requirement of a high-precision optical element in a similar European free electron laser device.
For the optical elements in the existing domestic synchrotron radiation light source, the design requirement of the optical elements in the hard X-ray free electron laser device is met, and the optical elements have extremely extreme technical challenges. Especially, the design of the first surface deflection mirror and the structural design of the surface deflection mirror in the beam line in the hard X-ray free electron laser device need to meet the requirements of ultrafast beams of various modes on surface shape errors, and the effective transmission of beams of various modes is realized. However, in the conventional deflection mirror in domestic synchrotron radiation light sources, the design of the deflection mirror basically adopts a single cooling block to cool the deflection mirror, and hard contact is adopted between the single cooling block and the deflection mirror. Cooling mode diversity cannot be achieved, resulting in the inability of a single deflection mirror to meet the compatibility of multiple ultrafast beam transmission modes. Secondly, the surface shape error of the deflection mirror in the synchrotron radiation light source is controlled to be basically in the micrometer level. But for the hard X-ray free electron laser device, the surface shape error of the key optical element is basically controlled to be in the order of a few nanometers. Finally, because the single cooling block and the deflection mirror are in hard contact, vibration generated after the cooling block is introduced with a cooling medium can bring certain vibration interference to the deflection mirror. The deflection mirror is particularly sensitive to vibration, and if vibration interference exists, effective transmission of the ultrafast beam by the deflection mirror is influenced, and finally light spot jitter is caused, so that focusing of the ultrafast beam is influenced.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in the first set of hard X-ray free electron laser scientific apparatus projects in China, for a first surface deflection mirror in a beam line, effective transmission of ultrafast beam pulses with high heat load and high repetition frequency in 6 modes (energy points of 7keV, 12.914keV and 15keV when the incident angle is 1.9mrad and energy points of 3keV, 5.5keV and 7keV when the incident angle is 4 mrad) under two incident angles is required to be met by five energy points under two incident angles, the surface shape error of the high-precision deflection mirror needs to meet the requirement of the surface shape error of the ultrafast beam in the 6 modes at a level of several nanometers, and the existing deflection mirror cannot meet the requirement.
In order to solve the technical problems, the technical scheme of the invention is to provide a high-precision multi-section cooling type deflection mirror which is characterized by comprising a deflection mirror body, wherein a cooling block is arranged on the deflection mirror body, the cooling block is cooled by a cooling medium and then effectively cools the deflection mirror body by utilizing liquid alloy, so that the thermal deformation of the optical surface of the deflection mirror body bearing ultrafast beam pulses is effectively controlled, the cooling block consists of N sub-cooling blocks, N is more than or equal to 3, each sub-cooling block can independently introduce the cooling medium or cut off the cooling medium, so that the sub-cooling blocks are independently started and closed, all the started sub-cooling blocks form a cooling section, the cooling section is symmetrical in the length direction of the deflection mirror body relative to the central position of the deflection mirror body, the cooling block works in different cooling modes by starting different numbers of the sub-cooling blocks to adapt to the ultrafast beam pulses in different modes, the cooling blocks operating in different cooling modes have cooling sections of different lengths.
Preferably, the ultrafast beam pulse has a total of 6 modes of five energy points at two incident angles, which are: energy points of 7keV, 12.914keV, 15keV at an incident angle of 1.9mrad and energy points of 3keV, 5.5keV, 7keV at an incident angle of 4mrad, then:
the cooling block is composed of a first sub-cooling block, a second sub-cooling block, a third sub-cooling block, a fourth sub-cooling block and a fifth sub-cooling block which are adjacent in sequence, and the cooling block is provided with:
feeding a cooling medium into the sub-cooling block three-way valve, opening the sub-cooling block three, and keeping the rest sub-cooling blocks in a closed state, so that the cooling block works in a cooling mode I; when the cooling mode is started, the cooling block utilizes the liquid alloy to effectively cool the deflection mirror main body, so that the thermal deformation of the optical surface under the following ultrafast beam pulses is effectively controlled:
an incident angle is 4mrad, an energy point is 7kev ultrafast beam pulse, and the surface shape error of the optical surface is controlled to be 0.95 nanometer;
the incident angle is 1.9mrad, the energy point is 12.4kev ultrafast beam pulse, and the surface shape error of the optical surface is controlled at 0.6 nm;
the incident angle is 1.9mrad, the energy point is 15kev ultrafast beam pulse, and the surface shape error of the optical surface is controlled at 0.2 nm;
cooling media are fed into the sub-cooling block II, the sub-cooling block III and the sub-cooling block four, the sub-cooling block II, the sub-cooling block III and the sub-cooling block IV are started, the other sub-cooling blocks are kept in a closed state, and then the cooling blocks work in a cooling mode II; when the second cooling mode is started, the cooling block utilizes the liquid alloy to effectively cool the deflection mirror main body, so that the thermal deformation of the optical surface under the following ultrafast beam pulses is effectively controlled:
an incident angle is 4mrad, an energy point is 5kev ultrafast beam pulse, and the surface shape error of the optical surface is controlled to be 2.58 nanometers;
introducing a cooling medium into the first sub-cooling block, the second sub-cooling block, the third sub-cooling block, the fourth sub-cooling block and the fifth sub-cooling block, and starting the first sub-cooling block, the second sub-cooling block, the third sub-cooling block, the fourth sub-cooling block and the fifth sub-cooling block, so that the cooling block works in a third cooling mode; when the cooling mode III is started, the cooling block utilizes the liquid alloy to effectively cool the deflection mirror main body, so that the thermal deformation of the optical surface under the following ultrafast beam pulses is effectively controlled:
an incident angle is 4mrad, an energy point is 3kev ultrafast beam pulse, and the surface shape error of the optical surface is controlled to be 3.14 nanometers;
feeding cooling media into the first sub-cooling block, the third sub-cooling block and the fifth sub-cooling block, and starting the first sub-cooling block, the third sub-cooling block and the fifth sub-cooling block to enable the cooling blocks to work in a fourth cooling mode; when the cooling mode IV is started, the cooling block utilizes the liquid alloy to effectively cool the deflection mirror main body, so that the thermal deformation of the optical surface under the following ultrafast beam pulses is effectively controlled:
the incident angle is 1.9mrad, the energy point is 7kev ultrafast beam pulse, and the optical surface shape error is controlled at 3.85 nm.
Preferably, a cooling tank is arranged on the deflection mirror main body, the liquid alloy is contained in the cooling tank, the cooling block is soaked in the liquid alloy, and the length of the cooling tank is at least L/9 when the length of the deflection mirror main body is L.
Preferably, the cooling block is clamped in a clamping mechanism, and the cooling block is combined with the cooling groove by the clamping mechanism.
The high-precision multi-section cooling type deflection mirror provided by the invention can effectively control the thermal deformation surface shape error of a high-precision optical element under high repetition frequency and high heat load in the hard X-ray free electron laser, thereby solving the technical problem that the surface shape error of the optical element in the hard X-ray free electron laser device is in the level of several nanometers, and ensuring the effective transmission of the hard X-ray free electron laser beam.
Compared with the prior art, the invention has the following advantages:
(1) compared with the conventional deflection mirror in the domestic synchrotron radiation light source, the invention can construct a plurality of cooling modes by starting different cooling blocks in a mode of only adopting a single cooling block to cool the whole deflection mirror;
(2) the conventional deflection mirror with a single cooling block cannot meet the effective transmission of ultrafast light beams in multiple modes. The invention adopts a multi-section type cooling mode, and can meet the effective transmission of various hard X-ray ultrafast beams by starting various cooling modes constructed by different cooling blocks without changing the structure of a deflection mirror system.
(3) The multi-section cooling type deflection mirror adopted by the invention can meet the effective transmission of ultrafast light beams in various modes, and simultaneously, the surface shape error of the high-precision deflection mirror can be controlled within a range of a few nanometers and is far beyond the surface shape error requirement of optical elements in domestic synchronous radiation at present.
(4) The design of the cooling tank ensures that the redesign and replacement of the cooling block and the later-stage upgrading of the technical performance of the deflection mirror can be realized under the condition of not changing the main body of the deflection mirror, and meanwhile, the later-stage maintenance and technical upgrading cost is greatly reduced.
(5) The liquid alloy is adopted to carry out heat transfer between the cooling block and the deflection mirror, so that the interference of the vibration of the cooling block on the deflection mirror is avoided and isolated, the ultrafast light beam stability transmitted by the deflection mirror is improved, the jitter of a final focusing light spot is reduced, and the focusing effect of the ultrafast light beam is improved.
In conclusion, the design of the high-precision multi-section cooling type deflection mirror is adopted, the key technical problem of the nanometer level of the surface shape error of the deflection mirror in the hard X-ray free electron laser device project is solved, the technical problem that the single-side deflection mirror meets the effective transmission of ultrafast light beams in various modes through a cooling method in various modes is solved, the independent research and development of key equipment of the hard X-ray free electron laser device project is realized, the continuous promotion of the first set of advanced light source large scientific device project in China is ensured, and the technical gap with the field of the foreign advanced light source is reduced.
Drawings
FIG. 1 is a schematic diagram of the general structure of the present invention;
fig. 2 is a schematic structural view of the cooling block.
Detailed Description
The invention will be further illustrated with reference to the following specific examples. It should be understood that these examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Further, it should be understood that various changes or modifications of the present invention may be made by those skilled in the art after reading the teaching of the present invention, and such equivalents may fall within the scope of the present invention as defined in the appended claims.
By adopting the technical scheme of the design of the deflection mirror with the multi-section cooling block, a set of high-precision deflection mirror with a plurality of modes of cooling is constructed to meet the requirement of ultrafast light beam transmission of a plurality of modes. Through the combination of various cooling modes, the surface shape error of the high-precision deflection mirror under each working condition is pertinently and effectively controlled within the corresponding nanometer level range, and the problem that the single deflection mirror structure design meets the effective transmission of ultrafast light beams in various modes is solved.
Specifically, as shown in fig. 1, the high-precision multi-section cooling type deflection mirror provided by the invention comprises a deflection mirror main body 1, wherein the front surface of the deflection mirror main body 1 is an optical surface 1-1, the top surface of the deflection mirror main body 1 is provided with a cooling groove 2, a cooling block 3 is arranged on the cooling groove 2, and liquid alloy for cooling is contained in the cooling groove 2.
According to the invention, liquid alloy is adopted for heat conduction between the cooling block 3 and the deflection mirror main body 1, and vibration generated after the cooling block 3 is introduced into a cooling medium is isolated by utilizing the liquid alloy, so that the vibration interference of the cooling block 3 on the deflection mirror main body 1 is avoided.
The cooling block 3 is divided into 5 sections, and consists of 5 sub-cooling blocks which can be independently controlled to be opened and closed, and the sub-cooling blocks are respectively defined as a sub-cooling block I3-1, a sub-cooling block II 3-2, a sub-cooling block III 3-3, a sub-cooling block IV 3-4 and a sub-cooling block V3-5. As shown in fig. 2, each of the sub cooling blocks is opened with two cooling medium flow holes 4, and a cooling medium (for example, cooling water) flows into and out of the sub cooling block through the cooling medium flow holes 4, thereby cooling the sub cooling block. The cooled sub-cooling block cools the deflection mirror body 1 through the liquid alloy. The cooling medium can flow into the sub-cooling blocks or be prevented from flowing into the sub-cooling blocks by controlling the valves of the cooling water pipeline, so that the purpose of opening or closing the sub-cooling blocks is achieved. And after the sub cooling blocks with different numbers are opened, cooling sections with different lengths are formed. For ultrafast beam pulses with different modes, according to the spot distribution and the intensity distribution of X-rays, the ultra-high precision surface shape effectively transmitted by each beam has different requirements, and the ultra-high precision surface shape has corresponding cooling length and effect. And starting a corresponding number of sub-cooling blocks according to the calculated cooling length required by the ultrafast beam pulse of different modes to obtain a cooling section with a corresponding length. And the cooling section is symmetrical in the length direction of the deflection mirror body with respect to the central position of the deflection mirror body.
In the invention, the cooling tank 2 is optimized compared with the cooling tank required by the existing cooling block, and the length of the optimized cooling tank 2 is much longer than that of the cooling tank required by the existing cooling block, so that the design space for carrying out later-stage technical performance upgrading on the high-precision multi-section cooling type deflection mirror is reserved. In this embodiment, the length of the deflecting mirror body 1 is 1000mm, and the length of the cooling groove 2 is correspondingly increased to 900 mm.
In this embodiment, the first sub-cooling block 3-1, the second sub-cooling block 3-2, the third sub-cooling block 3-3, the fourth sub-cooling block 3-4, and the fifth sub-cooling block 3-5 are collectively held in a single mechanism, and the cooling bath 2 is filled with liquid alloy. During assembly, the clamping mechanism is slowly lowered to ensure that all the sub-cooling blocks are finally soaked in the liquid alloy, and the soaking depth is 7 mm.
For ultrafast beam pulses of 6 modes in total (energy points of 7keV, 12.914keV and 15keV at an incident angle of 1.9mrad and energy points of 3keV, 5.5keV and 7keV at an incident angle of 4 mrad) at two incident angles, the following applies:
the first embodiment is as follows: turning on the third sub-cooling block 3-3 in fig. 2 and keeping the rest of the sub-cooling blocks in the off state, the cooling block 3 operates in the first cooling mode
When the cooling mode is activated, as shown in fig. 1, the cooling block 3 effectively cools the deflection mirror body 1 with a liquid alloy, thereby effectively controlling the thermal deformation of the optical surface 1-1 in the presence of ultrafast beam pulses as follows:
an incident angle is 4mrad, an energy point is 7kev ultrafast beam pulse, and the surface shape error of the optical surface 1-1 is controlled to be 0.95 nanometer;
an incident angle is 1.9mrad, an energy point is 12.4kev ultrafast beam pulse, and the surface shape error of the optical surface 1-1 is controlled at 0.6 nm;
the incident angle is 1.9mrad, the energy point is 15kev ultrafast beam pulse, and the surface shape error of the optical surface 1-1 is controlled at 0.2 nm.
Example two: turning on the second sub-cooling block 3-2, the third sub-cooling block 3-3 and the fourth sub-cooling block 3-4 in fig. 2, and keeping the rest of the sub-cooling blocks in the off state, the cooling block 3 works in the second cooling mode
When the second cooling mode is activated, as shown in fig. 1, the cooling block 3 effectively cools the deflection mirror body 1 with a liquid alloy, thereby effectively controlling the thermal deformation of the optical surface 1-1 in the presence of ultrafast beam pulses as follows:
the incident angle is 4mrad, the energy point is 5kev ultrafast beam pulse, and the surface shape error of the optical surface 1-1 is controlled at 2.58 nm.
Example three: turning on sub-cooling block one 3-1, sub-cooling block two 3-2, sub-cooling block three 3-3, sub-cooling block four 3-4 and sub-cooling block five 3-5 in fig. 2, cooling block 3 operates in cooling mode three
When the cooling mode three is activated, as shown in fig. 1, the cooling block 3 effectively cools the deflection mirror body 1 with a liquid alloy, thereby effectively controlling the thermal deformation of the optical surface 1-1 in the presence of ultrafast beam pulses as follows:
the incident angle is 4mrad, the energy point is 3kev ultrafast beam pulse, and the surface shape error of the optical surface 1-1 is controlled at 3.14 nm.
Example four: turning on sub-cooling block one 3-1, sub-cooling block three 3-3 and sub-cooling block five 3-5 in fig. 2, cooling block 3 operates in cooling mode four
When the cooling mode four is activated, as shown in fig. 1, the cooling block 3 effectively cools the deflection mirror body 1 with a liquid alloy, thereby effectively controlling the thermal deformation of the optical surface 1-1 in the presence of ultrafast beam pulses as follows:
the incident angle is 1.9mrad, the energy point is 7kev ultrafast beam pulse, and the surface shape error of the optical surface 1-1 is controlled at 3.85 nm.
Claims (4)
1. A high-precision multi-section cooling type deflection mirror is characterized by comprising a deflection mirror main body, wherein a cooling block is arranged on the deflection mirror main body, the cooling block is cooled by a cooling medium and then effectively cools the deflection mirror main body by utilizing liquid alloy, thereby effectively controlling the thermal deformation of the optical surface of the deflection mirror main body when bearing the ultrafast beam pulse, the cooling block is composed of N sub-cooling blocks, N is more than or equal to 3, each sub-cooling block can independently introduce or cut off the cooling medium, thereby independently starting and closing, all the started sub cooling blocks form a cooling section, the cooling section is symmetrical in the length direction of the deflection mirror body relative to the central position of the deflection mirror body, the cooling blocks are enabled to work in different cooling modes by starting different numbers of the sub-cooling blocks so as to adapt to the hard X-ray ultrafast beam pulses of different modes, and the cooling blocks working in different cooling modes have cooling sections with different lengths.
2. A high precision multi-segment cooled deflection mirror as claimed in claim 1, wherein the ultrafast beam pulse has a total of 6 modes of five energy points at two incident angles: energy points of 7keV, 12.914keV, 15keV at an incident angle of 1.9mrad and energy points of 3keV, 5.5keV, 7keV at an incident angle of 4mrad, then:
the cooling block is composed of a first sub-cooling block, a second sub-cooling block, a third sub-cooling block, a fourth sub-cooling block and a fifth sub-cooling block which are adjacent in sequence, and the cooling block is provided with:
feeding a cooling medium into the sub-cooling block three-way valve, opening the sub-cooling block three, and keeping the rest sub-cooling blocks in a closed state, so that the cooling block works in a cooling mode I; when the cooling mode is started, the cooling block utilizes the liquid alloy to effectively cool the deflection mirror main body, so that the thermal deformation of the optical surface under the following ultrafast beam pulses is effectively controlled:
an incident angle is 4mrad, an energy point is 7kev ultrafast beam pulse, and the surface shape error of the optical surface is controlled to be 0.95 nanometer;
the incident angle is 1.9mrad, the energy point is 12.4kev ultrafast beam pulse, and the surface shape error of the optical surface is controlled at 0.6 nm;
the incident angle is 1.9mrad, the energy point is 15kev ultrafast beam pulse, and the surface shape error of the optical surface is controlled at 0.2 nm;
cooling media are fed into the sub-cooling block II, the sub-cooling block III and the sub-cooling block four, the sub-cooling block II, the sub-cooling block III and the sub-cooling block IV are started, the other sub-cooling blocks are kept in a closed state, and then the cooling blocks work in a cooling mode II; when the second cooling mode is started, the cooling block utilizes the liquid alloy to effectively cool the deflection mirror main body, so that the thermal deformation of the optical surface under the following ultrafast beam pulses is effectively controlled:
an incident angle is 4mrad, an energy point is 5kev ultrafast beam pulse, and the surface shape error of the optical surface is controlled to be 2.58 nanometers;
introducing a cooling medium into the first sub-cooling block, the second sub-cooling block, the third sub-cooling block, the fourth sub-cooling block and the fifth sub-cooling block, and starting the first sub-cooling block, the second sub-cooling block, the third sub-cooling block, the fourth sub-cooling block and the fifth sub-cooling block, so that the cooling block works in a third cooling mode; when the cooling mode III is started, the cooling block utilizes the liquid alloy to effectively cool the deflection mirror main body, so that the thermal deformation of the optical surface under the following ultrafast beam pulses is effectively controlled:
an incident angle is 4mrad, an energy point is 3kev ultrafast beam pulse, and the surface shape error of the optical surface is controlled to be 3.14 nanometers;
feeding cooling media into the first sub-cooling block, the third sub-cooling block and the fifth sub-cooling block, and starting the first sub-cooling block, the third sub-cooling block and the fifth sub-cooling block to enable the cooling blocks to work in a fourth cooling mode; when the cooling mode IV is started, the cooling block utilizes the liquid alloy to effectively cool the deflection mirror main body, so that the thermal deformation of the optical surface under the following ultrafast beam pulses is effectively controlled:
the incident angle is 1.9mrad, the energy point is 7kev ultrafast beam pulse, and the optical surface shape error is controlled at 3.85 nm.
3. The high-precision multi-segment cooled deflection mirror according to claim 1, wherein a cooling tank is disposed on the deflection mirror body, the liquid alloy is contained in the cooling tank, the cooling block is immersed in the liquid alloy, and the length of the cooling tank is at least L/9 when the length of the deflection mirror body is L.
4. A high precision, multi-segment cooled deflection mirror as claimed in claim 3, wherein said cooling block is held in a holding mechanism, said cooling block being coupled to said cooling channel by said holding mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111281288.0A CN113889836B (en) | 2021-11-01 | 2021-11-01 | High-precision multi-section cooling type deflection mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111281288.0A CN113889836B (en) | 2021-11-01 | 2021-11-01 | High-precision multi-section cooling type deflection mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113889836A true CN113889836A (en) | 2022-01-04 |
| CN113889836B CN113889836B (en) | 2023-05-23 |
Family
ID=79014807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111281288.0A Active CN113889836B (en) | 2021-11-01 | 2021-11-01 | High-precision multi-section cooling type deflection mirror |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113889836B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115166931A (en) * | 2022-07-04 | 2022-10-11 | 上海科技大学 | Reflector cooling system |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201842899U (en) * | 2010-11-04 | 2011-05-25 | 西北工业大学 | Laser heating directional solidification device |
| CN104934278A (en) * | 2015-04-29 | 2015-09-23 | 中国科学院长春光学精密机械与物理研究所 | High-efficiency liquid metal cooling method and device of discharge electrode of EUV source |
| CN106654818A (en) * | 2016-12-22 | 2017-05-10 | 中国电子科技集团公司第十研究所 | High-power solid laser thermal management system |
| CN106711743A (en) * | 2017-03-28 | 2017-05-24 | 王淑珍 | High-power optical fiber laser and amplifier |
| CN206657952U (en) * | 2017-04-21 | 2017-11-21 | 南安市妹族智能科技有限公司 | The cooling device of disc laser gain crystal |
| CN111129919A (en) * | 2019-12-17 | 2020-05-08 | 中国科学院理化技术研究所 | High-power solid laser gain module, laser oscillator and laser amplifier |
| CN211694799U (en) * | 2020-02-24 | 2020-10-16 | 中国科学院高能物理研究所 | Vertical reflection white light mirror cooling structure for synchrotron radiation beam line |
-
2021
- 2021-11-01 CN CN202111281288.0A patent/CN113889836B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201842899U (en) * | 2010-11-04 | 2011-05-25 | 西北工业大学 | Laser heating directional solidification device |
| CN104934278A (en) * | 2015-04-29 | 2015-09-23 | 中国科学院长春光学精密机械与物理研究所 | High-efficiency liquid metal cooling method and device of discharge electrode of EUV source |
| CN106654818A (en) * | 2016-12-22 | 2017-05-10 | 中国电子科技集团公司第十研究所 | High-power solid laser thermal management system |
| CN106711743A (en) * | 2017-03-28 | 2017-05-24 | 王淑珍 | High-power optical fiber laser and amplifier |
| CN206657952U (en) * | 2017-04-21 | 2017-11-21 | 南安市妹族智能科技有限公司 | The cooling device of disc laser gain crystal |
| CN111129919A (en) * | 2019-12-17 | 2020-05-08 | 中国科学院理化技术研究所 | High-power solid laser gain module, laser oscillator and laser amplifier |
| CN211694799U (en) * | 2020-02-24 | 2020-10-16 | 中国科学院高能物理研究所 | Vertical reflection white light mirror cooling structure for synchrotron radiation beam line |
Non-Patent Citations (1)
| Title |
|---|
| COREY L.HARDIN ET AL.: "Optimizing x-ray mirror thermal performance using variable length cooling for second generation FELs", 《PROC. SPIE 9965, ADAPTIVE X-RAY OPTICS IV》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115166931A (en) * | 2022-07-04 | 2022-10-11 | 上海科技大学 | Reflector cooling system |
| CN115166931B (en) * | 2022-07-04 | 2024-01-30 | 上海科技大学 | Reflector cooling system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113889836B (en) | 2023-05-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Yumoto et al. | Focusing of X-ray free-electron laser pulses with reflective optics | |
| CN110144583B (en) | Wide-beam and adjustable-powder-feeding-angle rapid and efficient semiconductor laser cladding device | |
| DE60213187T2 (en) | Radiation source of high luminosity for EUV lithography | |
| CN113889836A (en) | High-precision multi-section cooling type deflection mirror | |
| US20140259659A1 (en) | Phased array steering for laser beam positioning systems | |
| CN108890128B (en) | Laser multi-beam composite temperature field welding device | |
| DE112009001701B4 (en) | Laser-scribing system for structuring substrates, method for structuring substrates and use of a laser-scribing system | |
| JP2000219528A (en) | Method for cutting glass substrate and device therefor | |
| CN204470793U (en) | A kind of complex foci space-time synchronous hole-drilling system | |
| CN101323053A (en) | Femtosecond laser microsphere perforating method and apparatus | |
| CZ2001216A3 (en) | Apparatus and method of generating enhanced laser beam | |
| CN110340471A (en) | Laser induced plasma auxiliary electric spark complex machining device and method under magnetic fields | |
| CN103567638A (en) | Small-caliber pipe inner wall laser bead welding device | |
| Li et al. | Stability of oxide particles under electron irradiation in a 9Cr ODS steel at 400 C | |
| KR19980702620A (en) | Electron Beam Pattern Recording Column | |
| Snigireva et al. | Diamond X-ray refractive optics | |
| De Lange et al. | Influence of intensity distribution on the meltpool and clad shape for laser cladding | |
| CN105158870A (en) | Internal-focusing high power focusing lens | |
| CN212665190U (en) | Zooming and focusing laser cutting head based on two lenses | |
| DE102023207048A1 (en) | Assembly of an optical system and method for temperature control of a mirror, especially in a microlithographic projection exposure system | |
| DE112007003748T5 (en) | Pivoting a high flux x-ray target and arranging for it | |
| BR112013030612B1 (en) | APPLIANCE FOR MANUFACTURING STEEL SHEET FOR ORIENTED GRAIN PURPOSES AND METHOD FOR MANUFACTURING STEEL PLATE FOR ORIENTED GRAIN PURPOSES | |
| DE102015212859A1 (en) | Lithography plant and method | |
| CN212371414U (en) | Optical zoom focusing lens, mechanical structure and optical structure thereof | |
| CN213560528U (en) | Laser processing device of capillary structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |